CN112327116B - Discharge detection system and method based on parylene film and charged particles - Google Patents

Discharge detection system and method based on parylene film and charged particles Download PDF

Info

Publication number
CN112327116B
CN112327116B CN202011221113.6A CN202011221113A CN112327116B CN 112327116 B CN112327116 B CN 112327116B CN 202011221113 A CN202011221113 A CN 202011221113A CN 112327116 B CN112327116 B CN 112327116B
Authority
CN
China
Prior art keywords
parylene film
discharge
charged particles
easy
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202011221113.6A
Other languages
Chinese (zh)
Other versions
CN112327116A (en
Inventor
韩炎晖
冯跃
周子隆
饶泽泓
王运来
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Institute of Technology BIT
Original Assignee
Beijing Institute of Technology BIT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Institute of Technology BIT filed Critical Beijing Institute of Technology BIT
Priority to CN202011221113.6A priority Critical patent/CN112327116B/en
Publication of CN112327116A publication Critical patent/CN112327116A/en
Application granted granted Critical
Publication of CN112327116B publication Critical patent/CN112327116B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
    • G01R31/1227—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing of components, parts or materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating

Abstract

The invention discloses a discharge detection system and method based on a parylene film and charged particles. The invention realizes embedded deposition of the parylene film in the complicated, closed and microminiature electric and electronic system and on the surface of the electric and electronic system based on the film deposition technology; the micron-sized parylene film is conformal with the electric and electronic system, so that large-area, omnibearing and dead-angle-free coverage in the electric and electronic system is realized; based on a parylene film polarity technology, the discharge detection of the whole electric and electronic system, the discharge accurate positioning of the electric and electronic system in the system and the calculation of the discharge key parameters are realized by combining the electrostatic action of charged particles; the invention improves the universality of the discharge detection technology and solves the problems that the existing discharge detection technology can not realize the detection and accurate positioning of the discharge in a complex, closed and miniature system; the effectiveness and the precision of the discharge detection technology are improved; the robustness of the discharge detection technology against the internal environment interference of the system is improved.

