CN112144021B - Hydrophobic hard coating suitable for high-frequency electrotome and preparation method thereof - Google Patents
Hydrophobic hard coating suitable for high-frequency electrotome and preparation method thereof Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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Abstract
The invention discloses a hydrophobic hard coating suitable for a high-frequency electrotome and a preparation method thereof, belonging to the field of hydrophobic coatings. The preparation method comprises the following steps: (1) taking a high-frequency electrotome as a substrate, and depositing a Cr layer on the substrate by adopting a multi-arc ion plating sputtering Cr target; (2) adopts multi-arc ion plating to sputter Cr target, TiAl target, sputtering ion and N in sputtering cavity2And (3) reacting, depositing CrTiAlN on the Cr layer, simultaneously adopting a radio frequency magnetron sputtering PTFE target to obtain a co-sputtered CrTiAlN-PTFE coating, and obtaining the hydrophobic hard coating suitable for the high-frequency electrotome after the co-sputtering is finished. The preparation method of the invention adopts multi-arc ion plating and magnetron sputtering composite equipment to carry out coating deposition, and can give full play to the advantages of two physical vapor deposition methods: the coating prepared by multi-arc ion plating has high deposition rate and strong binding force; the non-metal coating can be prepared by magnetron sputtering, and the coating is compact and uniform.
Description
Technical Field
The invention belongs to the field of hydrophobic coatings, and particularly relates to a hydrophobic hard coating suitable for a high-frequency electrotome and a preparation method thereof.
Background
The surface wetting state is divided into two types: hydrophilic and hydrophobic, generally expressed in terms of surface contact angle, are hydrophobic when the surface contact angle is greater than 90 ° and hydrophilic when the surface contact angle is less than 90 °. Hydrophobic surfaces are characterized by low surface energy and high resistance to adhesion.
Polytetrafluoroethylene (PTFE) is the most common hydrophobic material with low surface energy, has wide application on the surface of a medical high-frequency electrotome, and has excellent hydrophobic property which is used for preventing tissue adhesion and carbonization on the surface of the electrotome in the operation process. However, PTFE is an organic polymer material with certain elasticity, and a high-frequency electrotome adopting a PTFE coating mainly has three problems at present: firstly, the electrotome coated by the coating can be passivated, so that the tissue cutting performance of the electrotome is greatly reduced, and the operation efficiency is reduced; secondly, the PTFE coating has low binding force with a metal matrix and poor wear resistance, and the electrotome can have the problem of tissue adhesion again due to the falling or abrasion of the coating after being used for a short time; and thirdly, the PTFE coating has poor heat conductivity, so that heat accumulated on the surface of the electrotome is difficult to effectively conduct, moisture in tissues and blood is rapidly evaporated on the surface of the electrotome and carbonized, and the service life of the electrotome is shortened. Therefore, the hydrophobic performance of the coating is kept, and the coating has good wear resistance and heat conductivity, and is the key point for the medical high-frequency electrotome coating.
Disclosure of Invention
The invention aims to solve the problems of poor passivation, wear resistance and thermal conductivity of a high-frequency electrotome adopting a PTFE coating, and provides a hydrophobic hard coating suitable for the high-frequency electrotome and a preparation method thereof.
In order to achieve the purpose, the invention adopts the following technical scheme to realize the purpose:
a preparation method of a hydrophobic hard coating suitable for a high-frequency electrotome comprises the following steps:
(1) taking a high-frequency electrotome as a substrate, and depositing a Cr layer on the substrate by adopting a multi-arc ion plating sputtering Cr target;
(2) adopts multi-arc ion plating to sputter Cr target, TiAl target, sputtering ion and N in sputtering cavity2And (3) reacting, namely depositing CrTiAlN on the Cr layer, and co-sputtering by adopting a radio frequency magnetron sputtering PTFE target to obtain a co-sputtered CrTiAlN-PTFE coating, thus obtaining the hydrophobic hard coating suitable for the high-frequency electrotome.
Further, the high-frequency electrotome in the step 1) is made of stainless steel, titanium alloy, tungsten alloy or hard alloy.
Further, the atmosphere in the sputtering cavity in the step 1) is argon, and the atmosphere in the sputtering cavity in the step 2) is argon and nitrogen.
Further, in the step 2), the molar ratio of Ti to Al in the TiAl target is 67: 33.
Further, the process conditions of the multi-arc ion plating deposition of the Cr layer in the step 1) are as follows:
the working pressure is 0.2-0.5Pa, the bias voltage of the substrate is-350 to-450V, and the sputtering time is 5-15 min.
Further, the process parameters in the step 2) are as follows:
the working pressure is 2-4Pa, the bias voltage of the substrate is-40 to-80V, the flow ratio of argon to nitrogen is (1:8) - (1:20), and the sputtering time is 60-120 min.
Further, the high-frequency electrotome in the step 1) is a high-frequency electrotome which is cleaned by acetone or alcohol and dried.
The hydrophobic hard coating prepared by the method is suitable for high-frequency electrotomes.
Further, the static hydrophobic angle of the hydrophobic hard coating is more than 130 degrees, the hardness is more than 2000HV, and the friction coefficient is less than 0.3.
Compared with the prior art, the invention has the following beneficial effects:
according to the preparation method of the hydrophobic hard coating suitable for the high-frequency electrotome, the multi-arc ion plating and magnetron sputtering composite equipment is utilized for plating, firstly, a Cr layer is deposited on the substrate by adopting the multi-arc ion plating, and the Cr is used as a transition layer, so that the binding force between the substrate and a target coating is greatly enhanced; then, a Cr target and a TiAl target are sputtered by adopting multi-arc ion plating, and sputtering ions and N in a sputtering cavity2And (3) reacting, depositing CrTiAlN on the Cr layer, and simultaneously performing radio frequency magnetron sputtering on a PTFE target to obtain a co-sputtered CrTiAlN-PTFE coating. The CrTiAlN-PTFE coating has the ultrahigh hydrophobicity of PTFE, and the introduced CrTiAlN layer can improve the coating performance from three aspects: firstly, the coating has good combination with the Cr layer of the matrix, so that the coating has strong combination force and is not easy to fall off; the CrTiAlN layer improves the hardness of the coating, avoids the passivation of the electric knife by the hydrophobic coating and prolongs the service life of the hydrophobic coating; and the CrTiAlN layer has good heat-conducting property, can quickly conduct surface accumulated heat and avoids tissue carbonization. On the other hand, the preparation method of the invention adopts multi-arc ion plating and magnetron sputtering composite equipment to carry out coating deposition, and can give full play to the advantages of two physical vapor deposition methods: the coating prepared by multi-arc ion plating has high deposition rate and strong binding force; the non-metal coating can be prepared by magnetron sputtering, and the coating is compact and uniform. The preparation method disclosed by the invention has the advantages of advanced design concept of the coating, excellent effect, simple preparation process, high repeatability, low cost and the like, and canCan be directly applied to industrial mass production.
Furthermore, the substrate comprises all common materials of the high-frequency electrotome, such as stainless steel, titanium alloy, tungsten alloy or hard alloy and the like.
Furthermore, the component proportion of the CrTiAlN-PTFE coating can be adjusted according to practical application, the hardness and the wear resistance of the whole coating can be improved by increasing the proportion of CrTiAlN, the hydrophobicity is slightly reduced, and the model resistance and the hydrophobicity can be chosen according to practical conditions.
The hydrophobic hard coating suitable for the high-frequency electrotome, disclosed by the invention, has the surface coating component of CrTiAlN-PTFE, is a ceramic-molecular composite coating, and has higher hardness and smaller friction coefficient while keeping the ultrahigh hydrophobicity of the PTFE, so that the hydrophobic hard coating has excellent wear resistance and can greatly prolong the service life of the coating.
Furthermore, the static hydrophobic angle of the hydrophobic hard coating is larger than 130 degrees, the hardness is larger than 2000HV, the friction coefficient is smaller than 0.3, the ultrahigh hydrophobic angle is derived from the good hydrophobic property of PTFE, the high hardness is derived from the doping of CrTiAlN, and under the preparation of two physical vapor deposition methods, the surface layer components are fully mixed, so that the whole coating has a lower friction coefficient.
Drawings
FIG. 1 is a surface topography of a hard hydrophobic coating prepared in example 1;
fig. 2 is a contact angle measurement result of the hard hydrophobic coating prepared in example 1.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
A coating with both ultra-high hydrophobic property and good abrasion resistance is needed in the market, namely the hard hydrophobic coating. Multi-arc ion plating and magnetron sputtering are the Physical Vapor Deposition (PVD) vacuum coating methods mainly used at present. The multi-arc ion plating has the advantages of high coating binding force and high deposition rate, the surface of the coating prepared by magnetron sputtering is uniform and compact, the metal, nonmetal and high polymer coatings can be deposited, the metal, nonmetal and high polymer coatings are respectively emphasized, and the application fields are different. At present, with the development of high and new technologies, higher and higher requirements are put forward on the functions of coatings, and a new trend is developed for designing and preparing multifunctional composite coating components by using equipment with the composite functions of multi-arc ion plating and magnetron sputtering.
According to the invention, by using the multi-arc ion plating and magnetron sputtering composite equipment, the composite coating which has the high hydrophobicity of the PTFE material, the high wear resistance of the CrTiAlN coating and the good hydrophobicity is designed, so that the medical high-frequency electrotome has excellent tissue adhesion resistance and a super-long service life.
The invention is described in further detail below with reference to the accompanying drawings:
example 1
The high-frequency electrotome is used as a base material and is made of 304 stainless steel, and the specific implementation steps are as follows:
1) cleaning the surface of the stainless steel by using acetone, alcohol and deionized water in sequence, and drying by using a blower;
2) depositing a coating by adopting multi-arc ion plating and magnetron sputtering composite equipment, wherein the adopted targets comprise a Cr target with the purity of 99.99 percent, a PTFE target with the purity of 99.99 percent and a TiAl target, the molar ratio of Ti to Al in the TiAl target is 67:33, and the adopted gases are argon and nitrogen with the purity of 99.99 percent;
3) depositing a Cr layer by adopting multi-arc ion plating, wherein the working pressure is 0.4Pa, the bias voltage of a substrate is-450V, the temperature of the substrate is room temperature, the sputtering time of a Cr target is 10min, and the atmosphere in a sputtering cavity is argon;
4) depositing a CrTiAlN-PTFE layer by adopting multi-arc ion plating and magnetron sputtering composite equipment, wherein the working pressure is 3Pa, the substrate bias voltage is-80V, under the condition that the flow ratio of argon to nitrogen is 1:10, carrying out multi-arc co-sputtering on a Cr target and a TiAl target, and simultaneously carrying out radio-frequency sputtering on a PTFE target for 100 min;
and obtaining the 304 stainless steel with the hard hydrophobic coating after the sputtering is finished.
Referring to fig. 1, fig. 1 is an SEM image of 304 stainless steel with a hard hydrophobic coating prepared in example 1, and it can be seen from fig. 1 that the coating surface is flat and the structure is uniform.
The contact angle measurement results are shown in FIG. 2, which shows a contact angle of 135.6 ℃ and hydrophobicity.
The hardness of the 304 stainless steel with the hard hydrophobic coating is 2460HV and the friction coefficient is 0.26 measured by a Vickers hardness tester.
Example 2
The method adopts a high-frequency electrotome as a base material which is made of titanium alloy, and comprises the following specific implementation steps:
1) cleaning the surface of the titanium alloy by using acetone, alcohol and deionized water in sequence, and drying by using a blower;
2) depositing a coating by adopting multi-arc ion plating and magnetron sputtering composite equipment, wherein the adopted targets comprise a Cr target with the purity of 99.99 percent, a PTFE target with the purity of 99.99 percent and a TiAl target, the molar ratio of Ti to Al in the TiAl target is 67:33, and the adopted gases are argon and nitrogen with the purity of 99.99 percent;
3) depositing a Cr layer by adopting multi-arc ion plating, wherein the working pressure is 0.2Pa, the bias voltage of a substrate is-400V, the temperature of the substrate is room temperature, the sputtering time of a Cr target is 5min, and the atmosphere in a sputtering cavity is argon;
4) depositing a CrTiAlN-PTFE layer by adopting multi-arc ion plating and magnetron sputtering composite equipment, wherein the working pressure is 2Pa, the substrate bias voltage is-60V, under the condition that the flow ratio of argon to nitrogen is 1:8, carrying out multi-arc co-sputtering on a Cr target and a TiAl target, and simultaneously carrying out radio-frequency sputtering on a PTFE target for 60 min;
and obtaining the titanium alloy with the hard hydrophobic coating after the sputtering is finished.
Example 3
The method adopts a high-frequency electrotome as a base material which is made of tungsten alloy, and comprises the following specific implementation steps:
1) cleaning the surface of the tungsten alloy by using acetone, alcohol and deionized water in sequence, and drying by using a blower;
2) depositing a coating by adopting multi-arc ion plating and magnetron sputtering composite equipment, wherein the adopted targets comprise a Cr target with the purity of 99.99 percent, a PTFE target with the purity of 99.99 percent and a TiAl target, the molar ratio of Ti to Al in the TiAl target is 67:33, and the adopted gases are argon and nitrogen with the purity of 99.99 percent;
3) depositing a Cr layer by adopting multi-arc ion plating, wherein the working pressure is 0.5Pa, the bias voltage of a substrate is-350V, the temperature of the substrate is room temperature, the sputtering time of a Cr target is 15min, and the atmosphere in a sputtering cavity is argon;
4) depositing a CrTiAlN-PTFE layer by adopting multi-arc ion plating and magnetron sputtering composite equipment, wherein the working pressure is 4Pa, the substrate bias voltage is-40V, under the condition that the flow ratio of argon to nitrogen is 1:12, carrying out multi-arc co-sputtering on a Cr target and a TiAl target, and simultaneously carrying out radio-frequency sputtering on a PTFE target for 120 min;
and obtaining the tungsten alloy with the hard hydrophobic coating after the sputtering is finished.
Example 4
The method adopts a high-frequency electrotome as a base material which is made of hard alloy, and comprises the following specific implementation steps:
1) sequentially cleaning the hard alloy by using acetone, alcohol and deionized water, and drying by using a blower;
2) depositing a coating by adopting multi-arc ion plating and magnetron sputtering composite equipment, wherein the adopted targets comprise a Cr target with the purity of 99.99 percent, a PTFE target with the purity of 99.99 percent and a TiAl target, the molar ratio of Ti to Al in the TiAl target is 67:33, and the adopted gases are argon and nitrogen with the purity of 99.99 percent;
3) depositing a Cr layer by adopting multi-arc ion plating, wherein the working pressure is 0.3Pa, the bias voltage of a substrate is-400V, the temperature of the substrate is room temperature, the sputtering time of a Cr target is 12min, and the atmosphere in a sputtering cavity is argon;
4) a CrTiAlN-PTFE layer is deposited by adopting multi-arc ion plating and magnetron sputtering composite equipment, the working air pressure is 3Pa, the bias voltage of a substrate is-60V, under the condition that the flow ratio of argon to nitrogen is 1:20, a Cr target and a TiAl target are subjected to multi-arc co-sputtering, and meanwhile, a PTFE target is subjected to radio frequency sputtering for 80 min;
and obtaining the hard alloy with the hard hydrophobic coating after the sputtering is finished.
The coatings of examples 2-4 all measured static hydrophobic angles greater than 130 °, hardness greater than 2000HV, and friction coefficients less than 0.3.
The above-mentioned contents are only for illustrating the technical idea of the present invention, and the protection scope of the present invention is not limited thereby, and any modification made on the basis of the technical idea of the present invention falls within the protection scope of the claims of the present invention.
Claims (9)
1. A preparation method of a hydrophobic hard coating suitable for a high-frequency electrotome is characterized by comprising the following steps:
(1) taking a high-frequency electrotome as a substrate, and depositing a Cr layer on the substrate by adopting a multi-arc ion plating sputtering Cr target;
(2) adopts multi-arc ion plating to sputter Cr target, TiAl target, sputtering ion and N in sputtering cavity2Reaction, namely depositing CrTiAlN on the Cr layer, co-sputtering by adopting a radio frequency magnetron sputtering PTFE target to obtain a co-sputtered CrTiAlN-PTFE coating, and obtaining the hydrophobic hard coating suitable for the high-frequency electrotome after the co-sputtering is finishedAnd (4) coating.
2. The method for preparing the hydrophobic hard coating suitable for the high-frequency electrotome according to claim 1, wherein the high-frequency electrotome in the step 1) is made of stainless steel, titanium alloy, tungsten alloy or hard alloy.
3. The method for preparing a hydrophobic hard coating suitable for a high-frequency electrotome according to claim 1, wherein the atmosphere in the sputtering chamber in the step 1) is argon, and the atmosphere in the sputtering chamber in the step 2) is argon and nitrogen.
4. The method for preparing the hydrophobic hard coating suitable for the high-frequency electrotome according to claim 1, wherein the molar ratio of Ti to Al in the TiAl target in the step 2) is 67: 33.
5. The preparation method of the hydrophobic hard coating suitable for the high-frequency electrotome according to claim 1, characterized in that the multi-arc ion plating deposition Cr layer in the step 1) has the following process conditions:
the working pressure is 0.2-0.5Pa, the bias voltage of the substrate is-350 to-450V, and the sputtering time is 5-15 min.
6. The method for preparing the hydrophobic hard coating suitable for the high-frequency electrotome according to claim 1, wherein the process parameters in the step 2) are as follows:
the working pressure is 2-4Pa, the bias voltage of the substrate is-40 to-80V, the flow ratio of argon to nitrogen is (1:8) - (1:20), and the sputtering time is 60-120 min.
7. The method for preparing a hydrophobic hard coating layer suitable for a high-frequency electric knife according to claim 1, wherein the high-frequency electric knife in the step 1) is a high-frequency electric knife cleaned with acetone or alcohol and dried.
8. A hydrophobic hard coating suitable for high-frequency electric knives prepared by the method of any one of claims 1 to 7.
9. The hydrophobic hard coating suitable for use in a high-frequency electrotome according to claim 8, wherein the hydrophobic hard coating has a static hydrophobic angle of greater than 130 °, a hardness of greater than 2000HV and a coefficient of friction of less than 0.3.
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| CN112795885B (en) * | 2021-04-09 | 2021-06-22 | 中南大学湘雅医院 | High-frequency electrotome anti-sticking coating and preparation method thereof |
| CN114182213A (en) * | 2021-12-06 | 2022-03-15 | 西安工业大学 | Titanium alloy wear-resistant antioxidant composite coating and preparation method thereof |
| CN114875359A (en) * | 2022-05-19 | 2022-08-09 | 西安工业大学 | Treatment method for forming wear-resistant and oxidation-resistant composite coating on surface of titanium alloy |
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