CN112414906A - Detection device for concentration of particulate matter in liquid medicine and liquid change control method - Google Patents
Detection device for concentration of particulate matter in liquid medicine and liquid change control method Download PDFInfo
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- CN112414906A CN112414906A CN202011140124.1A CN202011140124A CN112414906A CN 112414906 A CN112414906 A CN 112414906A CN 202011140124 A CN202011140124 A CN 202011140124A CN 112414906 A CN112414906 A CN 112414906A
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- 239000007788 liquid Substances 0.000 title claims abstract description 268
- 239000003814 drug Substances 0.000 title claims abstract description 90
- 238000000034 method Methods 0.000 title claims abstract description 67
- 238000001514 detection method Methods 0.000 title claims abstract description 43
- 230000008859 change Effects 0.000 title claims description 13
- 239000013618 particulate matter Substances 0.000 title abstract description 16
- 230000008569 process Effects 0.000 claims abstract description 54
- 230000003287 optical effect Effects 0.000 claims abstract description 48
- 239000004065 semiconductor Substances 0.000 claims abstract description 23
- 239000002245 particle Substances 0.000 claims description 22
- 230000000903 blocking effect Effects 0.000 claims description 21
- 238000005070 sampling Methods 0.000 claims description 9
- 238000012545 processing Methods 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 abstract description 11
- 238000005259 measurement Methods 0.000 description 11
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 239000000243 solution Substances 0.000 description 10
- 239000000126 substance Substances 0.000 description 6
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- 239000012530 fluid Substances 0.000 description 3
- 238000005393 sonoluminescence Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/075—Investigating concentration of particle suspensions by optical means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N2015/0687—Investigating concentration of particle suspensions in solutions, e.g. non volatile residue
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- General Health & Medical Sciences (AREA)
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Abstract
The invention discloses a detection device for the concentration of particulate matters in liquid medicine and semiconductor process equipment, wherein the detection device is used for detecting the concentration of the particulate matters in the liquid medicine in a process tank, and comprises a liquid inlet pipe, a liquid outlet pipe and a detection assembly; the detection assembly comprises a first light-blocking shell, an ultrasonic transmitter and optical signal acquisition equipment, wherein the first light-blocking shell is communicated with the process tank through a liquid inlet pipe and a liquid outlet pipe and forms a liquid medicine circulation loop; the optical signal acquisition equipment is arranged on the outer side wall of the first light-blocking shell and corresponds to the light-transmitting area, and the ultrasonic transmitter is arranged on the outer side wall of the first light-blocking shell; the ultrasonic transmitter is used for transmitting ultrasonic waves into the first light-blocking shell so as to generate an optical signal in the first light-blocking shell; the optical signal acquisition equipment is used for acquiring optical signals, and the optical signals are used for acquiring the concentration of particulate matters in the liquid medicine. The problem that the particulate matter concentration error that detection device measured is great can be solved to above-mentioned scheme. The invention also discloses a liquid changing method of the etching liquid medicine.
Description
Technical Field
The invention relates to the technical field of semiconductor chip manufacturing, in particular to a detection device for the concentration of particulate matters in liquid medicine, semiconductor process equipment and a liquid change control method.
Background
In a semiconductor wet etching process, phosphoric acid is often used as an etching liquid for a wafer, and a phosphoric acid solution has good etching uniformity and a high etching selection ratio for materials such as silicon nitride.
With the increase of the reaction time, the content of particles such as silicon dioxide in the phosphoric acid solution increases, so that the etching rate and the etching effect of the wafer are easily affected. Therefore, when the content of the particulate matter such as silica exceeds a predetermined value, the phosphoric acid solution needs to be replaced.
In the related art, the concentration of the particulate matter such as silica is measured by measuring the conductivity contained in the phosphoric acid, however, the number of conductive ions affecting the conductivity is large, and thus the error of the measured concentration of the particulate matter such as silica is large.
Disclosure of Invention
The invention discloses a detection device for the concentration of particulate matters in liquid medicine, semiconductor process equipment and a liquid change control method, and aims to solve the problem that the error of the concentration of the particulate matters measured by the detection device is large.
