CN112347880A - Display substrate, display panel and display device - Google Patents

Display substrate, display panel and display device Download PDF

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Publication number
CN112347880A
CN112347880A CN202011165728.1A CN202011165728A CN112347880A CN 112347880 A CN112347880 A CN 112347880A CN 202011165728 A CN202011165728 A CN 202011165728A CN 112347880 A CN112347880 A CN 112347880A
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Prior art keywords
electrode
substrate
display
transistors
pixel electrodes
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Chinese (zh)
Inventor
刘文渠
崔钊
张锋
姚琪
董立文
孟德天
宋晓欣
王利波
侯东飞
岳阳
黄海涛
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BOE Technology Group Co Ltd
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BOE Technology Group Co Ltd
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Priority to CN202011165728.1A priority Critical patent/CN112347880A/en
Publication of CN112347880A publication Critical patent/CN112347880A/en
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12Fingerprints or palmprints
    • G06V40/13Sensors therefor
    • G06V40/1318Sensors therefor using electro-optical elements or layers, e.g. electroluminescent sensing
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/13338Input devices, e.g. touch panels

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Human Computer Interaction (AREA)
  • Multimedia (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)

Abstract

The present disclosure provides a display substrate, a display panel and a display device, including: a substrate base plate; a plurality of first transistors and a plurality of second transistors on the substrate base; a plurality of ultrasonic sensors located on a side of the plurality of first transistors and the plurality of second transistors facing away from the substrate base plate; the plurality of ultrasonic sensors are correspondingly and electrically connected with the plurality of first transistors, and are used for generating ultrasonic waves and sensing ultrasonic changes caused when fingerprints press the surface of one side of the substrate base plate, which is far away from the plurality of first transistors and the plurality of second transistors; and the pixel electrodes are positioned on one sides of the ultrasonic sensors, which are deviated from the substrate base plate, and the pixel electrodes are electrically connected with the second transistors in a one-to-one corresponding mode.

Description

Display substrate, display panel and display device
Technical Field
The present disclosure relates to the field of display technologies, and in particular, to a display substrate, a display panel, and a display device.
Background
With the continuous development of scientific technology, fingerprint identification technology has been gradually applied to the daily life of people. The fingerprint identification technology can perform identification by comparing minutiae characteristic points of different fingerprints, so that the function of identity identification is achieved. Generally, fingerprint recognition technology can be classified into optical fingerprint recognition technology, capacitive fingerprint recognition technology, and ultrasonic fingerprint recognition technology. Compared with optical fingerprint identification and capacitance fingerprint identification, the ultrasonic fingerprint identification technology has the advantages of good penetrability and no influence of oil stains and dirt on the surface of the fingerprint.
Disclosure of Invention
In view of this, the present disclosure provides a display substrate, a display panel and a display device, which are used to improve the transmittance of a liquid crystal display panel integrated with an ultrasonic fingerprint identification function.
Therefore, an embodiment of the present disclosure provides a display substrate, including:
a substrate base plate;
a plurality of first transistors and a plurality of second transistors located over the substrate base plate;
a plurality of ultrasonic sensors located on a side of the plurality of first transistors and the plurality of second transistors facing away from the substrate base plate; the plurality of ultrasonic sensors are correspondingly and electrically connected with the plurality of first transistors and used for generating ultrasonic waves and sensing ultrasonic changes caused when fingerprints press the surface of one side of the substrate base plate, which is far away from the plurality of first transistors and the plurality of second transistors;
and the pixel electrodes are positioned on one side of the ultrasonic sensors, which is far away from the substrate base plate, and the pixel electrodes are electrically connected with the second transistors in a one-to-one correspondence mode.
Optionally, in the display substrate provided in the embodiment of the present disclosure, orthographic projections of the plurality of ultrasonic sensors on the substrate and orthographic projections of the plurality of pixel electrodes do not overlap each other.
