CN112382583A - Laser scribing detection device for thin-film photovoltaic module - Google Patents
Laser scribing detection device for thin-film photovoltaic module Download PDFInfo
- Publication number
- CN112382583A CN112382583A CN202011193617.1A CN202011193617A CN112382583A CN 112382583 A CN112382583 A CN 112382583A CN 202011193617 A CN202011193617 A CN 202011193617A CN 112382583 A CN112382583 A CN 112382583A
- Authority
- CN
- China
- Prior art keywords
- probe
- detection
- laser scribing
- conveyor belt
- photovoltaic module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 96
- 239000010409 thin film Substances 0.000 title claims abstract description 25
- 239000000523 sample Substances 0.000 claims abstract description 125
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 48
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 47
- 239000011733 molybdenum Substances 0.000 claims abstract description 47
- 239000011521 glass Substances 0.000 claims abstract description 44
- 239000000758 substrate Substances 0.000 claims abstract description 44
- 238000000926 separation method Methods 0.000 claims abstract description 4
- 238000004140 cleaning Methods 0.000 claims description 24
- 238000005192 partition Methods 0.000 claims description 9
- 238000011084 recovery Methods 0.000 claims description 6
- 238000007664 blowing Methods 0.000 claims description 5
- 238000012360 testing method Methods 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 description 20
- 238000007689 inspection Methods 0.000 description 9
- 238000009413 insulation Methods 0.000 description 3
- 230000003139 buffering effect Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000010330 laser marking Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001795 light effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention provides a laser scribing detection device for a thin film photovoltaic module, which comprises a detection unit, wherein the detection unit comprises: a first conveyor belt for horizontally conveying the laser-scribed glass substrate; the probe assembly comprises a probe frame and a plurality of detection probes arranged on the lower surface of the probe frame; the lifting assembly is arranged above the probe frame and is fixedly connected with the probe frame; the resistance tester is connected with the detection probe through a cable; the lifting assembly can drive the probe frame to lift so as to realize the contact and separation of the detection probe and the molybdenum layer on the surface of the glass substrate. Based on the technical scheme of the invention, the matching of all parts in the detection unit can realize the automatic detection of the insulativity among all areas of the molybdenum layer on the glass substrate after laser scribing, replace manual labor and avoid the possibility of damage to the molybdenum layer caused by manual detection.
Description
Technical Field
The invention relates to the technical field of solar photovoltaic modules, in particular to a laser scribing detection device for a thin-film photovoltaic module.
Background
The thin-film solar cell is used as a new generation of solar cell technology, has the characteristics of low cost, good weak light effect and high power generation power, and is gradually and widely applied. In the whole production process flow of the thin-film solar cell, laser scribing is one of the most important process steps, and the scribing quality directly determines the power of the thin-film solar cell, so that the product quality of the thin-film solar cell is influenced. The front-stage process of the thin-film solar cell comprises the steps of plating molybdenum element on a glass substrate to serve as a back electrode conducting layer, dividing the molybdenum layer into a plurality of sub-cells by laser after film plating is finished, and effectively ensuring the maximization of the power of the thin-film solar cell only by good insulation between the sub-cells.
At present, the detection of the laser scribing quality generally adopts a manual mode, and a detector uses a universal meter to measure the resistance between two adjacent batteries to judge the insulativity between two adjacent sub-batteries, so that the detection mode has low efficiency and cannot detect the laser scribing by one hundred percent. Meanwhile, in the manual detection process, the force applied when the multimeter is manually operated to contact the molybdenum layer cannot be constant, and the molybdenum layer is easily damaged due to overlarge stress, so that the power of the thin-film solar cell is influenced.
Disclosure of Invention
To the problem among the above-mentioned prior art, this application has provided a film photovoltaic module laser marking detection device, through the cooperation of each part among the detecting element, can realize on the glass substrate through the automatic detection of insulating nature between each region of molybdenum layer after the laser marking, replaced artifical work and avoided artifical the detection to cause the possibility of damage to the molybdenum layer.