Description

Discharge detection system and method based on parylene film and charged particles
Technical Field
The invention relates to a discharge positioning and detecting technology, in particular to a system and a method for detecting discharge events in an electric and electronic system based on electrostatic interaction between a parylene film and charged particles.
Background
An electric and electronic system in the defense industry faces the threats of discharge phenomena such as lightning strike discharge, medium static charge accumulation discharge and instantaneous high-voltage pulse discharge in a complex electromagnetic environment. In case of a discharge event of a weak part in the system, a transient high current pulse may cause the failure of the whole electrical and electronic system. The technology for detecting the discharge occurrence event is a key means for acquiring discharge parameters such as the discharge occurrence position, the discharge voltage, the duration, the discharge energy and the like, and is extremely important in the aspects of analyzing the discharge cause, finding the discharge occurrence position, perfecting the discharge protection and the like.
With the development of microelectronic technology, the electric and electronic systems are rapidly changed to miniaturization and embedding. Electrical discharges become an important factor in the failure of complex electrical and electronic systems. Therefore, since the end of the 70 s of the last century, researchers in various countries have conducted extensive research on discharge detection techniques.
At present, the following methods are available for detecting discharge: electromagnetic radiation, flux linkage/magnetic tape, current monitor, shunt resistor, acoustic detection, optical detection, electrostatic induction, and the like.
The electromagnetic radiation method is to detect electromagnetic radiation caused by discharge by using an antenna; the principle of the chain/tape method is based on the change of magnetization on a magnetic metal caused by a magnetic field generated by an impulse current in a line; the principle of the current monitoring method is similar to the flux linkage and consists of prerecorded magnetic tapes which are partially erased by the discharge current; the parallel resistor method is to measure the proportional voltage generated by the lightning current on the parallel resistor; the acoustic detection method is to use an ultrasonic sensor to pick up a discharge signal; the optical detection method can effectively detect the discharge event by utilizing the discharge optical effect, and mainly detects ultraviolet rays; for weak discharge without acousto-optic effect, the change of injected charge of electrostatic polarity of the charged body can be detected by using an electrostatic probe.
The existing discharge detection technology is only suitable for detecting a single component in an open environment, most of the discharge detection technologies are used for detecting the components in a non-working state, so that the discharge detection technology cannot be suitable for detecting the components in an embedded and system-level working state, and in addition, the existing discharge detection technology depends on expensive instruments and equipment seriously. For example, although the electromagnetic radiation method can utilize the antenna to remotely receive strong electromagnetic radiation generated by the discharge of the electric and electronic system, the discharge in the complex embedded system cannot be accurately positioned; the flux linkage/magnetic tape method cannot realize accurate positioning inside the system due to poor spatial resolution; the current monitor and the parallel resistor method are complex in device, cannot be installed in a complex micro embedded electric and electronic system, the required detection current can influence the normal operation of the electric and electronic system, and the cost is high, so that the current monitor and the parallel resistor method are not suitable for large-scale popularization; the echo crosstalk problem under the sealed closed-loop environment of the acoustic detection method cannot be used in a sealed electric and electronic system; although the optical detection method can realize accurate positioning, the detection range is limited by the lens, and the detection cannot be carried out on the whole electric and electronic system; electrostatic induction detection can also locate the charge injection position of the discharge polarity, but the detection accuracy can be greatly interfered by the environment and the complex electromagnetic environment inside the system when an electric and electronic system works.
In summary, the reasons why the conventional discharge detection technology cannot effectively detect the discharge inside the complex electrical and electronic system can be summarized as the following points:
(1) the macro system level discharge detection and the micro device level discharge positioning cannot be compatible;
(2) the embedded type mounting can not be carried out in a complex closed electric and electronic system;
(3) is easily interfered by the working environment of the electric and electronic system or interferes the normal work of the electric and electronic system.
Therefore, the invention discloses an embedded detection system and a method for realizing large-area, full-coverage, accurate and rapid positioning and discharge detection in a complex closed electrical and electronic system, and the difference between the embedded detection system and the existing discharge detection technology is mainly embodied in that the system level and device level discharge positioning detection is compatible, the embedded installation is compatible and the embedded installation is free from interference. The present invention also relies on the polar technology of parylene films and the electrostatic interaction between the parylene films and the charged particles to achieve the above objectives.
Disclosure of Invention
The invention is based on the film deposition technology, so that the parylene film can be deposited in a complex and closed electric and electronic system in a large-area and omnibearing manner and is conformal with the electric and electronic systems with different structures; based on a parylene film polarity technology, the electrostatic interaction between the parylene film and charged particles is utilized, and the system-level discharge detection and the accurate discharge positioning of the device level in the system are realized simultaneously; and reversely deducing discharge parameters through an algorithm according to the electrokinetic behavior and the degree of the charged particles.
One object of the present invention is to provide a discharge event detection system based on electrostatic interaction between parylene film and charged particles.
The discharge event detection system based on the electrostatic interaction between the parylene film and the charged particles comprises: a parylene film which is easy to be peeled off from the substrate and a discharge injection degree visualization device;
the parylene film which is easy to be stripped from the substrate comprises a super-hydrophobic layer and a parylene film; depositing a low-surface-energy liquid-phase hydrophobic material on the surface of an electric and electronic system to be detected by adopting a chemical vapor deposition technology, and forming a super-hydrophobic layer on the surface of the electric and electronic system after the material is hydrolyzed and condensed; depositing parylene on the surface of the super-hydrophobic layer by adopting a chemical vapor deposition technology to form a parylene film; after heating and curing, the parylene film is tightly combined with the alkane super-hydrophobic layer to form a transparent parylene film which is easy to peel off from the substrate, and the super-hydrophobic layer is used as a substrate of the parylene film to ensure the integrity of the parylene film which is easy to peel off from the substrate when being torn off from the surface of the electric and electronic system; the parylene film which is easy to be stripped from the substrate is only a micron-sized insulating medium layer, and the original conductive and insulating electrical properties of an electric and electronic system cannot be influenced;
the discharge injection degree visualization device comprises a transparent cylinder, a cylinder cover, a back electrode, a grounding electrode, a grid, particles, a fan, a direct-current high-voltage power supply, an X-ray source, a high-definition camera and a PC (personal computer); the transparent cylinder is made of a transparent material with weak X-ray absorption capacity, has a cylinder bottom and an open top, and is internally provided with a columnar space; the top end of the transparent cylinder is covered with a cylinder cover; the cylinder cover is made of transparent materials, a back electrode is arranged on the inner surface of the cylinder cover, the back electrode comprises a plurality of two-dimensional spiral line electrodes which are uniformly distributed on the inner surface of the cylinder cover, the two-dimensional spiral line electrodes positioned at even number positions are connected through the same lead, and the two-dimensional spiral line electrodes positioned at odd number positions are connected through the same lead; the inner surface of the cylinder bottom of the transparent cylinder is adhered with a grounding electrode which covers the whole cylinder bottom surface; a grid is arranged on the bottom in the transparent cylinder and above the grounding electrode; the grid is connected to a direct-current high-voltage power supply; the space between the grounding electrode and the grid mesh is used for uniformly containing particles; a fan is arranged on the side wall in the transparent cylinder and above the grid; an X-ray source is arranged outside the transparent cylinder; the high-definition camera is arranged above the transparent cylinder; the high-definition camera is connected to the PC;
