CN112179577A - Suction gun head with continuously-changed volume and leak source detection system - Google Patents
Suction gun head with continuously-changed volume and leak source detection system Download PDFInfo
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- CN112179577A CN112179577A CN202011089029.3A CN202011089029A CN112179577A CN 112179577 A CN112179577 A CN 112179577A CN 202011089029 A CN202011089029 A CN 202011089029A CN 112179577 A CN112179577 A CN 112179577A
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- sealing
- claw
- gun head
- suction gun
- ring
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- 238000001514 detection method Methods 0.000 title claims description 14
- 238000007789 sealing Methods 0.000 claims abstract description 90
- 210000000078 claw Anatomy 0.000 claims abstract description 73
- 239000007789 gas Substances 0.000 claims abstract description 34
- 239000001307 helium Substances 0.000 claims abstract description 24
- 229910052734 helium Inorganic materials 0.000 claims abstract description 24
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 24
- 230000008859 change Effects 0.000 claims description 12
- 239000012528 membrane Substances 0.000 claims description 9
- 230000000149 penetrating effect Effects 0.000 claims description 9
- 238000005452 bending Methods 0.000 claims description 4
- 239000013013 elastic material Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 5
- 238000003466 welding Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 230000001788 irregular Effects 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The invention provides a suction gun head with continuously variable volume, which comprises a sealing claw wrapping a piece to be detected, wherein the sealing claw comprises a plurality of cylindrical frameworks which are uniformly arranged around the periphery, one end of each framework is hinged with a zoom ring, the other end of each framework is bent towards the inside of the sealing claw, a limiting disc for limiting the upper limit and the lower limit of the radius of the sealing claw is sleeved on the sealing claw, an air outlet is arranged in the center of the limiting disc, a sealing film is arranged on the outer side of the sealing claw, and the sealing film is connected with the edge of the air outlet in a sealing manner. The invention also provides a system for detecting the leak source by using the suction gun head, the sealing claw wraps the piece to be detected, the gas outlet is communicated with the helium mass spectrometer through the gas outlet pipe, the piece to be detected is connected with a high-pressure helium source, and the gas outlet pipe is provided with a standard leak hole. The invention has the advantages that: the sealing claw is used for wrapping the to-be-detected piece, the shape is not limited to a regular shape, the adaptability is strong, the end part of the sealing claw is connected with the zooming ring, and the volume of the sealing claw can be continuously changed.
Description
Technical Field
The invention relates to the technical field of vacuum leak detection, in particular to a suction gun head with continuously-changed volume and a leak source detection system.
Background
The nuclear fusion device has high requirements on the sealing performance of vacuum, and currently, instruments for detecting whether a vacuum system has leakage widely adopt helium mass spectrometer leak detectors in a suction cavity mode. However, in the use process of the suction cavity type helium mass spectrometer leak detector, the installation position of the front device of the helium mass spectrometer leak detector and the structure of a suction gun head of the helium mass spectrometer leak detector are limited, the helium mass spectrometer leak detector can only obtain the minimum part of helium gas sprayed into a vacuum system of a unit, the structure of the suction gun is fixed, suction gun heads of different specifications need to be replaced according to different sizes of welding seams, and the final result measurement is inaccurate due to the fact that diffusion of the helium gas can affect each other according to the welding seams with very close distances. In order to solve the problems, the utility model patent with the publication number of CN207964195U discloses a helium mass spectrometer suction chamber device for detecting the welded junction of a refrigerator tube, which is used for detecting the gap by wrapping the refrigerator tube by an upper cover plate and a lower cover plate; the utility model discloses a special suction gun of helium mass spectrometer leak detector is disclosed to utility model patent with publication number CN202305162U, and it detects the welding seam through setting up the sucking disc, and the influence of suction gun head size to welding seam detection can all be solved to these methods, but these techniques are only applicable to the welding seam detection of specific regular shape, and the universality is not strong.
Disclosure of Invention
The invention aims to provide a suction gun head which can wrap a detection area and can continuously change the volume and a system for detecting a leak source by using the suction gun head.
The invention solves the technical problems through the following technical scheme: the utility model provides a suction gun head of volume continuous variation, treats the sealed claw of detecting the piece including the parcel, sealed claw includes a plurality of cylindric skeletons that evenly center on setting along circumference, skeleton one end and a zoom ring hinge are connected, and the other end of skeleton is to the inside bending of sealed claw, and the cover is equipped with the spacing dish of restriction sealed claw radius bound on the sealed claw, the center of spacing dish is provided with the gas outlet that is in sealed claw inside, and the outside of sealed claw is provided with the seal membrane that covers between the free end of sealed claw to spacing dish, the edge sealing connection of seal membrane and gas outlet.