The invention discloses a laser scribing detection device for a thin film photovoltaic module, which comprises a detection unit, wherein the detection unit comprises:
a first conveyor belt for horizontally conveying the laser-scribed glass substrate;
the probe assembly comprises a probe frame and a plurality of detection probes arranged on the lower surface of the probe frame, and the probe frame is positioned right above the first conveyor belt;
the lifting assembly is arranged above the probe frame and is fixedly connected with the probe frame;
the resistance tester is connected with the detection probe through a cable;
the lifting assembly can drive the probe frame to lift so as to realize the contact and separation of the detection probe and the molybdenum layer on the surface of the glass substrate.
In one embodiment, further comprising a cleaning unit, the cleaning unit comprising: the second conveyor belt is arranged on one side of the conveying starting point of the first conveyor belt, and the installation height and the conveying direction of the second conveyor belt are the same as those of the first conveyor belt; and the blowing air knife is arranged right above the second conveyor belt. According to the embodiment, a large amount of tiny debris is generated after the molybdenum layer on the glass substrate is scribed by the laser, the debris is distributed on the surface of the molybdenum layer and in the groove after the laser scribing, and the molybdenum layer areas on two sides of the groove are easy to generate short circuit, so that in order to avoid the problem, the debris needs to be cleaned by the cleaning unit before the glass substrate enters the detection process.
In one embodiment, the detection unit further comprises: and the positioning assembly comprises a plurality of positioning columns arranged on two sides of the conveying direction of the first conveying belt. With this embodiment, in the detecting unit, since the detecting probes are designed to correspond to the respective regions formed on the molybdenum layer by laser scribing. Therefore, in order to ensure the normal operation of the inspection process, the glass substrate needs to be located at a position corresponding to the inspection probe on the first conveyor belt, and the positioning post in the positioning assembly is used for positioning the glass substrate to the corresponding inspection probe.
In one embodiment, the detection probe comprises: the top of the probe tube is fixed on the probe frame and the top of the probe tube is closed; a needle body disposed in the probe tube; and the spring is connected with the top end of the needle body and the inner wall surface of the top of the probe tube. By the embodiment, the buffer function is added to the detection probe, and the molybdenum layer can be prevented from being damaged due to overlarge pressure between the detection probe and the molybdenum layer on the glass substrate.
In one embodiment, a pressure sensor is arranged on the inner wall surface of the top of the probe tube, and the pressure sensor is used for detecting the elastic force of a spring. Through the embodiment, the pressure sensor can reflect the relative pressure of the contact between the needle body and the molybdenum layer from data, and further can adjust the relative pressure according to actual conditions.
In one embodiment, the probe rack has a plurality of parallel probe rows, each of the probe rows including a plurality of detection probes arranged in parallel; wherein a direction of juxtaposition of the plurality of detection probes in the probe row is perpendicular to a direction of juxtaposition of the plurality of probe rows.
In one embodiment, the molybdenum layer on the glass substrate has a plurality of parallel stripe-shaped sub-regions formed by laser scribing, each of the sub-regions corresponding to one of the probe rows.
In one embodiment, the cleaning unit housing is provided with a closed housing, the closed housing is respectively provided with an inlet and an outlet on two side walls in the conveying direction of the second conveyor belt, and the top of the housing is communicated with a negative pressure debris recovery device. Through this embodiment, airtight shell can avoid the piece to fly upward when sweeping and concentrate the collection through crushing bits recovery unit to the piece, also avoids external environment to the influence of clean process simultaneously.
In one embodiment, the closed shell extends to a position where the closed shell is sleeved outside the detection unit, a partition plate is arranged inside the closed shell between the cleaning unit and the detection unit, and a conveying port is formed in the partition plate. Through this embodiment, airtight shell can effectually prevent external environment to the influence of testing process.
In one embodiment, the resistance tester is further connected with a display screen, and the display screen is used for displaying resistance test data.
The features mentioned above can be combined in various suitable ways or replaced by equivalent features as long as the object of the invention is achieved.
Compared with the prior art, the laser scribing detection device for the thin film photovoltaic module, provided by the invention, at least has the following beneficial effects:
according to the laser scribing detection device for the thin-film photovoltaic module, disclosed by the invention, through the matching of all parts in the detection unit, the automatic detection of the insulativity among all areas of the molybdenum layer subjected to laser scribing on the glass substrate can be realized, the manual labor is replaced, and the possibility that the molybdenum layer is damaged by manual detection is avoided. Meanwhile, the cleaning unit can thoroughly clean the molybdenum layer before detection, and the detection accuracy is prevented from being influenced by debris generated by laser scribing.