after the electric and electronic system discharges, discharge current is generated, the parylene film is injected with charges, so that the parylene film generates polarity, and the parylene film records the charges generated by the discharge; when the difference of the injected charges with the polarity between the discharge parts in the electric and electronic system reaches the discharge voltage and the electric field reaches the breakdown field intensity, a discharge channel is formed between the two parts instantaneously and is maintained for a period of time, usually 60 to 300 nanoseconds, so that discharge is generated; in the discharge channel, air is broken down and ionized to generate a large amount of positive and negative charges; in the discharge duration, positive and negative charges generated by discharge move directionally under the action of an electric field, are separated and accelerated to form discharge current and are injected into the parylene film; defining the direction of the discharge current flowing to the parylene film as positive, and after the parylene film is injected with charges, generating the same polarity on the surface, thereby correspondingly forming a polarized area; the direction of the discharge current determines the polarity of the injected charges, and further determines the polarity of the parylene film; the parylene film which is easy to be stripped from the substrate is stripped from the surface of the electric and electronic system, and the parylene film which is easy to be stripped from the substrate still keeps conformal with the electric and electronic system;
covering the parylene film which is easy to peel off from the matrix on the back electrode on the inner surface of the cylinder cover of the discharge visualization device, covering the cylinder cover on the transparent cylinder, and facing the parylene film which is easy to peel off from the matrix into the cylinder; the X-ray source generates soft X-rays to penetrate through the transparent cylinder, so that gas molecules in the transparent cylinder are ionized, and a large amount of positive and negative charges are generated between the grid mesh and the grounding electrode; a direct-current high-voltage power supply applies high-voltage with one polarity to the grid mesh, a bias electric field is formed between the grid mesh and the grounding electrode, positive and negative opposite charges are driven to be separated and accelerated, the positive and negative opposite charges are injected into particles below the grid mesh, the particles are charged to form charged particles, the charge quantity of the charged particles is in direct proportion to the voltage applied by the grid mesh, and the polarity of the charged particles is the same as that of the high-voltage applied by the grid mesh; the fan generates air flow to convey the charged particles to the cylinder cover; the charged particles conveyed to the cylinder cover are subjected to the electrostatic action of the parylene film which is easy to peel off from the substrate, the charged particles with the polarity opposite to the surface potential of the parylene film are adsorbed to the surface of the polarized area of the parylene film, and the charged particles with the same polarity as the surface potential of the polarized area of the parylene film are repelled away from the surface of the parylene film which is easy to peel off from the substrate;
the high-definition camera is right opposite to the parylene film which is easy to peel off from the substrate, the parylene film which is easy to peel off from the substrate is integrally transparent, and the covering image of the charged particles covering the parylene film is directly observed through the high-definition camera; the high-definition camera transmits the coverage image to the PC; the thicker the surface charged particles of the parylene film are covered, the darker the color is, the PC extracts the gray value of the covered image by adopting a particle coverage rate algorithm to obtain the area and the thickness of the covered area of the charged particles; when the charge-to-mass ratio of the charged particles is constant, the more the charge quantity injected into the parylene film is, the stronger the adsorption force between the charged particles and the parylene film is, the more easily the charged particles are adsorbed on the surface of the parylene film, the thicker the charged particles covered on the surface of the parylene film are, the larger the area of the covered area is, and therefore, the gradient graph of the injected charge density is represented by the thickness and the area of the parylene film covered by the charged particles;
two leads of the back electrode are respectively connected to an alternating current source, alternating voltage is applied, and the charged particles are acted by coulomb force and dielectrophoresis force in an alternating electric field and are separated from the surface of the parylene film which is easy to be peeled from the substrate, so that the charged particles adhered to the surface of the parylene film which is easy to be peeled from the substrate are removed, and the charged particles are reused;
disconnecting the grid mesh from the direct-current high-voltage source, neutralizing positive and negative charges generated by soft X-ray ionization with charges carried by the charged particles, depolarizing the charged particles, and recovering the charged particles to be neutral particles;
changing the polarity of a direct-current high-voltage power supply, irradiating the particles through soft X-rays again to generate charged particles, so that the charged polarity of the charged particles is changed, sending the charged particles to the surface of a polarized area of the parylene film which is easy to peel off from the substrate through a fan, and obtaining the area and the thickness of a coverage area of the charged particles after the polarity is changed through an image processing device; and finally obtaining a gradient map of positive and negative charge quantity injected on the surface of the parylene film by adopting a particle coverage algorithm to the obtained coverage images of the charged particles with the two polarities.
The direction of the discharge current determines the polarity of the injected charges, and further determines the polarity of the potential of the parylene film which is easily peeled from the substrate; if the direction of the discharge current is positive, positive charges generated after discharge are injected into the parylene film which is easy to be stripped from the substrate, and positive potential is generated on the surface of the parylene film; if the direction of the discharge current is negative, negative charges generated after discharge are injected into the parylene film which is easy to be peeled from the substrate, and a negative potential is generated on the surface of the parylene film which is easy to be peeled from the substrate; the discharge voltage depends on the distance between the points where the discharge occurs, the farther the distance, the greater the breakdown voltage. When the discharge peak voltage is higher, the area of the region where the discharge occurs is larger, and the area of the region where the parylene film is polarized is larger, the area of the coverage region of the resulting charged particles is larger. And the area with the strongest injected charge quantity of the parylene film is closest to a discharge point, the most discharge is caused, the most generated charge is generated, and the thicker the cover area of the obtained charged particles is, the more the injected charge quantity of the parylene film is. Therefore, the charge amount distribution on the surface of the parylene film can visually reflect the key information (occurrence area, peak voltage) of the discharge event of the electric and electronic system.
The invention detects discharge through the parylene film, and is compatible with a macroscopic system and a microscopic device in order to realize omnibearing detection of a closed and complex electric and electronic system. Therefore, the invention is based on the thin film deposition technology, and the micron-scale parylene film which is easy to be stripped from the substrate is embedded and generated on the surface of the electric and electronic system with a complex structure (a plane concave-convex structure, a groove high aspect ratio structure and the like). The film is divided into an upper layer and a lower layer of a parylene film and a super-hydrophobic layer, is conformal with an electric and electronic system, and can cover the inside of the whole electric and electronic system in a large area, all-around and no dead angle.
The super-hydrophobic layer material is selected from low surface energy liquid phase hydrophobic materials compatible with chemical vapor deposition technology, such as silane, polydimethylsiloxane or polypropylene.
The transparent cylinder is made of quartz or organic glass, which has weak X-ray absorption capacity.
