CN112138469B - Gas-liquid separation module, gas-liquid separation apparatus using the same, and gas-liquid separation method - Google Patents
Gas-liquid separation module, gas-liquid separation apparatus using the same, and gas-liquid separation method Download PDFInfo
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- B01D45/04—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia
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Abstract
The invention discloses a gas-liquid separation assembly, a gas-liquid separation device using the assembly and a gas-liquid separation method, wherein primary, secondary and tertiary gas-liquid separation are arranged in the gas-liquid separation assembly, primary gas-liquid separation is carried out on gas-liquid two-phase flow from an immersion unit through the primary gas-liquid separation, flow shunting of the gas-liquid two-phase flow in a first-stage separation structure is realized through the secondary gas-liquid separation, and the flow after shunting is rapidly and efficiently processed; second grade gas-liquid separation back again carries out the gas-liquid separation of refining once more through tertiary gas-liquid separation, gas and liquid that have better ensured to flow from the reposition of redundant personnel piece all flow with comparatively pure form, this patent separation effect has been guaranteed, first arc and second arc in this patent all have the short time respectively and hold the liquid effect, the vibration interference problem that has avoided the big institute of current gas-liquid separation device pressure fluctuation to arouse has been avoided, make the submergence unit in the submergence formula photoetching machine can keep in reliable controllable operation range at the photoetching in-process, the while has the advantage that equipment occupies smallly.
Description
Technical Field
The invention relates to a gas-liquid separation scheme of an immersion lithography machine, in particular to a gas-liquid separation assembly used in a recovery system of the immersion lithography machine, a gas-liquid separation device using the assembly and a gas-liquid separation method.
Background
Immersion in an immersion lithography machine is to fill a liquid (immersion liquid) with high refractive index between a projection objective and a wafer coated with a photosensitive material, so that part of the wafer is immersed in the liquid, laser carries pattern information on a mask plate, the laser is focused by the projection objective and the immersion liquid and then is projected onto the wafer partially immersed by the liquid, and the laser reacts with a coating on the wafer and leaves a pattern on the coating. In order to complete exposure of a whole wafer, the immersion lithography machine needs to move the wafer, immerse different parts of the wafer in liquid and perform exposure. In order to ensure the sealing performance of the liquid and avoid the pollution caused by the immersion liquid remaining on the wafer in the moving process of the liquid, a recovery port for pumping and discharging the immersion liquid needs to be arranged in the immersion unit; further, hermetic sealing may be employed to enhance confinement of the immersion liquid. The recovery port of the immersion unit can recover liquid and gas which guarantees the liquid tightness in the recovery process, and the recovered liquid and the gas are discharged outwards through the flow dividing block. If the untreated gas-liquid two-phase flow flows in the photoetching machine for a long distance, large flow and pressure fluctuation are caused. The arrangement of the gas-liquid separation and recovery device in the immersion type photoetching machine can improve the stability and the exposure quality of the photoetching machine. The existing gas-liquid separation and recovery device has the defects of poor gas-liquid separation and recovery effect, large fluid flow resistance and the like.
Disclosure of Invention
The invention provides a gas-liquid separation assembly of an immersion lithography recovery system, a gas-liquid separation device using the assembly and a gas-liquid separation method, which can better realize the gas-liquid two-phase flow gas-liquid separation recovery effect with high efficiency, low flow resistance and low vibration, and aims to solve the problems of poor gas-liquid separation recovery effect, large fluid flow resistance and the like of the existing immersion lithography machine.
The invention adopts the following specific technical scheme for solving the technical problems: a gas-liquid separation assembly characterized by: the first-stage gas-liquid separation structure comprises an inlet pipe, a first separation guide plate and a first arc-shaped plate, the first separation guide plate is in an umbrella shape which is bent downwards, the inlet pipe and the first separation guide plate are connected through a first separation guide plate connecting piece, and the first separation guide plate connecting piece is provided with openings which are distributed in the circumferential direction; the first arc-shaped plate is of an upward-bent arc-shaped structure and is arranged on the radial outer portion of the inlet pipe and below the first separation guide plate, the inner peripheral diameter of the first arc-shaped plate is larger than that of the first separation guide plate, and a first opening is formed in the joint of the first arc-shaped plate and the inlet pipe. The first-stage gas-liquid separation structure can realize gas-liquid separation at the first separation guide plate and the first arc-shaped plate
The phase flow is separated, and the gas-liquid separation and recovery effect is better ensured.
