CN112192151B - Production tool and process of high-precision sealing valve - Google Patents
Production tool and process of high-precision sealing valve Download PDFInfo
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- CN112192151B CN112192151B CN202011045920.7A CN202011045920A CN112192151B CN 112192151 B CN112192151 B CN 112192151B CN 202011045920 A CN202011045920 A CN 202011045920A CN 112192151 B CN112192151 B CN 112192151B
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- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
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- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
- B23P15/001—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass valves or valve housings
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Abstract
The utility model provides a production frock of high accuracy sealing valve and technology thereof includes in proper order that the sealed valve carries out dehydrogenation, the positive big rough machining of sealed valve, the positive rough machining of sealed valve, the semi-finishing of sealed valve blank reverse side, the positive semi-finishing of sealed valve blank, the sealed valve carries out the finish machining of sealed valve reverse side, openly carries out the emulation to this sealed valve through producing the frock: when the detected surface is gentle, the surface is directly processed in place; when the detected surface is steep, cutting is carried out by two cutters, the front surface of the sealing valve is subjected to roughness polishing through the roughness polishing head, a connecting hole on the side surface of the sealing valve is processed, a rubber groove on the side surface of the sealing valve is processed, an annular rubber strip is vulcanized, and the annular rubber strip is pressed into the outer ring of the sealing valve and the rubber groove. Therefore, the production of the high-precision sealing valve can be realized through the process tool.
Description
Technical Field
The invention relates to the field of valves, in particular to a production tool and a production process of a high-precision sealing valve.
Background
The semiconductor manufacturing belongs to high-precision manufacturing, so that a vacuum valve for related products firstly needs to have extremely high processing flatness and precision to avoid possible problems in the installation and assembly processes; secondly, to improve the purity and quality of the ionized gas, the valve requires an extremely high vacuum (10)-9) The sealing of the valve is the most critical link; in addition, in the production process of the chip, the pollution of impurities can generate extremely harmful influence, and the integrated circuit chip can be scrapped due to the oxygen content below one millionth, so that the high cleanness of the valve needs to be ensured; at present, the report of successfully developing related products is not found in China.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides a production tool and a production process of a high-precision sealing valve.
The technical scheme for solving the technical problem is as follows: a production tool of a high-precision sealing valve comprises a first substrate and a second substrate which are the same, wherein a first positioning surface is arranged at the upper end of the first substrate, a second positioning surface is arranged at the upper end of the second substrate, the flatness of the first positioning surface is controlled to be less than or equal to 0.008mm, the flatness of the second positioning surface is controlled to be less than or equal to 0.008mm, and after the first substrate and the second substrate are spliced, the overall flatness of the first positioning surface and the second positioning surface is controlled to be less than or equal to 0.012mm after being combined;
still including setting up two first main grip blocks on first locating surface one side, setting up a first auxiliary grip block on first locating surface opposite side, setting up two second main grip blocks on second locating surface one side and setting up a second auxiliary grip block on second locating surface opposite side, first main grip block, first auxiliary grip block, second main grip block and second auxiliary grip block all be connected with the cylinder to the cylinder drives first main grip block, first auxiliary grip block, second main grip block and second auxiliary grip block seesaw and realizes the extrusion centre gripping to sealing valve.
Preferably, the first auxiliary clamping block is located between the two first main clamping blocks, and the second auxiliary clamping block is located between the two second main clamping blocks.
