CN112310317B - Display panel testing component and preparation method thereof - Google Patents
Display panel testing component and preparation method thereof Download PDFInfo
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- CN112310317B CN112310317B CN202011185781.8A CN202011185781A CN112310317B CN 112310317 B CN112310317 B CN 112310317B CN 202011185781 A CN202011185781 A CN 202011185781A CN 112310317 B CN112310317 B CN 112310317B
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- display panel
- test unit
- distance
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- 238000012360 testing method Methods 0.000 title claims abstract description 93
- 238000002360 preparation method Methods 0.000 title claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 61
- 238000007789 sealing Methods 0.000 claims abstract description 59
- 238000000034 method Methods 0.000 claims abstract description 28
- 238000004806 packaging method and process Methods 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 13
- 238000005538 encapsulation Methods 0.000 claims description 8
- 229920002120 photoresistant polymer Polymers 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000011368 organic material Substances 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 6
- 229910052760 oxygen Inorganic materials 0.000 abstract description 6
- 239000001301 oxygen Substances 0.000 abstract description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/70—Testing, e.g. accelerated lifetime tests
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
- H01L22/32—Additional lead-in metallisation on a device or substrate, e.g. additional pads or pad portions, lines in the scribe line, sacrificed conductors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/842—Containers
- H10K50/8428—Vertical spacers, e.g. arranged between the sealing arrangement and the OLED
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/60—Forming conductive regions or layers, e.g. electrodes
Abstract
The embodiment of the invention provides a display panel test assembly and a preparation method thereof, wherein the assembly comprises the following components: the substrate is divided into at least one first area and a second area surrounding the first area; the first region is used for preparing the display panel on the first region; a plurality of sets of test units disposed on each segment of the second region; and the test unit is covered with a sealing structure, and the sealing structure and the substrate form a sealing space so as to bear the test unit in a sealing way. According to the embodiment of the invention, the sealing structure is covered on the testing unit, and the sealing space is formed by the sealing structure and the substrate to seal the testing unit, so that the sealing unit can be prevented from being exposed in the atmosphere, and falling off and polluting the display panel and the process equipment after being corroded by water vapor or oxygen, and the quality of the display panel and the working efficiency of the process equipment are improved.
Description
Technical Field
The invention relates to the technical field of display, in particular to a component for testing a display panel and a preparation method thereof.
Background
OLED (organic light emitting diode) display panels have excellent performances of light weight, active light emission, quick response, wide viewing angle, rich color, high brightness, low power consumption, high and low temperature resistance and the like. In the preparation process of the OLED display panel, an evaporation process is required to prepare a conductive layer, a reflective layer and the like, in order to monitor the layer thickness and the deviation of each layer prepared by the evaporation process, a plurality of test units are arranged around the display panel, and the test units are exposed in the atmosphere after the evaporation process is completed and are oxidized and corroded by water and oxygen in the air, and in the subsequent process, such as the process of preparing a touch layer, oxidized and corroded materials of the test units fall off during cleaning or developing, so that the fallen materials pollute process equipment, and in addition, foreign matters in the process equipment cause difficult later maintenance of the process equipment, thereby affecting the preparation efficiency of the display panel.
Disclosure of Invention
The invention provides a preparation method of a display panel, which aims to solve the problems that in the preparation process of the existing display panel, a test unit is easy to corrode, so that process equipment is polluted by falling off and the later maintenance of the process equipment is difficult.
The first aspect of the present invention provides an assembly for testing a display panel, comprising:
the substrate is divided into at least one first area and a second area surrounding the first area; the first region is used for preparing the display panel on the first region;
a plurality of sets of test units disposed on each segment of the second region; and the test unit is covered with a sealing structure, and the sealing structure and the substrate form a sealing space so as to bear the test unit in a sealing way.
Optionally, the sealing structure includes: a retaining wall and a packaging layer; the retaining wall surrounds the periphery of the test unit, and the packaging layer is arranged on one surface, deviating from the substrate, of the test unit.
Optionally, the material of the encapsulation layer includes: an organic material.
Optionally, a distance from a surface of the encapsulation layer, which faces away from the substrate, to the substrate is a first distance, a distance from a surface of the retaining wall, which faces away from the substrate, to the substrate is a second distance, and the first distance is less than or equal to the second distance.
Optionally, the retaining wall material comprises: and (3) photoresist.
Optionally, the height of the retaining wall comprises: 1 μm-3 μm.
Optionally, the cross-sectional shape of the retaining wall includes: a trapezoid.