Optionally, in the display substrate provided in the embodiment of the present disclosure, each of the ultrasonic sensors includes: at least one first electrode, a piezoelectric film layer and a second electrode which are arranged in a stacked manner; wherein the content of the first and second substances,
the orthographic projection of the at least one first electrode on the substrate base plate is positioned in the orthographic projection of the second electrode;
each first electrode is correspondingly and electrically connected with one first transistor, and the orthographic projection of each first electrode on the substrate completely covers the orthographic projection of the corresponding first transistor.
Optionally, in the display substrate provided in the embodiment of the present disclosure, the plurality of pixel electrodes are arranged in an array on the substrate;
orthographic projections of the plurality of ultrasonic sensors on the substrate base plate are positioned at column gaps of orthographic projections of the plurality of pixel electrodes;
each ultrasonic sensor specifically comprises one first electrode, one piezoelectric film layer and one second electrode which are stacked;
the length of the first electrode and the second electrode in the column direction is equal to the length of at least one row of the pixel electrodes in the column direction.
Optionally, in the display substrate provided in the embodiment of the present disclosure, the plurality of pixel electrodes are arranged in an array on the substrate;
orthographic projections of the plurality of ultrasonic sensors on the substrate base plate are positioned at column gaps of orthographic projections of the plurality of pixel electrodes;
each ultrasonic sensor specifically comprises a plurality of first electrodes, a piezoelectric film layer and a second electrode which are arranged in a stacked manner;
the length of the first electrode in the column direction is equal to the length of one row of the pixel electrodes in the column direction;
the length of the second electrode in the column direction is equal to the length of at least one row of the pixel electrodes in the column direction.
Optionally, in the display substrate provided in the embodiment of the present disclosure, the display substrate further includes: a common electrode having an orthogonal projection on the substrate at least partially overlapping an orthogonal projection of the plurality of pixel electrodes.
Optionally, in the display substrate provided in the embodiment of the present disclosure, the common electrode and the second electrode are disposed on the same layer, and are located between the layer where the second electrode is located and the layer where the pixel electrode is located, or are located on a side of the layer where the pixel electrode is located away from the substrate.
Based on the same inventive concept, the embodiment of the present disclosure further provides a display panel, including: the display substrate and the color film substrate are oppositely arranged, and the liquid crystal layer is positioned between the display substrate and the color film substrate; wherein, the display substrate is the display substrate.
Optionally, in the display panel provided in the embodiment of the present disclosure, when the display substrate includes the first electrode, the piezoelectric film layer, the second electrode, and the pixel electrode, which are sequentially disposed, the color film substrate includes the common electrode disposed on the entire surface.
Optionally, in the display panel provided in the embodiment of the present disclosure, the color film substrate includes a black matrix having a plurality of openings;
orthographic projections of the pixel electrodes on the substrate base plate are correspondingly positioned in the orthographic projections of the openings one by one;
the orthographic projection of the ultrasonic sensors on the substrate base plate is positioned in the orthographic projection of the black matrix.
Based on the same inventive concept, the embodiment of the present disclosure further provides a display device, which includes the display panel.
The beneficial effects of this disclosure are as follows:
the display substrate, the display panel and the display device provided by the embodiment of the disclosure include: a substrate base plate; a plurality of first transistors and a plurality of second transistors on the substrate base; a plurality of ultrasonic sensors located on a side of the plurality of first transistors and the plurality of second transistors facing away from the substrate base plate; the plurality of ultrasonic sensors are correspondingly and electrically connected with the plurality of first transistors, and are used for generating ultrasonic waves and sensing ultrasonic changes caused when fingerprints press the surface of one side of the substrate base plate, which is far away from the plurality of first transistors and the plurality of second transistors; and the pixel electrodes are positioned on one sides of the ultrasonic sensors, which are deviated from the substrate base plate, and the pixel electrodes are electrically connected with the second transistors in a one-to-one corresponding mode. The second transistor and the pixel electrode which are electrically connected with each other on the substrate base plate can realize a display function; the first transistor and the ultrasonic sensor which are electrically connected with each other can realize a fingerprint identification function, so that integration and integration of a display function and an ultrasonic fingerprint identification function are realized on the display substrate. When the display substrate is applied to a liquid crystal display panel, an ultrasonic sensor does not need to be arranged in a color film substrate, so that the influence of the arrangement of the ultrasonic sensor in the color film substrate on the transmittance of emergent light of a liquid crystal layer is avoided, and the transmittance of the liquid crystal display panel integrated with the ultrasonic fingerprint identification function can be effectively improved.
