CN112303175B - Six-freedom-degree micro-vibration isolation device based on active electromagnetic negative stiffness structure - Google Patents
Six-freedom-degree micro-vibration isolation device based on active electromagnetic negative stiffness structure Download PDFInfo
- Publication number
- CN112303175B CN112303175B CN202011189248.9A CN202011189248A CN112303175B CN 112303175 B CN112303175 B CN 112303175B CN 202011189248 A CN202011189248 A CN 202011189248A CN 112303175 B CN112303175 B CN 112303175B
- Authority
- CN
- China
- Prior art keywords
- magnetic ring
- negative stiffness
- coil
- active electromagnetic
- electromagnetic negative
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
- F16F15/067—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only wound springs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2222/00—Special physical effects, e.g. nature of damping effects
- F16F2222/06—Magnetic or electromagnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/06—Stiffness
- F16F2228/063—Negative stiffness
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Mechanical Engineering (AREA)
- Electromagnetism (AREA)
- Vibration Prevention Devices (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
A six-degree-of-freedom micro-vibration isolator based on an active electromagnetic negative stiffness structure belongs to the technical field of precise vibration isolation and comprises an upper plate, a base plate and six sets of active electromagnetic negative stiffness structures which are connected with the upper plate and the base plate. The active electromagnetic negative stiffness structure utilizes a coaxial nested double-magnetic-ring structure to realize the negative stiffness characteristic with unadjustable stiffness in the vertical direction, and utilizes an electrified coil coaxially nested with the double-magnetic-ring negative stiffness structure to generate precise and controllable excitation magnetic flux, so that a bias magnetic field around a variable magnetic ring is changed, further the adjustment of the negative stiffness value is realized, and the vibration isolation load mass and the variation of the excitation frequency are adapted. The magnetic ring gap is vertical to the rising and falling movement direction of the positive stiffness vibration isolator, and the vibration amplitude of the vibration isolation load is not limited; the bias magnetic field is provided by the fixed magnetic ring, only a small current is needed to generate excitation magnetic flux in the coil to adjust the bias magnetic field, continuous high-energy input is not needed, and the energy consumption of the system is low.
Description
Technical Field
The invention belongs to the technical field of precise vibration isolation, and particularly relates to a six-degree-of-freedom micro vibration isolator based on an active electromagnetic negative stiffness structure.
Background
The low-frequency micro-amplitude vibration interference in the environment becomes one of the key problems of limiting the improvement of the installation, adjustment, test and experiment precision of precision instruments and equipment, and the arrangement of a low-frequency vibration isolator for the precision instruments and equipment gradually becomes a main technical means for inhibiting the environmental micro-vibration in the field of ultra-precision engineering. The electromagnetic negative stiffness device has the characteristics of no mechanical friction, compact structure, adjustable stiffness, capability of dynamically adapting to vibration isolation load quality and excitation frequency change and the like, and is widely used for constructing the stiffness adjustable quasi-zero stiffness vibration isolator in parallel with the positive stiffness vibration isolator. In the aspect of single-degree-of-freedom vibration isolation, related researches on the rigidity-adjustable quasi-zero rigidity vibration isolator are more extensive, but in the aspect of six-degree-of-freedom vibration isolation which is more in line with the actual situation, the research work on the rigidity-adjustable six-degree-of-freedom quasi-zero rigidity vibration isolator is less.
Patent numbers 201810300899.7, zl201610834355.x and ZL201610915703.6 disclose a six-degree-of-freedom isolation microvibration platform based on active and passive combined action. The technical scheme adopts a sensor with high precision and high resolution to dynamically monitor the motion of the load, and controls an actuator to adjust the force application according to the vibration condition of the load platform, thereby realizing the low-frequency vibration attenuation. The technical scheme is characterized in that: 1) and a high-precision sensor and a linear driver are required to realize accurate monitoring and attenuation of load motion, and the cost is high. 2) The active negative stiffness structure composed of the sensor, the controller and the actuator is adopted, so that the system cost and the energy consumption are high, and the stability is poor.
