CN112349632A - Self-locking substrate sampling inspection device - Google Patents
Self-locking substrate sampling inspection device Download PDFInfo
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- CN112349632A CN112349632A CN202011222459.8A CN202011222459A CN112349632A CN 112349632 A CN112349632 A CN 112349632A CN 202011222459 A CN202011222459 A CN 202011222459A CN 112349632 A CN112349632 A CN 112349632A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67271—Sorting devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
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- Microelectronics & Electronic Packaging (AREA)
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- Sampling And Sample Adjustment (AREA)
Abstract
The invention relates to the field of semiconductor packaging, and discloses a self-locking substrate sampling inspection device. The substrate sampling inspection device of the present invention includes: magazine, selective examination tool and locking mechanism, the selective examination tool includes: left side board, right side board, posterior lateral plate and bottom plate, left side board, right side board, posterior lateral plate and bottom plate form the accommodation space who accepts the base plate, and locking mechanism is mirror symmetry's setting at the front end of selective examination tool, includes: the rotary shaft, the barrier strip and the spring, the barrier strip is rotatably arranged on the sampling inspection jig through the rotary shaft, and the spring is arranged between the bottom side plate and the barrier strip. According to the substrate selective inspection device, when the selective inspection jig is connected with the material box, the barrier strips are in a horizontal state, so that the placing groove of the material box is communicated with the accommodating space of the selective inspection jig, and the substrate is conveniently taken out or put in; the selective examination tool is after separating with the magazine, and the spring promotes the blend stop, and the blend stop will the both sides locking of selective examination tool, and the damage of base plate has been avoided to the base plate can not followed the front end roll-off of selective examination tool.
Description
Technical Field
The embodiment of the invention relates to the field of semiconductor packaging, in particular to a self-locking substrate sampling inspection device.
Background
The semiconductor packaging refers to a process of processing a wafer passing a test according to a product model and a functional requirement to obtain an independent chip. The packaging process comprises the following steps: the wafer from the previous wafer process is cut into small chips (Die) through a scribing process, the cut chips are attached to corresponding islands of a substrate (substrate or Lead frame) through conductive silver adhesive, and bonding pads (Bond pads) of the chips are connected to corresponding pins (Lead) of the substrate through superfine metal (gold, silver, copper and aluminum) wires or conductive resin to form a required circuit.
The base plate is a rectangular thin plate, and the base plate after being processed in production is horizontally stored in the material box. A plurality of placing grooves are arranged on the left side wall and the right side wall of the material box at intervals and used for horizontally inserting the substrate. The processed substrate is inspected and then flows into the next process.
However, in the prior art, when a detection person takes out a substrate from a material box, the material taking from the material box is difficult due to no connection of a guide tool, and when the inspected substrate is put back into the material box, the substrate is obliquely inserted, so that the substrate is damaged; especially, the substrate taken out is easy to slide off the jig, which causes damage to the substrate.
Disclosure of Invention
The invention aims to provide a self-locking substrate sampling device to solve the problems of taking and placing substrates and easy slipping in the background technology.
The embodiment of the invention provides a self-locking substrate sampling device, which comprises: the device comprises a material box, a sampling inspection jig and a locking mechanism;
a plurality of groups of placing grooves are correspondingly arranged on the left side wall and the right side wall of the material box, the corresponding placing grooves are positioned at the same height, and the corresponding placing grooves are used for horizontally placing the substrate;
the selective examination tool includes: a left side plate, a right side plate, a rear side plate and a bottom side plate;
the left side plate and the right side plate are respectively arranged at two sides of the bottom side plate, the rear side plate is arranged at one end of the bottom side plate, the left side plate, the right side plate, the rear side plate and the bottom side plate form an accommodating space, and the accommodating space is used for accommodating base plates on a group of placing grooves;
the left side plate, the right side plate and the bottom side plate are arranged in an I shape, and the bottom side plate is provided with a plurality of hollow areas;
the two locking mechanisms are arranged at one end, far away from the rear side plate, of the sampling inspection jig in a mirror symmetry mode;
the locking mechanism includes: the rotating shaft, the barrier strip and the spring;
the rotating shaft is arranged on a side plate of the sampling inspection jig, the barrier strip is rotatably arranged on the rotating shaft, the spring is arranged between the bottom side plate and the barrier strip, the bottom end of the spring is abutted against the bottom side plate, and the top end of the spring is abutted against the barrier strip;
when the selective examination tool is combined with the material box, the barrier strip is used for enabling the placing groove to be communicated with the accommodating space, and when the selective examination tool is separated from the material box, the spring is used for enabling the barrier strip to lock the accommodating space.
