CN112197891B - Sensor, temperature and pressure detection method and sensing device - Google Patents

Sensor, temperature and pressure detection method and sensing device Download PDF

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Publication number
CN112197891B
CN112197891B CN202011062375.2A CN202011062375A CN112197891B CN 112197891 B CN112197891 B CN 112197891B CN 202011062375 A CN202011062375 A CN 202011062375A CN 112197891 B CN112197891 B CN 112197891B
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conductive electrode
substrate
electrode
conductive
temperature
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CN112197891A (en
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赵剑
秦锋
李小和
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Xiamen Tianma Microelectronics Co Ltd
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Xiamen Tianma Microelectronics Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/14Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/34Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements
    • G01K7/343Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements the dielectric constant of which is temperature dependant

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  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The invention discloses a sensor, a temperature and pressure detection method and a sensing device, wherein the sensor comprises: a first substrate provided with a first conductive electrode; the second substrate is arranged opposite to the first substrate, a second conductive electrode and a third conductive electrode which are opposite to the first conductive electrode are arranged on the second substrate, and the minimum distance from the second conductive electrode to the first conductive electrode is larger than the minimum distance from the third conductive electrode to the first conductive electrode; a liquid crystal layer; a support portion; the detection assembly comprises a first capacitance detection unit, a second capacitance detection unit and a temperature and pressure calculation module, wherein the first capacitance detection unit is electrically connected with the second conductive electrode, the second capacitance detection unit is electrically connected with the third conductive electrode, and the temperature and pressure calculation module is electrically connected with the first capacitance detection unit and the second capacitance detection unit. The sensor provided by the embodiment of the invention can simultaneously realize synchronous measurement of two indexes of temperature and pressure, and has the advantages of simple structure and low cost.

Description

Sensor, temperature and pressure detection method and sensing device
Technical Field
The invention belongs to the technical field of electronic products, and particularly relates to a sensor, a temperature and pressure detection method and a sensing device.
Background
In the prior art, a pressure sensor and a temperature sensor are generally arranged for detecting temperature and pressure respectively, the detection output is carried out respectively, and the detection output mainly comprises a mechanical structure or a micro electro mechanical system structure.
Therefore, a new sensor, a method for detecting temperature and pressure, and a sensing device are needed.
Disclosure of Invention
The embodiment of the invention provides a sensor, a temperature and pressure detection method and a sensing device, which can simultaneously realize synchronous measurement of two indexes of multipoint temperature and pressure, and have the advantages of simple structure and low cost.
In a first aspect, an embodiment of the present invention provides a sensor, including: a first substrate provided with a first conductive electrode; the second substrate is arranged opposite to the first substrate, a second conductive electrode and a third conductive electrode which are opposite to the first conductive electrode are arranged on the second substrate, and the minimum distance from the second conductive electrode to the first conductive electrode is larger than the minimum distance from the third conductive electrode to the first conductive electrode; the liquid crystal layer is arranged between the first substrate and the second substrate, and at least one of the first substrate and the second substrate is provided with a surface to be measured far away from the liquid crystal layer; the supporting part can be deformed and is arranged between the first substrate and the second substrate; the detection assembly comprises a first capacitance detection unit, a second capacitance detection unit and a temperature and pressure calculation module, wherein the first capacitance detection unit is electrically connected with the second conductive electrode, the second capacitance detection unit is electrically connected with the third conductive electrode, and the temperature and pressure calculation module is electrically connected with the first capacitance detection unit and the second capacitance detection unit.
In a second aspect, an embodiment of the present invention provides a temperature and pressure detection method, where the sensor in the above embodiment detects temperature and pressure, the detection method includes: acquiring a first capacitance value between the first conductive electrode and the second conductive electrode and a second capacitance value between the first conductive electrode and the third conductive electrode; and acquiring pressure information of the surface to be measured subjected to the external force and temperature information of the sensor according to the first capacitance value and the second capacitance value based on a preset calculation rule.