Patent No. 201910634275.3 discloses a quasi-zero stiffness vibration isolation and energy collection system based on a Stewart platform, and the technical scheme utilizes annular permanent magnets and electromagnets arranged along a vertical array to provide semi-active negative stiffness to offset positive stiffness of a diaphragm spring. The introduction of the electromagnet enables the negative stiffness to be adjustable, the vibration isolation load mass and the excitation frequency change are adapted, the vibration isolation frequency band is increased, and the lower-frequency vibration isolation effect is achieved. The technical scheme is characterized in that: 1) the mode that the annular permanent magnet and the electromagnet are arranged along the vertical gap limits the vibration amplitude of the vibration isolation load, and is not suitable for isolating large-amplitude vibration interference such as impact. 2) The adjustable negative stiffness characteristic is realized by combining the permanent magnet and the electromagnet, energy needs to be continuously input to the electromagnet in the working process to generate electromagnetic force in the same direction as the movement displacement, and the energy consumption of the system is high.
Patent No. 201811101215.7 discloses an electromagnetic six-degree-of-freedom variable stiffness vibration isolation system composed of an upper plate, a base plate and six electromagnetic vibration isolation units. The electromagnetic vibration isolation unit comprises a permanent magnet and an electromagnetic coil arranged outside the permanent magnet, the magnetic field intensity and the magnetic induction line distribution generated by the electromagnetic coil are changed by changing the number of layers of the permanent magnet and the coil and adjusting the power supply current, so that the adjustable negative stiffness characteristic is realized, when the electromagnetic negative stiffness is equal to the stiffness of the spiral spring, the system shows that the comprehensive stiffness is zero, the quasi-zero stiffness is realized, and the vibration isolation performance is optimal at the moment. The technical scheme is characterized in that: the adjustable negative stiffness characteristic is realized by combining the permanent magnet and the coil, energy needs to be continuously input to the coil in the working process to generate electromagnetic force in the same direction as the movement displacement, and the energy consumption of the system is high.
In conclusion, through the innovation of the vibration isolation structure and principle, the six-degree-of-freedom micro-vibration isolator which is not limited in vibration isolation load vibration amplitude and low in energy consumption is provided to realize the low-frequency/ultralow-frequency vibration isolation effect under different load qualities and different excitation frequencies, and has great significance for further reducing the influence of the environmental micro-vibration interference on the assembly, adjustment, test and experiment precision of precision instruments and equipment.
Disclosure of Invention
The invention aims to provide a six-degree-of-freedom micro-vibration isolator based on an active electromagnetic negative stiffness structure, aiming at the problems that the existing stiffness-adjustable six-degree-of-freedom quasi-zero stiffness vibration isolator limits vibration amplitude of vibration isolation load, is not suitable for isolating large-amplitude vibration interference such as impact and the like, and is high in cost and energy consumption. The active electromagnetic negative stiffness structure utilizes a coaxial nested double-magnetic-ring structure to realize the negative stiffness characteristic with unadjustable stiffness in the vertical direction, and utilizes an electrified coil coaxially nested with the double-magnetic-ring negative stiffness structure to generate precise and controllable excitation magnetic flux, so that a bias magnetic field around a variable magnetic ring is changed, further the adjustment of the negative stiffness value is realized, and the vibration isolation load mass and the variation of the excitation frequency are adapted. The magnetic ring gap is vertical to the rising and falling movement direction of the positive stiffness vibration isolator, and the vibration amplitude of the vibration isolation load is not limited; the bias magnetic field is provided by the fixed magnetic ring, only a small current is needed to generate excitation magnetic flux in the coil to adjust the bias magnetic field, continuous high-energy input is not needed, and the energy consumption of the system is low.