The discharge injection degree visualization device converts the injection charge quantity of the parylene film into the area and the thickness of the visualized charged particles covered on the surface of the parylene film by utilizing the electrostatic action (electrostatic attraction and electrostatic repulsion) between the parylene film and the charged particles after the charge is injected after the discharge, and then obtains the polar injection charge distribution on the surface of the parylene film by using an image processing device and an algorithm, thereby realizing the accurate positioning of the discharge.
The surface potential of the parylene film which is easy to be peeled off from the matrix depends on the discharge current waveform formed by discharge, wherein important parameters comprise a discharge current peak value, a 30 nanosecond current value, a 60 nanosecond current value and duration, and the parameters are influenced by factors such as gas pressure, temperature, humidity, discharge peak voltage and the like. Under a certain gas environment, the peak value of the discharge current, the current values of 30 nanoseconds and 60 nanoseconds are positively correlated with the discharge peak voltage.
For the discharge inside the electro-electronic system, the discharge current passes through the two parylene films, so that both positive and negative charges are injected to the surfaces of the parylene films.
The thickness of the super-hydrophobic layer is 30-60 microns. The parylene film has a thickness of less than 15 microns.
The invention also aims to provide a discharge detection method based on the interaction of the parylene film and the charged particles.
The invention relates to a discharge detection method based on the action of a parylene film and charged particles, which comprises the following steps:
1) preparing a parylene film which is easy to peel off from a substrate:
a) depositing a low-surface-energy liquid-phase hydrophobic material on the surface of an electric and electronic system to be detected by adopting a chemical vapor deposition technology, and forming a super-hydrophobic layer on the surface of the electric and electronic system after the material is hydrolyzed and condensed;
b) depositing parylene on the surface of the super-hydrophobic layer by adopting a chemical vapor deposition technology to form a parylene film;
c) heating and curing the parylene film and the super-hydrophobic layer to enable the parylene film and the super-hydrophobic layer to be tightly combined to form a transparent parylene film which is easy to peel off from the substrate;
2) the parylene film which is easy to be stripped from the substrate is conformal with the electric and electronic system, and the electric and electronic system keeps the shape of the electric and electronic system and works normally, and simultaneously realizes large-area omnibearing dead-angle-free covering discharge detection in the electric and electronic system;
3) when the potential difference between the parts easy to discharge in the electric and electronic system reaches the discharge voltage and the electric field reaches the breakdown field strength, a discharge channel is formed between the parts easy to discharge instantaneously and is maintained for a period of time, and then discharge is generated; in the discharge channel, air is broken down and ionized to generate a large amount of positive and negative charges; in the discharge duration, positive and negative charges generated by discharge move directionally under the action of an electric field, are separated and accelerated to form discharge current, and the discharge current is injected into the parylene film which is easy to peel off from the substrate; defining the direction of the discharge current to flow to the parylene film which is easy to be peeled off from the substrate as that the parylene film which is easy to be peeled off from the substrate generates polarity on the surface after being injected with electric charge, so that a polarized area is correspondingly formed, wherein the amount of the injected electric charge is determined by the discharge voltage, and the positive and negative of the injected electric charge are determined by the direction of the injected discharge current;
4) the parylene film which is easy to be stripped from the substrate is stripped from the surface of the electric and electronic system, and the parylene film which is easy to be stripped from the substrate still keeps conformal with the surface of the electric and electronic system;
5) covering the parylene film which is easy to peel off from the matrix on the back electrode on the inner surface of the cylinder cover of the discharge visualization device, covering the cylinder cover on the transparent cylinder, and facing the parylene film which is easy to peel off from the matrix into the cylinder; 6) the discharge visualization device visualizes the potential:
a) the X-ray source generates soft X-rays to penetrate through the transparent cylinder, so that gas molecules in the transparent cylinder are ionized, and a large amount of positive and negative charges are generated between the grid mesh and the grounding electrode;
b) applying a high-voltage power supply with one polarity (0.5-3 kV) to the grid mesh by using a direct-current high-voltage power supply, forming a bias electric field between the grid mesh and the grounding electrode to drive positive and negative charges to be separated and accelerated, injecting the positive and negative charges into particles below the grid mesh, and enabling the particles to carry a certain amount of charges with the same polarity to form charged particles, wherein the polarity of the charged particles is the same as that of the high-voltage applied by the grid mesh;
c) the fan generates air flow to convey the charged particles to the cylinder cover;
d) the charged particles conveyed to the cylinder cover are subjected to the electrostatic action of the parylene film which is easy to peel off from the substrate, the charged particles with the polarity opposite to the surface potential of the parylene film which is easy to peel off from the substrate are adsorbed to the surface of the polarized area of the parylene film which is easy to peel off from the substrate, and the charged particles with the same polarity as the surface potential of the polarized area of the parylene film which is easy to peel off from the substrate are repelled away from the surface of the parylene film which is easy to peel off from the substrate;
7) the image processing apparatus obtains a potential:
a) the high-definition camera is right opposite to the parylene film which is easy to peel off from the substrate, the parylene film which is easy to peel off from the substrate is integrally transparent, and the effect that the charged particles cover the parylene film is directly observed through the high-definition camera;
b) the high-definition camera transmits the coverage image to the PC; the thicker the surface charged particles of the parylene film are covered, the darker the color is, the PC extracts the gray value of the covered image by adopting a particle coverage rate algorithm to obtain the area and the thickness of the covered area of the charged particles;
c) when the charge-to-mass ratio of the charged particles is fixed, the more the injected charge amount of the parylene film which is easy to be peeled off from the substrate is, the stronger the adsorption force between the charged particles and the parylene film which is easy to be peeled off from the substrate is, the more easily the charged particles are adsorbed on the surface of the parylene film which is easy to be peeled off from the substrate, the thicker the thickness of the charged particles covered on the surface of the parylene film which is easy to be peeled off from the substrate is, and the larger the area of the covered area is, so that the gradient graph of the injected charge density is represented by the thickness and the area of the parylene film covered by the charged particles;
8) connecting two leads of the back electrode to an alternating current source respectively, applying alternating current with the amplitude of 1-2 kV and the frequency of 50-100 Hz, and separating the charged particles from the surface of the parylene film which is easy to peel off from the substrate under the action of coulomb force and dielectrophoresis force in an alternating electric field, so as to remove the charged particles adhered to the surface of the parylene film which is easy to peel off from the substrate and realize the repeated use of the charged particles;
9) disconnecting the grid mesh from the direct-current high-voltage power supply, neutralizing positive and negative charges generated by soft X-ray ionization with charges carried by the charged particles, depolarizing the charged particles, and recovering the charged particles into neutral particles again;
10) changing the polarity of the high-voltage applied to the grid mesh to change the direction of a bias electric field formed between the grid mesh and the grounding electrode, repeating the steps 6) to 7) to obtain the area and the thickness of the charged particle coverage area with opposite polarities, and finally obtaining a density gradient diagram of injected positive and negative charges on the surface of the parylene film which is easy to be stripped from the substrate through the area and the thickness of the coverage area of the charged particles with the two polarities with the same charge-to-mass ratio.
Wherein in the step 1), the thickness of the super-hydrophobic layer is 30-60 microns. In step 1) b), the parylene film has a thickness of less than 15 microns.
