CN112304238A

CN112304238A - 2D and 3D measuring device

Info

Publication number: CN112304238A
Application number: CN201910691169.9A
Authority: CN
Inventors: 陈志忠; 陈春辰
Original assignee: Shengyao Photoelectric Technology Co ltd
Current assignee: Shengyao Photoelectric Technology Co ltd
Priority date: 2019-07-29
Filing date: 2019-07-29
Publication date: 2021-02-02

Abstract

The 2D and 3D measuring device comprises a bearing part, a seat part, a connecting part, a 3D optical profiler, a 2D microscope and a programmable logic controller. The bearing part comprises at least one first slide rail and a first driving motor. The seat body part is slidably arranged on the first slide rail and comprises at least one second slide rail. The connecting part is slidably arranged on the second slide rail and comprises a second driving motor. The 3D optical profiler and the 2D microscope are both arranged on the connecting part. In addition, the programmable logic controller is electrically linked with the first drive motor, the second drive motor, the 3D optical profiler and the 2D microscope. The invention has the advantages that the 2D and 3D measuring device can measure the 3D image under the condition of not cutting the object to be measured, and can also avoid the deviation of the measured position coordinates of a plurality of objects to be measured.

Description

2D and 3D measuring device

Technical Field

The present invention relates to a 2D and 3D measuring device, and more particularly to a 2D and 3D measuring device with a 3D optical profiler.

Background

Referring to fig. 1, fig. 1 shows a conventional 3D optical profiler 8, and the 3D optical profiler 8 integrates confocal, interference (white light interference) and multi-focal plane superposition techniques to measure a detailed 3D image. Moreover, the three measurement modes of the 3D image can be switched from software, which is very convenient for users. In addition, the 3D optical profiler 8 is suitable for measuring the objects to be measured, such as: LCD panels, ICs, LEDs, Sillicon, solar cells, semiconductors, leather, paper, stamps, solder balls, diamonds, etc. However, the large-area LCD panel needs to be disassembled into small pieces to be measured on the 3D optical profiler 8, so even though the disassembled LCD panel is good, it cannot be processed or re-used as the object to be measured of other testing instruments.

In addition, when the 3D optical profiler 8 is to sequentially measure a plurality of small LCD panels with the same feature size, the measured position coordinates of different LCD panels are all biased. Thus, when the 3D images measured by each LCD panel are generated, the comparison of the 3D images of different LCD panels has no substantial reference value.

Therefore, it is worth the ordinary knowledge in the art how to measure the 3D image without cutting the object and avoid the deviation of the measured position coordinates of the objects.

Disclosure of Invention

The present invention is directed to a 2D and 3D measuring device, which can measure a 3D image without cutting the object to be measured, and can prevent the deviation of the measured position coordinates of a plurality of objects to be measured.

The 2D and 3D measuring device comprises a bearing part, a seat part, a connecting part, a 3D optical profiler, a 2D microscope and a programmable logic controller. The bearing part comprises at least one first slide rail and a first driving motor. The seat body part is slidably arranged on the first slide rail and comprises at least one second slide rail. In addition, the connecting part is slidably arranged on the second slide rail and comprises a second driving motor. The 3D optical profiler and the 2D microscope are both arranged on the connecting part. In addition, the programmable logic controller is electrically linked with the first drive motor, the second drive motor, the 3D optical profiler and the 2D microscope.

In the above 2D and 3D measuring device, the first slide rail and the second slide rail are perpendicular to each other.

In the above 2D and 3D measuring device, the programmable logic controller drives the first driving motor and the second driving motor according to a first control command.

In the above-mentioned 2D and 3D measuring apparatus, the programmable logic controller controls the 2D microscope and the 3D optical profiler according to a second control command.

In the above 2D and 3D measuring device, the programmable logic controller includes a memory, and the memory is used for recording the first control command and the second control command.

In the above 2D and 3D measuring device, the supporting portion further includes a setting platform, and the 3D optical profiler and the 2D microscope are located above the setting platform.

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.

Drawings

Fig. 1 shows a conventional 3D optical profiler 8.

Fig. 2A is a perspective view of the 2D and 3D measuring device 10 of the present embodiment.

FIG. 2B is a schematic diagram of the programmable logic controller 16 electrically connected to other components of the present embodiment.

Description of reference numerals:

11: a bearing part; 110: a first slide rail; 112: setting a platform; 113: a first drive motor;

12: a seat body portion; 120: a second slide rail;

13: a connecting portion; 132: a second drive motor;

14: a 3D optical profiler;

15:2D microscope;

16: a programmable logic controller; 160: and (7) storing the data.

Detailed Description

Referring to fig. 2A, fig. 2A is a perspective view of the 2D and 3D measuring device 10 of the present embodiment. The 2D and 3D measuring apparatus 10 of the present embodiment includes a carrying portion 11, a seat portion 12, a connecting portion 13, a 3D optical profiler 14, a 2D microscope 15 and a programmable logic controller 16. The carrying part 11 includes at least one first slide rail 110, a first driving motor 113 and a setting platform 112, the 3D optical profiler 14 and the 2D microscope 15 are located above the setting platform 112, the setting platform 112 is used for setting an object to be tested (not shown), the object to be tested is, for example: LCD panels, ICs, LEDs, Sillicon, solar cells, semiconductors, leather, paper, stamps, solder balls, diamonds, Printed Circuit Boards (PCBs), and the like.

