CN112277178A - Single crystal silicon rod cutting device and cutting method thereof - Google Patents
Single crystal silicon rod cutting device and cutting method thereof Download PDFInfo
- Publication number
- CN112277178A CN112277178A CN201910675340.7A CN201910675340A CN112277178A CN 112277178 A CN112277178 A CN 112277178A CN 201910675340 A CN201910675340 A CN 201910675340A CN 112277178 A CN112277178 A CN 112277178A
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- Prior art keywords
- rod
- single crystal
- cutting
- motor
- crystal silicon
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/042—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with blades or wires mounted in a reciprocating frame
Abstract
The invention discloses a single crystal silicon rod cutting device in the technical field of single crystal silicon, wherein an operating platform is arranged on the right side of the top of a base, and the right side of the top of the operating platform is provided with a conveying motor, and the left side of the top of the operating platform is symmetrically provided with two groups of clamping devices with the same structure, a conveying belt is arranged between the two groups of clamping devices through a rotating shaft lever, the left power end part of the conveying motor penetrates through one group of clamping devices to be connected with the rotating shaft lever conveyed to the upper part, the device can clamp the silicon single crystal rod to be processed through two groups of auxiliary wheels, does not influence the conveying of the silicon single crystal rod on the conveying belt, does not influence the conveying stability while clamping, through the cooperation of the power rollers and the auxiliary rollers which are arranged in a triangular mode, the diamond wire which runs at a high speed has good stability, and through the cooperation of the hydraulic device, the cutting operation of the single crystal silicon rod becomes simple and efficient.
Description
Technical Field
The invention relates to the technical field of monocrystalline silicon, in particular to a monocrystalline silicon rod cutting device and a cutting method thereof.
Background
The monocrystalline silicon wafer is made into electronic components through a series of processes. The silicon single crystal rod is cut on the silicon single crystal rod which is subjected to barreling and chamfering; and the single crystal silicon rod is formed by shaping or pulling in a hearth through a zone melting or czochralski process. The silicon single crystal rod is a silicon single crystal rod with silicon atoms rearranged according to the lattice arrangement direction of seed crystals, the silicon single crystal rod needs to be cut off in the processing process, the existing cutting-off device is unstable in operation, and the silicon single crystal rod cannot be well stabilized and conveyed, so that the cutting-off operation is complicated, and therefore, the silicon single crystal rod cutting-off method is provided.
Disclosure of Invention
The present invention is directed to a single crystal silicon rod cutting device and a cutting method thereof, which solve the problems of the background art.
In order to achieve the purpose, the invention provides the following technical scheme: a cutting device for a silicon single crystal rod comprises a base, wherein supporting legs are arranged at four corners of the bottom of the base, an operation table is arranged on the right side of the top of the base, a conveying motor is arranged on the right side of the top of the operation table, two groups of clamping devices with the same structure are symmetrically arranged on the left side of the top of the operation table, a conveying belt is arranged between the two groups of clamping devices through a rotating shaft rod, the power end part of the left side of the conveying motor penetrates through one group of the clamping devices to be connected with the rotating shaft rod conveyed to the upper side, a cutting frame is arranged right above the two groups of the clamping devices, auxiliary rollers are arranged on the left side and the right side of the bottom of the cutting frame, a cutting motor is arranged at the top of the cutting frame, an adjusting device matched with the cutting motor is arranged on the inner wall of the bottom of the cutting frame, a power, and the other end of connecting rod and the outer wall fixed connection of connecting plate, the tip at hydraulic telescoping rod of hydraulic means is installed at the top of connecting plate, and hydraulic means installs at the top of pillar, and the fastening bolt is installed at the top of pillar.
Preferably, adjusting device includes the screw rod, the top of screw rod is connected with the motor platform through the carousel, and the top of motor platform is connected with the bottom of cutting motor, the spiro union has the knob on the bottom outer wall of screw rod, and the top of knob is provided with the spacing collar, and the spacing collar through with the cutting frame on the spacing groove cooperation of seting up be connected.
Preferably, the clamping device comprises a vertical rod, a vertical shaft is installed at the top of the vertical rod, and an auxiliary wheel is adjusted on the outer wall of the vertical shaft.
