CN112358175A - Chemical vapor deposition method glass lathe material cabinet and using method - Google Patents
Chemical vapor deposition method glass lathe material cabinet and using method Download PDFInfo
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- CN112358175A CN112358175A CN202011426096.XA CN202011426096A CN112358175A CN 112358175 A CN112358175 A CN 112358175A CN 202011426096 A CN202011426096 A CN 202011426096A CN 112358175 A CN112358175 A CN 112358175A
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- Prior art keywords
- cabinet
- gas
- vapor deposition
- chemical vapor
- cabinet body
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- 239000000463 material Substances 0.000 title claims abstract description 60
- 238000000034 method Methods 0.000 title claims abstract description 25
- 239000011521 glass Substances 0.000 title claims abstract description 23
- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 19
- 229920000742 Cotton Polymers 0.000 claims abstract description 8
- 238000004321 preservation Methods 0.000 claims abstract description 7
- 239000007789 gas Substances 0.000 claims description 55
- 238000010438 heat treatment Methods 0.000 claims description 22
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 claims description 16
- 239000005049 silicon tetrachloride Substances 0.000 claims description 16
- 238000005192 partition Methods 0.000 claims description 11
- 239000002994 raw material Substances 0.000 claims description 5
- 230000000694 effects Effects 0.000 abstract description 2
- 239000013307 optical fiber Substances 0.000 description 8
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 238000009413 insulation Methods 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 229910003910 SiCl4 Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 2
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910006113 GeCl4 Inorganic materials 0.000 description 1
- 229910019213 POCl3 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 231100000572 poisoning Toxicity 0.000 description 1
- 230000000607 poisoning effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- IEXRMSFAVATTJX-UHFFFAOYSA-N tetrachlorogermane Chemical compound Cl[Ge](Cl)(Cl)Cl IEXRMSFAVATTJX-UHFFFAOYSA-N 0.000 description 1
- 238000001089 thermophoresis Methods 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention relates to a glass lathe material cabinet by a chemical vapor deposition method and a using method thereof. Adopt the intermediate layer to fill the cotton structure of heat preservation, have good thermal-insulated effect that keeps warm, be equipped with constant temperature control device in the cabinet, can make air, each feeding pipeline temperature and storage bottle temperature keep invariable in the cabinet. The inner cabinet body is also provided with a dangerous gas alarm system, so that the safety of the inner cabinet body is improved.
Description
Technical Field
The invention belongs to the technical field of optical fiber perform production, and particularly relates to a chemical vapor deposition method glass lathe material cabinet and a using method thereof.
Background
At present, the optical fiber and optical cable industry in China is in an unbalanced state, and the optical fiber preform rod is seriously dependent on import. In order to break this situation and realize the localization of the optical fiber preform, in recent years, various domestic optical fiber manufacturers have made many explorations.
A glass lathe for chemical vapor deposition (MCVD) is a lathe for producing prefabricated optical fiber rod, and the principle of using MCVD to make prefabricated optical fiber rod is that a quartz glass tube is used as base tube, and the first tube and tail tube are respectively welded with two ends of deposition tube, and they are fixed on two ends of MCVD lathe, one end of them is communicated with raw material inlet, and another end is connected with waste treatment system by means of waste discharge tube with larger external diameter. The reaction raw materials comprise various chlorides such as SiCl4, GeCl4, POCl3 and the like, and various elementary gases such as oxygen, chlorine, helium and the like. The hydrogen-oxygen blowtorch is arranged below the reaction deposition tube, when the reaction gas flows through the handle tube and reaches the deposition tube, the blowtorch moves from left to right at a constant speed at a certain flow rate, and the reactants are subjected to vapor deposition under the action of high temperature through the thermophoresis principle. And rapidly returning every time when the deposition head moves to the rightmost end, and repeating the above operations to complete the deposition of a new layer. And carrying out multi-layer deposition by using an MCVD (micro-vapor deposition) process, then, completing the manufacture of the core rod by using a rod contraction process, and processing the core rod by using a special outer packaging technology to form the optical fiber preform.
At present, an inner cabinet body adopted by an MCVD glass lathe material cabinet system has no heat preservation and insulation measures, so that the reduction of the environmental temperature can possibly cause the condensation and pipe blockage of a reactant boron trichloride. In addition, the material tank has no gas leakage protection measure, and once the SiCl4 material bottle or the hydrogen, oxygen and boron trichloride pipelines leak, the inner tank body can explode and cause the danger of poisoning operators.
