CN112298940A

CN112298940A - Flexible transmission mechanism, reciprocating mechanism and lifting device

Info

Publication number: CN112298940A
Application number: CN201910702119.6A
Authority: CN
Inventors: 李冰; 陈淮阳; 郑教增; 庞飞; 郝凤龙
Original assignee: Shanghai Micro Electronics Equipment Co Ltd
Current assignee: Shanghai Micro Electronics Equipment Co Ltd
Priority date: 2019-07-31
Filing date: 2019-07-31
Publication date: 2021-02-02
Anticipated expiration: 2039-07-31
Also published as: CN112298940B

Abstract

The invention relates to a flexible transmission mechanism, a reciprocating mechanism and a lifting device, which can realize high-precision transmission and ensure the reliability of movement. The reciprocating mechanism comprises a frame, an objective table, a driving part, a driven part, a guide mechanism and a flexible transmission mechanism, wherein the guide mechanism at least comprises a group of guide rail sliding block mechanisms, the objective table is arranged on a sliding block of the guide rail sliding block mechanisms, and the flexible transmission mechanism is respectively connected with the driven part and the objective table. In practical application, the driving element is used for driving the driven element to move axially, the driven element is used for driving the object stage to move along the Z direction on the linear guide rail of the guide rail sliding block mechanism through the flexible transmission mechanism, and the flexible transmission mechanism can drive the object stage to move along the X direction and the Y direction relative to the driven element. Even if the guide rail and the driven part which does linear motion are not parallel, the mechanism can be ensured to run smoothly.

Description

Flexible transmission mechanism, reciprocating mechanism and lifting device

Technical Field

The invention relates to a flexible transmission mechanism, a reciprocating mechanism and a lifting device.

Background

In the current semiconductor lithography process, a library for storing mask layout boxes is required. Most of the mask libraries used in the prior art can accommodate a plurality of mask pattern boxes, and each mask pattern box realizes the taking and placing of a mask through a set of lifting device.

In the present lifting device, a plate frame bearing table and a plate box cover bearing table are arranged, the plate frame bearing table is fixedly arranged, and the plate box cover bearing table can do lifting movement relative to the plate frame bearing table. In more detail, the reticle pods are placed on a shelf carrier and a pod cover carrier cooperates with a cover of the reticle pods to effect opening and closing of the reticle pods. The prior art has the problem that in order to realize the large stroke of the plate box cover bearing table in a limited vertical space, a double-layer guide rail is also arranged in a lifting device and is arranged in a stacking manner in the horizontal direction, so that the plate box cover bearing table moves in the vertical direction along the double-layer guide rail.

However, due to the intervention of the double-layer guide rail, the double-layer guide rail and the screw rod driving the plate box cover bearing table to move are not parallel, so that the problem that the slide block is blocked or the screw rod is damaged in the moving process is caused, the normal taking and placing of the mask plates are influenced, and the production efficiency is reduced. And the version box lid plummer also is difficult to laminate completely with the version frame plummer when reseing, leads to the deviation to appear in the motion position of version box lid plummer, has influenced the normal opening and the locking of mask territory box, not only here, also damage motion easily to the mistake that resets, reduces the reliability of product.

Disclosure of Invention

The invention aims to provide a flexible transmission mechanism, which aims to solve the problems that a screw rod in a lifting device is not parallel to a guide rail, so that the movement is blocked and a movement mechanism is damaged.

Another object of the present invention is to provide a reciprocating mechanism, which aims to solve the problems of the mechanism reciprocating motion being locked and the resetting being incorrect.

Still another object of the present invention is to provide a lifting device, which aims to solve the problems of locking of lifting movement and incorrect resetting.

In order to achieve the above object, the present invention provides a flexible transmission mechanism, respectively connected to a driven member and an object stage, wherein the driven member is used for driving the object stage to move along a Z direction on a linear guide rail through the flexible transmission mechanism, the flexible transmission mechanism includes:

the X-direction adjusting piece is fixedly connected with the driven piece;

the Y-direction adjusting piece is mounted on the X-direction adjusting piece and can move along the X direction relative to the X-direction adjusting piece; and

the adjusting base is fixedly connected with the objective table, is arranged on the Y-direction adjusting piece and can move along the Y direction relative to the Y-direction adjusting piece;

when the object stage moves along the Z direction on the linear guide rail, the Y-direction adjusting piece can drive the object stage to move along the X direction relative to the driven piece, the adjusting base can drive the object stage to move along the Y direction relative to the driven piece, and the Z direction, the Y direction and the X direction are perpendicular to each other.

Optionally, the flexible transmission mechanism further comprises: and the X-direction limiting device is used for limiting the maximum distance of the Y-direction adjusting piece and the adjusting base moving along the X direction.

Optionally, the X-direction limiting device includes an inner cavity with an opening at one end, and is formed on the adjustment base;

the X-direction adjusting piece and the Y-direction adjusting piece are both installed in the inner cavity, and a certain gap exists between the X-direction adjusting piece and the inner cavity in the X direction to allow the Y-direction adjusting piece and the adjusting base to move for a certain distance in the X direction.

Optionally, the flexible transmission mechanism further comprises: and the Y-direction limiting device is used for limiting the maximum distance of the adjusting base moving along the Y direction.

Optionally, the Y-direction limiting device includes a Y-direction positioning pin and a Y-direction positioning hole, at least two Y-direction positioning pins are disposed on the Y-direction adjusting member, at least two Y-direction positioning holes are disposed on the adjusting base, two Y-direction positioning pins are respectively matched with one Y-direction positioning hole, and the size of the Y-direction positioning hole in the Y direction allows the adjusting base to move a certain distance in the Y direction.

In order to achieve the above object, the present invention provides a reciprocating mechanism, including any one of the flexible transmission mechanisms, and the reciprocating mechanism further includes: the device comprises a frame, an objective table, a driving element, a driven element and a guide mechanism; the guide mechanism at least comprises a group of guide rail sliding block mechanisms, and the objective table is arranged on a sliding block of the guide rail sliding block mechanisms; the flexible transmission mechanism is respectively connected with the driven piece and the objective table;

wherein: the driving element is used for driving the driven element to move along the axial direction, and the driven element is used for driving the object stage to move along the Z direction on the linear guide rail through the flexible transmission mechanism.

Optionally, the reciprocating mechanism further comprises: and the elastic mechanism is used for providing elastic force so that the adjusting base, the Y-direction adjusting piece and the X-direction adjusting piece are in a mutually attached state.

Optionally, the elastic mechanism comprises at least one spring disposed on one side of the X-direction adjusting member.

Optionally, the reciprocating mechanism further comprises: and the mechanical limiting device is used for limiting the maximum distance of the backward movement of the object stage.

Optionally, the mechanical limiting device includes at least one limiting block disposed on one side of the object stage and configured to abut against the object stage.

Optionally, the reciprocating mechanism further comprises: and the electric limiting device is used for determining the time when the prime mover stops running in the process of moving the object stage back.

Optionally, the electrical limiting device comprises at least one sensor disposed on the adjustment base; the sensor is used for sensing the position of the X-direction adjusting piece, and when the X-direction adjusting piece is not in the sensing range of the sensor, the prime mover stops running.

Optionally, a surface protrusion facing the sensor is formed on the X-direction adjusting member, a through hole structure avoiding the surface protrusion is formed on the Y-direction adjusting member, and the sensor is configured to sense the position of the surface protrusion through the through hole structure.

Optionally, the electrical limiting device further comprises an upper computer in communication connection with the sensor;

when the X-direction adjusting piece is in the sensing range of the sensor, the sensor outputs a first signal to the upper computer;

when the X-direction adjusting piece is not in the sensing range of the sensor, the sensor outputs a second signal to the upper computer, and the second signal is different from the first signal;

and when the upper computer receives a second signal sent by the sensor, the upper computer controls the driving part to stop running.

Optionally, the prime mover is a motor and the driven member is a lead screw.

Optionally, the guide mechanism includes two sets of guide rail slide rail mechanisms, one set of guide rail slide rail mechanism includes first slider and the first layer linear guide of matched with, another set of guide rail slide rail mechanism includes second slider and the second layer linear guide of matched with, first layer linear guide install in the frame, the second layer linear guide install on the first slider, just the objective table is installed on the second slider.

In order to achieve the above object, the present invention provides a lifting device, including any one of the reciprocating mechanisms.

Optionally, the rack comprises a bearing table disposed below the object table; the bearing platform is used for placing the box-shaped parts, and the bearing platform can be matched with the covers of the box-shaped parts so as to realize the opening and the locking of the box-shaped parts.

Optionally, the carrier is adapted to abut the stage to define a maximum distance of downward movement of the stage.

Optionally, the box is a mask layout box.

The flexible transmission mechanism, the reciprocating mechanism and the lifting device provided by the invention have the following advantages:

firstly, the reciprocating mechanism and the lifting device compensate the deviation caused by the unparallel of the linear guide rail and the driven part which is in linear motion like a screw rod by utilizing the fine adjustment function of the flexible transmission mechanism in the X direction and the Y direction, so that the slide block can still run smoothly under the condition that the driven part is not parallel to the linear guide rail, thereby improving the reliability of the reciprocating motion.

Second, above-mentioned reciprocating motion mechanism and elevating gear have still set up mechanical stop device, can ensure that the objective table can accurately target in place when reseing, and in particular, still set up electric stop device, it is spacing to make the objective table reach machinery earlier, and it is spacing to trigger electrical afterwards, and the influence of error such as encoder self error and lead screw, reduction gears can be overcome to such locate mode, realizes the location of high accuracy to can accurately target in place when ensureing to reseing at every turn.

Drawings

The drawings are included to provide a better understanding of the invention and are not to be construed as unduly limiting the invention. Wherein:

FIG. 1 is a schematic view of a lifting device for a mask layout cassette;

FIG. 2 is a schematic structural diagram of a reciprocating mechanism according to an embodiment of the present invention;

FIG. 3 is an exploded view of a flexible drive mechanism according to an embodiment of the present invention;

fig. 4 is a schematic structural diagram of a lifting device according to a second embodiment of the present invention.

In the figure:

a plate frame bearing table-1; a plate box cover bearing table-2; a nut-3; a screw rod-4; a motor-5; a transfer plate-6; a first layer of linear guide rails-7; a second layer of linear guide rails-8; frame-11, 31; a pallet-311;

stage-12, 32; a slide block-13; a first slider-331; a second slider-332;

a linear guide-14; the first layer of linear guides 341; a second layer of linear guide rails-342;

motors-15, 35; nuts-16, 36; screw-17, 37; synchronous belts-18, 38;

an X-direction adjusting piece-19; surface relief-191; a Y-direction adjusting piece-21; a via structure-211; adjusting the base-22; a locking nut-23;

y-direction positioning pin-24; y-direction positioning hole-25;

screw-26; a spring-27; a limiting block-28.

Detailed Description

The invention is described in further detail below with reference to the figures and the detailed description. Advantages and features of the present invention will become more apparent from the following description, which is given to enable those skilled in the art to fully and effectively understand the nature of the present invention and to repeatedly implement the technical solution described above, while understanding the content of the present invention. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.

As used in this specification and the appended claims, the singular forms "a", "an", and "the" include plural referents unless the content clearly dictates otherwise. As used in this specification and the appended claims, the term "or" is generally employed in its sense including "and/or" unless the content clearly dictates otherwise. The term "plurality" is generally used in a sense that it includes two or more.

As background art, the non-parallel of the screw rod and the double-layer guide rail in the lifting device for the mask pattern box leads to the problem of the locking of the mechanism motion or the damage of the screw rod.

As shown in fig. 1, the lifting device for a reticle cassette includes a carriage 1, a cassette cover carriage 2, a motor 5, and a screw nut. In practice, the reticle pods are placed on the plate holder carriers 1 and the covers of the reticle pods are mated to the plate pod cover carriers 2. When the mask plates need to be taken and placed, the plate frame bearing table 1 is static, the motor 5 drives the plate box cover bearing table 2 to move upwards through the lead screw nut, the plate box cover bearing table 2 is far away from the plate frame bearing table 1 to open the cover, and then the mask plates are taken and placed on the plate frame bearing table 1 by the mechanical arm. After the mask is taken and placed, the motor 5 drives the mask box cover bearing table 2 to reset through the lead screw nut so as to lock the cover. Under the general condition, version box lid plummer 2 need reset to the assigned position, just can guarantee that mask territory box can lock, in case reset incorrectly, just can appear the unable circumstances of locking of mask territory box, reset incorrectly in addition and also can lead to follow-up version box lid plummer 2's movement position to appear the deviation, influence the normal of mask plate and get and put.

In more detail, the screw nut comprises a nut 3 and a screw 4, the upper end of the screw 4 is connected with the plate box cover bearing platform 2, and the nut 3 is arranged on the motor base of the plate frame bearing platform 1 through a bearing. Meanwhile, the motor 5 is also installed on the motor base, the motor 5 drives the nut 3 to rotate through the synchronous belt, then the nut 3 drives the screw rod 4 to axially move, and the screw rod 4 drives the plate box cover bearing table 2 to vertically move. But the installation space of Z to (vertical promptly) is less, and the motion stroke of version box lid plummer 2 is great again, consequently, can't install version box lid plummer 2 directly on the version frame plummer 1, has consequently introduced double-deck guide rail and has installed version box lid plummer 2, promptly: install the transfer board 6 on the version frame plummer 1 through first layer linear guide 7, install the version box lid plummer 2 on the transfer board 6 through second layer linear guide 8 again, do so and practiced thrift vertical installation space, also realized the big displacement in vertical side simultaneously.

However, the inventor finds that the parallelism between the screw rod 4 and the double-layer guide rail is difficult to ensure due to the intervention of the double-layer guide rail (namely, the double-layer guide rail is not parallel to the screw rod 4), so that the problems of blocking and damage to the screw rod 4 occur in the movement process, the taking and placing of the mask plates are influenced, the production efficiency is reduced, and the production cost is also increased. Besides, when the plate box cover bearing platform 2 resets, the reset position is usually determined according to the data collected by the encoder on the motor 5, namely, the encoder records the rotation angle of the motor 5, so that the upward movement distance of the plate box cover bearing platform 2 is determined, and the downward movement distance is determined according to the upward movement distance of the plate box cover bearing platform 2. But encoder self resolution has the error, and in addition the influence of error factors such as lead screw, hold-in range, hardly realize the location of high accuracy, and the location mode of encoder also can produce accumulative error along with the reciprocating motion of mechanism, and the positioning accuracy is more difficult to obtain guaranteeing, and sometimes because the location is inaccurate and damage motion mechanism moreover.

Therefore, the invention provides a flexible transmission mechanism, which can still ensure the smooth operation of the mechanism without the problem of jamming even under the condition that a driven member which is in linear motion like a screw rod is not parallel to a guide rail, and can not damage a motion mechanism, thereby ensuring that related objects can be normally conveyed, improving the production efficiency and reducing the production cost. In addition, the invention also provides a reciprocating mechanism and a lifting device, wherein the reciprocating mechanism comprises the flexible transmission mechanism of the invention, and the lifting device comprises the reciprocating mechanism of the invention, but the reciprocating mechanism of the invention is not limited to do lifting motion, and the reciprocating mechanism comprises but not limited to lifting for the mask layout boxes.

The flexible transmission mechanism, the reciprocating mechanism and the lifting device according to the present invention will be further described with reference to the drawings and specific embodiments.

Example one

Fig. 2 is a schematic structural diagram of a reciprocating mechanism according to an embodiment of the present invention. As shown in fig. 2, the present embodiment provides a reciprocating mechanism including a frame 11, a stage 12, a driving mechanism, a driven mechanism, a guide mechanism, and a flexible transmission mechanism. The driving mechanism, the driven mechanism, the guide mechanism and the flexible transmission mechanism are all arranged on the support 11. Wherein the drive mechanism comprises a prime mover and the follower mechanism comprises a follower. The flexible transmission mechanism is respectively connected with the driven piece and the object stage 12, and the object stage 12 is arranged on the guide mechanism.

The guide mechanism at least comprises a group of guide rail sliding block mechanisms, for example, a group of guide rail sliding block mechanisms specifically comprises a sliding block 13 and a linear guide rail 14 which are matched, and the linear guide rail 14 is installed on the rack 11 and extends along the Z direction. The Z direction may be a horizontal direction or a vertical direction, and the specific orientation of the Z direction is set according to actual needs, which is not limited in the present invention. In this embodiment, the Z direction is a horizontal direction. And the stage 12 is mounted on the slider 13 so that the stage 12 moves along the linear guide 14.

In this embodiment, the prime mover is a motor 15, the driven mechanism is a lead screw nut, wherein a lead screw in the lead screw nut is the driven member in this embodiment, the lead screw nut specifically includes a nut 16 and a lead screw 17, the lead screw 17 is also arranged along the Z direction, and the nut 16 is mounted on the frame 11 and can only rotate. In practical application, the motor 15 can drive the nut 16 to rotate through the synchronous belt 18, and then the nut 16 drives the screw rod 17 to move axially. One end of the screw rod 17 is connected with the object stage 12 through the flexible transmission mechanism, so that the object stage 12 is driven to move along the linear guide rail 14 through the flexible transmission mechanism by the screw rod 17. In this embodiment, the nut 16 may be mounted to the frame 11 by bearings, and the nut 16 has only one rotational degree of freedom about the Z-axis (i.e., the axis of rotation in the Z-direction).

In particular, the object table 12 is also movable in the X-direction and the Y-direction relative to the screw 17 by the relationship of the flexible transmission, i.e. the object table 12 is flexibly connected to the screw 17 by the flexible transmission. The purpose of this is that even if the screw 17 is not parallel to the linear guide 14, under the action of the flexible transmission mechanism, the stage 12 can deviate from the direction of the screw 17 and move along the linear guide 14, so that the mechanism does not get stuck, and the moving mechanisms such as the screw and the slide block are not damaged, and the reliability of the reciprocating motion can be ensured. Of course, in the case where the screw 17 is parallel to the linear guide 14, the stage 12 is moved along the linear guide 14 by the screw 17, and at this time, the stage 12 is not deviated from the screw 17 in both the X direction and the Y direction. Wherein, the X direction, the Y direction and the Z direction are mutually vertical.

It should be noted that the motor 15 includes, but is not limited to, the nut 16 driven by the timing belt 18, and the nut 16 may also be driven by a gear transmission, for example, or the motor 15 may drive the nut 16 to rotate by another speed reducing mechanism, and the invention is not limited to the power transmission mode between the motor 15 and the nut 16. In addition, the screw nut is preferably a ball screw, so that the friction is small, the transmission precision is high, and high-precision transmission is realized. The prime mover may be a motor or a device having a rotary motion, such as a hydraulic pump. The driven member can be a screw rod, and can also be other members capable of performing reciprocating linear motion, such as a piston rod in a hydraulic or pneumatic system. In summary, the present invention does not limit the specific implementation forms of the driving member and the driven member, as long as the driving member can drive the driven mechanism to move, and the driven mechanism can be converted into linear motion through the driven member. In this context, the driven member may be a linear member such as a screw rod or a piston rod, which is theoretically disposed parallel to the linear guide, but due to installation error or other factors, the linear guide may be not parallel to the driven member, so that when the driven member moves axially, if the non-parallel condition is not compensated, the motion mechanism may be stuck, and even damaged, but the flexible transmission mechanism may better solve the problem and ensure the smoothness of the motion.

The present invention will be further described assuming that the prime mover is a motor and the follower mechanism is a ball screw, but the present invention should not be construed as being limited thereto, and those skilled in the art will be able to modify the following description to apply it to cases other than the ball screw and the motor.

With continued reference to fig. 2, the motor 15 and the lead screw 17 are arranged in parallel up and down, which is beneficial to reduce the volume in the horizontal direction to adapt to the situation that the installation space is small in the horizontal direction. In other cases, the motor 15 and the lead screw 17 may be arranged in parallel, i.e., front-back or left-right, so as to reduce the volume in the vertical direction, thereby adapting to the situation that the installation space is small in the vertical direction.

Fig. 3 is an exploded view of a flexible transmission mechanism according to an embodiment of the present invention. As shown in fig. 3, the flexible transmission mechanism includes an X-direction adjusting member 19, a Y-direction adjusting member 21 and an adjusting base 22.

The X-direction adjusting piece 19 is fixedly connected with one end of the screw rod 17, so that the X-direction adjusting piece 19 and the screw rod 17 are kept relatively static, but the fixed connection mode can be detachable connection or non-detachable connection, and preferably, the detachable connection is convenient to replace. Alternatively, one end of the screw 17 is fastened to the X-direction adjuster 19 by a lock nut 23 (see fig. 2). For example, the X-adjustment member 19 is provided with a central bore (not labeled) having internal threads for mating with and locking with external threads on the lead screw 17, while securing a locking nut 23 on the lead screw 17.

The Y-direction adjusting member 21 is movably disposed on the X-direction adjusting member 19, and the Y-direction adjusting member 21 is capable of moving in the X-direction relative to the X-direction adjusting member 19 (i.e., the X-direction adjusting member 19 and the Y-direction adjusting member 21 are connected by a moving pair). Optionally, the Y-direction adjusting member 21 is of a U-shaped structure, and the X-direction adjusting member 19 is inserted into a U-shaped groove of the U-shaped structure to form a moving pair, although the two may be arranged in the opposite way. In the present embodiment, the Y-direction adjuster 21 has only the freedom of movement in the X-direction with respect to the X-direction adjuster 19.

Preferably, the flexible transmission mechanism further comprises an X-direction limiting device for limiting the maximum distance of movement of the Y-direction adjusting member 21 and the adjusting base 22 along the X-direction. The X-direction limiting device may include an inner cavity (not labeled, see fig. 2) formed on the adjusting base 22, and one end of the inner cavity is opened to allow the X-direction adjusting element 19 and the Y-direction adjusting element 21 to be installed, but a certain gap exists between the X-direction adjusting element 19 and the inner cavity in the X direction, so as to allow the Y-direction adjusting element 21 and the adjusting base 22 to move a certain distance in the X direction, and thus, the gap defines the maximum distance that the Y-direction adjusting element 21 and the adjusting base 22 move in the X direction. Optionally, an avoiding hole (not labeled) is formed in the Y-direction adjusting member 21 and used for avoiding the locking nut 23 and the screw rod, and the avoiding hole is specifically formed in the center of the Y-direction adjusting member 21.

The adjusting base 22 is movably disposed on the Y-direction adjuster 21, and the adjusting base 22 can move in the Y direction relative to the Y-direction adjuster 19 (i.e., the freedom of movement of the adjusting base 22 in the Y direction is not limited, and the other degrees of freedom are all limited). Preferably, the flexible transmission mechanism further comprises a Y-direction limiting device for limiting the maximum distance of the adjustment base 22 moving along the Y direction. The Y-direction limiting device comprises Y-direction positioning pins 24 and Y-direction positioning holes 25, at least two Y-direction positioning pins 24 are arranged on the Y-direction adjusting part 21, at least two Y-direction positioning holes 25 are arranged on the adjusting base 22, the two Y-direction positioning pins 24 are respectively matched with one Y-direction positioning hole 25 to limit the freedom degree of the adjusting base 22 in the X direction, and the size of the Y-direction positioning holes 25 in the Y direction allows the adjusting base 22 to move for a certain distance in the Y direction, so that the maximum stroke of the adjusting base 22 in the Y direction is limited. Optionally, the Y-direction positioning holes 25 are kidney-shaped holes, and a long axis of each Y-direction positioning hole 25 is arranged along the Y direction.

The adjustment base 22 is further fixedly connected to the object stage 12, so that the adjustment base 22 and the object stage 12 are kept relatively still, but the fixed connection mode may be detachable connection or non-detachable connection, and preferably, the detachable connection is convenient for replacement. In this embodiment, the adjustment base 22 is detachably connected to the stage 12 by two screws 26. The maximum stroke of the adjustment base 22 in the Y direction includes the maximum distance of movement in the positive direction and the negative direction of the Y direction, and the maximum distance is set according to the actual variation. The maximum stroke of the Y-direction adjuster 21 and the adjustment base 22 (i.e., the whole) in the X direction includes the maximum distance of movement in the positive direction and the negative direction of the X direction, and the maximum distance is also set according to the actual variation.

The working principle of the reciprocating mechanism provided by the embodiment is as follows:

firstly, a motor 15 drags a nut 16 to rotate through a synchronous belt 18, and a screw rod 17 moves axially under the action of the nut 16; and then the objective table 12 moves along the linear guide rail 14 under the drive of the screw rod 17, in the moving process, if the linear guide rail 14 and the screw rod 17 are not parallel (namely, there is deviation in the X direction and the Y direction), namely, in the position of movement blocking, the Y direction adjusting part 21 and the adjusting base 22 are integrally jogged along the X direction relative to the X direction adjusting part 19 to drive the objective table 12 to be jogged along the X direction, and simultaneously, the adjusting base 22 is jogged along the Y direction relative to the Y direction adjusting part 19 to drive the objective table 12 to be jogged along the Y direction, so that the flexible adjustment of the moving mechanism is realized, and the condition that the screw rod 17 and the slide block 13 are not blocked in the moving process is ensured. It will be appreciated that in the movement stuck position the object table 12 is moved slightly in the X and Y directions relative to the screw 17, which compensates for errors caused by the non-parallel alignment of the linear guide and the screw, so that the screw 17 continues to move axially thereof without being affected by these errors, while the object table 12 is still moving along the linear guide 14. Therefore, the arrangement of the flexible transmission mechanism strengthens the adaptability of the ball screw to a single-layer or two-layer or more than two-layer guide rail, and can still ensure the smooth operation of the mechanism under the condition that the single-layer or more than two-layer guide rail is not parallel to the screw rod, thereby ensuring the reliability of the movement, improving the transmission precision, avoiding the risk that the moving mechanisms such as the slide block and the screw rod are damaged, reducing the production cost and improving the production efficiency.

Further optionally, the reciprocating mechanism further includes an elastic mechanism for providing an elastic force to make the adjusting base 22, the Y-direction adjusting member 21 and the X-direction adjusting member 19 tightly fit, so as to ensure the transmission precision and the position accuracy of the object stage 12. Here, it is understood that the Y-direction adjuster 21 is actually in a free state in the Z direction, and if there is no limitation in this direction, it is difficult to secure the position of the stage 21 during the movement, and therefore, this problem can be avoided by the force of the elastic mechanism.

As shown in fig. 2, the elastic mechanism includes at least one spring 27 disposed on one side of the X-direction adjusting member 19 and providing an elastic force to the stage 12 to bring the adjusting base 22, the Y-direction adjusting member 21 and the X-direction adjusting member 19 into close contact. However, the number of the springs 27 is not limited, and may be one, or two or more. Optionally, the object stage 12 is disposed adjacent to the X-directional adjustment member 19, in this case, a groove may be formed on the surface of the X-directional adjustment member 19, and another groove may be formed on the surface of the object stage 12, the two grooves surround to form a cavity, and the spring 27 is disposed in the cavity. During the movement of the mechanism, the spring 27 is compressed and deformed and provides an elastic force to the object stage 12, so that the adjusting base 22, the Y-direction adjusting piece 21 and the X-direction adjusting piece 19 are tightly attached.

Further optionally, the reciprocating mechanism further comprises a mechanical limiting device for limiting the maximum distance of the backward movement of the object stage 12, i.e. limiting the starting position of the object stage 12, so as to ensure the accuracy of the resetting of the object stage 12. As shown in fig. 2, the mechanical limiting device includes at least one limiting block 28 disposed on one side of the object stage 12 for abutting against the object stage 12 to limit the movement of the object stage 12, but the limiting block 28 may be disposed on the frame 11 or on, for example, the linear guide 14, which is not limited in this respect. In detail, when the stage 12 moves in, for example, a negative direction of the Z-direction, if the stage 12 comes into contact with the stopper 28, the stage 12 stops moving, and at this time, the initial position (i.e., the zero point position) of the stage 12 is determined. In this embodiment, the stopper 28 is a precision workpiece, and the surface of the stopper contacting the stage 12 is a finish surface, so that even if an accumulated error is generated along with the movement of the mechanism, the precision of the repeated positioning can be better ensured. In this context, leftward movement is the positive direction of the Z direction (i.e., Z +), and rightward movement is the negative direction of the Z direction (i.e., Z-). In addition, the spring 27 can also provide buffering, and damage to the mechanism when the spring is in contact with the limiting block 27 is avoided.

Further optionally, the reciprocating mechanism further comprises an electrical limiting device for determining the time when the motor stops (i.e. the ball screw stops) when the object stage 12 moves back, thereby further ensuring that each reset can be accurately positioned. Typically, the time required for the motor to stop operation is greater than the time required for the stage 12 to return from the operating position to the starting position, which ensures that the stage 12 is in full contact with the stop 28 without separation. Here, the working position refers to the farthest position when the stage 12 moves from the initial position in a direction away from the stopper 28 (e.g., in the Z + direction in the drawing). More specifically, when the object stage 12 contacts the limiting block 28, the motor 15 does not stop operating immediately, but the motor 15 continues operating for a period of time, so that the nut 16 can be dragged to continue rotating, the screw rod 17 is dragged by the nut 16 to continue moving along the Z-direction, the X-direction adjusting member 19 also moves along the same direction of the screw rod 17, until the X-direction adjusting member 19 moves to the position limited by the electrical limiting, the motor 15 stops operating, and the ball screw stops moving at the same time, so that the influence of errors can be further overcome, and the object stage 12 can be more effectively ensured to be accurately positioned each time of resetting.

The electrical limiting device comprises at least one sensor (not shown) arranged on the adjusting base 22 and used for sensing the position of the X-direction adjusting piece 19 so as to determine the time for stopping the motor 15 according to the position of the X-direction adjusting piece 19 sensed by the sensor. The reciprocating mechanism also preferably comprises an upper computer (not shown) which is in communication connection with the sensor. When the X-direction adjusting piece 19 is in the sensing range of the sensor, the sensor outputs a first signal to the upper computer, and when the X-direction adjusting piece 19 is not in the sensing range of the sensor, the sensor outputs a second signal to the upper computer, wherein the second signal is different from the first signal. In more detail, when the adjusting base 22, the X-direction adjusting member 19 and the Y-direction adjusting member 21 are tightly attached (i.e. the object stage 12 is not abutted to the limit block 28), the X-direction adjusting member 19 is located within the sensing range of the sensor, so that the sensor can always sense the X-direction adjusting member 19 and output a first signal, and further, after the object stage 12 is abutted to the limit block 28, the X-direction adjusting member 19 continues to move along with the screw rod 17 and moves out of the sensing range of the sensor, the sensor outputs a second signal. When the upper computer receives the second signal, a stop instruction is sent to the motor 15, the motor 15 stops running, and the ball screw also stops moving. The present invention is not limited to the type of sensor, including but not limited to an infrared sensor or an inductive sensor.

In order to enable the sensor to effectively sense the position of the X-directional adjusting member 19, in the present embodiment, a surface protrusion 191 (see fig. 3) facing the sensor is formed on the X-directional adjusting member 19, so that the sensor can sense the position of the surface protrusion 191, thereby determining the position of the X-directional adjusting member 19. Because the sensor usually has its inherent sensing distance, if the inherent sensing distance is smaller, and the distance between the X-direction adjusting member 19 and the sensor is originally larger and cannot be sensed, an additional protrusion can be arranged on the X-direction adjusting member 19 to shorten the distance therebetween, so that the sensor can determine the position of the X-direction adjusting member 19 only by sensing the position of the protrusion. Meanwhile, a through hole structure 211 (see fig. 3) is formed on the Y-directional adjuster 21 to avoid the surface protrusion 191 and prevent the Y-directional adjuster 21 from interfering with the surface protrusion 191 when moving in the X-direction, so that the surface protrusion 191 is inserted into the through hole structure 211, and the size of the through hole structure 211 is larger than that of the surface protrusion 191 without restricting the movement of the Y-directional adjuster 21. The through-hole structure 211 includes, but is not limited to, a kidney-shaped hole, and likewise, the surface protrusions 191 include, but are not limited to, circular protrusions.

Further, the sensor is axially aligned with the through hole structure 211 such that the sensor directly senses the position of the surface protrusion through the through hole structure 211.

Example two

Fig. 4 is a schematic structural diagram of a lifting device according to a second embodiment of the present invention. As shown in fig. 4, this embodiment further provides a lifting device, which not only can lift the mask layout box, but also can achieve other situations with similar lifting requirements. Specifically, the lifting device includes the reciprocating mechanism provided in the first embodiment, at this time, the Z direction is a vertical direction, and both the X direction and the Y direction are horizontal directions. In addition, the reciprocating mechanism provided in the present embodiment is substantially the same as the first embodiment, so that the detailed structure of the reciprocating mechanism will not be described in detail in the present embodiment, and different reference numerals are used to indicate the reciprocating mechanism of the present embodiment for convenience of understanding and explanation.

As shown in fig. 4, the reciprocating mechanism of the present embodiment includes a frame 31, a stage 32, a driving mechanism, a driven mechanism, a guide mechanism, and a flexible transmission mechanism. The guide mechanism includes but is not limited to a double-layer guide rail, and can also be a single-layer guide rail or a guide rail with more layers. In the following description, the double-layer guide rail is only used as an example to describe the lifting device, but should not be used as a limitation to the present invention.

The guiding mechanism comprises two sets of guide rail and slide block mechanisms, wherein one set comprises a first slide block 331 and a first layer of linear guide 341 which are matched, the other set comprises a second slide block 332 and a second layer of linear guide 342 which are matched, the first slide block 331 is installed on the machine frame 31 through the first layer of linear guide 341, the second slide block 332 is installed on the first slide block 331 through the second layer of linear guide 342, and the object stage 32 is installed on the second slide block 332. Of course all linear guides extend vertically (i.e. in the Z-direction). The drive mechanism includes a motor 35 (i.e., prime mover). The driven mechanism comprises a nut 36 and a lead screw 37, wherein the lead screw 37 is a driven member, the flexible transmission mechanism comprises an X-direction adjusting member, a Y-direction adjusting member and an adjusting base, the X-direction adjusting member and the Y-direction adjusting member are not shown in fig. 4, but refer to fig. 2 specifically. In addition, the whole flexible transmission mechanism is arranged on the object stage 32, the screw rod 37 penetrates through the object stage 32 to be fixedly connected with the X-direction adjusting piece, and the adjusting base 22 is fixedly connected with the object stage 32.

In practical application, motor 35 passes through hold-in range 38 drive nut 36 and rotates, lead screw 37 moves up along vertical direction under nut 36's drive (the positive direction of Z direction, the definition is Z +), thereby drive objective table 32 along double-deck guide rail upward movement, in the motion process, if double-deck guide rail and lead screw 37 nonparallel, then Y is to adjusting part and adjustment base for X to the X of adjusting part along the horizontal direction to the fine motion, adjust base 22 for Y to the Y of adjusting part along the horizontal direction to the fine motion simultaneously, thereby realize objective table 32 along X to the fine motion to with Y, thereby ensure objective table 32 can not appear the dead condition of card at the lift in-process, improve elevating movement's reliability.

In this embodiment, the frame 31 includes a supporting platform 311, which is fixedly disposed, and the supporting platform 32 is disposed above the supporting platform 311. The carrier stage 311 may hold a cartridge like a mask layout cassette, and the stage 32 enables opening and locking of the cartridge. That is, the object stage 32 is matched with the cover of the box-shaped element, and the cover can be opened and closed by driving the cover to move relative to the box body, so that the contents in the box can be taken and placed. In one non-limiting application, stage 32 may serve as a reticle lid carrier to enable reticle pick and place.

Further, the carrier 311 preferably forms a mechanical stop, that is, the initial position (i.e. the maximum distance of the downward movement) of the carrier 32 is determined by the abutment of the carrier 311 with the carrier 32, so as to ensure that the carrier 32 completely fits the plate holder carrier 311 during each resetting, thereby ensuring that each resetting can be accurately performed. By doing so, especially in the lifting process of the mask layout box, the plate box cover bearing table can be attached to the plate frame bearing table in place when being reset, so that the mask layout box is ensured to be normally opened and locked, and the taking and placing precision of the mask is ensured. Furthermore, after the objective table 32 abuts against the bearing table 311, the motor 35 continues to drive the lead screw 37 to move until the X-direction adjusting member moves out of the sensing range of the sensor, and the upper computer controls the motor 35 to stop operating, so that the influence of accumulated errors and other various errors generated by the reciprocating motion of the mechanism can be overcome, and the precision of each resetting is further ensured.

Of course, in the lifting device of this embodiment, as described in the first embodiment, the specific implementation forms of the driving mechanism and the driven mechanism are not limited. For example, in some embodiments, the driven mechanism is a ball screw, and at the same time, a motive power element in rotary motion such as a motor is used for driving the ball screw to move, so that high-precision and high-efficiency transmission is realized.

In conclusion, according to the technical scheme provided by the embodiment of the invention, the problem that the mechanism is blocked when a linear driven member like a screw rod is not parallel to a guide rail is solved by arranging the flexible transmission mechanism, so that the reliability of the mechanism motion is improved, and the reliability of the transmission, the picking and placing of related objects is further ensured, thereby improving the production efficiency and reducing the production cost.

In addition, the mechanical limiting device and the electrical limiting device are combined to effectively ensure the resetting precision of the mechanism, so that the influences of self errors of the encoder, the screw rod, the reduction of error factors of the mechanism and the like can be overcome, and the positioning with higher precision is realized.

It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.

Claims

1. A flexible transmission mechanism, respectively used for being connected with a driven member and an object stage, wherein the driven member is used for driving the object stage to move along the Z direction on a linear guide rail through the flexible transmission mechanism, and the flexible transmission mechanism is characterized by comprising:

the X-direction adjusting piece is fixedly connected with the driven piece;

2. The flexible drive mechanism of claim 1, further comprising: and the X-direction limiting device is used for limiting the maximum distance of the Y-direction adjusting piece and the adjusting base moving along the X direction.

3. The flexible transmission mechanism according to claim 2, wherein the X-direction limiting device comprises an inner cavity with an opening at one end, and the inner cavity is formed on the adjusting base;

4. The flexible drive mechanism of claim 1, further comprising: and the Y-direction limiting device is used for limiting the maximum distance of the adjusting base moving along the Y direction.

5. The flexible transmission mechanism according to claim 4, wherein the Y-direction limiting device comprises Y-direction positioning pins and Y-direction positioning holes, at least two of the Y-direction positioning pins are disposed on the Y-direction adjusting member, at least two of the Y-direction positioning holes are disposed on the adjusting base, two of the Y-direction positioning pins are respectively matched with one of the Y-direction positioning holes, and the dimension of the Y-direction positioning holes in the Y direction allows the adjusting base to move a certain distance in the Y direction.

6. A reciprocating mechanism comprising a frame, a stage, a prime mover, a driven member, a guide mechanism, and a flexible drive mechanism as claimed in any one of claims 1 to 5, the prime mover, the driven member, the guide mechanism, and the flexible drive mechanism being disposed on the frame; the guide mechanism at least comprises a group of guide rail sliding block mechanisms, and the objective table is arranged on a sliding block of the guide rail sliding block mechanisms; the flexible transmission mechanism is respectively connected with the driven piece and the objective table;

wherein: the driving element is used for driving the driven element to move along the axial direction, and the driven element is used for driving the objective table to move along the Z direction on the linear guide rail of the guide rail sliding block mechanism through the flexible transmission mechanism.

7. The reciprocating mechanism of claim 6, further comprising:

and the elastic mechanism is used for providing elastic force so that the adjusting base, the Y-direction adjusting piece and the X-direction adjusting piece are in a mutually attached state.

8. The reciprocating mechanism of claim 7, wherein the resilient mechanism comprises at least one spring disposed on one side of the X-direction adjustment member.

9. The reciprocating mechanism of claim 6, further comprising:

and the mechanical limiting device is used for limiting the maximum distance of the backward movement of the object stage.

10. The reciprocating mechanism of claim 9, wherein the mechanical stop means comprises at least one stop disposed on a side of the stage for abutting against the stage.

11. The reciprocating mechanism of claim 9, further comprising:

and the electric limiting device is used for determining the time when the prime mover stops running when the objective table moves back.

12. The reciprocating mechanism of claim 11, wherein the electrical limiting device comprises at least one sensor disposed on the adjustment mount; the sensor is used for sensing the position of the X-direction adjusting piece, and when the X-direction adjusting piece is not in the sensing range of the sensor, the prime mover stops running.

13. The reciprocating mechanism according to claim 12, wherein the X-direction adjuster has a surface protrusion formed thereon facing the sensor, and the Y-direction adjuster has a through hole structure formed thereon for avoiding the surface protrusion, and the sensor is configured to sense the position of the surface protrusion through the through hole structure.

14. The reciprocating mechanism according to claim 12 or 13, wherein the electrical limiting device further comprises an upper computer in communication connection with the sensor;

15. The reciprocating mechanism of claim 6, wherein the prime mover is a motor and the driven member is a lead screw.

16. The reciprocating mechanism of claim 6, wherein the guide mechanism comprises two sets of rail and rail mechanisms, one set of rail and slider mechanisms comprising a first slider and a first layer of linear guides coupled together, the other set of rail and slider mechanisms comprising a second slider and a second layer of linear guides coupled together, the first layer of linear guides mounted on the frame, the second layer of linear guides mounted on the first slider, and the stage mounted on the second slider.

17. A lifting device comprising a reciprocating mechanism as claimed in any one of claims 6 to 16.

18. The lift device of claim 17, wherein the frame includes a bearing platform disposed below the bearing platform; the bearing platform is used for placing the box-shaped parts, and the bearing platform can be matched with the covers of the box-shaped parts so as to realize the opening and the locking of the box-shaped parts.

19. The lift device of claim 18, wherein the platform is configured to abut the stage to define a maximum distance of downward movement of the stage.

20. The lifting device as claimed in claim 18 or 19, wherein the box is a mask layout box.