CN112359410A - Wedge-shaped sliding crystal bar clamping device based on Fz method - Google Patents

Wedge-shaped sliding crystal bar clamping device based on Fz method Download PDF

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Publication number
CN112359410A
CN112359410A CN202011439765.7A CN202011439765A CN112359410A CN 112359410 A CN112359410 A CN 112359410A CN 202011439765 A CN202011439765 A CN 202011439765A CN 112359410 A CN112359410 A CN 112359410A
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China
Prior art keywords
block
cavity
clamping device
crystal bar
wedge
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CN202011439765.7A
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Chinese (zh)
Inventor
李健乐
张淳
邢子淳
张丰
李伦
戴超
王彦君
孙晨光
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Zhonghuan Advanced Semiconductor Materials Co Ltd
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Zhonghuan Advanced Semiconductor Materials Co Ltd
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Priority to CN202011439765.7A priority Critical patent/CN112359410A/en
Publication of CN112359410A publication Critical patent/CN112359410A/en
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    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The invention discloses a wedge-shaped sliding crystal bar clamping device based on an Fz method, which comprises a smelting furnace opening, wherein a fixed ring is sleeved on the outer ring of the smelting furnace opening, trisection positions of the outer side wall of the fixed ring are in bolted connection with the bottom end of a clamping structure, the clamping structure comprises a positioning handle, the inner side of the bottom end of the positioning handle is in bolted connection with the fixed ring, the top end of the positioning handle is fixedly connected with an inclined block, the top of the inclined block is provided with a groove cavity, the top of the groove cavity is in bolted connection with a limiting beam, and the edge of the outer cavity opening of the groove cavity is in bolted connection with. Compared with the prior art, the invention has the beneficial effects that: according to the invention, the crystal bar is physically braked by utilizing the wedge-shaped sliding principle, and the friction force borne by the sliding-out of the crystal bar and the positive pressure generated by the gravity of the crystal bar on a clamping device reach a balanced state according to stress analysis, so that the crystal bar is prevented from falling obliquely; overcomes the defect of manual intervention in the shape of the prepared crystal, has stable preparation process, improves the efficiency and improves the productivity.

Description

Wedge-shaped sliding crystal bar clamping device based on Fz method
Technical Field
The invention relates to the technical field of crystal bar preparation, in particular to a wedge-shaped sliding crystal bar clamping device based on an Fz method.
Background
The existing crystal bar clamping device controls the clamping effect by two circular molybdenum sheets and manually controlling the contact time of the two circular molybdenum sheets and the crystal bar. The clamping device of this mode, its contact position with the crystal bar, the landing often easily leads to the crystal pulling failure, according to the analysis, is because the atress direction of current structure can not combine well with the produced gravity direction of crystal bar growth, and in the middle and later stage of crystal bar growth, when the quality is great, the skew takes place easily, leads to the crystal pulling failure. For this reason, we propose a wedge-shaped slip-off ingot clamping device based on the Fz method to solve the above problems.
Disclosure of Invention
The invention aims to provide a wedge-shaped sliding crystal bar clamping device based on an Fz method, which solves the problems in the prior art.
In order to achieve the purpose, the invention provides the following technical scheme: a wedge-shaped sliding crystal bar clamping device based on an Fz method comprises a melting furnace opening, wherein a fixed ring is sleeved on the outer ring of the melting furnace opening, trisection positions of the outer side wall of the fixed ring are connected with the bottom end of a clamping structure through bolts, the clamping structure comprises a positioning handle, the inner side of the bottom end of the positioning handle is connected with the fixed ring through bolts, the top end of the positioning handle is fixedly connected with an inclined block, the top of the inclined block is provided with a groove cavity, the top of the groove cavity is connected with a limiting beam through bolts, and the edge of the outer cavity opening of the groove cavity is connected with a distance adjusting;
the distance adjusting structure comprises a bottom block, the bottom block is connected with the bottom of the outer side of an inclined block through a bolt, the middle part of the bottom block vertically and symmetrically penetrates through and is in threaded connection with two ejector rods, the tops of the ejector rods movably support the bottoms of the vertical ends of two symmetrically-installed lifting blocks, the two lifting blocks are symmetrically installed on the edge of a cavity opening on the outer side of a cavity, the horizontal end of each lifting block is connected with the middle part of a limiting bolt through a bolt, the tail end of each limiting bolt is in threaded connection with the inclined block, and the middle part of the vertical end of each lifting block;
the middle part of the connecting pin is movably connected with the middle part of a pin rod, the middle part of the pin rod penetrates through the inner cavity of the groove cavity, the tail end of the pin rod is fixedly connected with the middle part of one end of the tracking block, two sides of the tracking block are slidably connected with the wall of the inner cavity of the groove cavity, the bottom surface of the other end of the tracking block is provided with a bolt sliding block, the side surface of the sliding block is in sliding contact with the inner cavity opening of the groove cavity, and the boss.
Preferably, the outer side wall of the opening of the melting furnace is provided with a plurality of positioning holes, the tail ends of the positioning holes are threaded, the middle parts of the positioning pins are in threaded connection with alignment holes, and the alignment holes are formed in the side wall of the fixing ring.
Preferably, the bottom end of the positioning handle is provided with a screw hole, a hole cavity of the screw hole is in threaded connection with a bolt, and the tail end of the bolt is in threaded connection with the side wall of the fixing ring.
Preferably, the middle part of the horizontal end of the lifting block is provided with a lifting groove, and the lifting groove is movably clamped with the middle part of the limiting bolt; the clamping ring is clamped at the notches at the two ends of the connecting pin, and the side wall of the clamping ring is movably contacted with the side wall of the lifting block.
Preferably, the outer end of the pin rod is in threaded connection with a limiting head, and the limiting head is movably contacted with the top surface of the bottom block; the inner end of the pin rod is fixedly connected with a connecting rod, the connecting rod penetrates through the inner cavity of the groove cavity, and the tail end of the connecting rod is fixedly connected with a tracking block.
Preferably, the molybdenum sheet is arc-shaped.
Preferably, the two sides of the tracking block are movably connected with pulleys, the pulleys are connected with a slide way in a rolling manner, and the slide way is arranged on the wall of the groove cavity.
Compared with the prior art, the invention has the beneficial effects that: according to the invention, the crystal bar is physically braked by utilizing the wedge-shaped sliding principle, and the friction force borne by the sliding-out of the crystal bar and the positive pressure generated by the gravity of the crystal bar on a clamping device reach a balanced state according to stress analysis, so that the crystal bar is prevented from falling obliquely; overcomes the defect of manual intervention in the shape of the prepared crystal, has stable preparation process, improves the efficiency and improves the productivity.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a structural diagram of a rotary feeding base according to the present invention;
FIG. 3 is an enlarged structural view of the structure A in FIG. 2 according to the present invention.
In the figure: 1, a melting furnace mouth, 10 positioning holes, 2 fixing rings, 20 alignment holes and 21 positioning pins; 3, a clamping device: 30 location handle, 300 screw holes, 301 bolt, 31 sloping block, 32 vallecular cavity, 320 slides, 33 spacing roof beam, 34 roll adjustment structure: 340 bottom block, 341 top rod, 342 lifting block, 343 lifting groove, 344 limit bolt, 345 snap ring and 346 connecting pin; 35 pins, 350 limit head, 351 connecting rod, 36 tracking table, 360 pulleys, 37 molybdenum sheet, 38 slide block.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides a technical solution: a wedge-shaped sliding crystal bar clamping device based on an Fz method comprises a melting furnace opening 1, a fixed ring 2 is sleeved on the outer ring of the melting furnace opening 1, trisection positions of the outer side wall of the fixed ring 2 are connected with the bottom end of a clamping structure 3 through bolts, the clamping structure 3 comprises a positioning handle 30, the inner side of the bottom end of the positioning handle 30 is connected with the fixed ring 30 through bolts, the top end of the positioning handle 30 is fixedly connected with an inclined block 31, the top of the inclined block 31 is provided with a groove cavity 32, the top of the groove cavity 32 is connected with a limiting beam 33 through bolts, and the edge of the outer side cavity opening of the groove;
the distance adjusting structure 34 comprises a bottom block 340, the bottom block 340 is connected with the bottom of the outer side of the inclined block 31 through bolts, the middle part of the bottom block 340 vertically and symmetrically penetrates through and is in threaded connection with two ejector rods 341, the tops of the ejector rods 341 movably jack the bottoms of the vertical ends of two lifting blocks 342 which are symmetrically installed, the two lifting blocks 342 are symmetrically installed on the edge of the cavity opening at the outer side of the groove cavity 32, the horizontal end of each lifting block 342 is connected with the middle part of a limiting bolt 344 through bolts, the tail end of each limiting bolt 344 is in threaded connection with the inclined block 31, and the middle part of the vertical; the height of the connecting pin 346, and thus the pin lever 35, is adjusted by adjusting the height of the lifting block 342.
The middle part of the connecting pin 346 is movably connected with the middle part of the pin rod 35, the middle part of the pin rod 35 penetrates through the inner cavity of the groove cavity 32, the tail end of the pin rod 35 is fixedly connected with the middle part of one end of the tracking block 36, the two sides of the tracking block 36 are slidably connected with the inner cavity wall of the groove cavity 32, the bottom surface of the other end of the tracking block 36 is provided with a bolt sliding block 38, the side surface of the sliding block 38 is in sliding contact with the inner side cavity opening of the groove cavity 32.
The outer side wall of the melting furnace opening 1 is provided with a plurality of positioning holes 10, the positioning holes 10 are threaded at the tail ends of positioning pins 21, the middle parts of the positioning pins 21 are in threaded connection with alignment holes 20, and the alignment holes 20 are formed in the side walls of the fixing rings 2. The fast positioning assembly of the fixing ring 2 is facilitated.
The bottom end of the positioning handle 30 is provided with a screw hole 300, the hole cavity of the screw hole 300 is connected with a bolt 301 in a threaded manner, and the tail end of the bolt 301 is connected with the side wall of the fixing ring 2 in a threaded manner.
The middle part of the horizontal end of the lifting block 342 is provided with a lifting groove 343, and the lifting groove 343 is movably clamped in the middle part of the limit bolt 344; the notches at the two ends of the connecting pin 346 are clamped with the snap ring 345, and the side wall of the snap ring 345 is movably contacted with the side wall of the lifting block 342. The height of the pin 35, and thus the initial height of the slider 38 and molybdenum sheet 37, is adjusted by adjusting the height of the elevator block 342.
The outer end of the pin rod 35 is in threaded connection with a limiting head 350, and the limiting head 350 is movably contacted with the top surface of the bottom block 340; the inner end of the pin rod 35 is fixedly connected with a connecting rod 351, the connecting rod 351 penetrates through the inner cavity of the groove cavity 32, and the tail end of the connecting rod 351 is fixedly connected with a tracking block 36. The sliding range of the sliding block 38 and the molybdenum sheet 37 can be controlled, and the shape of the contact position of the crystal bar can be changed, so that the crystal bar meets the novel design structure.
The molybdenum sheet 37 is arc-shaped, which is beneficial to the molybdenum sheet 37 to change the shape of the contact position of the crystal bar, so that the molybdenum sheet 37 conforms to a novel design structure.
The two sides of the tracking block 36 are movably connected with pulleys 360, the pulleys 360 are connected with the slide rails 320 in a rolling manner, and the slide rails 320 are arranged on the wall of the groove cavity 32. Facilitating sliding movement of tracking block 36 and slider 38 along slide 320 by pulley 360.
The working principle is as follows: when the crystal bar growth device is used, the inclined block 31, the groove cavity 32 and the slide block 38 are matched with each other by utilizing the wedge-shaped sliding principle according to the environment in a furnace, the slide rail 320, the tracking block 36, the pulley 360 and the slide block 38 are designed, the molybdenum sheet 37 on the slide block 38 is contacted with the crystal bar, the crystal bar is contacted with the molybdenum sheet 37 when growing to a certain stage, the positive pressure on the molybdenum sheet 37 is increased along with the growth of the crystal bar, and further the friction force between the pulley 360 and the slide rail 320 is synchronously increased. The frictional force ensures that the position of the crystal bar and the slide block 38 is kept stable, thereby ensuring the stability of the crystal bar. The molybdenum sheet 37 changes the shape of the contact position of the crystal bar, so that the crystal bar conforms to a novel design structure.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (7)