The technical solution of the invention is as follows:
a six-degree-of-freedom micro-vibration isolator based on an active electromagnetic negative stiffness structure comprises an upper plate, a base plate and six sets of active electromagnetic negative stiffness structures which are connected with the upper plate and the base plate; the top end of an actuating rod of the active electromagnetic negative stiffness structure is connected with a fixed connecting piece at the bottom of the upper plate through a flexible hinge, and the bottom of a supporting rod of the active electromagnetic negative stiffness structure is connected with a fixed connecting piece on the substrate through a flexible hinge; two adjacent active electromagnetic negative stiffness structures are axially and mutually vertically arranged; the upper plate has three translational degrees of freedom and three rotational degrees of freedom relative to the substrate; the active electromagnetic negative stiffness structure comprises an actuating rod, a fixed magnetic ring fixing piece, a fixed magnetic ring, a movable magnetic ring mounting piece, a movable magnetic ring, a coil framework, a coil, a spiral spring and a supporting rod; the fixed magnetic ring fixing piece, the fixed magnetic ring, the movable magnetic ring mounting piece, the movable magnetic ring, the coil framework and the coil are sequentially and coaxially nested outwards along the radius from the axis, and the whole structure is axially symmetrical; the fixed magnetic ring fixing piece is a T-shaped cylinder, and the bottom of the fixed magnetic ring fixing piece is fixedly connected with the bottom of the coil framework through threads; the fixed magnetic ring is fixedly arranged on the outer wall of the fixed magnetic ring fixing piece and is an annular permanent magnet magnetized along the axial direction; the movable magnetic ring mounting piece is coaxially nested outside the fixed magnetic ring, a gap is arranged between the movable magnetic ring mounting piece and the fixed magnetic ring along the radial direction, the movable magnetic ring mounting piece is an annular sleeve, the top end of the movable magnetic ring mounting piece is fixedly connected with the actuating rod through threads, an annular boss is arranged at the bottom of the movable magnetic ring mounting piece, and an annular groove is formed in the boss; the top end of the spiral spring is coaxially and fixedly arranged in an annular groove at the bottom of the movable magnetic ring mounting piece, and the bottom of the spiral spring is fixedly connected with the coil framework; the movable magnetic ring is fixedly arranged on the outer wall of the movable magnetic ring mounting piece, the movable magnetic ring is an annular permanent magnet magnetized along the axial direction, the magnetization directions of the movable magnetic ring and the fixed magnetic ring are the same, and the axial height centers are equal in height; the coil framework is coaxially nested outside the movable magnetic ring, a gap is arranged between the coil framework and the movable magnetic ring along the radial direction, the coil framework is an annular sleeve with bosses arranged at the upper end and the lower end of the outer wall, and the bottom of the coil framework is fixedly connected with the supporting rod through threads; the coil framework is wound with a coil, a precise and controllable driving current is conducted in the coil, and the coil is centrosymmetric with respect to the axial height of the moving magnetic ring.
Preferably, the bottom of the coil framework is provided with an annular groove, and the spiral spring is fixedly installed in the annular groove in a pressing mode.
Preferably, the bottom of the annular groove is provided with a gasket.
Preferably, the fixed magnetic ring fixing piece, the moving magnetic ring mounting piece, the actuating rod, the spiral spring and the supporting rod are made of non-magnetic or weak-magnetic aluminum alloy, titanium alloy or austenitic stainless steel.
Preferably, the coil framework is made of ceramic, granite, glass fiber reinforced plastic or hard plastic.
The technical innovation and the good effect of the invention are as follows:
(1) the technical scheme adopts a coaxial nested double-magnetic-ring structure and a powered coil which are connected in parallel to realize the adjustable negative stiffness characteristic, and is suitable for isolating large-amplitude vibration interference such as impact. The negative stiffness characteristic with unadjustable stiffness is realized in the vertical direction by using a coaxially nested double-magnetic-ring structure, and a precisely controllable excitation magnetic flux is generated by using an electrified coil coaxially nested with the double-magnetic-ring negative stiffness structure, so that a bias magnetic field around a magnetic ring is changed, and further the adjustment of the negative stiffness value is realized; the magnetic ring gap is vertical to the direction of the negative rigidity, so that the vibration amplitude of the vibration isolation load is not limited, and the magnetic ring is suitable for isolating large-amplitude vibration interference such as impact. This is one of the innovative points of the present invention from the prior art.
(2) According to the technical scheme, the bias magnetic field is adjusted by utilizing the precise and controllable excitation magnetic flux generated by the electrified coil, continuous high-energy input is not needed in the electrified coil, and the system energy consumption is low. The fixed magnetic ring and the electrified coil are used for respectively generating a bias magnetic field and an excitation magnetic flux, the excitation magnetic flux and the bias magnetic field are overlapped to change the magnetic field around the magnetic ring, and therefore the adjustable negative stiffness is achieved to adapt to the change of vibration isolation load mass and excitation frequency. The bias magnetic field is provided by the fixed magnetic ring, only a small current is needed to generate excitation magnetic flux in the coil to adjust the bias magnetic field, continuous high-energy input is not needed, and the energy consumption of the system is low. This is the second innovation point of the present invention from the prior art.