A production process of a high-precision sealing valve comprises the following steps:
1) carrying out high vacuum dehydrogenation treatment on a sealing valve blank made of pure aluminum;
2) directly fixing a sealed valve blank through four pressing plates, and then performing large rough machining on the front face of the sealed valve blank through a common vertical milling machine, wherein a 1.5mm allowance is reserved, and the cutting linear speed is controlled to be 75-80 m/min;
3) carrying out heat treatment on the sealing valve, directly fixing the sealing valve through four pressing plates, and then carrying out rough machining on the front face of a blank of the sealing valve through a common vertical milling machine, wherein a margin of 0.5mm is reserved, and the cutting linear speed is controlled to be 90-100 m/min;
4) continuously carrying out heat treatment on the sealing valve, directly fixing the sealing valve through four pressing plates, and then carrying out semi-finishing on the back surface of a blank of the sealing valve through a common vertical milling machine, wherein a margin of 0.15mm is reserved, and the cutting linear speed is controlled at 115-120 m/min;
5) continuously carrying out heat treatment on the sealing valve, directly fixing the sealing valve through four pressing plates, and then carrying out semi-finishing on the front surface of a blank of the sealing valve through a common vertical milling machine, wherein a margin of 0.08mm is reserved, and the cutting linear speed is controlled to be 125-130 m/min;
6) continuously carrying out heat treatment on the sealing valve, positioning and fixing the sealing valve blank through the production tool, and then carrying out finish machining on the reverse side of the sealing valve blank through a high-precision vertical machining center until the sealing valve blank is machined in place, wherein the linear cutting speed is controlled to be 180-190 m/min;
wherein the clamping force of the first main clamping block and the second main clamping block is controlled to be 0.8-0.85 MPA, and the clamping force of the first auxiliary clamping block and the second auxiliary clamping block is controlled to be 0.6-0.65 MPA;
7) carrying out simulation on the front face of the sealing valve, thereby calculating the buckling deformation degree of the front face of the sealing valve before finish machining in advance, and facilitating the subsequent arrangement of different cutter milling paths, different cutting parameters and different clamping force parameters in advance according to different buckling deformation degrees;
8) after the sealed valve blank is positioned and fixed through the production tool, the front side of the sealed valve blank is subjected to fine machining through a high-precision vertical machining center until the sealed valve blank is machined in place;
a. when the detected surface is gentle in 7), directly processing the workpiece in place, controlling the cutting linear speed to be 210-215 m/min, controlling the clamping force of the first main clamping block and the second main clamping block to be 0.65-0.7 MPA, and controlling the clamping force of the first auxiliary clamping block and the second auxiliary clamping block to be 0.55-0.6 MPA;
b. when the detected surface is steep in the step 7), cutting is carried out by two cutters, the remaining margin of a first cutter is 0.03-0.04 mm, the cutting linear speed is controlled to be 195-200 m/min, a second cutter is directly machined in place, the cutting linear speed is controlled to be 210-215 m/min, the clamping force of a first main clamping block and a second main clamping block is controlled to be 0.65-0.7 MPA, and the clamping force of a first auxiliary clamping block and a second auxiliary clamping block is controlled to be 0.55-0.6 MPA;
9) replacing a cutter of a high-precision vertical machining center with a high-precision roughness polishing head, and performing roughness polishing on the front surface of the sealing valve through the roughness polishing head until the surface roughness Ra is controlled to be less than or equal to 0.4, wherein the rotating speed of a main shaft is controlled to be 3500-4000 revolutions;
10) fixing the sealing valve through flat tongs, leveling the front surface of the sealing valve to be less than or equal to 0.012mm, and processing a connecting hole on the side surface of the sealing valve;
11) fixing the sealing valve through flat tongs, leveling the front surface of the sealing valve to be less than or equal to 0.012mm, and processing a rubber groove on the side surface of the sealing valve;
12) vulcanizing the annular rubber strip;
13) and pressing the annular rubber strip into the outer ring of the sealing valve and the rubber groove by a special tool.
Preferably, the heat treatment is carried out in a heating furnace at 250-260 ℃ for 7-8 hours.
The invention has the beneficial effects that: 1. guarantee the high accuracy location of sealing valve location through special frock clamp to the dedicated main grip block of cooperation carries out the horizontal extrusion centre gripping with assisting the grip block to sealing valve, compares direct perpendicular concora crush fixedly, more can reduce sealing valve's deflection. 2. The heat treatment process is carried out before rough machining or semi-finish machining every time, so that the stress in the sealed valve after machining is finished every time is eliminated, and meanwhile, the cutting machinability can be improved, and the subsequent finish machining is guaranteed. 3. And performing simulation before finish machining on the front face of the sealing valve, so that the buckling deformation degree of the front face of the sealing valve before finish machining is calculated in advance, different cutter milling paths, different cutting parameters and different clamping force parameters are arranged in advance according to different buckling deformation degrees in the follow-up process, the front face of the sealing valve is prevented from further distortion due to different buckling deformation degrees of the front face of the sealing valve after finish machining is finished, and the flatness requirement of the surface cannot be ensured.
Drawings
Fig. 1 is a front view of the high-precision sealing valve production tool of the invention.
Fig. 2 is a bottom view of the sealing valve of the present invention.
Fig. 3 is an isometric view of the seal valve of the present invention.
Fig. 4 is an isometric view of a sealed valve of the present invention with an annular rubber strip.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
Referring to fig. 1-4, a production tool for a high-precision sealing valve comprises a first base plate 1 and a second base plate 2 which are identical (the two base plates are made into two pieces, and the flatness of the two pieces is better controlled than that of the whole piece), the upper end of the first substrate 1 is provided with a first positioning surface 3, the upper end of the second substrate 2 is provided with a second positioning surface 4, the planeness of the first positioning surface 3 is controlled to be less than or equal to 0.008mm, the planeness of the second positioning surface 4 is controlled to be less than or equal to 0.008mm, after the first substrate 1 and the second substrate 2 are spliced, the flatness of the whole body after the first positioning surface 3 and the second positioning surface 4 are combined is controlled to be less than or equal to 0.012mm, therefore, by the flatness requirement, when the front surface 10 and the back surface 11 of the sealing valve are subjected to finish machining, the accurate positioning can be realized, the machining precision is ensured, and the high-precision form and position tolerance requirements of the positioning surface and the machining surface are ensured;
still including setting up two first main grip blocks 5 on one side of first locating surface 3, setting up a first auxiliary grip block 6 on 3 opposite sides of first locating surface, setting up two second main grip blocks 7 on one side of second locating surface 4 and setting up a second auxiliary grip block 8 on 4 opposite sides of second locating surface, first main grip block 5, first auxiliary grip block 6, second main grip block 7 and second auxiliary grip block 8 all be connected with the cylinder, drive first main grip block 5, first auxiliary grip block 6, second main grip block 7 and second auxiliary grip block 8 inward movement and realize the extrusion centre gripping to sealing valve through the cylinder during use. Compare with perpendicular concora crush, perpendicular concora crush is because sealing valve's thickness is thinner, because sealing valve is aluminium material again, so relatively softer, so compress tightly the mode through perpendicular concora crush and make this sealing valve warp very easily, comparatively speaking, the extrusion region of horizontal extrusion formula is whole valve, and thickness is great, is difficult to take place to warp.
Preferably, the first auxiliary clamping block 6 is located between the two first main clamping blocks 5, and the second auxiliary clamping block 8 is located between the two second main clamping blocks 7. Therefore, the clamping blocks can be uniformly distributed on two sides of the sealing valve through the design, the sealing valve is better fixed, and the phenomenon that the clamping of the sealing valve is not firm and loose during machining is avoided.
A production process of a high-precision sealing valve comprises the following steps:
1) performing high-vacuum dehydrogenation treatment on a sealing valve blank made of pure aluminum, ensuring that the hydrogen content in the sealing valve is restored to a normal level at normal temperature through the high-vacuum dehydrogenation treatment, and preventing the phenomena of fracture and deformity caused by overhigh local hydrogen content;
2) after the sealing valve blank 9 is directly fixed through the four pressing plates, the front surface of the sealing valve blank 9 is roughly machined through a common vertical milling machine, a 1.5mm allowance is reserved, the cutting linear speed is controlled to be 75-80 m/min, and the phenomenon of vibration caused by the fact that the cutting speed is too high is prevented, so that the sealing valve is prevented from deforming;
3) carrying out heat treatment on the sealing valve 9 to remove the stress remained in the processing of the previous procedure, directly fixing the sealing valve 9 through four press plates, carrying out rough machining on the front surface 10 of a blank of the sealing valve through a common vertical milling machine, and keeping a margin of 0.5mm, wherein the cutting linear speed is controlled to be 90-100 m/min according to the cutting amount;
4) continuously carrying out heat treatment on the sealing valve to remove the stress remained in the processing of the previous procedure, directly fixing the sealing valve through four press plates, carrying out semi-finishing on the back surface 11 of a blank of the sealing valve through a common vertical milling machine, and keeping a margin of 0.15mm, wherein the cutting linear speed is controlled to be 115-120 m/min according to the cutting amount;
5) continuously carrying out heat treatment on the sealing valve, directly fixing the sealing valve through four press plates, then carrying out semi-finishing on the front 10 of a blank of the sealing valve through a common vertical milling machine, reserving a margin of 0.08mm, and controlling the cutting linear speed to be 125-130 m/min according to the cutting amount;
6) continuously carrying out heat treatment on the sealing valve, positioning and fixing the sealing valve blank through the production tool, then carrying out finish machining on the reverse side 11 of the sealing valve blank through a high-precision vertical machining center until the sealing valve blank is machined in place, and simultaneously controlling the linear cutting speed to be 180-190 m/min in order to ensure the cutting precision;
in order to prevent the problem of unstable clamping caused by too small holding force of each clamping block or the problem of deformation of the sealing valve caused by too large holding force of each clamping block, a proper clamping force must be selected to fix the sealing valve, and after a large number of tests, the clamping force of the first main clamping block 5 and the second main clamping block 7 is preferably controlled to be 0.8-0.85 MPA, and the clamping force of the first auxiliary clamping block 6 and the second auxiliary clamping block 8 is preferably controlled to be 0.6-0.65 MPA;
7) performing simulation on the front face of the sealing valve 9, so as to calculate the buckling deformation degree of the front face of the sealing valve before finish machining in advance, and conveniently arranging different cutter milling paths, different cutting parameters and different clamping force parameters in advance according to different buckling deformation degrees in the follow-up process;
8) after the sealed valve blank is positioned and fixed through the production tool, the front surface 10 of the sealed valve blank is subjected to fine machining through a high-precision vertical machining center until the sealed valve blank is machined in place;
a. when the detected surface in the step 7) is gentle, the surface is directly machined in place, the cutting linear speed is controlled to be 210-215 m/min, and due to the fact that the allowance is small, after a large number of tests, the clamping force of the first main clamping block and the clamping force of the second main clamping block are preferably controlled to be 0.65-0.7 MPA, and the clamping force of the first auxiliary clamping block and the clamping force of the second auxiliary clamping block are controlled to be 0.55-0.6 MPA;
b. and 7) cutting by two cutters when the detected surface is steep, wherein the remaining margin of the first cutter is 0.03-0.04 mm, and the cutting linear speed is controlled at 195-200 m/min, so that the stress caused by a steep curved surface is eliminated by cutting of the first cutter, the deformation of the sealing valve caused by direct cutting is prevented, the cutting margin is reduced, and the machining precision is further ensured. Then directly processing the workpiece in place by using a second cutter, wherein the cutting linear speed is controlled to be 210-215 m/min, the clamping force of the two cutters is preferably controlled to be 0.65-0.7 MPA when the clamping force of the first main clamping block and the clamping force of the second main clamping block are fixed, and the clamping force of the first auxiliary clamping block and the clamping force of the second auxiliary clamping block are controlled to be 0.55-0.6 MPA;
9) the tool of the high-precision vertical machining center is replaced by a high-precision roughness polishing head, the front face of the sealing valve is subjected to roughness polishing through the roughness polishing head until the surface roughness is controlled to Ra (Ra) less than or equal to 0.4, wherein the rotating speed of a main shaft is controlled to 3500-4000 revolutions, so that the high-precision roughness polishing head can further polish the roughness of the front face of the sealing valve during high-speed rotation, sufficient roughness is ensured, friction is reduced during the sealing advancing process of the front face of the valve, the precision and the matching degree are ensured, and the service life is prolonged;
10) fixing the sealing valve through flat tongs, leveling the front surface 10 of the sealing valve to be less than or equal to 0.012mm, and processing a connecting hole 12 on the side surface of the sealing valve; the connecting hole 12 is connected with a driving mechanism, so that the sealing valve is driven to move up and down through the driving mechanism to realize the opening and closing of the valve, when the valve is sealed, the front face 10 of the sealing valve, namely a sealing face, is required to be vertical, so the verticality between the connecting hole 12 and the front face 10 of the sealing valve is required to be controlled within 0.016mm or less, and the front face 10 of the sealing valve is leveled to be within 0.012mm or less before processing because a tooling face is not positioned, so that the verticality can reach the standard.
11) Fixing the sealing valve by flat tongs, leveling the front face 10 of the sealing valve to be less than or equal to 0.012mm, processing a rubber groove 13 on the side face of the sealing valve, wherein the rubber groove 13 is a main positioning and fixing structure embedded with an annular rubber strip 14, and the sealing valve is extruded and sealed by the annular rubber strip 14, so that the precision and the position degree of the rubber groove 13 must be matched with the front face 10 of the sealing valve;
12) the annular rubber strip 14 is subjected to vulcanization treatment, and the rubber strip subjected to vulcanization treatment has stronger tear resistance and can improve the compression permanent deformation performance, so that the long-term use of the annular rubber strip 14 is ensured;
13) finally, the annular rubber strip 14 is pressed into the outer ring of the sealing valve and the rubber groove through a special tool.
In the embodiment in the market, the heat treatment is performed in a heating furnace at 250-260 ℃ for 7-8 hours, so that the stress of the processed sealing valve can be effectively removed, and the processing precision and the stability of the sealing valve are guaranteed.
The above embodiment is only one of the preferable embodiments of the present patent, and any changes made without departing from the scope of the present patent are within the scope of the present patent.
Claims (3)
1. A production process of a high-precision sealing valve is characterized by comprising the following steps: the production tool comprises a first substrate and a second substrate which are the same, a first positioning surface is arranged at the upper end of the first substrate, a second positioning surface is arranged at the upper end of the second substrate, the flatness of the first positioning surface is controlled to be less than or equal to 0.008mm, the flatness of the second positioning surface is controlled to be less than or equal to 0.008mm, and after the first substrate and the second substrate are spliced, the overall flatness of the first positioning surface and the second positioning surface after being combined is controlled to be less than or equal to 0.012 mm;
the production tool further comprises two first main clamping blocks arranged on one side of the first positioning surface, a first auxiliary clamping block arranged on the other side of the first positioning surface, two second main clamping blocks arranged on one side of the second positioning surface and a second auxiliary clamping block arranged on the other side of the second positioning surface, wherein the first main clamping block, the first auxiliary clamping block, the second main clamping block and the second auxiliary clamping block are all connected with an air cylinder, so that the air cylinder drives the first main clamping block, the first auxiliary clamping block, the second main clamping block and the second auxiliary clamping block to move back and forth to realize the extrusion clamping of the sealing valve;
the production process comprises the following steps:
1) carrying out high vacuum dehydrogenation treatment on a sealing valve blank made of pure aluminum;
2) directly fixing a sealed valve blank through four pressing plates, and then performing large rough machining on the front face of the sealed valve blank through a common vertical milling machine, wherein a 1.5mm allowance is reserved, and the cutting linear speed is controlled to be 75-80 m/min;
3) carrying out heat treatment on the sealing valve, directly fixing the sealing valve through four pressing plates, and then carrying out rough machining on the front face of a blank of the sealing valve through a common vertical milling machine, wherein a margin of 0.5mm is reserved, and the cutting linear speed is controlled to be 90-100 m/min;
4) continuously carrying out heat treatment on the sealing valve, directly fixing the sealing valve through four pressing plates, and then carrying out semi-finishing on the back surface of a blank of the sealing valve through a common vertical milling machine, wherein a margin of 0.15mm is reserved, and the cutting linear speed is controlled at 115-120 m/min;
5) continuously carrying out heat treatment on the sealing valve, directly fixing the sealing valve through four pressing plates, and then carrying out semi-finishing on the front surface of a blank of the sealing valve through a common vertical milling machine, wherein a margin of 0.08mm is reserved, and the cutting linear speed is controlled to be 125-130 m/min;
6) continuously carrying out heat treatment on the sealing valve, positioning and fixing a sealing valve blank through a production tool, then carrying out finish machining on the back surface of the sealing valve blank through a high-precision vertical machining center until the sealing valve blank is machined in place, and controlling the linear cutting speed to be 180-190 m/min;
wherein the clamping force of the first main clamping block and the second main clamping block is controlled to be 0.8-0.85 MPA, and the clamping force of the first auxiliary clamping block and the second auxiliary clamping block is controlled to be 0.6-0.65 MPA;
7) carrying out simulation on the front face of the sealing valve, thereby calculating the buckling deformation degree of the front face of the sealing valve before finish machining in advance, and facilitating the subsequent arrangement of different cutter milling paths, different cutting parameters and different clamping force parameters in advance according to different buckling deformation degrees;
8) positioning and fixing the sealed valve blank through a production tool, and then performing finish machining on the front side of the sealed valve blank through a high-precision vertical machining center until the sealed valve blank is machined in place;
a. when the detected surface is gentle in 7), directly processing the workpiece in place, controlling the cutting linear speed to be 210-215 m/min, controlling the clamping force of the first main clamping block and the second main clamping block to be 0.65-0.7 MPA, and controlling the clamping force of the first auxiliary clamping block and the second auxiliary clamping block to be 0.55-0.6 MPA;
b. when the detected surface is steep in the step 7), cutting is carried out by two cutters, the remaining margin of a first cutter is 0.03-0.04 mm, the cutting linear speed is controlled to be 195-200 m/min, a second cutter is directly machined in place, the cutting linear speed is controlled to be 210-215 m/min, the clamping force of a first main clamping block and a second main clamping block is controlled to be 0.65-0.7 MPA, and the clamping force of a first auxiliary clamping block and a second auxiliary clamping block is controlled to be 0.55-0.6 MPA;
9) replacing a cutter of a high-precision vertical machining center with a high-precision roughness polishing head, and performing roughness polishing on the front surface of the sealing valve through the roughness polishing head until the surface roughness Ra is controlled to be less than or equal to 0.4, wherein the rotating speed of a main shaft is controlled to be 3500-4000 revolutions;
10) fixing the sealing valve through flat tongs, leveling the front surface of the sealing valve to be less than or equal to 0.012mm, and processing a connecting hole on the side surface of the sealing valve;
11) fixing the sealing valve through flat tongs, leveling the front surface of the sealing valve to be less than or equal to 0.012mm, and processing a rubber groove on the side surface of the sealing valve;
12) vulcanizing the annular rubber strip;
13) and pressing the annular rubber strip into the outer ring of the sealing valve and the rubber groove by a special tool.
2. The process for producing a high-precision sealing valve according to claim 1, wherein: the first auxiliary clamping block is positioned between the two first main clamping blocks, and the second auxiliary clamping block is positioned between the two second main clamping blocks.
3. The process for producing a high-precision sealing valve according to claim 1, wherein: the heat treatment is carried out in a heating furnace at 250-260 ℃ for 7-8 hours.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011045920.7A CN112192151B (en) | 2020-09-29 | 2020-09-29 | Production tool and process of high-precision sealing valve |
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| CN202011045920.7A CN112192151B (en) | 2020-09-29 | 2020-09-29 | Production tool and process of high-precision sealing valve |
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| CN112192151B true CN112192151B (en) | 2021-11-16 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002013655A (en) * | 1997-11-27 | 2002-01-18 | Toto Ltd | Component member of brass-made passage |
| EP1785221A1 (en) * | 2005-11-14 | 2007-05-16 | Holliger Paletten Logistik AG | Device for aligning and/or fixing of pallets and/or pallet parts to be repaired |
| CN103753454A (en) * | 2014-02-11 | 2014-04-30 | 中航飞机股份有限公司西安飞机分公司 | Pneumatic combined flexible prestress clamp and control system thereof |
| CN109759869A (en) * | 2019-03-15 | 2019-05-17 | 贵州工程应用技术学院 | A kind of precise locating fixture of precision component processing |
| CN211516662U (en) * | 2019-08-31 | 2020-09-18 | 合肥学鼎机电科技有限公司 | Production device for valve parts |
-
2020
- 2020-09-29 CN CN202011045920.7A patent/CN112192151B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002013655A (en) * | 1997-11-27 | 2002-01-18 | Toto Ltd | Component member of brass-made passage |
| EP1785221A1 (en) * | 2005-11-14 | 2007-05-16 | Holliger Paletten Logistik AG | Device for aligning and/or fixing of pallets and/or pallet parts to be repaired |
| CN103753454A (en) * | 2014-02-11 | 2014-04-30 | 中航飞机股份有限公司西安飞机分公司 | Pneumatic combined flexible prestress clamp and control system thereof |
| CN109759869A (en) * | 2019-03-15 | 2019-05-17 | 贵州工程应用技术学院 | A kind of precise locating fixture of precision component processing |
| CN211516662U (en) * | 2019-08-31 | 2020-09-18 | 合肥学鼎机电科技有限公司 | Production device for valve parts |
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| CN112192151A (en) | 2021-01-08 |
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