In order to solve the problems, the invention adopts the following technical scheme:
a detection device for the concentration of particulate matters in liquid medicine is applied to semiconductor process equipment and is used for detecting the concentration of the particulate matters in the liquid medicine in a process tank of the semiconductor process equipment, and the detection device comprises a liquid inlet pipe, a liquid outlet pipe and a detection assembly;
the detection assembly comprises a first light-blocking shell, an ultrasonic transmitter and optical signal acquisition equipment, wherein the first light-blocking shell is communicated with the process tank through the liquid inlet pipe and the liquid outlet pipe and forms a liquid medicine circulation loop;
the first light-blocking shell is provided with a light-transmitting area, the optical signal acquisition equipment is arranged on the outer side wall of the first light-blocking shell and corresponds to the light-transmitting area, and the ultrasonic transmitter is arranged on the outer side wall of the first light-blocking shell;
the ultrasonic transmitter is used for transmitting ultrasonic waves into the first light-blocking shell so as to generate an optical signal in the first light-blocking shell; the optical signal acquisition equipment is used for acquiring the optical signal, and the optical signal is used for obtaining the concentration of the particulate matters in the liquid medicine.
A semiconductor processing device comprises the detection device.
A liquid change control method is applied to the semiconductor process equipment, and comprises the following steps:
s1, controlling the detection device to obtain the concentration of the particulate matters in the current liquid medicine;
s2, if the concentration of the particles is not within the range of the preset concentration, controlling to discharge the current liquid medicine with a first preset volume from the process tank;
s3, controlling the injection of the new liquid medicine with the first preset volume into the process tank;
s4, heating the mixed current liquid medicine for a preset time, and turning to execute the step S1;
and S5, if the concentration of the particulate matters is within the preset concentration range, ending the operation.
The technical scheme adopted by the invention can achieve the following beneficial effects:
according to the scheme disclosed by the invention, according to the principle of sonoluminescence, an ultrasonic emitter emits ultrasonic waves to a first light-blocking shell, small bubbles of the liquid medicine in a process tank can be quickly cavitated and burst under the vibration of the ultrasonic waves, a large amount of energy can be released at the moment of burst of the small bubbles, short pulse light is generated, optical signals are collected through optical signal collection equipment, and the optical signals can be used for obtaining the concentration of the particles in the liquid medicine. At this moment, the larger the concentration of the particulate matters in the liquid medicine is, the more the content of the small bubbles is, so that the concentration of the particulate matters measured by adopting the scheme is more accurate, and the error is smaller.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic structural diagram of a detection apparatus according to an embodiment of the present disclosure;
fig. 2 is a flowchart of a liquid change control method according to an embodiment of the present invention.
Description of reference numerals:
100-a process tank;
200-liquid inlet pipe, 210-first liquid inlet pipe section, 220-second liquid inlet pipe section and 230-third liquid inlet pipe section;
300-liquid outlet pipe, 310-first liquid outlet pipe section, 320-second liquid outlet pipe section, 330-second liquid outlet pipe section;
400-detection component, 410-first light-blocking shell, 420-ultrasonic transmitter, 430-optical signal acquisition equipment;
500-circulating pump;
600-a flow detector;
700-a second light-blocking housing;
800-a third light-blocking housing;
900-sampling tube.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the specific embodiments of the present invention and the accompanying drawings. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The technical solutions disclosed in the embodiments of the present invention are described in detail below with reference to the accompanying drawings.
As shown in fig. 1 and fig. 2, the embodiment of the present invention discloses a device for detecting the concentration of particulate matter in a liquid medicine, which is applied to semiconductor processing equipment and is used for detecting the concentration of particulate matter in the liquid medicine in a process tank 100 of the semiconductor processing equipment. The disclosed detection device includes an inlet tube 200, an outlet tube 300, and a detection assembly 400.
The detection assembly 400 includes a first light blocking housing 410, an ultrasonic emitter 420 and an optical signal collecting device 430, wherein the first light blocking housing 410 is communicated with the process tank 100 through a liquid inlet pipe 200 and a liquid outlet pipe 300, and forms a liquid medicine circulation loop. The liquid medicine in the process tank 100 is introduced into the first light blocking housing 410 through the liquid inlet pipe 200 and then flows into the process tank 100 through the liquid outlet pipe 300, thereby realizing the circulation of the liquid medicine.