Based on the above scheme, the substrate selective inspection device capable of self-locking of the invention is provided with the material box, the selective inspection jig and the locking mechanism, wherein the selective inspection jig comprises a left side plate, a right side plate, a rear side plate and a bottom side plate, the left side plate, the right side plate, the rear side plate and the bottom side plate form an accommodating space for accommodating the substrate, and the locking mechanism is arranged at the front end of the selective inspection jig and comprises: the rotary shaft, the barrier strip and the spring, the barrier strip is rotatably arranged on the side plate of the sampling inspection jig through the rotary shaft, and the spring is arranged between the bottom side plate and the barrier strip. According to the substrate selective inspection device, during substrate selective inspection, the selective inspection jig is connected with the material box, the front end of the selective inspection jig is inserted into the material box, the retaining strip enables the placing groove of the material box to be communicated with the accommodating space of the selective inspection jig, the substrate is clamped through the clamp, and the substrate is pulled out of the material box along the top surface of the retaining strip and placed on the selective inspection jig so as to be detected. After the detection is finished, the selective inspection jig is connected with the material box in a butt joint mode again, the base plate is fed into the material box from the selective inspection jig along the top surface of the barrier strip, the base plate cannot be obliquely inserted, and the base plate cannot be damaged. And after the selective inspection jig is separated from the material box, the spring enables the barrier strip to rotate around the rotating shaft, the barrier strip locks the two sides of the containing space of the selective inspection jig, the substrate cannot slide out of the selective inspection jig from the front end of the selective inspection jig, and the damage to the substrate is avoided.
In one possible solution, the placement groove forms a flared opening at the end of the left and right side walls;
the end part of the barrier strip protrudes out of the end surface of the bottom side plate, and the end part of the barrier strip is L-shaped;
the L-shaped side face of the barrier strip is used for being abutted against the inner side face of the material box, the L-shaped bottom face of the barrier strip is an inclined face and used for being abutted against the bottom face of the placing groove, and when the sampling inspection jig is connected with the material box, the top face of the barrier strip and the bottom face of the placing groove are located on the same plane.
In a feasible scheme, a first step is arranged on the left side plate, and a second step is arranged on the right side plate;
the first step and the second step are the same in height, so that the left side plate, the right side plate, the top surface of the first step and the top surface of the second step form the accommodating space.
In a possible solution, the top surfaces of the first step and the second step adjacent to the barrier strip are inclined surfaces, and the bottom ends of the inclined surfaces are flush with the top surface of the barrier strip.
In a feasible scheme, the left side plate is provided with a first baffle plate, the first baffle plate is positioned above the first step, and a first clamping groove is formed between the first baffle plate and the top surface of the first step;
and the right side plate is provided with a second baffle plate, the second baffle plate is positioned above the second step, and a second clamping groove is formed between the second baffle plate and the top surface of the second step.
In a possible scheme, the rear side plate is provided with a third clamping groove, and the third clamping groove and the first clamping groove are located at the same height;
the connection surface of the third clamping groove and the bottom side plate is an inclined surface.
In one possible solution, the first baffle is provided with a through rectangular through slot.
In a possible scheme, the first baffle is provided with a connecting barrier strip at the rectangular through groove.