Drawings
Fig. 1 is a schematic structural diagram of a liquid crystal display panel with an ultrasonic fingerprint identification function in the related art;
fig. 2 is a schematic structural diagram of a display substrate according to an embodiment of the disclosure;
fig. 3 is a schematic view of another structure of a display substrate according to an embodiment of the disclosure;
fig. 4 is a schematic structural diagram of a display substrate according to an embodiment of the disclosure;
FIG. 5 is an arrangement of first and second electrodes provided in accordance with an embodiment of the present disclosure;
FIG. 6 is a diagram of yet another arrangement of first and second electrodes provided by an embodiment of the present disclosure;
FIG. 7 is a diagram of yet another arrangement of first and second electrodes provided by an embodiment of the present disclosure;
FIGS. 8 to 18 are schematic structural diagrams of the display substrate shown in FIG. 2 during a manufacturing process;
fig. 19 is a schematic structural diagram of a display panel according to an embodiment of the disclosure;
fig. 20 is a schematic structural diagram of a display panel provided in the embodiment of the present disclosure;
fig. 21 is a schematic structural diagram of a display panel provided in the embodiment of the present disclosure;
fig. 22 is a schematic structural diagram of a display panel provided in the embodiment of the present disclosure;
FIG. 23 is a graph of transmittance of the display panel of FIG. 19;
fig. 24 to 27 are schematic structural diagrams of a color filter substrate provided in an embodiment of the disclosure in a manufacturing process.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present disclosure more apparent, the technical solutions of the embodiments of the present disclosure will be described clearly and completely with reference to the drawings of the embodiments of the present disclosure. It should be noted that the sizes and shapes of the various figures in the drawings are not to scale, but are merely intended to illustrate the present disclosure. And the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. It is to be understood that the described embodiments are only a few embodiments of the present disclosure, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the disclosure without any inventive step, are within the scope of protection of the disclosure.
Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this disclosure belongs. The use of "first," "second," and similar terms in the description and claims does not indicate any order, quantity, or importance, but rather is used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items. "inner", "outer", "upper", "lower", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.
Fig. 1 shows a liquid crystal display panel with an ultrasonic fingerprint identification function in the related art, which integrates a piezoelectric structure responsible for ultrasonic wave transmitting and receiving functions in a fingerprint identification process on a color film substrate, where the piezoelectric structure specifically includes a first driving electrode 02 and a first sensing electrode 03 oppositely disposed on one side of a glass substrate 01, a first piezoelectric film layer 04 located between the first driving electrode 02 and the first sensing electrode 03, a second driving electrode 06 and a second sensing electrode 05 oppositely disposed on the other side of the glass substrate 01, and a second piezoelectric film layer 07 located between the second driving electrode 06 and the second sensing electrode 05; the first driving electrode 02 and the first sensing electrode 03 are located in the pixel opening area, and the second driving electrode 06 and the second sensing electrode 05 are located in the black matrix area. When ultrasonic signal transmits, a certain potential difference is formed between the first driving electrode 02 and the first induction electrode 03 to drive the first piezoelectric film layer 04 to vibrate to send out an ultrasonic signal, after the ultrasonic signal reflected by the valleys and the ridges of the finger reaches the second piezoelectric film layer 07, under the action of the electric fields of the second driving electrode 05 and the second induction electrode 06, the second piezoelectric film layer 07 converts the ultrasonic signal reflected by the fingerprint into an electric signal, and the electric signal is transmitted to the signal detection circuit 09 through the conductive column 08 to perform fingerprint imaging, so that fingerprint identification is realized. Since the first driving electrode 02 and the first sensing electrode 03 are located at the pixel opening area, the first driving electrode 02 and the first sensing electrode 03 affect the transmittance to some extent.