In addition, the base portion 12 is slidably disposed on the first slide rail 110, the base portion 12 includes at least one second slide rail 120, and the first slide rail 110 and the second slide rail 120 are perpendicular to each other. In addition, the connecting portion 13 is slidably disposed on the second slide rail 120, and the connecting portion 13 includes a second driving motor 132. The 3D optical profiler 14 and the 2D microscope 15 are both disposed on the connecting portion 13, and the 3D optical profiler 14 and the 2D microscope 15 are aligned with each other.

Referring to fig. 2B, fig. 2B is a schematic diagram illustrating the programmable logic controller 16 electrically connected to other components of the present embodiment. The programmable logic controller 16 includes a memory 160, and the programmable logic controller 16 is electrically linked to the first driving motor 113, the second driving motor 132, the 3D optical profiler 14 and the 2D microscope 15, and the programmable logic controller 16 drives the first driving motor 113 and the second driving motor 132 according to a first control command. In detail, after a first control command is inputted into the programmable logic controller 16, the programmable logic controller drives the first driving motor 113 according to the first control command. Then, the first driving motor 113 drives the carrying portion 11 to move, so that the seat portion 12 slides on the first sliding rail 110 under a passive condition. In a similar manner, the programmable logic controller 16 also drives the second driving motor 132 according to the first control command. Then, the second driving motor 132 drives the link 13 to slide on the second slide rail 120.

In addition, the programmable logic controller 16 controls the 2D microscope 15 and the 3D optical profiler 14 according to a second control command. In detail, after the programmable logic controller 16 is inputted with a second control command, it controls the 2D microscope according to the second control command, so that the 2D microscope measures the actual size of the object. Similarly, the programmable logic controller 16 controls the 3D optical profiler 14 according to the second control command, so that the 3D optical profiler 14 measures a 3D image of one position coordinate of the dut.

In the above, the memory 160 is used for recording the first control command and the second control command. In this way, when the 2D and 3D measuring devices 10 measure a plurality of objects with the same feature size sequentially, the programmable logic controller 16 can automatically measure the same objects according to the first control command and the second control command in the memory 160.

Next, the applicant describes the process of measuring the object (such as the LCD panel) by the 2D and 3D measuring devices 10 as follows:

first, an uncut LCD panel is disposed on the setting stage 112. Thereafter, by moving the carrying portion 11, the base portion 12 slides slightly on the first slide rail 110 step by step, and the 2D microscope 15 can move synchronously in the Y-axis direction of the LCD panel. Thereafter, when the coupling section 13 slides rapidly on the second slide rail 120, the 2D microscope 15 can move synchronously in the X-axis direction of the LCD panel. Thus, through the sequential movement of the 2D microscope 15 in the Y-axis and the X-axis of the panel, the 2D microscope 15 can move to all areas on the LCD panel to find out the position coordinates of the four positioning targets on the LCD panel, which helps the 2D microscope 15 to grasp the actual position and the panel size of the LCD panel.

Then, the carrying portion 11 and the connecting portion 13 drive the 3D optical profiler 14 to the specified position coordinates to measure the LCD panel. In detail, the specified position coordinates belong to the positions set by the first control command, and a plurality of positions are usually set to measure the 3D images of different areas of the LCD panel. Then, the 3D images of the different position coordinates are analyzed to determine whether the LCD panel is good. Therefore, compared to the conventional 3D optical profiler 8, the 2D and 3D measurement apparatus 10 of the present embodiment can measure the 3D image without cutting the LCD panel, which is beneficial for the LCD panel to be processed or used as the object to be tested of other testing apparatuses.

In addition, since the 2D microscope 15 and the 3D optical profiler 14 both measure the LCD panel on the same platform and also measure the LCD panel according to the specified position coordinates, when the 3D optical profiler 14 sequentially measures 3D images of a plurality of identical LCD panels, it can prevent the position coordinates measured by the plurality of LCD panels from being deviated. Therefore, the probability that the LCD panel is judged as a good product or a defective product is reduced.

In summary, the 2D and 3D measuring device 10 of the present embodiment can measure the 3D image without cutting the object, and can also avoid deviation of the measured position coordinates of the objects.

The above-described embodiments are merely exemplary for convenience of description, and various modifications may be made by those skilled in the art without departing from the scope of the invention as claimed in the claims.

Claims

1. A2D and 3D measurement device, comprising:

a bearing part, which comprises at least one first slide rail and a first driving motor;

the seat body part is slidably arranged on the first slide rail and comprises at least one second slide rail;

a connecting part which is arranged on the second slide rail in a sliding way and comprises a second driving motor;

the 3D optical profiler is arranged on the connecting part;

a 2D microscope disposed at the connection portion; and

a programmable logic controller electrically linked to the first drive motor, the second drive motor, the 3D optical profiler and the 2D microscope.

2. The 2D and 3D measurement device of claim 1, wherein the first rail and the second rail are perpendicular to each other.

3. The 2D and 3D metrology device of claim 2, wherein the programmable logic controller drives the first drive motor and the second drive motor according to a first control command.

4. The 2D and 3D metrology device of claim 3, wherein the programmable logic controller operates the 2D microscope and the 3D optical profiler according to a second control command.

5. The 2D and 3D measurement device of claim 4, wherein the programmable logic controller comprises a memory, and the memory is configured to record the first control command and the second control command.

6. The 2D and 3D metrology device of claim 1, wherein the carrier further comprises a mounting platform, and the 3D optical profiler and the 2D microscope are positioned above the mounting platform.