Preferably, the gas-liquid separation device further comprises a second-stage gas-liquid separation structure, the second-stage gas-liquid separation structure comprises a lining pipe and a second separation guide plate, the second separation guide plate is in an umbrella shape which is bent downwards, the lining pipe and the second separation guide plate are connected through a second separation guide plate connecting piece, and the second separation guide plate connecting piece is provided with openings which are axially distributed; the inner lining pipe is at least partially arranged in the inner space of the inlet pipe in the axial direction and penetrates through the first separation guide plate; the second separation baffle is located above the first separation baffle. The second-stage gas-liquid separation structure can realize flow diversion of gas-liquid two-phase flow in the first-stage separation structure, the diverted flow is quickly and efficiently processed, and the reliable and effective separation of gas-liquid separation is improved.
Preferably, the device also comprises a second arc-shaped plate; the second arc-shaped plate is an upward-bent arc-shaped structure and is arranged at the radial outer part of the inlet pipe and below the first arc-shaped plate, and the second arc-shaped plate is fixedly connected with the inlet pipe, and a second opening is formed in the joint of the second arc-shaped plate and the inlet pipe. The vibration that the gas-liquid separation process produced has been reduced, and has realized the tertiary gas-liquid separation of gas-liquid two-phase flow, and the second arc still can be collected the gas-liquid two-phase flow that overflows from first arc upside, and the more effectual first arc of having avoided leads to the problem of tertiary gas-liquid separation actual effect because of the too big flow. The gas-liquid separation of meticulous is carried out once more through third level gas-liquid separation again behind the second grade gas-liquid separation, has guaranteed that gas and liquid from the reposition of redundant personnel piece outflow all flow in comparatively pure form, has guaranteed this patent separation effect to a greater extent.
Preferably, a first reducing pipe is arranged between the inlet pipe and the first separation guide plate connecting piece, a second reducing pipe is arranged between the lining pipe and the second separation guide plate, and the first reducing pipe and the second reducing pipe both adopt a reducing pipe structure with the pipe diameter size at the top end larger than that at the bottom end, namely, an inverted cone-shaped reducing pipe structure with the size difference of the diameters of the upper pipe and the lower pipe. The guiding and drainage effectiveness of the gas-liquid two-phase flow impacting the lower separation guide plate and the upper separation guide plate upwards is improved.
Preferably, the lower port inner peripheral dimension of the second separation baffle is larger than the outer peripheral dimension of the first separation baffle. The separation diversion safety and effectiveness of the first separation diversion plate are improved, and the adverse influence of the first separation diversion plate on the separation diversion of the second separation diversion plate is avoided.
Preferably, the outer peripheral dimension of the upper port of the first arcuate plate is smaller than the inner peripheral dimension of the upper port of the second arcuate plate. The liquid that the improvement was separated first arc, second arc and the liquid that first arc overflowed temporarily holds the liquid effect, has further reduced the vibration that the gas-liquid separation process produced, improves and obtains the pure validity of gas-liquid separation.
Another object of the present invention is to provide a gas-liquid separation apparatus including a diverter block housing, characterized in that: the gas-liquid separation device further comprises a gas-liquid separation assembly according to any one of claims 1 to 6, a splitter block cavity for performing fractional splitting by using the gas-liquid separation assembly according to any one of claims 1 to 6 is arranged in the splitter block shell, an inlet pipe penetrating through the wall body at the bottom of the splitter block shell is fixedly connected to the bottom surface of the inner side of the splitter block cavity, mixed gas-liquid two-phase flow discharged by the immersion unit is introduced into the splitter block cavity from a lower end port of the inlet pipe, and an exhaust pipe and a liquid discharge pipe are arranged in the splitter block cavity and penetrate through the wall body of the splitter block shell to be respectively connected with an external exhaust recovery pipeline and an external liquid discharge recovery pipeline. The gas-liquid two-phase flow gas-liquid separation and recovery effect with high efficiency, low flow resistance and low vibration can be better realized.
Another object of the present invention is to provide a gas-liquid separation method, comprising: comprises the following separation steps
A1. The mixed gas-liquid two-phase flow discharged by the immersion unit is introduced from the lower end port of the inlet pipe 13 in one of the above technical solutions and flows from bottom to top in the inlet pipe;
A2. the gas-liquid two-phase flow is guided to be in contact with the first separation guide plate in one of the technical schemes, the flow direction is changed, the liquid falls, and the gas bypasses the first separation guide plate to continuously rise;
A3. the liquid falls into the first arc-shaped plate in one of the technical schemes, is temporarily stored and falls down by attaching to the wall surface of the inlet pipe through the first opening;
A4. the gas and liquid separated in the above steps are discharged from the exhaust pipe and the exhaust pipe, respectively, as described in claim 7
The liquid pipe discharge is connected with the external exhaust recovery pipeline and the external liquid drainage recovery pipeline corresponding to the liquid pipe discharge.
Preferably, the two-stage gas-liquid separation comprises the following separation steps
B1. The mixed gas-liquid two-phase flow discharged by the immersion unit is introduced from the lower end port of the inlet pipe 13 in one of the above technical solutions and flows from bottom to top in the inlet pipe;
B2. when the gas-liquid two-phase flow flows to the upper section of the inlet pipe, the gas-liquid two-phase flow flows out from a separation channel space formed by channel spaces in the inner side and the outer side of the inner lining pipe formed between the inner lining pipe and the upper section of the inlet pipe in one of the technical schemes to form two paths of gas-liquid two-phase flow, and because the gas-liquid two-phase flow always tends to flow in the pipeline to occupy the radial outer space of the pipeline and the gas occupies the radial inner space of the pipeline, the gas-liquid two-phase flow with less gas content at the radial outer side in the inlet pipe is guided to be contacted with the first separation guide plate, and the gas-liquid two-phase flow with more gas content at the radial inner side in the inlet pipe continuously flows upwards along the inner lining pipe and is contacted with the second separation guide plate;
B3. the gas-liquid two-phase flow is guided to be in contact with the first separation guide plate or the second separation guide plate in one of the technical schemes, the flow direction is changed, the liquid falls, and the gas bypasses the first separation guide plate to continuously rise;
B4. the liquid falls into the first arc-shaped plate in one of the technical schemes and is temporarily stored, and then falls down by attaching to the wall surface of the inlet pipe through the first opening;
B5. the gas and liquid separated in the above steps are respectively discharged from the exhaust pipe and the liquid discharge pipe as described in claim 7 and connected to the external exhaust gas recovery line and the external liquid discharge recovery line corresponding thereto.
Preferably, the liquid falling after being treated by the first separation baffle and/or the second baffle is accumulated in the inner side of the first arc-shaped plate, part of the liquid slides downwards along the outer side wall surface of the inlet pipe from the first opening, part of the liquid overflows from the upper end of the first arc-shaped plate, and the overflowed liquid enters the inner side of the second arc-shaped plate after falling and is accumulated and slides downwards along the outer side wall surface of the inlet pipe. First arc and second arc all have the short time and hold the liquid effect, have reduced the vibration that the gas-liquid separation process produced, and the second arc has realized the tertiary gas-liquid separation of gas-liquid two-phase flow, and the second arc still can collect the gas-liquid two-phase flow that overflows from first arc upside, more effectively avoids first arc to lead to the problem of gas-liquid separation and damping inefficacy because of the flow is too big.
The invention has the beneficial effects that: the gas-liquid separation technology is adopted, a first stage, a second stage and a third stage of gas-liquid separation are arranged in the gas-liquid separation device, the first stage of gas-liquid separation carries out primary gas-liquid separation on gas-liquid two-phase flow from an immersion unit, the second stage of gas-liquid separation realizes flow diversion of the gas-liquid two-phase flow in a first stage of separation structure, and the flow after diversion is rapidly and efficiently processed; the gas-liquid separation of meticulous again through third level gas-liquid separation after the second grade gas-liquid separation, it all flows in comparatively pure form to have ensured gas and liquid that flow from the reposition of redundant personnel piece, this patent separation effect has been guaranteed, first arc and second arc all have the short time and hold the liquid effect, the vibration that the gas-liquid separation process produced has been reduced, the stable performance of photoetching machine work is favorable to, and the second arc has realized the tertiary gas-liquid separation of gas-liquid two-phase flow, the second arc still can be collected the gas-liquid two-phase flow that overflows from first arc upside, more effectively avoid first arc to lead to the problem of gas-liquid separation and damping inefficacy because of the flow is too big.