In a possible scheme, the bottom side plate is provided with a first groove, and the barrier strip is provided with a second groove;
the lower end of the spring is embedded in the first groove and is connected with the bottom side plate;
the upper end of the spring is embedded in the second groove and is connected with the barrier strip.
In one possible embodiment, the method further comprises: a fixing mechanism;
fixed establishment is mirror symmetry's setting and is in on the magazine, include: a fixed plate and a movable plate;
the fixed plate is arranged on the side wall of the material box and provided with a first sliding chute, and a plurality of clamping grooves are formed in the fixed plate at equal intervals on one side of the first sliding chute;
a sliding block is arranged at one end of the movable plate, the movable plate is slidably clamped in the first sliding groove through the sliding block, and the clamping groove is used for the sliding block to insert;
the other end of the movable plate extends out of the end face of the material box, a second sliding groove is formed in the inner side of the movable plate, and the second sliding groove is used for the insertion of the sampling inspection jig.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic view of a magazine of a substrate sampling apparatus according to a first embodiment of the present invention;
fig. 2 is a schematic view of a selective examination tool according to a first embodiment of the invention;
fig. 3 is an enlarged schematic front end view of a selective inspection fixture according to a first embodiment of the invention;
FIG. 4 is an enlarged view of the portion A in FIG. 3 according to a first embodiment of the present invention;
FIG. 5 is a schematic view of a barrier according to a first embodiment of the present invention;
FIG. 6 is a schematic view illustrating a connection between a magazine and a selective inspection fixture according to a first embodiment of the invention;
FIG. 7 is an enlarged view of the portion B in FIG. 6 according to a first embodiment of the present invention;
FIG. 8 is a partial front view of the magazine in a second embodiment of the invention;
FIG. 9 is a partial top view of the magazine according to a second embodiment of the invention;
FIG. 10 is a side view of the magazine and the selective inspection jig according to the second embodiment of the present invention;
fig. 11 is an enlarged view of the point C in fig. 10 according to the second embodiment of the present invention.
Reference numbers in the figures:
1. a magazine; 1', a material box; 11. a left side wall; 12. a right side wall; 101. a placement groove; 2. a sampling inspection jig; 2', sampling inspection jigs; 21. a left side plate; 211. a first step; 212. a first baffle plate; 213. a rectangular through groove; 214. connecting the barrier strips; 22. a right side plate; 221. a second step; 222. a second baffle; 23. a rear side plate; 231. a third card slot; 24. a bottom side plate; 241. a hollowed-out area; 3. a locking mechanism; 31. a rotating shaft; 32. blocking strips; 321. an L-shaped side surface; 322. an L-shaped bottom surface; 33. a spring; 4. a fixing mechanism; 41. a fixing plate; 411. a first chute; 412. a card slot; 42. a movable plate; 421. a slider; 422. a second runner.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," and the like are used in the indicated orientations and positional relationships based on the drawings for convenience in describing and simplifying the description, but do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the invention.
In the present invention, unless otherwise specifically stated or limited, the terms "mounted," "connected," "fixed," and the like are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; the connection can be mechanical connection, electrical connection or communication connection; either directly or indirectly through intervening media, either internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
The technical solution of the present invention will be described in detail below with specific examples. The following several specific embodiments may be combined with each other, and details of the same or similar concepts or processes may not be repeated in some embodiments.
As described in the background of the present application, the processed substrates in production are stored horizontally in cassettes. A plurality of placing grooves are arranged on the left side wall and the right side wall of the material box at intervals and used for horizontally inserting the substrate. And the processed substrate is inspected to be qualified and then flows into the next procedure.
The inventor of the application finds that in the prior art, when a detection person takes out a substrate from a material box, the material taking from the material box is difficult due to the fact that a guide tool is not connected, and when the detected substrate is placed back to the material box, the substrate is obliquely inserted, so that the substrate is damaged; especially, the substrate taken out is easy to slide off the jig, which causes damage to the substrate.
Fig. 1 is a schematic view of a magazine of a substrate selective inspection apparatus according to a first embodiment of the present invention, fig. 2 is a schematic view of a selective inspection jig according to a first embodiment of the present invention, fig. 3 is an enlarged schematic view of a front end of the selective inspection jig according to the first embodiment of the present invention, fig. 4 is an enlarged view of a position a in fig. 3 according to the first embodiment of the present invention, fig. 5 is a schematic view of a barrier strip according to the first embodiment of the present invention, fig. 6 is a schematic view of a connection between the magazine and the selective inspection jig according to the first embodiment of the present invention, and fig. 7 is an enlarged view of a position B in fig. 6 according to the first embodiment of the present invention. As shown in fig. 1 to 7, the substrate sampling apparatus capable of self-locking of this embodiment includes: magazine 1, selective examination tool 2 and locking mechanism 3.
The material box 1 is a rectangular box body, a containing cavity is arranged in the material box 1, and one side of the material box 1 is opened. The inner sides of the left side wall 11 and the right side wall 12 of the material box 1 are correspondingly provided with a plurality of groups of placing grooves 101, the plurality of groups of placing grooves 101 are arranged on the inner sides of the side walls of the material box 1 at equal intervals, and the corresponding groups of placing grooves 101 on the left side wall and the right side wall are positioned at the same height. The substrate is in a rectangular sheet shape, and when the processed substrate is placed in the material box 1, two sides of the substrate are horizontally inserted into a corresponding group of placing grooves 101 in the material box 1. A plurality of substrates can be vertically and horizontally placed in the cavity of the material box 1.
The sampling jig 2 comprises a left side plate 21, a right side plate 22, a rear side plate 23 and a bottom side plate 24.
The left side plate 21 and the right side plate 22 are respectively arranged on the left side and the right side of the bottom side plate 24, the left side plate 21 and the right side plate 22 are arranged vertically and in parallel with each other, the left side plate 21, the right side plate 22 and the bottom side plate 24 are arranged in an I shape, and the rear side plate 23 is arranged on the top surface of one end (rear end) of the bottom side plate 24.
The top surfaces of the left side plate 21, the right side plate 22, the rear side plate 23 and the bottom side plate 24 form an accommodating space, when the substrate is taken out from the material box 1, the forceps (clamps) clamp the substrate, so that the substrate is placed on the accommodating space of the sampling inspection jig 2 to detect the substrate. The plurality of hollowed-out regions 241 are formed on the bottom side plate 24, so that the weight of the sampling inspection jig 2 is reduced, the contact area between the substrate and the bottom side plate 24 is reduced, and the substrate is prevented from being worn.
The lock mechanism 3 includes: a rotating shaft 31, a bar 32 and a spring 33.
The rotating shafts 31 of the two locking mechanisms 3 are arranged on the left side plate 21 and the right side plate 22 of the sampling inspection jig 2 in a mirror symmetry manner, the barrier strips 32 are rotatably arranged on the rotating shafts 31, the springs 33 are arranged between the top surfaces of the bottom side plates 24 and the bottom surfaces of the barrier strips 32, the bottom ends of the springs 33 are abutted against the top surfaces of the bottom side plates 24, and the top ends of the springs 33 are abutted against the bottom surfaces of the barrier strips 32.
When the selective inspection jig is used, the selective inspection jig 2 is connected (butted) with the material box 1, the front end of the selective inspection jig 2 abuts against one side of an opening of the material box 1, the baffle strips 32 enable the placing grooves 101 on two sides of the material box 1 to be communicated with two sides of the accommodating space of the selective inspection jig 2, and after the tweezers clamp the substrates, the substrates in the material box 1 slide into the selective inspection jig 2 along the top surface of the baffle plates 32, or the substrates on the selective inspection jig 2 are placed back into the material box 1 along the baffle strips 32; when selective examination tool 2 and magazine 1 separate, spring 33 promotes blend stop 32 and rotates around 31, and the inboard one end that is located selective examination tool 2 of blend stop 32 upwards rotates, dies the both sides lock of the accommodation space on the selective examination tool 2, and the front end roll-off of selective examination tool 2 can not be followed to the base plate on the selective examination tool 2.
Through the discovery of above-mentioned content, but base plate selective examination device of auto-lock of this embodiment, through setting up magazine, selective examination tool and locking mechanism, the selective examination tool includes left side board, right side board, posterior lateral plate and bottom plate, and left side board, right side board, posterior lateral plate and bottom plate form the accommodation space who accepts the base plate, and locking mechanism sets up the front end at the selective examination tool, includes: the rotary shaft, the barrier strip and the spring, the barrier strip is rotatably arranged on the side plate of the sampling inspection jig through the rotary shaft, and the spring is arranged between the bottom side plate and the barrier strip. The base plate selective examination device of this embodiment, during the base plate selective examination, the selective examination tool is connected with the magazine, and in the front end of selective examination tool inserted the magazine, the blend stop made the standing groove of magazine and selective examination tool's accommodation space be linked together, cliied the base plate through the clamp, took out the base plate from the magazine along the top surface of blend stop and shelved on the selective examination tool to detect the base plate. After the detection is finished, the selective inspection jig is connected with the material box in a butt joint mode again, the base plate is fed into the material box from the selective inspection jig along the top surface of the barrier strip, the base plate cannot be obliquely inserted, and the base plate cannot be damaged. And the selective examination tool makes the blend stop rotate around the rotating shaft after being separated from the material box, the blend stop locks the two sides of the containing space of the selective examination tool, the substrate cannot slide out of the selective examination tool from the front end of the selective examination tool, the damage of the substrate is avoided, and the detection of the substrate is also convenient.
Alternatively, as shown in fig. 5, 6 and 7, in the self-lockable substrate sampling device in this embodiment, the openings of the placement groove 101 in the magazine 1 formed at the ends of the left side plate 11 and the right side plate 12 of the magazine are flared outward.
The barrier strip 32 of the locking mechanism 3 is rotatably disposed on the rotating shaft 31, the outer end of the barrier strip 32 protrudes out of the front end surface of the bottom side plate 24 of the sampling inspection jig 2, and the end of the barrier strip 32 protruding out of the bottom side plate 24 is L-shaped.
The distance between the L-shaped side surfaces 321 of the barrier strips 32 of the two locking mechanisms 3 is matched with the distance between the side walls of the two sides of the material box 1, when the sampling inspection jig 2 is connected with the material box 1, the L-shaped side surfaces 321 of the two barrier strips 32 are clamped on the inner walls of the left and right side walls of the material box 1, the L-shaped bottom surfaces 322 of the two barrier strips are inclined planes, the inclination angle of the L-shaped bottom surface 322 is matched with the angle of the trumpet-shaped opening of the placing groove 101, the L-shaped bottom surface 322 of the barrier strip 32 is propped against the bottom surface of the opening of the placing groove 101, the barrier strip 32 rotates around the rotating shaft 31 while sliding inwards along the bottom surface of the opening of the placing groove 101, the spring 33 is compressed, when the selective examination tool 2 is connected with the material box 1 (the end surface of the selective examination tool is abutted against the end surface of the material box), the top surface of the barrier strip 32 and the bottom surface of the placing groove 101 are located on the same plane, so that the substrate can be conveniently placed into or taken out of the material box.
Optionally, as shown in fig. 3 and 4, in the substrate sampling device capable of self-locking in this embodiment, a first step 211 is disposed inside the left side plate 21 of the sampling jig 2, and a second step 221 is disposed inside the right side plate 22 of the sampling jig 2.
The first step 211 on the left side plate 21 and the second step 221 on the right side plate 22 have the same height, so that an accommodating space is formed among the left side plate 21, the right side plate 22, the rear side plate 23, the top surface of the first step 211 and the top surface of the second step 221. When the substrate enters the selective inspection jig 2 from the magazine 1, the left side and the right side of the substrate are respectively placed on the top surfaces of the first step 211 and the second step 221, so that the contact area between the substrate and the bottom side plate 24 of the selective inspection jig is further reduced, and the substrate is prevented from being abraded.
Further, in the self-lockable substrate sampling inspection device of the present embodiment, the top surfaces (front top surfaces) of the first step 211 on the left side plate 21 and the second step 221 on the right side plate 22 adjacent to the barrier strip 32 are inclined surfaces, and the bottom ends of the inclined surfaces and the top surfaces of the barrier strip 32 in the horizontal state are in the same plane. When the substrate is taken out of the material box, the substrate slides onto the top surface of the step along the inclined surface of the step; when the base plate is placed into the material box, the base plate slides into the placing groove of the material box along the inclined plane.
Further, in the substrate sampling inspection device capable of self-locking in this embodiment, the inner side of the left side plate 21 is provided with the first baffle 212, the first baffle 212 is disposed above the first step 211, and a first clamping groove is formed between the first baffle 212 and the top surface of the first step 211.
A second baffle 222 is arranged on the inner side of the right side plate 22, the second baffle 222 is arranged above the second step 221, and a second clamping groove is formed between the second baffle 222 and the top surface of the second step 221.
When the base plate got into selective examination tool 2, the left and right sides joint respectively of base plate was in the first draw-in groove and the second draw-in groove of selective examination tool 2, and selective examination tool 2 is when the upset, and the base plate also can not drop from selective examination tool 2, conveniently looks over the detection to the back of base plate.
Further, in the substrate sampling inspection apparatus capable of self-locking in this embodiment, the rear side plate 23 of the sampling inspection jig 2 is provided with a third clamping groove 231, and the third clamping groove 231 is located at the same height as the first clamping groove on the left side plate 21 and the second clamping groove on the right side plate 22.
And the bottom surface of the third card slot 231 and the connection surface of the bottom side plate 24 are inclined planes, when the substrate enters the selective examination jig 2, the end of the substrate enters the third card slot 231 of the rear side plate 23 along the inclined planes, and the substrate is more stable on the selective examination jig.
Further, in the substrate sampling device with self-locking function in this embodiment, the first baffle 212 on the left side plate 21 of the sampling tool 2 is provided with the rectangular through groove 213 running through from top to bottom, the rectangular through groove 213 is disposed along the front-back direction of the sampling tool 2, when the substrate moves back and forth on the sampling tool 2, the tip of the tweezers (clamp) passes through the rectangular through hole 213 to clamp the substrate, so as to prevent the tweezers from damaging the surface of the substrate.
Further, in the substrate sampling device with self-locking function in this embodiment, the first blocking plate 212 is provided with the connecting barrier strip 214 at the middle of the rectangular through groove 213, and the strength of the first blocking plate 212 is enhanced by the connecting barrier strip 214, so as to prevent the first blocking plate 212 from being deformed and damaged.
Optionally, in the self-lockable sampling inspection device in this embodiment, the left and right sides of the front end of the bottom side plate 24 are provided with first grooves, the bottom of the barrier strip 32 is provided with second grooves, and the positions of the second grooves on the barrier strip 32 correspond to the positions of the first grooves on the bottom side plate 24.
The lower end of the spring 33 of the locking mechanism 3 is embedded in the first groove of the bottom side plate 24, and the bottom of the spring 33 is fixed on the bottom side plate 24.
The upper end of the spring 33 is embedded in the second groove of the bar 32, and the top of the spring 33 is fixed on the bar 32 to prevent the spring 33 from falling.
