CN112326802B - Manipulator motion control method for ultrasonic C-scan local defect recurrence - Google Patents
Manipulator motion control method for ultrasonic C-scan local defect recurrence Download PDFInfo
- Publication number
- CN112326802B CN112326802B CN202011220254.6A CN202011220254A CN112326802B CN 112326802 B CN112326802 B CN 112326802B CN 202011220254 A CN202011220254 A CN 202011220254A CN 112326802 B CN112326802 B CN 112326802B
- Authority
- CN
- China
- Prior art keywords
- point
- scanning
- row
- ultrasonic
- index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
- G01N29/0654—Imaging
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1656—Programme controls characterised by programming, planning systems for manipulators
- B25J9/1664—Programme controls characterised by programming, planning systems for manipulators characterised by motion, path, trajectory planning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1679—Programme controls characterised by the tasks executed
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
- G01N29/0654—Imaging
- G01N29/069—Defect imaging, localisation and sizing using, e.g. time of flight diffraction [TOFD], synthetic aperture focusing technique [SAFT], Amplituden-Laufzeit-Ortskurven [ALOK] technique
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
- G01N29/265—Arrangements for orientation or scanning by relative movement of the head and the sensor by moving the sensor relative to a stationary material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/0289—Internal structure, e.g. defects, grain size, texture
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Acoustics & Sound (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
The invention discloses a manipulator motion control method for ultrasonic C-scan local defect reproduction, belonging to the technical field of measurement and control automation, and the scheme of the invention is as follows: on the C-scan expanded image, two pixel points A and B are selected, an area enclosed between a row and a column corresponding to A, B points is used as an area expected to be rechecked, corresponding poses are searched in an original trace point packet according to the row number and the column number of each pixel point in the rechecked area, the poses are rearranged according to the original row number and the original sequence to form a new trace point packet, and the manipulator clamps the ultrasonic probe to perform ultrasonic scanning again according to the new trace point packet, so that the rechecking of local defects can be realized. The method does not need to plan the trajectory of the rechecking area again, and only extracts the trajectory points corresponding to the rechecking area from the original scanned trajectory point packet, thereby not only overcoming the problem of low efficiency of the manipulator in rechecking along the original scanned trajectory point packet, but also avoiding the problem of collision caused by the re-trajectory planning.
Description
Technical Field
The invention relates to the technical field of measurement and control automation, in particular to a manipulator motion control method for ultrasonic C-scan local defect reproduction.
Background
The manipulator and the ultrasonic nondestructive testing technology which are widely applied in the industrial field are combined, the accurate detection of the complex component can be realized by replacing manpower, and meanwhile, the detection efficiency and the accuracy are improved.
After the scanning motion is completed on the component to generate the ultrasonic C-scan expansion image, the local part of the workpiece needs to be scanned again to further confirm the defect information.
The manipulator needs to carry out track planning before carrying out ultrasonic scanning to obtain a scanning track point packet, and if the whole workpiece is scanned once again according to the original scanning point packet, the rechecking efficiency can be greatly reduced.
How to effectively extract the track point that local defect is relevant, carry out the automatic reinspection in appointed defect region fast safely, it is significant to improve the practicality that utilizes the manipulator to carry out ultrasonic testing.
Disclosure of Invention
In view of this, the invention provides a manipulator motion control method for ultrasonic C-scan local defect reconstruction, which can extract a trace point related to a local defect area from an original trace point packet to form a new trace point packet, and perform re-inspection by scanning again according to the new trace point packet by a manipulator.
In order to achieve the purpose, the technical scheme of the invention comprises the following steps:
s1: and performing ultrasonic C scanning on the workpiece to generate an expanded image.
S2: finding a defect review area on the expanded image, selecting two diagonal points A and B on the defect review area, wherein the row and column area between the point A and the point B is an expected review area, and the upper computer respectively extracts row and column index values (i, j) and (m, n) of the point A and the point B in the ultrasonic expanded image.
S3: and extracting pose data with a line number between i and m and a column number between j and n from the scanned motion track point packet corresponding to the expanded image, reordering the pose data according to the original line number and column number to form a rechecked scanned motion track point packet, and performing recheck according to the rechecked scanned motion track point packet under the control of an industrial manipulator.
Further, in S1, the scanning motion of the ultrasonic C-scan is controlled by the industrial robot, and the scanning mode is a line-by-line point-by-point reciprocating scanning.
