CN112333855B

CN112333855B - Coil type heating structure

Info

Publication number: CN112333855B
Application number: CN201910718200.3A
Authority: CN
Inventors: 保坂英二; 増山勇; 大野昌孝; 林士杰
Original assignee: Hongcheng International Technology Co ltd; Xinhe Faris Co ltd
Current assignee: Hongcheng International Technology Co ltd; Xinhe Faris Co ltd
Priority date: 2019-08-05
Filing date: 2019-08-05
Publication date: 2023-02-28
Anticipated expiration: 2039-08-05
Also published as: CN112333855A

Abstract

The invention provides a coil type heating structure, which comprises a plurality of coil type heating elements and a plurality of positioning pieces, wherein the coil type heating elements are arranged at intervals in an axial direction, the plurality of coil type heating elements are respectively arranged and positioned on the inner wall of a peripheral heat insulator in a vertical heating furnace through the plurality of positioning pieces, the coil type heating elements are in a sheet shape, the coil type heating elements are formed into a snake shape in a mode that a plurality of mountain parts and valley parts are mutually connected, the cross section of the coil type heating elements is in a wave shape, and the coil type heating elements are provided with at least one wave crest part and at least one wave trough part which are mutually connected, so that the capacity of resisting high-temperature deformation of the coil type heating elements is increased, and the service life of the coil type heating elements is prolonged.

Description

Coil type heating structure

Technical Field

The present invention relates to a coil type heating structure, and more particularly, to a vertical heating furnace installed in a semiconductor manufacturing facility, which can increase the resistance to high temperature deformation to prolong the service life of the product.

Background

In the diffusion process and Chemical Vapor Deposition (CVD) process of semiconductor manufacturing, a vertical furnace heats a reaction gas mainly by using a coil-type heating structure in the furnace to form a thin film on a substrate such as a wafer. The coil type heating structure mainly comprises a plurality of coil type heating elements and a plurality of positioning pieces, wherein the coil type heating elements are formed into a snake shape in a mode that a plurality of mountain parts and valley parts are respectively connected with each other at the upper end and the lower end, and the plurality of coil type heating elements are respectively installed and fixed on the inner wall of the peripheral heat insulator in the melting furnace through the plurality of positioning pieces.

However, in a high temperature state, the positioning element is easily deformed due to softening, so that a part of the positioning element is loosened, or the deformation amount is too large to impact the heated object, for example: the process chamber that houses and processes the substrate causes a short circuit phenomenon, reduces heating efficiency, or shortens the expected service life of the coil-type heating structure.

Disclosure of Invention

However, in a heating state generally at a high temperature of about 800 ℃ or lower, a certain allowable deformation space of the coil-type heating element can still be maintained, but when the heating is performed at a high temperature of about 800 ℃ or higher, since the structure of the coil-type heating element is mainly in a plate shape, the resistance to deformation is obviously insufficient, and the overall degree of distortion cannot be effectively reduced. Accordingly, the present invention is directed to a structure that is different from the prior art and improves the above-mentioned drawbacks.

An object of the present invention is to provide a coil type heating structure, so as to solve the problem that the conventional coil type heating element cannot effectively reduce the overall distortion degree in a high temperature state, and to increase the resistance to high temperature deformation by using a structure with a wavy cross section, thereby prolonging the service life of the product and reducing the maintenance and replacement costs.

The coil-type heating structure comprises a plurality of coil-type heating elements and a plurality of positioning pieces, wherein the coil-type heating elements are arranged at intervals in an axial direction, the plurality of coil-type heating elements are arranged and positioned on the inner wall of a peripheral heat insulator in a vertical heating furnace through the plurality of positioning pieces, the coil-type heating elements are in a strip-shaped sheet shape, and the coil-type heating elements are provided with a plurality of long notches which are arranged at intervals in parallel so as to form a snake shape in which a plurality of mountain peak parts and valley parts are mutually connected; the main technical characteristics are as follows: the cross section of the coil-type heating element is wavy, and the coil-type heating element is provided with at least two wave crest parts and at least one wave trough part which are connected in an alternating way.

In practice, the coil-type heating element has a W-shaped cross-section.

When the positioning piece is implemented, the positioning piece comprises a bridging section, a first supporting leg and a second supporting leg, wherein the first supporting leg and the second supporting leg vertically extend from two ends of the bridging section respectively and are parallel to each other, the bridging section of the positioning piece spans over the wave crest part, and the first supporting leg and the second supporting leg are inserted into and fixed on the inner wall of the surrounding heat insulator respectively.

When the positioning piece is used, the bridging section of the positioning piece is in an outward convex shape, and the first supporting leg and the second supporting leg of the bridging section respectively penetrate through the two adjacent notches in an oblique direction and are respectively inserted into and fixed on the inner walls of the surrounding heat insulators.

The invention can avoid the situation of single large-area plate surface by means of the continuously bent wavy cross section of the coil-type heating element, can increase the capability of resisting distortion in a high-temperature state, and further can effectively avoid the problems of loosening of a positioning piece, impact on a heated object or reduction of the heating efficiency caused by large deformation in the overall thermal expansion/contraction process, thereby ensuring the preset heating efficiency, prolonging the service life of a product and reducing the maintenance and replacement cost.

For further understanding of the present invention, the following preferred embodiments are provided in conjunction with the drawings and figures to describe the detailed construction of the present invention and its achieved effect.

Drawings

Fig. 1 is a perspective sectional view of the present invention installed in a vertical type heating furnace.

Fig. 2 is a schematic perspective view of a coil-type heating element of the present invention.

Fig. 3 is a partially enlarged view of a portion a of fig. 2.

Fig. 4 and 5 are schematic views of the use state of the first embodiment of the present invention.

Fig. 6 and 7 are schematic views of the use state of the second embodiment of the present invention.

Description of reference numerals: a coil-type heating structure 1; a coil-type heating element 2; a notch 20; a mountain part 21; a valley portion 22; a first end 23; a second end 24; a wave trough portion 25; crest portions 26, 26'; a positioning member 3; a bridge section 31; a first leg 32; a second leg 33; a surrounding thermal insulator 9; a groove-shaped housing 91.

Detailed Description

Referring to fig. 1, a coil-type heating structure 1 of the present invention mainly includes a plurality of coil-type heating elements 2 arranged in an axial direction at intervals, wherein the plurality of coil-type heating elements 2 are respectively mounted and positioned on an inner wall of a peripheral heat insulator 9 in a vertical heating furnace by a plurality of positioning members 3. The vertical furnace may be used in semiconductor manufacturing processes such as diffusion and Chemical Vapor Deposition (CVD), and the vertical furnace may heat the reaction gas inside the furnace through the processes to form a thin film on the surface of a substrate such as a wafer. The peripheral heat insulator 9 is in a circular pipe shape, a plurality of axially arranged and spaced groove-shaped receiving portions 91 are arranged on the inner wall of the peripheral heat insulator 9, the groove-shaped receiving portions 91 are formed by radially recessing the peripheral edge of the inner wall of the peripheral heat insulator 9, and two side walls of the groove-shaped receiving portions 91 are respectively inclined at an obtuse angle relative to the bottom surface of the groove-shaped receiving portions 91, so that the opening width of the groove-shaped receiving portions 91 is larger than that of the bottom surface, and the coil-type heating elements 2 are respectively received.

Fig. 2 to 5 show a first embodiment of a coil-type heating structure 1 of the present invention, which includes a plurality of coil-type heating elements 2 and a plurality of positioning members 3. Wherein, any coil type heating element 2 is processed by a long strip sheet with high impedance, and after a plurality of long gaps 20 which are arranged in parallel at intervals are formed, the coil type heating element 2 in a snake shape is provided with a plurality of peak parts 21 and valley parts 22 which are alternately connected; the coil-type heating element 2 is bent into a circular ring shape, two free ends of the coil-type heating element are respectively bent to form a first end 23 and a second end 24 which are parallel to each other, the first end 23 and the second end 24 respectively penetrate through the pipe wall of the surrounding heat insulator 9 and are connected with a power supply part, so that the coil-type heating element 2 generates high temperature after being electrified.

The cross section of the coil type heating element 2 is W-shaped, and the coil type heating element is provided with a wave trough part 25 and two wave crest parts 26 and 26 'which are connected with each other, wherein the wave trough part 25 is positioned in the middle of the coil type heating element 2, and the two wave crest parts 26 and 26' are respectively positioned on two sides of the wave trough part 25; after the coil-type heating element 2 is bent into a circular ring shape, the opening of the valley portion 25 and the two crest portions 26, 26' are simultaneously directed toward the inner wall of the surrounding heat insulator 9. In practice, the opening of the wave trough 25 and the two wave crest 26, 26' can also be simultaneously far away from the inner wall of the surrounding heat insulator 9; the cross-section of the coil-type heating element 2 may also be continuously curved and wavy, with at least two crest portions 26, 26' and at least one trough portion 25 being connected to one another.

The positioning element 3 is a continuous bending fixing nail, which includes a bridging section 31, and a first leg 32 and a second leg 33 that extend vertically from two ends of the bridging section 31 and are parallel to each other, after the plurality of bridging sections 31 of the plurality of positioning elements 3 respectively span the plurality of crest portions 26, 26' of the plurality of coil-type heating elements 2, the plurality of first legs 31 and the plurality of second legs 32 of the plurality of positioning elements 3 are respectively inserted into the inner wall of the surrounding heat insulator 9, so as to fix the plurality of coil-type heating elements 2 in the plurality of groove-shaped receiving portions 91 of the inner wall of the surrounding heat insulator 9.

Fig. 6 and 7 show a second embodiment of the coil-type heating structure 1 of the present invention, which is different from the first embodiment in that: the bridging section 31 of the positioning member 3 is convex, and the first leg 32 and the second leg 33 of the bridging section 31 pass through the two adjacent notches 20 in an oblique direction, and are inserted and fixed on the inner wall of the surrounding thermal insulator 9, so that the plurality of coil-type heating elements 2 can be fixed in the plurality of groove-shaped receiving portions 91 of the surrounding thermal insulator 9, respectively.

In summary, according to the disclosure above, the present invention can achieve the desired purpose, and by using the wave-shaped structure of the coil-type heating element with a continuously curved cross section, the occurrence of a single large-area plate surface can be avoided, and the ability of resisting distortion can be increased at a high temperature, so that the problems of loosening of the positioning member, impact on the heated object or reduction of the heating efficiency due to large deformation can be effectively avoided during the whole thermal expansion/contraction process, thereby ensuring the predetermined heating efficiency, prolonging the service life of the product, and reducing the maintenance and replacement costs.

The foregoing description is intended to be illustrative rather than limiting, and it will be appreciated by those skilled in the art that many modifications, variations, or equivalents may be made without departing from the spirit and scope of the invention as defined in the appended claims.

Claims

1. A coil type heating structure comprises a plurality of coil type heating elements and a plurality of positioning pieces, wherein the coil type heating elements are arranged on an inner wall of a surrounding heat insulator in a vertical heating furnace at intervals and are arranged in an axial direction, the coil type heating elements are in a strip shape and are bent into a ring shape, a plurality of long notches with upward openings and a plurality of long notches with downward openings are arranged on the coil type heating elements, the plurality of long notches with upward openings and the plurality of long notches with downward openings are staggered and are arranged in parallel at intervals, each coil type heating element comprises an upper half part and a lower half part, each long notch with upward openings extends from an upper edge of the coil type heating element to the lower half part of the coil type heating element, each long notch with downward openings extends from a lower edge of the coil type heating element to the upper half part of the coil type heating element, a plurality of mountain peak parts and a plurality of valley parts are formed by the upper half part and the lower half part of the coil type heating element, each peak part of the plurality of peak parts faces to the upper half part of the coil type heating element, and each peak part of the coil type heating element is connected with each peak part of the coil type heating element, and each peak part of the coil type heating element are arranged in a serpentine shape, and each peak part is arranged between the two adjacent peak parts of the coil type heating element; the method is characterized in that:

a longitudinal section of the coil-type heating element between any two adjacent elongated gaps with upward openings and the elongated gaps with downward openings is wavy, the longitudinal section has at least two wave crest portions and at least one wave trough portion which are connected alternately, wherein at least two wave crest portions are respectively positioned on the upper half portion of the coil-type heating element and the lower half portion of the coil-type heating element, and at least one wave trough portion is positioned between the at least two wave crest portions, so that the longitudinal section is W-shaped.

2. The coil-type heating structure according to claim 1, wherein: the positioning element comprises a bridging section, a first supporting leg and a second supporting leg, wherein the first supporting leg and the second supporting leg respectively extend from two ends of the bridging section and are parallel to each other, the bridging section of the positioning element spans the wave crest part, so that the coil-type heating element spanned by the bridging section is arranged between the bridging section and the inner wall of the surrounding heat insulator, and the first supporting leg and the second supporting leg respectively penetrate two adjacent long notches with upward openings and downward openings, extend towards the inner wall of the surrounding heat insulator and are respectively inserted into and fixed on the inner wall of the surrounding heat insulator.

3. The coil-type heating structure according to claim 2, wherein: the plurality of positioning parts cross over the plurality of mountain parts and the plurality of mountain parts, and the longitudinal section of the coil-type heating element is crossed by the bridging section of one positioning part.

4. The coil-type heating structure according to claim 1, wherein: the positioning element comprises a bridging section, a first supporting leg and a second supporting leg, wherein the first supporting leg and the second supporting leg respectively extend from two ends of the bridging section vertically and are parallel to each other, the bridging section of the positioning element at least spans the wave trough part, the first supporting leg and the second supporting leg respectively penetrate two adjacent long notches with upward openings and are close to the lower edge, and the long notches with downward openings and are close to the upper edge, extend towards the inner wall of the surrounding heat insulator, and are respectively inserted into and fixed on the inner wall of the surrounding heat insulator.

5. The coil-type heating structure according to claim 4, wherein: the bridging section is outwardly convex.

6. The coil type heating structure according to any one of claims 1 to 5, wherein: an opening of the at least one wave trough portion and the at least two wave crest portions face the inner wall of the surrounding thermal insulator at the same time.

7. The coil-type heating structure according to claim 1, wherein: an opening of the at least one wave trough portion and the at least two wave crest portions are simultaneously far away from the inner wall of the surrounding heat insulator.

8. The coil-type heating structure according to claim 1, wherein: the positioning element comprises a bridging section, a first supporting leg and a second supporting leg, wherein the first supporting leg and the second supporting leg vertically extend from two ends of the bridging section respectively and are parallel to each other, and the bridging section is convex.