Drawings
The invention will be described in more detail hereinafter on the basis of embodiments and with reference to the accompanying drawings. Wherein:
FIG. 1 is a schematic view showing the overall structure of the detecting unit of the present invention;
FIG. 2 is a schematic view showing the structure of a detecting unit of the detecting device of the present invention;
FIG. 3 shows a schematic view of the structure of the detection probe of the detection apparatus of the present invention.
In the drawings, like parts are provided with like reference numerals. The drawings are not to scale.
Reference numerals:
1-detection unit, 11-first conveyor belt, 12-probe assembly, 121-probe holder, 122-detection probe, 1221-probe tube, 1222-needle body, 1223-spring, 13-lifting assembly, 14-resistance tester, 141-display screen, 15-positioning column, 2-cleaning unit, 21-second conveyor belt, 22-blowing air knife, 3-closed shell, 31-inlet, 32-outlet, 33-partition plate, 331-conveying port, 4-negative pressure scrap recovery device, 5-glass substrate and 51-subregion.
Detailed Description
The invention will be further explained with reference to the drawings.
The invention provides a laser scribing detection device for a thin film photovoltaic module, which comprises a detection unit 1, wherein the detection unit 1 comprises: a first conveyor belt 11 for horizontally conveying the laser-scribed glass substrate 5; a probe assembly 12 including a probe holder 121 and a plurality of sensing probes 122 mounted on a lower surface of the probe holder 121, the probe holder 121 being positioned directly above the first conveyor belt 11; a lifting assembly 13 disposed above the probe frame 121 and fixedly connected to the probe frame 121; a resistance tester 14 connected to the detection probe 122 by a cable;
the lifting assembly 13 can drive the probe holder 121 to lift, so as to contact and separate the detection probe 122 from the molybdenum layer on the surface of the glass substrate 5.
Specifically, as shown in fig. 1 and fig. 2 of the drawings, the first conveyor belt 11 in the inspection unit 1 is used for conveying the glass substrate 5 to be inspected and also used as an operation table in the resistance inspection process, and the surface of the glass substrate 5 is coated with a molybdenum layer which is subjected to laser scribing. During detection, the glass substrate 5 is externally input onto the first conveyor belt 11 and horizontally conveyed to the position right below the probe assembly 12 through the first conveyor belt 11; then the lifting assembly 13 drives the probe frame 121 in the probe assembly 12 to descend, the detection probe 122 on the lower surface of the probe frame 121 is in contact with the molybdenum layer on the surface of the glass substrate 5, the resistance tester 14 forms a loop with the molybdenum layer through the cable, the detection probe 122, and the resistance between adjacent scribing areas in the molybdenum layer is reflected through the current in the loop, so that the insulation property of the molybdenum layer is judged; after the detection is completed, the lifting assembly 13 drives the probe frame 121 and the detection probe 122 to ascend, the detection probe 122 is separated from the molybdenum layer, and the glass substrate 5 is output to the next process through the first conveyor belt 11.
It should be noted that the distribution of the detection probes 122 on the probe holder 121 corresponds to the scribe separation of the molybdenum layer on the glass substrate 5, that is, each region divided by the molybdenum layer on the glass substrate 5 corresponds to a detection probe 122.
In addition, the lifting assembly 13 is not described in detail since it is not a main technical point of the present invention. In practical use, conventional lifting equipment can be selected according to practical situations, for example, the lifting assembly 13 can adopt mature lifting equipment such as a cylinder system and a hydraulic cylinder system.
Meanwhile, the detection device further comprises a control system, and the control system is used for controlling the first conveyor belt 11, the probe assembly 12, the lifting assembly 13 and the resistance tester 14 and coordinating the operation of the first conveyor belt, the probe assembly, the lifting assembly and the resistance tester to realize the whole detection process. Preferably, the resistance tester 14 is further connected to a display screen 141, and the display screen 141 is used for displaying resistance test data.
