CN112383356A - Optical isolation amplification transmission method and device for nuclear measurement random small pulse - Google Patents
Optical isolation amplification transmission method and device for nuclear measurement random small pulse Download PDFInfo
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- CN112383356A CN112383356A CN202011256630.7A CN202011256630A CN112383356A CN 112383356 A CN112383356 A CN 112383356A CN 202011256630 A CN202011256630 A CN 202011256630A CN 112383356 A CN112383356 A CN 112383356A
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21C—NUCLEAR REACTORS
- G21C17/00—Monitoring; Testing ; Maintaining
- G21C17/10—Structural combination of fuel element, control rod, reactor core, or moderator structure with sensitive instruments, e.g. for measuring radioactivity, strain
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B3/00—Line transmission systems
- H04B3/54—Systems for transmission via power distribution lines
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
Abstract
The invention discloses an optical isolation amplification transmission method and device for nuclear measurement random small pulses, which comprises the following steps: s1, leading out a random small pulse electric signal from the pulse type nuclear measurement detector through a coaxial cable; s2, pre-conditioning the random small pulse electric signals into hundreds of millivolt-level electric signals; s3, adopting a distributed feedback laser as a laser source to act on an intensity modulator, and adopting a traveling wave electrode electro-optic modulator based on a Mach-Zehnder interferometer as the intensity modulator to modulate a hundred millivolt-level electric signal to form a pulse optical signal; s4, transmitting pulse light signal numbers by adopting optical fibers; s5, converting the pulse optical signals transmitted by the optical fibers into pulse electrical signals by using a photoelectric detector; and S6, the pulse electric signal is subjected to transimpedance amplification, voltage amplification and filtering of the signal restoring circuit, and the electric signal is restored back in a low-distortion mode. It possesses higher fidelity transmission.
Description
Technical Field
The invention relates to the field of nuclear reactor external neutron detectors, in particular to an optical isolation amplification transmission method and device for nuclear measurement random small pulses.
Background
The pulse type nuclear measurement detector is a high-sensitivity detector for reactor neutron measurement, and the measurement principle is that the neutron fluence rate level is reflected by counting the number of pulses in unit time, and the pulse type nuclear measurement detector is mainly used for low neutron fluence rate measurement in the critical stage of reactor shutdown and reactor startup.
Because the output signal of the pulse type nuclear measurement detector is a weak current pulse signal: the signal frequency band ranges from several kHz to dozens of MHz, the signal amplitude is not more than 10 muA, and the interval time of adjacent pulse signals is random; and in the application occasion of the reactor, signals are processed after being transmitted for a long distance of dozens of meters or even hundreds of meters. These characteristics place high demands on suppressing external interference during transmission, controlling the noise level of the conditioning circuit and isolating digital processing circuit interference.
For inhibiting external interference in the transmission process, a special nuclear measurement coaxial cable and a special cable laying path are adopted, and the application cost of the pulse nuclear measurement detector is improved to a certain extent; the conditioning circuit generally comprises a pre-amplifying circuit, a main amplifying circuit and a discrimination comparison circuit, wherein the pre-amplifying circuit is used for primarily amplifying a weak current pulse signal and requires an extremely low noise level to ensure a signal-to-noise ratio, the signal amplitude processed by the main amplifying circuit and the discrimination comparison circuit is more than several orders of magnitude larger than that of the pre-amplifying circuit, the pre-amplified signal-to-noise ratio is often influenced by problems of ground wire reflection and the like in design, and the overall signal-to-noise ratio level of the conditioning circuit is reduced; in order to prevent the high frequency components from passing through the line crosstalk conditioning circuit, the operating speed of the digital processing circuit is usually reduced, the level of a power supply of the digital processing circuit is generally increased, the design and manufacturing cost of the digital processing circuit is also increased, and the processing capability of the digital processing circuit is limited.
Disclosure of Invention
The invention aims to provide an optical isolation amplification transmission method and device for nuclear measurement random small pulses.