In a third aspect, an embodiment of the present invention provides a sensing apparatus, including: a plurality of sensors, the sensors being the sensors in the above embodiments; the shell, each sensor interval is located on the shell.
Compared with the related art, the sensor provided by the embodiment of the invention comprises a first substrate, a second substrate, a liquid crystal layer, a supporting part and a detection assembly which are oppositely arranged, wherein the capacitance values between a first conductive electrode and a second conductive electrode and the capacitance values between the first conductive electrode and a third conductive electrode are respectively obtained through a first capacitance detection unit and a second capacitance detection unit, the minimum distance between the second conductive electrode and the first conductive electrode is larger than the minimum distance between the third conductive electrode and the first conductive electrode, namely the thickness of a medium between the first conductive electrode and the second conductive electrode, namely the liquid crystal layer, is different from the thickness of the liquid crystal layer between the first conductive electrode and the second conductive electrode, and then the pressure calculation module of the detection assembly is used for respectively calculating the stress of the sensor according to the obtained capacitance values between the first conductive electrode and the second conductive electrode and the capacitance values between the first conductive electrode and the third conductive electrode according to a preset calculation rule The sensor provided by the embodiment of the invention can simultaneously realize synchronous measurement of two indexes of temperature and pressure, and has simple structure and low cost.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments of the present invention will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a front view of a sensor provided by an embodiment of the present invention;
FIG. 2 is a front view of yet another sensor provided by an embodiment of the present invention;
FIG. 3 is a front view of yet another sensor provided by an embodiment of the present invention;
FIG. 4 is a top view of a first conductive electrode provided by an embodiment of the present invention;
FIG. 5 is a top view of a second conductive electrode and a third conductive electrode provided by an embodiment of the present invention;
FIG. 6 is a front view of yet another sensor provided by an embodiment of the present invention;
FIG. 7 is a front view of yet another sensor provided by an embodiment of the present invention;
FIG. 8 is a front view of yet another sensor provided by an embodiment of the present invention;
FIG. 9 is a flow chart of a method for detecting temperature and pressure according to an embodiment of the present invention;
fig. 10 is a flowchart of another temperature and pressure detecting method according to an embodiment of the present invention.
Detailed Description
Features and exemplary embodiments of various aspects of the present invention will be described in detail below. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of the present invention by illustrating examples of the present invention.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
For better understanding of the present invention, a sensor, a temperature and pressure detecting method, and a sensing device according to embodiments of the present invention will be described in detail with reference to fig. 1 to 10.
Referring to fig. 1, fig. 1 is a front view of a sensor according to an embodiment of the present invention, and the embodiment of the present invention provides a sensor including: a first substrate 1 provided with a first conductive electrode 3; the second substrate 2 is arranged opposite to the first substrate 1, a second conductive electrode 4 and a third conductive electrode 5 which are opposite to the first conductive electrode 3 are arranged on the second substrate 2, and the minimum distance from the second conductive electrode 4 to the first conductive electrode 3 is larger than the minimum distance from the third conductive electrode 5 to the first conductive electrode 3; the liquid crystal layer 6 is arranged between the first substrate 1 and the second substrate 2, and at least one of the first substrate 1 and the second substrate 2 is provided with a surface to be measured far away from the liquid crystal layer 6; a support part 7 which is deformable and is arranged between the first substrate 1 and the second substrate 2; the detecting assembly comprises a first capacitance detecting unit C1, a second capacitance detecting unit C2 and a temperature and pressure calculating module S1, wherein the first capacitance detecting unit C1 is electrically connected with the second conductive electrode 4, the second capacitance detecting unit C2 is electrically connected with the third conductive electrode 5, and the temperature and pressure calculating module S1 is electrically connected with the first capacitance detecting unit C1 and the second capacitance detecting unit C2.
The sensor provided by the embodiment of the invention comprises a first substrate 1, a second substrate 2, a liquid crystal layer 6, a supporting part 7 and a detection assembly which are oppositely arranged, wherein a capacitance value between a first conductive electrode 3 and a second conductive electrode 4 and a capacitance value between the first conductive electrode 3 and a third conductive electrode 5 are respectively obtained through a first capacitance detection unit C1 and a second capacitance detection unit C2, the minimum distance between the second conductive electrode 4 and the first conductive electrode 3 is greater than the minimum distance between the third conductive electrode 5 and the first conductive electrode 3, namely the thickness of a medium between the first conductive electrode 3 and the second conductive electrode 4, namely the liquid crystal layer 6 is different from the thickness of the liquid crystal layer 6 between the first conductive electrode 3 and the second conductive electrode 4, and then a pressure calculation module of the detection assembly is used for calculating the capacitance value between the first conductive electrode 3 and the second conductive electrode 4 and the capacitance value between the first conductive electrode 3 and the third conductive electrode 3 and the liquid crystal layer 6 according to a preset calculation rule The capacitance values between the two electrodes 5 respectively calculate the external force applied to the sensor and the temperature of the liquid crystal layer 6, namely the temperature of the environment where the sensor is located.
It should be noted that the first conductive electrode 3 may be connected to a fixed potential, and as a reference, the first conductive electrode 3 is usually grounded, and the first capacitance detecting unit C1 and the second capacitance detecting unit C2 may specifically employ a capacitance measuring circuit capable of measuring capacitance values, so as to measure capacitance values between the first conductive electrode 3 and the second conductive electrode 4 and between the first conductive electrode 3 and the third conductive electrode 5, respectively.
At least one of the first substrate 1 and the second substrate 2 has a surface to be measured away from the liquid crystal layer 6, i.e., an outer surface of at least one of the first substrate 1 and the second substrate 2 is used for a user to press or is used to bear other external force.
The deformable supporting part 7 is arranged between the first substrate 1 and the second substrate 2, and the deformable supporting part 7 specifically means that when the surface to be measured of the first substrate 1 or the second substrate 2 is acted by an external force, the supporting part 7 can be deformed by the force, and generates displacement along the direction perpendicular to the first conductive electrode 3, so that the external force applied to the sensor can be calculated conveniently.
In order to realize that the minimum distance from the second conductive electrode 4 to the first conductive electrode 3 is greater than the minimum distance from the third conductive electrode 5 to the first conductive electrode 3, in some alternative embodiments, a protruding structure 8 is disposed on a side of the second substrate 2 facing the first substrate 1, and at least one of the second conductive electrode 4 and the third conductive electrode 5 is disposed on a surface of the protruding structure 8 close to the first substrate 1.
It should be noted that, the protruding structure 8 may be disposed only under the second conductive electrode 4 or under the third conductive electrode 5, or the second conductive electrode 4 and the third conductive electrode 5 may be disposed on the surface of the protruding structure 8 close to the first substrate 1 at the same time, as long as the height of the protruding structure 8 where the second conductive electrode 4 is located is greater than the height of the protruding structure 8 where the third conductive electrode 5 is located, and the requirement that the minimum distance from the second conductive electrode 4 to the first conductive electrode 3 is greater than the minimum distance from the third conductive electrode 5 to the first conductive electrode 3 is met, of course, the minimum distance from the second conductive electrode 4 to the first conductive electrode 3 may also be set to be smaller than the minimum distance from the third conductive electrode 5 to the first conductive electrode 3, as long as the minimum distance from the second conductive electrode 4 to the first conductive electrode 3 is not equal to the minimum distance from the third conductive electrode 5 to the first conductive electrode 3, the protruding structure 8 may be an integrated structure with the first substrate 1, and is convenient to process, or may be a split structure, and the material of the protruding structure 8 includes but is not limited to photosensitive siloxane (PSPD0) or photosensitive polyimide photoresist (PSPI), and is formed by evaporation, photolithography and other processes.
In some alternative embodiments, the orthographic projection of the first conductive electrode 3 on the second substrate 2 covers the orthographic projection of the second conductive electrode 4 and the third conductive electrode 5 on the second substrate 2.
It can be understood that if the first conductive electrode 3 is used as a reference potential, the first conductive electrode 3 can be arranged in a whole surface manner to ensure the same potential, or the first conductive electrode 3 can be arranged in a block manner, and the first electrode block 31 are connected by a connecting part; as long as it is ensured that each first electrode block 31 completely covers the second conductive electrode 4 and the third conductive electrode 5, respectively.
Referring to fig. 2 to 5, in order to realize multipoint pressure measurement, in some alternative embodiments, the first conductive electrode 3 includes a plurality of first electrode blocks 31 electrically connected to each other, the second conductive electrode 4 includes a plurality of second electrode blocks 41 corresponding to the first electrode blocks 31, the third conductive electrode 5 includes a plurality of third electrode blocks 51 corresponding to the first electrode blocks, each of the second electrode blocks 41 is connected to the first capacitance detecting unit C1 through a connecting wire, and each of the third electrode blocks 51 is connected to the second capacitance detecting unit C2 through a connecting wire.
It should be noted that the first conductive electrode 3 includes a plurality of first electrode blocks 31 electrically connected to each other, that is, the electric potential of each first electrode block 31 is the same, and the second conductive electrode 4 includes a plurality of second electrode blocks 41 corresponding to the first electrode blocks 31, and the second electrode blocks 41 are insulated from each other because the second electrode blocks 41 are located at different positions, so that the second electrode blocks 41 are respectively connected to the first capacitance detecting unit C1 through connecting wires to detect the capacitance at different positions of the sensor, so as to implement multi-point detection, and similarly, the third conductive electrode 5 includes a plurality of third electrode blocks 51 corresponding to the first electrode blocks, and each third electrode block 51 is respectively connected to the second capacitance detecting unit C2 through connecting wires.
Referring to fig. 3, the first conductive electrode 3 may be disposed as a complete layer without being patterned into a plurality of first electrode blocks 31.
In order to control the capacitance generated between the first conductive electrode 3, the second conductive electrode 4 and the third conductive electrode 5, in some optional embodiments, a control unit is further included, and the control unit is electrically connected to each second electrode block 41 and each third electrode block 51 respectively to send voltage signals to each second electrode block 41 and each third electrode block 51. Specifically, the applied capacitance detection principle is as follows:
the first electrode block 31 is connected with a fixed potential, the control unit provides pulse voltage signals to the second electrode block 41 and each third electrode block 51 to realize charge charging, after the charge charging is finished, the control unit measures the charge quantity Q, and the voltage V is set to be known, so that the capacitance C between the first electrode block 31 and the second electrode block 41 can be obtained according to the formula C which is Q/V1And a capacitance C between the first electrode block 31 and the second electrode block 412
It should be noted that the control unit may specifically be a chip, a control circuit, and the like, and is capable of sending a voltage signal to each of the second electrode blocks 41 and each of the third electrode blocks 51, so that capacitances are generated between the first conductive electrode 3 and the second conductive electrode 4 and between the first conductive electrode 3 and the third conductive electrode 5, which is convenient for a subsequent detection link.
In order to facilitate the user to know the pressure information and the temperature information, in some optional embodiments, the control unit further includes a temperature and pressure reading module, and the temperature and pressure calculating module S1 is electrically connected to the temperature and pressure calculating module S1 to display the pressure information and the temperature information obtained by the temperature and pressure calculating module S1.
The temperature and pressure reading module can specifically adopt a single chip microcomputer, a display and other devices capable of displaying the pressure information and the temperature information, for example, the temperature and pressure reading module adopts a display screen, and after the temperature and pressure calculating module S1 obtains the pressure information and the temperature information, the pressure information and the temperature information can be directly displayed on the display screen so as to be conveniently viewed by a user.
Referring to fig. 6, further, in order to avoid the external signal from interfering with the detection of the sensor, in some alternative embodiments, a shielding layer 9 is further included, the shielding layer 9 is located on the second substrate 2 and on the sides of the second conductive electrode 4 and the third conductive electrode 5 away from the liquid crystal layer 6, and an orthographic projection of the shielding layer 9 on the first substrate 1 covers an orthographic projection of the second conductive electrode 4 and the third conductive electrode 5 on the first substrate 1.
Specifically, since the second conductive electrode 4 and the third conductive electrode 5 on the second substrate 2 are independent, a gap exists between the two, and an external electric field is likely to interfere with the gap, and a shielding layer 9 needs to be provided for shielding.
The shielding layer 9 may specifically adopt a metal conductive layer, and in order to ensure the shielding effect of the shielding layer 9, the orthographic projection of the shielding layer 9 on the first substrate 1 is set to cover the orthographic projection of the second conductive electrode 4 and the third conductive electrode 5 on the first substrate 1, that is, the shielding layer 9 can completely shield the external signal from the outside of the second substrate 2, and it is avoided that the voltage signal received by the second conductive electrode 4 and the third conductive electrode 5 and the measured capacitance value are interfered, which causes data errors and affects the accuracy of the sensor detection.
Referring to fig. 7, in some alternative embodiments, the liquid crystal alignment layers 10 are disposed on the surfaces of the first substrate 1 and the second substrate 2 opposite to each other, and the liquid crystal alignment layers 10 respectively cover the first conductive electrode 3, the second conductive electrode 4 and the third conductive electrode 5.
The liquid crystal alignment layer 10 mainly functions to align liquid crystal molecules in the liquid crystal layer 6 in a predetermined direction, and is usually made of a polyimide material. The alignment film has an anchoring function, so that after liquid crystal is injected between the two first substrates 1 and the second substrate 2, liquid crystal molecules can become ordered, and meanwhile, the liquid crystal molecules can form a pre-tilt angle with a certain angle, and the deflection efficiency of the liquid crystal molecules is improved.
In order to avoid the influence of the supporting portion 7 on the detection accuracy of the first capacitive detection cell C1 and the second capacitive detection cell C2, in some alternative embodiments, the orthographic projection of the supporting portion 7 on the first substrate 1 does not overlap with the orthographic projection of any one of the first conductive electrode 3, the second conductive electrode 4 and the third conductive electrode 5 on the first substrate 1.
It should be noted that the capacitance between the first conductive electrode 3 and the second conductive electrode 4 is related to the medium between the first conductive electrode 3 and the second conductive electrode 4, and it is necessary to ensure that the medium between the first conductive electrode 3 and the second conductive electrode 4 is the liquid crystal layer 6, because the material of the supporting portion 7 is different from that of the liquid crystal layer 6, and the relative dielectric constant is also different, it is necessary to avoid that the orthographic projection of the supporting portion 7 on the first substrate 1 of the supporting portion 7 overlaps with the orthographic projection of any one of the first conductive electrode 3, the second conductive electrode 4, and the third conductive electrode 5 on the first substrate 1, which affects the detection accuracy.
Optionally, the supporting portion 7 is fixedly connected to at least one of the first substrate 1 and the second substrate 2; specifically, the first substrate 1 or the second substrate 2 may be formed by a photolithography process.
Referring to fig. 8, in some alternative embodiments, the supporting portion 7 includes a first cylinder and a second cylinder, the first cylinder and the second cylinder are respectively located at two sides of a conductive unit, and the conductive unit includes a second electrode block 41 and a third electrode block 51.
It should be noted that, when multi-point detection is implemented, the first cylinder and the second cylinder are disposed on two sides of each conductive unit to detect the displacement of the detection position of the conductive unit in the direction perpendicular to the first conductive electrode 3 after receiving an external force.
