CN112198995A - External hanging type touch sensing device and manufacturing method thereof - Google Patents
External hanging type touch sensing device and manufacturing method thereof Download PDFInfo
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- CN112198995A CN112198995A CN202011253086.0A CN202011253086A CN112198995A CN 112198995 A CN112198995 A CN 112198995A CN 202011253086 A CN202011253086 A CN 202011253086A CN 112198995 A CN112198995 A CN 112198995A
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0443—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
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Abstract
The invention provides an external hanging type touch sensing device and a manufacturing method thereof, wherein the method comprises the steps of providing a glass substrate; forming a metal layer on a glass substrate; performing a yellow light process on the metal layer to form a touch sensing electrode and a touch driving electrode; forming an insulating layer on the touch sensing electrode and the touch driving electrode; and coating a conductive material on the insulating layer, and performing a yellow light process on the conductive material to form a conductive layer to obtain the externally-hung touch sensing device. According to the scheme, the touch sensing electrode, the touch driving electrode and the conducting layer are formed by adopting a yellow light process, so that the touch precision of the externally-hung touch sensing device is improved.
Description
Technical Field
The invention relates to the technical field of display, in particular to an externally-hung touch sensing device and a manufacturing method thereof.
Background
With the development of touch technology, touch screens are widely used in liquid crystal display devices.
The conventional large-sized liquid crystal display device is limited by a manufacturing process, and generally adopts an out-of-the-shelf (OGS) touch screen. The externally hung touch screen completes the preparation of the touch sensing device on a single glass substrate. The existing external-hanging touch sensing device adopts a non-thin film transistor process, and the touch precision is poor.
Therefore, it is necessary to provide a method for manufacturing an external touch sensor with high touch precision.
Disclosure of Invention
The invention aims to provide an externally-hung touch sensing device and a manufacturing method thereof, which can improve the touch precision of the externally-hung touch sensing device.
The embodiment of the invention provides a manufacturing method of an externally hung touch sensing device, which comprises the following steps:
providing a glass substrate;
forming a metal layer on a glass substrate;
performing a yellow light process on the metal layer to form a touch sensing electrode and a touch driving electrode;
forming an insulating layer on the touch sensing electrode and the touch driving electrode;
and coating a conductive material on the insulating layer, and performing a yellow light process on the conductive material to form a conductive layer to obtain the externally-hung touch sensing device.
In an embodiment, before the step of coating the conductive material on the insulating layer and performing a photolithography process on the conductive material to form the conductive layer, the method further includes:
forming a through hole on the insulating layer through a yellow light process;
the step of coating the insulating layer with a conductive material and performing a yellow light process on the conductive material to form a conductive layer further comprises:
and filling part of conductive material into the through hole to electrically connect the conductive layer with the touch drive electrode.
In an embodiment, the step of coating a conductive material on the insulating layer and performing a yellow light process on the conductive material to form a conductive layer to obtain the external-hanging touch sensor further includes:
and forming a scratch-resistant layer on the conductive layer through a yellow light process to obtain the externally-hung touch sensing device.
In one embodiment, the thickness of the scratch-resistant layer ranges from 2000 angstroms to 20000 angstroms.
In an embodiment, after the step of coating a conductive material on the insulating layer and performing a yellow light process on the conductive material to form a conductive layer to obtain the external touch sensor, the method further includes:
and dividing the external touch sensing device according to a preset size to obtain a plurality of external touch screens.
In an embodiment, after the step of dividing the external touch sensing device according to a preset size to obtain a plurality of external touch screens, the method further includes:
and a polaroid is arranged on each externally-hung touch screen.
In one embodiment, the thickness of the touch sensing electrode and the touch driving electrode ranges from 2000 angstroms to 6000 angstroms.
In one embodiment, the conductive layer has a thickness ranging from 300 angstroms to 1000 angstroms.
The embodiment of the invention also provides an externally-hung touch sensing device which is prepared by adopting the manufacturing method of the externally-hung touch sensing device.
According to the externally-hung touch sensing device and the manufacturing method thereof provided by the embodiment of the invention, the touch sensing electrode, the touch driving electrode and the conductive layer are formed by adopting a yellow light process, and the manufactured externally-hung touch sensing device has higher touch precision.
Drawings
The technical solution and other advantages of the present application will become apparent from the detailed description of the embodiments of the present application with reference to the accompanying drawings.
Fig. 1 is a schematic flow chart illustrating a method for manufacturing an external touch sensor according to an embodiment of the present invention.
Fig. 2 is a schematic view of a first scenario of a manufacturing method of an external touch sensor according to an embodiment of the present invention.
Fig. 3 is a schematic diagram of a second scenario of a manufacturing method of an add-on touch sensor according to an embodiment of the present invention.
Fig. 4 is a schematic structural diagram of an external touch sensor according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be construed as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact of the first and second features, or may comprise contact of the first and second features not directly but through another feature in between. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The following disclosure provides many different embodiments or examples for implementing different features of the application. In order to simplify the disclosure of the present application, specific example components and arrangements are described below. Of course, they are merely examples and are not intended to limit the present application. Moreover, the present application may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.
The embodiment of the invention provides a manufacturing method of an externally hung touch sensing device. Referring to fig. 1, fig. 1 is a schematic flow chart illustrating a method for manufacturing an external touch sensor according to an embodiment of the present invention. As shown in fig. 1, the manufacturing method includes:
s101, providing a glass substrate.
As shown in fig. 2 or 3, a glass substrate 11 is provided. Here, desmear treatment may be performed on the glass substrate 11. Specifically, the adhesion of the glass substrate 11 can be improved by cleaning dirt, oil stain, and the like on the surface of the glass substrate 11.
And S102, forming a metal layer on the glass substrate.
Specifically, a metal material is coated on the glass substrate 11 to form the metal layer 12. The metal material may be ITO (Indium tin oxide).
S103, performing a yellow light process on the metal layer to form a touch sensing electrode and a touch driving electrode.
Specifically, a photosensitive material, such as a photoresist, is coated on the metal layer 12, the photoresist is exposed and developed, the remaining photoresist has a protective effect on the metal layer 12, and a touch sensing electrode (Receive, RX) and a touch driving electrode (Transport, TX) are obtained by etching and stripping. The photosensitive substance may be a Photoresist (Photoresist). Wherein the photoresist may be a positive photoresist or a negative photoresist. The positive photoresist is exposed to light, the properties of the light-sensitive portion are changed, and the exposed portion is removed after development. Here, exposure refers to exposure of a photoresist by light irradiation. The development is to process the exposed pattern and clearly display the pattern. The negative photoresist is exposed to light, the properties of the light-sensitive part are changed, and the exposed part is maintained after development.
The touch driving electrode TX is a capacitive driving signal output pin of the touch screen. The touch sensing electrode RX is a capacitive sensing input pin of the touch screen. The thickness of the touch sensing electrodes RX and the touch driving electrodes TX ranges from 2000 angstroms to 6000 angstroms. Preferably, the thickness of the touch sensing electrode RX and the touch driving electrode TX ranges from 3500 angstroms.
And S104, forming an insulating layer on the touch sensing electrode and the touch driving electrode.
The insulating layer 13 may be made of a material including teflon (PFA) or SiNx(silicon nitride film). The thickness of the insulating layer 13 ranges between 3000 angstroms and 15000 angstroms. Preferably, the thickness of the insulating layer 13 is 10000 angstroms.
In one embodiment, PFA may be coated on the touch sensing electrodes RX and the touch driving electrodes TX, or SiN may be depositedxAn insulating layer 13 is formed. Specifically, Chemical Vapor Deposition (CVD) may be used to deposit SiNx。
Further, the via 131 may be formed on the insulating layer 13 by a photolithography process.
And S105, coating a conductive material on the insulating layer, and performing a yellow light process on the conductive material to form a conductive layer to obtain the external hanging type touch sensing device.
The conductive material can be ITO, and ITO has high light transmittance and conductivity. After performing a photolithography process on the conductive material, the conductive layer 14 may be formed in a mesh shape. Specifically, a photoresist is coated on the conductive material, and then the photoresist is exposed and developed, the remaining photoresist has a protective effect on the conductive material, and then the conductive layer 14 is obtained by etching and stripping. The thickness of the conductive layer 14 ranges from 300 angstroms to 1000 angstroms. Preferably, the conductive layer 14 has a thickness of 500 angstroms.
In one embodiment, the through hole 131 is filled with a portion of conductive material, so that the conductive layer 14 is electrically connected to the touch driving electrode TX.
In one embodiment, the step of coating a conductive material on the insulating layer 13 and performing a photolithography process on the conductive material to form a conductive layer to obtain the on-cell touch sensor further includes:
and forming a scratch-resistant layer on the conductive layer through a yellow light process to obtain the externally-hung touch sensing device.
Specifically, a scratch-resistant material is coated on the conductive layer 14, a photoresist is coated on the scratch-resistant material, the photoresist is exposed and developed, the remaining photoresist has a protective effect on the scratch-resistant material, and the scratch-resistant layer 15 is obtained by etching and stripping. As shown in fig. 2, the constituent material of the scratch-resistant layer 15 may include PFA or SiNx. The thickness of the scratch-resistant layer 15 ranges between 2000 angstroms and 20000 angstroms. Preferably, the scratch resistant layer 15 has a thickness of 5000 angstroms.
The light transmittance of the external touch sensing device prepared by the method can be more than 97%, the surface impedance is lower than 5 ohms, the sensing capacitance is between 19 and 26 femtofarads (fF), and the time delay reaction time is between 3 and 4.6 microseconds (us).
And dividing the external touch sensing device 1 according to the preset size to obtain a plurality of external touch screens 2. For example, the preset size of the external touch screen 2 to be obtained is 32 inches, and the external touch sensing device 1 can be divided into 12 external touch screens 2 of 32 inches. The conductive layer, the touch sensing electrode and the touch driving electrode are directly formed on the glass substrate by adopting a thin film transistor manufacturing process, and the touch precision of the finally obtained externally-hung touch screen is higher.
Further, as shown in fig. 3, a polarizer 21 may be disposed on each of the external touch screens 2. The polarizer 21 not only has a polarization function, but also can protect the structures below the polarizer, such as the conductive layer 14, the touch sensing electrode RX, the touch driving electrode TX, and the like. The polarizer 21 is arranged on the external hanging type touch screen 2, and a yellow light process for forming the scratch-resistant layer 15 can be reduced.
In the manufacturing method of the externally-hung touch sensing device, the touch sensing electrode, the touch driving electrode and the conductive layer are formed by adopting a yellow light process, so that the manufactured externally-hung touch sensing device is higher in touch precision.
The embodiment of the invention also provides an externally hung touch sensing device. The externally hung touch sensing device is manufactured by the manufacturing method. Referring to fig. 4, fig. 4 is a schematic structural diagram of an external touch sensing device according to an embodiment of the present invention. As shown in fig. 4, the external touch sensor 1 includes: glass substrate 11, touch-control sensing electrode TX, touch-control driving electrode RX, insulating layer 13 and conducting layer 14.
In which the glass substrate 11 is desmutted. Specifically, the adhesion of the glass substrate 11 can be improved by cleaning dirt, oil stain, and the like on the surface of the glass substrate 11.
The touch driving electrode TX is a capacitive driving signal output pin of the touch screen. The touch sensing electrode RX is a capacitive sensing input pin of the touch screen. The thickness of the touch sensing electrodes RX and the touch driving electrodes TX ranges from 2000 angstroms to 6000 angstroms. Preferably, the thickness of the touch sensing electrode RX and the touch driving electrode TX ranges from 3500 angstroms.
The touch driving electrode TX and the touch sensing electrode RX are manufactured by a yellow light process. Specifically, as shown in fig. 2 or 3, a metal material is coated on the glass substrate 11 to form the metal layer 12. The metal material may be ITO (Indium tin oxide). Then, a photosensitive substance, such as a photoresist, is coated on the metal layer 12, the photoresist is exposed and developed, the remaining photoresist has a protective effect on the metal layer 12, and the touch sensing electrode RX and the touch driving electrode TX are obtained by etching and stripping. The photosensitive substance may be a Photoresist (Photoresist). Wherein the photoresist may be a positive photoresist or a negative photoresist. The positive photoresist is exposed to light, the properties of the light-sensitive portion are changed, and the exposed portion is removed after development. Here, exposure refers to exposure of a photoresist by light irradiation. The development is to process the exposed pattern and clearly display the pattern. The negative photoresist is exposed to light, the properties of the light-sensitive part are changed, and the exposed part is maintained after development.
The insulating layer 13 may be made of a material including teflon (PFA) or SiNx(silicon nitride film). The thickness of the insulating layer 13 ranges between 3000 angstroms and 15000 angstroms. Preferably, the thickness of the insulating layer 13 is 10000 angstroms.
In one embodiment, PFA may be coated on the touch sensing electrodes RX and the touch driving electrodes TX, or SiN may be depositedxAn insulating layer 13 is formed. Specifically, Chemical Vapor Deposition (CVD) may be used to deposit SiNx。
Further, the via 131 may be formed on the insulating layer 13 by a photolithography process.
The conductive layer 14 is formed by a photolithography process. Specifically, a conductive material is coated on the insulating layer 13. The conductive material can be ITO, and ITO has high light transmittance and conductivity. And then coating photoresist on the conductive material, exposing and developing the photoresist, protecting the conductive material by the remained photoresist, and finally obtaining the conductive layer 14 by etching and stripping. The thickness of the conductive layer 14 ranges from 300 angstroms to 1000 angstroms. Preferably, the conductive layer 14 has a thickness of 500 angstroms.
In one embodiment, the through hole 131 is filled with a portion of conductive material, so that the conductive layer 14 is electrically connected to the touch driving electrode TX.
Further, the external touch sensor 1 further includes a scratch-resistant layer 15. The constituent material of the scratch prevention layer 15 may include PFA or SiNx. The thickness of the scratch-resistant layer 15 ranges between 2000 angstroms and 20000 angstroms. Preferably, the scratch resistant layer 15 has a thickness of 5000 angstroms.
Wherein, the scratch-resistant layer 15 is manufactured by a yellow light process. Specifically, a scratch-resistant material is coated on the conductive layer 14, a photoresist is coated on the scratch-resistant material, the photoresist is exposed and developed, the remaining photoresist has a protective effect on the scratch-resistant material, and the scratch-resistant layer 15 is obtained by etching and stripping.
It should be noted that the light transmittance of the external touch sensor device can be greater than 97%, the surface impedance is lower than 5 ohms, the sensing capacitance is between 19 and 26 femtofarads (fF), and the delay response time is between 3 and 4.6 microseconds (us).
And dividing the external touch sensing device 1 according to the preset size to obtain a plurality of external touch screens 2. For example, the preset size of the external touch screen 2 to be obtained is 32 inches, and the external touch sensing device 1 can be divided into 12 external touch screens 2 of 32 inches. The conductive layer, the touch sensing electrode and the touch driving electrode are directly formed on the glass substrate by adopting a thin film transistor manufacturing process, and the touch precision of the finally obtained externally-hung touch screen is higher.
Further, as shown in fig. 3, a polarizer 21 may be disposed on each of the external touch screens 2. The polarizer 21 not only has a polarization function, but also can protect the structures below the polarizer, such as the conductive layer 14, the touch sensing electrode RX, the touch driving electrode TX, and the like. The polarizer 21 is arranged on the external hanging type touch screen 2, and a yellow light process for forming the scratch-resistant layer 15 can be reduced.
In the externally-hung touch sensing device provided by the embodiment of the invention, the touch sensing electrode, the touch driving electrode and the conductive layer are formed by adopting a yellow light process, so that the manufactured externally-hung touch sensing device has higher touch precision.
In the foregoing embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.
The externally-hung touch sensing device and the manufacturing method thereof provided by the embodiment of the application are described in detail, a specific example is applied in the description to explain the principle and the implementation of the application, and the description of the embodiment is only used for helping to understand the technical scheme and the core idea of the application; those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications or substitutions do not depart from the spirit and scope of the present disclosure as defined by the appended claims.
Claims (10)
1. A manufacturing method of an external touch sensing device is characterized by comprising the following steps:
providing a glass substrate;
forming a metal layer on a glass substrate;
performing a yellow light process on the metal layer to form a touch sensing electrode and a touch driving electrode;
forming an insulating layer on the touch sensing electrode and the touch driving electrode;
and coating a conductive material on the insulating layer, and performing a yellow light process on the conductive material to form a conductive layer to obtain the externally-hung touch sensing device.
2. The method of claim 1, wherein before the steps of coating the insulating layer with a conductive material and performing a photolithography process on the conductive material to form a conductive layer, the method further comprises:
forming a through hole on the insulating layer through a yellow light process;
the step of coating the insulating layer with a conductive material and performing a yellow light process on the conductive material to form a conductive layer further comprises:
and filling part of conductive material into the through hole to electrically connect the conductive layer with the touch drive electrode.
3. The method of claim 1, wherein the step of coating the insulating layer with a conductive material and performing a photolithography process on the conductive material to form a conductive layer to obtain an on-cell touch sensor further comprises:
and forming a scratch-resistant layer on the conductive layer through a yellow light process to obtain the externally-hung touch sensing device.
4. The method as claimed in claim 3, wherein the scratch-resistant layer has a thickness of 2000-20000 angstroms.
5. The method of claim 1, wherein after the step of coating the insulating layer with a conductive material and performing a photolithography process on the conductive material to form a conductive layer to obtain an on-cell touch sensor, the method further comprises:
and dividing the external touch sensing device according to a preset size to obtain a plurality of external touch screens.
6. The method for manufacturing an external touch sensor according to claim 5, wherein after the step of dividing the external touch sensor into a plurality of external touch screens according to the preset size, the method further comprises:
and a polaroid is arranged on each externally-hung touch screen.
7. The method of claim 1, wherein the touch sensing electrodes and the touch driving electrodes have a thickness ranging from 2000 angstroms to 6000 angstroms.
8. A method of manufacturing an on-hook touch sensor device according to claim 1, wherein the thickness of the conductive layer is in the range of 300 a to 1000 a.
9. A method for manufacturing an externally-hung touch sensor device according to claim 1, wherein the thickness of the insulating layer is in the range of 3000 angstroms to 15000 angstroms.
10. An external touch sensor, which is prepared by the method of any one of claims 1 to 9.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011253086.0A CN112198995A (en) | 2020-11-11 | 2020-11-11 | External hanging type touch sensing device and manufacturing method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011253086.0A CN112198995A (en) | 2020-11-11 | 2020-11-11 | External hanging type touch sensing device and manufacturing method thereof |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102289334A (en) * | 2011-08-16 | 2011-12-21 | 深圳市宝明科技股份有限公司 | Indium tin oxide (ITO) through hole capacitance touch screen and method for manufacturing same |
| CN102866816A (en) * | 2012-09-03 | 2013-01-09 | 北京京东方光电科技有限公司 | Capacitive touch sensor, manufacturing method thereof, touch screen and display device |
| CN103092414A (en) * | 2013-01-17 | 2013-05-08 | 北京京东方光电科技有限公司 | External type touch screen, manufacturing method thereof and display device |
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- 2020-11-11 CN CN202011253086.0A patent/CN112198995A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102289334A (en) * | 2011-08-16 | 2011-12-21 | 深圳市宝明科技股份有限公司 | Indium tin oxide (ITO) through hole capacitance touch screen and method for manufacturing same |
| CN102866816A (en) * | 2012-09-03 | 2013-01-09 | 北京京东方光电科技有限公司 | Capacitive touch sensor, manufacturing method thereof, touch screen and display device |
| CN103092414A (en) * | 2013-01-17 | 2013-05-08 | 北京京东方光电科技有限公司 | External type touch screen, manufacturing method thereof and display device |
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