Furthermore, the unfolded image is left-aligned and is drawn line by line point by point, and each pixel point on the unfolded image corresponds to a unique line number and a unique column number.
Further, in S3, after the industrial robot controls to perform review according to the review scanning motion trajectory point packet, obtaining a new unfolded image, returning to S2, finding a new defect review area, and performing review again.
Further, in S3, extracting pose data with a row number between i and m and a column number between j and n from the scanned motion trajectory point packet of the expanded image, and reordering the pose data according to the original row number and column number to form a review scanned motion trajectory point packet, specifically:
s301, taking the point A as the upper left corner of the defect review area and the point B as the lower right corner of the defect review area; and the row-column index value of each pixel point in the enclosing region of the point A and the point B is (l, c).
The initial value of l is taken as i, and the initial value of c is taken as j.
S302, judging whether l is an odd row or not; if so, perform S303, otherwise perform S305.
And S303, calculating (l, c) the index sequence number index (l, c) of the corresponding pose data in the scanning motion track point packet corresponding to the expanded image to be the sum of the point number of each line before l and c.
And S304, c is increased by 1, whether c is less than or equal to n is judged, if yes, the step returns to S303, and if not, the step executes S307.
S305, calculating (l, c) that the index sequence number index (l, c) of the corresponding pose data in the scanning motion track point packet corresponding to the expanded image is the sum of the point number of the line l and the point number of the line l before minus (c-1).
S306, c is reduced by 1, whether c is more than or equal to j is judged, if yes, the step returns to S305, and if not, the step executes S307.
And S307, increasing l by 1, judging whether l is less than or equal to m, if so, returning to S302, and if not, executing S308.
S308, extracting index serial numbers index (l, c) of pose data corresponding to each pixel point in the A, B point surrounding area from a scanning motion track point packet corresponding to the expanded image, wherein l is an integer in [ I, m ], and c is an integer in [ j, n ]; and the pose data are reordered according to the original row number and the original column number to form a rechecking scanning motion track point packet.
Has the advantages that:
the invention provides a manipulator motion control method for local defect review based on an ultrasonic C-scan expansion diagram, which does not need to plan the track of a review area again and only extracts the track points corresponding to the review area, thereby overcoming the problem of low efficiency of the whole review of the manipulator along the original scanned track point packet and avoiding the problem of collision caused by the review of the track.
Drawings
FIG. 1 is a drawing of an ultrasonic C-scan process and C-scan expansion of a robot according to the present invention;
FIG. 2 is a schematic diagram of the selection of the ultrasonic scanning and review area by reciprocating point by point line by line provided by the present invention;
fig. 3 is a flow chart of extracting a new scanning motion track point packet based on an ultrasonic C-scan expansion diagram provided by the invention.
Detailed Description
The invention is described in detail below by way of example with reference to the accompanying drawings.
The invention provides a manipulator motion control method for ultrasonic C-scan local defect reproduction, which comprises the following steps:
s1: performing ultrasonic C-scanning on the workpiece to generate an expanded image;
firstly, planning a manipulator motion track of original ultrasonic scanning according to the detection range of a detected workpiece, carrying out primary ultrasonic scanning on the manipulator according to the planned track and generating a C-scanning expansion image, wherein the scanning mode is that the scanning is carried out in a reciprocating mode line by line and point by point, the expansion image is aligned on the left, the drawing is carried out line by line and point by point, and each pixel point on the image corresponds to a unique line and column number.
S2: finding a defect review area on the expanded image, selecting two diagonal points A and B on the defect review area, wherein a row and column area between the point A and the point B is an expected review area, and the upper computer respectively extracts row and column index values (i, j) and (m, n) of the point A and the point B in the ultrasonic expanded image;
s3: according to the imaging method of the C-scan expansion image, the pixel points correspond to the track points in the original scanning motion track point packet one by one, so that the corresponding track points can be extracted from the original scanning motion track point packet according to the row and column index values of the pixel points in the re-inspection area, namely the pose data of a row number between i and m and a column number between j and n are respectively extracted from the scanning motion track point packet corresponding to the expansion image. And reordering the track points according to the original row number and column number to form a new scanning motion track point packet.
And downloading the new scanning motion track point packet into a controller of the manipulator, starting the manipulator to perform ultrasonic scanning again, and finishing the recheck of the selected area. If the defects of other areas need to be rechecked, two points A and B can be reselected, and a new scanning motion track point packet is re-extracted and generated, so that any local defect of the workpiece can be rechecked for many times.