In view of the above problems in the related art, embodiments of the present disclosure provide a display substrate, as shown in fig. 2 to 4, which may include:
a first substrate base plate 101;
a plurality of first transistors 102 and a plurality of second transistors 103 located over the first substrate base 101;
a plurality of ultrasonic sensors 104 on a side of the plurality of first transistors 102 and the plurality of second transistors 103 facing away from the first substrate 101; the plurality of ultrasonic sensors 104 are electrically connected with the plurality of first transistors 102 correspondingly, and the plurality of ultrasonic sensors 104 are used for generating ultrasonic waves and sensing ultrasonic changes caused when fingerprints press the surface of the first substrate base plate 101 on the side away from the plurality of first transistors 102 and the plurality of second transistors 103;
the plurality of pixel electrodes 105 are located on a side of the plurality of ultrasonic sensors 104 away from the first base substrate 101, and the plurality of pixel electrodes 105 are electrically connected to the plurality of second transistors 103 in a one-to-one correspondence.
In the above display substrate provided by the embodiment of the present disclosure, the second transistor 103 and the pixel electrode 105 electrically connected to each other on the first substrate 101 may be used to implement a display function; the first transistor 102 and the ultrasonic sensor 104, which are electrically connected to each other, can realize a fingerprint recognition function, and thus integration and integration of a display function and an ultrasonic fingerprint recognition function are realized on the display substrate. When the display substrate is applied to a liquid crystal display panel, the ultrasonic sensor 104 does not need to be arranged in the color film substrate, so that the influence of the arrangement of the ultrasonic sensor 104 in the color film substrate on the transmittance of emergent light of the liquid crystal layer is avoided, and the transmittance of the liquid crystal display panel integrated with the ultrasonic fingerprint identification function can be effectively improved.
Optionally, in the display substrate provided in the embodiment of the present disclosure, as shown in fig. 2 to 4, orthographic projections of the plurality of ultrasonic sensors 104 on the first substrate 101 and orthographic projections of the plurality of pixel electrodes 105 do not overlap with each other. Generally, the first substrate 101 has a plurality of sub-pixel regions, and the plurality of pixel electrodes 105 are respectively disposed at the openings of the sub-pixel regions, so that in the present disclosure, the ultrasonic sensors 104 can be disposed at the gaps of the sub-pixel regions, and thus the ultrasonic sensors 104 do not affect the transmittance of the backlight, and the transmittance of the liquid crystal display panel can be further improved.
Alternatively, in the display substrate provided in the embodiment of the present disclosure, as shown in fig. 2 to 4, each of the ultrasonic sensors 104 may include: at least one first electrode 1041, a piezoelectric film layer 1042 and a second electrode 1043 which are stacked; wherein the content of the first and second substances,
an orthographic projection of the at least one first electrode 1041 on the first substrate 101 is positioned in an orthographic projection of the second electrode 1043;
each first electrode 1041 is electrically connected to one corresponding first transistor 102, and an orthographic projection of each first electrode 1041 on the first substrate 101 completely covers the orthographic projection of the corresponding first transistor 102.
In specific implementation, as shown in fig. 2 to 4, when an Alternating Current (AC) voltage is input to the second electrode 1043, the piezoelectric film 1042 deforms under the reverse piezoelectric effect, and emits the first ultrasonic wave S1(ii) a The first ultrasonic wave S1After being transmitted to the finger F touching the first substrate 101, the second ultrasonic wave S is reflected by the finger F2(ii) a Since the fingerprint includes valleys and ridges, the second ultrasonic wave S reflected back to the piezoelectric film layer 1042 by the ridges and valleys of the fingerprint2The piezoelectric film 1042 will have a difference of the second ultrasonic wave S under the condition of the positive piezoelectric effect2Converted into different electric signals, and the electric signals are transmitted to the first transistor 102 to image the fingerprint valleys and ridges, so as to realize the fingerprint identification function. It can be seen that the fingerprint identification function is realized through the single piezoelectric film 1042, and compared with the technical scheme that the first piezoelectric film 04 and the second piezoelectric film 07 are respectively arranged on the two sides of the glass substrate 01 in the related art, the whole thickness of the product is effectively reduced, the process flow is simplified, and the production cost is reduced. Moreover, the piezoelectric film 1042 of the present disclosure is disposed on the display substrate, so that the distance from the ultrasonic wave to the finger and the piezoelectric film 1042 after being reflected by the finger can be shortened, the energy loss of the ultrasonic wave can be reduced, and the improvement of the energy loss of the ultrasonic wave can be achievedThe intensity of the ultrasonic signal is improved, and the accuracy and speed of fingerprint identification are improved.