The supporting part 7 comprises a first cylinder and a second cylinder, the area of the circular truncated cone along the axial cross section is equal everywhere due to the fact that the cylinder is compared with the circular truncated cone, the calculation rule when calculating the pressure information needs to substitute the area of the supporting part 7 along the axial cross section, therefore, the supporting part 7 is set to be a cylinder, the substitution of the average value of each cross section area along the axial direction is needed when the circular truncated cone is avoided, and the accuracy of calculation of the pressure information can be improved.
Referring to fig. 9, the present invention further provides a method for detecting temperature and pressure, in which the sensor in any of the above embodiments detects temperature and pressure, and the method includes:
s110: acquiring a first capacitance value between the first conductive electrode 3 and the second conductive electrode 4 and a second capacitance value between the first conductive electrode 3 and the third conductive electrode 5;
s120: and acquiring pressure information of the external force applied to the surface to be measured and temperature information of the sensor according to the first capacitance value and the second capacitance value based on a preset calculation rule.
In step S110, since the medium between the first conductive electrode 3 and the second conductive electrode 4 is the liquid crystal molecules of the liquid crystal layer 6, and the medium between the first conductive electrode 3 and the third conductive electrode 5 is also the liquid crystal molecules, the obtained first capacitance value and the second capacitance value are based on the capacitance values when the medium is the liquid crystal molecules, and the relative dielectric constant of the liquid crystal material needs to be applied in the subsequent calculation.
In step S120, the pressure information of the external force applied to the surface to be measured, i.e. the magnitude of the acting force acting on the surface to be measured of the sensor to cause the supporting portion 7 to generate the deformation displacement, may be specifically pre-stored in the temperature and pressure calculating module S1 according to the calculation rules of the pressure information and the temperature information of the sensor, and the temperature and temperature calculating module S1 performs the calculation to obtain the pressure information and the temperature information.
According to the temperature and pressure detection method provided by the embodiment of the invention, the first capacitance value between the first conductive electrode 3 and the second conductive electrode 4 and the second capacitance value between the first conductive electrode 3 and the third conductive electrode 5 are taken, and the synchronous measurement of the two indexes of temperature and pressure can be realized simultaneously according to the preset calculation rule, so that the measurement is simple and convenient, and the cost is low.
Referring to fig. 10, in some optional embodiments, the acquiring the pressure information of the surface to be measured and the temperature information of the sensor according to the first capacitance value and the second capacitance value includes:
s121: obtaining the displacement of the surface to be measured in the direction perpendicular to the first conductive electrode 3 after the surface to be measured receives the external force according to the first capacitance value and the second capacitance value based on the preset displacement calculation rule;
s122: obtaining pressure information based on a preset pressure calculation rule according to the displacement;
s123: and obtaining the relative dielectric constant of the liquid crystal layer 6 according to the displacement based on a preset dielectric constant calculation rule, and obtaining temperature information according to a pre-stored mapping relation between the relative dielectric constant of the liquid crystal material and the temperature.
In step S121, the preset displacement amount calculation rule is specifically as follows:
Figure BDA0002712780120000091
wherein, C1Is a first capacitance value, C2Is a second capacitance value, ε0Is the constant of the vacuum medium, epsilonLC-TIs the relative dielectric constant, S, of the liquid crystal material1Is the relative area between the first conductive electrode 3 and the second conductive electrode 4, S2Is the relative area between the first conductive electrode 3 and the third conductive electrode 5, d1Is the shortest distance between the first conductive electrode 3 and the second conductive electrode 4, d2The shortest distance between the first conductive electrode 3 and the third conductive electrode 5 is Δ d, which is the displacement of the surface to be measured in the direction perpendicular to the first conductive electrode 3 after the external force is applied.
In addition, C is1、C2ε may be measured by the first capacitance sensing unit C1 and the second capacitance sensing unit C20、S1、S2、d1、d2Are all known quantities, and εLC-TThe displacement amount Δ d of the surface to be measured in the direction perpendicular to the first conductive electrode 3 after the external force is applied to the surface can be calculated by the displacement amount calculation rule.
In step S122, the preset pressure calculation rule is specifically as follows:
Figure BDA0002712780120000101
wherein F is pressure information, E is the young' S modulus of the material used for the support portion 7, S is the cross-sectional area of the support portion 7 along the axial direction, Δ d is the displacement of the surface to be measured obtained in step S121 in the direction perpendicular to the first conductive electrode 3 after being subjected to the external force, and L is the height of the support portion 7; E. and S, delta d and L are known quantities and are substituted into the pressure calculation rule to obtain pressure information F.
Young's modulus, also known as tensile modulus, is the most common one of the elastic moduli. Young's modulus measures the stiffness of an isotropic elastomer, defined as the ratio between uniaxial stress and uniaxial deformation, within the range applicable to Hooke's Law.
In step S123, the preset dielectric constant calculation rule is specifically as follows:
Figure BDA0002712780120000102
or
Figure BDA0002712780120000103
Will be the above-mentioned known C1、C2、ε0、S1、S2Substituting into the above dielectric constant calculation rule to obtain the relative dielectric constant ε of liquid crystal materialLC-TIt should be noted that the liquid crystal material has a mapping relationship between the relative permittivity and the temperature, specifically, the liquid crystal material has different relative permittivity values at different temperatures, and therefore, the liquid crystal material has a pre-stored mapping relationship between the relative permittivity and the temperature and the obtained relative permittivity ∈ of the liquid crystal materialLC-TThe temperature of the liquid crystal material can be obtained and can be approximately equal to the temperature of the environment in which the sensor is located, i.e. the temperature information described above.
An embodiment of the present invention further provides a sensing device, including: a plurality of sensors, the sensors being the sensors in any of the embodiments described above; the casing, each sensor interval is located on the casing.
It should be noted that, because a plurality of sensors are provided and the sensors are arranged at intervals, the sensors can simultaneously detect temperature information and pressure information at different positions, and the sensors and the sensing devices in the above embodiments can be applied to devices requiring temperature and pressure detection, such as a display device.
As will be apparent to those skilled in the art, for convenience and brevity of description, the specific working processes of the systems, modules and units described above may refer to the corresponding processes in the foregoing method embodiments, and are not described herein again. It should be understood that the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive various equivalent modifications or substitutions within the technical scope of the present invention, and these modifications or substitutions should be covered within the scope of the present invention.
It should also be noted that the exemplary embodiments mentioned in this patent describe some methods or systems based on a series of steps or devices. However, the present invention is not limited to the order of the above-described steps, that is, the steps may be performed in the order mentioned in the embodiments, may be performed in an order different from the order in the embodiments, or may be performed simultaneously.

Claims (14)

1. A sensor, comprising:
a first substrate provided with a first conductive electrode;
the second substrate is arranged opposite to the first substrate, a second conductive electrode and a third conductive electrode which are opposite to the first conductive electrode are arranged on the second substrate, and the minimum distance from the second conductive electrode to the first conductive electrode is larger than the minimum distance from the third conductive electrode to the first conductive electrode;
the liquid crystal layer is arranged between the first substrate and the second substrate, and at least one of the first substrate and the second substrate is provided with a surface to be measured far away from the liquid crystal layer;
the supporting part can be deformed and is arranged between the first substrate and the second substrate;
the detection assembly comprises a first capacitance detection unit, a second capacitance detection unit and a temperature and pressure calculation module, wherein the first capacitance detection unit is electrically connected with the second conductive electrode, the second capacitance detection unit is electrically connected with the third conductive electrode, and the temperature and pressure calculation module is electrically connected with the first capacitance detection unit and the second capacitance detection unit.
2. The sensor of claim 1, wherein the first conductive electrode is formed from a first conductive layer, the second conductive electrode is formed from a second conductive layer, the third conductive electrode is formed from a third conductive layer, or;
the first conductive electrode is formed of a first conductive layer, and the second conductive electrode and the third conductive electrode are both formed of the same conductive layer.
3. The sensor of claim 1, wherein a protruding structure is disposed on a side of the second substrate facing the first substrate, and at least one of the second conductive electrode and the third conductive electrode is disposed on a surface of the protruding structure near the first substrate.
4. A sensor according to claim 3, wherein the orthographic projection of the first conductive electrode on the second substrate covers the orthographic projection of the second and third conductive electrodes on the second substrate.
5. The sensor according to claim 1, wherein the first conductive electrode includes a plurality of first electrode blocks electrically connected to each other, the second conductive electrode includes a plurality of second electrode blocks corresponding to the first electrode blocks, the third conductive electrode includes a plurality of third electrode blocks corresponding to the first electrode blocks, each of the second electrode blocks is connected to the first capacitance detecting unit through a connection wire, and each of the third electrode blocks is connected to the second capacitance detecting unit through a connection wire.
6. The sensor of claim 5, further comprising a control unit electrically connected to each of the second electrode blocks and each of the third electrode blocks, respectively, to send voltage signals to each of the second electrode blocks and each of the third electrode blocks.
7. The sensor of claim 6, wherein the control unit further comprises a temperature and pressure reading module, and the temperature and pressure calculating module is electrically connected with the temperature and pressure calculating module to display the pressure information and the temperature information obtained by the temperature and pressure calculating module.
8. The sensor of claim 1, further comprising a shielding layer on the second substrate and on sides of the second and third conductive electrodes remote from the liquid crystal layer, and an orthographic projection of the shielding layer on the first substrate covers an orthographic projection of the second and third conductive electrodes on the first substrate.
9. The sensor according to claim 1, wherein the first substrate and the second substrate are provided with liquid crystal alignment layers on surfaces thereof facing each other, and the liquid crystal alignment layers respectively cover the first conductive electrode, the second conductive electrode, and the third conductive electrode.
10. The sensor of claim 5, wherein an orthographic projection of the support portion on the first substrate does not overlap an orthographic projection of any of the first, second, and third conductive electrodes on the first substrate.
11. The sensor of claim 10, wherein the support is fixedly attached to at least one of the first substrate and the second substrate.
12. The sensor of claim 11, wherein the support portion comprises a first cylinder and a second cylinder, the first cylinder and the second cylinder being located on either side of a conductive element, the conductive element comprising one of the second electrode block and one of the third electrode block.
13. A temperature and pressure detection method, characterized in that the sensor according to any one of claims 1 to 12 detects temperature and pressure, the detection method comprising:
acquiring a first capacitance value between the first conductive electrode and the second conductive electrode and a second capacitance value between the first conductive electrode and the third conductive electrode;
acquiring pressure information of the surface to be measured subjected to the external force and temperature information of the sensor according to the first capacitance value and the second capacitance value based on a preset calculation rule;
wherein, the acquiring the pressure information of the surface to be measured and the temperature information of the sensor according to the first capacitance value and the second capacitance value comprises:
calculating to obtain the displacement of the surface to be measured in the direction perpendicular to the first conductive electrode after the surface to be measured receives an external force according to the first capacitance value and the second capacitance value based on a capacitance value calculation formula of the parallel plate capacitor;
calculating to obtain the pressure information according to the displacement amount based on an elastic modulus calculation formula of the supporting part;
and calculating the relative dielectric constant of the liquid crystal layer according to the displacement and the first capacitance value or the second capacitance value based on a capacitance value calculation formula of the parallel plate capacitor, and obtaining the temperature information according to a pre-stored mapping relation between the relative dielectric constant of the liquid crystal material and the temperature.
14. A sensing device, comprising:
a plurality of sensors, said sensors being as claimed in any one of claims 1 to 12;
the shell, each sensor interval is located on the shell.
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