The method comprises the following steps of extracting pose data with a row number between i and m and a column number between j and n from a scanning motion track point packet corresponding to an expanded image, and specifically comprises the following steps as shown in fig. 3:
s301, taking the point A as the upper left corner of the defect review area and the point B as the lower right corner of the defect review area; and the row-column index value of each pixel point in the enclosing region of the point A and the point B is (l, c).
The initial value of l is taken as i, and the initial value of c is taken as j.
S302, judging whether l is an odd row or not; if so, perform S303, otherwise perform S305.
And S303, calculating (l, c) the index sequence number index (l, c) of the corresponding pose data in the scanning motion track point packet corresponding to the expanded image to be the sum of the point number of each line before l and c.
And S304, c is increased by 1, whether c is less than or equal to n is judged, if yes, the step returns to S303, and if not, the step executes S307.
S305, calculating (l, c) that the index sequence number index (l, c) of the corresponding pose data in the scanning motion track point packet corresponding to the expanded image is the sum of the point number of the line l and the point number of the line l before minus c-1.
S306, c is reduced by 1, whether c is more than or equal to j is judged, if yes, the step returns to S305, and if not, the step executes S307.
And S307, increasing l by 1, judging whether l is less than or equal to m, if so, returning to S302, and if not, executing S308.
S308, extracting index serial numbers index (l, c) of pose data corresponding to each pixel point in the A, B point surrounding area from a scanning motion track point packet corresponding to the expanded image, wherein l is an integer in [ I, m ], and c is an integer in [ j, n ]; and the pose data are reordered according to the original row number and the original column number to form a rechecking scanning motion track point packet.
Referring to fig. 1, which is an ultrasonic C-scan process and an expanded C-scan image of the manipulator provided in this embodiment, the manipulator controls the manipulator to hold the ultrasonic probe to automatically and continuously scan along a planned track of the surface of the workpiece, and each scanned position and the received ultrasonic signal are displayed on a screen in an image manner. When the surface of the workpiece is a curved surface, the scanning result can be displayed by using an ultrasonic C-scan expansion diagram. The ultrasonic C-scan expansion diagram is a result display method commonly used in ultrasonic detection, wherein each scanning point is sequentially corresponding to pixel points on a screen row by row and column by column according to a scanning sequence, and the actual position of the scanning point is not considered. According to different materials of the detected workpiece, one manipulator can be used for clamping one ultrasonic probe to complete reflection type ultrasonic scanning, two manipulators can be used for clamping one ultrasonic probe respectively to complete transmission type ultrasonic scanning, and ultrasonic C scanning expansion diagrams in the two modes are the same.
The reciprocating ultrasonic scanning process is as shown in fig. 2, and it is assumed that the manipulator scans from left to right along a first track, and after the scanning of the next track is completed, the manipulator scans from right to left, and so on. During reciprocating scanning, the mechanical arm performs ultrasonic scanning on the forward stroke and the backward stroke, so that the efficiency of ultrasonic scanning is improved. The track planning is carried out before the ultrasonic scanning is carried out by the mechanical arm, so that the total scanning line number and the scanning points of all the scanning lines can be obtained before the scanning, and the scanning results can be displayed sequentially according to the original scanning lines and the scanning points. In order to unify the display effect, scanning rows are specified to be displayed from top to bottom, scanning columns are aligned on the left, scanning points of odd rows are displayed from left to right, and scanning points of even rows are displayed from right to left. And each pixel point on the ultrasonic C-scan expansion map has a unique row number and a unique column number, and is uniquely corresponding to the pose of the scanning track point packet. The review area refers to a small portion of the area selected on the ultrasound C-scan expansion map that the operator wishes to scan again to further verify the defect information of the area. The selection method can select A, B two points on the image, and the column numbers are respectively marked as (i, j) and (m, n), so that the rectangular area enclosed between the j column and the n column between the i row and the m row on the image is the defect review area, for convenience of problem description, it is defined that a is in the upper left corner, B is in the lower right corner, i.e. i < m, j < n. The analysis shows that the area only corresponds to a small part of the original ultrasonic scanning track, how to extract the track points of the small part to form a new scanning track, and the manipulator clamps the ultrasonic probe to automatically scan the selected local area by ultrasonic, which is the main content of the invention. Some points of the rechecking area are positioned in odd rows, and the imaging mode is from left to right; some are located in even lines, the imaging mode is from right to left, and therefore different track point extraction measures should be taken for pixel points in odd lines and even lines.