The first light-blocking housing 410 has a light-transmitting region, and the remaining regions of the first light-blocking housing 410 except the light-transmitting region are opaque parts, that is, the light transmittance of the opaque parts is zero. The inside of the first light blocking case 410 is a dark environment. The optical signal collecting device 430 is disposed on an outer sidewall of the first light blocking housing 410, and is disposed opposite to the light transmitting region, and the ultrasonic transmitter 420 is disposed on an outer sidewall of the first light blocking housing 410.
The ultrasonic wave transmitter 420 is used for transmitting ultrasonic waves into the first light blocking housing 410 to generate an optical signal in the first light blocking housing 410. The optical signal collection device 430 is used for collecting optical signals, and the optical signals are used for obtaining the concentration of particulate matters in the liquid medicine.
The chemical solution may be, but is not limited to, an etching chemical solution.
During the etching process of the wafer, particles such as silicon dioxide are generated, the solubility of the particles in the chemical solution is low, the particles are often in the form of small-sized particles, and small bubbles exist around the particles, that is, the larger the concentration of the particles is, the more the small bubbles are. Therefore, the concentration of the particulate matter in the liquid medicine can be judged by the content of the small bubbles.
In the scheme disclosed by the invention, according to the principle of sonoluminescence, the ultrasonic transmitter 420 transmits ultrasonic waves to the first light-blocking shell 410, small bubbles in the liquid medicine can be quickly cavitated and burst under the vibration of the ultrasonic waves, a large amount of energy can be released at the moment of burst of the small bubbles, short pulse light is generated, optical signals are collected through the optical signal collection device 430, and the concentration of particles in the liquid medicine can be obtained through the measured optical signals. At this moment, the larger the concentration of the particulate matters in the liquid medicine is, the more the content of the small bubbles is, so that the concentration of the particulate matters measured by adopting the scheme is more accurate, and the error is smaller.
The above mentioned sonoluminescence principle is a well known technique and is therefore not described in detail herein.
In particular, the optical signal collection device 430 may be a photomultiplier tube, a photosensor, and other devices for collecting optical signals. The optical signal collection device 430 can convert the measured optical signal into an electrical signal, and the frequency of the electrical signal and the concentration of the particulate matter in the liquid medicine can be modeled by establishing a curve. By summarizing the particulate matter concentration and the frequency of the corresponding electrical signal, a curve model diagram can be established, so that the particulate matter concentration of the liquid medicine in the process tank 100 can be intuitively obtained. For example, the concentration of the particles in the liquid medicine can be obtained by performing inductively coupled plasma mass spectrometry on the liquid medicine, and after the electric signals collected by the liquid medicine under the same condition are collected, a curve model is obtained, so that the concentration of the particles in the liquid medicine can be obtained through the frequency of the measured electric signals.
Alternatively, the outside of the first light blocking housing 410 may be coated with a light-impermeable coating.
In another optional embodiment, the detection apparatus disclosed in the embodiment of the present invention may further include a circulation pump 500, the circulation pump 500 is installed on the liquid inlet pipe 200, and the circulation pump 500 is communicated with the liquid inlet pipe 200. In this embodiment, the circulation pump 500 can pump out the liquid medicine in the process tank 100, and the liquid medicine is introduced into the first light blocking housing 410 through the liquid inlet pipe 200, so as to provide power for the circulation of the liquid medicine.
In order to improve the measurement accuracy of the measuring apparatus, the concentration of the chemical liquid in the first light blocking housing 410 and the concentration of the chemical liquid in the process tank 100 should be the same, and for this reason, in another alternative embodiment, the detecting apparatus disclosed in the embodiment of the present invention may further include a flow rate detector 600, and the circulation pump 500 and the flow rate detector 600 may be sequentially installed on the liquid inlet pipe 200 along the extending direction of the liquid inlet pipe 200. The circulation pump 500 and the flow detector 600 are both communicated with the liquid inlet pipe 200. In this scheme, can the audio-visual velocity of flow that observes the liquid medicine through flow detector 600, through the velocity of flow of control liquid medicine to guarantee that the concentration of the liquid medicine in technology groove 100 and the first light blocking housing 410 is unanimous, thereby can improve the measurement accuracy of particulate matter concentration in the liquid medicine.
In the above embodiment, the liquid inlet pipe 200 may be a straight pipe, however, external light may propagate into the first light blocking housing 410 along the straight pipe, thereby causing a large measurement error of the optical signal collecting apparatus 430. To this end, in an alternative embodiment, the liquid inlet pipe 200 may include first liquid inlet pipe sections 210, second liquid inlet pipe sections 220, and third liquid inlet pipe sections 230, which are alternately distributed, the first liquid inlet pipe sections 210 and the third liquid inlet pipe sections 230 may be communicated with each other through the second liquid inlet pipe sections 220, one end of each first liquid inlet pipe section 210 is communicated with the process tank 100, the other end of each first liquid inlet pipe section 210 is communicated with the second liquid inlet pipe section 220, one end of each third liquid inlet pipe section 230 is communicated with the first light-blocking housing 410, and the other end of each third liquid inlet pipe section 230 is communicated with the second liquid inlet pipe sections 220.
The first liquid inlet pipe sections 210, the second liquid inlet pipe sections 220 and the third liquid inlet pipe sections 230 are distributed in a staggered manner, that is, the first liquid inlet pipe sections 210 and the third liquid inlet pipe sections 230 have no facing area in the extending direction of the liquid inlet pipe 200, that is, the installation heights of the first liquid inlet pipe sections 210 and the third liquid inlet pipe sections 230 on the second liquid inlet pipe sections 220 are different in the extending direction of the second liquid inlet pipe sections 220.
Specifically, the first liquid inlet pipe section 210 can be located at the end of one end of the second liquid inlet pipe section 220, the third liquid inlet pipe section 230 can be located at the end of the other end of the second liquid inlet pipe section 220, the first liquid inlet pipe section 210 and the second liquid inlet pipe section 220 have an included angle, and the second liquid inlet pipe section 220 and the third liquid inlet pipe section 230 also have an included angle.
Further, the included angle between the first liquid inlet pipe section 210 and the second liquid inlet pipe section 220 may be a right angle, the included angle between the second liquid inlet pipe section 220 and the third liquid inlet pipe section 230 may also be a right angle, and meanwhile, the first liquid inlet pipe section 210 and the third liquid inlet pipe section 230 are parallel, and the first liquid inlet pipe section 210 and the third liquid inlet pipe section 230 extend towards opposite directions. That is, the liquid inlet pipe 200 is designed to have a zigzag structure. The above-described liquid inlet pipe 200 is constructed as shown in fig. 1.
In this scheme, feed liquor pipe 200 is the multistage structure of buckling to make light be difficult to extend to the pipeline and transmit to first light-blocking casing 410 in, and then can reduce in light enters into first light-blocking casing 410, further reduced optical signal collection equipment 430's measuring error, and then can improve detection device's precision.
Further, the detection device disclosed in the embodiment of the present invention may further include a second light-blocking housing 700, and a portion of the first liquid inlet pipe section 210, the second liquid inlet pipe section 220, and the third liquid inlet pipe section 230 may be all located in the second light-blocking housing 700. In this scheme, the inside of the second light-blocking housing 700 is a light-tight environment, so that the portion of the first liquid inlet pipe section 210, the second liquid inlet pipe section 220, and the third liquid inlet pipe section 230 are located in the second light-blocking housing 700, and light in the environment can be further prevented from entering the first light-blocking housing 410, thereby further improving the reliability of measurement of the optical signal acquisition device 430.
In another alternative embodiment, the liquid outlet pipe 300 may include first liquid outlet pipe sections 310, second liquid outlet pipe sections 320, and third liquid outlet pipe sections 330 which are distributed in a staggered manner, the first liquid outlet pipe sections 310 and the third liquid outlet pipe sections 330 are communicated through the second liquid outlet pipe sections 320, one end of the first liquid outlet pipe section 310 is communicated with the process tank 100, the other end of the first liquid outlet pipe section 310 is communicated with the second liquid outlet pipe sections 320, one end of the third liquid outlet pipe section 330 is communicated with the first light blocking housing 410, and the other end of the third liquid outlet pipe section 330 is communicated with the second liquid outlet pipe sections 320.