Fig. 8 is a partial front view of a magazine according to a second embodiment of the present invention, fig. 9 is a partial top view of the magazine according to the second embodiment of the present invention, fig. 10 is a side view of the magazine and a selective inspection jig according to the second embodiment of the present invention, and fig. 11 is an enlarged view of a portion C of fig. 10 according to the second embodiment of the present invention. The second embodiment is an improved scheme based on the first embodiment, and the improved scheme is characterized by further comprising a fixing mechanism for fixing the sampling inspection jig.
As shown in fig. 8, 9, 10, and 11, the self-lockable substrate sampling apparatus according to the present embodiment further includes: and a fixing mechanism 4.
The two fixing mechanisms 4 are arranged at the opening end of the material box 1 ', and the two fixing mechanisms 4 are arranged on the left side wall and the right side wall of the material box 1' in a mirror symmetry mode.
The fixing mechanism 4 includes: a fixed plate 41 and a movable plate 42.
The fixing plate 41 of the fixing mechanism 4 is fixedly arranged outside the left and right side walls of the magazine in a mirror symmetry manner, the fixing plate 41 is provided with a first sliding chute 411, the first sliding chute 411 is vertically arranged along the vertical direction of the fixing plate 41, and a plurality of clamping grooves 412 are arranged on one side of the fixing plate 41 at equal intervals.
One end of the movable plate 42 is provided with a sliding block 421, the sliding block 421 of the movable plate 42 is slidably clamped in the first sliding groove 411 of the fixed plate, the other end of the movable plate 42 extends out of the end surface of the magazine, and the inner side of the movable plate 42 extending out of one end of the magazine is provided with a second sliding groove 422.
In this embodiment, the movable plate 42 slides up and down along the first sliding slot 411 of the fixed plate 41, and the sliding block 421 is inserted into the slot 412 of the fixed plate 41, so that the movable plate 42 is fixed on the two side walls of the magazine 1'. When the selective inspection tool 2 ' is connected with the magazine 1 ', the left side plate and the right side plate of the selective inspection tool are respectively inserted along the second chutes 422 of the two movable plates 42, when the front end surface of the selective inspection tool supports against the end surface of the magazine, the selective inspection tool 2 ' is fixed on the movable plates 42, and meanwhile, the baffle of the locking mechanism is in a horizontal state and is inserted into the corresponding placing groove in the magazine, so that the base plate can be more conveniently taken out or put in.
In the present invention, unless otherwise explicitly specified or limited, the first feature "on" or "under" the second feature may be directly contacting the first feature and the second feature or indirectly contacting the first feature and the second feature through an intermediate.
Also, a first feature "on," "above," and "over" a second feature may mean that the first feature is directly above or obliquely above the second feature, or that only the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lower level than the second feature.
In the description herein, reference to the description of the term "one embodiment," "some embodiments," "an example," "a specific example" or "some examples," or the like, means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. A self-lockable substrate sampling device, comprising: the device comprises a material box, a sampling inspection jig and a locking mechanism;
a plurality of groups of placing grooves are correspondingly arranged on the left side wall and the right side wall of the material box, the corresponding placing grooves are positioned at the same height, and the corresponding placing grooves are used for horizontally placing the substrate;
the selective examination tool includes: a left side plate, a right side plate, a rear side plate and a bottom side plate;
the left side plate and the right side plate are respectively arranged at two sides of the bottom side plate, the rear side plate is arranged at one end of the bottom side plate, the left side plate, the right side plate, the rear side plate and the bottom side plate form an accommodating space, and the accommodating space is used for accommodating base plates on a group of placing grooves;
the left side plate, the right side plate and the bottom side plate are arranged in an I shape, and the bottom side plate is provided with a plurality of hollow areas;
the two locking mechanisms are arranged at one end, far away from the rear side plate, of the sampling inspection jig in a mirror symmetry mode;
the locking mechanism includes: the rotating shaft, the barrier strip and the spring;
the rotating shaft is arranged on a side plate of the sampling inspection jig, the barrier strip is rotatably arranged on the rotating shaft, the spring is arranged between the bottom side plate and the barrier strip, the bottom end of the spring is abutted against the bottom side plate, and the top end of the spring is abutted against the barrier strip;
when the selective examination tool is combined with the material box, the barrier strip is used for enabling the placing groove to be communicated with the accommodating space, and when the selective examination tool is separated from the material box, the spring is used for enabling the barrier strip to lock the accommodating space.