Drawings
The invention is described in further detail below with reference to the figures and the detailed description.
FIG. 1 is a schematic view of the internal structure of the gas-liquid separation apparatus of the present invention.
Fig. 2 is a schematic flow diagram of the flow field of fig. 1.
FIG. 3 is a schematic plan view of the gas-liquid separator of the present invention.
FIG. 4 is an enlarged view of the gas-liquid separation module of the present invention.
Fig. 5 is a schematic view of the flow field flow of fig. 4.
Fig. 6 is a schematic top view of the structure of fig. 4.
Fig. 7 is a top cross-sectional view of the structure of fig. 4.
FIG. 8 is a schematic view of a gas-liquid separation module according to still another embodiment of the present invention.
FIG. 9 is a schematic view of a gas-liquid separation module according to still another embodiment of the present invention.
Detailed Description
Example 1
In the embodiments shown in fig. 4, 5, 6, and 7, a gas-liquid separation assembly at least includes a first stage gas-liquid separation structure, where the first stage gas-liquid separation structure includes an inlet pipe 13, a first separation baffle 5, and a first arc-shaped plate 6, the first separation baffle 5 is in an umbrella shape that bends downward, the inlet pipe 13 and the first separation baffle 5 are connected by a first separation baffle connector 10, and the first separation baffle connector 10 has circumferentially arranged openings; the first arc-shaped plate 6 is an upward-bent arc-shaped structure and is arranged at the radial outer part of the inlet pipe 13 and below the first separation guide plate 5, the inner peripheral diameter of the first arc-shaped plate 6 is larger than that of the first separation guide plate 5, and the first arc-shaped plate 6 is fixedly connected with the inlet pipe 13 and the connection part of the first arc-shaped plate and the inlet pipe 13 is provided with a first opening 14 which is arranged circumferentially; a first reducer 11 may be provided between the inlet pipe 13 and the first separation baffle connection 10 for directing the fluid flow radially outwards. The inner peripheral dimension of the lower port of the second separation guide plate 4 is larger than the outer peripheral dimension of the first separation guide plate 5, namely the inner peripheral dimension of the arc-shaped wall at the bottom port of the second separation guide plate 4 with a downward arc-shaped opening is larger than the outer peripheral dimension of the arc-shaped outer wall of the first separation guide plate 5, so that the liquid Y separated by the second separation guide plate 4 can be better prevented from splashing and dripping on the arc-shaped outer wall surface of the first separation guide plate 5, and the safety and effectiveness of the separation and flow guide of the first separation guide plate 5 are improved.
Example 2:
in the embodiments shown in fig. 4, 5, 6, and 7, a gas-liquid separation assembly further includes a second stage gas-liquid separation structure, the second stage gas-liquid separation structure includes a lining pipe 12 and a second separation baffle 4, the second separation baffle 4 is in an umbrella shape bent downward, the lining pipe 12 and the second separation baffle 4 are connected by a second separation baffle connector 8, and the second separation baffle connector 8 has openings arranged axially; the inner lining tube 12 is placed at least partially in the inner space of the inlet pipe 13 in the axial direction, the inner lining tube 12 penetrating the first separation baffle 5; the second separation baffle 4 is positioned above the first separation baffle 5; a second reducing pipe 9 can be arranged between the lining pipe 12 and the second separation deflector connection 8 for guiding the fluid to flow radially outwards;
example 3:
in the embodiment shown in fig. 4, 5, 6 and 7, the gas-liquid separation assembly further comprises a second arc-shaped plate 7; the second arc-shaped plate 7 is an upward-bent arc-shaped structure and is arranged at the radial outer part of the inlet pipe 13 and below the first arc-shaped plate 6, and the second arc-shaped plate 7 is fixedly connected with the inlet pipe 13 and the joint of the second arc-shaped plate 7 and the inlet pipe 13 is provided with a second opening 15 arranged circumferentially.