Drawings
FIG. 1 is a three-dimensional model of a six-degree-of-freedom micro-vibration isolator based on an active electromagnetic negative stiffness structure;
FIG. 2 is a top view of a six-degree-of-freedom isolation micro-vibrator based on an active electromagnetic negative stiffness structure after an upper plate is removed;
FIG. 3 is a schematic three-dimensional cross-sectional view of an active electromagnetic negative stiffness structure;
FIG. 4 is a front cross-sectional view of an active electromagnetic negative stiffness structure;
FIG. 5 is an axial position schematic diagram of six sets of active electromagnetic negative stiffness structures;
FIG. 6 is another embodiment of an active electromagnetic negative stiffness structure;
description of part numbers in the figures: the device comprises a fixed magnetic ring fixing piece 1, a fixed magnetic ring 2, a movable magnetic ring mounting piece 3, a movable magnetic ring 4, a coil framework 5, a coil 6, an actuating rod 7, a spiral spring 8, a support rod 9, an upper plate 10, a base plate 11, an active electromagnetic negative stiffness structure 12, a flexible hinge 13, a fixed connecting piece 14 and a gasket 15.
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings.
A six-degree-of-freedom micro-vibration isolator based on an active electromagnetic negative stiffness structure comprises an upper plate 10, a base plate 11 and six sets of active electromagnetic negative stiffness structures 12 connecting the upper plate 10 and the base plate 11; the top end of an actuating rod 7 of the active electromagnetic negative stiffness structure 12 is connected with a fixed connecting piece 14 at the bottom of the upper plate 10 through a flexible hinge 13, and the bottom of a supporting rod 9 of the active electromagnetic negative stiffness structure 12 is connected with the fixed connecting piece 14 on the base plate 11 through the flexible hinge 13; two adjacent active electromagnetic negative stiffness structures 12 are axially and mutually vertically arranged; the upper plate 10 has three translational degrees of freedom and three rotational degrees of freedom with respect to the substrate 11; the active electromagnetic negative stiffness structure 12 comprises an actuating rod 7, a fixed magnetic ring fixing piece 1, a fixed magnetic ring 2, a moving magnetic ring mounting piece 3, a moving magnetic ring 4, a coil framework 5, a coil 6, a spiral spring 8 and a supporting rod 9; the fixed magnetic ring fixing piece 1, the fixed magnetic ring 2, the moving magnetic ring mounting piece 3, the moving magnetic ring 4, the coil framework 5 and the coil 6 are sequentially and coaxially nested outwards along the radius from the axis, and the whole structure is axially symmetrical; the fixed magnetic ring fixing piece 1 is a T-shaped cylinder, and the bottom of the fixed magnetic ring fixing piece is fixedly connected with the bottom of the coil framework 5 through threads; the fixed magnetic ring 2 is fixedly arranged on the outer wall of the fixed magnetic ring fixing piece 1, and the fixed magnetic ring 2 is an annular permanent magnet magnetized along the axial direction; the moving magnetic ring mounting piece 3 is coaxially nested outside the fixed magnetic ring 2, a gap is arranged between the moving magnetic ring mounting piece 3 and the fixed magnetic ring 2 along the radial direction, the moving magnetic ring mounting piece 3 is an annular sleeve, the top end of the moving magnetic ring mounting piece is fixedly connected with the actuating rod 7 through threads, the bottom of the moving magnetic ring mounting piece is provided with an annular boss, and an annular groove is formed in the boss; the top end of the spiral spring 8 is coaxially and fixedly arranged in an annular groove at the bottom of the movable magnetic ring mounting piece 3, and the bottom of the spiral spring is fixedly connected with the coil framework 5; the movable magnetic ring 4 is fixedly arranged on the outer wall of the movable magnetic ring mounting piece 3, the movable magnetic ring 4 is an annular permanent magnet magnetized along the axial direction, the magnetization direction of the movable magnetic ring 4 is the same as that of the fixed magnetic ring 2, and the axial height center is equal to the height; the coil framework 5 is coaxially nested at the outer side of the movable magnetic ring 4, a gap is arranged between the coil framework 5 and the movable magnetic ring 4 along the radial direction, the coil framework 5 is an annular sleeve with bosses at the upper end and the lower end of the outer wall, and the bottom of the coil framework 5 is fixedly connected with the support rod 9 through threads; the coil 6 is wound on the coil framework 5, the coil 6 is internally provided with a precise and controllable driving current, and the coil 6 is centrosymmetric with respect to the axial height of the moving magnetic ring 4.
As a specific embodiment, the bottom of the coil framework 5 is provided with an annular groove, and the spiral spring 8 is tightly pressed and fixedly arranged in the annular groove.
In a specific embodiment, the bottom of the annular groove is provided with a gasket 15.
As a specific embodiment, the materials of the fixed magnetic ring fixing member 1, the moving magnetic ring mounting member 3, the actuating rod 7, the coil spring 8 and the support rod 9 are aluminum alloy, titanium alloy or austenitic stainless steel which is non-magnetic or weakly magnetic.