2. The apparatus for sampling substrates capable of self-locking according to claim 1, wherein the placement groove forms a flared opening at the end of the left sidewall and the right sidewall;
the end part of the barrier strip protrudes out of the end surface of the bottom side plate, and the end part of the barrier strip is L-shaped;
the L-shaped side face of the barrier strip is used for being abutted against the inner side face of the material box, the L-shaped bottom face of the barrier strip is an inclined face and used for being abutted against the bottom face of the placing groove, and when the sampling inspection jig is connected with the material box, the top face of the barrier strip and the bottom face of the placing groove are located on the same plane.
3. The self-lockable substrate sampling device according to claim 2, wherein the left side plate is provided with a first step, and the right side plate is provided with a second step;
the first step and the second step are the same in height, so that the left side plate, the right side plate, the top surface of the first step and the top surface of the second step form the accommodating space.
4. The self-lockable substrate sampling device of claim 3, wherein the top surfaces of the first step and the second step adjacent to the barrier are sloped, and the bottom ends of the slopes are flush with the top surfaces of the barrier.
5. The self-lockable substrate sampling device according to claim 3, wherein the left side plate is provided with a first baffle plate, the first baffle plate is positioned above the first step, and a first clamping groove is formed between the first baffle plate and the top surface of the first step;
and the right side plate is provided with a second baffle plate, the second baffle plate is positioned above the second step, and a second clamping groove is formed between the second baffle plate and the top surface of the second step.
6. The self-lockable substrate sampling device according to claim 5, wherein the rear side plate is provided with a third clamping groove, and the third clamping groove and the first clamping groove are located at the same height;
the connection surface of the third clamping groove and the bottom side plate is an inclined surface.
7. The self-lockable substrate sampling device of claim 5, wherein the first barrier is provided with a rectangular through slot therethrough.
8. The self-lockable substrate sampling device of claim 7, wherein the first barrier is provided with a connecting barrier at the rectangular through slot.
9. The self-lockable substrate sampling device of claim 1, wherein the bottom side plate is provided with a first groove and the barrier is provided with a second groove;
the lower end of the spring is embedded in the first groove and is connected with the bottom side plate;
the upper end of the spring is embedded in the second groove and is connected with the barrier strip.
10. The apparatus according to any one of claims 1 to 9, further comprising: a fixing mechanism;
fixed establishment is mirror symmetry's setting and is in on the magazine, include: a fixed plate and a movable plate;
the fixed plate is arranged on the side wall of the material box and provided with a first sliding chute, and a plurality of clamping grooves are formed in the fixed plate at equal intervals on one side of the first sliding chute;
a sliding block is arranged at one end of the movable plate, the movable plate is slidably clamped in the first sliding groove through the sliding block, and the clamping groove is used for the sliding block to insert;
the other end of the movable plate extends out of the end face of the material box, a second sliding groove is formed in the inner side of the movable plate, and the second sliding groove is used for the insertion of the sampling inspection jig.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011222459.8A CN112349632B (en) | 2020-11-05 | 2020-11-05 | Self-locking substrate sampling inspection device |
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| CN202011222459.8A CN112349632B (en) | 2020-11-05 | 2020-11-05 | Self-locking substrate sampling inspection device |
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Cited By (1)
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| CN117712020A (en) * | 2024-02-06 | 2024-03-15 | 苏州锐杰微科技集团有限公司 | Substrate jig for chip packaging and working method thereof |
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| CN112349632B (en) | 2023-07-18 |
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