CN1123550C - Piezoelectric ceramic material for ultrasonic motor - Google Patents

Piezoelectric ceramic material for ultrasonic motor Download PDF

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Publication number
CN1123550C
CN1123550C CN 01142616 CN01142616A CN1123550C CN 1123550 C CN1123550 C CN 1123550C CN 01142616 CN01142616 CN 01142616 CN 01142616 A CN01142616 A CN 01142616A CN 1123550 C CN1123550 C CN 1123550C
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piezoelectric ceramic
present
temperature stability
good
ultrasonic motor
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CN 01142616
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CN1349954A (en
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陈海
孟中岩
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Shanghai Jiaotong University
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Shanghai Jiaotong University
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Abstract

The present invention relates to a piezoelectric ceramic material for ultrasonic motors, which is characterized in that quaternary system piezoelectric ceramic is composed of PSN-PMN-PZ-PT, Zr-Ti ratio can be adjusted near a morphotropic phase boundary so as to make composition position in a tetragonal phase region, and SR<2+> is added so as to equivalently replace Pb<2+> and increase temperature stability. The piezoceramic material of the present invention can adjust performance in a wide range and has good comprehensive electromechanical performance and good temperature stability of resonance frequency, and the present invention is suitable for the ultrasonic motors and has good commercial values.

Description

The piezoceramic material that is used for ultrasonic motor
Technical field:
What the present invention relates to is a kind of piezoceramic material that is used for ultrasonic motor, belongs to electronic material and components and parts field.
Background technology:
The piezoelectric ultrasound motor that is operated in resonant condition in general requires to use " rigid " piezoceramic material, promptly has the high mechanical quality factor (Qm).While also demanding electromechanical coupling factor (Kp) and piezoelectric constant (d 33), so that motor has higher electromechanical conversion efficiency and driving moment.In addition, what be even more important a bit is to have high temperature stability, and during motor operations, piezoelectric ceramics produces heat, and temperature raises, and the resonant frequency drift makes the motor operations unstable properties, brings difficulty also for the driving control of motor.
But, for general piezoelectric ceramics, be difficult to guarantee to have high the mechanical quality factor, electromechanical coupling factor, piezoelectric constant simultaneously that the temperature stability of its resonant frequency is usually also not enough.
Summary of the invention:
The objective of the invention is at the deficiencies in the prior art, a kind of new piezoceramic material that is used for ultrasonic motor is provided, make it to have good comprehensive electromechanical properties, and the temperature stability of resonant frequency is better, has market application foreground widely.
For realizing such purpose, the present invention considers that (principal constituent is xPb (Sb in antimony niobium Pb-based lanthanumdoped zirconate titanates system 1/2Nb 1/2) O 3-yPbZrO 3-zPbTiO 3) characteristics be that the Kp value is significantly high, good stability, for example: x=0.02, y=0.51, the prescription of z=0.47, the Kp value is up to 0.81, but the Qm value has only 85.And manganese niobium Pb-based lanthanumdoped zirconate titanates is that (principal constituent is xPb (Mn 1/3Nb 2/3) O 3-yPbZrO 3-zPbTiO 3) characteristics are high Qm values.For example: x=0.10, y=0.80, the prescription of z=0.10, the Qm value can be up to 6300.Technical scheme of the present invention is formed antimony niobium-manganese niobium-lead zirconate-titanate (PSN-PMN-PZ-PT) four-component-system piezoelectric ceramics in conjunction with both characteristics.Temperature stability can be improved by two approach: (1) adjusts zirconium titanium ratio near accurate homotype phase boundary makes composition be positioned at cubic phase region: (2) add Sr 2+To pb 2+Carry out replacing with valency.
Quaternary system of the present invention is formed (molar percentage):
3~12%Pb (Sb 1/2Nb 1/2) O 3, 3~12%Pb (Mn 1/3Nb 2/3) O 3, 39~46%PbZrO 3, 39~46%PbTiO 3, the Pb position is by 1~5mol%Sr 2+Replace, add 0.1~0.3wt%CeO 2
Adopting raw material is analytically pure PbO, SrCO 3, Sb 2O 3, MnCO 3, Nb 2O 5, ZrO 2, CeO 2With chemical pure TiO 2Adopt the synthetic grog of two-step approach, respectively with Sb 2O 3And Nb 2O 5, MnCO 3And Nb 2O 5By stoichiometric ratio difference mixing and ball milling, the synthetic presoma of pre-burning 4h under 1150 ℃ temperature.Again with these presomas and PbO, ZrO 2, TiO 2, SrCO 3And CeO 2Mix, at 930 ℃ of down synthetic PSN-PMN-PZ-PT powders, after 150MPa is dry-pressing formed, burn till again, calcining system is 1200~1260 ℃/2h, sample after burning till is through the disk of polish, be polished to diameter 10~11mm, thickness 0.5mm, by silver back making alive 3~4KV/mm polarization 30min in 120 ℃ silicone oil.Survey its performance after placing 24h.Resonant frequency and anti-resonance frequency and corresponding impedance with resonance-antiresonance method measure sample | Z|, computer electric coupling coefficient Kp and mechanical quality factor Q m, piezoelectric constant d 33Measure by quasi-static method.
Temperature stability adopts resonant frequency to vary with temperature rate Δ f/f 25Describe.
Figure C0114261600041
The resonant frequency that f (T) and f (25) record when representing interior a certain measurement temperature of specified temperature scope and room temperature (25 ℃) respectively.
Antimony niobium of the present invention-manganese niobium-lead zirconate-titanate four-component-system piezoelectric ceramics is a kind of new piezoelectric ceramics system, can adjust its performance in the scope of broad, have comprehensive preferably electromechanical properties, the temperature stability of resonant frequency is better, be applicable to ultrasonic motor, have good commercial and be worth.
Embodiment:
Below by specific embodiment technical scheme of the present invention is described in detail.
Embodiment 1:
Material is formed (molar percentage):
5%Pb (Sb 1/2Nb 1/2) O 3, 5%Pb (Mn 1/3Nb 2/3) O 3, 44.5%PbZrO 3, 45.5%PbTiO 3, the Pb position is by 2mol%Sr 2+Replace, add 0.25wt%CeO 2
Electromechanical properties are: Kp=0.49, Qm=1763, d 33=312pC/N.This prescription has good comprehensive electromechanical properties for preferred result, and the temperature-stable of resonant frequency is very good.
Embodiment 2:
Material is formed (molar percentage):
5%Pb (Sb 1/2Nb 1/2) O 3, 5%Pb (Mn 1/3Nb 2/3) O 3, 46%PbZrO 3, 44%PbTiO 3, the Pb position is by 2mol%Sr 2+Replace, add 0.25wt%CeO 2
Electromechanical properties are: Kp=0.45, Qm=1613, d 33=278pC/N.This formula adjustment zirconium titanium ratio, the temperature stability of comprehensive electromechanical properties and resonant frequency is better, but not as embodiment 1.
Embodiment 3:
Material is formed (molar percentage):
5%Pb (Sb 1/2Nb 1/2) O 3, 5%Pb (Mn 1/3Nb 2/3) O 3, 44.5%PbZrO 3, 45.5%PbTiO 3, add 0.25wt%CeO 2
Electromechanical properties are: Kp=0.43, Qm=1432, d 33=264pC/N.This prescription does not add Sr 2+, the relative embodiment of the temperature stability of comprehensive electromechanical properties and resonant frequency 1 and 2 is relatively poor.
Fig. 1 varies with temperature rate for the resonant frequency of embodiment 1~3.

Claims (1)

1, a kind of piezoceramic material that is used for ultrasonic motor is characterized in that adopting antimony niobium-manganese niobium-lead zirconate-titanate (PSN-PMN-PZ-PT) to form four-component-system piezoelectric ceramics, and quaternary system is formed (molar percentage) and is: 3~12%Pb (Sb 1/2Nb 1/2) O 3, 3~12%Pb (Mn 1/3Nb 2/3) O 3, 39~46%PbZrO 3, 39~46%PbTiO 3, the Pb position is by 1~5mol%Sr 2+Replace, add 0.1~0.3wt%CeO 2
CN 01142616 2001-12-11 2001-12-11 Piezoelectric ceramic material for ultrasonic motor Expired - Fee Related CN1123550C (en)

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Application Number Priority Date Filing Date Title
CN 01142616 CN1123550C (en) 2001-12-11 2001-12-11 Piezoelectric ceramic material for ultrasonic motor

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CN1123550C true CN1123550C (en) 2003-10-08

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1986486B (en) * 2006-12-25 2011-10-05 中国科学院上海硅酸盐研究所 Piezoelectric ceramic material for high performance type-B ultrasonic diagnosis apparatus transducer and its preparing method
CN114249592A (en) * 2021-12-24 2022-03-29 无锡市惠丰电子有限公司 Preparation method of hard piezoelectric ceramic material

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