In another aspect, the present invention provides a method for manufacturing a display panel test module, including:
providing a substrate, wherein the substrate is divided into at least one first area and a second area surrounding each first area; the first region is used for preparing the display panel on the first region;
forming test units on each section of the second area;
and forming a sealing structure on the test unit, so that the sealing structure and the substrate form a sealing space to hermetically bear the test unit.
Optionally, the forming a sealing structure on the test unit includes:
when preparing a pixel definition layer of the display panel, coating and preparing an initial retaining wall around the test unit by adopting the same material as the pixel definition layer, placing a mask on one surface of the pixel definition layer and the initial retaining wall, which is away from the display panel, and exposing and developing the initial retaining wall to obtain the retaining wall;
and forming a packaging layer on one surface of the test unit, which is away from the substrate, so that the packaging layer and the retaining wall form the sealing structure.
Optionally, a surface of the retaining wall facing away from the substrate is in the same horizontal plane as a surface of the pixel defining layer facing away from the substrate.
The embodiment of the invention provides an assembly for testing a display panel, which comprises the following components: the substrate is divided into at least one first area and a second area surrounding the first area; the first region is used for preparing the display panel on the first region; a plurality of sets of test units disposed on each segment of the second region; and the test unit is covered with a sealing structure, and the sealing structure and the substrate form a sealing space so as to bear the test unit in a sealing way. According to the embodiment of the invention, the sealing structure is covered on the testing unit, and the sealing space is formed by the sealing structure and the substrate to seal the testing unit, so that the sealing unit can be prevented from being exposed in the atmosphere, and falling off and polluting the display panel and the process equipment after being corroded by water vapor or oxygen, and the quality of the display panel and the working efficiency of the process equipment are improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the description of the embodiments of the present invention will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a display panel testing assembly according to an embodiment of the present invention;
FIG. 2 is a schematic cross-sectional view of a display panel testing assembly according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of another display panel testing assembly according to an embodiment of the present invention;
FIG. 4 is a schematic cross-sectional view of another display panel testing assembly according to an embodiment of the present invention;
FIG. 5 is a flowchart illustrating steps of a method for manufacturing a display panel test module according to an embodiment of the present invention;
fig. 6 is a schematic structural diagram of a mask plate for manufacturing a component according to an embodiment of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are some, but not all embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1 and 2, there is shown a schematic structural diagram of a display panel testing assembly according to an embodiment of the present invention, wherein fig. 2 is a schematic sectional view in a direction A-A in fig. 1, and the display panel testing assembly includes:
a substrate 10, wherein the substrate 10 is divided into at least one first area 11 and a second area 12 surrounding the first area; the first region 11 is used for preparing the display panel on the first region 11;
a plurality of sets of test units 20, the test units 20 being disposed on respective segments of the second region 12; the test unit 20 is covered with a sealing structure 30, and the sealing structure 30 and the substrate 20 form a sealing space to seal and bear the test unit 20.
In the embodiment of the present invention, the material of the substrate 10 is a glass substrate, and the test unit 20 is mounted on the glass substrate. A plurality of test units can be included in one group of test units for monitoring whether the display panel meets the requirements in the preparation process.
In the embodiment of the present invention, the sealing structure 30 is used for sealing and coating the test unit 20, so as to prevent the test unit 20 from being corroded by water vapor and oxygen in the atmosphere and prevent the test unit from affecting the display panel and the process equipment after falling off on the premise of not affecting the test function of the test unit 20.
In an embodiment of the present invention, referring to fig. 2, which is a sectional view of A-A in fig. 1, the sealing structure 30 includes: a barrier wall 31 and an encapsulation layer 32; the retaining wall 31 surrounds the periphery of the test unit 20, and the encapsulation layer 32 is disposed on a surface of the test unit 20 facing away from the substrate 10.
Referring to fig. 3, a schematic structural diagram of an assembly without the encapsulation layer 32 is shown, wherein a group of test cells 20 includes a plurality of test cells, and fig. 4 is a cross-sectional view of fig. 3 in the direction B-B.
In an embodiment of the present invention, the materials of the encapsulation layer 32 include: an organic material. Specifically, the organic material includes a photoresist.
In the embodiment of the present invention, the materials of the retaining wall 31 include: and (3) photoresist. The height h2 of the retaining wall 31 includes: 1 μm-3 μm.
In the embodiment of the present invention, referring to fig. 2 and 4, the cross-sectional shape of the retaining wall 31 includes: a trapezoid. Specifically, the cross-sectional shape of the retaining wall may be selected from other shapes, and is not limited herein.