In a specific embodiment, the material of the bobbin 5 is ceramic, granite, glass fiber reinforced plastic or hard plastic.
An embodiment of the present invention is given below with reference to fig. 1 to 5.
As shown in fig. 1 and 2, the present invention includes an upper plate 10, a base plate 11, and six sets of active electromagnetic negative stiffness structures 12 connecting the upper plate 10 and the base plate 11; the top end of an actuating rod 7 of each set of active electromagnetic negative stiffness structure 12 is connected with a fixed connecting piece 14 at the bottom of an upper plate 10 through four threaded holes uniformly distributed on a flexible hinge 13, and the bottom of a supporting rod 9 of each set of active electromagnetic negative stiffness structure 12 is connected with the fixed connecting piece 14 on a base plate 11 through four threaded holes uniformly distributed on the flexible hinge 13; two adjacent active electromagnetic negative stiffness structures 12 are axially and mutually vertically arranged; the upper plate 10 has three degrees of freedom for translation along x, y, and z axes and three degrees of freedom for rotation about the x, y, and z axes with respect to the base plate 11.
As shown in fig. 3 and 4, each set of active electromagnetic negative stiffness structure 12 includes an actuating rod 7, a fixed magnetic ring fixing member 1, a fixed magnetic ring 2, a moving magnetic ring mounting member 3, a moving magnetic ring 4, a coil frame 5, a coil 6, a coil spring 8, and a support rod 9. The fixed magnetic ring fixing piece 1, the fixed magnetic ring 2, the moving magnetic ring mounting piece 3, the moving magnetic ring 4, the coil framework 5 and the coil 6 are sequentially and coaxially nested outwards along the radius from the axis, and the whole structure is axially symmetrical; the fixed magnetic ring fixing piece 1 is a T-shaped cylinder made of 7075 aluminum alloy, and the bottom of the fixed magnetic ring fixing piece is fixedly connected with the bottom of the coil framework 5 through four threaded holes uniformly distributed along the circumference; the fixed magnetic ring 2 is fixedly arranged on the fixed magnetic ringThe outer wall of the fixed part 1 and the fixed magnetic ring 2 are annular permanent magnets magnetized along the axial direction, and the magnetization direction is shown as the arrow direction in figure 4. The moving magnetic ring mounting piece 3 is coaxially nested outside the fixed magnetic ring 2, and a gap is arranged between the moving magnetic ring mounting piece and the fixed magnetic ring 2 along the radial direction; the moving magnetic ring mounting part 3 is an annular sleeve made of 7075 aluminum alloy, the top end of the moving magnetic ring mounting part is fixedly connected with the moving rod 7 through four threaded holes uniformly distributed along the circumference, an annular boss is arranged at the bottom of the moving magnetic ring mounting part, and an annular groove is formed in the boss; the top end of the spiral spring 8 is coaxially and fixedly arranged in an annular groove at the bottom of the movable magnetic ring mounting part 3, the bottom of the spiral spring is tightly pressed and fixedly arranged in an annular groove of the coil framework 5, and the positive stiffness characteristic of the spiral spring 8 is used for realizing the stable support of vibration isolation load; the movable magnetic ring 4 is fixedly arranged on the outer wall of the movable magnetic ring mounting piece 3, the movable magnetic ring 4 is an annular permanent magnet which has the same magnetization direction with the fixed magnetic ring 2 and is as high as the axial height center of the fixed magnetic ring 2, the fixed magnetic ring 2 and the movable magnetic ring 4 are both made of N50 brand neodymium iron boron, the residual magnetic induction intensity is 1.43T, and the relative magnetic conductivity is 1.03. The coil framework 5 is coaxially nested outside the movable magnetic ring 4, and a gap is arranged between the coil framework and the movable magnetic ring 4 along the radial direction; the coil framework 5 is an annular sleeve made of 99 alumina ceramics, the upper end and the lower end of the outer wall of the annular sleeve are provided with bosses, and the bosses are used for preventing the coil 6 from falling off. The bottom of the coil framework 5 is fixedly connected with the supporting rod 9 through four threaded holes uniformly distributed along the circumference; the coil 6 is wound on the coil framework 5, the coil 6 is formed by winding an insulated copper enameled wire on the outer surface of the coil framework 5, the section of the coil is circular, and the coil 6 is centrosymmetric with respect to the axial height of the movable magnetic ring 4. The coil 6 is electrified with a precise and controllable driving current, and the maximum current density is 5A/mm2. When the active electromagnetic negative stiffness structure 12 works, a control signal is amplified by a power amplifier, then a driving current is output and loaded into the coil 6, a precisely controllable excitation magnetic flux is generated around the electrified coil 6 according to an electromagnetic induction law, and the excitation magnetic flux and a bias magnetic field generated by the fixed magnetic ring 2 around the movable magnetic ring are superposed to form a magnetic field for realizing the negative stiffness characteristic. When counterclockwise current shown in fig. 4 is applied to the coil 6, the magnetic force generated by the excitation magnetic flux and the bias magnetic field to the moving magnetic ring 4 is in the same direction, and the moving magnetic ring 4 deviates from the static balance position under the external excitation interference, and the negative stiffness value is increased by the current in the coilAnd vice versa. The magnitude and direction of the excitation magnetic flux can be precisely controlled by controlling the magnitude and direction of the current in the electrified coil 6, so that the magnitude and direction of the magnetic force borne by the magnetic ring 4 can be changed, the adjustment of the negative stiffness value is realized, and the vibration isolation load quality and the change of the excitation frequency are adapted.
The axis positions of the six sets of active electromagnetic negative stiffness structures are shown in fig. 5, in a cube ABCDabcd, 3 sides of the cube, where the diagonal vertices a and C are respectively connected, are removed, that is, 6 dotted lines of the cube in fig. 5 are removed, the remaining 6 solid lines Bb, BC, CD, Dd, da, ab are the axis positions of the six sets of active electromagnetic negative stiffness structures 12, and the axis intersection points are six vertices B, C, D, a, B, D of the cube. The upper three intersection points a, B and D determine the plane where the upper plate 10 is located, and are uniformly distributed on the upper plate 10 at intervals of 120 degrees along the circumference; the lower three intersection points C, b, d define the plane of the substrate 11 and are evenly distributed on the substrate 11 at circumferential intervals of 120 °.
FIG. 6 illustrates another embodiment of the active electromagnetic negative stiffness structure 12. In this embodiment, a gasket 15 is arranged in the annular groove at the bottom of the coil framework 5, and the compression amount of the spiral spring 8 can be adjusted by adjusting the thickness of the gasket 15, so that the axial height centers of the movable magnetic ring 4 and the fixed magnetic ring 2 are equal in height under different vibration isolation load qualities, and the quasi-zero stiffness vibration isolation characteristic under different load qualities is realized.
Claims (5)
1. A six-degree-of-freedom micro-vibration isolator based on an active electromagnetic negative stiffness structure comprises an upper plate (10), a base plate (11) and six sets of active electromagnetic negative stiffness structures (12) which are connected with the upper plate (10) and the base plate (11); the top end of an actuating rod (7) of the active electromagnetic negative stiffness structure (12) is connected with a fixed connecting piece (14) at the bottom of the upper plate (10) through a flexible hinge (13), and the bottom of a supporting rod (9) of the active electromagnetic negative stiffness structure (12) is connected with the fixed connecting piece (14) on the substrate (11) through the flexible hinge (13); two adjacent active electromagnetic negative stiffness structures (12) are axially and mutually vertically arranged; the upper plate (10) has three translational degrees of freedom and three rotational degrees of freedom relative to the substrate (11); the method is characterized in that: the active electromagnetic negative stiffness structure (12) comprises an actuating rod (7), a fixed magnetic ring fixing piece (1), a fixed magnetic ring (2), a movable magnetic ring mounting piece (3), a movable magnetic ring (4), a coil framework (5), a coil (6), a spiral spring (8) and a supporting rod (9); the fixed magnetic ring fixing piece (1), the fixed magnetic ring (2), the moving magnetic ring mounting piece (3), the moving magnetic ring (4), the coil framework (5) and the coil (6) are sequentially and coaxially nested outwards along the radius from the axis, and the whole structure is axially symmetrical; the fixed magnetic ring fixing piece (1) is a T-shaped cylinder, and the bottom of the fixed magnetic ring fixing piece is fixedly connected with the bottom of the coil framework (5) through threads; the fixed magnetic ring (2) is fixedly arranged on the outer wall of the fixed magnetic ring fixing piece (1), and the fixed magnetic ring (2) is an annular permanent magnet magnetized along the axial direction; the moving magnetic ring mounting piece (3) is coaxially nested at the outer side of the fixed magnetic ring (2), a gap is arranged between the moving magnetic ring mounting piece and the fixed magnetic ring (2) along the radial direction, the moving magnetic ring mounting piece (3) is an annular sleeve, the top end of the moving magnetic ring mounting piece is fixedly connected with the actuating rod (7) through threads, the bottom of the moving magnetic ring mounting piece is provided with an annular boss, and an annular groove is formed in the boss; the top end of the spiral spring (8) is coaxially and fixedly arranged in an annular groove at the bottom of the movable magnetic ring mounting piece (3), and the bottom of the spiral spring is fixedly connected with the coil framework (5); the movable magnetic ring (4) is fixedly arranged on the outer wall of the movable magnetic ring mounting piece (3), the movable magnetic ring (4) is an annular permanent magnet magnetized along the axial direction, the magnetizing directions of the movable magnetic ring (4) and the fixed magnetic ring (2) are the same, and the axial height centers are equal in height; the coil framework (5) is coaxially nested at the outer side of the movable magnetic ring (4), a gap is arranged between the coil framework and the movable magnetic ring (4) along the radial direction, the coil framework (5) is an annular sleeve with bosses at the upper end and the lower end of the outer wall, and the bottom of the coil framework (5) is fixedly connected with the supporting rod (9) through threads; the coil framework (5) is wound with a coil (6), the coil (6) is internally provided with a precise and controllable driving current, and the coil (6) is in central symmetry with respect to the axial height of the movable magnetic ring (4).
2. The six-degree-of-freedom micro-vibration isolator based on the active electromagnetic negative stiffness structure according to claim 1, wherein: the bottom of the coil framework (5) is provided with an annular groove, and the spiral spring (8) is tightly pressed and fixedly installed in the annular groove.
3. The six-degree-of-freedom micro-vibration isolator based on the active electromagnetic negative stiffness structure according to claim 2, wherein: and a gasket (15) is arranged at the bottom of the annular groove.
4. The six-degree-of-freedom micro-vibration isolator based on the active electromagnetic negative stiffness structure according to claim 1, wherein: the fixed magnetic ring fixing piece (1), the moving magnetic ring mounting piece (3), the actuating rod (7), the spiral spring (8) and the support rod (9) are made of aluminum alloy, titanium alloy or austenitic stainless steel which is not magnetic conductive or weak magnetic conductive.
5. The six-degree-of-freedom micro-vibration isolator based on the active electromagnetic negative stiffness structure according to claim 1, wherein: the coil framework (5) is made of ceramics, granite, glass fiber reinforced plastics or hard plastics.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011189248.9A CN112303175B (en) | 2020-10-30 | 2020-10-30 | Six-freedom-degree micro-vibration isolation device based on active electromagnetic negative stiffness structure |
| PCT/CN2021/102570 WO2022088717A1 (en) | 2020-10-30 | 2021-06-26 | Six-degree-of-freedom micro vibration isolator based on active electromagnetic negative stiffness structures |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011189248.9A CN112303175B (en) | 2020-10-30 | 2020-10-30 | Six-freedom-degree micro-vibration isolation device based on active electromagnetic negative stiffness structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112303175A CN112303175A (en) | 2021-02-02 |
| CN112303175B true CN112303175B (en) | 2022-03-29 |
Family
ID=74334000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011189248.9A Active CN112303175B (en) | 2020-10-30 | 2020-10-30 | Six-freedom-degree micro-vibration isolation device based on active electromagnetic negative stiffness structure |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN112303175B (en) |
| WO (1) | WO2022088717A1 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7366842B2 (en) * | 2020-06-04 | 2023-10-23 | 日立グローバルライフソリューションズ株式会社 | Electromagnetic suspension and washing machine |
| CN112303175B (en) * | 2020-10-30 | 2022-03-29 | 哈尔滨工业大学 | Six-freedom-degree micro-vibration isolation device based on active electromagnetic negative stiffness structure |
| CN112963491B (en) * | 2021-02-23 | 2021-12-07 | 上海大学 | Variable-rigidity shock absorber |
| CN113394941B (en) * | 2021-06-16 | 2022-11-11 | 西北工业大学 | Electromagnetism-piezoelectricity hybrid double-effect quasi-zero-stiffness vibration energy harvesting device |
| CN114183495B (en) * | 2021-12-10 | 2023-07-25 | 中国人民解放军海军工程大学 | Quasi-zero stiffness vibration isolator with adaptively-adjustable negative stiffness |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3618946B2 (en) * | 1997-02-14 | 2005-02-09 | トヨタ自動車株式会社 | Vehicle suspension system |
| JP4941717B2 (en) * | 2006-11-08 | 2012-05-30 | アイシン精機株式会社 | Active vibration isolator |
| ES2703452T3 (en) * | 2015-09-23 | 2019-03-08 | Mag Soar Sl | Enhanced magnetic vibration damper with mechanical impedance matching |
| CN109027114B (en) * | 2018-09-20 | 2020-04-24 | 上海大学 | Electromagnetic six-degree-of-freedom variable-rigidity vibration isolation system |
| CN110369246B (en) * | 2019-07-22 | 2020-10-23 | 青岛理工大学 | Halbach permanent magnet array-based inertial vibration exciter and design method thereof |
| CN111734780B (en) * | 2020-06-29 | 2022-03-29 | 哈尔滨工业大学 | Ultralow frequency air spring vibration isolator based on axial magnetization magnetic ring negative stiffness structure |