Preferably, the surface of the limiting disc is provided with a sliding groove in a divergent manner relative to the air outlet in the center, the sliding groove is arranged along the radial direction, and the framework can slide in the sliding groove to change the position.
Preferably, the skeleton includes the canned paragraph be connected with the ring of zooming and the seal section of being connected with the canned paragraph, and the seal section is articulated to be cooperated with the canned paragraph, and the seal section can change the angle along the radial rotation of ring of zooming relatively the canned paragraph.
Preferably, the sealing film is fixedly connected with one side, away from the scaling ring, of the limiting disc, the sealing film penetrates through the framework and is in sealing connection with the framework, and when the framework slides along the sliding groove, the sealing film slides along the framework; the sealing film is made of super-elastic materials.
Preferably, the scaling ring is of an annular scissor-fork type telescopic structure.
Preferably, one end of the zoom ring facing the sealing claw is in hinged fit with a fixed section of the framework, and the fixed section can freely rotate relative to the zoom ring along the radial direction.
Preferably, the outer side of the sealing claw is also provided with a supporting frame which coats the scaling ring and part of the fixing section of the sealing claw, the bottom plate of the supporting frame is arranged towards the scaling ring, and the bottom plate is provided with an air outlet pipe communicated with the air outlet in a penetrating manner; one end of the support frame matched with the sealing claw forms the limiting disc; and the air outlet pipe is sleeved with a spring limited between the air outlet and the bottom plate. .
Preferably, two adjusting rods fixedly connected with one end of the zooming ring facing the bottom plate of the support frame are further arranged on the bottom plate of the support frame in a penetrating manner, and the two adjusting rods are symmetrical relative to the center of the bottom plate; the adjusting lever can be displaced in the radial direction on the base plate.
Preferably, the bottom plate is provided with an adjusting groove which is arranged along the radial direction and points to the circle center, the adjusting rods can change the position along the length direction of the adjusting groove, and the two adjusting rods are fixed in the two collinear adjusting grooves; the two adjusting rods are provided with coaxial threaded holes with opposite thread directions, the two threaded holes are provided with the same screw rod in a penetrating mode, and the spiral directions of external threads at the two ends of the screw rod are opposite.
The invention also provides a system for detecting the leak source by using the suction gun head, wherein the sealing claw wraps the piece to be detected, the gas outlet is communicated with the helium mass spectrometer through a gas outlet pipe, the piece to be detected is connected with a high-pressure helium source, and the gas outlet pipe is provided with a standard leak hole which enables the pressure in the sealing claw to be lower than the standard atmospheric pressure.
The suction gun head and the leak source detection system with continuously changed volume provided by the invention have the advantages that: treat the piece through the sealed claw parcel, need not consider leakage position and small leak hole, can be fast convenient detect out leakage position, and the shape requirement of treating the piece that detects is lower, be not limited to regular shape, it is more nimble to use, strong adaptability, the tip and the zoom ring of sealed claw are connected, can change the volume of sealed claw in succession through the diameter of adjustment zoom ring, treat the piece with adapting to not unidimensional, the diameter scope through spacing dish restriction sealed claw, can not too enlarge and lead to unable parcel to treat the piece, also can not press very little under the seal membrane effect, lead to can't treating the piece and put into, the tip makes the skeleton density of tip improve to inside bending, thereby better sealed effect has. The sealing section is hinged and matched with the fixing section, so that the angle of the sealing section of each framework can be independently changed relative to the fixing section, and a circle of sealing sections at the end part of each sealing claw can be adaptively formed into a circle according to the shape of the piece to be detected, so that the sealing claw can be conveniently adapted to an irregular piece to be detected; the relative positions of the two adjusting rods are simultaneously controlled through the screw rod, so that the radius of the zooming ring is conveniently controlled.
Drawings
FIG. 1 is a schematic view of a continuously variable volume suction gun head provided by an embodiment of the present invention;
FIG. 2 is a schematic view of a suction gun head with a continuously variable volume according to an embodiment of the present invention;
FIG. 3 is a schematic view of a limiting plate of a suction gun head with continuously variable volume according to an embodiment of the present invention;
FIG. 4 is a schematic view of a sealing jaw of a pipette head with continuously varying volumes provided by an embodiment of the present invention;
FIG. 5 is a schematic view of a zoom ring of a suction gun head with continuously variable volume provided by an embodiment of the present invention;
FIG. 6 is a schematic view of a bottom plate of a suction gun head with continuously changing volumes according to an embodiment of the present invention.