1. The utility model provides a wedge landing crystal bar clamping device based on Fz method, includes smelting furnace mouth (1), smelting furnace mouth (1) outer lane cup joints retainer plate (2), its characterized in that: the outer side wall trisection of the fixed ring (2) is in bolted connection with the bottom end of a clamping structure (3), the clamping structure (3) comprises a positioning handle (30), the inner side of the bottom end of the positioning handle (30) is in bolted connection with the fixed ring (30), the top end of the positioning handle (30) is fixedly connected with an inclined block (31), the top of the inclined block (31) is provided with a groove cavity (32), the top of the groove cavity (32) is in bolted connection with a limiting beam (33), and the edge of the outer side cavity opening of the groove cavity (32) is in bolted connection with a distance adjusting structure (34);
the distance adjusting structure (34) comprises a bottom block (340), the bottom block (340) is in bolted connection with the bottom of the outer side of an inclined block (31), the middle of the bottom block (340) vertically and symmetrically penetrates through and is in threaded connection with two ejector rods (341), the tops of the ejector rods (341) movably support the bottoms of the vertical ends of two lifting blocks (342) which are symmetrically installed, the two lifting blocks (342) are symmetrically installed on the edge of an opening of the outer side of a groove cavity (32), the horizontal end of each lifting block (342) is in bolted connection with the middle of a limiting bolt (344), the tail end of each limiting bolt (344) is in threaded connection with the inclined block (31), and the middle of the vertical end of each lifting block (342) is movably inserted into two ends of a connecting pin (346);
the middle part of the connecting pin (346) is movably connected with the middle part of a pin rod (35), the middle part of the pin rod (35) penetrates through the inner cavity of the groove cavity (32), the tail end of the pin rod (35) is fixedly connected with the middle part of one end of a tracking block (36), two sides of the tracking block (36) are connected with the inner cavity wall of the groove cavity (32) in a sliding mode, a sliding block (38) is screwed on the bottom surface of the other end of the tracking block (36), the side surface of the sliding block (38) is in sliding contact with the inner cavity opening of the groove cavity (32), and the boss surface of the sliding block (38) is.
2. The Fz method-based wedge-shaped slip-off ingot clamping device of claim 1, wherein: the outer side wall of the melting furnace opening (1) is provided with a plurality of positioning holes (10), the tail ends of the positioning holes (10) and the threaded positioning pins (21), the middle parts of the positioning pins (21) are in threaded connection with alignment holes (20), and the alignment holes (20) are formed in the side wall of the fixing ring (2).
3. The Fz method-based wedge-shaped slip-off ingot clamping device of claim 1, wherein: the bottom end of the positioning handle (30) is provided with a screw hole (300), the hole cavity of the screw hole (300) is in threaded connection with a bolt (301), and the tail end of the bolt (301) is in threaded connection with the side wall of the fixing ring (2).
4. The Fz method-based wedge-shaped slip-off ingot clamping device of claim 1, wherein: a lifting groove (343) is formed in the middle of the horizontal end of the lifting block (342), and the lifting groove (343) is movably clamped in the middle of the limiting bolt (344); clamping rings (345) are clamped at notches at two ends of the connecting pin (346), and the side walls of the clamping rings (345) are movably contacted with the side walls of the lifting block (342).
5. The Fz method-based wedge-shaped slip-off ingot clamping device of claim 1, wherein: the outer end of the pin rod (35) is in threaded connection with a limiting head (350), and the limiting head (350) is movably contacted with the top surface of the bottom block (340); the inner end of the pin rod (35) is fixedly connected with a connecting rod (351), the connecting rod (351) penetrates through the inner cavity of the groove cavity (32), and the tail end of the connecting rod (351) is fixedly connected with a tracking block (36).
6. The Fz method-based wedge-shaped slip-off ingot clamping device of claim 1, wherein: the molybdenum sheet (37) is arc-shaped.
7. The Fz method-based wedge-shaped slip-off ingot clamping device of claim 1, wherein: the two sides of the tracking block (36) are movably connected with pulleys (360), the pulleys (360) are connected with a slideway (320) in a rolling mode, and the slideway (320) is arranged on the wall of the groove cavity (32).
CN202011439765.7A 2020-12-10 2020-12-10 Wedge-shaped sliding crystal bar clamping device based on Fz method Pending CN112359410A (en)

