CN112194096A - Piezoelectric type bionic cochlear ciliary sensor based on MEMS and processing method thereof - Google Patents
Piezoelectric type bionic cochlear ciliary sensor based on MEMS and processing method thereof Download PDFInfo
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- CN112194096A CN112194096A CN202011131772.0A CN202011131772A CN112194096A CN 112194096 A CN112194096 A CN 112194096A CN 202011131772 A CN202011131772 A CN 202011131772A CN 112194096 A CN112194096 A CN 112194096A
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- 239000011664 nicotinic acid Substances 0.000 title claims abstract description 17
- 238000003672 processing method Methods 0.000 title abstract description 8
- 230000001886 ciliary effect Effects 0.000 title description 7
- 229910052751 metal Inorganic materials 0.000 claims abstract description 61
- 239000002184 metal Substances 0.000 claims abstract description 61
- 210000004081 cilia Anatomy 0.000 claims abstract description 51
- 239000002033 PVDF binder Substances 0.000 claims abstract description 48
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims abstract description 40
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 30
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 29
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 28
- 229910052802 copper Inorganic materials 0.000 claims abstract description 28
- 239000010949 copper Substances 0.000 claims abstract description 28
- 239000004743 Polypropylene Substances 0.000 claims abstract description 15
- 229920001155 polypropylene Polymers 0.000 claims abstract description 15
- -1 polypropylene Polymers 0.000 claims abstract description 14
- 238000000034 method Methods 0.000 claims abstract description 10
- 230000008569 process Effects 0.000 claims abstract description 8
- 230000007797 corrosion Effects 0.000 claims abstract description 5
- 238000005260 corrosion Methods 0.000 claims abstract description 5
- 230000002093 peripheral effect Effects 0.000 claims abstract description 5
- 238000012545 processing Methods 0.000 claims abstract description 5
- 238000005530 etching Methods 0.000 claims abstract description 4
- 229920002120 photoresistant polymer Polymers 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 239000000835 fiber Substances 0.000 claims description 5
- 238000001259 photo etching Methods 0.000 claims description 4
- 238000004026 adhesive bonding Methods 0.000 claims description 2
- 239000004411 aluminium Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 abstract description 8
- 230000006870 function Effects 0.000 abstract description 4
- 210000000721 basilar membrane Anatomy 0.000 abstract 1
- 208000016354 hearing loss disease Diseases 0.000 description 9
- 206010011878 Deafness Diseases 0.000 description 8
- 230000010370 hearing loss Effects 0.000 description 8
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- 238000010586 diagram Methods 0.000 description 7
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- 230000003592 biomimetic effect Effects 0.000 description 4
- 230000035882 stress Effects 0.000 description 4
- 210000003477 cochlea Anatomy 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 210000000959 ear middle Anatomy 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
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- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 210000002569 neuron Anatomy 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 241000124008 Mammalia Species 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 210000002469 basement membrane Anatomy 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
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- 239000004744 fabric Substances 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 210000004379 membrane Anatomy 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/0015—Cantilevers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0264—Pressure sensors
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
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Abstract
The invention discloses a piezoelectric type bionic cochlear cilium receptor based on an MEMS (micro-electromechanical system) and a processing method thereof, and relates to the technical field of application of the MEMS in hearing aid, the piezoelectric type bionic cochlear cilium receptor comprises a substrate and polypropylene cilium, wherein the substrate comprises a metal copper upper electrode, a polyvinylidene fluoride film and a metal aluminum lower electrode, the polyvinylidene fluoride film is positioned between the metal copper upper electrode and the metal aluminum lower electrode, the three electrodes are fixedly connected, the periphery of the three electrodes is in a square frame shape, a wave-shaped cilium fixing beam is arranged between a pair of opposite edges in the peripheral square frame, and the polypropylene cilium is vertically fixed at the center of the cilium fixing beam. According to the invention, the PVDF film with the metal electrodes of copper and aluminum at the upper part and the lower part is etched through the processes of etching, corrosion and the like, so that the voltage signal output of the sensor can be effectively improved, the frequency sorting function of the cochlear basilar membrane is realized on the basis of smaller volume and lower power consumption, the processing process is simple, and the processing cost is low.
Description
Technical Field
The invention relates to the technical field of application of MEMS in hearing aid, in particular to a piezoelectric type bionic cochlear cilium receptor based on MEMS and a processing method thereof.
Background
The social and economic impact of hearing loss is considerable worldwide. According to the World Health Organization (WHO) estimates that 3.6 million people worldwide have disabling hearing loss (greater than 40 decibels (dB) for the better ear of adults and greater than 30 decibels (dB) for children (0-14 years), which is a ratio over 5% of the world population; the prevalence in south asia, asia and sub-saharan africa is relatively high, although the data is largely incomplete, of different origin and of different standards, however, according to some european national studies, these numbers may be underestimated because the actual numbers may linger around 15% to 17% of the population, just as in the case of the us, this number is estimated to be about 10-20% of the population according to some sources over the years of data, reference to 2016 for a general survey of the us between 3200 and 6400 million, in europe, 16% of the 7000 people have varying degrees and types of hearing loss, with over 5500 thousands of people in the european union. According to RNID, approximately 1100 million people in the uk are in need of treatment for hearing loss. In germany, a rough estimate is made of 1300 to 1400 million people in need of treatment for hearing loss. In spain, this figure is likely to be underestimated (200 million people or 5.5% of the population), official data shows that the general disability resulting from this is 961348 people (26/1000 frequent population). In clinical practice, only 1/2 cases of hearing loss can be satisfactorily treated by common means (surgery, hearing aids, etc.). However, the remaining 3500 tens of thousands of patients in europe, 2700 thousands of patients in the european union, and 100 thousands of patients in spain, etc., represent a large patient population. The resulting economic problems are also quite serious. For example, in the european union, the annual cost of untreated hearing impairment is 1680 billion euro, and the annual cost of assistance for an individual depends on the degree of loss: mild, 2200 euro; medium, 6600 euro; severe, 11000 euro.
In the mammalian auditory system, the cochlea is a key auditory organ. It is a transducer that converts incoming acoustic pressure into a bioelectric signal that stimulates auditory neurons. In addition to conduction, the cochlea has a frequency selective function due to the difference in the stiffness of the basement membrane. The attenuation of the patient population is limited by the inconvenient large-size implant sensors and the expensive equipment costs. Therefore, the research and development of new transducers of small size and low cost seems to be a necessary trend for the development of middle ear implants in the future.
Facing all of these, today's mechanical hearing implants or Middle Ear Implants (MEIs) are trying to solve these problems and cover almost all hearing loss variants (conductive, mixed, sensorineural, moderate and severe, etc.). Accordingly, the present invention provides a MEMS-based cochlear cilial receptor.
Disclosure of Invention
The invention provides a piezoelectric type bionic cochlear cilium receptor based on an MEMS (micro-electromechanical system) and a processing method thereof, aiming at solving the problem that no substitute is available for repairing the hearing loss variants of mammals at present.
The invention is realized by the following technical scheme: the piezoelectric bionic cochlear cilium receptor comprises a substrate and polypropylene cilia, wherein the substrate comprises a metal copper upper electrode, a polyvinylidene fluoride film and a metal aluminum lower electrode, the polyvinylidene fluoride film is positioned between the metal copper upper electrode and the metal aluminum lower electrode, the metal copper upper electrode, the polyvinylidene fluoride film and the metal aluminum lower electrode are fixedly connected and are peripherally in a square frame shape, a pair of opposite sides in the peripheral square frame is a cilium fixing beam in a wave shape, and the polypropylene cilia is vertically fixed at the center of the cilia fixing beam.
The invention provides a piezoelectric type bionic cochlear cilium receptor based on MEMS (micro-electromechanical systems) and a processing method thereof, the cochlear cilium receptor comprises a substrate and polypropylene cilium, the substrate comprises a metal copper upper electrode, a polyvinylidene fluoride film and a metal aluminum lower electrode, the polyvinylidene fluoride film is positioned between the metal copper upper electrode and the metal aluminum lower electrode, the three electrodes are fixedly connected, the periphery of the cochlear receptor is in a square frame shape, a pair of opposite sides in the peripheral square frame is provided with a wave-shaped cilium fixing beam, and the polypropylene cilium is vertically fixed at the center of the cilium fixing beam, namely at the center of the upper part of the metal copper upper electrode, namely at the center of the whole receptor. The sensor is built by using polypropylene cilia, a metal copper upper electrode, a PVDF (polyvinylidene fluoride) film and a metal aluminum lower electrode from top to bottom, different cilia sensors are excited by adopting sound waves with different frequencies, neurons in specific positions are stimulated to generate response after signal processing, the PVDF film is used as a vibration film, the miniaturization of an acoustic sensor and the reduction of power consumption can be realized, the beam structure formed by cilia fixing beams increases the uneven degree of stress, and the numerical value of a voltage signal is further improved. The process for preparing the piezoelectric bionic cochlear cilium receptor comprises the following steps:
firstly, pasting a polyvinylidene fluoride film with a metal layer on the surface on a four-inch sheet, and photoetching and thick glue (both photoetching and thick glue are conventional processes);
corroding metal on the upper surface of the polyvinylidene fluoride film, and etching the polyvinylidene fluoride film to a metal aluminum lower electrode by adopting plasma;
photoresist residue on the upper part of the polyvinylidene fluoride film is left to protect the metal copper upper electrode in the following corrosion process;
sticking a blue film on the back of the metal aluminum lower electrode to protect the metal aluminum lower electrode;
finally corroding the metal copper upper electrode to form a wave-shaped cilium fixing beam shape, and removing the photoresist and the blue film.
Further, the thickness of the metal copper upper electrode is 1-15 um.
Furthermore, the thickness of the polyvinylidene fluoride film is 10-100um, and the length and the width are 800 um.
Further, the thickness of the metal aluminum lower electrode is 1-15 um.
Further, the height of the polypropylene fiber is 600um-950um, and the radius is 25-50 um.
Further, the width of cilia fixed beam is between 80um-120um, and the length of longitudinal displacement is 600 um.
Compared with the prior art, the invention has the following beneficial effects: the invention provides a piezoelectric type bionic cochlear cilium receptor based on an MEMS and a processing method thereof, wherein the piezoelectric type bionic cochlear cilium receptor comprises the following steps: (1) due to the MEMS technology and the SOI technology, the size of the device can be very small, and the subsequent packaging and use are facilitated; (2) compared with the common piezoelectric material, PVDF (polyvinylidene fluoride) has the strongest toughness, low friction coefficient, strong corrosion resistance, aging resistance and weather resistance in fluoroplastics, and meanwhile, has no biotoxicity on epidermal cells on the cochlea; (3) the cilia design plays a role in increasing uneven stress on the piezoelectric beam, the output voltage value of the sensor is improved to a great extent, and the application range of the piezoelectric type bionic cochlear cilia receptor can be expanded by changing the length of the cilia; (4) the whole process of the processing technology only needs one mask plate, and the cost is low on the premise of batch production. The obtained product has the advantages of small structure size, simple process flow, low power consumption and capability of independently finishing frequency sorting; (5) compared with the frequency sorting function which can be realized by a microphone hardware circuit in the traditional cochlear implant, the sensor unit can independently realize the frequency sorting function, has the advantages of small size and low power consumption, and further enhances the signal output sensitivity and the anti-interference capability as a passive device.
Drawings
Fig. 1 is a schematic three-dimensional structure diagram of a piezoelectric type bionic cochlear cilium receptor based on MEMS.
Figure 2 is a left side view of the MEMS-based piezoelectric cochlear ciliary receptor of the present invention.
Fig. 3 is a top view and a size diagram of the piezoelectric type bionic cochlear cilium receptor based on the MEMS technology.
Fig. 4-12 are graphs of simulation results of the piezoelectric type bionic cochlear cilium receptor based on the MEMS technology.
Figure 13 is a first order mode diagram of a biomimetic cochlear ciliary receptor.
Figure 14 is a second order modal diagram of biomimetic cochlear ciliary receptors.
Figure 15 is a third order mode diagram of a biomimetic cochlear ciliary receptor.
Figure 16 is a fourth order mode diagram of a biomimetic cochlear ciliary receptor.
The figures are labeled as follows: 1-polypropylene fiber, 2-metal copper upper electrode, 3-polyvinylidene fluoride film, 4-metal aluminum lower electrode and 5-fiber fixing beam.
Detailed Description
The present invention is further illustrated by the following specific examples.
A MEMS-based piezoelectric cochlear cilium receptor, as shown in fig. 1-2: the special fabric is characterized by comprising a substrate and polypropylene cilia 1, wherein the substrate comprises a metal copper upper electrode 2, a polyvinylidene fluoride film 3 and a metal aluminum lower electrode 4, the polyvinylidene fluoride film 3 is located between the metal copper upper electrode 2 and the metal aluminum lower electrode 4, the metal copper upper electrode 2, the polyvinylidene fluoride film 3 and the metal aluminum lower electrode 4 are fixedly connected, the peripheries of the metal copper upper electrode 2, the polyvinylidene fluoride film 3 and the metal aluminum lower electrode 4 are in a square frame shape, a pair of opposite edges in the peripheral square frame is provided with a cilia fixing beam 5 in a wave shape, and the polypropylene cilia 1 is vertically fixed at the center of the cilia fixing beam 5.
Generally, the thickness of the metallic copper upper electrode 2 is 1-15 um; the thickness of the polyvinylidene fluoride film 3 is 10-100um, and the length and the width are 800um to 800 um; the thickness of the metal aluminum lower electrode 4 is 1-15 um; the height of the polypropylene fiber 1 is 600um-950um, and the radius is 25-50 um; the width of the cilia fixed beam 5 is between 80um-120um, and the length of the longitudinal displacement is 600 um.
In this embodiment, the metal copper upper electrode 2, considering comprehensively the influence of the thickness, size and position of the relative vibration film on the voltage signal and sensitivity of the sensor, designs the thickness of the electrode to be 10um, and covers the PVDF (polyvinylidene fluoride) film completely, the PVDF film with the thickness of 50um etches on the plane of 800um x 800um in order to realize the amplification of the voltage signal, so a cilium fixing beam 5 is designed, and the beam structure formed increases the uneven degree of stress, further improves the value of the voltage signal, wherein the width of the cilium fixing beam 5 is between 80um and 120um, in this embodiment, 100um, and the longitudinal displacement length is 600um, as shown in fig. 3; the metallic aluminum lower electrode 4 is also covered on the PVDF film, and the thickness is 10 um. Fig. 13-16 are first to fourth order mode diagrams of MEMS-based piezoelectric cochlear cilial receptors.
The processing method of the piezoelectric type bionic cochlear cilium receptor based on the MEMS comprises the following steps:
firstly, pasting a polyvinylidene fluoride film 3 with a metal layer on the surface on a four-inch sheet, and photoetching and gluing the sheet;
corroding metal on the upper surface of the polyvinylidene fluoride film 3, and etching the polyvinylidene fluoride film 3 to a metal aluminum lower electrode 4 by adopting plasma;
photoresist residue on the upper part of the polyvinylidene fluoride film 3 is left to protect the metal copper upper electrode 2 in the following corrosion process;
a blue film is stained on the back surface of the metal aluminum lower electrode 4 to protect the metal aluminum lower electrode 4;
finally corroding the metal copper upper electrode 2 to form the shape of the wavy cilia fixing beam 5, and removing the photoresist and the blue film.
The sensor was modeled and simulated using Comsol software, fig. 4-12, and the model is shown in fig. 4, according to the electrical displacement D of the unidirectionally polarized PVDF film in three directions3General formula (in the absence of an externally applied electric field):
wherein d is3For piezoelectric strain constants with the left subscript being the direction of the internal electric field and the right subscript being the direction of stress, the equation reduces to D for pure compression modes along three directions3＝d33σ3While for pure stretch mode in one direction, the equation reduces to D3＝d31σ1D of PVDF33And d31Are respectively-33 x 10-12And 23X 10-12C/N. Usually, σ is to be generated under bending1The PVDF film needs to be pasted on a thicker material so as toThe neutral axis is located outside the PVDF membrane. Entire PVDF film (V)PVDF) The total voltage generated is given by:
wherein C isPVDFIs the capacitance per unit area, ∈PVDFIs the relative dielectric constant, t, of PVDFPVDFIs the thickness of the PVDF film, epsilon0Is the dielectric constant of free space.
The scope of the invention is not limited to the above embodiments, and various modifications and changes may be made by those skilled in the art, and any modifications, improvements and equivalents within the spirit and principle of the invention should be included in the scope of the invention.
Claims (7)
1. A piezoelectric bionic cochlear cilium receptor based on MEMS is characterized in that: including base and polypropylene cilia (1), the base includes metal copper upper electrode (2), polyvinylidene fluoride film (3) and metal aluminium bottom electrode (4), polyvinylidene fluoride film (3) are located between metal copper upper electrode (2) and metal aluminium bottom electrode (4), metal copper upper electrode (2), polyvinylidene fluoride film (3) and metal aluminium bottom electrode (4) equal fixed connection and periphery are the square frame form, be wave-shaped cilia fixed beam (5) between one of them pair of relative limit of peripheral square frame inside, polypropylene cilia (1) vertical fixation is in the center department of cilia fixed beam (5).
2. The MEMS-based piezoelectric cochlear cilial receptor of claim 1, wherein: the thickness of the metal copper upper electrode (2) is 1-15 um.
3. The MEMS-based piezoelectric cochlear cilial receptor of claim 1, wherein: the thickness of the polyvinylidene fluoride film (3) is 10-100um, and the length and the width are 800 um.
4. The MEMS-based piezoelectric cochlear cilial receptor of claim 1, wherein: the thickness of the metal aluminum lower electrode (4) is 1-15 um.
5. The MEMS-based piezoelectric cochlear cilial receptor of claim 1, wherein: the height of the polypropylene fiber (1) is 600um-950um, and the radius is 25-50 um.
6. The MEMS-based piezoelectric cochlear cilial receptor of claim 1, wherein: the width of the cilium fixing beam (5) is between 80um and 120um, and the length of longitudinal displacement is 600 um.
7. The method for processing a piezoelectric cochlear cilia receptor based on an MEMS of claim 1, wherein: the method comprises the following steps:
firstly, attaching a polyvinylidene fluoride film (3) with a metal layer on the surface on a four-inch sheet, and photoetching and gluing the sheet;
corroding the metal on the upper surface of the polyvinylidene fluoride film (3), and etching the polyvinylidene fluoride film (3) to the metal aluminum lower electrode (4) by adopting plasma;
photoresist at the upper part of the polyvinylidene fluoride film (3) is remained so as to protect the metal copper upper electrode (2) in the following corrosion process;
a blue film is stained on the back surface of the metal aluminum lower electrode (4) to protect the metal aluminum lower electrode (4);
finally corroding the metal copper upper electrode (2) to form the shape of a wavy cilium fixing beam (5), and removing the photoresist and the blue film.
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Cited By (1)
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| CN112978670A (en) * | 2021-02-19 | 2021-06-18 | 上海交通大学 | Torsion type bionic cilium flow velocity sensor device |
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