CN112344024A - Ceramic tube sleeving sealing structure based on oxygen probe and preparation method thereof - Google Patents

Ceramic tube sleeving sealing structure based on oxygen probe and preparation method thereof Download PDF

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Publication number
CN112344024A
CN112344024A CN202011216842.2A CN202011216842A CN112344024A CN 112344024 A CN112344024 A CN 112344024A CN 202011216842 A CN202011216842 A CN 202011216842A CN 112344024 A CN112344024 A CN 112344024A
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tube
zirconia
pipe
high aluminum
ceramic
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潘少杰
潘一凡
杨家富
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Nanjing Forestry University
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Nanjing Forestry University
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/02Sealings between relatively-stationary surfaces
    • F16J15/06Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/102Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by material
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/023Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/028Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles by means of an interlayer consisting of an organic adhesive, e.g. phenol resin or pitch
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/02Sealings between relatively-stationary surfaces
    • F16J15/06Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/108Special methods for making a non-metallic packing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/406Cells and probes with solid electrolytes
    • G01N27/407Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/409Oxygen concentration cells

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)

Abstract

The invention discloses an oxygen probe-based ceramic tube sleeve sealing structure and a preparation method thereof, the oxygen probe-based ceramic tube sleeve sealing structure comprises a high aluminum tube and a zirconia tube inserted at the end part of the high aluminum tube, a sealing device is arranged between the zirconia tube and the high aluminum tube, the sealing device comprises high-temperature ceramic glue filled in the gap between the high aluminum tube and the zirconia tube and a ceramic glaze coating positioned at the end part of the high aluminum tube and connected with the zirconia tube, the ceramic glaze coating is annularly arranged and integrally covers the end surface of the high-temperature ceramic glue, a centering auxiliary rod is limited and placed in the high aluminum tube during the manufacturing, then the zirconia tube is inserted into the high aluminum tube, the high-temperature ceramic glue is filled in the gap between the zirconia tube and the high aluminum tube from the tube opening at the joint of the high aluminum tube and the zirconia tube until the colloid fills the annular gap between the zirconia tube and the high aluminum tube, and the ceramic glaze coating is coated at the tube opening of the high aluminum tube to, according to the working condition requirement, the air tightness requirement can be ensured, and the remote oxygen amount measurement can be realized.

