CN112372142A - Femtosecond laser cleaning method for 3D printing metal surface - Google Patents
Femtosecond laser cleaning method for 3D printing metal surface Download PDFInfo
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- CN112372142A CN112372142A CN202011210371.4A CN202011210371A CN112372142A CN 112372142 A CN112372142 A CN 112372142A CN 202011210371 A CN202011210371 A CN 202011210371A CN 112372142 A CN112372142 A CN 112372142A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
- B23K26/354—Working by laser beam, e.g. welding, cutting or boring for surface treatment by melting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
Abstract
The invention discloses a femtosecond laser cleaning method for a 3D printed metal surface, which adopts femtosecond pulse laser and a scanning galvanometer system to clean a complex surface of a 3D printed metal component so as to reduce the surface roughness and improve the surface quality. The surface treatment method provided by the invention can be used for realizing the surface roughness (R) of the 3D printed metal componenta) The thickness is reduced from 20 mu m to 2 mu m, and the application range of 3D printing products is further expanded. Compared with the traditional grinding and polishing process, the surface cleaning method has the advantages of no pollution and high efficiency in laser polishing, small heat affected area in the processing process, capability of realizing rapid and automatic complex surface cleaning treatment under the condition of not damaging a component substrate, and restoration in the cleaning processMicropores and cracks are formed, the crack initiation is reduced, and the fatigue life of a sample is obviously prolonged. The method has an important application prospect in the aspect of post-processing of the 3D printed metal component.
Description
Technical Field
The invention belongs to the field of laser surface treatment, relates to a 3D printing technology, and particularly relates to a femtosecond laser cleaning method for a 3D printed metal surface.
Background
Additive manufacturing has the advantage of making lighter parts and better biocompatibility. It is being used extensively in aerospace, medical device development, particularly implants with complex surfaces, micro-structural porosity and patient specific geometries. Although 3D printing has great advantages in many aspects, the forming principle of the 3D printing determines that the surface appearance of a 3D printing product is poor, the surface roughness is high, and the standard required by industrial use is difficult to achieve. The main problems with surfaces manufactured by additive techniques are the often higher surface roughness, incomplete melting of the particles, easy falling off, etc. compared to conventionally produced parts. Therefore, for many applications, complex post-treatments are required to improve the surface quality.
The post-treatment method of the current additive manufacturing component mainly comprises a mechanical method and a chemical/electrochemical method. The traditional mechanical polishing comprises sanding, lathe polishing and grinding wheel polishing. For grooves (deep holes), there are difficulties in processing the corners of non-flat surfaces or metal members. For aerospace equipment and biomedical equipment, titanium alloy is generally adopted, and belongs to high-temperature alloy and other materials difficult to machine, the machining period is long, and the cost of a cutter is high. Due to the lack of viable automated polishing techniques for non-planar surfaces, complex components are typically done manually, rely on operator experience, and lack of uniformity and stability. The chemical method needs to change the chemical solution frequently, the surface flatness is uncontrollable, and the problem of environmental pollution caused by using the chemical liquid is not solved. For multi-component high-alloying metals such as titanium alloy and nickel-based alloy, the removal rate is influenced by the electrode potential and the resistivity between each group member and different materials, and easily passivated metal elements such as aluminum and chromium are mixed in the metals, so that the stripping removal difficulty of partial areas of the metals is increased.
Laser processing is a novel processing method for obtaining material surface smoothness, wherein continuous laser (infrared wavelength laser) or long pulse laser (pulse width is nanosecond to tens of milliseconds) utilizes the thermal effect generated by the interaction of material and laser, and removes surface thin layer substances through the thermal effect such as melting of a molten pool formed by heating, thereby obtaining polishing effect. Due to the heat effect of the polishing material, the surface thermal stress and the temperature gradient are large, and cracks are easy to generate when the hard and brittle material is polished. On the other hand, continuous laser (infrared wavelength laser) or long pulse laser may affect the overall shape and mechanical properties due to surface defects caused by excessive energy input, and the balance between polishing and surface properties and mechanical properties cannot be ensured during polishing.
Disclosure of Invention
The invention aims to provide a method for cleaning the surface of a 3D printed metal component by adopting femtosecond laser (ultrashort pulse). The method can be widely applied to post-processing of the surface of a 3D printed metal part, the smooth metal surface of the surface of a target component is obtained by using ultrashort pulse laser and one or more times of laser rapid processing according to the target requirement, micropores and cracks are repaired at the same time, and the fatigue resistance of the additive manufacturing metal is improved.
In order to achieve the above object, the present invention adopts the following technical solutions:
a femtosecond laser cleaning method for a 3D printed metal surface is used for cleaning the surface of a metal component with a complex three-dimensional surface obtained by 3D printing by adopting femtosecond pulse laser, and comprises the following steps:
(1) fixing a 3D printing metal component on a clamp of a numerical control three-dimensional translation table;
(2) carrying out three-dimensional model reconstruction on the target component by using a visual detection system, determining the three-dimensional morphology and coordinate parameters of the surface of the target component, and generating a control program of the motion track of the three-dimensional mobile platform;
(3) before laser polishing, the three-dimensional translation table is roughly adjusted and finely adjusted to be 0.1-1 mm away from the surface of the additive manufacturing part through inching control; after the point is adjusted, the laser spot is kept away from the surface of the additive manufacturing part by 9.8-10 mm under inching control, and the laser spot is in a positive defocusing state at the moment, and the defocusing distance is 0-100 mu m, so that tool setting before laser polishing is completed;
(4) setting parameters of a femtosecond laser, starting argon protection, and realizing the relative motion of a control program of a three-dimensional translation table motion track generated by a numerical control system and a laser focus so as to realize the fine polishing of an additive manufacturing part; meanwhile, the numerical control system controls the galvanometer system and the three-dimensional moving platform to move in the three-dimensional direction to adjust the coordinate position and the included angle of the component, so that the automatic cleaning process of the femtosecond laser on the surface of the metal component is realized, and the moving process ensures that the included angle of 45-80 degrees is formed between the moving path of the femtosecond pulse laser beam on the surface of the metal component and the 3D printing path;
(5) the cleaned member is removed and subjected to subsequent processing.
And the metal component is titanium alloy, the pulse width of the femtosecond laser is 200-300 fs, the wavelength is 1000-1030 nm, the pulse frequency is 80-100 MHz, the average power is 5-10W, the scanning speed of the galvanometer is 0-100 mm/s, the moving speed of the numerical control three-dimensional translation stage is 50-100 mm/s, the distance between scanning lines is 50-100 mm, and the diameter of a light spot is 60-80 um.
And the metal component is copper alloy, the pulse width of the femtosecond laser is 200-300 fs, the wavelength is 1000-1030 nm, the pulse frequency is 80-100 MHz, the average power is 5-10W, the scanning speed of the galvanometer is 0-100 mm/s, the moving speed of the numerical control three-dimensional translation stage is 50-100 mm/s, the distance between scanning lines is 50-100 mm, and the diameter of a light spot is 60-80 um.
And the metal component is stainless steel, the pulse width of the femtosecond laser is 200-300 fs, the wavelength is 1000-1030 nm, the pulse frequency is 80-100 MHz, the average power is 5-10W, the scanning speed of the galvanometer is 0-100 mm/s, the moving speed of the numerical control three-dimensional translation stage is 50-100 mm/s, the distance between scanning lines is 50-100 mm, and the diameter of a light spot is 60-80 um.
And in the laser surface cleaning process, the inert gas is obliquely introduced into the laser focusing area, the introducing position is positioned behind the femtosecond pulse laser beam, and the included angle between the introducing position and the surface of the metal component is smaller than the included angle between the femtosecond pulse laser beam and the surface of the metal component.
The femtosecond pulse laser beam vertically irradiates the surface of the metal component at a certain angle, and in the surface cleaning (repairing) process, inert gas is introduced into a laser focusing area at the same time, the inert gas is introduced obliquely, the introduced position is positioned behind the femtosecond pulse laser beam, and the included angle between the introduced position and the surface of the metal component is 45-80 degrees, and the included angle is smaller than the included angle between the femtosecond pulse laser beam and the surface of the metal component, so that the surface oxidation is reduced or avoided, and the surface quality is improved.
The femtosecond laser is used differently from a continuous laser (infrared wavelength laser) or a long pulse laser in that the femtosecond laser can act on a substance faster than atoms, and thus the femtosecond laser can evaporate atoms at a faster speed than heat energy transmitted through an object. All substances composed of atoms, including all gases, liquids and solids, have properties that depend on the speed at which the atoms move. The femtosecond laser is closely related to thermal energy in view of atomic motion, and when a continuous laser irradiation member is used, the entire member object becomes hot and melted. However, if the femtosecond laser is used to clean the component, the component is still cold. In fact, the focus of the femtosecond laser is located above the sample, and a high point femtosecond pulse to the sample can remove surface particles without melting the surface. And no trace of molten material is left.
The invention discloses a processing method for cleaning a 3D printed metal surface, and provides a novel laser processing method for obtaining a 3D printed surface of a high-finish component surface. The cleaning process utilizes the femtosecond laser to act on the substance faster than the atoms, so the femtosecond laser can evaporate the atoms at a speed faster than the heat energy transmitted by the object, and the metal particles adhered to the surface are rapidly melted and evaporated, thereby achieving the purposes of reducing the surface roughness and improving the surface quality of the 3D printed metal component.
Compared with the traditional mechanical treatment and electrochemical treatment, the invention has the advantages that:
(1) the invention relates to non-contact polishing, which is a traditional mechanical treatment and applies external force on the surface of a sample, and particularly, the micro component is easy to deform. The non-contact cleaning adopted by the invention can not cause the deformation and the fracture of the sample, and can process the samples of brittle materials, super-hard alloys and the like
(2) Polishing of the fine member: the fine focusing of the laser beam can reach 1um at minimum, the requirement of cleaning treatment of fine parts can be met, and microcracks generated in the printing process can be repaired.
(3) Selection of areas and cleaning of complex components: the laser cleaning can utilize a galvanometer and a multi-axis control system to assist visual positioning, and different degrees of roughness cleaning treatment of a specific area and a complex curved surface is realized.
(4) Green cleaning treatment: compared with electrochemical treatment, the laser treatment does not produce waste liquid, and avoids polluting the environment
(5) Due to the flexible transmission of laser, the penetrability can realize that machinery can not process the corners of grooves (deep holes) and metal members.
Meanwhile, compared with the prior continuous laser (infrared wavelength laser) or long pulse laser (pulse width is nanosecond to dozens of milliseconds) laser polishing method, the invention has the advantages that:
1. the method utilizes femtosecond laser processing to realize surface cleaning of the 3D printed metal component, and selects proper laser power, scanning times and scanning speed according to the requirement of target roughness to meet the requirement of the target roughness.
2. The method utilizes ultrashort pulse laser to remove surface particles on the metal surface without melting the surface, does not leave the trace of a molten material, repairs micropores and cracks, can realize the reinforcement of the metal surface while reducing the roughness, and improves the fatigue resistance of the metal manufactured by additive manufacturing
3. The method utilizes ultrashort pulse laser to clean the surface of the 3D printing metal component, the remelting depth is almost avoided, and the influence of heat input on the mechanical property of a workpiece substrate is reduced.
Drawings
FIG. 1 is a femtosecond pulse laser surface cleaning flow chart
FIG. 2 is a diagram of a femtosecond pulse laser surface cleaning apparatus according to the present invention.
In the figure: 1, visual scanning; 2 is a galvanometer; 3, visual scanning and 4, a mobile platform; and 5, an air blowing device. FIG. 3 is a schematic diagram of the femtosecond pulse laser cleaning principle according to the present invention
FIG. 4 is a comparative example surface microtopography that was not swept by a femtosecond laser
FIG. 5 shows the micro-topography of the surface of example 1 after cleaning.
FIG. 6 shows the micro-topography of the surface after cleaning in example 2 of the present invention.
FIG. 7 shows the micro-topography of the surface of example 3 after cleaning.
FIG. 8 is a microscopic morphology of comparative example 1 of the present invention after surface cleaning.
FIG. 9 is a microscopic morphology of comparative example 2 of the present invention after surface cleaning.
FIG. 10 is a comparison of fatigue performance of the invention after treatment with different light sources.
Detailed Description
The present invention will be described in further detail with reference to examples. It should be noted that the present embodiment only selects the fixed characteristic parameters for explaining the present invention, but does not limit the present invention. The technical method for cleaning the surface of the 3D printed metal component by adopting the pulse laser belongs to the protection scope of the patent of the invention.
The invention provides a 3D printing metal component surface cleaning process which comprises the following steps:
example 1:
cleaning Ti6Al4V manufactured by additive manufacturing is realized on laser cleaning equipment (as shown in figure 1, wherein: 1 is visual scanning, 2 is a galvanometer, 3 is visual scanning, 4 is a moving platform, and 5 is an air blowing device), and the process flow is as shown in figure 2, and the specific steps are as follows:
(1) the Ti6Al4V metal component is fixed on a numerical control three-dimensional translation table clamp, the surface of a workpiece can form a certain angle with the laser incidence direction, and the laser incidence direction is vertical to the surface of the workpiece to be processed in the embodiment of the invention.
(2) And (3) carrying out three-dimensional morphology and coordinate parameters on the target component by using a visual detection system, determining the three-dimensional morphology and the coordinate parameters of the surface of the target component, and establishing a three-dimensional digital model for the subsequent automatic cleaning of the complex surface so as to realize the automatic cleaning process of the complex surface.
(3) And detecting the gray scale of the surface of the component by using a visual detection system, and determining the 3D printing path of the surface of the metal component. The parameters of the femtosecond laser with the wavelength of 1030nm are set as the parameters required by laser cleaning processing, the laser power is 10W, the scanning speed is 1 mm/s, the pulse frequency is 100MHz, and the scanning interval is 100 um. The laser is activated and a pulsed laser beam irradiates the surface of the component.
(4) Meanwhile, the coordinate position and the included angle of the three-dimensional moving platform moving and adjusting component in the three-dimensional direction are controlled by the computer, the automatic cleaning process of the femtosecond laser on the surface of the metal component is realized, and the moving process ensures that the included angle of 50 degrees is formed between the moving path of the femtosecond pulse laser beam on the surface of the metal component and the 3D printing path.
(5) And (5) repeating the steps (2), (3) and (4) until the whole part is machined and the preset surface is cleaned. The cleaned member is removed and subjected to subsequent processing.
The femtosecond laser surface cleaning schematic diagram is shown in figure 3. The surface micro-topography of the untreated 3D printed titanium alloy member is shown in figure 4, and it can be seen that a large number of spherical particles exist on the surface, the surface roughness is large, and the actually measured surface roughness RaAnd 20 μm. The microstructure of the laser-cleaned surface at a scanning speed of 50mm/s is shown in FIG. 5. After cleaning, the residual particles on the surface are completely removed, and the surface roughness is obviously reduced.
Example 2:
cleaning 316L steel manufactured by additive manufacturing is realized on laser cleaning equipment, and the method comprises the following specific steps:
(1) the 316L steel metal component is fixed on a numerical control three-dimensional translation table clamp, the surface of a workpiece can form a certain angle with the laser incidence direction, and the laser incidence direction is vertical to the surface of the workpiece to be processed in the embodiment of the invention.
(2) And (3) carrying out three-dimensional morphology and coordinate parameters on the target component by using a visual detection system, determining the three-dimensional morphology and the coordinate parameters of the surface of the target component, and establishing a three-dimensional digital model for the subsequent automatic cleaning of the complex surface so as to realize the automatic cleaning process of the complex surface.
(3) And detecting the gray scale of the surface of the component by using a visual detection system, and determining the 3D printing path of the surface of the metal component. The parameters of the femtosecond laser with 1035nm wavelength are set as the parameters required by laser cleaning processing, the laser power is 8W, the scanning speed is 20mm/s, the pulse frequency is 80MHz, and the scanning interval is 100 um. The laser is activated and a pulsed laser beam irradiates the surface of the component.
(4) Meanwhile, the coordinate position and the included angle of the three-dimensional moving platform moving and adjusting component in the three-dimensional direction are controlled by the computer, the automatic cleaning process of the femtosecond laser on the surface of the metal component is realized, and the moving process ensures that the included angle of 50 degrees is formed between the moving path of the femtosecond pulse laser beam on the surface of the metal component and the 3D printing path.
(5) And (5) repeating the steps (2), (3) and (4) until the whole part is machined and the preset surface is cleaned. The cleaned member is removed and subjected to subsequent processing.
The 3D printed 316L stainless steel and copper alloy members were also subjected to femtosecond laser surface treatment, and as a result, the surface roughness thereof was 7 μm as shown in fig. 6. Titanium alloy is cleaned by adopting different processes, visible femtosecond laser has good surface cleaning effect on titanium alloy, stainless steel and copper alloy, surface roughness can be controlled by changing cleaning process parameters, and the method has important practical prospect.
Example 3:
cleaning the copper alloy manufactured by the additive on laser cleaning equipment is realized, and the method comprises the following specific steps:
(1) the copper alloy steel metal component is fixed on a numerical control three-dimensional translation table clamp, the surface of a workpiece can form a certain angle with the laser incidence direction, and the laser incidence direction is vertical to the surface of the workpiece to be processed in the embodiment of the invention.
(2) And (3) carrying out three-dimensional morphology and coordinate parameters on the target component by using a visual detection system, determining the three-dimensional morphology and the coordinate parameters of the surface of the target component, and establishing a three-dimensional digital model for the subsequent automatic cleaning of the complex surface so as to realize the automatic cleaning process of the complex surface.
(3) And detecting the gray scale of the surface of the component by using a visual detection system, and determining the 3D printing path of the surface of the metal component. The parameters of the femtosecond laser with 1035nm wavelength are set as the parameters required by laser cleaning processing, the laser power is 15W, the scanning speed is 50mm/s, the pulse frequency is 5MHz, and the scanning interval is 100 um. The laser is activated and a pulsed laser beam irradiates the surface of the component.
(4) Meanwhile, the coordinate position and the included angle of the three-dimensional moving platform moving and adjusting component in the three-dimensional direction are controlled by the computer, the automatic cleaning process of the femtosecond laser on the surface of the metal component is realized, and the moving process ensures that the included angle of 50 degrees is formed between the moving path of the femtosecond pulse laser beam on the surface of the metal component and the 3D printing path.
(5) And (5) repeating the steps (2), (3) and (4) until the whole part is machined and the preset surface is cleaned. The cleaned member is removed and subjected to subsequent processing.
The 3D-printed other metal 3D-printed member was also subjected to femtosecond laser surface treatment, and as a result, its surface roughness was reduced to 10 μm as shown in fig. 7. The femtosecond laser has good surface cleaning effect on titanium alloy, stainless steel and copper alloy, can realize controllable surface roughness by changing cleaning process parameters, and has important practical prospect.
TABLE 13D printing titanium alloy Metal component in femtosecond laser processing technological parameters
Comparative example 1: the parameters of the continuous fiber laser with 1035nm wavelength are set as the parameters required by laser cleaning processing, the laser power is 20W, the scanning speed is 20mm/s, the pulse frequency is 10MHz, and the scanning interval is 100 um. The laser was turned on and the polishing step was repeated with the polishing effect shown in figure 8. It can be seen from fig. 8 that the energy of the continuous laser is too great, causing multiple remelting to form a piled surface.
Comparative example 2: the parameters of the nanosecond laser with the wavelength of 1035nm are set as the parameters required by laser cleaning processing, the laser power is 20W, the scanning speed is 50mm/s, the pulse frequency is 5MHz, and the scanning interval is 100 um. The laser was turned on and the polishing step was repeated with the polishing effect shown in figure 9. It can be seen from fig. 9 that the nanosecond laser reflows multiple times to form a porous surface.
And performing fatigue tests on samples treated by femtosecond laser, nanosecond laser and fiber laser at stress levels of 120Mp, 200Mp, 250Mp, 300Mp and 450Mp respectively. The fatigue life is shown in fig. 10. It can be seen from fig. 10 that the fatigue performance of the sample after the femtosecond laser cleaning process is the best.
Claims (5)
1. A femtosecond laser cleaning method for a 3D printed metal surface is characterized in that: the method for cleaning the surface of the metal component with the complex three-dimensional surface by adopting the femtosecond pulse laser comprises the following steps:
(1) fixing a 3D printing metal component on a clamp of a numerical control three-dimensional translation table;
(2) carrying out three-dimensional model reconstruction on the target component by using a visual detection system, determining the three-dimensional morphology and coordinate parameters of the surface of the target component, and generating a control program of the motion track of the three-dimensional mobile platform;
(3) before laser polishing, the three-dimensional translation table is roughly adjusted and finely adjusted to be 0.1-1 mm away from the surface of the additive manufacturing part through inching control; after the point is adjusted, the laser spot is kept away from the surface of the additive manufacturing part by 9.8-10 mm under inching control, and the laser spot is in a positive defocusing state at the moment, and the defocusing distance is 0-100 mu m, so that tool setting before laser polishing is completed;
(4) setting parameters of a femtosecond laser, starting argon protection, and realizing the relative motion of a control program of a three-dimensional translation table motion track generated by a numerical control system and a laser focus so as to realize the fine polishing of an additive manufacturing part; meanwhile, the numerical control system controls the galvanometer system and the three-dimensional moving platform to move in the three-dimensional direction to adjust the coordinate position and the included angle of the component, so that the automatic cleaning process of the femtosecond laser on the surface of the metal component is realized, and the moving process ensures that the included angle of 45-80 degrees is formed between the moving path of the femtosecond pulse laser beam on the surface of the metal component and the 3D printing path;
(5) the cleaned member is removed and subjected to subsequent processing.
2. The method of claim 1, wherein: the metal component is titanium alloy, the pulse width of the femtosecond laser is 200-300 fs, the wavelength is 1000-1030 nm, the pulse frequency is 80-100 MHz, the average power is 5-10W, the scanning speed of the galvanometer is 0-100 mm/s, the moving speed of the numerical control three-dimensional translation stage is 50-100 mm/s, the distance between scanning lines is 50-100 mm, and the diameter of a light spot is 60-80 um.
3. The method of claim 1, wherein: the metal component is copper alloy, the pulse width of the femtosecond laser is 200-300 fs, the wavelength is 1000-1030 nm, the pulse frequency is 80-100 MHz, the average power is 5-10W, the scanning speed of the galvanometer is 0-100 mm/s, the moving speed of the numerical control three-dimensional translation stage is 50-100 mm/s, the distance between scanning lines is 50-100 mm, and the diameter of a light spot is 60-80 um.
4. The method of claim 1, wherein: the metal component is stainless steel, the pulse width of the femtosecond laser is 200-300 fs, the wavelength is 1000-1030 nm, the pulse frequency is 80-100 MHz, the average power is 5-10W, the scanning speed of the galvanometer is 0-100 mm/s, the moving speed of the numerical control three-dimensional translation stage is 50-100 mm/s, the distance between scanning lines is 50-100 mm, and the diameter of a light spot is 60-80 um.
5. The method according to any one of claims 1 to 4, wherein: and in the laser surface cleaning process, the inert gas is obliquely introduced into a laser focusing area, the introducing position is positioned behind the femtosecond pulse laser beam, and the included angle between the introducing position and the surface of the metal member is smaller than the included angle between the femtosecond pulse laser beam and the surface of the metal member.
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Cited By (2)
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| CN117483957A (en) * | 2023-12-06 | 2024-02-02 | 佛山市顺德区嘉林精密机械有限公司 | Laser polishing machine and polishing method using same |
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