Disclosure of Invention
In order to solve a plurality of problems of an MCVD glass lathe material cabinet system, the invention provides a chemical vapor deposition method glass lathe material cabinet and a using method thereof, and a material cabinet heat preservation function, a constant temperature control system, a dangerous gas leakage alarm system and a protective device are added on the basis of the prior art.
The technical scheme of the invention is that the chemical vapor deposition method glass lathe material cabinet comprises a material cabinet frame, a silicon tetrachloride material bottle system and various gas pipeline systems, wherein the silicon tetrachloride material bottle system and the various gas pipeline systems are arranged in the material cabinet frame, and the chemical vapor deposition method glass lathe material cabinet is characterized in that: the material cabinet comprises a material cabinet frame, a cabinet door, a rubber strip and heat insulation cotton, wherein the material cabinet frame comprises a shell, an inner cabinet body, an outer partition plate, the cabinet door is arranged in the outer partition plate, the heat insulation cotton is filled in a space formed by the inner cabinet body and the outer partition plate, the cabinet door is arranged on the front side of the material cabinet frame, and the rubber strip is adhered to the inner side of the cabinet door; the fixed frame is arranged on the inner side wall of the inner cabinet body, the heating plate is arranged in the fixed frame, the fan is arranged outside the fixed frame and close to the inner wall of the inner cabinet body, and the cabinet temperature thermocouple is arranged on the inner wall of the inner cabinet body;
the silicon tetrachloride charge bottle system and various gas pipelines are respectively provided with the annular heating belt and the pipe heating thermocouple; the temperature control meter is arranged on the surface of the cabinet door, the gas detector is arranged at the top of the inner wall of the inner cabinet body, and the quick exhaust valve penetrates through the material cabinet frame and is arranged at the top of the material cabinet frame and is a normally closed manual valve.
The use method of the chemical vapor deposition method glass lathe material cabinet is characterized by comprising the following steps:
the first step is as follows: turning on a power supply, setting a set value of a temperature control meter on a cabinet door, electrifying all the heating plate, the fan, the cabinet temperature thermocouple, the pipe temperature thermocouple and the annular heating belt to work, and confirming that the quick exhaust valve is closed;
the second step is that: confirming the electrification of the gas detector;
the third step: when the temperature of the external gas pipeline and the material bottle and the temperature of the internal gas pipeline and the material bottle reach set values, the chemical vapor deposition glass lathe can start to work;
the fourth step: opening output valves which connect the silicon tetrachloride material bottle system and various gas pipeline systems with the lathe; gas in a gas bottle arranged outside the material cabinet is output through a gas pipeline system, silicon tetrachloride gas is output through a silicon tetrachloride material bottle system, and all raw material gas is input into a chemical vapor deposition method glass lathe while keeping a set temperature;
the fifth step: once the gas pipeline leaks, the gas detector (12) sends an alarm signal, an operator manually opens the quick exhaust valve (4), and the quick exhaust valve (4) becomes an exhaust pipeline to exhaust gas in the cabinet.
The invention has the beneficial effects that: the constant temperature control device consisting of the heating plate, the temperature control meter and the thermocouple has the functions of temperature feedback and temperature regulation, and can keep the temperature of air, each feeding pipeline and the temperature of the material bottle in the cabinet constant. The interlayer between the outer shell and the inner cabinet body of the material cabinet is filled with the heat-preservation cotton structure, so that the material cabinet has excellent heat-preservation and heat-insulation effects. Meanwhile, the inner cabinet body is also provided with a dangerous gas alarm system, when the concentration of dangerous gas exceeds a set value, the system sends out an alarm signal to prompt a worker to open the quick exhaust valve to empty the gas in the cabinet, so that the harm of the leakage of the dangerous gas to the worker is reduced, and the safety of the inner cabinet body is improved.
Drawings
FIG. 1 is a schematic structural view of a MCVD glass vehicle-shaped material cabinet body;
FIG. 2 is a schematic view of the inner surface of the door of the MCVD glass vehicle-type cabinet.