The first liquid outlet pipe section 310, the second liquid outlet pipe section 320 and the third liquid outlet pipe section 330 are distributed in a staggered manner, that is, in the extending direction of the second liquid outlet pipe section 320, the first liquid outlet pipe section 310 and the third liquid outlet pipe section 330 have no facing area, that is, in the extending direction of the second liquid outlet pipe section 320, the mounting heights of the first liquid outlet pipe section 310 and the third liquid outlet pipe section 330 on the second liquid outlet pipe section 320 are different.
Specifically, the first liquid outlet pipe section 310 may be located at an end of one end of the second liquid outlet pipe section 320, the third liquid outlet pipe section 330 may be located at an end of the other end of the second liquid outlet pipe section 320, the first liquid outlet pipe section 310 and the second liquid outlet pipe section 320 have an included angle, and the second liquid outlet pipe section 320 and the third liquid outlet pipe section 330 also have an included angle.
Further, an included angle between the first liquid outlet pipe section 310 and the second liquid outlet pipe section 320 may be a right angle, an included angle between the second liquid outlet pipe section 320 and the third liquid outlet pipe section 330 may also be a right angle, meanwhile, the first liquid outlet pipe section 310 and the third liquid outlet pipe section 330 are parallel, and the first liquid outlet pipe section 310 and the third liquid outlet pipe section 330 extend in opposite directions. That is, the outlet tube 300 is designed as a zigzag structure. The structure of the outlet pipe 300 is shown in fig. 1.
In this scheme, drain pipe 300 is the multistage structure of buckling to make in light is difficult to extend to the pipeline and transmits to first light-blocking casing 410, and then can reduce in light enters into light-blocking casing, further reduced optical signal collection equipment 430's measuring error, and then can improve detection device's precision.
Further, the detection device disclosed in the embodiment of the present invention may further include a third light blocking housing 800, and a portion of the first liquid outlet pipe section 310, the second liquid outlet pipe section 320, and the third liquid outlet pipe section 330 may all be located in the third light blocking housing 800. In this scheme, the inside of the third light-blocking housing 800 is a light-tight environment, so that the portion of the first liquid outlet pipe section 310, the second liquid outlet pipe section 320, and the third liquid outlet pipe section 330 can be located in the third light-blocking housing 800, and light in the environment can be further prevented from entering the first light-blocking housing 410, thereby further improving the measurement reliability of the optical signal acquisition device 430.
In the above embodiment, light leakage easily occurs at the joint of the optical signal collection device 430 and the light transmission region, so that a measurement error of the optical signal collection device 430 is easily large, for this reason, in another alternative embodiment, the edge of the joint of the optical signal collection device 430 and the light transmission region may be covered with a light shielding layer, so that light leakage at the joint of the optical signal collection device 430 and the light transmission region may be prevented, and thus the measurement accuracy of the optical signal collection device 430 may be improved.
In order to verify the measurement result of the measurement device disclosed by the embodiment of the invention, the liquid medicine in the process tank 100 can be sampled and analyzed, so as to verify the measurement result of the measurement device, but the difficulty of directly sampling from the process tank 100 is high. To this end, in an alternative embodiment, the sidewall of effluent channel 300 may be provided with a sampling tube 900, sampling tube 900 may be in communication with effluent channel 300, and sampling tube 900 may be provided with a valve body. In this scheme, when the user need take a sample, can open the valve body, follow sampling tube 900 sample to make the sample operation of liquid medicine simpler.
Based on the detection apparatus of any of the above embodiments of the present invention, an embodiment of the present invention may further include a semiconductor process equipment, and the disclosed semiconductor process equipment includes the detection apparatus of any of the above embodiments. In the scheme, the precision of the concentration of the particulate matters of the detection device is higher, so that the working efficiency of semiconductor process equipment can be improved.