In one embodiment, further comprising a cleaning unit 2, the cleaning unit 2 comprising: a second conveyor belt 21 disposed on one side of the conveyance starting point of the first conveyor belt 11, the second conveyor belt 21 having the same installation height and conveyance direction as those of the first conveyor belt 11; and a blowing air knife 22 provided directly above the second conveyor belt 21.
Specifically, as shown in fig. 1 of the drawings, the cleaning unit 2 is disposed at one side of the detecting unit 1, and the cleaning process corresponding to the cleaning unit 2 is a previous process of the detecting process corresponding to the detecting unit 1. Since the laser scribing of the molybdenum layer on the glass substrate 5 generates a large amount of very small debris, which is distributed on the surface of the molybdenum layer and in the groove after the laser scribing and is liable to cause short circuit between the molybdenum layer regions at both sides of the groove, in order to avoid such problems, the cleaning unit 2 needs to remove the debris before the glass substrate 5 enters the inspection process.
During cleaning, the glass substrate 5 is conveyed to the second conveyor belt 21, the blowing air knife 22 blows the surface of the glass substrate 5 to remove the debris generated by laser scribing, and then the glass substrate 5 is conveyed to the first conveyor belt 11 through the second conveyor belt 21 to perform the detection process.
In one embodiment, the detection unit 1 further comprises: and the positioning assembly comprises a plurality of positioning columns 15 arranged at two sides of the conveying direction of the first conveyor belt 11.
Specifically, in the detecting unit 1, since the detecting probes 122 are designed to correspond to the respective regions formed on the molybdenum layer by laser scribing. Therefore, in order to ensure the normal operation of the inspection process, the glass substrate 5 needs to be positioned on the first conveyor belt corresponding to the inspection probes 122, and the positioning posts 15 in the positioning assembly are used for positioning the glass substrate 5 to the corresponding inspection probes 122.
It should be noted that, as shown in fig. 2, the positioning column 15 is only designed as a cylinder vertically fixed on one side of the first conveyor belt 11 in the conveying direction. In the practical application process, the structure of the positioning post 15 can be further optimized according to practical situations, for example, a rotatable sleeve can be sleeved on the positioning post 15, so that when the edge of the glass substrate 5 contacts the positioning post 15, the friction between the edge of the glass substrate 5 and the sleeve can be reduced through the rotation of the sleeve.
In one embodiment, the detection probe 122 includes: a probe tube 1221 having a top fixed to the probe holder 121 and a top closed; a needle body 1222 provided in the probe tube 1221; and a spring 1223 connecting a top end of the needle body 1222 and an inner wall surface of a top of the probe tube 1221.
Specifically, in order to prevent the molybdenum layer on the glass substrate 5 from being damaged by excessive pressure therebetween when the sensing probe 122 is in contact with the molybdenum layer, the structure of the sensing probe 122 is optimized to add a buffer function thereto to avoid excessive contact pressure when the sensing probe is in contact with the molybdenum layer.
As shown in fig. 3, the needle 1222 is disposed in the probe tube 1221, a spring 1223 is connected between the top of the needle 1222 and the inner wall surface of the top of the probe tube 1221, and the bottom of the needle 1222 is a tapered needle head. When the detection probe 122 is driven by the lifting component 13 to contact with the molybdenum layer, the needle head at the bottom of the needle body 1222 is extruded with the molybdenum layer, the spring 1223 deforms, and the deformation of the spring 1223 realizes the buffering between the needle body 1222 and the molybdenum layer. Meanwhile, the elastic force of the deformation of the spring 1223 also acts on the molybdenum layer to some extent through the pin 1222, and plays a role in keeping the pin 1222 stably contacted with the molybdenum layer.
Preferably, a pressure sensor for detecting an elastic force of the spring 1223 is provided on an inner wall surface of the top of the probe tube 1221.
Specifically, the pressure sensor can reflect the relative pressure of the contact between the needle 1222 and the molybdenum layer from the data, and further adjust the relative pressure according to the actual situation, wherein the adjustment method can be to adjust the pre-tightening force of the spring 1223, and further adjust the buffering degree thereof.
In one embodiment, the probe holder 121 has a plurality of probe rows arranged side by side, each probe row including a plurality of detection probes 122 arranged side by side; wherein the direction of juxtaposition of the plurality of detection probes 122 in the probe row is perpendicular to the direction of juxtaposition of the plurality of probe rows.