The invention is realized by the following technical scheme:
the optical isolation amplification transmission method for the nuclear measurement random small pulse comprises the following steps:
s1, leading out a random small pulse electric signal from the pulse type nuclear measurement detector through a coaxial cable;
s2, pre-conditioning the random small pulse electric signals into hundreds of millivolt-level electric signals;
s3, adopting a distributed feedback laser as a laser source to act on an intensity modulator, and adopting a traveling wave electrode electro-optic modulator based on a Mach-Zehnder interferometer as the intensity modulator to modulate a hundred millivolt-level electric signal to form a pulse optical signal;
s4, transmitting pulse light signal numbers by adopting optical fibers;
s5, converting the pulse optical signals transmitted by the optical fibers into pulse electrical signals by using a photoelectric detector;
and S6, the pulse electric signal is subjected to transimpedance amplification, voltage amplification and filtering of the signal restoring circuit, and the electric signal is restored back in a low-distortion mode.
The intensity modulator adopts a traveling wave electrode electro-optical modulator with a lithium niobate material as a substrate.
The intensity modulator adopts an intensity modulator based on a linear electro-optic effect, namely the intensity modulator adopts the effect that the refractive index of an optical waveguide is in direct proportion to the change of an external electric field, and the external electric field is an electric signal of hundreds of millivolts.
The distributed feedback laser adopts a laser with output light power more than or equal to 1mW, monochromaticity and line width less than or equal to 1 MHz.
The distributed feedback laser is driven by a laser driving circuit, and the laser driving circuit comprises a light intensity modulation circuit and a temperature control circuit;
the temperature control circuit is provided with a temperature monitor, and the temperature monitor is used for controlling a semiconductor refrigerating sheet inside the distributed feedback laser;
the light intensity modulation circuit is provided with a loop laser diode driving circuit, and the loop laser diode driving circuit is used for adjusting the bias current of the laser according to the return current of the laser diode in the monitoring laser; the control range of the bias current is as follows: 2mA to 100 mA.
The signal pre-conditioning processing adopts a signal pre-conditioning circuit with input impedance of 50 omega, frequency band range of 10kHz-200MHz and output noise peak-to-peak value less than or equal to 30 mVpp.
The photoelectric detector adopts a high-speed photoelectric detector, and the high-speed photoelectric detector has responsivity: and a photodetector having a detection light-sensitive surface diameter of not less than 70 μm and a dark current of not more than 0.1 nA/W or more.
The signal restoring circuit adopts a signal restoring circuit with a frequency band range of 10kHz-200MHz and an output noise peak-to-peak value less than or equal to 30 mVpp.
An optically isolated amplified transmission device for nuclear measurement of small random pulses, comprising:
a coaxial cable for leading out random small pulse electric signals from the pulse type nuclear measurement detector;
the signal pre-conditioning circuit is used for conditioning the random small pulse electric signals into hundreds of millivolt-level electric signals;
a distributed feedback laser acting as a laser source on the intensity modulator;
the intensity modulator modulates the hundred millivolt-level electric signals to form a pulse optical signal, and adopts a traveling wave electrode electro-optical modulator based on a Mach-Zehnder interferometer;
an optical fiber for transmitting the pulse optical signal;
a photoelectric detector for converting the pulse optical signal transmitted by the optical fiber into a pulse electrical signal;
and the signal restoring circuit restores the pulse electric signal through trans-resistance amplification, voltage amplification and filtering.