Description

Ceramic tube sleeving sealing structure based on oxygen probe and preparation method thereof
Technical Field
The invention relates to the technical field of sensing equipment, in particular to an oxygen probe-based ceramic tube sleeving sealing structure and a preparation method thereof.
Background
At present, the oxygen sensor (oxygen probe) is widely applied and mainly used for the aspects of protective atmosphere heat treatment, gas carburization, energy conservation of large boilers and the like. Gas carburizing is one of the most widely used and important heat treatment processes in the machine manufacturing industry. The quality of carburized parts depends on the surface carbon concentration to a great extent, however, the carburized process is generally controlled by experience and regular inspection of test bars for a long time, the fluctuation of the surface carbon concentration of the carburized parts is large, a large amount of carbides often appear in the surface metallographic structure, the product quality is seriously influenced, and the service life of the carburized parts is reduced. In recent years, the appearance of an oxygen sensor (oxygen probe) brings a technical revolution to gas carburizing heat treatment, so that the accurate control of the carbon potential of furnace gas in the carburizing process becomes possible, and the automatic control of a microcomputer is facilitated, which has profound significance for improving the quality of the carburizing heat treatment and carrying out technical transformation on a well type carburizing furnace.
The oxygen measuring sensor consists of an inner platinum (Pt) electrode and an outer platinum (Pt) electrode and stable zirconia ceramics between the two electrodes, when the outer side of the probe is contacted with a gas to be measured and reference air is introduced into the inner side of the probe, an oxygen concentration difference battery is formed due to different oxygen concentrations at two sides of the zirconia tube, and electric potentials are generated on the inner electrode and the outer electrode, so that the oxygen content in the gas to be measured can be measured.
Based on this, the ceramic tube on the oxygen sensor plays a key role in the whole oxygen sensor application process, which is a key component in oxygen measurement work, and then the ceramic tube application length in the oxygen sensor with the existing specification is 200 mm-1200 mm, which cannot adapt to all requirements, once the area to be measured is located at a deeper position, the measurement of oxygen amount cannot be effectively realized, and for this reason, an effective lengthened ceramic tube structure with a sleeving structure is currently lacked to meet the requirements of industrial application.
Disclosure of Invention
Technical problem to be solved
In order to overcome the defects of the prior art, the ceramic tube sleeving sealing structure based on the oxygen probe and the preparation method thereof are provided, the problem of limitation of the length of the existing oxygen probe ceramic tube can be solved, the air tightness requirement can be ensured according to the working condition requirement, and the remote oxygen amount measurement can be realized.
(II) technical scheme
The invention is realized by the following technical scheme: the invention provides an oxygen probe-based ceramic tube sleeving sealing structure which comprises a high aluminum tube and a zirconia tube inserted at the end part of the high aluminum tube, wherein a sealing device for sealing a connection gap between the zirconia tube and the high aluminum tube is arranged between the zirconia tube and the high aluminum tube, the sealing device comprises high-temperature ceramic glue filled in the gap between the high aluminum tube and the zirconia tube wall and a ceramic glaze coating located at the end part of the high aluminum tube and connected with the zirconia tube, and the ceramic glaze coating is annularly arranged and integrally covers the end face of the high-temperature ceramic glue.
Furthermore, the high aluminum pipe is a through pipe with through holes at two ends, and the zirconia pipe is of a pipe body structure with an opening at one side, and the opening side of the zirconia pipe is connected with the high aluminum pipe in a socket joint mode.
A preparation method of a ceramic tube sleeving sealing structure based on an oxygen probe comprises the following steps:
1) concentric determination: a centering auxiliary rod is placed in the high aluminum pipe in a limiting manner, and then the zirconia pipe is inserted into the high aluminum pipe, so that the concentricity of the high aluminum pipe and the zirconia pipe is within 0.1mm while the high aluminum pipe and the zirconia pipe are connected in a sleeved manner;
2) filling high-temperature ceramic glue: filling high-temperature ceramic glue into the gaps between the zirconia tubes and the high-aluminum tubes from the tube openings at the joints of the high-aluminum tubes and the zirconia tubes until the glue fills the annular gaps between the zirconia tubes and the high-aluminum tubes, and then taking out the centering auxiliary rods, wherein the filling at the positions is in a way that the continuous filling cannot be carried out and the high-temperature ceramic glue overflows from the tube openings of the high-aluminum tubes to serve as a standard for detecting the completion of the filling;
3) and (3) gel: standing the structure stable in the step 2) at room temperature for 24 hours;
4) gradually solidifying glue: sequentially placing the mixture into ovens at 80 ℃, 100 ℃ and 150 ℃ to be respectively baked for 1 hour; 5) high-temperature curing: putting the mixture into a 950 ℃ box-type electric furnace for heating and curing for 20-30 minutes;
6) cooling and solidifying: cooling to 150-200 ℃ along with the furnace, and then discharging from the furnace for air cooling;
7) sealing the glaze; coating ceramic glaze on the pipe orifice of the high-aluminum pipe to form a ceramic glaze coating, wherein the ceramic glaze coating fully covers the end face of the high-temperature ceramic adhesive, the outer side of the ceramic glaze coating is connected to the edge of the high-aluminum pipe, and the inner side of the ceramic glaze coating is connected with the zirconia pipe;
8) standing: standing the structure stable in the step 7) at room temperature for 24 hours;
9) gradually fixing the glaze: sequentially putting the structure in the step 8) into an oven at 80 ℃, 100 ℃ and 150 ℃ for baking for 1 hour respectively;
10) and (3) high-temperature glaze fixation: putting the mixture into a box type electric furnace at 1100-1200 ℃ for heating and curing for 20-30 minutes;
11) secondary cooling and solidification: cooling the mixture to 150-200 ℃ along with the furnace, and then discharging the mixture out of the furnace for air cooling.
Furthermore, the centering auxiliary rod comprises a rod body and a limiting column, the diameter of the rod body is consistent with the inner diameter of the zirconia tube, the zirconia tube can be freely sleeved on the rod body, the limiting column is fixed on the rod body, the outer diameter of the limiting column is consistent with the inner diameter of the high aluminum tube, and the limiting column can freely slide in the inner cavity of the high aluminum tube
(III) advantageous effects
Compared with the prior art, the invention has the following beneficial effects:
the ceramic tube sleeving sealing structure based on the oxygen probe and the preparation method thereof are not limited by the length limitation of the oxygen probe of the existing oxygen measuring sensor, the probe tube with the proper length can be prepared according to different use conditions, the whole body adopts a sleeving form, the oxygen measuring function is realized through the zirconia tube, the non-standard oxygen measuring sensor can be prepared by combining the characteristic that the length of the high aluminum tube is randomly selected, the joint of the high aluminum tube and the zirconia tube adopts a form that high-temperature ceramic glue is combined with a ceramic glaze coating, the preparation is convenient, and the air tightness effect is good.
Drawings
FIG. 1 is a schematic diagram of the present invention.
FIG. 2 is a schematic view of the centering aid rod installation.
1-high aluminum tube; 2-a zirconia tube; 3-high temperature ceramic glue; 4-ceramic glaze coating; 5-centering auxiliary rod; 51-a rod; 52-limiting column.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
As shown in fig. 1 and 2, the ceramic tube sleeving sealing structure based on the oxygen probe comprises a high aluminum tube 1 and a zirconia tube 2 inserted at the end of the high aluminum tube 1, wherein a sealing device for sealing a connection gap between the zirconia tube 2 and the high aluminum tube 1 is arranged between the zirconia tube 1 and the high aluminum tube, the sealing device comprises a high-temperature ceramic adhesive 3 filled in the gap between the tube walls of the high aluminum tube 1 and the zirconia tube 2 and a ceramic glaze coating 4 located at the end of the high aluminum tube 1 and connected with the zirconia tube 2, and the ceramic glaze coating 4 is annularly arranged and integrally covers the end surface of the high-temperature ceramic adhesive 3.