Optionally, in the display substrate provided in the embodiment of the present disclosure, in order to meet different fingerprint identification accuracies, as shown in fig. 5 to 7, a plurality of pixel electrodes 105 are arranged in an array on the first substrate 101; the orthographic projections of the plurality of ultrasonic sensors 104 on the first substrate 101 may be located at column gaps of the orthographic projections of the plurality of pixel electrodes 105; each ultrasonic sensor 104 may specifically include a first electrode 1041, a piezoelectric film 1042 and a second electrode 1043, which are stacked; a length L of the first electrode 1041 and the second electrode 1043 in the column direction1And at least one row of pixel electrodes in the column direction2Equal; alternatively, each ultrasonic sensor 104 may specifically include a plurality of first electrodes 1041, piezoelectric film layers 1042 and a second electrode 1043, which are stacked; a length L of the first electrode 1041 in the column direction11Length L in the column direction from one row of pixel electrodes 1052' equal, length L of the second electrode 1043 in the column direction12And at least one row of pixel electrodes 105 in a column direction2Are equal.
Optionally, in the display substrate provided in the embodiment of the present disclosure, as shown in fig. 2 to 4, the display substrate may further include: and a common electrode 106, wherein an orthographic projection of the common electrode 106 on the first substrate 101 at least partially overlaps with an orthographic projection of the plurality of pixel electrodes 105. In practical implementation, an electric field is formed between the common electrode 106 and the pixel electrode 105, which are overlapped with each other, to drive the liquid crystal molecules to deflect, thereby implementing a display function.
Optionally, in the display substrate provided in the embodiment of the present disclosure, as shown in fig. 2, the common electrode 106 may be disposed in the same layer as the second electrode 1043; or as shown in fig. 3, the common electrode 106 may be located between the layer where the second electrode 1043 is located and the layer where the pixel electrode 105 is located; alternatively, as shown in fig. 4, the common electrode 106 may be located on a side of the layer on which the pixel electrode 105 is located, which side faces away from the first substrate 101.
Generally, in the display substrate provided in the embodiment of the present disclosure, as shown in fig. 2 to 4, the display substrate may further include: a light-shielding layer 107, a buffer layer 108, a gate insulating layer 109, an interlayer dielectric layer 110, a first planarization layer 111, a first insulating layer 112, a second insulating layer 113, and a third insulating layer 114.
For the above display substrate provided by the embodiment of the present disclosure, the present disclosure also provides a corresponding manufacturing method, and since the structures of the display substrates shown in fig. 2 to 4 are similar, a manufacturing process of the display substrate shown in fig. 2 will be described as an example below.
Specifically, the display substrate shown in fig. 2 may be manufactured by the following steps:
first, a light-shielding layer 107 is formed on the first base substrate 101, as shown in fig. 8.
In the second step, a buffer layer 108 and an active layer a are sequentially formed on the light-shielding layer 107, as shown in fig. 9.
Third, a gate insulating layer 109, a gate electrode G, and an interlayer dielectric layer 110 are sequentially formed on the active layer a, as shown in fig. 10.
Fourth, a first via hole penetrating the gate insulating layer 109 and the interlayer dielectric layer 110 is formed, exposing a portion of the active layer a, as shown in fig. 11.