In the embodiment of the present invention, referring to fig. 2, a distance from a surface of the encapsulation layer 32 facing away from the substrate to the substrate is a first distance h1, a distance from a surface of the retaining wall 31 facing away from the substrate to the substrate is a second distance h2, and the first distance h1 is less than or equal to the second distance h2.
In the embodiment of the present invention, the first distance h1 is smaller than or equal to the second distance h2, so that the package layer 32 can avoid influencing other structures outside the test unit.
The embodiment of the invention provides an assembly for testing a display panel, which comprises the following components: the substrate is divided into at least one first area and a second area surrounding the first area; the first region is used for preparing the display panel on the first region; a plurality of sets of test units disposed on each segment of the second region; and the test unit is covered with a sealing structure, and the sealing structure and the substrate form a sealing space so as to bear the test unit in a sealing way. According to the embodiment of the invention, the sealing structure is covered on the testing unit, and the sealing space is formed by the sealing structure and the substrate to seal the testing unit, so that the sealing unit can be prevented from being exposed in the atmosphere, and falling off and polluting the display panel and the process equipment after being corroded by water vapor or oxygen, and the quality of the display panel and the working efficiency of the process equipment are improved.
Referring to fig. 5, a flowchart illustrating steps of a method for manufacturing a display panel testing assembly according to another aspect of the present invention includes:
step 101, providing a substrate, wherein the substrate is divided into at least one first area and a second area surrounding each first area; the first region is used for preparing the display panel on the first region;
102, forming test units on each section of the second area;
and 103, forming a sealing structure on the test unit, so that the sealing structure and the substrate form a sealing space to hermetically bear the test unit.
In an embodiment of the present invention, the forming a sealing structure on the test unit includes: when preparing a pixel definition layer of the display panel, coating and preparing an initial retaining wall around the test unit by adopting the same material as the pixel definition layer, placing a mask on one surface of the pixel definition layer and the initial retaining wall, which is away from the display panel, and exposing and developing the initial retaining wall to obtain the retaining wall; and forming a packaging layer on one surface of the test unit, which is away from the substrate, so that the packaging layer and the retaining wall form the sealing structure.
In the embodiment of the invention, one surface of the retaining wall, which faces away from the substrate, and one surface of the pixel definition layer, which faces away from the substrate, are in the same horizontal plane.
In the embodiment of the invention, the substrate 10 is prepared first, the display panel is prepared in the first area, the test unit is formed in the second area, then, when the pixel definition layer of the display panel is prepared, the photoresist for preparing the pixel definition layer is coated in the first area, meanwhile, the same photoresist is coated on the periphery of the test unit, then, the mask shown in fig. 6 is placed on the display panel and the test unit, the rectangular frame 41 of the mask 40 corresponds to all the photoresist for preparing the retaining wall, and then, exposure and development are performed, and meanwhile, the pixel definition layer and the retaining wall 31 are obtained. Therefore, the obtained retaining wall is on the same horizontal plane with the surface of the pixel definition layer, which is away from the substrate.
In the embodiment of the invention, the same material as the pixel definition layer is selected, and the retaining wall is prepared when the pixel definition layer is prepared, so that new process steps are not needed, and the process can be simplified, and the cost can be reduced.
The embodiment of the invention provides a preparation method of a component for testing a display panel, which comprises the following steps: providing a substrate, wherein the substrate is divided into at least one first area and a second area surrounding each first area; the first region is used for preparing the display panel on the first region; forming test units on each section of the second area; and forming a sealing structure on the test unit, so that the sealing structure and the substrate form a sealing space to hermetically bear the test unit. According to the embodiment of the invention, the sealing structure is covered on the testing unit, and the sealing space is formed by the sealing structure and the substrate to seal the testing unit, so that the sealing unit can be prevented from being exposed in the atmosphere, and falling off and polluting the display panel and the process equipment after being corroded by water vapor or oxygen, and the quality of the display panel and the working efficiency of the process equipment are improved.
It will be clear to those skilled in the art that, for convenience and brevity of description, specific working procedures of the above-described systems, apparatuses and units may refer to corresponding procedures in the foregoing method embodiments, and are not repeated herein.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the invention.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any person skilled in the art will readily recognize that variations or substitutions are within the scope of the present invention. Therefore, the protection scope of the invention is subject to the protection scope of the claims.
