CN112194096B - Piezoelectric bionic cochlear cilia receptor based on MEMS and processing method thereof - Google Patents
Piezoelectric bionic cochlear cilia receptor based on MEMS and processing method thereof Download PDFInfo
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- CN112194096B CN112194096B CN202011131772.0A CN202011131772A CN112194096B CN 112194096 B CN112194096 B CN 112194096B CN 202011131772 A CN202011131772 A CN 202011131772A CN 112194096 B CN112194096 B CN 112194096B
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- 239000011664 nicotinic acid Substances 0.000 title claims abstract description 18
- 210000004081 cilia Anatomy 0.000 title claims description 44
- 238000003672 processing method Methods 0.000 title abstract description 8
- 229910052751 metal Inorganic materials 0.000 claims abstract description 62
- 239000002184 metal Substances 0.000 claims abstract description 62
- 239000002033 PVDF binder Substances 0.000 claims abstract description 45
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims abstract description 42
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 30
- 229910052802 copper Inorganic materials 0.000 claims abstract description 30
- 239000010949 copper Substances 0.000 claims abstract description 30
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 29
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 29
- 239000000835 fiber Substances 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims abstract description 11
- 230000008569 process Effects 0.000 claims abstract description 7
- 238000005530 etching Methods 0.000 claims abstract description 6
- 230000007797 corrosion Effects 0.000 claims abstract description 5
- 238000005260 corrosion Methods 0.000 claims abstract description 5
- 238000012545 processing Methods 0.000 claims abstract description 5
- 239000004743 Polypropylene Substances 0.000 claims description 13
- 229920001155 polypropylene Polymers 0.000 claims description 13
- -1 polypropylene Polymers 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 8
- 229920002120 photoresistant polymer Polymers 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 238000001259 photo etching Methods 0.000 claims description 4
- 230000008719 thickening Effects 0.000 claims description 2
- 210000003477 cochlea Anatomy 0.000 abstract description 5
- 230000006870 function Effects 0.000 abstract description 4
- 210000002469 basement membrane Anatomy 0.000 abstract description 2
- 239000010409 thin film Substances 0.000 abstract 1
- 230000003592 biomimetic effect Effects 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 5
- 239000007943 implant Substances 0.000 description 4
- 230000035882 stress Effects 0.000 description 4
- 206010011878 Deafness Diseases 0.000 description 3
- 230000010370 hearing loss Effects 0.000 description 3
- 231100000888 hearing loss Toxicity 0.000 description 3
- 208000016354 hearing loss disease Diseases 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 210000000959 ear middle Anatomy 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 210000002569 neuron Anatomy 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 241000124008 Mammalia Species 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 210000002919 epithelial cell Anatomy 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 210000000056 organ Anatomy 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/0015—Cantilevers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0264—Pressure sensors
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Prostheses (AREA)
Abstract
The invention discloses a piezoelectric bionic cochlear fiber receptor based on MEMS and a processing method thereof, and relates to the technical field of application of MEMS in hearing assistance. According to the invention, the PVDF thin films with the metal electrodes copper and aluminum on the upper and lower sides are etched through the processes of etching, corrosion and the like, so that the voltage signal output of the sensor can be effectively improved, the frequency sorting function of the cochlea basement membrane is realized on the basis of smaller volume and lower power consumption, the processing process is simple, and the processing cost is low.
Description
Technical Field
The invention relates to the technical field of application of MEMS in hearing aid, in particular to a piezoelectric bionic cochlear cilia receptor based on MEMS and a processing method thereof.
Background
Worldwide, the social and economic impact of hearing loss is considerable.
In the mammalian auditory system, the cochlea is a critical auditory organ. It is a transducer that converts incoming sound pressure into bioelectric signals that stimulate auditory neurons. In addition to conduction, cochlea has a frequency selective function due to the difference in stiffness of the basement membrane. Inconvenient large size implant sensors and expensive equipment costs limit patient population attenuation. Thus, research and development of new transducers of small size and low cost appears to be a necessary trend in the development of future middle ear implants.
With all of these in mind, today's mechanical hearing implants or Middle Ear Implants (MEI) are trying to solve these problems and cover almost all hearing loss variants (conductive, mixed, sensorineural, moderate and severe, etc.). Accordingly, the present invention provides a MEMS-based biomimetic cochlear cilia receptor.
Disclosure of Invention
The invention provides a piezoelectric bionic cochlear cilia receptor based on MEMS and a processing method thereof, which aim to solve the problem that a mammal hearing loss variant does not have a substitute for repairing at present.
The invention is realized by the following technical scheme: the piezoelectric bionic cochlear cilia receptor based on MEMS comprises a substrate and polypropylene cilia, wherein the substrate comprises a metal copper upper electrode, a polyvinylidene fluoride film and a metal aluminum lower electrode, the polyvinylidene fluoride film is positioned between the metal copper upper electrode and the metal aluminum lower electrode, the metal copper upper electrode, the polyvinylidene fluoride film and the metal aluminum lower electrode are fixedly connected, the periphery of the metal copper upper electrode, the polyvinylidene fluoride film and the metal aluminum lower electrode is in a square frame shape, a pair of opposite sides of the inside of the square frame of the periphery are provided with wave-shaped cilia fixing beams, and the polypropylene cilia are vertically fixed at the center of the cilia fixing beams.
The invention provides a piezoelectric bionic cochlear fiber receptor based on MEMS and a processing method thereof, wherein the cochlear fiber receptor comprises a substrate and polypropylene fiber, the substrate comprises a metal copper upper electrode, a polyvinylidene fluoride film and a metal aluminum lower electrode, the polyvinylidene fluoride film is positioned between the metal copper upper electrode and the metal aluminum lower electrode, the metal copper upper electrode and the metal aluminum lower electrode are fixedly connected, the periphery of the metal copper upper electrode and the metal aluminum lower electrode is in a square frame shape, a pair of wavy fiber fixing beams are arranged between opposite sides in the square frame of the periphery, and the polypropylene fiber is vertically fixed at the center of the fiber fixing beams, namely positioned at the center of the upper part of the metal copper upper electrode, namely positioned at the center of the whole receptor. The sensor is built by using polypropylene cilia, a metal copper upper electrode, a PVDF (polyvinylidene fluoride) film and a metal aluminum lower electrode from top to bottom, different cilia sensors are excited by adopting sound waves with different frequencies, neurons at specific positions are stimulated to respond after signal processing, the PVDF film is used as a vibrating film, the miniaturization of an acoustic receptor can be realized, the power consumption is reduced, the beam structure formed by cilia fixing beams increases the non-uniformity degree of stress, and the numerical value of a voltage signal is further improved. The process steps for preparing the piezoelectric bionic cochlear cilia receptor are as follows:
① Pasting a polyvinylidene fluoride film with a metal layer on the surface on a four-inch sheet, photoetching and thick glue (photoetching and thick glue are both conventional processes);
② Etching the metal on the upper surface of the polyvinylidene fluoride film, and then adopting plasma to etch the polyvinylidene fluoride film to the metal aluminum lower electrode;
③ Photoresist balance on the upper part of the polyvinylidene fluoride film to protect the upper electrode of the metal copper in the subsequent corrosion process;
④ A blue film is adhered to the back surface of the metal aluminum lower electrode to protect the metal aluminum lower electrode;
⑤ And finally, corroding the upper electrode of the metal copper to form a wave-shaped cilia fixing beam shape, and removing the photoresist and the blue film.
Further, the thickness of the metal copper upper electrode is 1-15um.
Further, the thickness of the polyvinylidene fluoride film is 10-100um, and the length and width of the polyvinylidene fluoride film are 800um x 800um.
Further, the thickness of the metal aluminum bottom electrode is 1-15um.
Further, the height of the polypropylene cilia is 600um-950um, and the radius is 25-50um.
Further, the width of the cilia fixing beam is 80um-120um, and the longitudinal displacement length is 600um.
Compared with the prior art, the invention has the following beneficial effects: the invention provides a piezoelectric bionic cochlear cilia receptor based on MEMS and a processing method thereof, wherein the piezoelectric bionic cochlear cilia receptor based on MEMS comprises: (1) The device of the invention can be small in size due to MEMS technology and SOI technology, thereby being convenient for subsequent packaging and use; (2) Compared with the common piezoelectric material, PVDF (polyvinylidene fluoride) has the strongest toughness, low friction coefficient, strong corrosion resistance, ageing resistance and weather resistance in fluoroplastic, and meanwhile, has no biological toxicity to cochlea epithelial cells; (3) The cilia design plays a role in increasing uneven stress on the piezoelectric beam, greatly improves the output voltage value of the sensor, and can expand the application range of the piezoelectric bionic cochlear cilia receptor by changing the length of cilia; (4) The whole processing technology of the invention only needs one mask plate, and has low cost on the premise of mass production. The obtained product has the advantages of small structural size, simple process flow, low power consumption and capability of independently completing frequency sorting; (5) Compared with the frequency sorting function which can be realized by a microphone and hardware circuit in the traditional artificial cochlea, the sensor unit can independently realize the frequency sorting function, has the advantages of small volume and low power consumption, and can be used as a passive device, so that the signal output sensitivity and the anti-interference capability of the passive device are further enhanced.