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CN202011439765.7A CN112359410A (en) 2020-12-10 2020-12-10 Wedge-shaped sliding crystal bar clamping device based on Fz method

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113481588A (en) * 2021-09-04 2021-10-08 南通冠准材料贸易有限公司 Smelting furnace equipment for forming wafer ingot

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106241274A (en) * 2016-08-18 2016-12-21 太原理工大学 A kind of wedge shape self-locking break catching apparatus of fault-belt catching device
CN211256149U (en) * 2019-11-19 2020-08-14 天津中环领先材料技术有限公司 Clamping device for zone-melting single crystal silicon rod
CN214142605U (en) * 2020-12-10 2021-09-07 中环领先半导体材料有限公司 Wedge-shaped sliding crystal bar clamping device based on Fz method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106241274A (en) * 2016-08-18 2016-12-21 太原理工大学 A kind of wedge shape self-locking break catching apparatus of fault-belt catching device
CN211256149U (en) * 2019-11-19 2020-08-14 天津中环领先材料技术有限公司 Clamping device for zone-melting single crystal silicon rod
CN214142605U (en) * 2020-12-10 2021-09-07 中环领先半导体材料有限公司 Wedge-shaped sliding crystal bar clamping device based on Fz method

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Title
余长柏 等: ""套管钻井远程液压式套管夹持器技术研究"", 石油机械, vol. 42, no. 9, 30 September 2014 (2014-09-30), pages 44 - 47 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113481588A (en) * 2021-09-04 2021-10-08 南通冠准材料贸易有限公司 Smelting furnace equipment for forming wafer ingot
CN113481588B (en) * 2021-09-04 2021-11-16 南通冠准材料贸易有限公司 Smelting furnace equipment for forming wafer ingot

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