The semiconductor processing equipment may be an etcher or other wafer processing equipment, which is not limited herein.
Based on the semiconductor process equipment disclosed by the embodiment of the invention, the embodiment of the invention also discloses a liquid change control method, the disclosed liquid change control method is applied to the semiconductor process equipment, and the disclosed liquid change control method comprises the following steps:
and S1, controlling the detection device to obtain the concentration of the particulate matters in the current liquid medicine.
And S2, if the concentration of the particulate matters is not within the preset concentration range, controlling the current liquid medicine with the first preset volume to be discharged from the process tank 100.
At this time, when the concentration of the particles of the current liquid medicine is high, a small part of the current liquid medicine can be discharged first, and the capacity of the discharged current liquid medicine is low, so that the influence on the overall temperature of the liquid medicine is low.
And S3, controlling to inject a first preset volume of new chemical solution into the process tank 100.
At this time, in order to ensure that the total amount of the liquid medicine in the process tank is not changed, a new liquid medicine is added into the process tank 100, so that the old liquid medicine remaining in the process tank is mixed with the new liquid medicine added, the concentration of the obtained particulate matters in the current liquid medicine is reduced, and the etching selection ratio of the wafer is not easily influenced.
S4, heating the mixed current liquid medicine for a preset time, and turning to the step S1.
And heating the mixed current liquid medicine to the process temperature required by wafer etching, and then detecting the mixed current liquid medicine again to detect whether the concentration of the particles of the mixed current liquid medicine is within the range of the preset concentration.
And S5, if the concentration of the particulate matters is within the preset concentration range, ending the operation.
When the concentration of the particles in the liquid medicine in the process tank is not within the preset concentration range after the part of the liquid medicine in the process tank 100 is replaced, the liquid replacement operation can be circulated again until the concentration of the particles in the liquid medicine in the process tank meets the process requirement.
In the above scheme, detection device can real-time detection particulate matter concentration in the liquid medicine, and when particulate matter concentration was higher, the old liquid medicine of a small amount was got rid of, and a small amount of new liquid medicine is compensated, and owing to it is less to change the liquid volume, the temperature can rise to technology temperature in the short time to the fluctuation of liquid medicine can not be too big, and then the etching rate and the selectivity of easy control liquid medicine.
In the scheme, the liquid medicine in the semiconductor process equipment is replaced for multiple times, so that the liquid medicine replacement time and the liquid medicine temperature rise time can be effectively shortened, and the working efficiency of the semiconductor process equipment is improved. Meanwhile, only partial liquid medicine is discharged when the liquid medicine is replaced every time, so that the service life of the liquid medicine can be prolonged.
In the above embodiment, the detection device may be connected to a computer, so that online liquid change control of the liquid medicine may be realized.
For example, when the concentration of the particles in the current medical fluid is greater than the predetermined concentration, 5L of the current medical fluid may be drained, and then 5L of a new medical fluid may be added. And then heating the mixed current liquid medicine for 20min, thereby finishing the liquid medicine changing operation. When the liquid changing is finished, the concentration of the particles of the liquid medicine can be measured again, if the concentration of the particles of the current liquid medicine is smaller than the preset concentration, the liquid changing is finished, and when the concentration of the particles of the current liquid medicine is larger than the preset concentration, the liquid changing process is circulated.
In the above embodiments of the present invention, the difference between the embodiments is mainly described, and different optimization features between the embodiments can be combined to form a better embodiment as long as they are not contradictory, and further description is omitted here in view of brevity of the text.
The above description is only an example of the present invention, and is not intended to limit the present invention. Various modifications and alterations to this invention will become apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the scope of the claims of the present invention.
Claims (10)
1. A detection device for detecting the concentration of particles in liquid medicine is applied to semiconductor process equipment and is used for detecting the concentration of particles in the liquid medicine in a process tank (100) of the semiconductor process equipment, and is characterized by comprising a liquid inlet pipe (200), a liquid outlet pipe (300) and a detection assembly (400);
the detection assembly (400) comprises a first light-blocking shell (410), an ultrasonic transmitter (420) and optical signal acquisition equipment (430), wherein the first light-blocking shell (410) is communicated with the process tank (100) through the liquid inlet pipe (200) and the liquid outlet pipe (300) and forms a liquid medicine circulation loop;
the first light blocking shell (410) is provided with a light transmission area, the optical signal acquisition equipment (430) is arranged on the outer side wall of the first light blocking shell (410) and corresponds to the light transmission area, and the ultrasonic transmitter (420) is arranged on the outer side wall of the first light blocking shell (410);
the ultrasonic transmitter (420) is used for transmitting ultrasonic waves into the first light-blocking shell (410) so as to generate an optical signal in the first light-blocking shell (410); the optical signal acquisition equipment (430) is used for acquiring the optical signal, and the optical signal is used for obtaining the concentration of the particulate matters in the liquid medicine.
2. The detection apparatus according to claim 1, further comprising a circulation pump (500) and a flow detector (600), wherein the circulation pump (500) and the flow detector (600) are sequentially installed on the liquid inlet pipe (200) along the extending direction of the liquid inlet pipe (200), and the circulation pump (500) and the flow detector (600) are both communicated with the liquid inlet pipe (200).
3. The detection device according to claim 1, wherein the liquid inlet pipe (200) comprises a first liquid inlet pipe section (210), a second liquid inlet pipe section (220) and a third liquid inlet pipe section (230) which are distributed in a staggered manner, the first liquid inlet pipe section (210) and the third liquid inlet pipe section (230) are communicated through the second liquid inlet pipe section (220), one end of the first liquid inlet pipe section (210) is communicated with the process tank (100), the other end of the first liquid inlet pipe section (210) is communicated with the second liquid inlet pipe section (220), one end of the third liquid inlet pipe section (230) is communicated with the first light-blocking shell (410), and the other end of the third liquid inlet pipe section (230) is communicated with the second liquid inlet pipe section (220).
4. A testing device according to claim 3, further comprising a second light-blocking housing (700), wherein part of the first inlet duct section (210), the second inlet duct section (220) and the third inlet duct section (230) are located within the second light-blocking housing (700).
5. The detection device according to claim 1, wherein the liquid outlet pipe (300) comprises a first liquid outlet pipe section (310), a second liquid outlet pipe section (320) and a third liquid outlet pipe section (330) which are distributed in a staggered manner, the first liquid outlet pipe section (310) and the third liquid outlet pipe section (330) are communicated through the second liquid outlet pipe section (320), one end of the first liquid outlet pipe section (310) is communicated with the process tank (100), the other end of the first liquid outlet pipe section (310) is communicated with the second liquid outlet pipe section (320), one end of the third liquid outlet pipe section (330) is communicated with the first light blocking shell (410), and the other end of the third liquid outlet pipe section (330) is communicated with the second liquid outlet pipe section (320).
6. The detection device according to claim 5, further comprising a third light-blocking housing (800), wherein the portion of the first liquid outlet pipe section (310), the second liquid outlet pipe section (320) and the third liquid outlet pipe section (330) are all located in the third light-blocking housing (800).
7. The detection apparatus according to claim 1, wherein an edge of a junction of the optical signal collection device (430) and the light-transmissive region is covered with a light-shielding layer.
8. The detection device according to claim 1, wherein a sampling tube (900) is disposed on a side wall of the liquid outlet tube (300), the sampling tube (900) is communicated with the liquid outlet tube (300), and the sampling tube (900) is provided with a valve body.
9. A semiconductor processing apparatus, characterized by comprising the detection device of any one of claims 1 to 8.
10. A liquid change control method applied to the semiconductor process equipment according to claim 9, the liquid change control method comprising:
s1, controlling the detection device to obtain the concentration of the particulate matters in the current liquid medicine;
s2, if the concentration of the particulate matters is not within the range of the preset concentration, controlling to discharge the current liquid medicine with a first preset volume from the process tank (100);
s3, controlling to inject the new liquid medicine with the first preset volume into the process tank (100);
s4, heating the mixed current liquid medicine for a preset time, and turning to execute the step S1;
and S5, if the concentration of the particulate matters is within the preset concentration range, ending the operation.
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