Assuming that a review area surrounded by A, B points is selected in fig. 2, the hollow circle in the figure indicates the selected point. A is located in the fourth column of the third row and is marked as (3,4), B is located in the sixth column of the fourth row and is marked as (4,6), and the area consists of six points with the column numbers of (3,4), (3,5), (3,6), (4,4), (4,5), (4, 6). According to the flow shown in fig. 3, the corresponding trace points are searched in the original trace point scanning package according to the row and column numbers of the six points. The third row is an odd row, the imaging direction is the same as the scanning motion direction, the index numbers corresponding to (3,4) points and the original scanning point packet are 19 (the point number of the first row is 7+ the point number of the second row is 8+ the column number of the third row is 4), and the index numbers corresponding to (3,5) and (3,6) are 20 and 21. The fourth line is an even number of lines, the imaging direction is opposite to the scanning movement direction, the scanning track point packets are sorted according to the scanning sequence, and therefore, the sequence of extracting the track points from the fourth line is (4,6), (4,5) or (4, 4). The index number corresponding to (4,6) is 28 (the point number of the first row is 7+ the point number of the second row is 8+ the point number of the third row is 9+ the point number of the fourth row is 9+ minus (6-1), 6 is the column number where B is located), (4,5) and (4,4) the index numbers are 29 and 30. The index numbers of all track points in the new track point packet in the original scanning track point packet are as follows:
first row: point 19
Point 20
Point 21
A second row: point 28
Point 29
Point 30
And downloading the new track point packet into a controller of the manipulator, and completing the local scanning movement of the clamping ultrasonic probe along the '19 th point → 20 th point → 21 st point → 28 th point → 29 th point → 30 th point' of the original track point packet by the manipulator in sequence to form a new scanning image and complete the rechecking of the local defect.
Therefore, according to the manipulator motion control method for performing local defect review based on the ultrasonic C-scan expansion diagram, safe and efficient local defect review can be realized.
In summary, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (4)
1. A manipulator motion control method for ultrasonic C-scan local defect reproduction is characterized by comprising the following steps:
s1: performing ultrasonic C-scanning on the workpiece to generate an expanded image;
s2: finding a defect review area on the expansion image, selecting two diagonal points A and B on the defect review area, wherein the row and column area between the point A and the point B is an expected review area, and the upper computer respectively extracts row and column index values (i, j) and (m, n) of the point A and the point B in the ultrasonic expansion image;
s3: extracting pose data with a line number between i and m and a column number between j and n from the scanning motion track point packet corresponding to the expanded image respectively, reordering the pose data according to the original line number and the original column number to form a rechecking scanning motion track point packet, and performing rechecking according to the rechecking scanning motion track point packet under the control of an industrial manipulator, wherein the rechecking motion track point packet specifically comprises the following steps:
s301, taking the point A as the upper left corner of the defect review area and the point B as the lower right corner of the defect review area; the row-column index value of each pixel point in the enclosing region of the point A and the point B is (l, c);
taking the initial value of l as i, and taking the initial value of c as j;
s302, judging whether l is an odd row or not; if yes, executing S303, otherwise executing S305;
s303, calculating (l, c) an index sequence number index (l, c) of corresponding pose data in the scanning motion track point packet corresponding to the expanded image, wherein the index sequence number index (l, c) is the sum of points of each line before l and c;
s304, c is increased by 1, whether c is equal to or less than n is judged, if yes, the step returns to S303, and if not, S307 is executed;
s305, calculating (l, c) an index serial number index (l, c) of corresponding pose data in a scanning motion track point packet corresponding to the expanded image, wherein the index serial number index (l, c) is the sum of points of one row and the previous row minus c-1;
s306, c is reduced by 1, whether c is more than or equal to j is judged, if yes, the step returns to S305, and if not, the step executes S307;
s307, l is increased by 1, whether l is less than or equal to m is judged, if yes, the step returns to S302, and if not, S308 is executed;
s308, extracting index serial numbers index (l, c) of pose data corresponding to each pixel point in the area enclosed by the A, B points from the scanning motion track point packet corresponding to the expanded image, wherein l is an integer in [ I, m ], and c is an integer in [ j, n ]; and the pose data are reordered according to the original row number and the original column number to form a rechecking scanning motion track point packet.
2. The method of claim 1, wherein in the step S1, the scanning motion of the ultrasonic C-scan is controlled by an industrial robot, and the scanning mode is a line-by-line point-by-point reciprocating scanning.