Preferably, the outer walls of the two sets of auxiliary rollers and the outer walls of the power rollers are sleeved with diamond wires, and the two sets of auxiliary rollers and the power rollers are arranged on the same axis and are arranged in an equilateral triangle shape.
Preferably, the inner wall of the auxiliary wheel is connected with the vertical shaft through a rotating bearing, and the outer wall of the auxiliary wheel is sleeved with a rubber ring.
A method for cutting off a single crystal silicon rod includes the steps of:
s1: checking whether the connection of each part of the device is stable and whether each part can normally run, arranging the silicon single crystal rod to be processed after checking, putting the silicon single crystal rod above the conveyor belt, and fixing the silicon single crystal rod through two groups of clamping devices so that the outer walls of two sides of the silicon single crystal rod are connected with the auxiliary wheels;
s2: through external power source start-up conveying motor, conveying motor work drives the power axostylus axostyle and rotates, through the cooperation of the rotation axostylus axostyle of conveyer belt both sides for the conveyer belt operation drives the single crystal silicon rod and carries:
s3: when the work of second step was opened, the cutting motor passed through external power source and started, drove the power roller and rotate, with the help of the same auxiliary roller of two sets of structures, drove the buddha's warrior attendant line and tell the operation:
s4: when the third step of work is started, the hydraulic device works to drive the hydraulic telescopic rod to work, and then the connecting plate drives the cutting frame to do reciprocating motion in the vertical direction through the connecting rod:
s5: in the process of simultaneously operating the second step, the third step and the fourth step of cutting work, the rotating speed of the motor and the working frequency of the hydraulic device are adjusted, and the operating diamond wire is told to cut off the single crystal silicon rod to be processed.
Compared with the prior art, the invention has the beneficial effects that: the device can carry out the centre gripping operation through two sets of auxiliary wheels to the single crystal silicon rod of treating processing to can not influence the transportation of single crystal silicon rod on the conveyer belt, can not influence the stability of transporting when pressing from both sides tightly, through the cooperation of the power roller of triangle-shaped range and auxiliary roller, also make high-speed moving buddha's warrior attendant line have fine stability, through hydraulic means's cooperation, make the operation of cutting of single crystal silicon rod become simple high-efficient.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the adjusting device according to the present invention;
FIG. 3 is a schematic view of a clamping device according to the present invention.
In the figure: the device comprises a base 1, a support leg 2, an adjusting device 3, a screw rod 31, a knob 32, a limiting ring 33, a motor table 34, a clamping device 4, a vertical rod 41, a vertical shaft 42, an auxiliary wheel 43, a conveying motor 5, a conveying belt 6, a cutting frame 7, an auxiliary roller 8, a cutting motor 9, a power roller 10, a connecting rod 11, a connecting plate 12, a hydraulic device 13, a fastening bolt 14 and a support column 15.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides a technical solution: a single crystal silicon rod cut-off device comprises a base 1, wherein supporting legs 2 are arranged at four corners of the bottom of the base 1, an operation table is arranged on the right side of the top of the base 1, a conveying motor 5 is arranged on the right side of the top of the operation table, two groups of clamping devices 4 with the same structure are symmetrically arranged on the left side of the top of the operation table, a conveying belt 6 is arranged between the two groups of clamping devices 4 through a rotating shaft rod, the left power end portion of the conveying motor 5 penetrates through one group of clamping devices 4 to be connected with the rotating shaft rod conveyed to the conveying belt 6, a cutting frame 7 is arranged right above the two groups of clamping devices 4, auxiliary rollers 8 are arranged on the left side and the right side of the bottom of the cutting frame 7, a cutting motor 9 is arranged at the top of the cutting frame 7, an adjusting device 3 matched with the cutting motor 9 is arranged on the inner wall of the bottom of the cutting frame, install connecting rod 11 on the left side outer wall of cutting frame 7, and the outer wall fixed connection of the other end of connecting rod 11 and connecting plate 12, the tip at hydraulic telescoping rod of hydraulic means 13 is installed at the top of connecting plate 12, and hydraulic means 13 installs at the top of pillar 15, and fastening bolt 14 is installed at the top of pillar 15.
Wherein, the adjusting device 3 comprises a screw rod 31, the top of the screw rod 31 is connected with a motor platform 34 through a turntable, the top of the motor platform 34 is connected with the bottom of a cutting motor 9, the outer wall of the bottom of the screw rod 31 is screwed with a knob 32, the top of the knob 32 is provided with a spacing ring 33, the spacing ring 33 is matched and connected with a spacing groove arranged on the inner wall of a cutting frame 7, the clamping device 4 comprises a vertical rod 41, the top of the vertical rod 41 is provided with a vertical shaft 42, the outer wall of the vertical shaft 42 is adjusted with an auxiliary wheel 43, the outer walls of the two groups of auxiliary rollers 8 and the power roller 10 are sleeved with diamond wires, the two groups of auxiliary rollers 8 and the power roller 10 are both arranged on the same axis and are arranged in an equilateral triangle shape, the inner wall of the auxiliary wheel 43 is connected with the vertical shaft 42 through a rotating bearing, and the outer wall of the auxiliary wheel 43,
a method for cutting off a single crystal silicon rod includes the steps of:
s1: whether the connection of each part of the checking device is stable or not and whether each part can normally run or not are checked, after the checking, the silicon single crystal rod to be processed is arranged and placed above the conveyor belt 6, and the silicon single crystal rod is fixed through the two groups of clamping devices 4, so that the outer walls of the two sides of the silicon single crystal rod are connected with the auxiliary wheels 43;
s2: through external power source start conveyor motor 5, conveyor motor 5 works, drives the rotation of power axostylus axostyle, through the cooperation of the rotation axostylus axostyle of 6 both sides of conveyer belt for 6 operations of conveyer belt drive the single crystal silicon rod and carry:
s3: when work of second step was opened, cutting motor 9 passed through external power source and started, drove power roller 10 and rotate, with the help of the same auxiliary roller 8 of two sets of structures, drove the buddha's warrior attendant line and tell the operation:
s4: when the third step of work is started, the hydraulic device 13 works to drive the hydraulic telescopic rod to work, and then the connecting plate 12 drives the cutting frame 7 to do reciprocating motion in the vertical direction through the connecting rod 11:
s5: in the process of simultaneously operating the second step, the third step and the fourth step of the cutting operation, the rotating speed of the motor and the working frequency of the hydraulic device 13 are adjusted, and the running diamond wire is told to cut off the single crystal silicon rod to be processed.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a single crystal silicon rod cuts device, includes base (1), the four corners department of the bottom of base (1) all is provided with stabilizer blade (2), its characterized in that: an operation table is arranged on the right side of the top of the base (1), a conveying motor (5) is installed on the right side of the top of the operation table, two groups of clamping devices (4) with the same structure are symmetrically arranged on the left side of the top of the operation table, a conveying belt (6) is arranged between the two groups of clamping devices (4) through a rotating shaft rod, the left power end portion of the conveying motor (5) penetrates through one group of clamping devices (4) to be connected with the rotating shaft rod conveyed to the clamping devices (6), a cutting frame (7) is arranged right above the two groups of clamping devices (4), auxiliary rollers (8) are installed on the left side and the right side of the bottom of the cutting frame (7), a cutting motor (9) is installed on the top of the cutting frame (7), an adjusting device (3) matched with the cutting motor (9) is installed on the inner wall of the bottom of the cutting frame (7), and power rollers (10), install connecting rod (11) on the left side outer wall of cutting frame (7), and the outer wall fixed connection of the other end of connecting rod (11) and connecting plate (12), the tip at hydraulic telescoping rod of hydraulic means (13) is installed at the top of connecting plate (12), and hydraulic means (13) install the top at pillar (15), and fastening bolt (14) are installed at the top of pillar (15).
2. The single crystal silicon rod slicing apparatus as set forth in claim 1, wherein: adjusting device (3) include screw rod (31), there is motor platform (34) at the top of screw rod (31) through the carousel connection, and the top of motor platform (34) is connected with the bottom of cutting motor (9), the spiro union has knob (32) on the bottom outer wall of screw rod (31), and the top of knob (32) is provided with spacing collar (33), and spacing collar (33) through with the cutting frame (7) on the spacing groove cooperation of seting up be connected.
3. The single crystal silicon rod slicing apparatus as set forth in claim 1, wherein: the clamping device (4) comprises a vertical rod (41), a vertical shaft (42) is installed at the top of the vertical rod (41), and an auxiliary wheel (43) is adjusted on the outer wall of the vertical shaft (42).
4. The single crystal silicon rod slicing apparatus as set forth in claim 1, wherein: the outer walls of the two groups of auxiliary rollers (8) and the power roller (10) are sleeved with diamond wires, and the two groups of auxiliary rollers (8) and the power roller (10) are arranged on the same axis and are arranged in an equilateral triangle shape.
5. The single crystal silicon rod slicing apparatus as set forth in claim 3, wherein: the inner wall of the auxiliary wheel (43) is connected with the vertical shaft (42) through a rotating bearing, and the outer wall of the auxiliary wheel (43) is sleeved with a rubber ring.
6. A method for cutting off a single crystal silicon rod is characterized in that: the method for cutting off the silicon single crystal rod comprises the following steps:
s1: whether the connection of each part of the checking device is stable or not and whether each part can normally run or not are checked, after the checking, the silicon single crystal rod to be processed is arranged and placed above the conveying belt (6), and the silicon single crystal rod is fixed through the two groups of clamping devices (4), so that the outer walls of the two sides of the silicon single crystal rod are connected with the auxiliary wheels (43);
s2: through external power source start conveyor motor (5), conveyor motor (5) work drives the power axostylus axostyle and rotates, through the cooperation of the rotation axostylus axostyle of conveyer belt (6) both sides for conveyer belt (6) operation drives the single crystal silicon rod and carries:
s3: when work of second step was opened, cutting motor (9) started through external power source, drove power roller (10) and rotate, with the help of two sets of auxiliary rollers (8) that the structure is the same, drove the buddha's warrior attendant line and tell the operation:
s4: when the third step of work is opened, the hydraulic device (13) works to drive the hydraulic telescopic rod to work, and then the connecting plate (12) drives the cutting frame (7) to do reciprocating motion in the vertical direction through the connecting rod (11):
s5: in the process of simultaneously operating the second step, the third step and the fourth step of cutting work, the rotating speed of a motor and the working frequency of a hydraulic device (13) are adjusted, and the running diamond wire is told to cut off the silicon single crystal rod to be processed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910675340.7A CN112277178A (en) | 2019-07-25 | 2019-07-25 | Single crystal silicon rod cutting device and cutting method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910675340.7A CN112277178A (en) | 2019-07-25 | 2019-07-25 | Single crystal silicon rod cutting device and cutting method thereof |
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| Publication Number | Publication Date |
|---|---|
| CN112277178A true CN112277178A (en) | 2021-01-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910675340.7A Pending CN112277178A (en) | 2019-07-25 | 2019-07-25 | Single crystal silicon rod cutting device and cutting method thereof |
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| Country | Link |
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| CN (1) | CN112277178A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114654606A (en) * | 2022-03-08 | 2022-06-24 | 扬州方通电子材料科技有限公司 | Monocrystalline silicon rod cutting device based on monocrystalline silicon piece production and use method |
| CN115635606A (en) * | 2022-11-18 | 2023-01-24 | 浙江晶盛机电股份有限公司 | Crystal cut-off device, crystal growth equipment and crystal cut-off method |
-
2019
- 2019-07-25 CN CN201910675340.7A patent/CN112277178A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114654606A (en) * | 2022-03-08 | 2022-06-24 | 扬州方通电子材料科技有限公司 | Monocrystalline silicon rod cutting device based on monocrystalline silicon piece production and use method |
| CN115635606A (en) * | 2022-11-18 | 2023-01-24 | 浙江晶盛机电股份有限公司 | Crystal cut-off device, crystal growth equipment and crystal cut-off method |
| CN115635606B (en) * | 2022-11-18 | 2023-03-10 | 浙江晶盛机电股份有限公司 | Crystal cut-off device, crystal growth equipment and crystal cut-off method |
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Application publication date: 20210129 |