CN112433140A - Testing device, testing module and control method - Google Patents
Testing device, testing module and control method Download PDFInfo
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- CN112433140A CN112433140A CN202110107453.4A CN202110107453A CN112433140A CN 112433140 A CN112433140 A CN 112433140A CN 202110107453 A CN202110107453 A CN 202110107453A CN 112433140 A CN112433140 A CN 112433140A
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- 238000012360 testing method Methods 0.000 title claims abstract description 102
- 238000000034 method Methods 0.000 title claims abstract description 27
- 239000000523 sample Substances 0.000 claims abstract description 182
- 238000001514 detection method Methods 0.000 claims abstract description 60
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- 230000005540 biological transmission Effects 0.000 claims description 10
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 9
- 230000033001 locomotion Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 239000010720 hydraulic oil Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/08—Means for indicating or recording, e.g. for remote indication
- G01L19/12—Alarms or signals
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
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Abstract
The invention discloses a testing device, a testing module and a control method, relating to the technical field of detection, wherein the testing device comprises a power probe and a detection probe, and also comprises: the shell is of a hollow structure to form a pressure cavity, a medium is injected into the pressure cavity, and at least parts of the power supply probe and the detection probe are positioned in the pressure cavity and are in contact with the medium; a piston disposed in the pressure chamber and in sliding contact with an inner wall of the housing; the driver is used for driving the piston to reciprocate along the axial direction of the pressure cavity so as to drive the medium and cause the power probe and the detection probe to reciprocate; the controller is electrically connected with the driver to control the driving stroke of the driver; the pressure sensor is arranged on the shell and at least partially extends into the pressure cavity, and the pressure sensor is electrically connected with the controller to feed back the pressure value in the pressure cavity. The invention can solve the technical problem that a plurality of probes cannot keep consistent pressure in the prior art.
Description
Technical Field
The invention relates to the technical field of semiconductor laser detection, in particular to a testing device, a testing module and a control method.
Background
The chip, the bar or the planar packaging device of the semiconductor laser commonly used at present needs to be fixed by a vacuum adsorption base in the detection process, and necessary test or reliability detection work is carried out in a mode of pressing a spring probe downwards above the chip, the bar or the planar packaging device.
For example, the main test content for a semiconductor laser is the relationship between optical power-current (L-I) and voltage-current (V-I), so the commonly used detection probe is a four-probe or multi-probe module with a spring inside, wherein the four-probe includes a positive power supply probe, a negative power supply probe, a positive detection probe and a negative detection probe, as in patent applications No. 201310581945.2 and No. 201910443870.9, the pressure of the probe changes with the degree of spring shrinkage, the larger the spring compression, the larger the probe pressure, and therefore the multiple probes cannot maintain consistent pressure.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide a testing device, aiming at solving the technical problem that a plurality of probes cannot keep consistent pressure all the time in the prior art.
In order to achieve the purpose, the invention is realized by the following technical scheme: a testing device comprises a power probe and a detection probe, and further comprises:
the shell is of a hollow structure to form a pressure cavity, a medium is injected into the pressure cavity, and at least parts of the power supply probe and the detection probe are positioned in the pressure cavity and are in contact with the medium;
a piston disposed in the pressure chamber and in sliding contact with an inner wall of the housing;
a driver for driving the piston to reciprocate along the axial direction of the pressure cavity so as to drive the medium and cause the power probe and the detection probe to reciprocate;
the controller is electrically connected with the driver to control the driving stroke of the driver;
the pressure sensor is arranged on the shell and at least partially extends into the pressure cavity, and the pressure sensor is electrically connected with the controller to feed back the pressure value in the pressure cavity.
Compared with the prior art, the invention has the beneficial effects that: when the testing device disclosed by the invention works, the driver drives the piston to move along the axial direction of the pressure cavity when working so as to compress the medium in the pressure cavity, and thus the power supply probe and the detection probe can be driven to move towards one side far away from the pressure cavity simultaneously; in the testing device, because the medium has the same external pressure, the areas of the stress parts of the power probes and the detection probes are the same, and the medium applies equal pressure to each probe after being compressed, the pressure applied by the probes to the device to be tested is ensured to be consistent all the time.
According to one aspect of the above technical scheme, the housing comprises a housing body and a probe base, the probe base is fixedly connected to one side of the opening of the housing body, and the power probe and the detection probe are both arranged in the probe base in a penetrating manner and extend into the pressure cavity.
According to one aspect of the above technical scheme, the power supply probe and the detection probe are respectively in sliding fit with the probe base through a limiting sleeve so as to prevent the power supply probe and the detection probe from falling off the probe base.
According to one aspect of the above technical solution, the driver includes a driver body and a telescopic rod, and a head of the telescopic rod passes through the housing, extends into the pressure chamber, and is fixedly provided with the piston.
According to one aspect of the technical scheme, a transmission hole is formed in one side, far away from the power supply probe and the detection probe, of the shell, the telescopic rod penetrates through the transmission hole and extends into the pressure cavity, a flange cover used for closing the transmission hole is arranged at the end portion of the shell, and the driver body is fixedly connected to the flange cover.
According to one aspect of the above technical scheme, the housing is provided with wire seats which correspond to the power probes and the detection probes one to one and are electrically connected.
Based on the same technical problem, the present invention further provides a control method of a testing apparatus, which is used for controlling the testing apparatus in the above technical solution:
when the medium is an air medium, the control method comprises the following steps:
setting a target value in the pressure chamber;
the pressure sensor acquires the air pressure value of the compressed air in the pressure cavity and feeds back the air pressure value data to the controller;
comparing the air pressure value with the target value, and correspondingly controlling the driving stroke of the driver by the controller;
or, when the medium is a liquid medium, the control method includes the steps of:
setting a target value in the pressure chamber;
the pressure sensor acquires a hydraulic value of the compressed liquid in the pressure cavity and feeds back the hydraulic value data to the controller;
and comparing the hydraulic pressure value with the target value, and correspondingly controlling the driving stroke of the driver by the controller.
Based on the same technical problem, the invention also provides a test module, which comprises a first test device and a plurality of second test devices, wherein the first test device comprises the shell, the piston and the driver in the technical scheme;
the second testing device comprises the shell, the piston, the power probe, the detection probe and the pressure sensor in the technical scheme;
the force bearing end of the pressure cavity in the first testing device is connected with the force applying end of the pressure cavity in the second testing device through a pipeline.
According to one aspect of the above technical solution, the first testing device and the second testing device are connected through a mounting plate, and the plurality of second testing devices are located on the same horizontal plane.
Based on the same technical problem, the present invention further provides a control method of a test module, which is used for controlling the test module in the above technical scheme:
when the medium in the first testing device is an air medium or a liquid medium, the control method comprises the following steps:
setting a target value in a pressure cavity in the second testing device;
the plurality of pressure sensors respectively acquire the pressure value of the compressed gas or liquid in the pressure cavity in each second testing device, and the average value and the variance are calculated and compared through the controller; if the variance discrete type is larger, prompting the inclination angle deviation of the test module and giving an alarm; if the variance discreteness is smaller than a set target value, feeding back pressure average value data to the controller;
and comparing the pressure value with the target value, and correspondingly controlling the driving stroke of the driver by the controller.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a schematic view of a testing apparatus under a first viewing angle according to a first embodiment of the present invention;
FIG. 2 is a cross-sectional view of a testing device according to a first embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a testing device under a second viewing angle according to a first embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a probe base and a probe according to a first embodiment of the present invention;
FIG. 5 is a schematic diagram of a test module according to a third embodiment of the present invention
The figure elements are illustrated in symbols:
the detection device comprises a shell 10, a shell body 11, a first power probe lead seat 11a, a second power probe lead seat 11b, a first detection probe lead seat 11c, a second detection probe lead seat 11d, a transmission hole 11e, an air vent 11f, a probe base 12, a pressure cavity 13, a flange cover 15, a first power probe 20, a first power probe limit sleeve 20a, a second power probe 21, a second power probe limit sleeve 21a, a first detection probe 22, a first detection probe limit sleeve 22a, a second detection probe 23, a second detection probe limit sleeve 23a, a piston 30, a driver 40, a driver body 41, an expansion rod 42, a controller 50 and a pressure sensor 60;
a first testing device 100, a second testing device 200, a pipeline 300, and a mounting plate 400.
Detailed Description
In order to make the objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. Several embodiments of the invention are presented in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. As used herein, the terms "vertical," "horizontal," "left," "right," "up," "down," and the like are used for descriptive purposes only and not for purposes of indicating or implying that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the invention.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "fixed," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1-4, a first embodiment of the present invention provides a testing apparatus for testing a semiconductor laser chip, a bar or a planar package device, the testing apparatus includes a housing 10, a first power probe 20, a second power probe 21, a first detection probe 22 and a second detection probe 23 slidably connected to the housing 10, wherein the two power probes and the two detection probes are respectively disposed in a crossing manner;
the shell 10 is a hollow structure to form a pressure chamber 13, a medium is injected into the pressure chamber 13, for example, the medium is an air medium, and at least parts of the power supply probe and the detection probe are positioned in the pressure chamber 13 and are in contact with the medium; it will be appreciated by those skilled in the art that in other embodiments, the medium in the pressure chamber 13 may be a liquid medium, such as pressure oil or the like;
the piston 30 is provided in the pressure chamber 13 and is in sliding contact with the inner wall of the housing 10;
the driver 40 is used for driving the piston 30 to reciprocate along the axial direction of the pressure cavity 13 so as to drive the medium and cause the power probe and the detection probe to reciprocate;
the controller 50 is electrically connected to the driver 40 to control the driving stroke of the driver 40;
the pressure sensor 60 is disposed on the housing 10 and at least partially extends into the pressure chamber 13, and the pressure sensor 60 is electrically connected to the controller 50 for feeding back a pressure value in the pressure chamber 13.
In the specific operation of the testing device shown in this embodiment, when the driver 40 operates, the piston 30 is driven to move along the axial direction of the pressure chamber 13 to compress the air in the pressure chamber 13, so as to simultaneously drive the first power probe 20, the second power probe 21, the first detection probe 22 and the second detection probe 23 to move towards the side away from the pressure chamber 13; when the end of the probe contacts the surface of the semiconductor laser chip, the first power probe 20 and the second power probe 21 output voltage or current to the semiconductor laser chip, and the first detection probe 22 and the second detection probe 23 are used for detecting whether the semiconductor laser chip has voltage or current, so as to determine whether the internal circuit of the semiconductor laser chip is normal; in the testing device shown in the invention, because at least part of the probes are positioned in the pressure cavity 13, the air is compressed and then applies equal pressure to each probe, thereby ensuring that the pressure applied by the plurality of probes to the semiconductor laser is consistent all the time.
In this embodiment, in order to facilitate assembling the testing device, the housing 10 includes a housing body 11 and a probe base 12, the probe base 12 is fixedly connected to one side of an opening (not shown) of the housing body 11, the first power probe 20, the second power probe 21, the first detection probe 22 and the second detection probe 23 are all disposed in the probe base 12 and extend into the pressure chamber 13, and a certain gap should be formed between the probes and the probe base 12 to ensure that the probes can slide in the probe base 12 in a reciprocating manner.
Further, in order to avoid the separation of the probe from the probe base 12, the first power probe 20 is slidably engaged with the probe base 12 through the first power probe stop collar 20a, the second power probe 21 is slidably engaged with the probe base 12 through the second power probe stop collar 21a, the first detection probe 22 is slidably engaged with the probe base 12 through the first detection probe stop collar 22a, and the second detection probe 23 is slidably engaged with the probe base 12 through the second detection probe stop collar 23 a; the probe is in sliding fit with the probe base 12 through the corresponding limiting sleeve, so that the probe can be prevented from being separated from the probe base 12 outwards or inwards.
Since the driver 40 is used to drive the piston 30 to reciprocate, in the present embodiment, the driver 40 includes a driver body 41 and a telescopic rod 42, and a head of the telescopic rod 42 protrudes into the pressure chamber 13 through the housing 10 and is fixed to the piston 30. Meanwhile, in order to facilitate installation of the driver 40, a transmission hole 11e is formed in the side of the housing 10 away from the power supply probe and the detection probe, the telescopic rod 42 penetrates through the transmission hole 11e and extends into the pressure chamber 13, a flange cover 15 for closing the transmission hole 11e is arranged at the end of the housing 10, and the driver body 41 is fixedly connected to the flange cover 15. When the driver body 41 works to drive the telescopic rod 42 to extend or retract, the telescopic rod 42 drives the piston 30 to reciprocate, and the piston 30 can compress or expand air in the pressure chamber 13, and finally drive the probe to reciprocate.
In this embodiment, the housing 10 is provided with a first power probe wire holder 11a connected to the first power probe 20, the housing 10 is provided with a second power probe wire holder 11b connected to the second power probe 21, the housing 10 is provided with a first detection probe wire holder 11c connected to the first detection probe 22, and the housing 10 is provided with a second detection probe wire holder 11d connected to the second detection probe 23; for example, the probe is connected with the detection seat through a metal wire, and the length of the wire should be larger than the movement stroke of the probe so as to avoid tearing off the wire or the joint of the wire when the probe moves; the positive electrode and the negative electrode of a power supply are respectively inserted into the first power probe lead seat 11a and the second power probe lead seat 11b to supply power to the first power probe 20 and the second power probe 21; the first and second probing probe wire holders 11c and 11d can facilitate the derivation of the test signals detected by the first and second probing probes 22 and 23.
In this embodiment, a vent hole 11f may be formed through a side wall of the housing 10, and the vent hole 11f is located at a middle position in the axial direction of the housing 10; in the initial state, the driver body 41 controls the telescopic rod 42 and the piston 30 to be located at the top position, at this time, the air pressure inside the pressure chamber 13 is communicated with the external atmosphere and keeps pressure balance, and the probe is in a static state and has no pressure to the outside; the vent hole 11f is gradually closed in the process that the piston 30 moves downwards continuously, and the air in the space below the vent hole 11f in the pressure chamber 13 is gradually compressed in the process that the piston 30 moves downwards continuously; and at this time, the upper portion of the pressure chamber 13 is communicated with the external atmosphere through the vent hole 11f and pressure balance is maintained, thereby facilitating the downward movement of the piston 30. In this embodiment, the vent hole 11f is provided in the housing 10, so that the resistance to the movement of the piston 30 can be reduced, thereby facilitating the model selection of the actuator 40.
A second embodiment of the present invention provides a control method of a test apparatus for controlling the test apparatus shown in the first embodiment, the control method including, when the medium is an air medium, the steps of:
s101, setting a target value in the pressure cavity;
s102, the pressure sensor acquires the air pressure value of the compressed air in the pressure cavity and feeds back the air pressure value data to the controller;
s103, comparing the air pressure value with the target value, and controlling the driving stroke of the driver correspondingly by the controller;
in step S103, when the pressure value in the pressure chamber is lower than the target value, the controller outputs a signal to control the driver to drive the telescopic rod to extend, so as to push the piston to move downward to compress the gas, thereby increasing the pressure in the pressure chamber and increasing the downward pressure of the probe.
When the pressure value in the pressure cavity is larger than a set value, the controller outputs a signal to control the driver to drive the telescopic rod to shorten, push the piston to move upwards to expand the gas, further reduce the pressure in the pressure cavity and reduce the downward pressure of the probe.
By the control method of the testing device shown in the embodiment, the pressure of the compressed gas applied to each probe in the device is the same, so that the pressure difference value between the probes can be automatically balanced in real time, and the probes in the same device can output the same pressure outwards.
Or, when the medium is a liquid medium, the control method includes the steps of:
s201, setting a target value in the pressure cavity;
s202, the pressure sensor acquires a hydraulic value of the compressed liquid in the pressure cavity and feeds back the hydraulic value data to the controller;
and S203, comparing the hydraulic pressure value with the target value, and correspondingly controlling the driving stroke of the actuator by the controller.
In step S203, when the hydraulic pressure value in the pressure chamber is lower than the target value, the controller outputs a signal to control the driver to drive the telescopic rod to extend, so as to push the piston to move downward to compress the liquid, thereby increasing the pressure in the pressure chamber and increasing the downward pressure of the probe.
When the hydraulic pressure value in the pressure cavity is larger than the target value, the controller outputs a signal to control the driver to drive the telescopic rod to shorten, push the piston to move upwards to expand the liquid, further reduce the pressure in the pressure cavity and reduce the downward pressure of the probe.
By the control method of the testing device shown in the embodiment, the pressure of the compressed liquid applied to each probe in the device is the same, so that the pressure difference value between the probes can be automatically balanced in real time, and the probes in the same device can output the same pressure outwards.
Referring to fig. 5, a third embodiment of the present invention provides a test module, which includes a first test apparatus 100 and a plurality of second test apparatuses 200, wherein the first test apparatus 100 includes a housing, a piston and a driver of the test apparatus of the first embodiment;
the second testing device 200 comprises the housing, the piston, the power probe, the detection probe and the pressure sensor of the testing device in the first embodiment;
the force-bearing end of the pressure chamber in the first testing device 100 is connected to the force-applying end of the pressure chamber in the second testing device 200 by a conduit 300.
Wherein the first testing device 100 and the second testing device 200 are connected by a mounting plate, and a plurality of the second testing devices 200 are located on the same horizontal plane.
In the implementation process of this embodiment, in the initial state, the driver controls the telescopic rod and the piston to be located at the initial position, at this time, the air pressure in the pressure cavity in the first testing device 100 is balanced with the external atmospheric pressure, the internal and external pressures of the probe in the second testing device 200 are balanced, and there is no external pressure. When the probe needs to apply pressure to the outside, the controller inputs a set pressure value, the controller controls the driver to drive the telescopic rod in the first testing device 100 to extend, the compressed gas through pipeline 300 is conveyed to each second testing device 200, gas in the pressure cavity in the second testing device 200 is compressed, and the pressure is uniformly applied to the surface of each probe. The probe motion ultimately applies pressure on the underlying chip, bar or planar package device carrier.
In other embodiments, the pressure chamber in the first testing device 100 and the pressure chamber in the second testing device 200 may be filled with a liquid medium, such as hydraulic oil or the like.
A fourth embodiment of the present invention provides a control method for a test module, where the control method is used to control the test module described in the third embodiment:
when the medium in the first testing device is an air medium or a liquid medium, the control method comprises the following steps:
s301, setting a target value in a pressure cavity in the second testing device;
s302, the pressure sensors respectively acquire the pressure values of the compressed gas or liquid in the pressure cavity in each second testing device, and the average value and the variance are calculated and compared through the controller; if the variance discrete type is larger, prompting the inclination angle deviation of the test module and giving an alarm; if the variance discreteness is smaller than a set target value, feeding back pressure average value data to the controller;
and S303, comparing the pressure value with the target value, and correspondingly controlling the driving stroke of the driver by the controller.
In step S303, when the pressure value in the pressure chamber is lower than the target value, the controller outputs a signal to control the driver to drive the telescopic rod to extend, so as to push the piston to move downward to compress the gas or the liquid, thereby increasing the pressure in the pressure chamber and increasing the downward pressure of the probe.
When the pressure value in the pressure cavity is larger than the target value, the controller outputs a signal to control the driver to drive the telescopic rod to shorten, push the piston to move upwards to expand gas or liquid, further reduce the pressure in the pressure cavity, and reduce the downward pressure of the probe.
By the control method of the testing device shown in the embodiment, the pressure of the compressed gas or liquid applied to each probe in the plurality of devices in the module is the same, so that the pressure difference value between the probes can be automatically balanced in real time, and the probes in the plurality of devices in the same module can output the same pressure outwards.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, various changes and modifications can be made without departing from the spirit of the invention, and these changes and modifications are all within the scope of the invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. A kind of testing device, including power probe and detection probe, characterized by that, the said testing device also includes:
the shell is of a hollow structure to form a pressure cavity, a medium is injected into the pressure cavity, and the power supply probe and the detection probe are at least partially positioned in the pressure cavity and are in contact with the medium;
a piston disposed in the pressure chamber and in sliding contact with an inner wall of the housing;
a driver for driving the piston to reciprocate along the axial direction of the pressure cavity so as to drive the medium and cause the power probe and the detection probe to reciprocate;
the controller is electrically connected with the driver to control the driving stroke of the driver;
the pressure sensor is arranged on the shell and at least partially extends into the pressure cavity, and the pressure sensor is electrically connected with the controller to feed back the pressure value in the pressure cavity.
2. The test device of claim 1, wherein: the shell comprises a shell body and a probe base, the probe base is fixedly connected to one side of an opening of the shell body, and the power supply probe and the detection probe are arranged in the probe base in a penetrating mode and extend into the pressure cavity.
3. The test device of claim 2, wherein: the power supply probe and the detection probe are respectively in sliding fit with the probe base through a limiting sleeve so as to prevent the power supply probe and the detection probe from being separated from the probe base.
4. The test device of claim 1, wherein: the driver comprises a driver body and a telescopic rod, and the head of the telescopic rod penetrates through the shell to extend into the pressure cavity and is fixedly provided with the piston.
5. The test device of claim 4, wherein: the shell is provided with a transmission hole at one side far away from the power supply probe and the detection probe, the telescopic rod penetrates through the transmission hole and extends into the pressure cavity, a flange cover used for sealing the transmission hole is arranged at the end part of the shell, and the driver body is fixedly connected to the flange cover.
6. The test device of claim 1, wherein: and the shell is provided with a wire seat which corresponds to the power probes and the detection probes one to one and is electrically connected with the power probes and the detection probes.
7. A test module is characterized in that: comprising a first test device and a number of second test devices, the first test device comprising the housing, the piston and the drive of any one of claims 1-6;
the second testing device comprises the housing of any one of claims 1-6, a piston, a power probe, a detection probe, and a pressure sensor;
the force bearing end of the pressure cavity in the first testing device is connected with the force applying end of the pressure cavity in the second testing device through a pipeline.
8. The test module of claim 7, wherein: the first testing device and the second testing device are connected through a mounting plate, and the second testing devices are located on the same horizontal plane.
9. A control method of a test apparatus, characterized by controlling the test apparatus of claim 1:
when the medium is an air medium, the control method comprises the following steps:
setting a target value in the pressure chamber;
the pressure sensor acquires the air pressure value of the compressed air in the pressure cavity and feeds back the air pressure value data to the controller;
comparing the air pressure value with the target value, and correspondingly controlling the driving stroke of the driver by the controller;
or, when the medium is a liquid medium, the control method includes the steps of:
setting a target value in the pressure chamber;
the pressure sensor acquires a hydraulic value of the compressed liquid in the pressure cavity and feeds back the hydraulic value data to the controller;
and comparing the hydraulic pressure value with the target value, and correspondingly controlling the driving stroke of the driver by the controller.
10. A method for controlling a test module according to claim 7, characterized by controlling the test module:
when the medium in the first testing device is an air medium or a liquid medium, the control method comprises the following steps:
setting a target value in a pressure cavity in the second testing device;
the plurality of pressure sensors respectively acquire the pressure value of the compressed gas or liquid in the pressure cavity in each second testing device, and the average value and the variance are calculated and compared through the controller; if the variance discrete type is larger, prompting the inclination angle deviation of the test module and giving an alarm; if the variance discreteness is smaller than a set target value, feeding back pressure average value data to the controller;
and comparing the pressure value with the target value, and correspondingly controlling the driving stroke of the driver by the controller.
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