| CN111677811A (en) * | 2020-06-29 | 2020-09-18 | 哈尔滨工业大学 | Three-degree-of-freedom electromagnetic vibration isolation device based on parallel connection of positive stiffness and negative stiffness of magnetic repulsion force |
| CN112377561B (en) * | 2020-10-30 | 2022-03-29 | 哈尔滨工业大学 | Three-degree-of-freedom micro-vibration isolation device based on active electromagnetic negative stiffness structure |
| CN112303175B (en) * | 2020-10-30 | 2022-03-29 | 哈尔滨工业大学 | Six-freedom-degree micro-vibration isolation device based on active electromagnetic negative stiffness structure |
-
2020
- 2020-10-30 CN CN202011189248.9A patent/CN112303175B/en active Active
-
2021
- 2021-06-26 WO PCT/CN2021/102570 patent/WO2022088717A1/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022088717A1 (en) | 2022-05-05 |
| CN112303175A (en) | 2021-02-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112303175B (en) | Six-freedom-degree micro-vibration isolation device based on active electromagnetic negative stiffness structure | |
| CN112377561B (en) | Three-degree-of-freedom micro-vibration isolation device based on active electromagnetic negative stiffness structure | |
| CN103291832B (en) | Magnetic levitation vibration isolation platform | |
| JP6317822B2 (en) | One degree of freedom magnetic vibration isolator | |
| CN112303176B (en) | Active electromagnetic negative rigidity micro-vibration isolation device | |
| CN108533669B (en) | Space six-degree-of-freedom active and passive vibration isolation platform and method based on electromagnetic negative stiffness | |
| CN109120185B (en) | Low rigidity magnetcisuspension suspension gravity compensator based on characteristic cancellation principle | |
| US7772947B2 (en) | Variable reluctance fast positioning system and methods | |
| CN103398138B (en) | Damping-rigidness-controllable double-freedom-degree vibration active control platform | |
| CN103050216A (en) | Electromagnetic actuator for active noise control for amorphous alloy transformers | |
| CN113471112B (en) | Magnetic levitation gravity compensation device and micro-motion stage | |
| CN111734767A (en) | Air spring vibration isolator based on electromagnetic negative stiffness structure | |
| CN203055590U (en) | Electromagnetic actuator | |
| Williams et al. | Magnetic bearing stage for photolithography | |
| CN103047338B (en) | Double-layer orthogonal air floatation decoupling and two-dimensional flexible hinge angular decoupling electromagnetic damping vibration isolator | |
| CN103047345B (en) | Double-layer orthogonal air floatation decoupling and air floatation ball bearing angular decoupling electromagnetic damping vibration isolator | |
| CN104848937B (en) | The cylindrical low-frequency vibration calibration console of the symmetrical excitation in two permanent magnetism pipe two ends that magnetic field tracking compensates | |
| CN103047355B (en) | Electromagnetic damping vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of flexible membrane | |
| CN103062316B (en) | Eddy current damping zero stiffness vibration isolator for flexible membrane angle decoupling | |
| CN104865031A (en) | Dual-permanent-magnetism-tube two-end symmetrically-excited cylindrical enclosed magnetic-field-type low-frequency vibration calibration bench capable of realizing eddy current compensation | |
| CN103047343B (en) | Electromagnetic damping zero-stiffness vibration isolator with angular decoupling function by aid of sliding joint bearing | |
| CN113745138B (en) | Magnetic levitation device and micro-motion platform | |
| CN103047353B (en) | Eddy-current damping zero-stiffness vibration isolator with angular decoupling function by aid of rolling joint bearing | |
| CN103047358B (en) | Eddy-current damping vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of sliding joint bearing | |
| CN118188736A (en) | Ultralow frequency vibration isolation platform based on Stewart configuration |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |