CN112269261A - Manufacturing process of high-speed reciprocating rotary galvanometer - Google Patents
Manufacturing process of high-speed reciprocating rotary galvanometer Download PDFInfo
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- CN112269261A CN112269261A CN202011060552.3A CN202011060552A CN112269261A CN 112269261 A CN112269261 A CN 112269261A CN 202011060552 A CN202011060552 A CN 202011060552A CN 112269261 A CN112269261 A CN 112269261A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses a manufacturing process of a high-speed reciprocating rotary galvanometer, which comprises the following three parts: a silicon lens, a bracket and a fixed chuck; the process comprises the following steps of manufacturing a silicon lens, grinding a single silicon wafer into a sheet shape, wherein the sheet shape has balanced mass along an axis on the sheet; step two, manufacturing a bracket, namely manufacturing a tree-shaped bracket on one shaping surface; thirdly, attaching the spectacle frame, namely adhering and fixing the support on the back surface of the silicon lens by using glue; checking the mass balance, namely checking the mass balance of the two sides of the spectacle frame structure along the axis direction; and fifthly, installing and fixing a chuck, wherein the chuck is a metal chuck, and one end of the chuck clamps and fixes the silicon lens and the bracket together from one end of the axis. The manufacturing process of the high-speed reciprocating rotary galvanometer is low in process cost, and is used for replacing the expensive traditional galvanometer lens under the condition that the performance of the galvanometer lens basically meets the technical requirements.
Description
Technical Field
The invention belongs to the technical field of laser processing equipment, and particularly relates to a manufacturing process of a high-speed reciprocating rotary galvanometer used in laser marking/cutting/engraving equipment.
Background
Laser-based application devices are widely used in various industries. At present, the equipment mainly comprises equipment for marking, cutting, carving and the like on a target object by utilizing laser, the equipment mainly utilizes the highly concentrated energy attribute of the laser to burn the surface of the object, and the process aim is achieved by controlling the laser energy and the processing time.
The essential core component of the equipment is a galvanometer cavity, and the core component is mainly responsible for changing the direction of laser, so that the laser is accurately emitted onto a specific coordinate of a target object, and the direction of the laser is changed rapidly, so that a specific processing shape/pattern is printed on the target object. It can be seen that processing speed has been a very critical factor affecting production efficiency. The vibrating lens cavity is at least provided with two vibrating lens pieces which are used for cooperatively changing the ejection direction of laser, the vibrating lens pieces are driven by a motor to rotate, and the vibrating lens pieces need to rotate at a high speed to improve the processing efficiency. The requirement on the rotating speed of the current galvanometer is high, and the rotating speed of the current galvanometer usually reaches more than thousands of revolutions per minute; to increase the processing speed, the rotational speed of the galvanometer lens must be increased, but the higher the rotational speed of the galvanometer lens, the higher the requirements for the lens itself and other parts of the device such as the motor are increased.
For example, CN201420685767.8 in the prior art discloses an anti-shake structure of a laser marking galvanometer lens and a galvanometer cavity containing the same, the requirement of anti-shake of the galvanometer lens vibrating at high speed is very high under the condition of high-speed rotation. The vibrating lens vibrating at high speed has slight drift/vibration at the end, however, even slight drift/vibration is avoided as much as possible under the requirement of high-precision laser emitting coordinate direction because the emitting direction is not accurate. To solve this problem in this prior art, a structure provided with a bearing at the end of the galvanometer defines the jitter of the end. The practical problem is improved to a certain extent, but the requirement on the mounting precision of the tail end is higher, and the industrial mass production is difficult to meet.
The vibrating mirror in the prior art is generally as mentioned in the prior art (attached figures), the vibrating mirror is a whole, the SiC material is used as a mirror main body, the silicon carbide has the characteristics of excellent normal-temperature mechanical property, high bending strength, excellent oxidation resistance, excellent corrosion resistance, high abrasion resistance and low friction coefficient, and meanwhile, the silicon carbide ceramic has high heat conduction capability, is hard and light in texture, so that the vibrating mirror has small inertia and high swing speed, and is very suitable for being applied to a vector scanning device of high-temperature and high-frequency vibration, such as a vibrating mirror. However, the manufacturing process of the silicon carbide vibrating mirror is precise, the technical requirement is very high, the research and development investment cost is high, the silicon carbide vibrating mirror is mainly mastered and produced by foreign manufacturers at present, the vibrating mirror is not produced by manufacturers at home, German RAYLASE vibrating mirrors, German SCANLAB vibrating mirrors and American CIT vibrating mirrors are commonly used internationally, the price is high, the maintenance is difficult, the silicon carbide vibrating mirror is damaged in the using process, a brand-new vibrating mirror needs to be replaced very probably, and the maintenance cost is high. The defects and advantages of the existing vibrating lens are obvious, the vibrating lens with the SiC main body is very expensive, the current market price is one lens in tens of thousands of RMB, and the process is mainly mastered abroad, so that the whole price of the laser marking/cutting/carving equipment at the terminal is high, and the popularization and the application of the equipment are greatly hindered. Although the price of some low-end laser marking/cutting/carving equipment in the current market is relatively low, inferior substitutes are mainly adopted for the vibrating lens, the mirror surface effect is poor, the anti-shake performance is poor, the quality is poor, the service life is short, and frequent replacement and maintenance are needed.
Still like prior art CN201810189260.6 discloses a novel mirror that shakes for laser beam machining equipment, just to above problem design a shake the mirror main part by the novel lens that shakes that aluminium or aluminum alloy made, the cost of this lens is within one thousand RMB, and is the dozen of times of above-mentioned tradition lens price that shakes, and this lens has firstly solved problem with high costs, and secondly has still solved the problem of anti-shake, and has still solved the problem of rotation inertia (the quality is light, inertia is low, does benefit to and improves rotational speed and reaction), especially is suitable for the popularization and application in laser marking/cutting/sculpture field. However, since the surface of the aluminum material is rough and easy to wear, after the surface is electroplated, the effect of the optical mirror surface is slightly worse than that of the traditional vibrating mirror, and the problem needs to be solved by technical research to perfectly replace the traditional vibrating mirror so as to solve the problem of high price.
The biggest dilemma in the prior art is that the price of a galvanometer made of SiC material is high, and other suitable alternative schemes cannot be found for a while, so that the problem influences the large-scale popularization and application of high-end laser equipment.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a manufacturing process of a high-speed reciprocating rotary galvanometer and the galvanometer manufactured by the process, which are used for replacing the traditional silicon carbide galvanometer with high price under the condition that the performance of the galvanometer basically meets the technical requirements.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows: a manufacturing process of a high-speed reciprocating rotary galvanometer comprises the following three parts: a silicon lens, a bracket and a fixed chuck; the process comprises the following steps of,
step A, manufacturing a silicon lens, namely grinding a single silicon wafer into a sheet shape, wherein the sheet shape has balanced mass along an axis on the sheet; polishing one surface of the elemental silicon wafer and plating a film to form a laser reflection surface;
b, manufacturing a bracket, namely manufacturing the bracket on one shaping surface, wherein the bracket is provided with a main trunk along the axis direction and branch trunks extending to the left side and the right side from the main trunk;
c, attaching the spectacle frame, namely adhering and fixing the support on the back surface of the silicon lens by using glue, and adhering and fixing the support along the axis direction;
d, checking mass balance, namely checking the mass balance of two sides of the spectacle frame structure along the axis direction, and if the mass balance is not balanced, cutting a part along the edge of one side with more mass;
and E, installing a fixed chuck, wherein the chuck is a metal chuck, one end of the chuck clamps and fixes the silicon lens and the bracket together from one end of the axis, and the other end of the chuck is used for being connected with the output end of the rotating motor, so that the axis of the mirror bracket structure is aligned with the rotating axis of the rotating motor.
Preferably, the material of the bracket is simple substance silicon, titanium alloy, aluminum alloy, glass, ceramic or quartz.
Preferably, the glue is AB glue, ceramic glue or metal glue, and can be cured by heating.
Preferably, the material of the chuck is aluminum or aluminum alloy.
Preferably, the clip includes a finger-like extension which extends snugly along the back of the bracket.
Preferably, glue is filled between the joint gap of the chuck and the mirror frame structure.
Preferably, the back surface of the silicon lens is planar or non-planar, e.g. high in the middle and low on both sides along its axis.
Preferably, the support is a hollow support or a hollow support.
Preferably, the device also comprises a plurality of auxiliary supports which are sequentially stacked from the back of the support, distributed in a plane or distributed in a combined manner.
Preferably, the secondary stent extends along the trunk of the stent, or along both the trunk and the branches of the stent.
Preferably, the number of the brackets is multiple, and the plurality of brackets are sequentially stacked, distributed in a plane or distributed in a combined way from the back surface of the lens; at least one of the plurality of stents is a non-fixed-shape stent having a main stem and a branch stem.
Preferably, the support at the upper layer is smaller than or equal to the support at the lower layer adjacent to the lens.
Compared with the prior art, the vibrating lens and the manufacturing process thereof at least have the following advantages:
1. the raw material cost is reduced. The lens and the support of the vibrating mirror are formed by bonding two independent parts, the lens of the vibrating mirror is made of silicon chips, the support can be made of silicon chips, titanium alloy, aluminum alloy, zirconia (ceramic), glass, quartz and the like, the support and the vibrating mirror can be bonded by AB glue, ceramic glue, metal glue and other glue, and the cost of raw materials is greatly reduced.
2. The requirements on the production process are reduced. The manufacturing process of the silicon wafer is lower in difficulty than that of silicon carbide, a CNC (computer numerical control) machine tool machining mode can be adopted, and compared with a high-temperature sintering process of the silicon carbide, the CNC machining precision is high, stable machining quality is achieved, the precision is high, the rigidity is high, the production rate is high, the cost is lower, and the cost can be reduced by one dozen times of that of a silicon carbide vibrating mirror.
3. The advantages of fast swing and small inertia of the galvanometer are ensured. The silicon wafer has lower density than silicon carbide, the surface mirror effect is almost the same, but the rigidity and toughness of the silicon wafer are inferior to those of the silicon carbide.
4. The stability of the galvanometer is ensured. The silicon wafer is polished into a thinner lens, so that the weight is reduced, and the high-speed swing of the galvanometer is ensured; the bracket is fixed at the back position without fixing the shape of the bracket, so that the fixing effect is achieved. When the vibrating mirror vibrates, the support on the back can form a supporting force to the lens, so that the firmness of the whole vibrating mirror is ensured, the stability of the vibrating mirror is enhanced, the stability is not easy to break, the stable effect is not worse than that of a silicon carbide vibrating mirror, and the overall performance is not lower than that of the silicon carbide vibrating mirror.
5. The maintenance difficulty and the cost are reduced. The novel design process for bonding the lens and the bracket facilitates later maintenance and repair, and reduces difficulty and cost. The silicon chip lens is damaged, the lens can be replaced, the support is damaged, the support can be replaced, and the maintenance cost is further reduced compared with that of the silicon carbide vibrating mirror.
Drawings
FIG. 1 is a flow chart of the vibrating mirror manufacturing process of the present invention;
FIG. 2 is a block diagram of a galvanometer made by the galvanometer manufacturing process of the present invention;
FIG. 3 is an exploded view of a structure of a galvanometer manufactured by the galvanometer manufacturing process of the present invention
FIG. 4 is another block diagram of a galvanometer made by the galvanometer manufacturing process of the present invention;
FIG. 5 is an exploded view of an alternative construction of a galvanometer made by the galvanometer manufacturing process of the present invention;
Detailed Description
In order to facilitate an understanding of the invention, the invention will be described in more detail below with reference to the accompanying drawings.
As shown in fig. 1 to 3, the present invention provides a process for manufacturing a high-speed reciprocating mirror, wherein the mirror is composed of the following three parts: the device comprises a silicon lens 1, a bracket 2 and a fixed chuck 3; the process comprises the following steps of,
step A, manufacturing a silicon lens 1, grinding a single silicon wafer into a sheet shape, wherein the sheet shape has a mass which is basically balanced along the left and right sides of an axis on the sheet; polishing one surface of the elemental silicon wafer and carrying out metalized surface electroplating to form a mirror surface;
step B, manufacturing a bracket 2, namely manufacturing a tree-shaped bracket on one shaping surface, wherein the bracket is provided with a main trunk along the axial direction and branch trunks 22 extending from the main trunk 21 to the left side and the right side;
c, attaching the spectacle frame, namely adhering and fixing the support 2 on the back of the silicon lens 1 by using glue, and adhering and fixing the support along the axis direction;
d, checking mass balance, namely checking the mass balance of two sides of the spectacle frame structure along the axis direction, and if the mass balance is not balanced, cutting a part along the edge of one side with more mass;
and E, installing a fixed chuck 3, wherein the chuck is a metal chuck, one end of the chuck clamps and fixes the silicon lens and the bracket together from one end of the axis, and the other end of the chuck is used for being connected with the output end of the rotating motor, so that the axis of the mirror bracket structure is aligned with the rotating axis of the rotating motor.
In the above steps, the order of steps A, B may be equally interchanged.
In the manufacturing process, the material of the bracket is preferably simple substance Si, titanium alloy, aluminum alloy, glass, quartz or zirconia.
The glue is AB glue, metal glue or ceramic glue, the lens and the bracket are heated and solidified after being mutually bonded, and other glues can also be adopted.
The chuck is made of aluminum alloy and comprises a finger-shaped extending bulge which is attached and extends along the back surface of the bracket; glue is filled between the joint gap of the chuck and the spectacle frame structure.
In this embodiment, the back surface of the single crystal Si mirror plate is planar. In other embodiments, the lens may be higher in the middle of its axis and lower on both sides.
The support is a hollow support or a hollow support.
In this embodiment, the number of the brackets is 1.
In another embodiment, the stent may further have a plurality of stents, at least one of which is a secondary stent, as shown in fig. 4 and 5.
It comprises a silicon lens 11, a tree-shaped bracket 21a, a secondary bracket 21b and a fixed chuck 31; the tree-shaped support 21a and the auxiliary support 21b are sequentially overlapped from the back of the lens; the tree support 21a includes a trunk 211 and branches 212.
The sub-bracket 21b extends along the trunk 211 of the tree-shaped bracket 21 a.
Compared with the prior art, the vibrating lens and the manufacturing process thereof at least have the following advantages:
1. the raw material cost is reduced. The lens and the support of the vibrating mirror are formed by bonding two independent parts, the lens of the vibrating mirror is made of silicon chips, the support can be made of silicon chips, titanium alloy, aluminum alloy, zirconia (ceramic), glass, quartz and the like, the support and the vibrating mirror can be bonded by AB glue, ceramic glue and other glue, and the cost of raw materials is greatly reduced.
2. The requirements on the production process are reduced. The manufacturing process of the silicon wafer is lower in difficulty than that of silicon carbide, a CNC (computer numerical control) machine tool machining mode can be adopted, and compared with a high-temperature sintering process of the silicon carbide, the CNC machining precision is high, stable machining quality is achieved, the precision is high, the rigidity is high, the production rate is high, the cost is lower, and the cost can be reduced by one dozen times of that of a silicon carbide vibrating mirror.
3. The advantages of fast swing and small inertia of the galvanometer are ensured. The silicon wafer has lower density than silicon carbide, the surface mirror effect is almost the same, but the rigidity and toughness of the silicon wafer are inferior to those of the silicon carbide.
4. The stability of the galvanometer is ensured. The silicon wafer is polished into a thinner lens, so that the weight is reduced, and the high-speed swing of the galvanometer is ensured; the bracket is fixed at the back position without fixing the shape of the bracket, so that the fixing effect is achieved. When the vibrating mirror vibrates, the support on the back can form a supporting force to the lens, so that the firmness of the whole vibrating mirror is ensured, the stability of the vibrating mirror is enhanced, the stability is not easy to break, the stable effect is not worse than that of a silicon carbide vibrating mirror, and the overall performance is not lower than that of the silicon carbide vibrating mirror.
5. The maintenance difficulty and the cost are reduced. The novel design process for bonding the lens and the bracket facilitates later maintenance and repair, and reduces difficulty and cost. The silicon chip lens is damaged, the lens can be replaced, the support is damaged, the support can be replaced, and the maintenance cost is further reduced compared with that of the silicon carbide vibrating mirror.
The above description is only an embodiment of the present application, but the scope of the present application is not limited thereto, and any changes or substitutions within the technical scope of the present disclosure should be covered by the scope of the present application. Therefore, the scope of the present application shall be determined by the scope of the appended claims, and variations and modifications of the above embodiments may be made by those skilled in the art based on the disclosure and teaching of the above description. Therefore, the present invention is not limited to the specific embodiments disclosed and described above, and some modifications and variations of the present invention should fall within the scope of the claims of the present invention. Furthermore, although specific terms are employed herein, they are used in a generic and descriptive sense only and not for purposes of limitation.
Claims (10)
1. The manufacturing process of the high-speed reciprocating rotary galvanometer is characterized by comprising the following three parts: a silicon lens, a bracket and a fixed chuck; the process comprises the following steps of,
step A, manufacturing a silicon lens, namely grinding a single silicon wafer into a sheet shape, wherein the sheet shape has a mass which is basically balanced along the left and right sides of an axis on the sheet; polishing one surface of the elemental silicon wafer and plating a film to form a laser reflection surface;
b, manufacturing a bracket, namely manufacturing the bracket on one shaping surface, wherein the bracket is provided with a main trunk along the axis direction and branch trunks extending to the left side and the right side from the main trunk;
c, attaching the spectacle frame, namely adhering and fixing the support on the back surface of the silicon lens by using glue, and adhering and fixing the support along the axis direction;
d, checking mass balance, namely checking the mass balance of two sides of the spectacle frame structure along the axis direction, and if the mass balance is not balanced, cutting a part along the edge of one side with more mass;
and E, installing a fixed chuck, wherein the chuck is a metal chuck, one end of the chuck clamps and fixes the silicon lens and the bracket together from one end of the axis, and the other end of the chuck is used for being connected with the output end of the rotating motor, so that the axis of the mirror bracket structure is aligned with the rotating axis of the rotating motor.
2. The manufacturing process according to claim 1, wherein the material of the support is elemental silicon, titanium alloy, aluminum alloy, glass, ceramic or quartz.
3. The manufacturing process of claim 1, wherein the glue is AB glue, ceramic glue or metal glue.
4. The manufacturing process of claim 1, wherein the material of the collet is aluminum or an aluminum alloy.
5. A process according to claim 1 or 4, wherein the collet comprises a finger-like extension which extends snugly along the rear face of the support.
6. A process according to claim 1 or 4, wherein the joint gap between the clip and the frame structure is filled with glue.
7. The manufacturing process of claim 1, wherein the back surface of the silicon lens is planar or non-planar.
8. The manufacturing process according to claim 1, wherein the scaffold is a hollow scaffold or a hollowed scaffold.
9. The manufacturing process of claim 1, further comprising a plurality of secondary supports, wherein the plurality of secondary supports are sequentially stacked, distributed in a plane or distributed in a combined manner from the back of the support.
10. The manufacturing process of claim 9, wherein the secondary stent extends along the trunk of the stent, or along both the trunk and the limbs of the stent.
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| CN202011060552.3A CN112269261A (en) | 2020-09-30 | 2020-09-30 | Manufacturing process of high-speed reciprocating rotary galvanometer |
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| CN202011060552.3A CN112269261A (en) | 2020-09-30 | 2020-09-30 | Manufacturing process of high-speed reciprocating rotary galvanometer |
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