The molybdenum layer on the glass substrate 5 has a plurality of juxtaposed strip-shaped sub-regions 51 formed by laser scribing, each sub-region 51 corresponding to one probe bank.
Specifically, as shown in fig. 2, the molybdenum layer on the glass substrate 5 has a plurality of parallel stripe-shaped sub-regions 51 formed by laser scribing, and the detecting unit 1 is to detect the resistance between the adjacent sub-regions 51 and thus to reflect the insulation between the two sub-regions. The probe row is provided with a plurality of detection probes 122 which are uniformly distributed, the distribution direction of the detection probes 122 is along the length direction of the sub-region 51, and further, the detection probes 122 are corresponding to different positions of the sub-region 51, so that accurate detection can be realized. In the case of short circuit between adjacent subregions 51, the specific position of the short circuit between adjacent subregions 51 can be determined according to the specific condition of the detection probe 122 at different positions.
It should be noted that the longitudinal direction of the probe row is always the same as the longitudinal direction of the sub-region 51, as shown in fig. 2. Preferably, the lengthwise direction of the probe line and the lengthwise direction of the sub-area 51 are parallel to the conveying direction of the first conveyor belt 11. In order to reduce the requirement for the conveyance accuracy of the first conveyor 11, it is necessary to control the posture of the glass substrate 5 conveyed on the first conveyor 11, that is, to convey the molybdenum layer in such a manner that the longitudinal direction of the elongated sub-regions 51 is parallel to the conveyance direction on the first conveyor 11.
Specifically, the longitudinal direction of the sub-regions 51 is parallel to the conveying direction of the first conveyor belt 11, and even if the conveying distance of the first conveyor belt 11 to the glass substrate 5 varies, the sub-regions 51 can be almost accurately aligned with the corresponding probe line. On the other hand, if the length direction of the sub-regions 51 is perpendicular to the conveying direction of the first conveyor belt 11, once the conveying distance of the first conveyor belt 11 to the glass substrate 5 is deviated, since the width of the sub-regions 51 is narrow, the sub-regions 51 are likely to be misaligned with the corresponding probe rows.
In one embodiment, the cleaning unit 2 is covered with a closed housing 3, the closed housing 3 is respectively provided with an inlet 31 and an outlet 32 on two side walls in the conveying direction of the second conveyor belt 21, and the top of the housing is communicated with the negative pressure debris recovery device 4.
Specifically, as shown in fig. 1, a closed housing 3 is covered outside the cleaning unit 2, so as to prevent the debris from flying during purging and to collect the debris intensively by the debris crushing recovery device, and to prevent the external environment from affecting the cleaning process. The inlet 31 and the outlet 32 are used for input and output of the glass substrate 5.
In one embodiment, the sealed housing 3 extends to cover the detection unit 1, a partition 33 is disposed inside the sealed housing 3 between the cleaning unit 2 and the detection unit 1, and the partition 33 is provided with a delivery port 331.
Specifically, the closed housing 3 extends to the detection unit 1, as shown in fig. 1 of the drawings, the cleaning unit 2 and the detection unit 1 are both disposed in the closed housing 3, and the closed housing 3 can effectively prevent the external environment from affecting the detection process. The glass substrate 5 is conveyed from the cleaning unit 2 to the detecting unit 1 through a conveying port 331 on a partition 33, the partition 33 serving to prevent debris from entering the detecting unit 1 to some extent.
Further, in order to prevent the debris and the external environment from affecting, the inlet 31, the outlet 32, and the delivery port 331 are provided with openable and closable airtight doors.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "bottom", "top", "front", "rear", "inner", "outer", "left", "right", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be construed as limiting the present invention.
Although the invention herein has been described with reference to particular embodiments, it is to be understood that these embodiments are merely illustrative of the principles and applications of the present invention. It is therefore to be understood that numerous modifications may be made to the illustrative embodiments and that other arrangements may be devised without departing from the spirit and scope of the present invention as defined by the appended claims. It should be understood that features described in different dependent claims and herein may be combined in ways different from those described in the original claims. It is also to be understood that features described in connection with individual embodiments may be used in other described embodiments.