Fifth, a source electrode S and a drain electrode D, which are electrically connected to the active layer a through the first via hole, respectively, are formed on the interlayer dielectric layer 110, as shown in fig. 12. Thus, the first transistor 102 and the second transistor 103 are formed.
Sixth, a first planarization layer 111 having a second via hole exposing the source electrode S or the drain electrode D is formed on the source electrode S and the drain electrode D, as shown in fig. 13.
Seventh, a first electrode 1041 and a first conductive portion 105' which are disposed in the same layer are formed on the first planarization layer 111, as shown in fig. 14.
In an eighth step, a first insulating layer 112 having a third via hole exposing a portion of the first conductive portion 105' is formed on the first electrode 1041, as shown in fig. 15.
In the ninth step, a piezoelectric film 1042 having a fourth via hole is formed on the first insulating layer 112, and the fourth via hole and the third via hole are conducted with each other, as shown in fig. 16.
Tenth, a second electrode 1043, a common electrode 106, and a second conductive part 105 ″ which are disposed in the same layer are formed on the piezoelectric film layer 1042; wherein the second conductive portion 105 ″ is electrically connected to the first conductive portion 105' through the fourth via and the third via in sequence, as shown in fig. 17. Thus, the ultrasonic sensor 104 constituted by the first electrode 1041, the piezoelectric film layer 1042, and the second electrode 1043 is formed.
As a tenth step, a second insulating layer 113 having a fifth via hole exposing a portion of the second conductive portion 105 ″ is formed on the second electrode 1043, as shown in fig. 18.
In a tenth step, the pixel electrode 105 is formed on the second insulating layer 113 without overlapping the second electrode 1043, and specifically, the pixel electrode 105 is electrically connected to the second conductive part 105 ″ through a fifth via hole, as shown in fig. 2.
Thus, the display substrate shown in fig. 2 is completed.
It should be noted that, in the manufacturing method provided in the embodiment of the present disclosure, the patterning process related to forming each layer structure may include not only some or all of the processes of deposition, photoresist coating, mask masking, exposure, development, etching, and photoresist stripping, but also other processes, and specifically, a pattern to be patterned is formed in an actual manufacturing process, which is not limited herein. For example, a post-bake process may also be included after development and before etching.
The deposition process may be a chemical vapor deposition method, a plasma enhanced chemical vapor deposition method, or a physical vapor deposition method, which is not limited herein; the Mask used in the Mask process may be a Half-Tone Mask (Half Tone Mask), a Single Slit diffraction Mask (Single Slit Mask) or a Gray Tone Mask (Gray Tone Mask), which is not limited herein; the etching may be dry etching or wet etching, and is not limited herein.
In addition, in the present disclosure, the "same layer" refers to a layer structure in which a film layer for forming a specific pattern is formed using the same film forming process and then formed by a patterning process once using the same mask plate. That is, one mask (also called as a photomask) is corresponding to one patterning process. Depending on the specific pattern, the single patterning process may include multiple exposure, development or etching processes, and the specific pattern in the formed layer structure may be continuous or discontinuous, and the specific patterns may be at different heights or have different thicknesses.
Based on the same inventive concept, embodiments of the present disclosure provide a display panel, as shown in fig. 19 to 22, including: the display substrate 100 and the color filter substrate 200 are arranged oppositely, and the liquid crystal layer 300 is positioned between the display substrate 100 and the color filter substrate 200; the display substrate 100 is the display substrate provided in the embodiments of the present disclosure. Since the principle of the display panel to solve the problem is similar to that of the display substrate 100, the implementation of the display panel provided by the embodiment of the present disclosure may refer to the implementation of the display substrate 100 provided by the embodiment of the present disclosure, and repeated descriptions are omitted.
Optionally, in the display panel provided in the embodiment of the present disclosure, as shown in fig. 22, when the display substrate 100 includes the first electrode 1041, the piezoelectric film 1042, the second electrode 1043, and the pixel electrode 105, which are sequentially disposed, the color filter substrate 200 may include the common electrode 106 disposed on the whole surface.
Optionally, in the display panel provided in the embodiment of the present disclosure, in order to improve the transmittance, as shown in fig. 19 to fig. 22, the color filter substrate 200 may include a second substrate 201, and a black matrix 202 located on the second substrate 201 and having a plurality of openings; orthographic projections of the pixel electrodes 105 on the second substrate 201 are positioned in the orthographic projections of the openings in a one-to-one correspondence manner; the orthographic projections of the plurality of ultrasonic sensors 104 on the second base substrate 201 are located within the orthographic projection of the black matrix 202. Specifically, the plurality of openings of the black matrix 202 may be respectively provided with a red color resistance R, a green color resistance G, and a blue color resistance B.
In addition, in the present disclosure, a transmittance test was performed using the display panel shown in fig. 19 as an example, and the result is shown in fig. 23. In fig. 23, 1#, 2# and 3# respectively denote three display panels having the structure shown in fig. 19. As can be seen from fig. 23, the display panel shown in fig. 19 provided by the present disclosure has high transmittance in three wavelength bands, namely, blue, green, and red.
In addition, the present disclosure takes the color film substrate 200 included in the display panel shown in fig. 19 to 21 as an example, and introduces the manufacturing process thereof, which is specifically as follows:
first, a black matrix 202 having a plurality of openings is formed on a second substrate base 201, as shown in fig. 24.
Second, a red color resistor R, a green color resistor G, and a blue color resistor B are formed in the openings of the black matrix 202 by using a three-time mask process, as shown in fig. 25.
Third, a second planarization layer 203 is formed on the layers of the red color resist R, the green color resist G, and the blue color resist B, as shown in fig. 26.
In the fourth step, spacers 204 are formed on the second flat layer 203, as shown in fig. 27.
Thus, the color filter substrate 200 in the display panel shown in fig. 19 to 21 is formed.
Based on the same inventive concept, the embodiment of the invention also provides a display device, which comprises the display panel and the backlight module, wherein the display panel and the backlight module are provided by the embodiment of the disclosure; the display panel is located on the light emitting side of the backlight module.
The display device may be: any product or component with a display function, such as a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator, an intelligent watch, a fitness wrist strap, and a personal digital assistant. Other essential components of the display device should be understood by those skilled in the art, and are not described herein nor should they be construed as limiting the present disclosure. In addition, because the principle of the display device to solve the problem is similar to that of the display panel, the display device can be implemented according to the embodiment of the display panel, and repeated descriptions are omitted.
It will be apparent to those skilled in the art that various changes and modifications can be made in the present disclosure without departing from the spirit and scope of the disclosure. Thus, if such modifications and variations of the present disclosure fall within the scope of the claims of the present disclosure and their equivalents, the present disclosure is intended to include such modifications and variations as well.

Claims (11)

1. A display substrate, comprising:
a substrate base plate;
a plurality of first transistors and a plurality of second transistors located over the substrate base plate;
a plurality of ultrasonic sensors located on a side of the plurality of first transistors and the plurality of second transistors facing away from the substrate base plate; the plurality of ultrasonic sensors are correspondingly and electrically connected with the plurality of first transistors and used for generating ultrasonic waves and sensing ultrasonic changes caused when fingerprints press the surface of one side of the substrate base plate, which is far away from the plurality of first transistors and the plurality of second transistors;
and the pixel electrodes are positioned on one side of the ultrasonic sensors, which is far away from the substrate base plate, and the pixel electrodes are electrically connected with the second transistors in a one-to-one correspondence mode.
2. The display substrate of claim 1, wherein orthographic projections of the plurality of ultrasonic sensors on the substrate base do not overlap with orthographic projections of the plurality of pixel electrodes.
3. The display substrate of claim 2, wherein each of the ultrasonic sensors comprises: at least one first electrode, a piezoelectric film layer and a second electrode which are arranged in a stacked manner; wherein the content of the first and second substances,
the orthographic projection of the at least one first electrode on the substrate base plate is positioned in the orthographic projection of the second electrode;
each first electrode is correspondingly and electrically connected with one first transistor, and the orthographic projection of each first electrode on the substrate completely covers the orthographic projection of the corresponding first transistor.