Detailed Description
As shown in figures 1 and 2, the glass lathe material cabinet adopting the chemical vapor deposition method comprises a material cabinet frame 1, a silicon tetrachloride material bottle system 2 and various gas pipeline systems 3 which are arranged in the material cabinet frame 1, a quick exhaust valve 4, a heating plate 5, a fan 6, a fixing frame 7, a cabinet heating thermocouple 8, a pipe heating thermocouple 9, an annular heating belt 10, a temperature control meter 11 and a gas detector 12, wherein the material cabinet frame 1 comprises a shell 1-1, an inner cabinet body 1-2, an outer partition plate 1-3, a cabinet door 1-4, heat-insulating cotton 1-5 and rubber strips 1-6, the outer partition plate 1-3 is arranged around the inner side of the shell 1-1, the inner cabinet body 1-2 is arranged inside the outer partition plate 1-3, the heat-insulating cotton 1-5 is filled in a space formed by the inner cabinet body 1-2 and the outer partition plate 1-3, the cabinet door 1-4 is arranged on the front side of the material cabinet frame 1, and the rubber strip 1-6 is adhered to the inner side of the cabinet door 1-4; the fixed frame 7 is arranged on the inner side wall of the inner cabinet body 1-2, the heating plate 5 is arranged in the fixed frame 7, the fan 6 is arranged outside the fixed frame 7 and close to the inner wall of the inner cabinet body 1-2, and the cabinet temperature thermocouple 8 is arranged on the inner wall of the inner cabinet body 1-2; an annular heating belt 10 and a pipe heating thermocouple 9 are respectively arranged on the silicon tetrachloride charge bottle system 2 and various gas pipelines 3; the temperature control meter 11 is arranged on the surface of the cabinet door 1-3, the gas detector 12 is arranged on the top of the inner wall of the inner cabinet body 1-2, and the quick exhaust valve 4 is arranged on the top of the material cabinet frame 1 through the material cabinet frame 1 and is a normally closed manual valve.
A method for using a chemical vapor deposition method glass lathe material cabinet comprises the following steps:
the first step is as follows: turning on a power supply, setting a set value of a temperature control meter 11 on a cabinet door 1-3, electrifying all the heating plate 5, the fan 6, the cabinet warm thermocouple 8, the pipe warm thermocouple 9 and the annular heating belt 10 to work, and confirming that the quick exhaust valve 4 is closed;
the second step is that: confirming that gas detector 12 is energized;
the third step: when the temperature of the external gas pipeline and the material bottle and the temperature of the internal gas pipeline and the material bottle reach set values, the chemical vapor deposition glass lathe can start to work;
the fourth step: opening output valves which connect the silicon tetrachloride material bottle system 2 and various gas pipeline systems 3 with a lathe; gas in a gas bottle arranged outside the material cabinet is output through a gas pipeline system 3, silicon tetrachloride gas is output through a silicon tetrachloride material bottle system 2, and all raw material gas is input into a chemical vapor deposition method glass lathe while keeping a set temperature;
the fifth step: once the gas pipeline leaks, the gas detector 12 sends out an alarm signal, the operator manually opens the quick exhaust valve 4, and the quick exhaust valve 4 becomes an exhaust pipeline to exhaust the gas in the cabinet.
Claims (2)
1. The utility model provides a chemical vapor deposition method glass lathe material cabinet, includes material cabinet frame (1) and sets up silicon tetrachloride feed bottle system (2) and various gas piping system (3) in material cabinet frame (1), its characterized in that: the material cabinet is characterized by further comprising a quick exhaust valve (4), a heating plate (5), a fan (6), a fixing frame (7), a cabinet warm electric couple (8), a pipe warm electric couple (9), an annular heating belt (10), a temperature control meter (11) and a gas detector (12), wherein the material cabinet frame (1) comprises a shell (1-1), an inner cabinet body (1-2), an outer partition plate (1-3), a cabinet door (1-4), heat preservation cotton (1-5) and rubber strips (1-6), the outer partition plate (1-3) is arranged on the periphery of the inner side of the shell (1-1), the inner cabinet body (1-2) is arranged inside the outer partition plate (1-3), the heat preservation cotton (1-5) is filled in a space formed by the inner cabinet body (1-2) and the outer partition plate (1-3), the cabinet door (1-4) is arranged on the front side of the material cabinet frame (1), the rubber strips (1-6) are adhered to the inner sides of the cabinet doors (1-4); the fixing frame (7) is arranged on the inner side wall of the inner cabinet body (1-2), the heating plate (5) is arranged in the fixing frame (7), the fan (6) is arranged outside the fixing frame (7) and close to the inner wall of the inner cabinet body (1-2), and the cabinet temperature thermocouple (8) is arranged on the inner wall of the inner cabinet body (1-2);
the silicon tetrachloride charge bottle system (2) and various gas pipelines (3) are respectively provided with the annular heating belt (10) and a pipe heating thermocouple (9); the temperature control meter (11) is arranged on the surface of the cabinet door (1-3), the gas detector (12) is arranged on the top of the inner wall of the inner cabinet body (1-2), and the quick exhaust valve (4) penetrates through the material cabinet frame (1) and is arranged on the top of the material cabinet frame (1) and is a normally closed manual valve.