The invention has the advantages that:
the invention realizes large-area, full-coverage, accurate and rapid positioning and detection discharge in a complex closed electric and electronic system based on the polar technology of the parylene film and the electrostatic action between the parylene film and charged particles, and the difference of the invention and the existing discharge detection technology is reflected in that the system level and device level discharge positioning detection is compatible, the embedded installation is compatible and the interference is not generated; the embedded deposition of the parylene film in the complicated, closed and microminiature electric and electronic system and on the surface of the electric and electronic system is realized based on the film deposition technology; the deposited micron-sized parylene film is conformal with an electric and electronic system, and the electric module, device and element with a plane concave-convex structure or a groove high depth-width ratio structure realize large-area, omnibearing and dead-angle-free coverage in the electric and electronic system; based on a parylene film polarity technology, the discharge detection of the whole electric and electronic system, the discharge accurate positioning of the electric and electronic system in the system and the calculation of the discharge key parameters are realized by combining the electrostatic action of charged particles; the dielectric property of the parylene film is basically not influenced by the sound, light and electromagnetic environment inside the electric and electronic system, and the micron-sized transparent parylene film is conformal to the electric and electronic system and does not influence the original electric characteristic of the system. Therefore, the invention improves the universality of the discharge detection technology and solves the problems that the existing discharge detection technology can not realize the detection and accurate positioning of the discharge in the complex, closed and miniature system; the effectiveness and the precision of the discharge detection technology are improved, and the problem that the prior art cannot be compatible with macroscopic system-level discharge detection and microscopic device-level discharge positioning is effectively solved; the robustness of the discharge detection technology against the internal environment interference of the system is improved.
Drawings
FIG. 1 is a schematic view of a process for depositing a parylene film on a surface of an electronic system, which is easily peeled from a substrate;
FIG. 2 is a schematic diagram of a parylene film easily peeled off from a substrate and an electrical and electronic system to be tested according to an embodiment of the discharge testing system based on the action of the parylene film and the charged particles; wherein, (a) is the internal schematic diagram of a complex electric and electronic system, and (b) is the schematic diagram of a parylene film which is deposited on the surface of the electric and electronic system and is easy to be peeled off from a substrate;
FIG. 3 is a discharge diagram of an embodiment of a parylene film easily peeled off from a substrate and an electro-electronic system to be detected according to the present invention, wherein (a) is a schematic diagram of an internal discharge of a complex electro-electronic system, (b) is a discharge diagram, and (c) is a schematic diagram of a surface of a parylene film easily peeled off from a substrate after discharge;
FIG. 4 is a schematic view of a discharge visualization device of an embodiment of the discharge detection system based on the interaction of parylene film with charged particles according to the present invention;
FIG. 5 is a schematic diagram of the back electrode of one embodiment of the discharge detection system based on the interaction of parylene film and charged particles, wherein (a) is a cross section and (b) is a spiral back electrode structure;
fig. 6 is a distribution diagram of charged particles adsorbed on the surface of a parylene film easy to peel off from a substrate and a surface potential gradient diagram of injected charge density of the parylene film easy to peel off from the substrate obtained by calculation according to an embodiment of the discharge detection system based on the interaction between the parylene film and the charged particles, wherein (a) the surface distribution diagram of the parylene film is deposited for negative polarity particles, (b) the surface distribution diagram of the parylene film easy to peel off from the substrate for positive polarity particles, and (c) the injected charge density gradient diagram of the parylene film easy to peel off from the substrate;
FIG. 7 is a standard discharge current waveform obtained by an embodiment of the discharge detection system based on the interaction of parylene film and charged particles according to the present invention.
Detailed Description
The invention will be further elucidated by means of specific embodiments in the following with reference to the drawing.
FIG. 1 is a schematic process diagram of a parylene film deposited on the surface of an electronic system to be easily peeled off from a substrate. Taking low surface energy hydrophobic material silane as an example, the preparation process of the parylene film which is suitable for detecting discharge events in a complex and closed electrical and electronic system and is easy to peel off from a substrate comprises the following steps:
in fig. 1(a), silane is deposited on the surface of the electronic system 0 by chemical vapor deposition. Due to the hydrolytic polycondensation of silane, the super-hydrophobic layer 2 (with the thickness of 30-60 microns) can be formed on the surface of the equipment.
After the silane super-hydrophobic layer is formed in fig. 1(b), parylene is deposited on the surface of the electric and electronic system and above the silane super-hydrophobic layer again by using the chemical vapor deposition technology to form a parylene film 1 (with the thickness of less than 15 micrometers).
In the step (c) of fig. 1, a heating fan is used for curing the parylene film and the silane super-hydrophobic layer, so that the parylene film and the super-hydrophobic layer are tightly combined, the parylene film and the silane super-hydrophobic layer can be still kept conformal with the surface of a device when being torn off, and discharge detection and positioning are facilitated.
The silane super-hydrophobic layer is used as a substrate of the parylene film to ensure the integrity of the parylene film which is easy to be peeled off from the substrate when being torn off; the silane super-hydrophobic layer and the parylene film jointly form the parylene film which is easy to peel off from the substrate.
Fig. 2(a) shows a complex electrical and electronic system, and it can be seen that a large variety of devices are mounted in the compact system, resulting in a complex surface morphology, which greatly increases the difficulty of discharge detection. Fig. 2(b) is a simplified schematic diagram of the interior of the electric and electronic system, which is composed of an electric and electronic system 0 and a housing 3. The invention relates to a parylene film which is deposited on the surface of an electric and electronic system 0 by utilizing a chemical vapor deposition technology and is easy to peel off from a substrate, which consists of a silane super-hydrophobic layer 1 and a parylene film 2.
The chemical vapor deposition technology is adopted to deposit on the surface of the electric and electronic system, so that micro-nano gaps among the electric and electronic system are covered. The parylene film which is easy to peel off from the matrix shows the multi-scale characteristic, can be macroscopically deposited on the surface of an easy-to-discharge device, and can also be subjected to micro-nano penetration into a gap of a complex high-aspect-ratio structure of a high-voltage electric and electronic system. The parylene film which is easy to be stripped from the substrate is conformal with an electric and electronic system, the shape and normal work of the device are not influenced, and meanwhile, all parts of the device are comprehensively detected. Therefore, the parylene film can detect the discharge in the electronic and electronic system in a large area, in all aspects and without dead angles. And the parylene film which is easy to be stripped from the substrate is only a micron-sized insulating medium layer, and the original electrical properties of the electric and electronic system, such as conductivity, insulation and the like, cannot be influenced.
Fig. 3 shows a discharge event inside a complex electrical and electronic system. Fig. 3(b) is a schematic diagram of the principle of discharge, and after the electric/electronic system discharges, a discharge current is injected into the parylene film to polarize the parylene film, so that the parylene film can record the charges generated by the discharge. When the difference of the injected charges of the polarity between the discharge parts in the electric and electronic system reaches the discharge voltage (the voltage is up to kilovolt), and the electric field reaches the breakdown field intensity, a discharge channel is formed between the two parts instantaneously and is maintained for a period of time (hundreds of nanoseconds), so that the discharge is generated. In the discharge channel, air is broken down and ionized to generate a large amount of positive and negative charges. In the discharge duration, positive and negative charges generated by discharge move directionally under the action of an electric field, are separated and accelerated to form discharge current, and the discharge current is injected into the parylene film. The discharge current flowing to the parylene film is defined as that after the parylene film is injected with charges, the injected charges with certain polarity are generated on the surface to form a corresponding polarized area. The polarity of the discharge current determines the polarity of the injected charge, and thus the polarity of the injected charge determines the polarity of the parylene film. If the discharge current is positive, positive charges generated after discharge are injected into the parylene film, and positive injection charges are generated on the surface of the parylene film; if the discharge current is negative, negative charges generated after discharge are injected into the parylene film, and negative injected charges are generated on the surface of the parylene film. As shown in fig. 3(c), three arrows from left to right are sequentially represented as: discharge events can be divided into device-to-device discharges, device internal discharges, and device-to-enclosure discharges. When discharge occurs, discharge current passes through the two layers of the parylene films and positive charges and negative charges are respectively injected, so that a region with opposite conquering potentials appears on the surfaces of the parylene films;
fig. 4 is a discharge visualization and image processing apparatus according to the present invention, which includes: a transparent cylinder cover 10, a parylene film 11 which is easy to peel off from the substrate, a transparent cylinder 12, a fan 13, an X-ray source 14, a grid 15 and particles 16. The parylene film which is easy to be stripped from the substrate is adhered to the cylinder cover, and one surface of the parylene film faces the cylinder.
An X-ray source (10keV) is arranged outside the transparent cylinder and emits soft X-rays towards the bottom of the cylinder, so as to realize the polarization and depolarization of particles. Since the soft X-rays can penetrate the transparent cylinder and ionize the gas molecules, a large amount of positive and negative charges are generated between the grid mesh and the ground electrode. When the grid is connected with a high-voltage power supply, a bias electric field is formed between the grid and the grounding electrode to drive the positive and negative charges to be separated and accelerated, and the positive and negative charges are injected into particles to enable the particles to carry a certain amount of charges with the same polarity, and the polarity of the particles is the same as the voltage polarity of the grid. By soft X-ray polarization, the surface potential of the particles is the same as the voltage V of the grid. Since the capacitance C of the charged particles is:
C＝4πε0R (1)
therefore, the charge-to-mass ratio of the charged particles having a mass m and a charge amount Q can be obtained as follows:
Figure BDA0002762059510000101
wherein the particles have a particle size R and a density p, e0Is the dielectric constant in vacuum. When the type of the particles is determined, the particle diameter and the density are known, so that charged particles with the same charge-to-mass ratio and different polarities can be obtained by changing the voltage polarity of the grid.
After the polarization of the particles is completed, a dust fan is needed to transport the charged particles to the surface of the parylene film. The fan device is fixed at the bottom of the cylinder through bolts, and a certain distance is kept between the lower part of the fan device and the grid mesh. When the fan is started, an ascending air flow is formed in the barrel, and the charged particles at the bottom are driven to move upwards to the top of the visualization device to perform electrostatic interaction with the parylene film.
The image processing apparatus includes a high-definition camera 20 and a PC 21. The high-definition camera is arranged above the visualization device, and the lens is opposite to the parylene film which is easily stripped from the substrate. The whole parylene film which is easy to be stripped from the substrate is transparent, so that the effect of covering the particles on the parylene film which is easy to be stripped from the substrate can be directly observed through a high-definition camera. The high-definition camera transmits the image to the PC. And the PC machine obtains the area and the thickness of the particle coverage area by using a particle coverage algorithm.
Fig. 5 is a schematic diagram of the electrode structure of the cylinder cover of the present invention, which includes a back electrode 30 and a high voltage ac power supply 31, wherein (a) is a cross section, and (b) is a spiral back electrode structure. The electrodes are made of transparent conductive materials and are periodically etched on the dielectric substrate to form two-dimensional spiral line arrangement; the two-dimensional spiral line electrodes are alternately and respectively connected with the same lead, namely the two-dimensional spiral line electrodes positioned at even number positions are connected through the same lead, and the two-dimensional spiral line electrodes positioned at odd number positions are connected through the same lead; the cross section of the back electrode, i.e. the section perpendicular to the substrate, is a regular pattern, such as a circle, trapezoid or rectangle. The back electrodes arranged in a spiral line are alternately introduced with a high-voltage alternating current power supply to form an alternating electric field on the surface of the parylene film; the charged particles adhered to the surface of the parylene film are removed by the action of coulomb force and dielectrophoresis force on the charged particles in the alternating electric field.
After the image processing device finishes primary image acquisition, the back electrode is introduced with high-voltage alternating current voltage to remove charged particles adsorbed on the surface of the parylene film. And simultaneously turning on the X-ray source, but not turning on the voltage of the grid electrode. When the grid is not connected with a high-voltage power supply, positive and negative charges generated by soft X-ray ionization can be neutralized with charges carried by the charged particles, and the charged particles are depolarized. And then the grid net is connected with a high-voltage power supply, the voltage amplitude of the grid net is unchanged, and the polarity of the grid net is opposite, so that the charged particles with the same charge-mass ratio but different polarities are obtained. But the grid voltage cannot exceed a threshold value VthThe charged dust particles are prevented from causing image force between the parylene film and the particles to be larger than gravity due to the fact that the electric charge amount is too much, and therefore the charged dust particles are electrostatically adsorbed on a parylene film non-polarized area, and the algorithm judges that the parylene film polarized area is too large:
Figure BDA0002762059510000111
wherein epsiloneIs the relative dielectric constant of the parylene film. Repeating the above processes of dust emission, coverage effect recording, particle depolarization and particle repolarization to obtain distribution diagrams of positive and negative charged particles adsorbed on the surface of parylene film, as shown in FIG. 6(a) and FIG. 6(b), respectively. And analyzing the obtained coverage image through a coverage rate algorithm, and extracting the gray value of the coverage image. Because the more the injected charge amount of a certain region on the surface of the parylene film is, the higher the charge density of the region is, the stronger the electrostatic effect is, the thicker the charged particles are adsorbed, the darker the color is, the lower the gray value is, the white is 255, and the black is 0. The relationship between the charged particle adsorption thickness H and the injected charge density σ can be obtained by the following equation:
Figure BDA0002762059510000112
it is thus possible to calculate a distribution gradient map of the density of the injected charge of the parylene film and to determine the region where static electricity occurs (shaded region), as shown in fig. 6 (c).
Peak value sigma of charge density by parylene film injectionmaxAnd minimum value σminAnd corresponding area S of the regionmaxAnd SminMinimum gap capacitance C with parylene film and electrostatic discharge pointminAnd maximum gap capacitance CmaxAnd corresponding maximum gap HmaxAnd a minimum clearance HminThe electrostatic discharge voltage u is derived:
Figure BDA0002762059510000113
and substituting the discharge voltage into a standard discharge current fitting expression to obtain a discharge current i (t), wherein the current waveform is shown in fig. 7. Depending on the current waveform, some important parameters such as 30 and 60 nanosecond current values, duration, can be derived directly. The discharge energy W can be calculated by integration:
Figure BDA0002762059510000114
wherein C isaIs a gap air capacitor.
Finally, it is noted that the disclosed embodiments are intended to aid in further understanding of the invention, but those skilled in the art will appreciate that: various substitutions and modifications are possible without departing from the spirit and scope of the invention and the appended claims. Therefore, the invention should not be limited to the embodiments disclosed, but the scope of the invention is defined by the appended claims.

Claims (10)

1. A discharge event detection system based on electrostatic interaction of parylene film with charged particles, the discharge event detection system comprising: a parylene film which is easy to be peeled off from the substrate and a discharge injection degree visualization device; wherein the content of the first and second substances,
the parylene film which is easy to be stripped from the substrate comprises a super-hydrophobic layer and a parylene film; depositing a low-surface-energy liquid-phase hydrophobic material on the surface of an electric and electronic system to be detected by adopting a chemical vapor deposition technology, and forming a super-hydrophobic layer on the surface of the electric and electronic system after the material is hydrolyzed and condensed; depositing parylene on the surface of the super-hydrophobic layer by adopting a chemical vapor deposition technology to form a parylene film; after heating and curing, the parylene film is tightly combined with the super-hydrophobic layer to form a transparent parylene film which is easy to peel off from the substrate, and the super-hydrophobic layer is used as a substrate of the parylene film to ensure the integrity of the parylene film which is easy to peel off from the substrate when being torn off from the surface of the electric and electronic system; the parylene film which is easy to be stripped from the substrate is only a micron-sized insulating medium layer, and the original conductive and insulating electrical properties of an electric and electronic system cannot be influenced;
the discharge injection degree visualization device comprises a transparent cylinder, a cylinder cover, a back electrode, a grounding electrode, a grid, particles, a fan, a direct-current high-voltage power supply, an X-ray source, a high-definition camera and a PC (personal computer); the transparent cylinder is made of a transparent material with weak X-ray absorption capacity, has a cylinder bottom and an open top, and is internally provided with a columnar space; the top end of the transparent cylinder is covered with a cylinder cover; the cylinder cover is made of transparent materials, a back electrode is arranged on the inner surface of the cylinder cover, the back electrode comprises a plurality of two-dimensional spiral line electrodes which are uniformly distributed on the inner surface of the cylinder cover, the two-dimensional spiral line electrodes positioned at even number positions are connected through the same lead, and the two-dimensional spiral line electrodes positioned at odd number positions are connected through the same lead; the inner surface of the cylinder bottom of the transparent cylinder is adhered with a grounding electrode which covers the whole cylinder bottom surface; a grid is arranged on the bottom in the transparent cylinder and above the grounding electrode; the grid is connected to a direct-current high-voltage power supply; the space between the grounding electrode and the grid mesh is used for uniformly containing particles; a fan is arranged on the side wall in the transparent cylinder and above the grid; an X-ray source is arranged outside the transparent cylinder; the high-definition camera is arranged above the transparent cylinder; the high-definition camera is connected to the PC;
after the electric and electronic system discharges, discharge current is generated, the parylene film is injected with charges, so that the parylene film generates polarity, and the parylene film records the charges generated by the discharge; when the potential difference between the discharge parts in the electric and electronic system reaches the discharge voltage and the electric field reaches the breakdown field intensity, a discharge channel is formed between the two parts instantly, namely, discharge is generated; in the discharge channel, air is broken down and ionized to generate a large amount of positive and negative charges; in the discharge duration, positive and negative charges generated by discharge move directionally under the action of an electric field, are separated and accelerated to form discharge current and are injected into the parylene film; defining the direction of the discharge current flowing to the parylene film as positive, and after the parylene film is injected with charges, generating the same polarity on the surface, thereby correspondingly forming a polarized area; the direction of the discharge current determines the polarity of the injected charges, and further determines the polarity of the parylene film; the parylene film which is easy to be stripped from the substrate is stripped from the surface of the electric and electronic system, and the parylene film which is easy to be stripped from the substrate still keeps conformal with the electric and electronic system;
covering the parylene film which is easy to peel off from the matrix on the back electrode on the inner surface of the cylinder cover of the discharge visualization device, covering the cylinder cover on the transparent cylinder, and facing the parylene film which is easy to peel off from the matrix into the cylinder; the X-ray source generates soft X-rays to penetrate through the transparent cylinder, so that gas molecules in the transparent cylinder are ionized, and a large amount of positive and negative charges are generated between the grid mesh and the grounding electrode; a direct-current high-voltage power supply applies high-voltage with one polarity to the grid mesh, a bias electric field is formed between the grid mesh and the grounding electrode, positive and negative opposite charges are driven to be separated and accelerated, the positive and negative opposite charges are injected into particles below the grid mesh, the particles are charged to form charged particles, the charge quantity of the charged particles is in direct proportion to the voltage applied by the grid mesh, and the polarity of the charged particles is the same as that of the high-voltage applied by the grid mesh; the fan generates air flow to convey the charged particles to the cylinder cover; the charged particles conveyed to the cylinder cover are subjected to the electrostatic action of the parylene film which is easy to peel off from the substrate, the charged particles with the polarity opposite to the surface potential of the parylene film are adsorbed to the surface of the polarized area of the parylene film, and the charged particles with the same polarity as the surface potential of the polarized area of the parylene film are repelled away from the surface of the parylene film which is easy to peel off from the substrate;
the high-definition camera is right opposite to the parylene film which is easy to peel off from the substrate, the parylene film which is easy to peel off from the substrate is integrally transparent, and the covering image of the charged particles covering the parylene film is directly observed through the high-definition camera; the high-definition camera transmits the coverage image to the PC; the thicker the surface charged particles of the parylene film are covered, the darker the color is, the PC extracts the gray value of the covered image by adopting a particle coverage rate algorithm to obtain the area and the thickness of the covered area of the charged particles; when the charge-to-mass ratio of the charged particles is constant, the more the charge quantity injected into the parylene film is, the stronger the adsorption force between the charged particles and the parylene film is, the more easily the charged particles are adsorbed on the surface of the parylene film, the thicker the charged particles covered on the surface of the parylene film are, the larger the area of the covered area is, and therefore, the gradient graph of the injected charge density is represented by the thickness and the area of the parylene film covered by the charged particles;
two leads of the back electrode are respectively connected to an alternating current source, alternating voltage is applied, and the charged particles are acted by coulomb force and dielectrophoresis force in an alternating electric field and are separated from the surface of the parylene film which is easy to be peeled from the substrate, so that the charged particles adhered to the surface of the parylene film which is easy to be peeled from the substrate are removed, and the charged particles are reused;
disconnecting the direct-current high-voltage power supply connected with the grid, neutralizing positive and negative charges generated by soft X-ray ionization with charges carried by the charged particles, depolarizing the charged particles, and recovering the charged particles into neutral particles again;
changing the polarity of a direct-current high-voltage power supply, irradiating the particles through soft X-rays again to generate charged particles, so that the charged polarity of the charged particles is changed, sending the charged particles to the surface of a polarized area of the parylene film which is easy to peel off from the substrate through a fan, and obtaining the area and the thickness of a coverage area of the charged particles after the polarity is changed through an image processing device; and finally obtaining a gradient map of positive and negative charge quantity injected on the surface of the parylene film by adopting a particle coverage algorithm to the obtained coverage images of the charged particles with the two polarities.
2. The discharge event detection system of claim 1, wherein the super-hydrophobic layer material is selected from silane, polydimethylsiloxane, or polypropylene compatible with chemical vapor deposition techniques.
3. The discharge event detection system of claim 1, wherein the super-hydrophobic layer has a thickness of 30-60 microns.
4. The discharge event detection system of claim 1, wherein the parylene film has a thickness less than 15 microns.
5. The discharge event detection system of claim 1, wherein the transparent cylinder is quartz or plexiglass.
6. A discharge detection method of the discharge detection system based on the interaction of the parylene film and the charged particles as claimed in claim 1, wherein the discharge detection method comprises the steps of:
1) preparing a parylene film which is easy to peel off from a substrate:
a) depositing a low-surface-energy liquid-phase hydrophobic material on the surface of an electric and electronic system to be detected by adopting a chemical vapor deposition technology, and forming a super-hydrophobic layer on the surface of the electric and electronic system after the material is hydrolyzed and condensed;
b) depositing parylene on the surface of the super-hydrophobic layer by adopting a chemical vapor deposition technology to form a parylene film;
c) heating and curing the parylene film and the super-hydrophobic layer to enable the parylene film and the super-hydrophobic layer to be tightly combined to form a transparent parylene film which is easy to peel off from the substrate;
2) the parylene film which is easy to be stripped from the substrate is conformal with the electric and electronic system, and the electric and electronic system keeps the shape of the electric and electronic system and works normally, and simultaneously realizes large-area omnibearing dead-angle-free covering discharge detection in the electric and electronic system;
3) when the potential difference between the parts easy to discharge in the electric and electronic system reaches the discharge voltage and the electric field reaches the breakdown field strength, a discharge channel is formed between the parts easy to discharge instantly, namely discharge is generated; in the discharge channel, air is broken down and ionized to generate a large amount of positive and negative charges; in the discharge duration, positive and negative charges generated by discharge move directionally under the action of an electric field, are separated and accelerated to form discharge current, and the discharge current is injected into the parylene film which is easy to peel off from the substrate; defining the direction of the discharge current to flow to the parylene film which is easy to be peeled off from the substrate as that the parylene film which is easy to be peeled off from the substrate generates polarity on the surface after being injected with electric charge, so that a polarized area is correspondingly formed, wherein the amount of the injected electric charge is determined by the discharge voltage, and the positive and negative of the injected electric charge are determined by the direction of the injected discharge current;
4) the parylene film which is easy to be stripped from the substrate is stripped from the surface of the electric and electronic system, and the parylene film which is easy to be stripped from the substrate still keeps conformal with the surface of the electric and electronic system;
5) covering the parylene film which is easy to peel off from the matrix on the back electrode on the inner surface of the cylinder cover of the discharge visualization device, covering the cylinder cover on the transparent cylinder, and facing the parylene film which is easy to peel off from the matrix into the cylinder;
6) the discharge visualization device visualizes the potential:
a) the X-ray source generates soft X-rays to penetrate through the transparent cylinder, so that gas molecules in the transparent cylinder are ionized, and a large amount of positive and negative charges are generated between the grid mesh and the grounding electrode;
b) a direct-current high-voltage power supply applies high-voltage electricity with one polarity to the grid mesh, a bias electric field is formed between the grid mesh and the grounding electrode to drive positive and negative opposite charges to be separated and accelerated, and the positive and negative opposite charges are injected into particles below the grid mesh to enable the particles to carry a certain amount of charges with the same polarity to form charged particles, and the polarity of the charged particles is the same as that of the high-voltage applied by the grid mesh;
c) the fan generates air flow to convey the charged particles to the cylinder cover;
d) the charged particles conveyed to the cylinder cover are subjected to the electrostatic action of the parylene film which is easy to peel off from the substrate, the charged particles with the polarity opposite to the surface potential of the parylene film which is easy to peel off from the substrate are adsorbed to the surface of the polarized area of the parylene film which is easy to peel off from the substrate, and the charged particles with the same polarity as the surface potential of the polarized area of the parylene film which is easy to peel off from the substrate are repelled away from the surface of the parylene film which is easy to peel off from the substrate;
7) the image processing apparatus obtains a potential:
a) the high-definition camera is right opposite to the parylene film which is easy to peel off from the substrate, the parylene film which is easy to peel off from the substrate is integrally transparent, and the effect that the charged particles cover the parylene film is directly observed through the high-definition camera;
b) the high-definition camera transmits the coverage image to the PC; the thicker the surface charged particles of the parylene film are covered, the darker the color is, the PC extracts the gray value of the covered image by adopting a particle coverage rate algorithm to obtain the area and the thickness of the covered area of the charged particles;
c) when the charge-to-mass ratio of the charged particles is fixed, the more the injected charge amount of the parylene film which is easy to be peeled off from the substrate is, the stronger the adsorption force between the charged particles and the parylene film which is easy to be peeled off from the substrate is, the more easily the charged particles are adsorbed on the surface of the parylene film which is easy to be peeled off from the substrate, the thicker the thickness of the charged particles covered on the surface of the parylene film which is easy to be peeled off from the substrate is, and the larger the area of the covered area is, so that the gradient graph of the injected charge density is represented by the thickness and the area of the parylene film covered by the charged particles;
8) two leads of the back electrode are respectively connected to an alternating current source, and the charged particles are acted by coulomb force and dielectrophoresis force in an alternating electric field and are separated from the surface of the parylene film which is easy to be peeled from the substrate, so that the charged particles adhered to the surface of the parylene film which is easy to be peeled from the substrate are removed, and the repeated use of the charged particles is realized;
9) disconnecting the direct-current high-voltage power supply connected with the grid mesh, neutralizing positive and negative charges generated by soft X-ray ionization with charges carried by the charged particles, depolarizing the charged particles, and recovering the charged particles into neutral particles again;
10) changing the polarity of the high-voltage applied to the grid mesh to change the direction of a bias electric field formed between the grid mesh and the grounding electrode, repeating the steps 6) -7) to obtain the area and the thickness of the charged particle coverage area with opposite polarities, and finally obtaining a density gradient diagram of positive and negative charges injected into the surface of the parylene film which is easy to peel off from the substrate through the area and the thickness of the coverage area of the charged particles with the same charge-mass ratio.
7. The discharge detection method according to claim 6, wherein in the step 1), the thickness of the super-hydrophobic layer is 30 to 60 μm.
8. The discharge detection method according to claim 6, wherein in step 1) b), the parylene film has a thickness of less than 15 μm.
9. The discharge detection method according to claim 6, wherein in step 6) b), the high voltage applied to the grid by the DC high voltage power supply is 0.5 to 3 kV.
10. The discharge detecting method according to claim 6, wherein in the step 8), the applied alternating current has an amplitude of 1 to 2kV and a frequency of 50 to 100 Hz.
CN202011221113.6A 2020-11-05 2020-11-05 Discharge detection system and method based on parylene film and charged particles Active CN112327116B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011221113.6A CN112327116B (en) 2020-11-05 2020-11-05 Discharge detection system and method based on parylene film and charged particles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011221113.6A CN112327116B (en) 2020-11-05 2020-11-05 Discharge detection system and method based on parylene film and charged particles

Publications (2)

Publication Number Publication Date
CN112327116A CN112327116A (en) 2021-02-05
CN112327116B true CN112327116B (en) 2021-07-20

Family

ID=74315907

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011221113.6A Active CN112327116B (en) 2020-11-05 2020-11-05 Discharge detection system and method based on parylene film and charged particles

Country Status (1)

Country Link
CN (1) CN112327116B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114441911B (en) * 2022-01-28 2022-09-23 上海格鲁布科技有限公司 High-voltage cable partial discharge online detection device capable of preventing charge accumulation

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102175931A (en) * 2011-01-17 2011-09-07 西安交通大学 Two-dimensional surface charge measurement system based on Pockels effect and measurement method thereof
CN104404475B (en) * 2014-10-14 2016-11-30 中国科学院半导体研究所 The method strengthening parylene film and metal level adhesiveness
CN104777374B (en) * 2015-05-04 2018-07-31 华北电力大学 DC gas insulated metal enclosed electric transmission line isolator surface charge measuring device
CN107329005A (en) * 2016-12-02 2017-11-07 北京理工大学 A kind of the orientation detection device and its detection method of the mobile electrical body based on electret effect
CN107247196B (en) * 2017-07-07 2023-04-07 西安交通大学 Multifunctional space charge measuring system and measuring method
CN111505463B (en) * 2020-05-28 2022-05-13 国家电网有限公司 Device and method for measuring charge distribution of front surface and back surface of basin-type insulator along surface flashover

Also Published As

Publication number Publication date
CN112327116A (en) 2021-02-05

Similar Documents

Publication Publication Date Title
Takada et al. An electric stress-pulse technique for the measurement of charges in a plastic plate irradiated by an electron beam
Murooka et al. Nanosecond surface discharge and charge density evaluation part I: review and experiments
Danilatos Mechanisms of detection and imaging in the ESEM
US4323946A (en) Apparatus for reducing electrostatic charge storage and EMI on dielectric surfaces
CN112327116B (en) Discharge detection system and method based on parylene film and charged particles
CN104903744A (en) Apparatus for sensing ionic current
Sokolova et al. Barrier properties influence on the surface dielectric barrier discharge driven by single voltage pulses of different duration
JP2009300357A (en) Apparatus for measuring weak discharge emission
Hussaini et al. Review of space-charge measurement using pulsed electro-acoustic method: Advantages and limitations
Perrin et al. Measurement of internal charge distribution in dielectrics using the pulsed electro-acoustic method in non contact mode
Ono et al. Charge storage in corona-charged polypropylene films analyzed by LIPP and TSC methods
Othman et al. Charge distribution measurement of solid insulator materials: A review and new approach
EP3527814A1 (en) System and method for testing the flammability properties of a material with the help of a sparked combustion
Dennison et al. Pulsed electro-acoustic (PEA) measurements of embedded charge distributions
Horenstein et al. Particle contamination of high voltage DC insulators below corona threshold
Fredricks et al. Observations of spacecraft charging effects in energetic plasma regions
Broadhurst et al. Electrets
Mansour et al. Physical mechanisms of partial discharges at nitrogen filled delamination in epoxy cast resin power apparatus
CN105826159B (en) Time-of-flight measuring type quality analysis apparatus
Kozlov et al. Nanosecond surface corona discharge for different types of strip electrodes and ceramic or polymer dielectrics
CN207096347U (en) A kind of multi purpose space charge-measuring system
Takada et al. Space charge measurements as a diagnostic tool for power cables
McGrath et al. A divergent field study of prebreakdown events in n-hexane
JP2001124812A (en) Adjustment and evaluation device for ionizer
Friesen et al. Evaluation of an electrostatic dust removal system with potential application in next-step fusion devices

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant