CN112254850B - Conductive carbon paste for flexible pressure sensor, preparation method thereof and pressure sensor - Google Patents
Conductive carbon paste for flexible pressure sensor, preparation method thereof and pressure sensor Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/20—Investigating strength properties of solid materials by application of mechanical stress by applying steady bending forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/32—Investigating strength properties of solid materials by application of mechanical stress by applying repeated or pulsating forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0001—Type of application of the stress
- G01N2203/0005—Repeated or cyclic
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0014—Type of force applied
- G01N2203/0023—Bending
Abstract
The invention relates to conductive carbon paste for a flexible pressure sensor, a preparation method thereof and the pressure sensor, wherein the conductive carbon paste comprises the following components in percentage by mass: 1-25% of graphene, 0.04-1.5% of carbon nano tube, 0.001-1% of dispersing agent, 5-45% of oil resin, 1-10% of thickening agent, 0.01-5% of coupling agent, 25-70% of first solvent and 20-40% of second solvent. According to the conductive carbon paste, the graphene sheet and a small amount of carbon nano tubes are added into a resin system, and a dispersing agent, a coupling agent and a plasticizer are used in a matching manner, so that the prepared conductive carbon paste has the advantages of high sensitivity, high stability, low lowest detection limit, bending resistance, strong adhesion with a flexible substrate and the like. Under the action of pressure, a conductive network formed by graphene and carbon nanotubes in the cured conductive carbon paste resin system is changed, the resistance of the cured conductive carbon paste is increased, the pressure sensitivity is high, and the small pressure change can be sensed.
Description
Technical Field
The invention belongs to the technical field of conductive carbon paste for a flexible pressure sensor, and particularly relates to conductive carbon paste for the flexible pressure sensor, a preparation method of the conductive carbon paste and the pressure sensor.
Background
The flexible pressure sensor has good flexibility and ductility, can be freely bent or even folded, has flexible and various structural forms, can be randomly arranged according to the requirements of measurement conditions, and can conveniently detect complex measured objects. Flexible pressure sensitive materials are a key factor in the development of flexible pressure sensor technology. At present, sensitive materials in the flexible pressure sensor have the problems of poor stability, low sensitivity, high minimum detection limit, poor bending resistance, insufficient adhesion with a flexible substrate and the like.
For example, chinese patent CN109785995A provides a porous conductive paste for preparing a flexible piezoresistive sensor, and a sacrificial template with adjustable particle size is used to prepare the porous conductive paste, so that the number of nanopores or micropores formed by the conductive paste is increased, and under the action of stress, conductive particles around the pores are in contact with each other, thereby effectively reducing the conductivity of the material, so as to improve the sensitivity of the flexible piezoresistive sensor in cooperation with the conductive particles, but the stability and bending resistance of the flexible piezoresistive sensor are unknown and need to be examined.
Chinese patent CN104262967A discloses a sensitive material for pressure sensor, which has better stability and sensitivity, however, the bending resistance is not involved and is to be examined.
The Chinese patent CN104558701A utilizes a novel assembly method to prepare a graphene hyperelastic macroscopic material with a specific layered microstructure, the material has better mechanical resilience characteristics and pressure sensitivity, but the stability and the adhesion force with a flexible substrate of the material are unknown and need to be wiped.
Chinese patent CN109637697A discloses a graphene conductive slurry and a preparation method thereof, and the method comprises the steps of mixing a dispersant and a solvent to obtain a mixed solution, so that the dispersant and the solvent are uniformly mixed; adding graphene, carbon nanotubes and a binder into the mixed solution to obtain a first premix; stirring and ultrasonically dispersing the first premix to obtain a second premix; grinding the second premix to obtain conductive slurry; and carrying out ultrasonic dispersion on the conductive slurry to obtain the graphene conductive slurry. The method is simple and feasible, the structures of the graphene and the carbon nano tube cannot be damaged, and the prepared graphene slurry has less agglomeration phenomenon, excellent conductivity and stable and uniform properties, and is suitable for large-scale industrial production. However, the conductive paste is developed for an electrode material, and does not relate to pressure sensitivity and bending performance at all, and the conductive paste is not suitable for preparing a flexible pressure sensor in terms of the formula of the conductive paste.
In a word, the sensitive material in the existing flexible pressure sensor has the problems of poor stability, low sensitivity, high minimum detection limit, poor bending resistance, insufficient adhesion force with a flexible substrate and the like. If the material has high sensitivity, but the bending resistance is not good; some materials have good bending resistance, but are not highly sensitive or stable. At present, no material can well meet the comprehensive performance requirements of stability, sensitivity, bending resistance, low minimum detection limit, good adhesion with a flexible substrate and the like.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a novel conductive carbon paste for a flexible pressure sensor and a preparation method thereof.
The invention also provides a flexible pressure sensor.
In order to achieve the purpose, the invention adopts the technical scheme that:
the conductive carbon paste for the flexible pressure sensor comprises the following raw materials in percentage by mass:
according to some preferred embodiments of the present invention, the raw material formula of the conductive carbon paste comprises the following components by mass percent:
preferably, the mass ratio of the graphene to the carbon nanotubes is 20: 1.
According to some embodiments of the invention, the graphene is a thin layer graphene sheet of 1-5 layers.
According to some embodiments of the invention, the carbon nanotubes are single-walled carbon nanotubes, multi-walled carbon nanotubes, or a combination thereof.
According to some embodiments of the invention, the dispersant is one or more of polyvinyl alcohol, polyacrylamide, lysine, polyvinylpyrrolidone.
According to some embodiments of the present invention, the oleoresin is a blend resin of a polyurethane resin, a polysiloxane resin and an acrylic resin, wherein the mass ratio of the polyurethane resin to the polysiloxane resin is 2: 5-2: 3, and the mass ratio of the polysiloxane resin to the acrylic resin is 1: 8-4: 9. The three resins are selected to be blended to serve as a resin system, and the electrical property stability and the pressure sensitivity are improved.
Further, the polyurethane resin is oil-based polyurethane resin with the solid content of 30-45%;
the polysiloxane resin is solvent-free liquid polysiloxane resin;
the acrylic resin is oily acrylic resin with solid content of 45-75%.
The conductive carbon paste is prepared by compounding polyurethane resin, acrylic resin and polysiloxane resin, and is beneficial to improving the stability, pressure sensitivity and bending resistance of the conductive carbon paste by adjusting the proportion of the resin, graphene and carbon nano tubes and using a thickening agent and a coupling agent.
According to some embodiments of the invention, the thickener is locust bean gum. The addition of the thickening agent not only can be beneficial to improving the printing performance of the conductive carbon paste, but also can avoid the conductive carbon paste from settling after being placed for a period of time, and improve the stability of the conductive carbon paste.
According to some embodiments of the invention, the coupling agent is a silane coupling agent. A certain amount of coupling agent is added in the formula and matched with the oleoresin, so that the adhesion of the conductive carbon paste and the flexible substrate is further improved.
According to some embodiments of the invention, the first solvent is ethylene glycol.
According to some embodiments of the invention, the second solvent is one or more of N-methylpyrrolidone, diethylene glycol ethyl ether acetate, and ethylene glycol butyl ether.
The invention adopts another technical proposal: a preparation method of the conductive carbon paste for the flexible pressure sensor comprises the following steps:
(1) mixing graphene, a carbon nano tube, a dispersant and a first solvent according to a formula, and grinding until the granularity of slurry is 0.01-5 mu m;
(2) adding oleoresin, a coupling agent and a second solvent into the slurry prepared in the step (1), and grinding at 40-70 ℃;
(3) adding a thickening agent into the slurry prepared in the step (2), stirring, and grinding to a particle size of below 6 microns;
(4) and (4) defoaming the slurry prepared in the step (3) to prepare the conductive carbon slurry.
Further, in the step (1), the grinding is carried out at 50-80 ℃. Grinding the graphene, the carbon nano tubes, the dispersing agent and the first solvent at 50-80 ℃ is beneficial to increasing the contact between the graphene and the carbon nano tubes and the ordered distribution of the carbon nano tubes among graphene sheet layers, and is beneficial to the formation of a later-stage conductive network, so that the pressure sensitivity of the conductive carbon paste is improved.
Further, in the step (2), the grinding is carried out at 40-70 ℃ for 20-40 min.
Further, in the step (3), the stirring is carried out until the slurry is not layered.
Further, in the step (4), the defoaming is carried out until the bubble residue is not more than 0.5%.
According to yet another technical scheme, the flexible pressure sensor comprises a flexible substrate and a pressure sensing layer formed on the flexible substrate, wherein the pressure sensing layer is formed by coating the conductive carbon paste on the flexible substrate and curing.
The thickness of the pressure sensing layer is more than 10 μm and less than 1000 μm.
Further, the flexible substrate is a Polydimethylsiloxane (PDMS) flexible substrate.
Further, the curing is carried out at 100-150 ℃.
Further, the coating is performed by printing.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages:
according to the conductive carbon paste, the graphene sheet and a small amount of carbon nano tubes are added into a resin system, and a dispersing agent, a coupling agent and a plasticizer are used in a matching manner, so that the prepared conductive carbon paste has the advantages of high sensitivity, high stability, low lowest detection limit, bending resistance, strong adhesion with a flexible substrate and the like. The cured conductive carbon paste is applied with certain pressure, a conductive network formed by graphene and carbon nano tubes filled in a resin system is changed, the resistance of the cured conductive carbon paste is increased, the pressure sensitivity is high, and the small pressure change can be sensed.
The preparation method of the conductive carbon paste has low requirements on equipment, simple process and easy operation.
The conductive carbon paste is used for preparing a flexible pressure sensor, the flexible pressure sensor has high sensitivity, the resistance can be increased under the micro pressure of 0.5Pa, and the conductive carbon paste also has the advantages of high electrical property stability, bending resistance and the like.
Drawings
FIG. 1 is a scanning electron microscope image of a cross section of a sensing pattern prepared using the conductive carbon paste of example 1;
fig. 2 is a graph of the rate of change of resistance versus pressure for a sensing pattern prepared using the conductive carbon paste of example 1.
Detailed Description
The technical solutions of the present invention are described in detail below with reference to specific examples so that those skilled in the art can better understand and implement the technical solutions of the present invention, but the present invention is not limited to the scope of the examples.
Example 1
The conductive carbon paste for the flexible pressure sensor provided by the embodiment comprises the following raw materials in percentage by mass: 8% of graphene, 0.4% of carbon nano tube, 50% of ethylene glycol, 0.05% of polyvinyl alcohol, 0.2% of polyvinylpyrrolidone, 12% of oleoresin, 0.05% of silane coupling agent, 2% of locust bean gum, 10% of butyl cellosolve and 17.3% of N-methyl pyrrolidone.
Wherein the oleoresin is polyurethane resin, the polysiloxane resin and the acrylic resin are in a mass ratio of 1:2:7, and the polyurethane resin is obtained from Dongguan treasure chemical Co., Ltd and has the model of MR-917; the polysiloxane resin was purchased from wacker chemical (china) ltd, model MSE 100; acrylic resin was purchased from Weifang Fule New Material Co., Ltd, model number CFT 8260.
The silane coupling agent is represented by the formula A187.
The graphene is 1-5 layers of thin-layer graphene, is self-made, and is obtained by mechanically/chemically stripping graphite.
The carbon nanotube is a single-walled carbon nanotube and is purchased from Jiangsu Xiancheng nano material science and technology ltd with the model of XFS 28.
The conductive carbon paste is prepared by the following method:
(1) mixing graphene, carbon nano tubes, polyvinyl alcohol, polyvinylpyrrolidone and ethylene glycol, adding the mixture into a sand mill, grinding the mixture at the rotation speed of 2500 rpm for 120 minutes until the granularity of the slurry is 0.01-5 mu m, and controlling the grinding temperature at 60 ℃.
(2) Mixing polyurethane resin, polysiloxane resin and acrylic resin to obtain oleoresin, and then adding the oleoresin, a silane coupling agent, ethylene glycol butyl ether, N-methyl pyrrolidone and the slurry obtained in the step (1) into a sand mill for grinding, wherein the rotation speed is controlled to be 1000 revolutions per minute, the grinding time is 30 minutes, and the grinding temperature is controlled to be 50 ℃.
(3) And (3) adding the locust bean gum into the slurry obtained in the step (2), stirring while adding, and stirring uniformly, wherein the stirring speed is controlled to be 500 revolutions per minute.
(4) And (4) adding the slurry obtained in the step (3) into a three-roll grinder for grinding for 3-5 times, and controlling the roll gap to be 6 microns so that the particle size of the slurry is below 6 microns.
(5) And (4) adding the slurry obtained in the step (4) into a defoaming stirrer to perform defoaming and stirring treatment, wherein the time is controlled to be 90 seconds, the vacuum degree is controlled to be 0.1MPa, the rotating speed is controlled to be 2500 revolutions per minute, and the residual content of bubbles is less than 0.5%, so that the conductive carbon slurry for the flexible pressure sensor is prepared.
Example 2
The raw material formula of the conductive carbon paste for the flexible pressure sensor provided in this embodiment is shown in table 1, wherein the mass ratio of the oleoresin to the polyurethane resin to the polysiloxane resin to the acrylic resin is 2:3: 7.
The dispersant is lysine.
The second solvent is ethylene glycol butyl ether and N-methyl pyrrolidone.
Example 3
The formula of the raw materials of the conductive carbon paste for the flexible pressure sensor provided in this example is shown in table 1, and the other steps are the same as those of example 1, wherein,
the resin is polyurethane resin, polysiloxane resin and acrylic resin according to the mass ratio of 1:2: 7.
The dispersant is polyvinylpyrrolidone.
The second solvent is N-methyl pyrrolidone and diethylene glycol ethyl ether acetate.
Example 4
The formula of the raw materials of the conductive carbon paste for the flexible pressure sensor provided in this example is shown in table 1, and the other examples are the same as example 1, wherein the resin is polyurethane resin, polysiloxane resin and acrylic resin according to the mass ratio of 1:2: 7. The dispersant is polyacrylamide. The second solvent is N-methyl pyrrolidone and diethylene glycol ethyl ether acetate.
Comparative example 1
The raw material formula of the conductive carbon paste provided by the comparative example is shown in table 1, wherein the mass ratio of graphene to carbon nanotubes is 4:1, and the rest is the same as that in example 1.
Comparative example 2
The raw material formulation of the conductive carbon paste provided in this comparative example is shown in table 1, and the rest is the same as that of example 1.
In the comparative example, the oily resin was not added with a urethane resin, and a silicone resin and an acrylic resin were used in a mass ratio of 2: 7.
comparative example 3
The raw material formulation of the conductive carbon paste provided in this comparative example is shown in table 1, and the rest is the same as that of example 1.
In the present comparative example, in the oily resin, a silicone resin was not added, and a polyurethane resin and an acrylic resin were used in a mass ratio of 1: 7.
comparative example 4
The raw material formulation of the conductive carbon paste provided in this comparative example is shown in table 1, and the rest is the same as that of example 1.
In this comparative example, only an acrylic resin was used as the oleoresin.
Table 1 shows the raw material formulations (in mass percent) of the conductive carbon pastes of examples 1 to 4 and comparative examples 1 to 4
| Raw materials | Example 1 | Example 2 | Example 3 | Example 4 | Comparative example 1 | Comparative example 2 | Comparative example 3 | Comparative example 4 |
| Graphene | 8 | 8 | 7.8 | 8 | 8 | 8 | 8 | 8 |
| Carbon nanotube | 0.4 | 0.4 | 0.6 | 0.5 | 1.6 | 0.4 | 0.4 | 0.4 |
| Dispersing agent | 0.25 | 0.25 | 0.25 | 0.25 | 0.25 | 0.25 | 0.25 | 0.25 |
| Oleoresin | 12 | 12 | 12 | 16 | 12 | 12 | 12 | 12 |
| Thickening agent | 2 | 2 | 2 | 1.5 | 2 | 2 | 2 | 2 |
| Coupling agent | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 |
| A first solvent | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 50 |
| A second solvent | 27.3 | 27.3 | 27.3 | 23.7 | 26.1 | 27.3 | 27.3 | 27.3 |
Performance testing
1. Performance testing of the conductive carbon paste of example 1
Preparation of a detection sample: the conductive carbon paste of example 1 was printed on a PDMS flexible substrate by screen printing, and baked at 100 to 150 ℃ for 3 minutes to form a sensing pattern with a thickness of 20 μm and an area of 1cm × 1cm on the flexible substrate.
A. A cross section of a sensing pattern prepared using the conductive carbon paste of example 1 was subjected to scanning electron microscope analysis, as shown in fig. 1.
B. Bending resistance of the detection sample is tested by bending the detection sample by 90 degrees, and after bending for 1 ten thousand times, the sensing pattern is not damaged and does not fall off.
Respectively carrying out electrical property detection on the detection sample before and after bending, wherein the resistance is 45.6 omega before bending; after bending for 1 ten thousand times, the resistance was 45.75 Ω. Therefore, after bending for 1 ten thousand times, the resistance change is small, which indicates that the electrical property of the sample is stable.
C. Applying pressure to the sensing pattern of the sample, and measuring the resistance change rate (Δ R/R) of the sensing pattern0Wherein Δ R ═ RRT－R0，R0Is an initial resistance, RRTReal time resistance) as a function of pressure, as shown in fig. 2. As can be seen from fig. 2, the resistance of the sensing pattern layer increases with increasing pressure, and when a pressure of 0.5Pa is applied to the sensing pattern, the rate of change in resistance is 0.00525, according to the sensitivity formula S ═ Δ R/R0(P is the pressure applied to the sample), corresponding to a sensitivity of 10.5kPa-1。
2. Performance testing was performed on the electroconductive pastes of examples 2 to 4 and comparative examples 1 to 4
1. Preparation of a detection sample: the conductive pastes of examples 2-4 and comparative examples 1-4 were printed on a PDMS flexible substrate by screen printing, and baked at 100-150 ℃ for 3 minutes to form a sensing pattern with a thickness of 20 μm and an area of 1cm × 1cm on the flexible substrate.
2. The samples prepared by using the conductive carbon pastes of examples 2 to 4 were subjected to bending resistance tests of bending at 90 degrees, and the samples before and after bending were subjected to electrical property tests, respectively.
The results were: the sample prepared by using the conductive carbon paste of examples 2 to 4 had no damage to the sensing pattern and did not fall off after being bent for 1 ten thousand times. And the difference value of the resistance before bending and the resistance after bending for 1 ten thousand times is within the range of 0-0.15 omega, the resistance change is small, and the electrical property of the sample is stable.
3. The samples prepared by using the conductive carbon pastes of the embodiments 2 to 4 were applied with pressure, and the graph of the change rate of resistance of the sensing pattern with the change of pressure was substantially the same as the graph of the sample of the embodiment 1, indicating that the conductive carbon paste had better pressure sensitivity.
As a result of applying pressure to the samples prepared using the conductive carbon pastes of comparative examples 1 to 4, respectively, when the applied pressure was from 0.5Pa to 25kPa, the resistance of the samples was not substantially changed, and there was no pressure sensitivity, so that the samples prepared using the conductive carbon pastes of comparative examples 1 to 4 were not subjected to the test of other properties.
The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.
The endpoints of the ranges and any values disclosed herein are not limited to the precise range or value, and such ranges or values should be understood to encompass values close to those ranges or values. For ranges of values, between the endpoints of each of the ranges and the individual points, and between the individual points may be combined with each other to give one or more new ranges of values, and these ranges of values should be considered as specifically disclosed herein.
Claims (9)
1. The conductive carbon paste for the flexible pressure sensor is characterized by comprising the following components in percentage by mass:
1-25% of graphene;
0.04-1.5% of carbon nano tubes;
0.001-1% of a dispersant;
5-45% of an oleoresin;
1-10% of a thickening agent;
0.01-5% of a coupling agent;
25-70% of a first solvent;
20-40% of a second solvent;
the oil resin is a blended resin of polyurethane resin, polysiloxane resin and acrylic resin, wherein the mass ratio of the polyurethane resin to the polysiloxane resin is 2: 5-2: 3, and the mass ratio of the polysiloxane resin to the acrylic resin is 1: 8-4: 9.
2. The conductive carbon paste for the flexible pressure sensor according to claim 1, wherein the conductive carbon paste comprises the following raw materials in percentage by mass:
6-10% of graphene;
0.2-1% of carbon nano tube;
0.01-0.5% of a dispersant;
10-30% of an oily resin;
2-5% of a thickening agent;
0.02-2% of a coupling agent;
35-55% of a first solvent;
25-35% of a second solvent.
3. The conductive carbon paste for a flexible pressure sensor according to claim 2, wherein: the carbon nano tube is one or more of a single-walled carbon nano tube and a multi-walled carbon nano tube.
4. The conductive carbon paste for a flexible pressure sensor according to claim 2, wherein: the graphene is a graphene sheet with 1-5 layers.
5. The conductive carbon paste for a flexible pressure sensor according to claim 2, wherein: the thickening agent is locust bean gum; the coupling agent is a silane coupling agent.
6. The conductive carbon paste for a flexible pressure sensor according to claim 2, wherein: the first solvent is ethylene glycol; the second solvent is one or the combination of more of N-methyl pyrrolidone, diethylene glycol ethyl ether acetate and ethylene glycol butyl ether.
7. A preparation method of the conductive carbon paste for the flexible pressure sensor according to any one of claims 1 to 6, wherein the preparation method comprises the following steps:
(1) mixing graphene, a carbon nano tube, a dispersant and a first solvent according to a formula, and grinding until the granularity of slurry is 0.01-5 mu m;
(2) adding oleoresin, a coupling agent and a second solvent into the slurry prepared in the step (1), and grinding;
(3) adding a thickening agent into the slurry prepared in the step (2), stirring, and grinding to a particle size of below 6 microns;
(4) and (4) defoaming the slurry prepared in the step (3) to prepare the conductive carbon slurry.
8. The method of claim 7, wherein: in the step (1), the grinding is carried out at 50-80 ℃; in the step (2), the grinding is carried out at 40-70 ℃ for 20-40 min; and (3) stirring until the slurry is not layered.
9. A flexible pressure sensor comprising a flexible substrate and a pressure sensing layer formed on the flexible substrate, characterized in that: the pressure sensing layer is formed by coating the conductive carbon paste of any one of claims 1-6 on the flexible substrate and curing.
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| PCT/CN2020/131016 WO2022041518A1 (en) | 2020-08-28 | 2020-11-24 | Electrically conductive carbon paste for flexible pressure sensor and preparation method therefor, and pressure sensor |
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| CN109945999B (en) * | 2019-03-15 | 2020-12-29 | 电子科技大学 | Preparation method of flexible film pressure sensor |
| KR102115267B1 (en) * | 2019-03-29 | 2020-05-26 | 울산과학기술원 | Self-Healing structural health monitoring system and monitoring method using It |
| CN111238695B (en) * | 2020-01-17 | 2021-09-21 | 清华大学 | Piezoresistive material layer, pressure sensor and preparation method |
| CN111505065B (en) * | 2020-04-20 | 2023-04-18 | 河北工业大学 | Interdigital counter electrode type flexible touch sensor based on super-capacitor sensing principle and preparation method thereof |
-
2020
- 2020-08-28 CN CN202010883716.6A patent/CN112254850B/en active Active
- 2020-11-24 WO PCT/CN2020/131016 patent/WO2022041518A1/en active Application Filing
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| WO2022041518A1 (en) | 2022-03-03 |
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