Claims (10)
1. The laser scribing detection device for the thin film photovoltaic module is characterized by comprising a detection unit, wherein the detection unit comprises:
a first conveyor belt for horizontally conveying the laser-scribed glass substrate;
the probe assembly comprises a probe frame and a plurality of detection probes arranged on the lower surface of the probe frame, and the probe frame is positioned right above the first conveyor belt;
the lifting assembly is arranged above the probe frame and is fixedly connected with the probe frame;
the resistance tester is connected with the detection probe through a cable;
the lifting assembly can drive the probe frame to lift so as to realize the contact and separation of the detection probe and the molybdenum layer on the surface of the glass substrate.
2. The thin film photovoltaic module laser scribing detection apparatus as claimed in claim 1, further comprising a cleaning unit, the cleaning unit comprising:
the second conveyor belt is arranged on one side of the conveying starting point of the first conveyor belt, and the installation height and the conveying direction of the second conveyor belt are the same as those of the first conveyor belt;
and the blowing air knife is arranged right above the second conveyor belt.
3. The laser scribing detection device of the thin film photovoltaic module according to claim 1 or 2, wherein the detection unit further comprises:
and the positioning assembly comprises a plurality of positioning columns arranged on two sides of the conveying direction of the first conveying belt.
4. The thin film photovoltaic module laser scribing detection apparatus as claimed in claim 1, wherein said detection probe comprises:
the top of the probe tube is fixed on the probe frame and the top of the probe tube is closed;
a needle body disposed in the probe tube;
and the spring is connected with the top end of the needle body and the inner wall surface of the top of the probe tube.
5. The laser scribing detection device of the thin film photovoltaic module according to claim 4, wherein a pressure sensor is arranged on an inner wall surface of the top of the probe tube, and the pressure sensor is used for detecting the elastic force of the spring.
6. The laser scribing detection device for the thin film photovoltaic module according to claim 1, wherein the probe frame is provided with a plurality of parallel probe rows, and each probe row comprises a plurality of detection probes arranged in parallel;
wherein a direction of juxtaposition of the plurality of detection probes in the probe row is perpendicular to a direction of juxtaposition of the plurality of probe rows.
7. The laser scribing detection apparatus for the thin film photovoltaic module according to claim 6, wherein the molybdenum layer on the glass substrate has a plurality of parallel strip-shaped sub-regions formed by laser scribing, and each of the sub-regions corresponds to one of the probe rows.
8. The laser scribing detection device for the thin film photovoltaic module as claimed in claim 2, wherein the cleaning unit housing is provided with a closed housing, the closed housing is provided with an inlet and an outlet on two side walls in the conveying direction of the second conveyor belt, respectively, and the top of the housing is communicated with a negative pressure debris recovery device.
9. The laser scribing detection device for the thin film photovoltaic module as claimed in claim 8, wherein the sealed housing extends to be sleeved outside the detection unit, a partition plate is arranged inside the sealed housing between the cleaning unit and the detection unit, and a conveying port is formed in the partition plate.