Detailed Description
To make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention are described below in detail and completely with reference to the accompanying drawings, and it is apparent that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
With reference to fig. 1 and 2, the present embodiment provides a suction gun head with continuously variable volume, comprising a sealing jaw 2 capable of wrapping an element to be detected 1, the sealing claw 2 comprises a plurality of cylindrical frameworks 21 which are uniformly arranged around a circle along the axial direction, one end of the framework 21 is fixedly connected with a scaling ring 3, the other end of the framework 21 is bent towards the inside of the sealing claw 2, a limiting disc 6 for limiting the upper and lower limits of the radius of the sealing claw 2 is sleeved on the sealing claw 2, the center of the limiting disc 6 is provided with an air outlet 61 positioned inside the sealing claw 2, the outer side of the sealing claw 2 is provided with a sealing film (not shown) covering between the free end of the sealing claw 2 and the limiting disc 6, the sealing film is connected with the edge of the air outlet 61 in a sealing way, the air outlet 31 is communicated with an air outlet pipeline, thereby ensuring that the gas exits from the outlet duct and preventing the gas from leaking at the outlet 61.
Referring to fig. 2, when in use, the sealing claw 2 is covered on the outer side of the piece to be detected 1 and is communicated with the helium mass spectrometer 11 through the gas outlet pipe 62 to provide helium gas for the piece to be detected 1, if gas leakage exists, the leaked helium gas enters the helium mass spectrometer 11 along the gas outlet pipe 62 through the sealing claw 2, if the helium gas is detected by the helium mass spectrometer 11, the leakage exists, otherwise, the piece to be detected 1 is normal, and the leakage position can be detected by sprinkling water or using a traditional suction gun head and other modes under the condition of leakage. When detecting, the gas pressure in the piece to be detected 1 needs to be kept higher than the pressure in the sealing claw 2, in this embodiment, the air outlet pipe 62 is provided with a standard leak hole 63, so that the pressure in the sealing claw 2 is 0.9 standard atmosphere, and the pressure of the sealing claw 2 is lower than the air pressure, and can be tightly pressed on the piece to be detected 1 by air, and the piece to be detected 1 provides 2 gas pressures with standard atmospheres, so that the gas can flow to the sealing claw 2 when leakage exists.
The suction gun head that this embodiment provided, treat and detect a 1 through sealed claw 2 parcel, need not consider leakage position and small leak hole, can be fast convenient detect out leakage position, and treat that the shape requirement of detecting a 1 is lower, and is not limited to regular shape, use more in a flexible way, high adaptability, the tip of sealed claw 2 is connected with zoom ring 3, can change sealed claw 2's volume in succession through the diameter of adjustment zoom ring 3, treat a 1 with the adaptation unidimensional detection, through the diameter scope of spacing dish 6 restriction sealed claw 2, can not too extensive expansion lead to unable parcel to treat a 1 with the detection, also can not push down very little under the seal membrane effect, lead to unable to treating a 1 with the detection and put into, sealed claw 2 tip makes the skeleton 21 density of tip improve to inside bending, thereby better sealed effect has.
Referring to fig. 3, the surface of the limiting disk 6 is provided with a sliding groove 64 in a divergent shape relative to the central air outlet 61, the sliding groove 64 is arranged in a radial direction, and the framework 21 can slide in the sliding groove 64 to change the position; thereby changing the volume of the sealing jaw 2 through the sliding groove 64 and being able to limit the diameter of the sealing jaw 2. The sealing membrane is kept away from one side fixed connection of scaling ring 3 with spacing dish 6, and the sealing membrane passes skeleton 21 and with skeleton 21 sealing connection, when skeleton 21 slided along sliding tray 64, the sealing membrane followed skeleton 21 and slided.
With reference to fig. 4, the frame 21 includes a fixed section 22 connected to the zoom ring 3 and a sealing section 23 connected to the fixed section 22, the sealing section 23 is in hinged fit with the fixed section 22, and the sealing section 23 can rotate relative to the fixed section 22 in the radial direction of the zoom ring 3 to change the angle; the angle of the sealing section 23 on each framework 21 can be independently adjusted, and the sealing film always keeps the pressing effect on the sealing section 23, so that sealing detection can be performed on irregular pieces 1 to be detected. The sealing film is made of a super-elastic material and has extremely strong elasticity, toughness and sealing property, such as nylon; the pressing action on the sealing jaw 2 can be maintained.
Referring to fig. 5, the zoom ring 3 is a circular scissor-type telescopic structure, and those skilled in the art can set the size of the zoom ring to have a minimum diameter and a maximum diameter as required to meet the use requirement. The one end of scaling ring 3 towards sealing jaw 2 is articulated the cooperation with the fixed segment 22 of skeleton 21, fixed segment 22 can be relative scaling ring 3 along radial free rotation, when specifically setting up, use round pin axle connection fixed segment 22 and scaling ring 2 and fixed segment 22 and seal section 23 can, the axial of round pin axle should follow the tangential setting of scaling ring 3. It is also possible to provide the ends of the zoom ring 3 and the ends of the fixing segments 22 directly in the form of rings, which are fitted together by mutual engagement, and the radial rotation is achieved by the provision of annular surfaces which prevent them from deflecting to either side.
When the size of the scaling ring 3 is increased, the radius of the middle position of the fixed section 22 is basically unchanged due to the limitation of the limiting disc 6, so that the volume of one end of the sealing claw 2, which is far away from the scaling ring 3, is reduced; conversely, when the radius of the zoom ring 3 is smaller, the volume of the end of the sealing claw 2 away from the zoom ring 3 becomes larger, and the size of the object 1 to be detected which can be accommodated is also larger.
With reference to fig. 1 and 2, a supporting frame 4 covering the scaling ring 3 and a part of the fixing section 22 of the sealing claw 2 is further arranged on the outer side of the sealing claw 2, a bottom plate 41 of the supporting frame 4 is arranged toward the scaling ring 3, an air outlet pipe 62 communicated with an air outlet 61 is arranged on the bottom plate 41 in a penetrating manner, and one end of the supporting frame 4, which is matched with the sealing claw 2, forms the limiting disc 6 or is fixedly connected with the outer edge of the limiting disc 6; when the vacuum suction gun is used, the support frame 4 is connected with an external fixing mechanism for fixing, so that the whole suction gun head is relatively fixed, the sealing claw 2 is convenient to clamp the piece to be detected 1, the gas outlet 61 is fixed through the gas outlet pipe 62 penetrating through the bottom plate 41, and the sealing film is in sealing fit with the gas outlet 61 to prevent gas leakage.
Two adjusting rods 5 fixedly connected with one end, facing the bottom plate 41, of the scaling ring 3 are further arranged on the bottom plate 41 of the supporting frame 4 in a penetrating mode, the two adjusting rods 5 are symmetrical relative to the center of the bottom plate 41, the positions of the adjusting rods 5 can be changed on the bottom plate 41 along the radial direction, therefore, scaling of the scaling ring 3 can be achieved by changing the positions of the adjusting rods 5, and the volume of the sealing claw 2 is further controlled.
Referring to fig. 6, the bottom plate 41 is provided with an adjusting groove 42 pointing to the center of a circle along the radial direction, the adjusting rods 5 can change positions along the length direction of the adjusting groove 42, the two adjusting rods 5 are fixed in the two collinear adjusting grooves 42, the two adjusting rods 5 are provided with coaxial threaded holes (not shown) with opposite thread directions, the two threaded holes are in threaded connection through the same screw 51, the directions of external threads at the two ends of the screw 51 are opposite, and after the screw 51 is in threaded connection with the two adjusting rods 5, the two adjusting rods 5 can be driven to be close to or away from each other simultaneously through the rotation of the screw 51, so that the two ends of the zoom ring 3 can be synchronously close to and away from each other, and the control is.
Referring to fig. 1 again, the outlet pipe 62 is further sleeved with a spring 43 limited between the outlet 61 and the bottom plate 41, and the spring 43 is in a stretched state, so as to provide a pulling force to the bottom plate 41 for the zoom ring 3, and under the condition of no external force, the sealing claw 2 is contracted under the contraction force of the spring 43, and is more attached to the surface of the to-be-detected piece.
Referring to fig. 2, the embodiment further provides a leak source detection system based on the pipette head, the sealing claw 2 wraps the to-be-detected piece 1, the gas outlet 61 is communicated with the helium mass spectrometer 11 through the gas outlet pipe 62, high-pressure helium gas is provided for the to-be-detected piece 1, and the gas outlet pipe 62 is provided with a standard leak hole 63 enabling the pressure in the sealing claw 2 to be lower than the standard atmospheric pressure. Specifically, the pressure in the sealing claw 2 is 0.9 standard atmospheric pressure, and the helium pressure in the piece to be detected 1 is 2 standard atmospheric pressures.
The above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. The utility model provides a suction gun head of volume continuous variation which characterized in that: treat the sealed claw of piece including the parcel, sealed claw includes a plurality of cylindric skeletons that evenly center on setting up along circumference, skeleton one end is connected with a zoom ring is articulated, and the other end of skeleton is to the inside bending of sealed claw, and the cover is equipped with the spacing dish of restriction sealed claw radius bound on the sealed claw, the center of spacing dish is provided with the gas outlet that is in sealed claw inside, and the outside of sealed claw is provided with the seal membrane (not shown) that covers between the free end of sealed claw to spacing dish, the edge sealing connection of seal membrane and gas outlet.
2. A suction gun head with continuously variable volume according to claim 1, characterized in that: the surface of the limiting disc is provided with a sliding groove in a divergent mode relative to the air outlet in the center, the sliding groove is arranged in the radial direction, and the framework can slide in the sliding groove to change the position.
3. A suction gun head with continuously variable volume according to claim 1, characterized in that: the skeleton includes the canned paragraph of being connected with the ring of zooming and the seal section of being connected with the canned paragraph, and the seal section is articulated to be cooperated with the canned paragraph, and the seal section can change the angle along the radial rotation of ring of zooming to the canned paragraph relatively the canned paragraph.
4. A suction gun head with continuously variable volume according to claim 2, wherein: the sealing film is fixedly connected with one side, far away from the scaling ring, of the limiting disc, penetrates through the framework and is in sealing connection with the framework, and when the framework slides along the sliding groove, the sealing film slides along the framework; the sealing film is made of super-elastic materials.
5. A suction gun head with continuously variable volume according to claim 3, characterized in that: the scaling ring is of an annular scissor-fork type telescopic structure.
6. A suction gun head with continuously variable volume according to claim 5, characterized in that: one end of the zooming ring facing the sealing claw is in hinged fit with the fixed section of the framework, and the fixed section can freely rotate along the radial direction relative to the zooming ring.
7. A suction gun head with continuously variable volume according to claim 6, characterized in that: the outer side of the sealing claw is also provided with a support frame which covers the scaling ring and part of the fixing section of the sealing claw, the bottom plate of the support frame is arranged towards the scaling ring, and an air outlet pipe communicated with the air outlet is arranged on the bottom plate in a penetrating manner; one end of the support frame matched with the sealing claw forms the limiting disc; and the air outlet pipe is sleeved with a spring limited between the air outlet and the bottom plate.
8. A suction gun head with continuously variable volume according to claim 6, characterized in that: two adjusting rods fixedly connected with one end, facing the bottom plate of the support frame, of the zooming ring are arranged on the bottom plate of the support frame in a penetrating mode, and the two adjusting rods are symmetrical relative to the center of the bottom plate; the adjusting lever can be displaced in the radial direction on the base plate.
9. A suction gun head with continuously variable volume according to claim 8, wherein: the bottom plate is provided with an adjusting groove which is arranged along the radial direction and points to the circle center, the adjusting rods can change the position along the length direction of the adjusting groove, and the two adjusting rods are fixed in the two collinear adjusting grooves; the two adjusting rods are provided with coaxial threaded holes with opposite thread directions, the two threaded holes are provided with the same screw rod in a penetrating mode, and the spiral directions of external threads at the two ends of the screw rod are opposite.
10. A system for leak detection using a suction gun head according to any one of claims 1 to 9, characterized in that: the sealing claw wraps the piece to be detected, the gas outlet is communicated with the helium mass spectrometer through a gas outlet pipe, the piece to be detected is connected with a high-pressure helium source, and a standard leak hole enabling the pressure in the sealing claw to be lower than the standard atmospheric pressure is formed in the gas outlet pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011089029.3A CN112179577B (en) | 2020-10-13 | 2020-10-13 | Suction gun head with continuously-changed volume and leakage point detection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011089029.3A CN112179577B (en) | 2020-10-13 | 2020-10-13 | Suction gun head with continuously-changed volume and leakage point detection system |
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| Publication Number | Publication Date |
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| CN112179577A true CN112179577A (en) | 2021-01-05 |
| CN112179577B CN112179577B (en) | 2024-06-14 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115597789A (en) * | 2021-07-08 | 2023-01-13 | 烟台万华电子材料有限公司（Cn） | Sealing performance detection device and detection method for sealing joint |
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| CN213239364U (en) * | 2020-10-13 | 2021-05-18 | 中国科学院合肥物质科学研究院 | Suction gun head with continuously-changed volume and leak source detection system |
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| KR20060075159A (en) * | 2004-12-28 | 2006-07-04 | 삼성전자주식회사 | Equipment for detecting leak point |
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| CN115597789A (en) * | 2021-07-08 | 2023-01-13 | 烟台万华电子材料有限公司（Cn） | Sealing performance detection device and detection method for sealing joint |
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| CN112179577B (en) | 2024-06-14 |
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