2. The use method of the chemical vapor deposition method glass lathe material cabinet according to the claim 1 is characterized by comprising the following steps:
the first step is as follows: turning on a power supply, setting a set value of a temperature control meter (11) on a cabinet door (1-3), electrifying all the heating plate (5), the fan (6), the cabinet warm thermocouple (8), the pipe warm thermocouple (9) and the annular heating belt (10) to work, and confirming that the quick exhaust valve (4) is closed;
the second step is that: confirming that the gas detector (12) is energized;
the third step: when the temperature of the external gas pipeline and the material bottle and the temperature of the internal gas pipeline and the material bottle reach set values, the chemical vapor deposition glass lathe can start to work;
the fourth step: opening output valves which connect the silicon tetrachloride material bottle system (2) and various gas pipeline systems (3) with a lathe; gas in a gas bottle arranged outside the material cabinet is output through a gas pipeline system (3), silicon tetrachloride gas is output through a silicon tetrachloride material bottle system (2), and all raw material gases are input into a chemical vapor deposition method glass lathe while keeping a set temperature;
the fifth step: once the gas pipeline leaks, the gas detector (12) sends an alarm signal, an operator manually opens the quick exhaust valve (4), and the quick exhaust valve (4) becomes an exhaust pipeline to exhaust gas in the cabinet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011426096.XA CN112358175A (en) | 2020-12-09 | 2020-12-09 | Chemical vapor deposition method glass lathe material cabinet and using method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011426096.XA CN112358175A (en) | 2020-12-09 | 2020-12-09 | Chemical vapor deposition method glass lathe material cabinet and using method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112358175A true CN112358175A (en) | 2021-02-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011426096.XA Pending CN112358175A (en) | 2020-12-09 | 2020-12-09 | Chemical vapor deposition method glass lathe material cabinet and using method |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6406519B1 (en) * | 1998-03-27 | 2002-06-18 | Advanced Technology Materials, Inc. | Gas cabinet assembly comprising sorbent-based gas storage and delivery system |
| JP2003137586A (en) * | 2001-11-01 | 2003-05-14 | Fujikura Ltd | Gas phase adding device for manufacturing optical fiber |
| CN1490267A (en) * | 2003-07-14 | 2004-04-21 | 烽火通信科技股份有限公司 | Method for manufacturing rare earth extended fibre-optical prefabricated bar |
| US20130337737A1 (en) * | 2012-06-14 | 2013-12-19 | International Business Machines Corporation | Compressed gas cylinder cabinet with regulated exhaust control |
| CN106495461A (en) * | 2016-11-02 | 2017-03-15 | 中国电子科技集团公司第四十六研究所 | A kind of rare-earth-doped fiber precast rod gas phase doping heating and heat-insulating device and doping method |
| CN214327558U (en) * | 2020-12-09 | 2021-10-01 | 中国电子科技集团公司第四十六研究所 | Be used for chemical vapor deposition method glass lathe material cabinet |
-
2020
- 2020-12-09 CN CN202011426096.XA patent/CN112358175A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6406519B1 (en) * | 1998-03-27 | 2002-06-18 | Advanced Technology Materials, Inc. | Gas cabinet assembly comprising sorbent-based gas storage and delivery system |
| JP2003137586A (en) * | 2001-11-01 | 2003-05-14 | Fujikura Ltd | Gas phase adding device for manufacturing optical fiber |
| CN1490267A (en) * | 2003-07-14 | 2004-04-21 | 烽火通信科技股份有限公司 | Method for manufacturing rare earth extended fibre-optical prefabricated bar |
| US20130337737A1 (en) * | 2012-06-14 | 2013-12-19 | International Business Machines Corporation | Compressed gas cylinder cabinet with regulated exhaust control |
| CN106495461A (en) * | 2016-11-02 | 2017-03-15 | 中国电子科技集团公司第四十六研究所 | A kind of rare-earth-doped fiber precast rod gas phase doping heating and heat-insulating device and doping method |
| CN214327558U (en) * | 2020-12-09 | 2021-10-01 | 中国电子科技集团公司第四十六研究所 | Be used for chemical vapor deposition method glass lathe material cabinet |
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Application publication date: 20210212 |
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