CN112372431A - 一种集成电路用单晶硅片边缘倒角装置 - Google Patents

一种集成电路用单晶硅片边缘倒角装置 Download PDF

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CN112372431A
CN112372431A CN202011267457.0A CN202011267457A CN112372431A CN 112372431 A CN112372431 A CN 112372431A CN 202011267457 A CN202011267457 A CN 202011267457A CN 112372431 A CN112372431 A CN 112372431A
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黄旭华
李忱钢
王志
封懿恒
陆成军
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Hengyang Qinghua Electronic Technology Co ltd
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Abstract

本发明公开了一种集成电路用单晶硅片边缘倒角装置，包括基座，所述基座的顶部外壁通过螺钉固定有支撑柱，且支撑柱的顶部外壁设置有放置板，所述放置板的顶部外壁设置有橡胶板，所述基座顶部外壁的两侧通过螺钉固定有同一个龙门架，且龙门架的顶部内壁通过螺钉固定有电动伸缩杆，所述电动伸缩杆活塞杆的一端通过螺钉固定有集尘箱，且集尘箱的两侧内壁均通过螺钉固定有吸尘泵，所述吸尘泵的输入端套接有吸尘管。本发明收集盘能够收集倒角过程中下落的灰尘，吸尘泵能够将倒角过程中飞扬的灰尘进行吸附，起到良好的自动固定倒角效果，倒角的过程中还能进行除尘，显著提高了倒角的效率。

Description

一种集成电路用单晶硅片边缘倒角装置
技术领域
本发明涉及倒角装置技术领域，尤其涉及一种集成电路用单晶硅片边缘倒角装置。
背景技术
单晶硅片，硅的单晶体，是一种具有基本完整的点阵结构的晶体，不同的方向具有不同的性质，是一种良好的半导材料。纯度要求达到99.9999％，甚至达到99.9999999％以上，用于制造半导体器件、太阳能电池等，用高纯度的多晶硅在单晶炉内拉制而成，拉制过程虽然精度很高，但是对成品硅片还是需要做必要的表面处理，去除一些毛刺和锐角。
但是，硅片比较易碎，表面处理的过程防止碎裂同时避免处理过程产生的风尘、碎片对硅片表面产生二次损害时非常关键的。
发明内容
本发明的目的是为了解决现有技术中存在的缺点，而提出的一种集成电路用单晶硅片边缘倒角装置。
为了实现上述目的，本发明采用了如下技术方案：
一种集成电路用单晶硅片边缘倒角装置，包括基座，所述基座的顶部外壁通过螺钉固定有支撑柱，且支撑柱的顶部外壁设置有放置板，所述放置板的顶部外壁设置有橡胶板，所述基座顶部外壁的两侧通过螺钉固定有同一个龙门架，且龙门架的顶部内壁通过螺钉固定有电动伸缩杆，所述电动伸缩杆活塞杆的一端通过螺钉固定有集尘箱，且集尘箱的两侧内壁均通过螺钉固定有吸尘泵，所述吸尘泵的输入端套接有吸尘管，且吸尘管远离吸尘泵的一端套接有吸尘头，所述支撑柱的两侧外壁均设置有水平设置的收集盘。
进一步的，所述龙门架的两侧内壁均开设有凹槽，且凹槽的顶部外壁设置有马达，马达的输出轴通过联轴器连接有丝杆。
进一步的，所述丝杆的外壁套接有滑块，且滑块与凹槽的内壁形成滑动配合，滑块的一侧外壁设置有倒角机构。
进一步的，所述倒角机构包括电动推杆，且电动推杆活塞杆的一端设置有连接柱，连接柱的外壁铰接有固定块，固定块的外壁开设有固定槽，固定槽的内壁设置有电动机，电动机的输出轴通过联轴器连接有倒角盘。
进一步的，所述连接柱的顶部外壁铰接有电动推杆，且电动推杆活塞杆的一端铰接有连接板，连接板的底端与固定块的顶部外壁相连接。
进一步的，所述龙门架顶部内壁的边角处均通过螺钉固定有灯板，且灯板的底部外壁通过螺钉固定有灯槽，灯槽的内壁设置有照明灯。
本发明的有益效果为：
1、该集成电路用单晶硅片边缘倒角装置，通过设置有电动伸缩杆、橡胶板、收集盘和吸尘泵，控制电动伸缩杆活塞杆伸长，压板向下移动对硅片进行固定，固定的过程中橡胶板能够起到良好的缓冲效果，防止硅片被压坏，收集盘能够收集倒角过程中下落的灰尘，吸尘泵能够将倒角过程中飞扬的灰尘进行吸附，起到良好的自动固定倒角效果，倒角的过程中还能进行除尘，显著提高了倒角的效率。
2、该集成电路用单晶硅片边缘倒角装置，通过设置有马达和照明灯，控制马达工作能够带动丝杆转动，丝杆转动能够调节倒角盘的高度，便于对不同厚度的硅片进行倒角，提高了装置的适用范围，照明灯能够起到良好的照明作用，可以方便工人在光线较弱的情况下操作，提高了人们操作的便捷性。
该装置中未涉及部分均与现有技术相同或可采用现有技术加以实现，该装置设计结构合理，使用方便，满足人们的使用需求。
附图说明
图1为本发明提出的一种集成电路用单晶硅片边缘倒角装置的整体结构剖视图；
图2为本发明提出的一种集成电路用单晶硅片边缘倒角装置的放置板结构立体图；
图3为本发明提出的一种集成电路用单晶硅片边缘倒角装置A处的放大结构示意图。
图中：1-滑块、2-丝杆、3-马达、4-龙门架、5-集尘箱、6-电动伸缩杆、7-吸尘泵、8-照明灯、9-吸尘头、10-液压杆、11-压板、12-放置板、13-基座、14-收集盘、15-橡胶板、16-支撑柱、17-连接板、18-电动机、19-倒角盘、20-固定块、21-电动推杆。
具体实施方式
下面结合具体实施方式对本专利的技术方案作进一步详细地说明。
下面详细描述本专利的实施例，所述实施例的示例在附图中示出，其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的，仅用于解释本专利，而不能理解为对本专利的限制。
在本专利的描述中，需要理解的是，术语“中心”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本专利和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本专利的限制。
在本专利的描述中，需要说明的是，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”、“设置”应做广义理解，例如，可以是固定相连、设置，也可以是可拆卸连接、设置，或一体地连接、设置。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本专利中的具体含义。
实施例1
参照图1-3，一种集成电路用单晶硅片边缘倒角装置，包括基座13，基座13的顶部外壁通过螺钉固定有支撑柱16，且支撑柱16的顶部外壁设置有放置板12，放置板12的顶部外壁设置有橡胶板15，基座13顶部外壁的两侧通过螺钉固定有同一个龙门架4，且龙门架4的顶部内壁通过螺钉固定有电动伸缩杆6，电动伸缩杆6活塞杆的一端通过螺钉固定有集尘箱5，且集尘箱5的两侧内壁均通过螺钉固定有吸尘泵7，吸尘泵7的输入端套接有吸尘管，且吸尘管远离吸尘泵7的一端套接有吸尘头9，支撑柱16的两侧外壁均设置有水平设置的收集盘14。
本发明中，龙门架4的两侧内壁均开设有凹槽，且凹槽的顶部外壁设置有马达3，马达3的输出轴通过联轴器连接有丝杆2。
本发明中，丝杆2的外壁套接有滑块1，且滑块1与凹槽的内壁形成滑动配合，滑块1的一侧外壁设置有倒角机构。
本发明中，倒角机构包括电动推杆21，且电动推杆21活塞杆的一端设置有连接柱，连接柱的外壁铰接有固定块20，固定块20的外壁开设有固定槽，固定槽的内壁设置有电动机18，电动机18的输出轴通过联轴器连接有倒角盘19。
本发明中，连接柱的顶部外壁铰接有电动推杆21，且电动推杆21活塞杆的一端铰接有连接板17，连接板17的底端与固定块20的顶部外壁相连接。
工作原理：使用时，将需要进行倒角的硅片放在放置板12上，控制电动伸缩杆6活塞杆伸长，压板11向下移动对硅片进行固定，固定的过程中橡胶板15能够起到良好的缓冲效果，防止硅片被压坏，固定后，控制马达3调节倒角的高度，控制液压杆10活塞倒角的距离，控制电动推杆21调节倒角的角度，电动机18工作带动倒角盘19对硅片进行倒角，收集盘14能够收集倒角过程中下落的灰尘，吸尘泵7能够将倒角过程中飞扬的灰尘进行吸附。
实施例2
参照图1，一种集成电路用单晶硅片边缘倒角装置，本实施例相较于实施例1，还包括龙门架4顶部内壁的边角处均通过螺钉固定有灯板，且灯板的底部外壁通过螺钉固定有灯槽，灯槽的内壁设置有照明灯8。
工作原理：照明灯8能够起到良好的照明作用，可以方便工人在光线较弱的情况下操作，提高了人们操作的便捷性。
以上所述，仅为本发明较佳的具体实施方式，但本发明的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本发明揭露的技术范围内，根据本发明的技术方案及其发明构思加以等同替换或改变，都应涵盖在本发明的保护范围之内。

Claims (6)

1.一种集成电路用单晶硅片边缘倒角装置，包括基座(13)，其特征在于，所述基座(13)的顶部外壁通过螺钉固定有支撑柱(16)，且支撑柱(16)的顶部外壁设置有放置板(12)，所述放置板(12)的顶部外壁设置有橡胶板(15)，所述基座(13)顶部外壁的两侧通过螺钉固定有同一个龙门架(4)，且龙门架(4)的顶部内壁通过螺钉固定有电动伸缩杆(6)，所述电动伸缩杆(6)活塞杆的一端通过螺钉固定有集尘箱(5)，且集尘箱(5)的两侧内壁均通过螺钉固定有吸尘泵(7)，所述吸尘泵(7)的输入端套接有吸尘管，且吸尘管远离吸尘泵(7)的一端套接有吸尘头(9)，所述支撑柱(16)的两侧外壁均设置有水平设置的收集盘(14)。
2.根据权利要求1所述的一种集成电路用单晶硅片边缘倒角装置，其特征在于，所述龙门架(4)的两侧内壁均开设有凹槽，且凹槽的顶部外壁设置有马达(3)，马达(3)的输出轴通过联轴器连接有丝杆(2)。
3.根据权利要求2所述的一种集成电路用单晶硅片边缘倒角装置，其特征在于，所述丝杆(2)的外壁套接有滑块(1)，且滑块(1)与凹槽的内壁形成滑动配合，滑块(1)的一侧外壁设置有倒角机构。
4.根据权利要求3所述的一种集成电路用单晶硅片边缘倒角装置，其特征在于，所述倒角机构包括电动推杆(21)，且电动推杆(21)活塞杆的一端设置有连接柱，连接柱的外壁铰接有固定块(20)，固定块(20)的外壁开设有固定槽，固定槽的内壁设置有电动机(18)，电动机(18)的输出轴通过联轴器连接有倒角盘(19)。
5.根据权利要求4所述的一种集成电路用单晶硅片边缘倒角装置，其特征在于，所述连接柱的顶部外壁铰接有电动推杆(21)，且电动推杆(21)活塞杆的一端铰接有连接板(17)，连接板(17)的底端与固定块(20)的顶部外壁相连接。
6.根据权利要求1-5任一所述的一种集成电路用单晶硅片边缘倒角装置，其特征在于，所述龙门架(4)顶部内壁的边角处均通过螺钉固定有灯板，且灯板的底部外壁通过螺钉固定有灯槽，灯槽的内壁设置有照明灯(8)。
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