The high aluminum pipe 1 is a through pipe with through holes at two ends, and the zirconia pipe 2 is of a pipe body structure with an opening at one side, and the opening side of the zirconia pipe is connected with the high aluminum pipe 1 in a socket joint mode.
Examples
A preparation method of a ceramic tube sleeving sealing structure based on an oxygen probe comprises the following steps:
1) concentric determination: placing a centering auxiliary rod 5 in the high aluminum pipe 1 in a limiting manner, and then inserting the zirconia pipe 2 into the high aluminum pipe 1, so that the concentricity of the high aluminum pipe 1 and the zirconia pipe 2 is within 0.1mm when the high aluminum pipe 1 and the zirconia pipe 2 are connected in a sleeved manner;
2) filling high-temperature ceramic glue: filling high-temperature ceramic glue 23 into the gap between the zirconia tube 2 and the high aluminum tube 1 from the tube opening at the joint of the high aluminum tube 1 and the zirconia tube 2 until the colloid fills the annular gap between the zirconia tube 2 and the high aluminum tube 1, then taking out the centering auxiliary rod 5, and filling the gap until the gap cannot be filled continuously and the high-temperature ceramic glue 23 overflows from the tube opening of the high aluminum tube 2 to be used as a standard for detecting the completion of filling;
3) and (3) gel: standing the structure stable in the step 2) at room temperature for 24 hours;
4) gradually solidifying glue: sequentially placing the mixture into ovens at 80 ℃, 100 ℃ and 150 ℃ to be respectively baked for 1 hour;
5) high-temperature curing: putting the mixture into a box type electric furnace at 950 ℃ for heating and curing for 20 minutes; 6) cooling and solidifying: cooling to 150 ℃ along with the furnace, discharging from the furnace, and air cooling;
7) sealing the glaze; coating ceramic glaze on the position of the pipe orifice of the high aluminum pipe 1 to form a ceramic glaze coating 4, wherein the ceramic glaze coating 4 fully covers the end face of the high-temperature ceramic adhesive 23, the outer side of the ceramic glaze coating is connected to the edge of the high aluminum pipe 1, and the inner side of the ceramic glaze coating is connected with the zirconium oxide pipe 2;
8) standing: standing the structure stable in the step 7) at room temperature for 24 hours;
9) gradually fixing the glaze: sequentially putting the structure in the step 8) into an oven at 80 ℃, 100 ℃ and 150 ℃ for baking for 1 hour respectively;
10) and (3) high-temperature glaze fixation: putting the mixture into a box type electric furnace at 1185-DEG C for heating and curing for 25 minutes;
11) secondary cooling and solidification: cooling to 150 deg.c and air cooling.
The centering auxiliary rod 5 comprises a rod body 51 and a limiting column 52, the diameter of the rod body 51 is consistent with the inner diameter of the zirconia tube 2, the zirconia tube 2 can be freely sleeved on the rod body 51, the limiting column 52 is fixed on the rod body 51, the outer diameter of the limiting column is consistent with the inner diameter of the high aluminum tube 1, and the limiting column 52 can freely slide in the inner cavity of the high aluminum tube 1.
It should be noted that the bottom of the rod 51 is flush with the orifice of the high aluminum pipe 1, at this time, the distance from the root of the rod 51 to the end face of the limit column 52 is the insertion depth of the zirconia tube 2 (the depth is also the height of the high temperature ceramic glue 3), and the rod 51 can be provided with scales, and if the insertion depth of the zirconia tube 2 needs to be adjusted, the bottom of the rod 51 can be properly extended out of the orifice of the high aluminum pipe 1 by a corresponding length.
The sleeved lengthened ceramic tube prepared by the invention has good air tightness, can be applied to an oxygen probe, can ensure that the detection part (namely the zirconia tube 2) of the prepared oxygen probe can realize the requirement of measuring oxygen at a longer distance, and can avoid the defect of fixed specification of the existing oxygen probe and be applied to the requirement of measuring oxygen under complex working conditions because the length of the high aluminum tube 1 can be randomly selected.
The above-described embodiments are merely illustrative of the preferred embodiments of the present invention and do not limit the spirit and scope of the present invention. Various modifications and improvements of the technical solutions of the present invention may be made by those skilled in the art without departing from the design concept of the present invention, and the technical contents of the present invention are all described in the claims.

Claims (4)

1. The utility model provides a ceramic tube cup joints seal structure based on oxygen probe which characterized in that: the sealing device comprises a high aluminum pipe (1) and a zirconia pipe (2) inserted at the end part of the high aluminum pipe (1), wherein a sealing device for sealing a connection gap between the zirconia pipe (2) and the high aluminum pipe (1) is arranged between the zirconia pipe (2) and the high aluminum pipe (1), the sealing device comprises a high-temperature ceramic adhesive (3) filled in the tube wall gap between the high aluminum pipe (1) and the zirconia pipe (2) and a ceramic glaze coating (4) located at the end part of the high aluminum pipe (1) and connected with the zirconia pipe (2), and the ceramic glaze coating (4) is annularly arranged and integrally covers the end surface of the high-temperature ceramic adhesive (3).
2. The ceramic tube sleeving sealing structure based on the oxygen probe as claimed in claim 1, wherein: the high aluminum pipe (1) is a through pipe with through holes at two ends, the zirconia pipe (2) is of a pipe body structure with an opening at one side, and the opening side of the zirconia pipe is connected with the high aluminum pipe (1) in a socket joint mode.
3. A preparation method of a ceramic tube sleeving sealing structure based on an oxygen probe is characterized by comprising the following steps: the method comprises the following steps:
1) concentric determination: placing a centering auxiliary rod (5) in the high aluminum pipe (1) in a limiting manner, and then inserting the zirconia pipe (2) into the high aluminum pipe (1) to ensure that the concentricity of the high aluminum pipe (1) and the zirconia pipe (2) is within 0.1mm when the high aluminum pipe and the zirconia pipe are connected in a sleeved manner;
2) filling high-temperature ceramic glue: filling high-temperature ceramic glue (23) into the gap between the zirconia tube (2) and the high aluminum tube (1) from the tube opening at the joint of the high aluminum tube (1) and the zirconia tube (2) until the glue fills the annular gap between the zirconia tube (2) and the high aluminum tube (1), then taking out the centering auxiliary rod (5), and filling the gap until the gap cannot be filled continuously and the high-temperature ceramic glue (23) overflows from the tube opening of the high aluminum tube (2) to be used as a standard for detecting the completion of filling;
3) and (3) gel: standing the structure stable in the step 2) at room temperature for 24 hours;
4) gradually solidifying glue: sequentially placing the mixture into ovens at 80 ℃, 100 ℃ and 150 ℃ to be respectively baked for 1 hour;
5) high-temperature curing: putting the mixture into a 950 ℃ box-type electric furnace for heating and curing for 20-30 minutes;
6) cooling and solidifying: cooling to 150-200 ℃ along with the furnace, and then discharging from the furnace for air cooling;
7) sealing the glaze; coating ceramic glaze on the position of a pipe orifice of the high-aluminum pipe (1) to form a ceramic glaze coating (4), wherein the ceramic glaze coating (4) fully covers the end face of the high-temperature ceramic adhesive (23), the outer side of the ceramic glaze coating is connected to the edge of the high-aluminum pipe (1), and the inner side of the ceramic glaze coating is connected with the zirconia pipe (2);
8) standing: standing the structure stable in the step 7) at room temperature for 24 hours;
9) gradually fixing the glaze: sequentially putting the structure in the step 8) into an oven at 80 ℃, 100 ℃ and 150 ℃ for baking for 1 hour respectively;
10) and (3) high-temperature glaze fixation: putting the mixture into a box type electric furnace at 1100-1200 ℃ for heating and curing for 20-30 minutes;
11) secondary cooling and solidification: cooling the mixture to 150-200 ℃ along with the furnace, and then discharging the mixture out of the furnace for air cooling.
4. The method for preparing the ceramic tube sleeving sealing structure based on the oxygen probe according to claim 3, wherein the method comprises the following steps: the centering auxiliary rod (5) comprises a rod body (51) and a limiting column (52), the diameter of the rod body (51) is consistent with the inner diameter of the zirconia tube (2), the zirconia tube (2) can be freely sleeved on the rod body (51), the limiting column (52) is fixed on the rod body (51), the outer diameter of the limiting column is consistent with the inner diameter of the high aluminum tube (1), and the limiting column (52) can freely slide in the inner cavity of the high aluminum tube (1).
CN202011216842.2A 2020-11-04 2020-11-04 Ceramic tube sleeving sealing structure based on oxygen probe and preparation method thereof Pending CN112344024A (en)

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Application Number Priority Date Filing Date Title
CN202011216842.2A CN112344024A (en) 2020-11-04 2020-11-04 Ceramic tube sleeving sealing structure based on oxygen probe and preparation method thereof

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113311050A (en) * 2021-05-18 2021-08-27 中国科学院合肥物质科学研究院 Medical quick zirconia oxygen sensor
CN113503297A (en) * 2021-06-01 2021-10-15 王超杰 High preparation facilities that combines of area cavity ceramic part for semiconductor
CN115321977A (en) * 2022-07-27 2022-11-11 河南匠人光电设备科技有限公司 Preparation method for sintering connection between zirconia ceramics

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113311050A (en) * 2021-05-18 2021-08-27 中国科学院合肥物质科学研究院 Medical quick zirconia oxygen sensor
CN113503297A (en) * 2021-06-01 2021-10-15 王超杰 High preparation facilities that combines of area cavity ceramic part for semiconductor
CN113503297B (en) * 2021-06-01 2023-03-24 合肥英仕博精密装备有限公司 High preparation facilities that combines of area cavity ceramic part for semiconductor
CN115321977A (en) * 2022-07-27 2022-11-11 河南匠人光电设备科技有限公司 Preparation method for sintering connection between zirconia ceramics

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