CN112504168A - Device and method for detecting perpendicularity of mirror surface of optical instrument - Google Patents
Device and method for detecting perpendicularity of mirror surface of optical instrument Download PDFInfo
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- CN112504168A CN112504168A CN202011398281.2A CN202011398281A CN112504168A CN 112504168 A CN112504168 A CN 112504168A CN 202011398281 A CN202011398281 A CN 202011398281A CN 112504168 A CN112504168 A CN 112504168A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Abstract
The invention provides a device and a method for detecting the verticality of a mirror surface of an optical instrument, wherein the device comprises the following steps: the device comprises an auto-collimation parallel light pipe, a rotary driving device and a clamping device, wherein the axis of the clamping device is superposed with the axis of the auto-collimation parallel light pipe; the clamping device fixes the instrument to be detected, so that the mirror surface of the instrument to be detected faces upwards, and the axis of the instrument to be detected is superposed with the axis of the auto-collimation collimator; the auto-collimation collimator comprises an objective lens and a reading eyepiece, and the reading eyepiece observes an image formed by the objective lens through the mirror reflection of the instrument to be detected; the rotation driving device is fixedly connected with the tail end of the instrument to be detected and drives the instrument to be detected to rotate. The invention adopts non-contact measurement to prevent the surface of the optical mirror surface from being damaged by contact measurement; the invention also reduces the high detection cost caused by using the three-coordinate measuring instrument by adopting common equipment for detection. The invention adopts full-mirror detection, and compared with the multi-point sampling data fitting detection of a three-coordinate measuring instrument, the detection method provided by the invention is closer to the actual working state and has higher detection accuracy.
Description
Technical Field
The invention relates to the field of optical instrument detection, in particular to a device and a method for detecting the verticality of a mirror surface of an optical instrument.
Background
The optical instrument with the end face mirror surface perpendicular to the reference shaft has wide application in optical detection instruments and equipment, and can be matched with a tool to perform precision detection of other angles if being applied to adjustment and detection of the mirror surface with the verticality requirement and common optical processing detection. Therefore, the method has wide application in photoelectric instrument adjustment, optical instrument calibration and inspection, optical cold processing, optical component inspection and other fields. Therefore, the accuracy of the optical instrument with the end mirror surface perpendicular to the reference axis determines the accuracy of the detection result in the application field, and therefore, a method for quickly and accurately detecting and calibrating the optical instrument with the end mirror surface perpendicular to the reference axis is very important.
The method for detecting the perpendicularity of the mirror surface of the optical instrument with the end face mirror surface perpendicular to the reference shaft is generally completed by tools such as a three-coordinate measuring instrument, a clamp tool and the like, firstly, the instrument to be detected is fixed by the clamp tool, then, the three-coordinate measuring instrument is used for detecting, and a detection result is displayed on the three-coordinate measuring instrument. And obtaining a geometric model through fitting calculation, and measuring corresponding dimensions and other geometric form and position relations. The perpendicular relation between the axis and the plane is measured, and the measuring points are reasonably arranged on the axis and the plane so as to obtain a satisfactory measuring result. The measurement result is strongly associated with the selection of the measurement point, the placement posture of the measurement tool, the object to be measured, the stability of the measurement environment and other factors. In principle, the selection of the measuring point directly influences the measuring accuracy.
The axis of the instrument to be detected is both a geometric axis and a rotation axis in the process of measuring the perpendicularity of the axial surface. When the coordinate measuring machine measures the end face perpendicular to the axis, the measured dimension is poor, so the clamping precision of the fixture tool is directly influenced.
The three-coordinate measuring instrument adopts a position measuring mode based on the spatial coordinate measurement of the sampling points, and data acquisition is carried out on a plurality of sampling points, so that the measuring precision is strongly related to the sampling data such as the sampling quantity, the sampling distribution and the like, the limitation is caused to the angle measurement, and the angle measuring precision is different due to different sizes when the geometric relation of the relevant angles of objects to be measured with different sizes is measured.
When the three-coordinate measuring instrument is used for contact measurement, the three-coordinate measuring instrument is in physical contact with the optical mirror surface, the risk of surface damage of the optical mirror surface is increased, and when the three-coordinate measuring instrument is used for non-contact measurement, the measurement precision may not meet the requirement and the detection cost is high.
Disclosure of Invention
The invention provides the following device and method for detecting the perpendicularity of the mirror surface of the optical instrument, aiming at solving the problems existing when the conventional three-coordinate measuring instrument measures the perpendicularity of the mirror surface of the optical instrument.
In order to achieve the purpose, the invention adopts the following specific technical scheme:
optical instrument mirror surface straightness detection device that hangs down includes: the device comprises an auto-collimation parallel light pipe, a rotary driving device and a clamping device, wherein the axis of the clamping device is superposed with the axis of the auto-collimation parallel light pipe; the clamping device fixes the instrument to be detected, so that the mirror surface of the instrument to be detected faces upwards, and the axis of the instrument to be detected is superposed with the axis of the auto-collimation collimator; the auto-collimation collimator comprises an objective lens and a reading eyepiece, and the reading eyepiece observes an image formed by the objective lens through the mirror reflection of the instrument to be detected; the rotation driving device is fixedly connected with the tail end of the instrument to be detected and drives the instrument to be detected to rotate.
Preferably, the clamping device is a hole-opening positioning tool or an adjustable V-shaped tool matched with the instrument to be detected.
Preferably, the autocollimation parallel light pipe is connected with the imaging sensor; the imaging sensor automatically collects the objective lens imaging observed by the reading ocular lens.
Preferably, the self-collimating parallel light pipe, the rotary driving device and the clamping device are all fixed on the platform through a bracket.
Preferably, an adjusting unit is arranged on the bracket for fixing the auto-collimation parallel light pipe and is used for adjusting the distance between the auto-collimation parallel light pipe and the mirror surface of the instrument to be detected.
The method for detecting the verticality of the mirror surface of the optical instrument comprises the following steps:
s1, fixing the instrument to be detected through a clamping device, so that the mirror surface of the instrument to be detected faces upwards and the axis of the instrument to be detected coincides with the axis of the auto-collimation parallel light pipe;
s2, operating a rotary driving device, wherein the rotary driving device drives the instrument to be detected to rotate in the clamping device;
s3, adjusting the distance between the autocollimation parallel light tube and the instrument to be detected, and enabling the image offset formed by the mirror reflection of the objective lens observed by the reading eyepiece through the instrument to be detected to be minimum;
s4, after the instrument to be detected rotates for a circle, an image formed by the mirror reflection of the objective lens observed by the reading eyepiece through the instrument to be detected forms an approximate closed graph, and the maximum offset d is determined through the approximate closed graph;
and S5, calculating the perpendicularity theta between the mirror surface of the instrument to be measured and the axis of the instrument to be measured by taking the focal length of the auto-collimation collimator tube as F and using a formula theta as arctan (d/F).
Preferably, the maximum offset d is approximately half of the connecting line of the farthest two end points of the closed figure or approximately the radius of a fitting circle of the closed figure.
The invention can obtain the following technical effects:
(1) and non-contact measurement is adopted, so that the surface of the optical mirror surface is prevented from being damaged due to contact measurement.
(2) The detection is carried out by adopting common equipment, so that the high detection cost caused by using a three-coordinate measuring instrument is reduced.
(3) Compared with the multi-point sampling data fitting detection of a three-coordinate measuring instrument, the detection method provided by the invention is closer to the actual working state and has higher detection accuracy by adopting full-mirror detection.
Drawings
FIG. 1 is a schematic three-dimensional structure according to an embodiment of the invention;
fig. 2 is a schematic diagram of a two-dimensional structure according to an embodiment of the invention.
Wherein the reference numerals include: the device comprises a platform 1, an auto-collimation collimator 2, a clamping device 3, a rotary driving device 4 and an instrument mirror surface 5 to be detected.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention.
As shown in fig. 1 and 2, the device for detecting the perpendicularity of the mirror surface of an optical instrument provided by the embodiment of the present invention includes: the device comprises a self-collimating collimator 2, a rotary driving device 4 and a clamping device 3, wherein the axis of the clamping device is superposed with the axis of the self-collimating collimator; fixing the instrument to be detected by the clamping device 3, so that the mirror surface 5 of the instrument to be detected faces upwards and the axis of the instrument to be detected is superposed with the axis of the auto-collimation collimator 2; the autocollimation collimator 2 comprises an objective lens and a reading eyepiece, and the reading eyepiece observes an image formed by the objective lens reflected by the mirror surface 5 of the instrument to be detected; the rotation driving device 4 is fixedly connected with the tail end of the instrument to be detected and drives the instrument to be detected to rotate.
In one embodiment of the present invention, the holding device 3 is a hole-opening positioning tool matched with the instrument to be detected, and the tail end of the instrument to be detected is inserted into the hole and matched with the inner wall of the hole through a bearing.
In one embodiment of the present invention, the holding device 3 is an adjustable V-shaped fixture, and the instrument to be tested is placed in the V-shaped groove and fixed by a cover plate.
In one embodiment of the invention, the autocollimation collimator 2 is connected with an imaging sensor, the imaging sensor automatically collects objective lens imaging observed by a reading eyepiece, the collected image is calculated and processed, and the perpendicularity theta is obtained by substituting a formula.
In one embodiment of the present invention, the autocollimation collimator 2, the rotation driving device 4 and the holding device 3 are fixed on the platform 1 through a bracket, and several elements are fixed on the platform 1 to improve the stability of the whole device.
In one embodiment of the present invention, an adjusting unit is disposed on the bracket for fixing the auto-collimation parallel light pipe 2, and the distance between the auto-collimation parallel light pipe 2 and the mirror surface 5 of the instrument to be detected can be adjusted by the adjusting unit. The adjusting unit can be a connecting structure between the auto-collimation parallel light pipe 2 and the bracket, the adjustable connection is realized by adjusting the tightness, and the distance between the auto-collimation parallel light pipe 2 and the mirror surface 5 of the instrument to be detected is changed. The adjusting unit can also be a part of the bracket, the auto-collimation parallel light pipe 2 is fixed with the bracket, and the height of the bracket is adjusted through the adjusting unit, so that the distance between the auto-collimation parallel light pipe 2 and the mirror surface 5 of the instrument to be detected is adjusted. The autocollimation parallel light pipe 2 can be adjusted according to different instrument mirror surfaces 5 to be detected, so that the instrument mirror surfaces 5 to be detected are positioned at the focus of the objective lens of the autocollimation parallel light pipe 2.
The following detailed description of the present invention will be made with reference to fig. 1 and 2:
a method for detecting the verticality of a mirror surface of an optical instrument comprises the following steps:
s1, fixing the instrument to be detected through the clamping device 3, and enabling the mirror surface 5 of the instrument to be detected to face upwards and the axis of the instrument to be detected to coincide with the axis of the auto-collimation parallel light tube 2;
s2, operating the rotary driving device 4, and driving the instrument to be detected to rotate in the clamping device 3 by the rotary driving device 4;
s3, adjusting the distance between the autocollimation parallel light tube 2 and the instrument to be detected, so that the image offset formed by the reflection of the objective lens observed by the reading eyepiece through the mirror surface 5 of the instrument to be detected is the minimum;
s4, after the instrument to be detected rotates for a circle, an image formed by the reflection of the objective lens observed by the reading eyepiece through the mirror surface 5 of the instrument to be detected forms an approximate closed graph, and the maximum offset d is determined through the approximate closed graph;
and S5, calculating the perpendicularity theta between the mirror surface 5 of the instrument to be measured and the axis of the instrument to be measured by taking the focal length of the auto-collimation collimator 2 as F and using a formula theta as arctan (d/F).
In one embodiment of the present invention, the maximum offset d is approximately half of the connecting line of the farthest two end points of the closed figure or approximately the radius of the fitting circle of the closed figure.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
While embodiments of the present invention have been shown and described above, it should be understood that the above embodiments are exemplary and should not be taken as limiting the invention. Variations, modifications, substitutions and alterations of the above-described embodiments may be made by those of ordinary skill in the art without departing from the scope of the present invention.
The above embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.
Claims (7)
1. Optical instrument mirror surface straightness detection device that hangs down, its characterized in that includes: the device comprises an auto-collimation parallel light pipe, a rotary driving device and a clamping device, wherein the axis of the clamping device is superposed with the axis of the auto-collimation parallel light pipe; the clamping device fixes the instrument to be detected, so that the mirror surface of the instrument to be detected faces upwards, and the axis of the instrument to be detected is superposed with the axis of the auto-collimation collimator; the auto-collimation collimator comprises an objective lens and a reading eyepiece, and the reading eyepiece observes an image formed by the objective lens through the mirror surface reflection of the instrument to be detected; the rotation driving device is fixedly connected with the tail end of the instrument to be detected and drives the instrument to be detected to rotate.
2. The apparatus of claim 1, wherein the holding device is a positioning fixture or an adjustable V-shaped fixture for opening holes of the apparatus to be inspected.
3. The apparatus for detecting mirror perpendicularity of an optical instrument as claimed in claim 1, wherein the autocollimation collimator is connected with an imaging sensor; the imaging sensor automatically collects the objective lens image observed by the reading eyepiece.
4. The apparatus of claim 1, wherein the collimating collimator, the rotation driving device and the holding device are fixed on the platform by a bracket.
5. The apparatus for detecting the verticality of a mirror surface of an optical instrument as claimed in claim 4, wherein an adjusting unit is disposed on the bracket for fixing the collimating collimator for adjusting the distance between the collimating collimator and the mirror surface of the instrument to be detected.
6. The method for detecting the verticality of the mirror surface of the optical instrument is characterized by comprising the following steps of:
s1, fixing the instrument to be detected through a clamping device, so that the mirror surface of the instrument to be detected faces upwards and the axis of the instrument to be detected coincides with the axis of the auto-collimation parallel light pipe;
s2, operating a rotary driving device, wherein the rotary driving device drives the instrument to be detected to rotate in the clamping device;
s3, adjusting the distance between the autocollimation parallel light tube and the instrument to be detected, and enabling the image offset formed by the mirror reflection of the objective lens observed by the reading eyepiece through the instrument to be detected to be minimum;
s4, after the instrument to be detected rotates for a circle, an image formed by the mirror reflection of the objective lens observed by the reading eyepiece through the instrument to be detected forms an approximate closed graph, and the maximum offset d is determined through the approximate closed graph;
and S5, calculating the perpendicularity theta between the mirror surface of the instrument to be measured and the axis of the instrument to be measured by taking the focal length of the auto-collimation collimator tube as F and using a formula theta as arctan (d/F).
7. The method for detecting the perpendicularity of a mirror surface of an optical instrument as claimed in claim 6, wherein the maximum deviation d is a half of a connecting line between two farthest end points of the approximate closed figure or a radius of a fitting circle of the approximate closed figure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011398281.2A CN112504168A (en) | 2020-12-03 | 2020-12-03 | Device and method for detecting perpendicularity of mirror surface of optical instrument |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011398281.2A CN112504168A (en) | 2020-12-03 | 2020-12-03 | Device and method for detecting perpendicularity of mirror surface of optical instrument |
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| Publication Number | Publication Date |
|---|---|
| CN112504168A true CN112504168A (en) | 2021-03-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011398281.2A Pending CN112504168A (en) | 2020-12-03 | 2020-12-03 | Device and method for detecting perpendicularity of mirror surface of optical instrument |
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| CN (1) | CN112504168A (en) |
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2020
- 2020-12-03 CN CN202011398281.2A patent/CN112504168A/en active Pending
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