10. The laser scribing detection device for the thin film photovoltaic module according to claim 1, wherein the resistance tester is further connected with a display screen, and the display screen is used for displaying resistance test data.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011193617.1A CN112382583A (en) | 2020-10-30 | 2020-10-30 | Laser scribing detection device for thin-film photovoltaic module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011193617.1A CN112382583A (en) | 2020-10-30 | 2020-10-30 | Laser scribing detection device for thin-film photovoltaic module |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112382583A true CN112382583A (en) | 2021-02-19 |
Family
ID=74577520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011193617.1A Pending CN112382583A (en) | 2020-10-30 | 2020-10-30 | Laser scribing detection device for thin-film photovoltaic module |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112382583A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114325099A (en) * | 2021-11-29 | 2022-04-12 | 无锡极电光能科技有限公司 | Thin-film solar cell insulated wire resistance online testing device and method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101900785A (en) * | 2009-09-28 | 2010-12-01 | 新奥光伏能源有限公司 | Method for measuring surface resistance and contact resistance of solar battery and measuring tool thereof |
| CN102133689A (en) * | 2009-12-31 | 2011-07-27 | 杜邦太阳能有限公司 | Laser scribing apparatus and process for solar panel |
| JP2011152573A (en) * | 2010-01-27 | 2011-08-11 | Hitachi High-Technologies Corp | Method and apparatus for inspecting laser beam state, laser beam machining method and apparatus, and method for manufacturing solar panel |
| CN102437233A (en) * | 2011-10-19 | 2012-05-02 | 东莞宏威数码机械有限公司 | Laser reticle detecting system and method of solar battery board |
| CN102522450A (en) * | 2011-12-08 | 2012-06-27 | 北京精诚铂阳光电设备有限公司 | Defect restoration method and system thereof |
| CN202599892U (en) * | 2012-05-03 | 2012-12-12 | 深圳市创益科技发展有限公司 | Automatic detection device for laser scribed lines of thin film solar cell |
-
2020
- 2020-10-30 CN CN202011193617.1A patent/CN112382583A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101900785A (en) * | 2009-09-28 | 2010-12-01 | 新奥光伏能源有限公司 | Method for measuring surface resistance and contact resistance of solar battery and measuring tool thereof |
| CN102133689A (en) * | 2009-12-31 | 2011-07-27 | 杜邦太阳能有限公司 | Laser scribing apparatus and process for solar panel |
| JP2011152573A (en) * | 2010-01-27 | 2011-08-11 | Hitachi High-Technologies Corp | Method and apparatus for inspecting laser beam state, laser beam machining method and apparatus, and method for manufacturing solar panel |
| CN102437233A (en) * | 2011-10-19 | 2012-05-02 | 东莞宏威数码机械有限公司 | Laser reticle detecting system and method of solar battery board |
| CN102522450A (en) * | 2011-12-08 | 2012-06-27 | 北京精诚铂阳光电设备有限公司 | Defect restoration method and system thereof |
| CN202599892U (en) * | 2012-05-03 | 2012-12-12 | 深圳市创益科技发展有限公司 | Automatic detection device for laser scribed lines of thin film solar cell |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114325099A (en) * | 2021-11-29 | 2022-04-12 | 无锡极电光能科技有限公司 | Thin-film solar cell insulated wire resistance online testing device and method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2137543B1 (en) | Test equipment for automated quality control of thin film solar modules | |
| CN105555123B (en) | A kind of SMD towards charging tray inspects and checked equipment by random samples | |
| CN101598764A (en) | Solar cell detection machine station | |
| CN112382583A (en) | Laser scribing detection device for thin-film photovoltaic module | |
| CN102842520B (en) | Online detection device and method for thin film solar cell photovoltaic conversion layer | |
| JP2012501085A (en) | System and method for locating and immobilizing defects in photovoltaic elements | |
| KR20060103033A (en) | Apparatus for inspecting quality and labelling of lithium secondary battery | |
| CN108362739A (en) | The method for detecting the equipment and detection welding battery quality of welding battery quality | |
| CN202599892U (en) | Automatic detection device for laser scribed lines of thin film solar cell | |
| US7581451B2 (en) | Method and apparatus for flexure testing to discover inconsistencies in composite structures | |
| CN202196159U (en) | Detection device for thin film solar cell | |
| CN207851257U (en) | Test system | |
| CN209829632U (en) | Liquid crystal module battery cell defect detection mechanism | |
| CN208937645U (en) | A kind of test device | |
| CN209624641U (en) | A kind of battery tray and battery performance testing system | |
| CN102385041A (en) | Battery cell detection device | |
| CN209097594U (en) | Electrical testing and appearance detect all-in-one machine after a kind of diode forming | |
| CN205192672U (en) | Detecting system of electrostatic chuck electrostatic force | |
| CN217739435U (en) | Device for automatically detecting P1 marking effect of perovskite battery component | |
| US20130021051A1 (en) | Apparatus and method for contacting a solar cell | |
| JPH11211770A (en) | Static electricity evaluation device | |
| CN207992104U (en) | The equipment for detecting welding battery quality | |
| CN218767058U (en) | Blade type probe, probe unit and detection probe for semiconductor original plate | |
| CN112540256A (en) | Online detection method and detection system for battery performance | |
| CN104942592A (en) | Automatic laminating production line for TCO glass and nickel plates |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20210219 |