4. The display substrate of claim 3, wherein the plurality of pixel electrodes are arranged in an array on the substrate;
orthographic projections of the plurality of ultrasonic sensors on the substrate base plate are positioned at column gaps of orthographic projections of the plurality of pixel electrodes;
each ultrasonic sensor specifically comprises one first electrode, one piezoelectric film layer and one second electrode which are stacked;
the length of the first electrode and the second electrode in the column direction is equal to the length of at least one row of the pixel electrodes in the column direction.
5. The display substrate of claim 3, wherein the plurality of pixel electrodes are arranged in an array on the substrate;
orthographic projections of the plurality of ultrasonic sensors on the substrate base plate are positioned at column gaps of orthographic projections of the plurality of pixel electrodes;
each ultrasonic sensor specifically comprises a plurality of first electrodes, a piezoelectric film layer and a second electrode which are arranged in a stacked manner;
the length of the first electrode in the column direction is equal to the length of one row of the pixel electrodes in the column direction;
the length of the second electrode in the column direction is equal to the length of at least one row of the pixel electrodes in the column direction.
6. The display substrate of claim 3, further comprising: a common electrode having an orthogonal projection on the substrate at least partially overlapping an orthogonal projection of the plurality of pixel electrodes.
7. The display substrate according to claim 6, wherein the common electrode and the second electrode are disposed on the same layer, between the layer where the second electrode is located and the layer where the pixel electrode is located, or on a side of the layer where the pixel electrode is located away from the substrate.
8. A display panel, comprising: the display substrate and the color film substrate are oppositely arranged, and the liquid crystal layer is positioned between the display substrate and the color film substrate; wherein the display substrate is a display substrate according to any one of claims 1 to 7.
9. The display panel according to claim 8, wherein when the display substrate includes the first electrode, the piezoelectric film layer, the second electrode, and the pixel electrode, which are sequentially disposed, the color filter substrate includes a common electrode disposed over an entire surface.
10. The display panel according to claim 8 or 9, wherein the color filter substrate includes a black matrix having a plurality of openings;
orthographic projections of the pixel electrodes on the substrate base plate are correspondingly positioned in the orthographic projections of the openings one by one;
the orthographic projection of the ultrasonic sensors on the substrate base plate is positioned in the orthographic projection of the black matrix.
11. A display device characterized by comprising the display panel according to any one of claims 8 to 10.
CN202011165728.1A 2020-10-27 2020-10-27 Display substrate, display panel and display device Pending CN112347880A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112926435A (en) * 2021-02-22 2021-06-08 京东方科技集团股份有限公司 Ultrasonic grain identification module, preparation method, grain identification method and display device
CN114120878A (en) * 2021-11-30 2022-03-01 上海天马微电子有限公司 Display panel, driving method thereof and display device
US11373585B2 (en) * 2019-10-15 2022-06-28 Boe Technology Group Co., Ltd. Driving backplane, display panel and method for manufacturing the same
CN114724459A (en) * 2022-03-10 2022-07-08 武汉华星光电技术有限公司 Display substrate and display panel

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11373585B2 (en) * 2019-10-15 2022-06-28 Boe Technology Group Co., Ltd. Driving backplane, display panel and method for manufacturing the same
CN112926435A (en) * 2021-02-22 2021-06-08 京东方科技集团股份有限公司 Ultrasonic grain identification module, preparation method, grain identification method and display device
CN112926435B (en) * 2021-02-22 2024-04-16 京东方科技集团股份有限公司 Ultrasonic grain recognition module, preparation method, grain recognition method and display device
CN114120878A (en) * 2021-11-30 2022-03-01 上海天马微电子有限公司 Display panel, driving method thereof and display device
CN114724459A (en) * 2022-03-10 2022-07-08 武汉华星光电技术有限公司 Display substrate and display panel
CN114724459B (en) * 2022-03-10 2024-04-19 武汉华星光电技术有限公司 Display substrate and display panel

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