3. The method of claim 2, wherein the unfolded image is left-justified and is drawn point-by-point, line-by-line, and each pixel point on the unfolded image corresponds to a unique row and column number.
4. The method of claim 1, wherein, after the reviewing by the industrial robot according to the review sweeping motion trajectory point package is performed in S3, the method further comprises obtaining a new unfolded image, returning to S2, finding a new defect review area, and performing a review again.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011220254.6A CN112326802B (en) | 2020-11-05 | 2020-11-05 | Manipulator motion control method for ultrasonic C-scan local defect recurrence |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011220254.6A CN112326802B (en) | 2020-11-05 | 2020-11-05 | Manipulator motion control method for ultrasonic C-scan local defect recurrence |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112326802A CN112326802A (en) | 2021-02-05 |
| CN112326802B true CN112326802B (en) | 2021-09-07 |
Family
ID=74316976
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011220254.6A Active CN112326802B (en) | 2020-11-05 | 2020-11-05 | Manipulator motion control method for ultrasonic C-scan local defect recurrence |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112326802B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2923108B2 (en) * | 2021-03-10 | 2023-03-01 | Consejo Superior Investigacion | METHOD AND SYSTEM OF CALIBRATION OF AN ULTRASOUND INSPECTION SYSTEM |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101762635A (en) * | 2008-12-25 | 2010-06-30 | 中国石油天然气股份有限公司 | Guided wave on-line detection method for steel storage tank bottom plate |
| CN102721746A (en) * | 2012-07-04 | 2012-10-10 | 北京理工大学 | Double-manipulator ultrasonic transmission detection device |
| US8970233B2 (en) * | 2012-11-12 | 2015-03-03 | Spirit Aerosystems, Inc. | Nondestructive inspection system controller with dynamic position correction |
| CN103868996B (en) * | 2014-03-20 | 2016-09-14 | 北京理工大学 | Double-manipulator workpiece coordinate system automatic reclosing method for Non-Destructive Testing |
| CN103969336B (en) * | 2014-04-28 | 2017-01-25 | 中车青岛四方机车车辆股份有限公司 | Automatic detecting and imaging method of hyper-acoustic phased array of weld joint in complex space |
| CN107462638A (en) * | 2017-08-10 | 2017-12-12 | 兰州理工大学 | The defects of signal is swept based on ultrasonic A three-dimensional rebuilding method |
-
2020
- 2020-11-05 CN CN202011220254.6A patent/CN112326802B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN112326802A (en) | 2021-02-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103969336B (en) | Automatic detecting and imaging method of hyper-acoustic phased array of weld joint in complex space | |
| JP5273196B2 (en) | Image processing device | |
| US8111902B2 (en) | Method and apparatus for inspecting defects of circuit patterns | |
| JP3515199B2 (en) | Defect inspection equipment | |
| JP5581286B2 (en) | Defect inspection method and defect inspection apparatus | |
| JP2021101190A (en) | Damage information processor, damage information processing method, and damage information processing program | |
| CN112326802B (en) | Manipulator motion control method for ultrasonic C-scan local defect recurrence | |
| JP2588050B2 (en) | Ultrasound imaging equipment | |
| WO2006112242A1 (en) | Substrate inspecting apparatus | |
| CN101467056B (en) | Semiconductor defect analysis device, defect analysis method | |
| US6765666B1 (en) | System and method for inspecting bumped wafers | |
| CN104778439B (en) | Ultrasound detection clamp types intelligent identification Method and device based on Quick Response Code | |
| JP2011222636A (en) | Inspection apparatus, inspection method, and defect coordinate correction method | |
| JP2003141548A (en) | Three-dimensional labeling device and method | |
| JP4843413B2 (en) | Electron beam inspection apparatus and electron beam inspection method | |
| CN108534707A (en) | Industry manufacture component scale scanning detection method | |
| JP2008036255A (en) | Ultrasonic diagnostic apparatus | |
| JP3312157B2 (en) | Defect inspection apparatus and method | |
| JP2963328B2 (en) | Method and apparatus for creating wafer map for semiconductor wafer | |
| JP4795146B2 (en) | Electron beam apparatus, probe control method and program | |
| JPH0569375B2 (en) | ||
| CN104019740B (en) | Method and system for gathering vehicle body outside surface data | |
| JP2009068913A (en) | Image processing device and defect inspection device | |
| JPH0518946A (en) | Ultrasonic image inspection system | |
| JP2002340739A (en) | Apparatus and method for inspecting display screen |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |