CN112281139B - Chemical vapor deposition tube furnace experimental device - Google Patents
Chemical vapor deposition tube furnace experimental device Download PDFInfo
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- CN112281139B CN112281139B CN202011184500.7A CN202011184500A CN112281139B CN 112281139 B CN112281139 B CN 112281139B CN 202011184500 A CN202011184500 A CN 202011184500A CN 112281139 B CN112281139 B CN 112281139B
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- vapor deposition
- chemical vapor
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- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 30
- 230000000694 effects Effects 0.000 claims abstract description 24
- 238000002474 experimental method Methods 0.000 claims description 33
- 238000010438 heat treatment Methods 0.000 claims description 28
- 239000007789 gas Substances 0.000 claims description 26
- 238000007789 sealing Methods 0.000 claims description 20
- 230000001681 protective effect Effects 0.000 claims description 12
- 238000011084 recovery Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Abstract
The invention relates to the technical field of chemical vapor deposition processing devices and discloses a chemical vapor deposition tube furnace experimental device which comprises a support frame, wherein the upper part of the support frame is fixedly connected with a side baffle, and the lower part of the inner side of the side baffle is provided with an experimental tube furnace body. This chemical vapor deposition tube furnace experimental apparatus, through place the mid-mounting on board upper portion at the thing piece to individual limiting plate, and the upper portion of limiting plate is sharp-pointed form, make the convenient contact surface that reduces between limiting plate and the thing piece bottom, when increasing the device use simultaneously, conveniently carry out the effect of circulation with gas, rotate the threaded rod of side shield one side simultaneously, make and to drive the side shield back-and-forth movement, make conveniently drive the side shield and carry out the fixed effect of centre gripping to the thing piece, the bracing piece is installed to the inside lower part that promotes the grip block of device simultaneously, wherein the bracing piece activity cup joints the inside at the spout, make to play and prescribe a limit to the position that the device side shield removed.
Description
Technical Field
The invention relates to the technical field of chemical vapor deposition processing devices, in particular to a chemical vapor deposition tube furnace experimental device.
Background
Chemical vapor deposition is a chemical technology, which is a method for generating a film by performing a chemical reaction on the surface of a substrate by mainly utilizing one or more gas-phase compounds or simple substances containing film elements.
In the existing chemical vapor deposition tube furnace experimental device, when an object is placed in the experimental tube furnace body, the object needs to be placed at the bottom of the device, and when the device is higher, the object is difficult to place; when in use, the sealing cover on the device tube furnace has heavier mass and is difficult to move when being opened; when using, the device appears and places the in-process at the thing piece, has the common support of article and directly places and place on the board for the phenomenon that appears being difficult to fix when having the place.
Disclosure of Invention
Aiming at the defects of the existing chemical vapor deposition tube furnace experimental device, the invention provides the chemical vapor deposition tube furnace experimental device which has the advantages of conveniently driving a sealing cover on the tube furnace to move up and down, conveniently clamping a material block and conveniently adjusting the position of the material block when the material block is placed, and solves the problems in the background art.
The invention provides the following technical scheme: a chemical vapor deposition tube furnace experimental device comprises a supporting frame, wherein the upper part of the supporting frame is fixedly connected with a side baffle, the lower part of the inner side of the side baffle is provided with an experimental tube furnace body, the middle part of the upper part of the side baffle is movably sleeved with a limiting pressing plate, the upper part of the limiting pressing plate is provided with a fastening nut, the upper part of the side baffle is fixedly connected with an upper supporting plate, the middle part of the upper supporting plate is provided with a screw sleeve rotating device, the inner thread of the lower part of the screw sleeve rotating device is fixedly sleeved with a first threaded rod, the lower part of the first threaded rod is fixedly connected with an upper sealing cover of the tube furnace, one side of the lower part of the upper supporting plate is fixedly connected with a jacket, the inner part of the lower part of the jacket is movably sleeved with a limiting rod, rotate the upper portion fixedly connected with threaded rod two of post, the threaded rod fixed plate has been cup jointed in the upper portion activity of threaded rod two, the fixed cover of middle part screw thread of threaded rod two has connect the thing piece and has placed the board, the outside fixedly connected with circular cone support column on board upper portion is placed to the thing piece, the fixed cover of front end screw thread of circular cone support column has connect the side shield, the inside grip block that promotes of lower part fixedly connected with of side shield, the middle part fixedly connected with limiting plate of board upper end is placed to the thing piece, the inside fixedly connected with heating protective housing of experiment tube furnace body lower wall, the inside fixedly connected with heating resistor of heating protective housing, the lower part fixedly connected with lower part at experiment tube furnace body middle part.
Preferably, the limiting pressure plate can rotate three hundred and sixty degrees around the side baffle, the baffle is installed to the inner side of the limiting pressure plate, the baffle is placed on the upper portion of the experiment tube furnace body, the fastening screw cap and the side baffle are fixedly sleeved through threads, and four side baffles are installed at equidistant positions outside the experiment tube furnace body.
Preferably, the motor is installed on the upper portion of the screw sleeve rotating device, the motor is fixed to the middle of the upper portion of the upper supporting plate, the inner portion of the lower portion of the screw sleeve rotating device is hollow, threads are formed in the inner portion of the screw sleeve rotating device, and the upper sealing cover of the tube furnace and the upper portion of the experimental tube furnace body are overlapped.
Preferably, one side of the limiting pressing plate is fixed between the baffle on one side of the experimental tube furnace body and the lower part of the upper sealing cover of the tube furnace.
Preferably, the lower part of the limiting rod is fixed on the upper part of an upper sealing cover of the tube furnace, and four limiting rods are arranged on the upper part of the upper sealing cover of the tube furnace.
Preferably, four gas circulation pipelines are installed on the upper portion of the upper sealing cover of the tube furnace, different gases are respectively connected to the upper portions of the gas circulation pipelines, and a corresponding gas recovery device is installed on the lower portion of the lower gas outlet recovery pipeline.
Preferably, the outside of threaded rod two is equipped with the screw thread, a rotation post is respectively installed to the inside both sides of experiment tube furnace body, the sealed pad is installed with the position of experiment tube furnace body contact to the rotation post, the inside at experiment tube furnace body is fixed on the upper portion of threaded rod fixed plate.
Preferably, the limiting plate becomes coniform, the mid-mounting on board upper portion is placed to the thing piece has a plurality of limiting plates, the threaded rod has been cup jointed in one side activity of side shield, threaded fixation cup joints each other between threaded rod and the circular cone support column, the bracing piece is installed to the tip of the inside lower part that promotes the grip block, the inside that the recess was seted up to the lower part activity cup joint in the thing piece is placed to the lower part of bracing piece.
Preferably, the other side of the heating resistor is connected to the circuit, the heating protective shells are respectively movably sleeved outside the heating resistor, and small holes are uniformly formed in the upper parts of the heating protective shells.
Compared with the existing chemical vapor deposition tube furnace experimental device, the invention has the following beneficial effects:
1. this chemical vapor deposition tube furnace experimental apparatus, cup joint the both sides in experiment tube furnace body lower part through rotating the post activity, simultaneously in the upper portion fixedly connected with threaded rod two that rotates the post, and cup joint the threaded rod fixed plate in the upper portion activity of threaded rod two, during the use, the position of threaded rod two is injectd to the device threaded rod fixed plate, it places the board to cup joint the thing piece at the outside screw thread of threaded rod two simultaneously, during the use, rotate the post through rotating, can drive threaded rod two and thing piece and place and carry out the screw motion between the board, make things convenient for place the thing piece and reciprocate, make to play the convenience and place the upper portion of placing the board at the thing piece with the thing piece.
2. This chemical vapor deposition tube furnace experimental apparatus, through place the mid-mounting on board upper portion at the thing piece to individual limiting plate, and the upper portion of limiting plate is sharp-pointed form, make the convenient contact surface that reduces between limiting plate and the thing piece bottom, when increasing the device use simultaneously, conveniently carry out the effect of circulation with gas, rotate the threaded rod of side shield one side simultaneously, make and to drive the side shield back-and-forth movement, make conveniently drive the side shield and carry out the fixed effect of centre gripping to the thing piece, the bracing piece is installed to the inside lower part that promotes the grip block of device simultaneously, wherein the bracing piece activity cup joints the inside at the spout, make to play and prescribe a limit to the position that the device side shield removed.
3. This chemical vapor deposition tube furnace experimental apparatus, through starting the motor on swivel nut rotating device upper portion, make can drive swivel nut rotating device and press from both sides the cover and rotate, make and carry out screw motion between can driving swivel nut rotating device's lower part and the threaded rod one, can drive sealed lid upwards promotion on the device tube furnace for this reason, prevent that the quality that sealed lid on the device tube furnace from appearing is heavier to make and is difficult to open it, make the inside needs of experiment tube furnace body carry out chemical vapor deposition's article and place and the effect of taking.
Drawings
FIG. 1 is a schematic view of a main structure of the present invention;
FIG. 2 is a schematic cross-sectional view of the structure of the present invention;
fig. 3 is a partially enlarged view of the structure of the present invention.
In the figure: 1. a support frame; 2. a side dam; 3. an experimental tube furnace body; 4. a limiting pressure plate; 5. fastening a nut; 6. an upper support plate; 7. a screw sleeve rotating device; 8. a first threaded rod; 9. a sealing cover is arranged on the tube furnace; 10. a jacket; 11. a limiting rod; 12. a gas flow conduit; 13. rotating the column; 14. a second threaded rod; 15. a threaded rod fixing plate; 16. a block placing plate; 17. a conical support column; 18. a side dam; 19. the clamping plate is pushed inside; 20. a limiting plate; 21. heating the protective housing; 22. a heating resistor; 23. and the lower part is provided with an air outlet recovery pipeline.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-3, a chemical vapor deposition tube furnace experimental device comprises a support frame 1, a side baffle 2 is fixedly connected to the upper portion of the support frame 1, an experimental tube furnace body 3 is installed on the lower portion of the inner side of the side baffle 2, a limiting pressure plate 4 is movably sleeved on the middle portion of the upper portion of the side baffle 2, a fastening nut 5 is installed on the upper portion of the limiting pressure plate 4, an upper support plate 6 is fixedly connected to the upper portion of the side baffle 2, a screw sleeve rotating device 7 is installed on the middle portion of the upper support plate 6, a threaded rod I8 is fixedly sleeved on the internal threads of the lower portion of the screw sleeve rotating device 7, a tube furnace upper sealing cover 9 is fixedly connected to the lower portion of the threaded rod I8, a jacket 10 is fixedly connected to one side of the lower portion of the upper support plate 6, a limiting rod 11 is movably sleeved on the inner portion of the lower, rotate two 14 of upper portion fixedly connected with threaded rod of post 13, threaded rod fixed plate 15 has been cup jointed in the upper portion activity of two 14 of threaded rod, the fixed cover of middle part screw of two 14 of threaded rod has connect the thing piece and places board 16, the outside fixedly connected with circular cone support post 17 on board 16 upper portion is placed to the thing piece, the fixed cover of front end screw of circular cone support post 17 has connect side shield 18, the inside grip block 19 that promotes of the lower part fixedly connected with of side shield 18, the middle part fixedly connected with limiting plate 20 of board 16 upper end is placed to the thing piece, the inside fixedly connected with heating protecting sheathing 21 of 3 lower walls of experiment tube furnace body, the inside fixedly connected with heating resistor 22 of heating protecting sheathing 21, the lower part fixedly connected with lower part recovery.
Wherein, the limit pressure plate 4 can rotate three hundred and sixty degrees around the side baffle 2, the baffle is arranged at the inner side of the limit pressure plate 4 and is arranged at the upper part of the experimental tube furnace body 3, the fastening screw cap 5 and the side baffle 2 are fixedly sleeved with each other by screw threads, the four side baffles 2 are arranged at the outer part of the experimental tube furnace body 3 at equal intervals, when in use, the four side baffles 2 are arranged at the positions of the outer part of the experimental tube furnace body 3 of the device at equal intervals, the middle part of the upper part of the side baffle 2 is provided with the limit pressure plate 4, one side baffle moves to the upper part of the experimental tube furnace body 3 by rotating the limit pressure plate 4, rotate fastening nut 5 simultaneously and make and extrude spacing clamp plate 4 through fastening nut 5 for drive spacing clamp plate 4 and fix the position of experiment tube furnace body 3, make the steadiness when playing the increase device use when using.
Wherein, the motor is installed on the upper portion of swivel nut rotating device 7, the motor is fixed at the middle part on last backup pad 6 upper portion, the inside of swivel nut rotating device 7 lower part becomes hollow form, screw has been seted up to the inside of swivel nut rotating device 7, sealed lid 9 and experiment tube furnace body 3's upper portion coincide each other on the tube furnace, when using, through starting the motor on swivel nut rotating device 7 upper portion, make can drive swivel nut rotating device 7 and press from both sides the cover and rotate, make and carry out screw motion between the lower part that can drive swivel nut rotating device 7 and a threaded rod 8, can drive sealed lid 9 upwards promotion on the device tube furnace for this reason, prevent that the quality of sealed lid 9 on the device tube furnace from making it be difficult to open it than heavier, make the effect of placing and taking the article that carries out chemical vapor deposition to the inside needs of experiment tube furnace body 3.
Wherein, experiment tubular furnace body 3's upper portion baffle, one side of spacing clamp plate 4 is fixed between experiment tubular furnace body 3 side shield and the sealed 9 lower parts of lid on the tubular furnace, when using, install the baffle through the upper portion at experiment tubular furnace body 3, pass through 4 centre grippings of spacing clamp plate in one side of baffle during the use, the 4 centre grippings of spacing clamp plate simultaneously are in the sealed lower part of lid 9 on the tubular furnace, make when using, install spacing clamp plate 4 when using, avoid protruding sealed 9 and experiment tubular furnace body 3 on the tubular furnace closed play the effect of reserving the free space, make things convenient for the leakproofness of centre gripping between experiment tubular furnace body 3 and the sealed lid 9 on the tubular furnace simultaneously.
Wherein, the lower part of gag lever post 11 is fixed on the upper portion of the sealed lid 9 on the tubular furnace, four gag lever posts 11 are installed on the upper portion of the sealed lid 9 on the tubular furnace, when using, through fixing the upper portion of the sealed lid 9 on the tubular furnace in the lower part of gag lever post 11, make using, cup joint the upper portion at gag lever post 11 through pressing from both sides the activity of cover 10, the lower part of device gag lever post 11 and the upper portion that presss from both sides cover 10 are fixed respectively on sealed lid 9 on the tubular furnace and last backup pad 6 simultaneously, make when using, accessible gag lever post 11 and clamp cover 10 are injectd the relative active position between sealed lid 9 on the device tubular furnace and last backup pad 6, device gag lever post 11 is when using, play and make things convenient for device sealed lid 9 on the tubular furnace to reciprocate.
Wherein, four gas circulation pipelines 12 are installed on the upper part of the upper sealing cover 9 of the tube furnace, the upper parts of the gas circulation pipelines 12 are respectively connected with different gases, the lower part of the lower gas outlet recovery pipeline 23 is provided with a corresponding gas recovery device, when in use, the upper part of the upper sealing cover 9 of the tube furnace is provided with four gas circulation pipelines 12 which are conveniently and fixedly connected with, simultaneously, the upper part of each different gas circulation pipeline 12 is provided with a different gas conveying device, so that when in use, different gases are conveyed to the inside of the experimental tube furnace body 3 through the gas circulation pipelines 12, and simultaneously, chemical vapor deposition reaction is generated, so that a layer of film is formed on the upper part of the object, thereby playing the role of processing and protecting the object, meanwhile, the lower gas outlet recovery pipeline 23 is installed on the lower part of the experimental tube furnace body 3, the function of conveniently getting rid of the gaseous circulation.
Wherein, the outside of the second threaded rod 14 is provided with threads, two sides inside the experiment tube furnace body 3 are respectively provided with a rotating column 13, the position of the rotating column 13 contacting with the experiment tube furnace body 3 is provided with a sealing gasket, the upper part of a threaded rod fixing plate 15 is fixed inside the experiment tube furnace body 3, when in use, when an object is placed inside the experiment tube furnace body 3, the object needs to be placed at the bottom of the device, when the device is higher, the phenomenon of difficult placement is caused, therefore, the rotating columns 13 are movably sleeved on two sides of the lower part of the experiment tube furnace body 3, the upper part of the rotating columns 13 is fixedly connected with the second threaded rod 14, the upper part of the second threaded rod 14 is movably sleeved with the threaded rod fixing plate 15, when in use, the position of the second threaded rod 14 is limited by the device threaded rod fixing plate 15, and the object block placing plate 16 is fixedly sleeved on the external threads of the, during the use, through rotating the rotation post 13, can drive two 14 threaded rods and the thing piece and place and carry out the screw motion between the board 16 for conveniently place the thing piece board 16 and reciprocate, make play the convenience and place the thing piece on the upper portion that the board 16 was placed to the thing piece.
Wherein, the limiting plate 20 is conical, the middle part of the upper part of the object placing plate 16 is provided with a plurality of limiting plates 20, one side of the side baffle 18 is movably sleeved with a threaded rod, the threaded rod is fixedly sleeved with the conical supporting column 17 through threads, the end part of the lower part of the clamping plate 19 is internally pushed to be provided with a supporting rod, the lower part of the supporting rod is movably sleeved in the lower part of the object placing plate 16 provided with a groove, when in use, the middle part of the upper part of the object placing plate 16 is provided with the limiting plate 20, the upper part of the limiting plate 20 is sharp, so that the contact surface between the limiting plate 20 and the bottom of the object is conveniently reduced, meanwhile, when the device is used, the function of conveniently circulating with gas is increased, the threaded rod on one side of the side baffle 18 is rotated, so that the side baffle 18 can be driven to move, meanwhile, a supporting rod is arranged at the lower part of the pushing clamping plate 19 in the device, and the supporting rod is movably sleeved in the sliding groove, so that the moving position of the side baffle 18 of the device is limited.
Wherein, heating resistor 22's opposite side is connected on the circuit, heating protective housing 21 is the outside of cup jointing at heating resistor 22 respectively in the activity, the aperture has evenly been seted up on heating protective housing 21's upper portion, when using, connect on the circuit through device heating resistor 22, heating protective housing 21 is installed on heating resistor 22's upper portion simultaneously, and the aperture has been seted up on heating protective housing 21's upper portion, make during the use, can keep warm and the effect of heating the inside of experiment tube furnace body 3 through heating resistor 22, make the convenient effect of fusing between 3 inside articles of experiment tube furnace body and other of drive.
The working principle is as follows: when the device is used, the experimental tube furnace body 3 is placed in the middle of the upper part of the support frame 1, when the device is used, the limiting pressure plate 4 is moved to drive a side baffle plate of the limiting pressure plate 4 to be placed on the upper part of the experimental tube furnace body 3, the fastening screw cap 5 is rotated simultaneously, so that the threaded motion can be carried out between the fastening screw cap 5 and the side baffle plate 2, the limiting pressure plate 4 can be driven to limit the position of the experimental tube furnace body 3, the rotating column 13 is rotated simultaneously, the object placing plate 16 is driven to move upwards, the object to be processed is placed on the upper part of the object placing plate 16, the threaded rod on one side of the side baffle plate 18 is rotated, the inner side of the side baffle plate 18 can be pushed to move, the effect of clamping the corner pieces of the object is achieved, the screw sleeve rotating device 7 is started simultaneously, the screw sleeve rotating device 7 and the threaded rod I8 are driven to carry out, the effect of carrying out the coincidence between sealed lid 9 and the experiment tubular furnace body 3 on the tubular furnace is played in the feasible, and the inside at gas circulation pipeline 12 is carried different other simultaneously for carry and mix to the inside of experiment tubular furnace body 3, cover in the mode that carries out chemical vapor deposition on the article surface simultaneously, make play and carry out the effect of additional protective layer to the outside of article.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (9)
1. The utility model provides a chemical vapor deposition tube furnace experimental apparatus, includes support frame (1), its characterized in that: the upper part of the support frame (1) is fixedly connected with a first side baffle (2), the lower part of the inner side of the first side baffle (2) is provided with an experimental tube furnace body (3), the middle part of the upper part of the first side baffle (2) is movably sleeved with a limiting pressing plate (4), the upper part of the limiting pressing plate (4) is provided with a fastening nut (5), the upper part of the first side baffle (2) is fixedly connected with an upper support plate (6), the middle part of the upper support plate (6) is provided with a screw sleeve rotating device (7), the inner thread at the lower part of the screw sleeve rotating device (7) is fixedly sleeved with a threaded rod (8), the lower part of the threaded rod (8) is fixedly connected with an upper sealing cover (9) of the tube furnace, one side of the lower part of the upper support plate (6) is fixedly connected with a jacket (10, the gas circulation pipeline (12) is fixedly connected to one side of the upper portion of the upper sealing cover (9) of the tube furnace, the rotating column (13) is sleeved on one side of the lower portion of the experimental tube furnace body (3) in a movable mode, the threaded rod II (14) is fixedly connected to the upper portion of the rotating column (13), the threaded rod fixing plate (15) is sleeved on the upper portion of the threaded rod II (14), the object block placing plate (16) is sleeved on the middle portion of the threaded rod II (14) in a threaded mode, the conical supporting column (17) is fixedly connected to the outer side of the upper portion of the object block placing plate (16), the second side baffle (18) is fixedly connected to the front end of the conical supporting column (17) in a threaded mode, the inner pushing clamping plate (19) is fixedly connected to the lower portion of the second side baffle (18), the limiting plate (20) is fixedly connected to the middle portion of the upper end of the, the inside fixedly connected with heating resistor (22) of heating protective housing (21), the lower part fixedly connected with lower part recovery pipeline (23) of giving vent to anger of experiment tube furnace body (3) middle part.
2. The chemical vapor deposition tube furnace experimental device of claim 1, wherein: spacing clamp plate (4) rotate three hundred sixty degrees around first side shield (2), the baffle is installed to the inboard of spacing clamp plate (4), the upper portion at experiment tube furnace body (3) is placed to the baffle, mutual thread tightening cup joints between fastening nut (5) and first side shield (2), four first side shield (2) are installed to the equidistant position in outside of experiment tube furnace body (3).
3. The chemical vapor deposition tube furnace experimental device of claim 1, wherein: the upper portion of the screw sleeve rotating device (7) is provided with a motor, the motor is fixed in the middle of the upper portion of the upper supporting plate (6), the inner portion of the lower portion of the screw sleeve rotating device (7) is hollow, threads are formed in the inner portion of the screw sleeve rotating device (7), and the upper sealing cover (9) of the tube furnace and the upper portion of the experimental tube furnace body (3) are overlapped.
4. The chemical vapor deposition tube furnace experimental device of claim 1, wherein: one side of the limiting pressing plate (4) is fixed between a baffle on one side of the experimental tube furnace body (3) and the lower part of the upper sealing cover (9) of the tube furnace.
5. The chemical vapor deposition tube furnace experimental device of claim 1, wherein: the lower part of the limiting rod (11) is fixed on the upper part of the upper sealing cover (9) of the tube furnace, and four limiting rods (11) are installed on the upper part of the upper sealing cover (9) of the tube furnace.
6. The chemical vapor deposition tube furnace experimental device of claim 1, wherein: four gas circulation pipelines (12) are installed on the upper portion of the upper sealing cover (9) of the tube furnace, the upper portions of the gas circulation pipelines (12) are respectively connected with different gases, and the lower portion of the lower gas outlet recovery pipeline (23) is provided with a corresponding gas recovery device.
7. The chemical vapor deposition tube furnace experimental device of claim 1, wherein: the outside of two (14) threaded rods is equipped with the screw thread, rotation post (13) are respectively installed to the inside both sides of experiment tube furnace body (3), rotate the position of post (13) and experiment tube furnace body (3) contact and install sealed the pad, the inside at experiment tube furnace body (3) is fixed on the upper portion of threaded rod fixed plate (15).
8. The chemical vapor deposition tube furnace experimental device of claim 1, wherein: limiting plate (20) become coniform, the thing piece is placed the mid-mounting on board (16) upper portion and is had a plurality of limiting plate (20), the threaded rod has been cup jointed in one side activity of second side shield (18), threaded fixation cup joints each other between threaded rod and circular cone support column (17), the bracing piece is installed to the tip of the inside lower part that promotes grip block (19), the inside that the recess was seted up in thing piece placement board (16) lower part is cup jointed in the lower part activity of bracing piece.
9. The chemical vapor deposition tube furnace experimental device of claim 1, wherein: the other side of the heating resistor (22) is connected to a circuit, the heating protective shell (21) is movably sleeved outside the heating resistor (22), and small holes are uniformly formed in the upper portion of the heating protective shell (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011184500.7A CN112281139B (en) | 2020-10-30 | 2020-10-30 | Chemical vapor deposition tube furnace experimental device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011184500.7A CN112281139B (en) | 2020-10-30 | 2020-10-30 | Chemical vapor deposition tube furnace experimental device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112281139A CN112281139A (en) | 2021-01-29 |
| CN112281139B true CN112281139B (en) | 2021-07-16 |
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| CN202011184500.7A Expired - Fee Related CN112281139B (en) | 2020-10-30 | 2020-10-30 | Chemical vapor deposition tube furnace experimental device |
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Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04299828A (en) * | 1991-03-28 | 1992-10-23 | Shin Etsu Handotai Co Ltd | Semiconductor substrate treatment device |
| JP3348936B2 (en) * | 1993-10-21 | 2002-11-20 | 東京エレクトロン株式会社 | Vertical heat treatment equipment |
| US6799394B2 (en) * | 2002-01-18 | 2004-10-05 | Shen Tsung-Lin | Apparatus for sealing a vacuum chamber |
| CN104342631B (en) * | 2013-07-24 | 2016-12-07 | 广东先导稀材股份有限公司 | Chemical vapor deposition stove |
| CN207793424U (en) * | 2018-01-11 | 2018-08-31 | 深圳丰盛装备股份有限公司 | A kind of double door mechanism of tubular type PECVD |
| CN207904365U (en) * | 2018-02-02 | 2018-09-25 | 深圳丰盛装备股份有限公司 | A kind of fire door regulating mechanism of tubular type PECVD |
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