CN112255435B

CN112255435B - Buffer structure for amplitude modulation probe card

Info

Publication number: CN112255435B
Application number: CN202011081015.7A
Authority: CN
Inventors: 王艾琳; 赵梁玉
Original assignee: Maxone Semiconductor Suzhou Co Ltd
Current assignee: Strong Half Conductor Suzhou Co ltd
Priority date: 2020-10-11
Filing date: 2020-10-11
Publication date: 2021-05-11
Anticipated expiration: 2040-10-11
Also published as: CN113109605B; CN113109604A; CN112255435A; CN113109604B; CN113109605A

Abstract

The invention belongs to the technical field of probe cards, and particularly relates to a buffer structure for an amplitude modulation probe card, wherein the buffer structure is arranged on a driving structure of the amplitude modulation probe card, and the driving structure comprises: the device comprises a driving cylinder, a limiting cylinder, a driving cylinder sliding block and a limiting cylinder sliding block; the buffer structure includes: the buffer device comprises a buffer supporting plate and buffer pads, wherein a plurality of buffer pads are arranged on the buffer supporting plate, and a driving cylinder and a limiting cylinder are arranged on the buffer pads; the buffer structure further includes: the device comprises a vertical plate, a buffer cylinder, a piston block ejector rod, a guide rod sliding cylinder, a sliding cylinder spring, a sliding cylinder push rod, a sliding cylinder lock and a sliding cylinder lock spring; through buffering layer board and cushion, will drive actuating cylinder and spacing cylinder and probe card and keep apart, reduce vibrations, will drive to set up buffer structure between actuating cylinder and drive slider, spacing cylinder and the spacing slider simultaneously, reduce the vibrations that the cylinder produced when stretching out.

Description

Buffer structure for amplitude modulation probe card

Technical Field

The invention belongs to the technical field of probe cards, and particularly relates to a buffer structure for an amplitude modulation probe card.

Background

With the development of the semiconductor industry, more and more electronic devices are connected to a semiconductor wafer, and in the manufacturing process of a semiconductor device, a probe is in contact with a metal end on the semiconductor wafer to realize temporary electrical connection, so that an electrical signal of a tester is transmitted to the semiconductor device through the probe, and the tester detects the electronic device on the semiconductor wafer through the returned electrical signal.

The probe card is used for connecting a link between a semiconductor wafer and a tester, and a plurality of probes are integrated on the probe card, so that the plurality of probes are simultaneously contacted with a plurality of semiconductor devices on a semiconductor chip, and the detection efficiency is improved.

In the production process of a semiconductor device, a large number of circuit contacts in one or more devices need to be accessed for many times, a probe card is moved through a moving mechanism to enable probes to be in contact with the contacts, meanwhile, in order to match a plurality of groups of contacts in the detection process, the probe card needs to be provided with a plurality of probes, the probe card is fixed by a holder, the holder is a polyhedron capable of rotating, one or more probe cards are arranged on each surface, or a plurality of movable platforms are arranged to move the probe card, so that the probe card is matched with different contact groups, matching is realized through exchange of the probe cards, the single probe card cannot be universal, and vibration generated when amplitude modulation is driven cannot be absorbed.

Disclosure of Invention

The present invention overcomes the above-mentioned deficiencies of the prior art and provides a buffer structure for an amplitude modulated probe card, which can adjust the detection amplitude of the probe, make the single probe card have versatility, and reduce the vibration generated when driving amplitude modulation.

The technical scheme of the invention is as follows:

an amplitude modulation probe card comprises a probe, a probe board, a circuit board and an amplitude modulation structure, wherein the probe is fixedly arranged on the probe board, one end of the probe is connected to the circuit board, and the other end of the probe is clamped on the amplitude modulation structure;

the probe comprises: the probe comprises a probe head, a bent conducting wire and a fixed conducting wire, wherein one end of the probe head is a round probe for detection, the middle part of the probe head is clamped on an amplitude modulation structure, the other end of the probe head is connected with one end of the bent conducting wire, the middle part of the bent conducting wire is of a bent elastic structure, the other end of the bent conducting wire is connected with one end of the fixed conducting wire, the middle part of the fixed conducting wire is fixed on a probe board, and the other end of the fixed conducting wire is connected with a circuit board;

the amplitude modulation structure comprises: the device comprises a fixed plate, an amplitude modulation connecting plate, a reed, an amplitude modulation clamping plate, an amplitude modulation shaft, a main roller and an eccentric roller, wherein the fixed plate is fixedly connected with a circuit board, the upper end of the amplitude modulation plate is fixedly connected onto the amplitude modulation connecting plate, the lower end of the amplitude modulation plate vertically penetrates through the fixed plate, the circuit board and a probe plate in sequence and then is fixedly connected with the probe, the reed is arranged between the lower end of the amplitude modulation connecting plate and the fixed plate, the side surface of the amplitude modulation connecting plate is clamped through the amplitude modulation clamping plate to form a sliding structure vertical to the direction of the fixed plate, the amplitude modulation shaft is arranged above the;

the plurality of amplitude modulation connecting plates are arranged along the probe, one amplitude modulation connecting plate is arranged corresponding to one main roller, and the rest amplitude modulation connecting plates are arranged corresponding to one eccentric roller;

the main roll is the coaxial round roll that sets up on the amplitude modulation axle, eccentric roller inside is provided with a virtual circle, and the edge of eccentric roller is provided with the eccentric breach that reaches this virtual circle, and a plurality of eccentric roller is along the direction from the main roll to keeping away from the main roll, and the eccentric breach on the eccentric roller increases in proper order, and one side alignment of a plurality of eccentric breachs.

Further, the probe card includes: the probe card comprises a card body, probe grooves, a pressing board groove and a pressing board, wherein the card body is provided with a plurality of probe grooves for accommodating probes, the pressing board groove transversely crosses the probe grooves, the pressing board is arranged in the pressing board groove, and the pressing board is fixedly connected with the card body.

Furthermore, gaps for clamping and embedding the probes are arranged at the bottoms of the probe grooves and the bottoms of the pressing plates.

Furthermore, the speed reduction device also comprises a speed reduction structure, wherein the speed reduction structure is arranged on the fixing plate, and the speed reduction structure is connected with the amplitude modulation shaft.

Further, the deceleration structure includes: the speed reducing frame is fixedly arranged on the fixing plate, a plurality of speed reducing gears are arranged in the speed reducing frame, the adjusting wheel is arranged on the outer side of the speed reducing frame, and the adjusting wheel is connected with the amplitude modulation shaft through the speed reducing gears.

The probe card is characterized by further comprising a driving structure, wherein the driving structure is arranged above the probe card and comprises a driving air cylinder and a limiting air cylinder, the driving air cylinder is used for driving the amplitude modulation structure, and the limiting air cylinders are sequentially arranged on the stroke of the driving air cylinder and used for limiting the stroke of the driving air cylinder.

Furthermore, a buffer structure is arranged on the driving structure.

A driving structure for an amplitude modulation probe card is arranged above the probe card and comprises a driving air cylinder and a limiting air cylinder, wherein the driving air cylinder is used for driving the amplitude modulation structure, and a plurality of limiting air cylinders are sequentially arranged on the stroke of the driving air cylinder and used for limiting the stroke of the driving air cylinder;

the driving structure further includes: the probe card comprises a driving cylinder sliding block, a driving cylinder sliding way, a limiting cylinder sliding block, a limiting cylinder sliding way, a driving structure fixing plate, a rack sliding block, a rack sliding way, a rack connecting block, a limiting contact block and a driving rack, wherein one end of the driving structure fixing plate is bent downwards, the downward bent edge is fixedly connected to the probe card, the surface of the driving structure fixing plate is longitudinally provided with the driving cylinder, the extending end of the driving cylinder is connected with the driving cylinder sliding block, the driving cylinder sliding block is arranged in the driving cylinder sliding way in a sliding mode and is provided with extending ends extending towards two sides, the extending end of one side extends to the outer side of the driving cylinder sliding way to form the rack connecting block, the extending end of the other side extends to the outer side of the driving cylinder sliding way to form the limiting contact block, the rack connecting block is fixedly connected with the rack sliding block, and, and the two sides of the rack sliding block are embedded into the rack sliding ways, the driving rack is meshed with the adjusting wheel of the amplitude modulation structure, the limiting cylinders are arranged at intervals along the driving cylinder sliding ways, the extending end of each limiting cylinder is connected with one limiting cylinder sliding block, each limiting cylinder sliding block is connected onto one limiting cylinder sliding way in a sliding mode, and after the limiting cylinders completely extend out, the limiting cylinder sliding blocks connected with the limiting cylinders can slide to the sliding paths of the limiting contact blocks.

The amplitude modulation probe card comprises probes, a probe board, a circuit board and an amplitude modulation structure, wherein the probes are fixedly arranged on the probe board, one ends of the probes are connected to the circuit board, and the other ends of the probes are clamped on the amplitude modulation structure.

Further, the amplitude modulation structure comprises: the device comprises a fixed plate, an amplitude modulation connecting plate, a reed, an amplitude modulation clamping plate, an amplitude modulation shaft, a main roller and an eccentric roller, wherein the fixed plate is fixedly connected with a circuit board, the upper end of the amplitude modulation plate is fixedly connected onto the amplitude modulation connecting plate, the lower end of the amplitude modulation plate vertically penetrates through the fixed plate, the circuit board and a probe plate in sequence and then is fixedly connected with the probe, the reed is arranged between the lower end of the amplitude modulation connecting plate and the fixed plate, the side surface of the amplitude modulation connecting plate is clamped through the amplitude modulation clamping plate to form a sliding structure vertical to the direction of the fixed plate, the amplitude modulation shaft is arranged above the;

Furthermore, the number of the limiting cylinders is the same as and corresponds to that of the eccentric rollers on one side of the main roller, and after the driving cylinders extend out to the limiting stroke of the limiting cylinders, the amplitude-modulated connecting plates below the eccentric rollers corresponding to the limiting cylinders rotate out of the eccentric notches of the eccentric rollers.

Furthermore, a buffer structure is arranged on the driving structure.

A buffer structure for an amplitude modulated probe card disposed on a drive structure, the drive structure comprising: the device comprises a driving cylinder, a limiting cylinder, a driving cylinder sliding block and a limiting cylinder sliding block;

the buffer structure includes: the buffer device comprises a buffer supporting plate and buffer pads, wherein a plurality of buffer pads are arranged on the buffer supporting plate, and a driving cylinder and a limiting cylinder are arranged on the buffer pads;

the buffer structure further includes: the vertical plate is fixedly arranged on the buffer supporting plate, one end of the vertical plate is fixedly connected with the upper end of the buffer cylinder, the buffer cylinder is of a double-cylinder structure, the piston block crossing the double-cylinder structure inside the buffer cylinder is arranged in the buffer cylinder in a sliding mode, the extending end of the limiting cylinder penetrates through the vertical plate and enters one cylinder body of the buffer cylinder to be connected with the piston block, one side of the piston block is provided with a piston block ejector rod, the lower end of the buffer cylinder and the piston block ejector rod are correspondingly provided with a sliding cylinder lock, a sliding cylinder lock spring is arranged between the sliding cylinder lock and the inner wall of the buffer cylinder, the upper end of the sliding cylinder lock is provided with a first lock tongue matched with the piston block ejector rod, the left end of the sliding cylinder lock is provided with a second lock tongue extending to the sliding path of the guide rod and the sliding cylinder, the piston block is also provided with a guide rod, a guide rod sliding barrel is sleeved on the guide rod, a sliding barrel spring is arranged between the guide rod and the guide rod sliding barrel, the lower end of the guide rod sliding barrel is provided with a sliding barrel push rod, and the sliding barrel push rod is connected with the limiting cylinder sliding block;

the buffer structure further includes: the upper end of the first rack is connected with the extending end of the driving cylinder, the lower end of the first rack is meshed with the first gear, the first gear is a hollow gear, the first gear is rotatably arranged on the gear carrier, the gear shaft is coaxially arranged inside the first gear, the volute spring is arranged between the first gear and the gear shaft, one end of the gear shaft extends out of the gear carrier and then is connected with the second gear, the second gear is meshed with the second rack, and the lower end of the second rack is connected with the sliding block of the driving cylinder.

Furthermore, the driving cylinder and the first rack, and the limiting cylinder and the piston block are movably connected in a manner of allowing radial movement.

Further, the end fixedly connected with that stretches out that drives actuating cylinder inserted sheet, correspond with driving actuating cylinder inserted sheet on the first rack and be provided with and drive actuating cylinder inserting groove, it is for having the confession to drive actuating cylinder inserted sheet movable's surplus notch to drive actuating cylinder inserted sheet.

Further, the end fixedly connected with spacing cylinder inserted sheet that stretches out of spacing cylinder, correspond with spacing cylinder inserted sheet on the piston piece and be provided with spacing cylinder inserting groove, spacing cylinder inserting groove is for having the confession the notch of the surplus of spacing cylinder inserted sheet activity.

Further, the driving structure further includes: drive actuating cylinder slide, spacing cylinder slide, drive structure fixed plate, rack slider, rack slide, rack connecting block, spacing contact piece and drive the rack.

Further, the amplitude modulated probe card includes: the probe comprises a probe, a probe board, a circuit board and an amplitude modulation structure, wherein the probe is fixedly arranged on the probe board, one end of the probe is connected to the circuit board, and the other end of the probe is clamped on the amplitude modulation structure.

A power storage assembly of a buffer structure for an amplitude modulation probe card is a limiting cylinder power storage assembly and comprises: a buffer cylinder, a piston block mandril, a guide rod sliding cylinder, a sliding cylinder spring, a sliding cylinder push rod, a sliding cylinder lock and a sliding cylinder lock spring, the buffer cylinder is of a double-cylinder structure, the interior of the buffer cylinder is slidably provided with a piston block which stretches across the double-cylinder structure, a piston block mandril is arranged at one side of the piston block, a sliding barrel lock is correspondingly arranged at the lower end of the buffer barrel and the piston block mandril, a sliding barrel lock spring is arranged between the sliding barrel lock and the inner wall of the buffer barrel, a first lock tongue matched with the piston block mandril is arranged at the upper end of the sliding barrel lock, a second lock tongue extending to the sliding path of the guide rod sliding barrel is arranged at the left end of the sliding barrel lock, a guide rod is also arranged on the piston block, a guide rod sliding barrel is sleeved on the guide rod, and a sliding barrel spring is arranged between the guide rod and the guide rod sliding barrel, and a sliding barrel push rod is arranged at the lower end of the guide rod sliding barrel.

A power assembly for a buffer structure of an amplitude modulated probe card, for driving a cylinder power assembly, comprising: the gear rack comprises a first rack, a first gear, a gear rack, a gear shaft, a volute spiral spring, a second gear and a second rack, wherein the lower end of the first rack is meshed with the first gear, the first gear is a hollow gear, the first gear is rotatably arranged on the gear rack, the gear shaft is coaxially arranged inside the first gear, the volute spiral spring is arranged between the first gear and the gear shaft, one end of the gear shaft extends out of the gear rack and then is connected with the second gear, and the second gear is meshed with the second rack.

A method of probe card amplitude modulation comprising the steps of:

step a, determining the amplitude modulation width: defining the number of probes corresponding to a main roller of an amplitude modulation structure as a basic amplitude, and making a difference value between the number of probes required by a chip to be detected and the basic amplitude to obtain an amplitude modulation width;

step b, determining the number of amplitude modulation boards: adding the number of probes on the amplitude modulation plates in the direction from the main roller to the direction far away from the main roller to obtain the adjustment width until the adjustment width covers the amplitude modulation width, wherein the number of the amplitude modulation plates participating in the addition is the number of the amplitude modulation plates;

step c, determining the angle of the amplitude modulation shaft: rotating the amplitude modulation shaft, wherein when the amplitude modulation plate farthest away from the main roller in the determined amplitude modulation plates is rotated out of the eccentric notch of the corresponding eccentric roller, the angle of the eccentric roller rotated from the initial position is used as the angle of the amplitude modulation shaft;

step d, amplitude modulation driving: rotating an amplitude modulation shaft, wherein the amplitude modulation shaft drives a main roller and an eccentric roller to rotate, an amplitude modulation plate corresponding to the main roller is fixed, a probe on the amplitude modulation plate is positioned at a detection position, and the amplitude modulation plate corresponding to the eccentric roller is rotated out of an eccentric notch of the eccentric roller corresponding to the eccentric roller and moves downwards under the pushing of the eccentric roller;

step e probe deformation: the amplitude modulation board moves downwards to drive the probe head of the probe to move downwards, the fixed lead in the probe is fixed, the bent lead connecting the probe head and the fixed lead is elastically deformed, and the probe moves downwards from the preparation position to the detection position, so that the basic amplitude of the probe card is increased to the amplitude modulation width towards the side surface.

Furthermore, a plurality of probes are fixed on the amplitude modulation plate corresponding to the eccentric roller, and when the number of the amplitude modulation plates is determined, the number of the probes corresponding to the amplitude modulation plates is added until the adjustment width is not less than the amplitude modulation width.

Further, when the amplitude modulation shaft is rotated, the amplitude modulation shaft is driven to rotate by rotating the adjusting wheel, and meanwhile, the speed is reduced through the speed reducing structure connected between the adjusting wheel and the amplitude modulation shaft.

Further, the amplitude modulation probe card is used for amplitude modulation, and comprises probes, a probe board, a circuit board and an amplitude modulation structure, wherein the probes are fixedly arranged on the probe board, one ends of the probes are connected to the circuit board, and the other ends of the probes are clamped on the amplitude modulation structure.

Further, the probe includes: the probe comprises a probe head, a bent conducting wire and a fixed conducting wire, wherein one end of the probe head is a round probe for detection, the middle part of the probe head is clamped on an amplitude modulation structure, the other end of the probe head is connected with one end of the bent conducting wire, the middle part of the bent conducting wire is of a bent elastic structure, the other end of the bent conducting wire is connected with one end of the fixed conducting wire, the middle part of the fixed conducting wire is fixed on a probe board, and the other end of the fixed conducting wire is connected with a circuit board;

The invention has the beneficial effects that:

1. the amplitude modulation probe card is characterized in that the probes are provided with bent wires, so that the probes have longitudinal elastic deformation, the probe heads are provided with amplitude modulation plates, and the amplitude modulation plates are driven by the eccentric rollers, so that the amplitude modulation plates are pushed by the eccentric rollers to move up and down, the probes are driven to deform, the probe heads of the probes move from a detection position to a preparation position or from the preparation position to the detection position, the number of the probes at the detection position is adjusted, the detection amplitude of a single probe card can be adjusted, and the probe card has universality.

2. The driving structure of the amplitude modulation probe card comprises a driving cylinder for driving amplitude modulation and a limiting cylinder for limiting, wherein the limiting cylinder is arranged in the stroke of the extending end of the driving cylinder, so that the driving cylinder has a plurality of gears when driving amplitude modulation, each gear corresponds to an eccentric roller of the amplitude modulation probe card, the amplitude modulated probe can be fixed while automatic amplitude modulation is realized, and electromagnetic interference is avoided.

3. According to the buffer structure of the amplitude modulation probe card, the driving cylinder and the limiting cylinder are isolated from the probe card through the buffer supporting plate and the buffer pad, so that vibration is reduced, and meanwhile, the buffer structure is arranged between the driving cylinder and the driving sliding block and between the limiting cylinder and the limiting sliding block, so that vibration generated when the cylinder extends out is reduced.

4. The probe card amplitude modulation method of the invention comprises the following steps: the method has the advantages that the amplitude modulation width is determined, the number of amplitude modulation plates is driven, the angle of an amplitude modulation shaft is determined, the amplitude modulation drive and the probe deformation are determined, the probe card can adjust the number of probes participating in detection according to the number of contacts to be detected, the amplitude modulation of the probe card is further realized, the detection amplitude of a single probe card can be adjusted, and the probe card has universality.

Drawings

FIG. 1 is a schematic diagram of an overall structure of an amplitude modulation probe card;

FIG. 2 is a schematic side view of an amplitude modulated probe card;

FIG. 3 is a schematic diagram of the amplitude modulation axis of FIG. 1;

FIG. 4 is a schematic view of the construction of the eccentric roller of FIG. 3;

FIG. 5 is a schematic structural diagram of a probe card;

FIG. 6 is a schematic structural diagram of a driving structure;

FIG. 7 is a schematic side view of the structure of FIG. 6;

FIG. 8 is a schematic structural diagram of a buffer structure;

FIG. 9 is a schematic view showing the structure of the inside of the buffer cylinder in FIG. 8;

FIG. 10 is a schematic diagram of the scroll configuration of FIG. 8;

FIG. 11 is a schematic diagram of a scroll configuration;

in the figure: 1 comprises a probe; 2, a probe card; 3, a circuit board; 4, amplitude modulation structure; 5, a speed reducing structure; 6, a driving structure; 1-1 probe head; 1-2 bending the wire; 1-3 fixing the conducting wire; 2-1, a plate body; 2-2, a probe groove; 2-3, pressing plate grooves; 2-4 pressing plates; 4-1 fixing the plate; 4-2 amplitude modulation plates; 4-3 amplitude-modulated connecting plates; 4-4 reed; 4-5 amplitude-modulated splints; 4-6 amplitude modulation axis; 4-7 main rollers; 4-8 eccentric rollers; 5-1 decelerating the frame; 5-2 reduction gears; 5-3 adjusting wheels; 6-1 driving the cylinder; 6-2 limiting cylinders; 6-3 driving the cylinder slide block; 6-4 driving cylinder slide ways; 6-5 limiting cylinder sliding blocks; 6-6 limiting cylinder slide ways; 6-7 driving structure fixing plates; 6-8 rack sliding blocks; 6-9 rack slideways; 6-10 rack connecting blocks; 6-11 limit contact blocks; 6-12 driving the rack; 7-1 buffer supporting plate; 7-2 buffer pads; 7-3 vertical plates; 7-4 buffer cylinder; 7-5 piston blocks; 7-6 piston block ejector rods; 7-7 guide rods; 7-8 guide rod sliding cylinders; 7-9 sliding barrel springs; 7-10 sliding cylinder push rods; 7-11 sliding cylinder locks; 7-12 sliding barrel lock springs; 7-13 first rack; 7-14 first gear; 7-15 gear racks; 7-16 gear shafts; 7-17 scroll springs; 7-18 second gear; 7-19 second rack.

Detailed Description

The invention will be described in detail below with reference to the following drawings:

example one

The present embodiment is an embodiment of an amplitude modulated probe card.

Referring to fig. 1, an amplitude modulation probe card comprises a probe 1, a probe board 2, a circuit board 3 and an amplitude modulation structure 4, wherein the probe 1 is fixedly arranged on the probe board 2, one end of the probe 1 is connected to the circuit board 3, the other end of the probe 1 is clamped on the amplitude modulation structure 4, the end of the probe 1 contacts with a contact of a semiconductor device, an electric signal is transmitted to the circuit board 3 through the probe 1 and is transmitted to a tester for detection through the circuit board 3, the amplitude modulation structure 4 is connected with a detection end of the probe 1, when the amplitude modulation structure 4 adjusts the height of the probe 1, different numbers of probes 1 can be located at lower detection positions and participate in detection, the rest probes 1 are located at higher preparation positions and do not participate in detection, because the number of the probes 1 participating in detection is adjusted through the amplitude modulation structure 4, the detection amplitude change of the whole probe can be realized, and the amplitude modulation of the probe card is realized, so that the single probe card has universality.

Referring to fig. 1, the probe 1 includes: a probe head 1-1, a bent wire 1-2 and a fixed wire 1-3, wherein one end of the probe head 1-1 is a round probe for detection, the middle part of the probe head 1-1 is clamped on an amplitude modulation structure 4, the other end of the probe head 1-1 is connected with one end of the bent wire 1-2, in the embodiment, a V-shaped probe head 1-1 is shown, however, it should be understood that the probe head 1-1 can be a right angle, a circular arc, so that the front end of the probe head 1-1 is positioned at a lower position to be easily contacted with the contact points, the rear end of the probe head 1-1 is fixed to the amplitude modulation structure 4, so that the rear end of the probe head 1-1 can drive the front end of the probe head 1-1 to move up and down when moving up and down along with the amplitude modulation structure 4, and the height of the front end of the probe head 1-1 is changed.

The middle of the bent wire 1-2 is a bent elastic structure, the other end of the bent wire 1-2 is connected with one end of the fixed wire 1-3, the rear end of the probe head 1-1 is connected with the bent wire 1-2, in the embodiment, the bent wire 1-2 is shown in an S-shaped arrangement, however, it should be understood that the bent wire 1-2 can be arranged in a spiral shape or a zigzag shape, so that the bent wire 1-2 has elastic deformation capability in the height direction, and the probe head 1-1 maintains electrical connection when moving up and down and has the capability of repeated elastic deformation.

The middle of the fixed lead 1-3 is fixed on the probe board 2, and the other end of the fixed lead 1-3 is connected with the circuit board 3.

As shown in fig. 1 and fig. 2, the amplitude modulation structure 4 includes: the device comprises a fixed plate 4-1, an amplitude modulation plate 4-2, an amplitude modulation connecting plate 4-3, a reed 4-4, an amplitude modulation clamping plate 4-5, an amplitude modulation shaft 4-6, a main roller 4-7 and an eccentric roller 4-8, wherein the fixed plate 4-1 is fixedly connected with a circuit board 3, the upper end of the amplitude modulation plate 4-2 is fixedly connected onto the amplitude modulation connecting plate 4-3, the lower end of the amplitude modulation plate 4-2 vertically penetrates through the fixed plate 4-1, the circuit board 3 and the probe plate 2 in sequence and then is fixedly connected with the probe 1, the reed 4-4 is arranged between the lower end of the amplitude modulation connecting plate 4-3 and the fixed plate 4-1, the side surface of the amplitude modulation connecting plate 4-3 is clamped by the amplitude modulation clamping plate 4-5 to form a sliding structure vertical to the direction of the fixed plate 4-1, the amplitude, the amplitude modulation shaft 4-6 is provided with a main roller 4-7 and an eccentric roller 4-8; an amplitude modulation clamping plate 4-5 is connected with an amplitude modulation connecting plate 4-3 through a longitudinal slideway structure, the amplitude modulation connecting plate 4-3 is clamped and limited, the amplitude modulation connecting plate 4-3 can slide longitudinally, and further the amplitude modulation plate 4-2 can slide longitudinally to drive a probe head 1-1 to move, a reed 4-4 arranged between the amplitude modulation connecting plate 4-3 and a fixed plate 4-1 applies upward thrust to the amplitude modulation connecting plate 4-3 to keep the amplitude modulation connecting plate 4-3 at an upper position, so that the probe head 1-1 connected with the amplitude modulation plate 4-2 is positioned at an upper position to be detected, an amplitude modulation shaft 4-6 is rotatably connected on the fixed plate 4-1, a main roller 4-7 and an eccentric roller 4-8 on the amplitude modulation shaft 4-6 are both contacted with the upper end of the corresponding amplitude modulation connecting plate 4-3, the eccentric arrangement of the eccentric rollers 4-8 can realize that the amplitude modulation connecting plate 4-3 is pushed downwards by the eccentric rollers 4-8 when the amplitude modulation shaft 4-6 rotates, so that the amplitude modulation plate 4-2 drives the probe head 1-1 to move downwards to a lower detection position.

Referring to fig. 2, a plurality of amplitude modulation connecting plates 4-3 are arranged along the probe 1, wherein one amplitude modulation connecting plate 4-3 is arranged corresponding to one main roller 4-7, and the rest amplitude modulation connecting plates 4-3 are arranged corresponding to one eccentric roller 4-8; in the embodiment, an arrangement mode that three eccentric rollers 4-8 are arranged on two sides of a main roller 4-7 is shown, and a plurality of probes 1 are fixed on each amplitude modulation connecting plate 4-2, and it is understood that the arrangement mode that the eccentric rollers 4-8 are arranged on one side of the main roller 4-7 can be adopted, a plurality of eccentric rollers 4-8 can be arranged on the side surface of the main roller 4-7, and a single probe head or a plurality of probe heads 1-1 can be fixed on the amplitude modulation plate 4-2 corresponding to each eccentric roller 4-8.

Referring to fig. 3, the main roller 4-7 is a circular roller coaxially arranged on an amplitude modulation shaft 4-6, an eccentric notch is arranged on an eccentric roller 4-8, and when the main roller 4-7 rotates, the height of an amplitude modulation connecting plate 4-3 corresponding to the main roller 4-7 is unchanged, so that a probe head 1-1 corresponding to an amplitude modulation plate 4-2 corresponding to the main roller 4-7 is always kept at a lower detection position to serve as a basic amplitude of a probe card; before the main roller 4-7 rotates, the amplitude modulation connecting plate 4-3 corresponding to the eccentric roller 4-8 is embedded into the eccentric notch of the eccentric roller 4-8 and is attached to the amplitude modulation connecting plate 4-3 in the eccentric notch, so that the corresponding amplitude modulation plate 4-2 drives the corresponding probe head 1-1 to be positioned at a higher position to be detected, when the main roller 4-7 rotates, the eccentric roller 4-7 rotates, the amplitude modulation connecting plate 4-3 positioned in the eccentric notch rotates out of the eccentric notch, the eccentric roller 4-8 pushes the corresponding amplitude modulation connecting plate 4-3 downwards, the amplitude modulation plate 4-2 corresponding to the amplitude modulation connecting plate 4-3 drives, and the probe head 1-1 corresponding to the amplitude modulation plate 4-2 moves downwards from the position to be detected to a detection position.

Referring to fig. 3 and 4, a virtual circle is arranged inside the eccentric rollers 4-8, the edges of the eccentric rollers 4-8 are provided with eccentric gaps reaching the virtual circle, the eccentric gaps of the eccentric rollers 4-8 are sequentially increased along the direction from the main rollers 4-7 to the direction away from the main rollers 4-7, and one sides of the eccentric gaps are aligned, and referring to fig. 4, the eccentric gaps of the eccentric rollers 4-8 are sequentially increased along the direction from the main rollers 4-7 to the direction away from the main rollers 4-7, and the eccentric gaps have the same starting point in the circumferential direction, so that when the amplitude modulation shaft 4-6 rotates, the amplitude modulation connecting plates 4-3 below the eccentric rollers 4-8 can be aligned along the direction from the main rollers 4-7 to the direction away from the main rollers 4-7, the eccentric gaps are sequentially rotated out, so that the amplitude modulation process is continuous.

Specifically, as shown in fig. 5, the probe card 2 includes: the probe card comprises a card body 2-1, probe grooves 2-2, a pressure plate groove 2-3 and a pressure plate 2-4, wherein the card body 2-1 is provided with a plurality of probe grooves 2-2 for accommodating the probes 1, the pressure plate groove 2-3 is transversely arranged across the probe grooves 2-2, the pressure plate 2-4 is arranged in the pressure plate groove 2-3, and the pressure plate 2-4 is fixedly connected with the card body 2-1. The board body 2-1 is provided with a plurality of probe grooves 2-2 for mounting the probes 1, and the probe grooves 2-2 are divided into a front part and a rear part by the platen grooves 2-3, wherein the front part is used for accommodating the bent wires 1-2 of the probes 1, the front part is provided with the lower ends of the bent wires 1-2 capable of being exposed from the probe grooves 2-2, the rear part is used for connecting with the circuit board 3, and the probes 1 in the platen grooves 2-3 are pressed and fixed by the platen 2-4.

Specifically, the bottoms of the probe grooves 2-2 and the bottoms of the pressing plates 2-4 are provided with notches for clamping and embedding the probes 1.

Specifically, the device further comprises a speed reducing structure 5, wherein the speed reducing structure 5 is arranged on the fixing plate 4-1, and the speed reducing structure 5 is connected with the amplitude modulation shaft 4-6.

Specifically, the decelerating structure 5 includes: the adjustable mechanism comprises a speed reducing frame 5-1, speed reducing gears 5-2 and adjusting wheels 5-3, wherein the speed reducing frame 5-1 is fixedly arranged on a fixing plate 4-1, a plurality of speed reducing gears 5-2 are arranged inside the speed reducing frame 5-1, the adjusting wheels 5-3 are arranged on the outer side of the speed reducing frame 5-1, the adjusting wheels 5-3 are connected with an amplitude modulation shaft 4-6 through the speed reducing gears 5-2, when the adjusting wheels 5-3 are rotated, the rotation is decelerated through the speed reducing gears 5-2, the amplitude modulation shaft 4-6 is driven to rotate, and the rotation angle of the amplitude modulation shaft 4-6 is convenient to control.

The probe card further comprises a driving structure 6, the driving structure 6 is arranged above the probe card, the driving structure 6 comprises a driving cylinder 6-1 and a limiting cylinder 6-2, the driving cylinder 6-1 is used for driving the amplitude modulation structure 4, the limiting cylinders 6-2 are sequentially arranged on the stroke of the driving cylinder 6-1 and used for limiting the stroke of the driving cylinder 6-1, electromagnetic interference is avoided by cylinder driving, the limiting cylinders 6-2 arranged on the stroke of the driving cylinder 6-1 enable the stroke of the driving cylinder 6-1 to have a plurality of gears, and enable the gears to correspond to the gears formed by the eccentric rollers 4-8, and driving control is facilitated.

Specifically, a buffer structure is further disposed on the driving structure 6.

Example two

The present embodiment is an embodiment of a driving structure for an amplitude modulation probe card.

The driving structure for the amplitude modulation probe card disclosed in the embodiment is applied to the amplitude modulation probe card disclosed in the embodiment.

Referring to fig. 6 and 7, the driving structure 6 is disposed above the probe card, the driving structure 6 includes a driving cylinder 6-1 and a limiting cylinder 6-2, the driving cylinder 6-1 is used for driving the amplitude modulation structure 4, and the limiting cylinders 6-2 are sequentially disposed on a stroke of the driving cylinder 6-1 and are used for limiting a stroke of the driving cylinder 6-1.

In this embodiment, the stroke of the driving cylinder 6-1 corresponds to the rotation angle of the amplitude modulation shaft 4-6 of the amplitude modulation probe card, and as shown in fig. 3 and 4, the arc value of one rotation of the amplitude modulation shaft 4-6 is divided according to the number of the main roller 4-7 plus the eccentric rollers 4-8 on one side, and the divided arc is allocated to one eccentric roller 4-8, so that when the rotation arc of the amplitude modulation shaft 4-6 is divided across the domain, the amplitude modulation plate 4-2 in the eccentric notch corresponding to one eccentric roller 4-8 moves downwards, so that the corresponding probe moves downwards to the detection position, and a gear corresponding to the rotation angle of the amplitude modulation shaft 4-6 is formed, and the gear corresponds to the limit position of the driving cylinder 6-1 by the limit cylinder 6-2.

The driving structure further includes: a driving cylinder slide block 6-3, a driving cylinder slide way 6-4, a limiting cylinder slide block 6-5, a limiting cylinder slide way 6-6, a driving structure fixing plate 6-7, a rack slide block 6-8, a rack slide way 6-9, a rack connecting block 6-10, a limiting contact block 6-11 and a driving rack 6-12, wherein one end of the driving structure fixing plate 6-7 is bent downwards, the edge bent downwards is fixedly connected on the probe card, a driving cylinder 6-1 is longitudinally arranged on the surface of the driving structure fixing plate 6-7, the extending end of the driving cylinder 6-1 is connected with the driving cylinder slide block 6-3, the driving cylinder slide block 6-3 is arranged in the driving cylinder slide way 6-4 in a sliding manner, and the driving cylinder slide block 6-3 is provided with extending ends extending towards two sides, the extending end of one side extends to the outer side of the driving cylinder slideway 6-4 to form a rack connecting block 6-10, and the extending end of the other side extends to the outer side of the driving cylinder slideway 6-4 to form a limiting contact block 6-11.

Referring to fig. 6, the driving cylinder 6-2 pushes the limiting cylinder slide block 6-5 at different travel positions to the right end of the limiting cylinder slide way 6-6, when the driving cylinder 6-1 pushes the driving cylinder slide block 6-3 to move downwards, the driving cylinder slide block 6-3 slides in the driving cylinder slide way 6-4 and drives the fine contact block 6-11 on the side surface to move downwards until the limiting contact block 6-11 is in contact with the limiting cylinder slide block 6-5 to limit the travel of the driving cylinder 6-1, so that the rotation angle of the amplitude modulation shaft 4-6 is limited, and the number of the probes 1 at the detection position is controlled.

The rack connecting block 6-10 is fixedly connected with the rack sliding block 6-8, the rack sliding block 6-8 is fixedly connected with the driving rack 6-12, two sides of a rack sliding block 6-8 are embedded into the rack slide ways 6-10, a driving rack 6-12 is meshed with an adjusting wheel 5-3 of an amplitude modulation structure 4, a plurality of limiting air cylinders 6-2 are arranged at intervals along the driving air cylinder slide ways 6-4, the extending end of each limiting air cylinder 6-2 is connected with a limiting air cylinder sliding block 6-5, each limiting air cylinder sliding block 6-5 is connected to one limiting air cylinder slide way 6-6 in a sliding manner, after the limiting cylinder 6-2 is completely extended, a limiting cylinder sliding block 6-5 connected with the limiting cylinder 6-2 can slide to the sliding path of the limiting contact block 6-11.

The extending end of the driving cylinder 6-1 pushes the driving cylinder slide block 6-3 to move to drive the driving rack 6-12 to move, so that the adjusting wheel 5-3 meshed with the driving rack 6-12 rotates, and the amplitude modulation shaft 4-6 is driven to rotate.

The automatic amplitude modulation of the amplitude modulation probe card is realized, electromagnetic interference is avoided, the amplitude modulation structure is provided with a plurality of gears, and the gears can correspond to the gears formed by the amplitude modulation structure 4.

The amplitude modulation probe card comprises a probe 1, a probe board 2, a circuit board 3 and an amplitude modulation structure 4, wherein the probe 1 is fixedly arranged on the probe board 2, one end of the probe 1 is connected to the circuit board 3, and the other end of the probe 1 is clamped on the amplitude modulation structure 4.

Specifically, the amplitude modulation structure 4 includes: the device comprises a fixed plate 4-1, an amplitude modulation plate 4-2, an amplitude modulation connecting plate 4-3, a reed 4-4, an amplitude modulation clamping plate 4-5, an amplitude modulation shaft 4-6, a main roller 4-7 and an eccentric roller 4-8, wherein the fixed plate 4-1 is fixedly connected with a circuit board 3, the upper end of the amplitude modulation plate 4-2 is fixedly connected onto the amplitude modulation connecting plate 4-3, the lower end of the amplitude modulation plate 4-2 vertically penetrates through the fixed plate 4-1, the circuit board 3 and the probe plate 2 in sequence and then is fixedly connected with the probe 1, the reed 4-4 is arranged between the lower end of the amplitude modulation connecting plate 4-3 and the fixed plate 4-1, the side surface of the amplitude modulation connecting plate 4-3 is clamped by the amplitude modulation clamping plate 4-5 to form a sliding structure vertical to the direction of the fixed plate 4-1, the amplitude, the amplitude modulation shaft 4-6 is provided with a main roller 4-7 and an eccentric roller 4-8;

the amplitude modulation connecting plates 4-3 are arranged along the probe 1, one amplitude modulation connecting plate 4-3 is arranged corresponding to one main roller 4-7, and the rest amplitude modulation connecting plates 4-3 are arranged corresponding to one eccentric roller 4-8;

the main rollers 4-7 are round rollers coaxially arranged on the amplitude modulation shafts 4-6, a virtual circle is arranged inside the eccentric rollers 4-8, eccentric gaps reaching the virtual circle are formed in the edges of the eccentric rollers 4-8, the eccentric gaps on the eccentric rollers 4-8 are sequentially enlarged along the direction from the main rollers 4-7 to the direction far away from the main rollers 4-7, and one sides of the eccentric gaps are aligned.

Specifically, the number of the limiting cylinders 6-2 is the same as and corresponds to the number of the eccentric rollers 4-8 on one side of the main roller 4-7, and after the driving cylinder 6-1 extends to the limiting stroke of the limiting cylinder 6-2, the amplitude-modulated connecting plate 4-3 below the eccentric roller 4-8 corresponding to the limiting cylinder 6-2 is rotated out of the eccentric notch of the eccentric roller 4-8.

In particular, it is characterized in that a buffer structure is also arranged on the driving structure 6.

EXAMPLE III

The present embodiment is an embodiment of a buffer structure for an amplitude modulated probe card.

The buffer structure for an amplitude modulation probe card disclosed in the embodiment is applied to the driving structure for an amplitude modulation probe card disclosed in the second embodiment, and can reduce the vibration generated by the driving structure.

As shown in fig. 8, the driving structure 6 is disposed on the driving structure 6, and the driving structure 6 includes: the buffer structure is connected between the air cylinder and the sliding block in series, vibration of the air cylinder and the sliding block are disconnected, and pushing of the sliding block is not affected after vibration is filtered.

The buffer structure includes: the buffer device comprises a buffer supporting plate 7-1 and buffer pads 7-2, wherein a plurality of buffer pads 7-2 are arranged on the buffer supporting plate 7-1, and a driving cylinder 6-1 and a limiting cylinder 6-2 are arranged on the buffer pads 7-2; the buffer supporting plate 7-1 is used as a bearing plate body, and the vibration generated by the air cylinder is reduced through the buffer pad 7-2.

The buffer structure further includes: the device comprises a vertical plate 7-3, a buffer cylinder 7-4, a piston block 7-5, a piston block ejector rod 7-6, a guide rod 7-7, a guide rod sliding cylinder 7-8, a sliding cylinder spring 7-9, a sliding cylinder push rod 7-10, a sliding cylinder lock 7-11 and a sliding cylinder lock spring 7-12.

The vertical plate 7-3 is fixedly arranged on the buffer supporting plate 7-1, one end of the vertical plate 7-3 is fixedly connected with the upper end of the buffer cylinder 7-4, and the buffer cylinder 7-4 fixed by the vertical plate 7-3 is used for connecting the limiting cylinder 6-2 and the limiting cylinder sliding block 6-5 and absorbing the vibration generated by the limiting cylinder 6-2.

Referring to fig. 9, the buffer cylinder 7-4 is of a double-cylinder structure, a piston block 7-5 crossing the double-cylinder structure is slidably disposed inside the buffer cylinder 7-4, an extending end of the limiting cylinder 6-2 penetrates through the vertical plate 7-3 and enters a cylinder body of the buffer cylinder 7-4 to be connected with the piston block 7-5, a piston block ejector rod 7-6 is disposed on one side of the piston block 7-5, a sliding cylinder lock 7-11 is disposed at a lower end of the buffer cylinder 7-4 corresponding to the piston block ejector rod 7-6, a sliding cylinder lock spring 7-12 is disposed between the sliding cylinder lock 7-11 and an inner wall of the buffer cylinder 7-4, a first lock tongue engaged with the piston block ejector rod 7-6 is disposed at an upper end of the sliding cylinder lock 7-11, and a second lock tongue extending to a sliding path of the guide rod sliding cylinder 7-8 is disposed at a left end of the sliding cylinder lock 7-11 And the spring bolt pushes the piston block 7-5 to slide downwards at the extending end of the limiting cylinder 6-2 until the piston block 7-5 slides to the bottom of the sliding groove structure in the buffer cylinder 7-4, the piston block mandril 7-6 can be contacted with the first spring bolt of the sliding cylinder lock 7-11, and then pushes the sliding cylinder lock 7-11 rightwards, so that the second spring bolt of the sliding cylinder lock 7-11 is separated from the guide rod sliding cylinder 7-8, and the locking of the guide rod sliding cylinder 7-8 is released.

The piston block 7-5 is also provided with a guide rod 7-7, a guide rod sliding cylinder 7-8 is sleeved on the guide rod 7-7, a sliding cylinder spring 7-9 is arranged between the guide rod 7-7 and the guide rod sliding cylinder 7-8, the lower end of the guide rod sliding cylinder 7-8 is provided with a sliding cylinder push rod 7-10, and the sliding cylinder push rod 7-10 is connected with the limiting cylinder sliding block 6-5; the sliding cylinder spring 7-9 enables the guide rod 7-7 to be connected with the guide rod sliding cylinder 7-8, when the extending end of the limiting cylinder 6-2 moves downwards, the sliding cylinder spring 7-9 is compressed to absorb impact generated by the limiting cylinder 6-2, after the second lock tongue of the sliding cylinder lock 7-11 is separated from the guide rod sliding cylinder 7-8, the sliding cylinder spring 7-9 pushes the guide rod sliding cylinder 7-8 downwards, the sliding cylinder push rod 7-10 pushes the limiting cylinder slide block 6-5 to slide, and when the extending end of the limiting cylinder 6-2 moves upwards, the sliding cylinder spring 7-9 pulls the guide rod sliding cylinder 7-8 upwards until the lower end of the guide rod sliding cylinder 7-8 slides over the second lock tongue of the sliding cylinder lock 7-11 and is locked again.

In the embodiment, the lower end of the sliding barrel push rod 7-10 is rotatably connected with a push rod connecting rod, and two ends of the push rod connecting rod are respectively rotatably connected to the sliding barrel push rod 7-10 and the limiting cylinder sliding block 6-5, so that the arrangement of the limiting cylinder 6-2 can be changed relative to the angle of the limiting cylinder sliding block 6-5, and the arrangement of the limiting cylinder 6-5 is facilitated.

The buffer cylinder 7-4 changes the rigid connection between the limiting cylinder 6-2 and the limiting cylinder sliding block 6-5 into a direct driving mode that the limiting cylinder 6-2 extends out, the sliding cylinder spring 7-9 stores force, the limiting cylinder 6-2 stops, the sliding cylinder spring 7-9 releases the stored force to push the limiting cylinder sliding block 6-5, the vibration generated by the extending of the limiting cylinder 6-2 is absorbed through the stored force of the sliding cylinder spring 7-9, and meanwhile, the process of pushing the limiting cylinder sliding block 6-5 is guaranteed.

The buffer structure further includes: a first rack 7-13, a first gear 7-14, a gear carrier 7-15, a gear shaft 7-16, a volute spiral spring 7-17, a second gear 7-18 and a second rack 19.

The scroll structure formed by taking the scroll spring 7-17 as a core changes the rigid connection between the driving cylinder 6-1 and the driving cylinder sliding block 6-3 into a direct driving mode that the driving cylinder 6-1 extends, the scroll spring 7-17 stores force, the driving cylinder 6-1 stops, the scroll spring 7-17 releases the stored force, the process of pushing the driving cylinder sliding block 6-3 is realized, the vibration generated by the extension of the driving cylinder 6-1 is absorbed through the stored force of the scroll spring 7-17, and the process of pushing the driving cylinder sliding block 6-3 is ensured at the same time.

Referring to fig. 10 and 11, the upper end of the first rack 7-13 is connected to the extending end of the driving cylinder 6-1, the lower end of the first rack 7-13 is engaged with the first gear 7-14, the first gear 7-14 is a hollow gear, the first gear 7-14 is rotatably disposed on the gear rack 7-15, the gear shaft 7-16 is coaxially disposed inside the first gear 7-14, a spiral spring 7-17 is disposed between the first gear 7-14 and the gear shaft 7-16, one end of the gear shaft 7-16 extends out of the gear rack 7-15 and is connected to the second gear 7-18, the second gear 7-18 is engaged with the second rack 19, and the lower end of the second rack 7-19 is connected to the driving cylinder slider 6-3.

When the extending end of the driving cylinder 6-1 pushes the first rack 7-13 downwards, the scroll spring 7-17 accumulates force and enables the gear shaft 7-16 to rotate, rigid connection between the driving cylinder 6-1 and the driving cylinder slide block 6-3 is changed into connection with buffering of the scroll spring 7-17, and vibration generated by impact of the driving cylinder 6-1 is reduced.

Specifically, the driving cylinder 6-1 and the first rack 7-13, and the limiting cylinder 6-2 and the piston block 7-5 are movably connected to allow radial movement.

Specifically, as shown in fig. 9, a driving cylinder insertion piece is fixedly connected to an extending end of the driving cylinder 6-1, a driving cylinder insertion groove is formed in the first rack 7-13 and corresponds to the driving cylinder insertion piece, and the driving cylinder insertion groove is a notch with a margin for movement of the driving cylinder insertion piece.

Specifically, the extending end of the limiting cylinder 6-2 is fixedly connected with a limiting cylinder insertion piece, a limiting cylinder insertion groove is formed in the piston block 7-5 and corresponds to the limiting cylinder insertion piece, and the limiting cylinder insertion groove is a notch with allowance for movement of the limiting cylinder insertion piece.

And a margin is reserved between the insertion groove and the insertion sheet, so that the radial vibration displacement generated by the cylinder can be absorbed while the radial connection is ensured.

In particular, the driving structure 6 further comprises: 6-4 parts of driving cylinder slide ways, 6-6 parts of limiting cylinder slide ways, 6-7 parts of driving structure fixing plates, 6-8 parts of rack slide blocks, 6-9 parts of rack slide ways, 6-10 parts of rack connecting blocks, 6-11 parts of limiting contact blocks and 6-12 parts of driving racks.

Specifically, the amplitude modulation probe card includes: the probe comprises a probe 1, a probe board 2, a circuit board 3 and an amplitude modulation structure 4, wherein the probe 1 is fixedly arranged on the probe board 2, one end of the probe 1 is connected to the circuit board 3, and the other end of the probe 1 is clamped on the amplitude modulation structure 4.

Example four

The present embodiment is an embodiment of a force accumulation assembly for a buffer structure of an amplitude modulated probe card.

The force accumulation assembly of the buffer structure for the amplitude modulation probe card disclosed by the embodiment is a limiting cylinder force accumulation assembly, is applied to the driving structure for the amplitude modulation probe card disclosed by the embodiment II, is specifically connected between a limiting cylinder 6-2 and a limiting cylinder sliding block 6-5, and is used for force accumulation and buffering.

Spacing cylinder holds power subassembly includes: the device comprises a vertical plate 7-3, a buffer cylinder 7-4, a piston block 7-5, a piston block ejector rod 7-6, a guide rod 7-7, a guide rod sliding cylinder 7-8, a sliding cylinder spring 7-9, a sliding cylinder push rod 7-10, a sliding cylinder lock 7-11 and a sliding cylinder lock spring 7-12.

EXAMPLE five

The force accumulation assembly of the buffer structure for the amplitude modulation probe card disclosed in the embodiment is applied to the driving structure for the amplitude modulation probe card disclosed in the embodiment II, and is particularly connected between the driving cylinder 6-1 and the driving cylinder slide block 6-3 for force accumulation and buffering.

The power storage assembly of the driving cylinder comprises: a first rack 7-13, a first gear 7-14, a gear carrier 7-15, a gear shaft 7-16, a volute spiral spring 7-17, a second gear 7-18 and a second rack 19.

EXAMPLE six

The embodiment is an embodiment of a probe card amplitude modulation method.

The embodiment discloses an amplitude modulation method of a probe card, which is applied to the amplitude modulation probe card disclosed by the embodiment, can realize the amplitude modulation of the probe card, meets the detection requirements of different numbers of contacts and enables the probe card to have universality.

A method of probe card amplitude modulation comprising the steps of:

step a, determining the amplitude modulation width: defining the number of probes corresponding to the main rollers 4-7 of the amplitude modulation structure 4 as a basic amplitude, and making a difference value between the number of probes required by the chip to be detected and the basic amplitude to obtain an amplitude modulation width; the probe card is preset with a basic amplitude for meeting the detection requirements of most contacts, and the detection requirements of more contacts are met by increasing the number of probes on the side surface of the basic amplitude.

Step b, determining the number of amplitude modulation boards: adding the number of probes on the amplitude modulation plates 4-2 in the direction from the main roller 4-7 to the direction far away from the main roller 4-7 to obtain the adjustment width until the adjustment width covers the amplitude modulation width, wherein the number of the amplitude modulation plates 4-2 participating in the addition is the number of the amplitude modulation plates; after the quantity of the probes needing to be increased is determined, the quantity needing to be increased is compared with the quantity of the probes fixed on the amplitude modulation plate 4-2, the amplitude modulation plate 4-2 needing to be moved is determined, and under the condition that a plurality of probes are fixed on the amplitude modulation plate 4-2, the quantity of the probes on the amplitude modulation plate 4-2 needing to be moved is added until the quantity of the contacts needing to be detected is covered.

Step c, determining the angle of the amplitude modulation shaft: rotating the amplitude modulation shaft 4-6, wherein when the amplitude modulation plate 4-2 farthest from the main roller 4-7 in the determined amplitude modulation plates is rotated out of the eccentric notch of the corresponding eccentric roller 4-8, the angle of the rotation of the eccentric roller 4-8 from the initial position is used as the angle of the amplitude modulation shaft; the amplitude modulation probe card moves the amplitude modulation plate 4-2 through the rotation of the amplitude modulation shaft 4-6, and after the amplitude modulation plate 4-2 needing to be moved is determined, the rotation angle of the amplitude modulation shaft 4-6 is determined through the corresponding angle, needing to be rotated, of the amplitude modulation shaft 4-6.

Step d, amplitude modulation driving: rotating an amplitude modulation shaft 4-6, wherein the amplitude modulation shaft 4-6 drives a main roller 4-7 and an eccentric roller 4-8 to rotate, an amplitude modulation plate 4-2 corresponding to the main roller 4-7 is fixed, a probe 1 on the amplitude modulation plate 4-2 is located at a detection position, and the amplitude modulation plate 4-2 corresponding to the eccentric roller 4-8 rotates out of an eccentric notch of the corresponding eccentric roller 4-8 and moves downwards under the pushing of the eccentric roller 4-8; the rotation angle of the amplitude modulation shaft 4-6 corresponds to the number of the pushing eccentric rollers 4-8, and the amplitude modulation shaft 4-6 is rotated according to the rotation angle of the amplitude modulation shaft 4-6 determined in the step c.

Step e probe deformation: the amplitude modulation plate 4-2 moves downwards to drive the probe head 1-1 of the probe 1 to move downwards, the fixed lead 1-3 in the probe 1 is fixed, the bent lead 1-2 connecting the probe head 1-1 and the fixed lead 1-3 elastically deforms, and the probe 1 moves downwards from the preparation position to the detection position, so that the basic amplitude of the probe card is increased to the amplitude modulation width towards the side surface.

Specifically, a plurality of probes 1 are fixed on an amplitude modulation plate 4-2 corresponding to the eccentric roller 4-8, and when the number of the amplitude modulation plates is determined, the number of a group of probes 1 corresponding to the amplitude modulation plate 4-2 is added until the adjustment width is not less than the amplitude modulation width.

Specifically, when the amplitude modulation shaft 4-6 is rotated, the amplitude modulation shaft 4-6 is driven to rotate by rotating the adjusting wheel 5-3, and meanwhile, the speed is reduced by the speed reducing structure 5 connected between the adjusting wheel 5-3 and the amplitude modulation shaft 4-6.

Specifically, as shown in fig. 1 to 5, an amplitude modulation probe card is used for amplitude modulation, and the amplitude modulation probe card comprises a probe 1, a probe board 2, a circuit board 3 and an amplitude modulation structure 4, wherein the probe 1 is fixedly arranged on the probe board 2, one end of the probe 1 is connected to the circuit board 3, and the other end of the probe 1 is clamped on the amplitude modulation structure 4.

Specifically, the probe 1 includes: the probe comprises a probe head 1-1, a bent wire 1-2 and a fixed wire 1-3, wherein one end of the probe head 1-1 is a round probe for detection, the middle part of the probe head 1-1 is clamped on an amplitude modulation structure 4, the other end of the probe head 1-1 is connected with one end of the bent wire 1-2, the middle of the bent wire 1-2 is of a bent elastic structure, the other end of the bent wire 1-2 is connected with one end of the fixed wire 1-3, the middle of the fixed wire 1-3 is fixed on a probe board 2, and the other end of the fixed wire 1-3 is connected with a circuit board 3;

the amplitude modulation structure 4 comprises: the device comprises a fixed plate 4-1, an amplitude modulation plate 4-2, an amplitude modulation connecting plate 4-3, a reed 4-4, an amplitude modulation clamping plate 4-5, an amplitude modulation shaft 4-6, a main roller 4-7 and an eccentric roller 4-8, wherein the fixed plate 4-1 is fixedly connected with a circuit board 3, the upper end of the amplitude modulation plate 4-2 is fixedly connected onto the amplitude modulation connecting plate 4-3, the lower end of the amplitude modulation plate 4-2 vertically penetrates through the fixed plate 4-1, the circuit board 3 and the probe plate 2 in sequence and then is fixedly connected with the probe 1, the reed 4-4 is arranged between the lower end of the amplitude modulation connecting plate 4-3 and the fixed plate 4-1, the side surface of the amplitude modulation connecting plate 4-3 is clamped by the amplitude modulation clamping plate 4-5 to form a sliding structure vertical to the direction of the fixed plate 4-1, the amplitude, the amplitude modulation shaft 4-6 is provided with a main roller 4-7 and an eccentric roller 4-8;

It should be noted that in the above embodiments, permutation and combination can be performed without any contradictory technical solutions, and since a person skilled in the art can exhaust the results of all permutation and combination according to the mathematical knowledge of permutation and combination learned in high-school stages, the results are not listed in this application, but it should be understood that each permutation and combination result is described in this application.

It should be noted that the above embodiments are only illustrative for the patent, and do not limit the protection scope thereof, and those skilled in the art can make modifications to the parts thereof without departing from the spirit of the patent.

Claims

1. A buffer structure for an amplitude modulated probe card, characterized in that it is provided on a drive structure (6), the drive structure (6) comprising: the device comprises a driving cylinder (6-1), a limiting cylinder (6-2), a driving cylinder sliding block (6-3) and a limiting cylinder sliding block (6-5);

the buffer structure includes: the buffer device comprises a buffer supporting plate (7-1) and buffer pads (7-2), wherein a plurality of buffer pads (7-2) are arranged on the buffer supporting plate (7-1), and a driving cylinder (6-1) and a limiting cylinder (6-2) are arranged on the buffer pads (7-2);

the buffer structure further includes: the device comprises a vertical plate (7-3), a buffer cylinder (7-4), a piston block (7-5), a piston block ejector rod (7-6), a guide rod (7-7), a guide rod sliding cylinder (7-8), a sliding cylinder spring (7-9), a sliding cylinder push rod (7-10), a sliding cylinder lock (7-11) and a sliding cylinder lock spring (7-12), wherein the vertical plate (7-3) is fixedly arranged on a buffer supporting plate (7-1), one end of the vertical plate (7-3) is fixedly connected with the upper end of the buffer cylinder (7-4), the buffer cylinder (7-4) is of a double-cylinder structure, the piston block (7-9) crossing the internal double-cylinder structure is arranged in the buffer cylinder (7-4) in a sliding manner, and the extending end of the limiting cylinder (6-2) penetrates through the vertical plate (7-3) and enters one cylinder body of the buffer cylinder (7-4) and then is connected with the piston block (7-4) 7-5), a piston block ejector rod (7-6) is arranged on one side of the piston block (7-5), a sliding cylinder lock (7-11) is correspondingly arranged at the lower end of the buffer cylinder (7-4) and the piston block ejector rod (7-6), a sliding cylinder lock spring (7-12) is arranged between the sliding cylinder lock (7-11) and the inner wall of the buffer cylinder (7-4), a first lock tongue matched with the piston block ejector rod (7-6) is arranged at the upper end of the sliding cylinder lock (7-11), a second lock tongue extending to the sliding path of the guide rod sliding cylinder (7-8) is arranged at the left end of the sliding cylinder lock (7-11), a guide rod (7-7) is further arranged on the piston block (7-5), a guide rod sliding cylinder (7-8) is sleeved on the guide rod (7-7), a sliding cylinder spring (7-9) is arranged between the guide rod (7-7) and the guide rod sliding cylinder (7-8), a sliding cylinder push rod (7-10) is arranged at the lower end of the guide rod sliding cylinder (7-8), and the sliding cylinder push rod (7-10) is connected with the limiting cylinder sliding block (6-5);

the buffer structure further includes: a first rack (7-13), a first gear (7-14), a gear rack (7-15), a gear shaft (7-16), a volute spring (7-17), a second gear (7-18) and a second rack (7-19), wherein the upper end of the first rack (7-13) is connected with the extending end of the driving cylinder (6-1), the lower end of the first rack (7-13) is meshed with the first gear (7-14), the first gear (7-14) is a hollow gear, the first gear (7-14) is rotatably arranged on the gear rack (7-15), the gear shaft (7-16) is coaxially arranged inside the first gear (7-14), and the volute spring (7-17) is arranged between the first gear (7-14) and the gear shaft (7-16), one end of the gear shaft (7-16) extends out of the gear rack (7-15) and then is connected with a second gear (7-18), the second gear (7-18) is meshed with a second rack (19), and the lower end of the second rack (7-19) is connected with the driving cylinder sliding block (6-3).