Claims (7)
1. An assembly for testing a display panel, comprising:
the substrate is divided into at least one first area and a second area surrounding the first area; the first region is used for preparing the display panel on the first region;
a plurality of sets of test units disposed on each segment of the second region; the test unit is covered with a sealing structure, and the sealing structure and the substrate form a sealing space so as to hermetically bear the test unit; wherein, seal structure includes: a retaining wall and a packaging layer; the retaining wall surrounds the periphery of the test unit, and the packaging layer is arranged on one surface, away from the substrate, of the test unit; the distance from one surface of the packaging layer, which is away from the substrate, to the substrate is a first distance, the distance from one surface of the retaining wall, which is away from the substrate, to the substrate is a second distance, and the first distance is smaller than or equal to the second distance;
wherein, the retaining wall deviates from the one side of base plate, with the pixel definition layer deviating from the one side of base plate in same horizontal plane.
2. The assembly of claim 1, wherein the material of the encapsulation layer comprises: an organic material.
3. The assembly of claim 1, wherein the retaining wall material comprises: and (3) photoresist.
4. The assembly of claim 1, wherein the height of the retaining wall comprises: 1 μm-3 μm.
5. The assembly of claim 1, wherein the cross-sectional shape of the retaining wall comprises: a trapezoid.
6. The preparation method of the component for testing the display panel is characterized by comprising the following steps of:
providing a substrate, wherein the substrate is divided into at least one first area and a second area surrounding each first area; the first region is used for preparing the display panel on the first region;
forming test units on each section of the second area;
forming a sealing structure on the test unit, so that the sealing structure and the substrate form a sealing space to hermetically bear the test unit; wherein, seal structure includes: a retaining wall and a packaging layer; the retaining wall surrounds the periphery of the test unit, and the packaging layer is arranged on one surface, away from the substrate, of the test unit; the distance from one surface of the packaging layer, which is away from the substrate, to the substrate is a first distance, the distance from one surface of the retaining wall, which is away from the substrate, to the substrate is a second distance, and the first distance is smaller than or equal to the second distance;
wherein, the retaining wall deviates from the one side of base plate, with the pixel definition layer deviating from the one side of base plate in same horizontal plane.
7. The method of claim 6, wherein forming a seal on the test unit comprises:
when preparing a pixel definition layer of the display panel, coating and preparing an initial retaining wall around the test unit by adopting the same material as the pixel definition layer, placing a mask on one surface of the pixel definition layer and the initial retaining wall, which is away from the display panel, and exposing and developing the initial retaining wall to obtain the retaining wall;
and forming a packaging layer on one surface of the test unit, which is away from the substrate, so that the packaging layer and the retaining wall form the sealing structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011185781.8A CN112310317B (en) | 2020-10-30 | 2020-10-30 | Display panel testing component and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011185781.8A CN112310317B (en) | 2020-10-30 | 2020-10-30 | Display panel testing component and preparation method thereof |
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| Publication Number | Publication Date |
|---|---|
| CN112310317A CN112310317A (en) | 2021-02-02 |
| CN112310317B true CN112310317B (en) | 2024-03-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202011185781.8A Active CN112310317B (en) | 2020-10-30 | 2020-10-30 | Display panel testing component and preparation method thereof |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107742635A (en) * | 2017-09-27 | 2018-02-27 | 京东方科技集团股份有限公司 | A kind of display panel and preparation method thereof |
| CN108376749A (en) * | 2018-02-26 | 2018-08-07 | 京东方科技集团股份有限公司 | A kind of packaging method of display panel, display panel and display device |
| CN109244261A (en) * | 2017-07-11 | 2019-01-18 | 上海和辉光电有限公司 | A kind of display panel, display device and display panel production method |
| CN109616585A (en) * | 2019-01-04 | 2019-04-12 | 京东方科技集团股份有限公司 | A kind of organic electro-luminescence display device and preparation method thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4345743B2 (en) * | 2005-02-14 | 2009-10-14 | セイコーエプソン株式会社 | Electro-optic device |
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- 2020-10-30 CN CN202011185781.8A patent/CN112310317B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109244261A (en) * | 2017-07-11 | 2019-01-18 | 上海和辉光电有限公司 | A kind of display panel, display device and display panel production method |
| CN107742635A (en) * | 2017-09-27 | 2018-02-27 | 京东方科技集团股份有限公司 | A kind of display panel and preparation method thereof |
| CN108376749A (en) * | 2018-02-26 | 2018-08-07 | 京东方科技集团股份有限公司 | A kind of packaging method of display panel, display panel and display device |
| CN109616585A (en) * | 2019-01-04 | 2019-04-12 | 京东方科技集团股份有限公司 | A kind of organic electro-luminescence display device and preparation method thereof |
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| CN112310317A (en) | 2021-02-02 |
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