CN112365181A - Qtime WIP control method of dynamic process flow - Google Patents
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Abstract
The invention provides a Qtime WIP control method of a dynamic process flow, which is used for acquiring data of a static process flow; acquiring data of a dynamic process flow; the method comprises the following steps: acquiring corresponding run card information according to each lot; providing EPR information; coding the operation sequence of the steps of the abnormal processing flow according to the abnormal processing flow information and the EPR information; judging whether the static process flow exceeds the step; giving future process flows of each lot, wherein the future process flows of each lot are the acquired data of the dynamic process flows; integrating the data of the static process flow and the data of the dynamic process flow, sequentially coding and sequencing to obtain the real process flow information of each lot and the Qtime information of the real process flow; and (4) calculating a Qzone model, and judging whether the Lot at the Qtime starting site can be dispatched. The management and control of the Qtime of the dynamic process flow are realized, whether the Lot can be dispatched at the Qtime starting station or not is judged, the risk that the Lot with the Qtime exceeds the Qtime after entering the dynamic process flow is reduced, and therefore the wafer quality and the process performance are improved.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a Qtime WIP control method of a dynamic process flow.
Background
The process Flow of wafer fabrication mainly includes two forms of static process Flow (Normal Flow) and dynamic process Flow (Branch Flow). The static process means that an engineer sets processing steps and sequences of products in advance, and the products are sequentially operated according to a set operation sequence. The dynamic process means that when abnormal conditions occur in product processing, an engineer sets an additional processing process, so that the abnormal wafer can obtain good process performance after additional processing operation. In any process flow, the operation of the wafer needs to be completed within a specified time during the production process, and if the specified time limit is exceeded, the exposure time of the wafer in the air is too long, which causes the degradation of parameters such as quality and process performance. Therefore, when setting the flow of a wafer, an engineer sets a managed Time (Queue Time, also called Qtime or Qzone) at a specific job site.
At present, the management and control of Qtime in the industry only relate to static processes. The Qtime process (Loop) of the static process is known, is not easy to change and is suitable for a single production line. However, with the continuous development of the semiconductor industry, the semiconductor manufacturing process is more and more complex, a plurality of uncertain factors such as Lot rework, priority change, equipment downtime and the like are not avoided in the production process, the setting of the Qtime Loop types by engineers when setting Branch Flow is more and more, and the control requirement on the Qtime WIP (on-line product count) is higher and higher. The single Qtime Loop on the Normal Flow only control has shown many limitations, such as risk rise of wafer ultra Qtime, increase of monitoring manpower, and increase of production cost, and is obviously not suitable for advanced semiconductor manufacturing.
Disclosure of Invention
In view of the above drawbacks of the prior art, an object of the present invention is to provide a method for managing and controlling a dynamic process flow Qtime WIP, which is used to solve the problem that the prior art cannot effectively manage and control the Qtime WIP in the interactive state of the static process flow and the dynamic process flow during the wafer manufacturing process.
In order to achieve the above objects and other related objects, the present invention provides a method for managing and controlling Qtime WIP of dynamic process flow, which at least comprises the following steps:
step one, acquiring data of a static process flow;
step two, acquiring data of the dynamic process flow; the data acquisition method of the dynamic process comprises the following steps: (1) acquiring corresponding run card (exception handling process) information according to each lot; providing EPR (equipment process relation) information; (2) encoding the operation sequence of the run card (abnormal processing flow) step according to the run card (abnormal processing flow) information and the EPR (equipment process relationship) information; (3) determining Normal skip step (step crossed by static process flow); (4) giving future process flows of each lot, wherein the future process flows of each lot are the acquired data of the dynamic process flows;
integrating the data of the static process flow and the data of the dynamic process flow, and sequentially coding and sequencing according to a stepseq (step sequence) to obtain the real process flow information of each lot and the Qtime information of the real process flow;
step four, calculating a Qzone model, and judging whether the Lot at the Qtime starting station can be dispatched.
Preferably, the data of the static process flow acquired in the step one at least includes: the operation time of each lot process in the static process flow, the starting station and the ending station of each lot, the Qtime information, the used machine list and the operation state of each machine in the machine list.
Preferably, the operation state of each machine in the step one includes: machine type, limit information, operating conditions, and capacity.
Preferably, the run card (exception handling flow) information of each lot in the step two at least includes: the status of lot in the process, start stepseq (start site), return stepseq (return site), stepinfo (step information).
Preferably, the EPR (equipment process relationship) information provided in step two at least includes: flowinfo, stepseq (sequence of steps), stepnedex, qtime information.
Preferably, the method for encoding the operation sequence of the run card (exception handling flow) step in the second step at least includes: (a) acquiring run card start stepnex (an index of an initial step of an exception handling flow) and return stepnex (an index of a return step); (b) acquiring pre steppingdex (index of previous step) and pre full stepseq (full name of sequence of previous step) of a station before run card (exception handling flow) flow; (c) assigning a full stepseq to the run card step (full step sequence);
preferably, the step three of the method for integrating the data of the static process flow and the data of the dynamic process flow comprises: (d) respectively extracting the data of the static process flow, the starting station and the ending station of each lot in the data of the dynamic process flow, and the Qtime name, the limited information and the machine type in the Qtime information; (e) obtaining corresponding Qtime of a downstream site; (f) and combining the current site information of each lot to obtain the real process flow information of each lot and the Qtime information of the real process flow.
Preferably, the method in step (f) obtains the real process flow information of each Lot and the Qtime information of the real process flow according to the management and control model of each Lot and by combining the current site information of each Lot.
Preferably, the management and control model of each Lot in step (f) includes: the method comprises the following steps of combining a single dynamic process flow, a single dynamic process flow and a static process flow, and combining a multi-dynamic process flow, a multi-dynamic process flow and a static process flow.
As described above, the method for managing and controlling the Qtime WIP of the dynamic process flow of the present invention has the following advantages: the management and control of the Qtime of the dynamic process flow are realized, whether the Lot can be dispatched at the Qtime starting station or not is judged, and the risk that the Lot with the Qtime exceeds the Qtime after entering the dynamic process flow is obviously reduced, so that the scrap rate is reduced, and the wafer quality and the process performance are further improved.
Drawings
FIG. 1 is a Qtime control model diagram of a single Branch Flow in the Qtime WIP control method of the dynamic process Flow of the present invention;
FIG. 2 is a schematic diagram of a Qtime control model of Branch Flow + Normal Flow in the Qtime WIP control method according to the dynamic process Flow of the present invention;
FIG. 3 is a schematic view of a Qtime control model of multiple Branch flows in the Qtime WIP control method of the dynamic process Flow of the present invention;
FIG. 4 is a schematic diagram of a Qtime control model of multiple Branch Flow + Normal Flow in the Qtime WIP control method of the dynamic process Flow of the present invention;
FIG. 5 is a flow chart of the Qtime WIP management and control method of the dynamic process flow of the present invention.
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
Please refer to fig. 1 to 5. It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated.
The invention provides a Qtime WIP control method of a dynamic process flow, as shown in FIG. 5, FIG. 5 is a flow chart of the Qtime WIP control method of the dynamic process flow. The method at least comprises the following steps:
step one, acquiring data of a static process flow; further, the data of the static process flow acquired in the first step of this embodiment at least includes: the Process Time (PT) of each lot Process in the static Process flow, the start site and the end site of each lot, the Qtime information, the used Equipment list, and the operating State (Equipment State) of each Equipment in the Equipment list. Further, the operation status of each machine in the first step of this embodiment includes: machine type, Constraint information (Constraint), job condition (Recipe/ppid), and production energy (WPH).
Step two, acquiring data of the dynamic process flow; the data acquisition method of the dynamic process comprises the following steps: (1) acquiring corresponding run card (exception handling process) information according to each lot; providing EPR (equipment process relation) information; (2) encoding the operation sequence of the run card (abnormal processing flow) step according to the run card (abnormal processing flow) information and the EPR (equipment process relationship) information; (3) determining Normal skip step (step crossed by static process flow); (4) and giving each lot future process flow which is the acquired data of the dynamic process flow.
Further, in the present invention, in step two of this embodiment, the run card (exception handling flow) information of each lot at least includes: the status of lot in the process, start stepseq (start site), return stepseq (return site), stepinfo (step information).
Further, the EPR (equipment-process relationship) information provided in step two of this embodiment at least includes: flowinfo, stepseq (sequence of steps), stepnedex, qtime information.
Further, in the present invention, the method for encoding the operation sequence of the run card (exception handling flow) step in step two at least includes: (a) acquiring run card start stepnex and return stepnex; (b) acquiring pre steppingex and pre full stepseq (full name of the sequence of the previous step) which are the previous stations of the process of run card; (c) assigning a full stepseq to the run card step;
integrating the data of the static process flow and the data of the dynamic process flow, and sequentially coding and sequencing according to a stepseq (step sequence) to obtain the real process flow information of each lot and the Qtime information of the real process flow;
further, the method for integrating the data of the static process flow and the data of the dynamic process flow in the third step of this embodiment includes:
(d) respectively extracting the data of the static process flow, the starting station and the ending station of each lot in the data of the dynamic process flow, and the Qtime name, the limited information and the machine type in the Qtime information;
(e) obtaining corresponding Qtime of a downstream site;
(f) and combining the current site information of each lot to obtain the real process flow information of each lot and the Qtime information of the real process flow.
Further, in the present embodiment, in step (f), the real process flow information of each Lot and the Qtime information of the real process flow are obtained according to the management and control model of each Lot and by combining the current station information of each Lot.
Further, the present invention provides that the management and control model of each Lot in step (f) of this embodiment includes: the combination of a single dynamic process Flow (single Branch Flow), a single dynamic process Flow (single Branch Flow) and a static process Flow (Normal Flow), and the combination of a multiple dynamic process Flow (multiple Branch Flow), a multiple dynamic process Flow (multiple Branch Flow) and a static process Flow (Normal Flow).
As shown in fig. 1 to 4, fig. 1 is a schematic diagram of a Qtime control model of a single Branch Flow in the Qtime WIP control method of the dynamic process Flow according to the present invention; FIG. 1 contains both types (1) and (2), where RC is denoted run card; flow is expressed as a flow; QT is denoted Qtime.
FIG. 2 is a schematic diagram of a Qtime control model of Branch Flow + Normal Flow in the Qtime WIP control method according to the dynamic process Flow of the present invention; FIG. 2 contains eight types (1) to (8), wherein RC is represented by run card; flow is expressed as a flow; QT is denoted Qtime.
FIG. 3 is a schematic view of a Qtime control model of multiple Branch flows in the Qtime WIP control method of the dynamic process Flow of the present invention; FIG. 3 contains four types (1) to (4), wherein RC is represented as run card; flow is expressed as a flow; QT is denoted Qtime.
FIG. 4 is a Qtime control model diagram of multiple Branch Flow + Normal Flow in the Qtime WIP control method of the dynamic process Flow of the present invention. FIG. 4 contains six types (1) to (6), wherein RC is represented by run card; flow is expressed as a flow; QT is denoted Qtime.
And the operation Flow integration stage is to encode the static process Flow data and the dynamic process Flow data acquired in the first step and the second step, sort the steps to be operated from small to large and finally obtain the real Flow information of the Lot. And then obtaining Qtime information of the real process Flow according to the Flow information of the real process Flow.
Step four, calculating a Qzone model, and judging whether the Lot at the Qtime starting station can be dispatched. The basic calculation steps of this step are as follows:
1) providing a queue sort (qsort) for each lot to each Qtime step;
2) the number of Lots and the information of each Lot which enter the Qtime process;
3) judging downstream broken lines or stockpiling stations;
4) when a certain downstream station is disconnected or stockpiled, whether the Lot to be dispatched can be forcibly dispatched to enter the Qtime process or not is judged.
In summary, the invention is used in the Qtime WIP management and control and real-time automatic dispatching system, the Qtime WIP management and control can periodically calculate the wire breakage and stockpiling condition of each Lot downstream station, and form a Qzone report. And the real-time automatic dispatching system judges whether the Lot can be dispatched at the initial site or not according to the calculation result of the Qzone report, and does not automatically dispatch if a broken line or a stacked product exists at the downstream and the Lot cannot be dispatched into the qtime process forcibly. Since formal use, the system is stable, the dispatching efficiency is greatly improved, and the risk of overdimensioning is reduced. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (9)
1. A Qtime WIP management and control method of a dynamic process flow is characterized by at least comprising the following steps:
step one, acquiring data of a static process flow;
step two, acquiring data of the dynamic process flow; the data acquisition method of the dynamic process comprises the following steps: (1) acquiring corresponding abnormal processing flow information according to each lot; providing equipment process relation information; (2) coding the operation sequence of the abnormal processing flow steps according to the abnormal processing flow information and the equipment process relation information; (3) judging whether the static process flow exceeds the step; (4) giving future process flows of each lot, wherein the future process flows of each lot are the acquired data of the dynamic process flows;
integrating the data of the static process flow and the data of the dynamic process flow, and sequentially coding and sequencing the data according to the step sequence to obtain the real process flow information of each lot and the Qtime information of the real process flow;
step four, calculating a Qzone model, and judging whether the Lot at the Qtime starting station can be dispatched.
2. The Qtime WIP management and control method of dynamic process flow of claim 1, wherein: the data of the static process flow acquired in the first step at least comprises: the operation time of each lot process in the static process flow, the starting station and the ending station of each lot, the Qtime information, the used machine list and the operation state of each machine in the machine list.
3. The Qtime WIP management and control method of dynamic process flow of claim 2, wherein: the operation state of each machine in the first step comprises: machine type, limit information, operating conditions, and capacity.
4. The Qtime WIP management and control method of dynamic process flow of claim 3, wherein: the exception handling process information of each lot in the second step at least comprises: the state of lot in the process, the starting site, the returning site, and the step information.
5. The Qtime WIP management and control method of dynamic process flow of claim 4, wherein: the equipment process relation information provided in the step two at least comprises the following steps: flow information, step sequence, step index and Qtime information.
6. The Qtime WIP management and control method of dynamic process flow of claim 5, wherein: the method for encoding the operation sequence of the exception handling flow step in the second step at least comprises the following steps: (a) acquiring an index of an initial step of an exception handling process and an index of a return step; (b) acquiring indexes of the previous step of the previous station of the flow of the exception handling flow and the full names of the sequences of the previous step; (c) and giving a full step sequence to the steps of the exception handling flow.
7. The Qtime WIP management and control method of dynamic process flow of claim 6, wherein: the method for integrating the data of the static process flow and the data of the dynamic process flow in the third step comprises the following steps: (d) respectively extracting the data of the static process flow, the starting station and the ending station of each lot in the data of the dynamic process flow, and the Qtime name, the limited information and the machine type in the Qtime information; (e) obtaining corresponding Qtime of a downstream site; (f) and combining the current site information of each lot to obtain the real process flow information of each lot and the Qtime information of the real process flow.
8. The Qtime WIP management and control method of dynamic process flow of claim 7, wherein: and (f) obtaining the real process flow information of each Lot and the Qtime information of the real process flow according to the control model of each Lot and the information of the current site of each Lot.
9. The method of claim 8, wherein the method further comprises: the control model of each Lot in the step (f) comprises: the method comprises the following steps of combining a single dynamic process flow, a single dynamic process flow and a static process flow, and combining a multi-dynamic process flow, a multi-dynamic process flow and a static process flow.
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Cited By (1)
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| CN114296413A (en) * | 2021-12-28 | 2022-04-08 | 上海华力微电子有限公司 | Intelligent regulation and control method and system based on site disconnection between Q-time capacity zones |
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