The intensity modulator adopts a traveling wave electrode electro-optical modulator with a lithium niobate material as a substrate;
the intensity modulator adopts an intensity modulator based on a linear electro-optic effect, namely the intensity modulator adopts the effect that the refractive index of the optical waveguide is in direct proportion to the change of an external electric field, and the external electric field is an electric signal of hundred millivolts;
the distributed feedback laser is driven by a laser driving circuit, and the laser driving circuit comprises a light intensity modulation circuit and a temperature control circuit;
the temperature control circuit is provided with a temperature monitor, and the temperature monitor is used for controlling a semiconductor refrigerating sheet inside the distributed feedback laser;
the light intensity modulation circuit is provided with a loop laser diode driving circuit, and the loop laser diode driving circuit is used for adjusting the bias current of the laser according to the return current of the laser diode in the monitoring laser; the control range of the bias current is as follows: 2mA to 100 mA;
the photoelectric detector adopts a high-speed photoelectric detector, and the high-speed photoelectric detector has responsivity: and a photodetector having a detection light-sensitive surface diameter of not less than 70 μm and a dark current of not more than 0.1 nA/W or more.
The method of the invention pre-conditions the nuclear measurement broadband random small pulse signal into an electric signal of hundred millivolts (100-500mv) in a radiation safety region close to the reactor, converts the electric signal into an optical signal, and transmits the optical signal to a far end through an optical fiber. The optical fiber transmission greatly reduces the price cost and the laying limit of the special coaxial cable adopting nuclear measurement, and has strong anti-interference capability.
The method converts the optical signal into the electric signal through photoelectric conversion at the secondary instrument, fully retains the signal characteristics, simultaneously ensures that the front-end signal pre-conditioning circuit, the rear-end conditioning circuit and the digital processing circuit have good electrical isolation effect, and greatly reduces the limitation on the rear-end conditioning circuit and the digital processing circuit on the basis of ensuring the level of the integral signal-to-noise ratio.
The invention is realized by adopting a light emitting function unit and a light receiving function unit.
A light emission function unit: pre-conditioning a nuclear measurement broadband random small pulse signal, converting the nuclear measurement broadband random small pulse signal into an optical signal, and transmitting the optical signal to a far end through an optical fiber;
a light receiving function unit: and receiving the optical signal transmitted by the optical fiber, and reducing the optical signal into a random pulse signal which is in equal proportion to the nuclear measurement broadband random small pulse signal.
The invention comprehensively ensures to realize the pretreatment, modulation, receiving and restoration of the small pulse signal on the basis of the structure and parameters of the type-selecting equipment, thereby ensuring the high-fidelity transmission of the signal. The invention designs a high-fidelity transmission scheme aiming at nuclear measurement broadband random small pulse signals for the first time.
The invention has the beneficial effects that:
the invention provides an optical isolation amplification and transmission method for a wide-band random small pulse signal for nuclear measurement. Due to the adoption of optical fiber transmission, the cable has strong anti-interference capability and excellent isolation capability, greatly reduces the price cost and the laying limitation of adopting a special nuclear measurement coaxial cable, and simultaneously reduces the limitation on a rear-end conditioning circuit and a digital processing circuit. The method is suitable for signal amplification, isolation and anti-interference transmission of the pulse nuclear measurement detector.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:
FIG. 1 is a schematic diagram of the apparatus of the present invention.
FIG. 2 is an effect diagram of a nuclear measurement broadband random small pulse signal after signal pre-conditioning.
Fig. 3 is a diagram of the output effect of the signal restoring circuit.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not meant to limit the present invention.
Example 1
As shown in fig. 1, 2, and 3:
the optical isolation amplification transmission method for the nuclear measurement random small pulse comprises the following steps:
s1, leading out a random small pulse electric signal from the pulse type nuclear measurement detector through a coaxial cable;
s2, pre-conditioning the random small pulse electric signals into hundreds of millivolt-level electric signals;
s3, adopting a distributed feedback laser as a laser source to act on an intensity modulator, and adopting a traveling wave electrode electro-optic modulator based on a Mach-Zehnder interferometer as the intensity modulator to modulate a hundred millivolt-level electric signal to form a pulse optical signal;
s4, transmitting pulse light signal numbers by adopting optical fibers;
s5, converting the pulse optical signals transmitted by the optical fibers into pulse electrical signals by using a photoelectric detector;
and S6, the pulse electric signal is subjected to transimpedance amplification, voltage amplification and filtering of the signal restoring circuit, and the electric signal is restored back in a low-distortion mode.
The intensity modulator adopts a traveling wave electrode electro-optical modulator with a lithium niobate material as a substrate.
The intensity modulator adopts an intensity modulator based on a linear electro-optic effect, namely the intensity modulator adopts the effect that the refractive index of an optical waveguide is in direct proportion to the change of an external electric field, and the external electric field is an electric signal of hundreds of millivolts.
The distributed feedback laser adopts a laser with output light power more than or equal to 1mW, monochromaticity and line width less than or equal to 1 MHz.
The distributed feedback laser is driven by a laser driving circuit, and the laser driving circuit comprises a light intensity modulation circuit and a temperature control circuit;
the temperature control circuit is provided with a temperature monitor, and the temperature monitor is used for controlling a semiconductor refrigerating sheet inside the distributed feedback laser;
the light intensity modulation circuit is provided with a loop laser diode driving circuit, and the loop laser diode driving circuit is used for adjusting the bias current of the laser according to the return current of the laser diode in the monitoring laser; the control range of the bias current is as follows: 2mA to 100 mA.
The signal pre-conditioning processing adopts a signal pre-conditioning circuit with input impedance of 50 omega, frequency band range of 10kHz-200MHz and output noise peak-to-peak value less than or equal to 30 mVpp.
The photoelectric detector adopts a high-speed photoelectric detector, and the high-speed photoelectric detector has responsivity: and a photodetector having a detection light-sensitive surface diameter of not less than 70 μm and a dark current of not more than 0.1 nA/W or more.
The signal restoring circuit adopts a signal restoring circuit with a frequency band range of 10kHz-200MHz and an output noise peak-to-peak value less than or equal to 30 mVpp.
Example 2
As shown in fig. 1, 2, and 3:
an optically isolated amplified transmission device for nuclear measurement of small random pulses, comprising:
a coaxial cable for leading out random small pulse electric signals from the pulse type nuclear measurement detector;
the signal pre-conditioning circuit is used for conditioning the random small pulse electric signals into hundreds of millivolt-level electric signals;
a distributed feedback laser acting as a laser source on the intensity modulator;
the intensity modulator modulates the hundred millivolt-level electric signals to form a pulse optical signal, and adopts a traveling wave electrode electro-optical modulator based on a Mach-Zehnder interferometer;
an optical fiber for transmitting the pulse optical signal;
a photoelectric detector for converting the pulse optical signal transmitted by the optical fiber into a pulse electrical signal;
and the signal restoring circuit restores the pulse electric signal through trans-resistance amplification, voltage amplification and filtering.
The intensity modulator adopts a traveling wave electrode electro-optical modulator with a lithium niobate material as a substrate;
the intensity modulator adopts an intensity modulator based on a linear electro-optic effect, namely the intensity modulator adopts the effect that the refractive index of the optical waveguide is in direct proportion to the change of an external electric field, and the external electric field is an electric signal of hundred millivolts;
the distributed feedback laser is driven by a laser driving circuit, and the laser driving circuit comprises a light intensity modulation circuit and a temperature control circuit;
the temperature control circuit is provided with a temperature monitor, and the temperature monitor is used for controlling a semiconductor refrigerating sheet inside the distributed feedback laser;
the light intensity modulation circuit is provided with a loop laser diode driving circuit, and the loop laser diode driving circuit is used for adjusting the bias current of the laser according to the return current of the laser diode in the monitoring laser; the control range of the bias current is as follows: 2mA to 100 mA;
the photoelectric detector adopts a high-speed photoelectric detector, and the high-speed photoelectric detector has responsivity: and a photodetector having a detection light-sensitive surface diameter of not less than 70 μm and a dark current of not more than 0.1 nA/W or more.
As shown in fig. 2 and fig. 3, fig. 2 is a diagram illustrating the effect of a nuclear measurement broadband random small pulse signal after signal pre-conditioning. Fig. 3 is a diagram of the output effect of the signal restoring circuit. As can be seen from the comparison between fig. 2 and fig. 3, the fidelity of 2 signals is very high, and it can be seen that the structure, the model selection device, and the parameter guarantee system designed by the present invention can realize the optical fiber fidelity remote transmission of the broadband random small pulse signal for nuclear measurement.