Drawings
Fig. 1 is a schematic three-dimensional structure of a piezoelectric bionic cochlear cilia receptor based on MEMS according to the present invention.
Fig. 2 is a left side view of the MEMS-based piezoelectric biomimetic cochlear cilia receptor of the present invention.
Fig. 3 is a top view and a size diagram of a piezoelectric type bionic cochlear cilia receptor based on MEMS technology of the present invention.
Fig. 4-12 are simulation result diagrams of piezoelectric bionic cochlear cilia receptors based on MEMS technology.
Fig. 13 is a first-order modal view of a biomimetic cochlear cilia receptor.
Fig. 14 is a second order modal view of a biomimetic cochlear cilia receptor.
Fig. 15 is a third-order modal view of a biomimetic cochlear cilia receptor.
Fig. 16 is a fourth order modal view of a biomimetic cochlear cilia receptor.
The figures are labeled as follows: 1-polypropylene cilia, a 2-metallic copper upper electrode, a 3-polyvinylidene fluoride film, a 4-metallic aluminum lower electrode and a 5-cilia fixed beam.
Detailed Description
The invention is further illustrated below with reference to specific examples.
Piezoelectric bionic cochlear cilia receptor based on MEMS (micro-electromechanical systems) as shown in figures 1-2: the multifunctional fiber comprises a substrate and polypropylene fiber 1, wherein the substrate comprises a metal copper upper electrode 2, a polyvinylidene fluoride film 3 and a metal aluminum lower electrode 4, the polyvinylidene fluoride film 3 is positioned between the metal copper upper electrode 2 and the metal aluminum lower electrode 4, the metal copper upper electrode 2, the polyvinylidene fluoride film 3 and the metal aluminum lower electrode 4 are fixedly connected, the periphery of the metal copper upper electrode is square, a pair of opposite sides inside the square are provided with wave-shaped fiber fixing beams 5, and the polypropylene fiber 1 is vertically fixed at the center of the fiber fixing beams 5.
Generally, the thickness of the metal copper upper electrode 2 is 1-15um; the thickness of the polyvinylidene fluoride film 3 is 10-100um, and the length and width are 800um x 800um; the thickness of the metal aluminum lower electrode 4 is 1-15um; the height of the polypropylene cilia 1 is 600um-950um, and the radius is 25-50um; the cilia fixing beam 5 has a width of 80um to 120um and a longitudinal displacement length of 600um.
In this embodiment, the metal copper upper electrode 2 comprehensively considers the influence of the thickness, the size and the position of the relative vibration film on the voltage signal and the sensitivity of the sensor, the thickness of the electrode is designed to be 10um, the electrode is fully covered on a PVDF (polyvinylidene fluoride) film, and the PVDF film with the thickness of 50um is etched on the plane 800um x 800um for realizing the amplification of the voltage signal, so that the cilia fixing beam 5 is designed, the formed beam structure increases the non-uniformity degree of the stress, the value of the voltage signal is further improved, wherein the width of the cilia fixing beam 5 is 80um-120um, the longitudinal displacement length is 100um in this embodiment, as shown in fig. 3; the metal aluminum bottom electrode 4 is also fully covered on the PVDF film with a thickness of 10um. Fig. 13-16 are one-to-four-order modal views of MEMS-based piezoelectric biomimetic cochlear cilia receptors.
The processing method of the piezoelectric bionic cochlear cilia receptor based on MEMS comprises the following steps:
① Pasting a polyvinylidene fluoride film 3 with a metal layer on the surface on a four-inch sheet, photoetching and thickening the sheet;
② Etching the metal on the upper surface of the polyvinylidene fluoride film 3, and then etching the polyvinylidene fluoride film 3 to the metal aluminum lower electrode 4 by adopting plasma;
③ The photoresist balance on the upper part of the polyvinylidene fluoride film 3 is used for protecting the metal copper upper electrode 2 in the subsequent corrosion process;
④ A blue film is adhered to the back surface of the metal aluminum lower electrode 4 to protect the metal aluminum lower electrode 4;
⑤ Finally, the metallic copper upper electrode 2 is corroded to form a wave-shaped cilia fixing beam 5, and photoresist and a blue film are removed.
The sensor was modeled and simulated using the Comsol software as shown in fig. 4 to 12, according to the general formula of the electrical displacement D 3 of the unidirectionally polarized PVDF film in three directions (in the absence of an externally applied electric field):
Wherein D 3 is the piezoelectric strain constant left subscript is the internal electric field direction, the right subscript is the stress direction, and for pure compression modes along three directions, the formula is simplified to D 3=d33 Whereas for pure stretch mode in one direction, the equation reduces to D 3=d31 The specified values for d 33 and d 31 for PVDF are-33X 10 -12 and 23X 10 -12 C/N, respectively. Typically, this is to be done under bendingIt is necessary to attach the PVDF film to a thicker material so that the neutral axis is located outside the PVDF film. The total voltage generated by the entire PVDF film (V PVDF) is given by:
Wherein the method comprises the steps of Is the capacitance per unit area of the capacitor,Is the relative dielectric constant of PVDF and,Is the thickness of the PVDF film,Is the dielectric constant of free space.
The scope of the present invention is not limited to the above embodiments, and various modifications and alterations of the present invention will become apparent to those skilled in the art, and any modifications, improvements and equivalents within the spirit and principle of the present invention are intended to be included in the scope of the present invention.
Claims (2)
1. A piezoelectric bionic cochlear cilia receptor based on MEMS, characterized in that: the fiber comprises a substrate and polypropylene fiber (1), wherein the substrate comprises a metal copper upper electrode (2), a polyvinylidene fluoride film (3) and a metal aluminum lower electrode (4), the polyvinylidene fluoride film (3) is positioned between the metal copper upper electrode (2) and the metal aluminum lower electrode (4), the metal copper upper electrode (2), the polyvinylidene fluoride film (3) and the metal aluminum lower electrode (4) are fixedly connected, the periphery of the metal copper upper electrode is square, a pair of opposite sides in the square of the periphery are provided with wave-shaped fiber fixing beams (5), and the polypropylene fiber (1) is vertically fixed at the center of the fiber fixing beams (5); the thickness of the metal copper upper electrode (2) is 1-15um; the thickness of the polyvinylidene fluoride film (3) is 10-100um, and the length and width of the polyvinylidene fluoride film are 800um x 800um; the thickness of the metal aluminum lower electrode (4) is 1-15um; the height of the polypropylene cilia (1) is 600um-950um, and the radius is 25-50um; the width of the cilia fixing beam (5) is 80-120 um, and the longitudinal displacement length is 600um.
2. The method for processing the piezoelectric bionic cochlear cilia receptor based on the MEMS in claim 1, which is characterized by comprising the following steps: the method comprises the following steps:
① Pasting a polyvinylidene fluoride film (3) with a metal layer on the surface on the four-inch sheet, photoetching and thickening the sheet;
② Etching the metal on the upper surface of the polyvinylidene fluoride film (3), and then etching the polyvinylidene fluoride film (3) to the metal aluminum lower electrode (4) by adopting plasma;
③ The photoresist balance at the upper part of the polyvinylidene fluoride film (3) is used for protecting the metal copper upper electrode (2) in the subsequent corrosion process;
④ A blue film is adhered to the back surface of the metal aluminum lower electrode (4) to protect the metal aluminum lower electrode (4);
⑤ Finally, corroding the metal copper upper electrode (2) to form the shape of the wavy cilia fixing beam (5), and removing the photoresist and the blue film.
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| CN103759809A (en) * | 2014-01-15 | 2014-04-30 | 北京航空航天大学 | Three-dimensional piezoelectric vector hydrophone microstructure |
| CN107063438A (en) * | 2017-03-10 | 2017-08-18 | 中北大学 | MEMS three-dimensional co-vibrating type vector hydrophones based on piezo-electric effect |
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| US6936837B2 (en) * | 2001-05-11 | 2005-08-30 | Ube Industries, Ltd. | Film bulk acoustic resonator |
| CN102522496B (en) * | 2011-12-21 | 2013-08-28 | 大连理工大学 | Flexible cambered-surface polyvinylidene fluoride piezoelectric sensor and manufacture method |
| CN104121984B (en) * | 2014-08-16 | 2016-08-31 | 中北大学 | A kind of high-sensitivity resonance formula MEMS vector hydrophone structure |
| US9887347B2 (en) * | 2015-11-27 | 2018-02-06 | Canon Kabushiki Kaisha | Piezoelectric element, piezoelectric actuator and electronic instrument using the same |
| CN108968929A (en) * | 2018-08-01 | 2018-12-11 | 中国科学院深圳先进技术研究院 | Pulse detecting device and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103759809A (en) * | 2014-01-15 | 2014-04-30 | 北京航空航天大学 | Three-dimensional piezoelectric vector hydrophone microstructure |
| CN107063438A (en) * | 2017-03-10 | 2017-08-18 | 中北大学 | MEMS three-dimensional co-vibrating type vector hydrophones based on piezo-electric effect |
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