It can be seen that the pulse-type nuclear measurement detector is a key detector for measuring the neutron fluence rate and the change rate thereof in the reactor, the output signal has the characteristics of wide frequency band range, random signal interval time and weak signal amplitude, and long-distance transmission is needed, and the characteristics provide high requirements for inhibiting external interference in the transmission process, controlling the noise level of a conditioning circuit and isolating the interference of a digital processing circuit. The invention provides an optical isolation amplification transmission method for a nuclear measurement broadband random small pulse signal, which is based on the principle that an optical signal processing technology is utilized to condition a pulse type nuclear measurement detector signal into an optical signal, the optical signal is transmitted to a far end through an optical fiber, and then the optical signal is converted into a large-amplitude electric signal in proportion to an original signal through electro-optic, so that the signal characteristic is fully reserved. The method can obviously improve the isolation effect and the anti-interference capability of the pulse nuclear measurement signal processing, and greatly reduce the application cost and the limitation of the pulse nuclear measurement detector.
The invention is also applied to the design of the signal conditioning equipment of the source range proportional counting tube of the third-generation nuclear power nuclear instrument system, and the distance between the source range proportional counting tube and a workshop where the secondary instrument is located can be up to two hundred meters at most. The invention provides an optical isolation amplification and transmission method for a nuclear measurement broadband random small pulse signal. Compared with the traditional processing mode, the method has the advantages that the use cost of the special coaxial cable for nuclear measurement can be reduced, the transmission anti-interference capability is enhanced, the better ground electrical isolation effect is achieved, and the design limit on the back-end conditioning circuit and the digital processing circuit is also reduced.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (10)
1. The optical isolation amplification transmission method for the nuclear measurement random small pulse is characterized by comprising the following steps of:
s1, leading out a random small pulse electric signal from the pulse type nuclear measurement detector through a coaxial cable;
s2, pre-conditioning the random small pulse electric signals into hundreds of millivolt-level electric signals;
s3, adopting a distributed feedback laser as a laser source to act on an intensity modulator, and adopting a traveling wave electrode electro-optic modulator based on a Mach-Zehnder interferometer as the intensity modulator to modulate a hundred millivolt-level electric signal to form a pulse optical signal;
s4, transmitting pulse light signal numbers by adopting optical fibers;
s5, converting the pulse optical signals transmitted by the optical fibers into pulse electrical signals by using a photoelectric detector;
and S6, the pulse electric signal is subjected to transimpedance amplification, voltage amplification and filtering of the signal restoring circuit, and the electric signal is restored back in a low-distortion mode.
2. The method of claim 1, wherein the optical isolation amplification transmission is used for nuclear measurement of random small pulses,
the intensity modulator adopts a traveling wave electrode electro-optical modulator with a lithium niobate material as a substrate.
3. The method of claim 1, wherein the optical isolation amplification transmission is used for nuclear measurement of random small pulses,
the intensity modulator adopts an intensity modulator based on a linear electro-optic effect, namely the intensity modulator adopts the effect that the refractive index of an optical waveguide is in direct proportion to the change of an external electric field, and the external electric field is an electric signal of hundreds of millivolts.
4. The method of claim 1, wherein the optical isolation amplification transmission is used for nuclear measurement of random small pulses,
the distributed feedback laser adopts a laser with output light power more than or equal to 1mW, monochromaticity and line width less than or equal to 1 MHz.
5. The method of claim 1, wherein the optical isolation amplification transmission is used for nuclear measurement of random small pulses,
the distributed feedback laser is driven by a laser driving circuit, and the laser driving circuit comprises a light intensity modulation circuit and a temperature control circuit;
the temperature control circuit is provided with a temperature monitor, and the temperature monitor is used for controlling a semiconductor refrigerating sheet inside the distributed feedback laser;
the light intensity modulation circuit is provided with a loop laser diode driving circuit, and the loop laser diode driving circuit is used for adjusting the bias current of the laser according to the return current of the laser diode in the monitoring laser; the control range of the bias current is as follows: 2mA to 100 mA.
6. The method of claim 1, wherein the optical isolation amplification transmission is used for nuclear measurement of random small pulses,
the signal pre-conditioning processing adopts a signal pre-conditioning circuit with input impedance of 50 omega, frequency band range of 10kHz-200MHz and output noise peak-to-peak value less than or equal to 30 mVpp.
7. The method of claim 1, wherein the optical isolation amplification transmission is used for nuclear measurement of random small pulses,
the photoelectric detector adopts a high-speed photoelectric detector, and the high-speed photoelectric detector has responsivity: and a photodetector having a detection light-sensitive surface diameter of not less than 70 μm and a dark current of not more than 0.1 nA/W or more.
8. The method of claim 1, wherein the optical isolation amplification transmission is used for nuclear measurement of random small pulses,
the signal restoring circuit adopts a signal restoring circuit with a frequency band range of 10kH-200MHz and an output noise peak-to-peak value less than or equal to 30 mVpp.
9. An optically isolated amplified transmission device for nuclear measurement of small random pulses, comprising:
a coaxial cable for leading out random small pulse electric signals from the pulse type nuclear measurement detector;
the signal pre-conditioning circuit is used for conditioning the random small pulse electric signals into hundreds of millivolt-level electric signals;
a distributed feedback laser acting as a laser source on the intensity modulator;
the intensity modulator modulates the hundred millivolt-level electric signals to form a pulse optical signal, and adopts a traveling wave electrode electro-optical modulator based on a Mach-Zehnder interferometer;
an optical fiber for transmitting the pulse optical signal;
a photoelectric detector for converting the pulse optical signal transmitted by the optical fiber into a pulse electrical signal;
and the signal restoring circuit restores the pulse electric signal through trans-resistance amplification, voltage amplification and filtering.
10. The optically isolated amplified transmission of small random pulses for nuclear measurements according to claim 9,
the intensity modulator adopts a traveling wave electrode electro-optical modulator with a lithium niobate material as a substrate;
the intensity modulator adopts an intensity modulator based on a linear electro-optic effect, namely the intensity modulator adopts the effect that the refractive index of the optical waveguide is in direct proportion to the change of an external electric field, and the external electric field is an electric signal of hundred millivolts;
the distributed feedback laser is driven by a laser driving circuit, and the laser driving circuit comprises a light intensity modulation circuit and a temperature control circuit;
the temperature control circuit is provided with a temperature monitor, and the temperature monitor is used for controlling a semiconductor refrigerating sheet inside the distributed feedback laser;
the light intensity modulation circuit is provided with a loop laser diode driving circuit, and the loop laser diode driving circuit is used for adjusting the bias current of the laser according to the return current of the laser diode in the monitoring laser; the control range of the bias current is as follows: 2mA to 100 mA;
the photoelectric detector adopts a high-speed photoelectric detector, and the high-speed photoelectric detector has responsivity: and a photodetector having a detection light-sensitive surface diameter of not less than 70 μm and a dark current of not more than 0.1 nA/W or more.
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| CN111273464A (en) * | 2020-02-24 | 2020-06-12 | 上海交通大学 | Lithium niobate-silicon wafer-based photoelectric monolithic integration system |
| EP3779472A1 (en) * | 2019-08-13 | 2021-02-17 | Honeywell International Inc. | Feedthrough rejection for optomechanical devices |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3779472A1 (en) * | 2019-08-13 | 2021-02-17 | Honeywell International Inc. | Feedthrough rejection for optomechanical devices |
| CN111273464A (en) * | 2020-02-24 | 2020-06-12 | 上海交通大学 | Lithium niobate-silicon wafer-based photoelectric monolithic integration system |
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Application publication date: 20210219 |