Example 4:
in the embodiments shown in fig. 4, 5, 6, and 7, a gas-liquid separation assembly further includes a first reducing pipe 11 and a second reducing pipe 9, the first reducing pipe 11 is disposed between the inlet pipe 13 and the first separation baffle connector 10, the second reducing pipe 9 is disposed between the inner liner pipe 12 and the second separation baffle connector 8, and the first reducing pipe 11 and the second reducing pipe 9 both adopt a reducing pipe structure with a top pipe diameter size larger than a bottom pipe diameter size, that is, an inverted cone-shaped reducing pipe structure with a large upper pipe diameter and a small lower pipe diameter size. The outer peripheral dimension of the upper port of the first arc-shaped plate 6 is smaller than the inner peripheral dimension of the upper port of the second arc-shaped plate 7.
The gas-liquid two-phase flow flowing in through the inlet pipe 13 under the action of negative pressure suction flows upwards along the inlet pipe 13 and flows radially outwards through an opening between the first reducing pipe 11 and the first separation guide plate connecting piece 10, the flow direction of the gas-liquid two-phase flow is changed after the gas-liquid two-phase flow is contacted with the first separation guide plate 5, and due to the difference of the densities of the gas and the liquid, the liquid falls, and the gas bypasses the first separation guide plate 5 to continuously rise, so that the gas-liquid separation of the gas-liquid two-phase flow is realized; because the liquid whereabouts probably bumps and strikes the fluid or component of below, be unfavorable for the suppression vibration, set up first arc 6 and can improve this kind of condition, the liquid after first separation guide plate 5 separation gets into first arc 6 after the whereabouts, and liquid is held the back in first arc 6 for a short time and is followed first opening 14 and continue downward flow, because the effect of the wall is attached to fluidic, the liquid of downflow will flow along import pipe 13 to impact and the vibration that the liquid that has avoided scattering to splash has caused has been avoided.
In order to adapt to different processes and working conditions, the flow rate and the gas-liquid ratio of the gas-liquid two-phase flow formed by pumping from the immersion unit are not constant, so that the flow rate and the gas-liquid ratio of the gas-liquid two-phase flow flowing into the device provided by the invention from the immersion unit are not constant. If the gas-liquid two-phase flow entering the inlet pipe 13 has a large flow rate, if the separation is still realized only by the first-stage gas-liquid separation structure, the liquid flow and the gas flow near the first-stage gas-liquid separation guide plate 5 have high turbulence degree, which may cause severe liquid splashing and vibration and other adverse effects. The second-stage gas-liquid separation structure is arranged to perform flow allocation on the gas-liquid two-phase flow in the inlet pipe 13, so that the flow processed by the first-stage gas-liquid separation structure is reduced more effectively; meanwhile, the gas-liquid two-phase flow always tends to liquid occupying the space on the radial outer side of the pipeline and gas occupying the space on the radial inner side of the pipeline in the pipeline flowing process, so that the gas-liquid two-phase flow with less gas content on the radial outer side in the inlet pipe 13 can be more effectively processed by the first-stage gas-liquid shunting structure in the arrangement mode that the lining pipe 12 is arranged in the second-stage gas-liquid separating structure, and the gas-liquid two-phase flow with more gas content on the radial inner side in the inlet pipe 13 continuously flows upwards along the lining pipe 12 and is processed by the second-stage gas-liquid separating structure, so that the vibration problem caused by mutual impact of the liquid flow and the gas flow in the first-stage gas-liquid separating structure and the second-stage gas-liquid separating structure can be more effectively improved.
The provision of the second arcuate plate 7 assists the first arcuate plate 6 to accommodate liquid accumulation guidance at high flow rates. If the flow rate of the separated liquid is large, the liquid flow can exceed the containing capacity of the first arc-shaped plate 6 after falling into the first arc-shaped plate 6 and overflow from the first arc-shaped plate 6, and the liquid can be splashed again; the second arcuate plate 7 is arranged to receive liquid spilled over from the first arcuate plate 6 and to direct it down the wall of the inlet pipe 13.
Certainly, first separation guide plate 5 and second separation guide plate 4 also can be the last arched plate structure that adopts the arc bending that makes progress, can satisfy and realize that gas-liquid two-phase flows are impacting the in-process of lower floor's separation guide plate 5 or upper strata separation guide plate 4 inside wall face and whereabouts, because the gas-liquid density phase difference is great, gaseous Q in the gas-liquid two-phase flow outwards flows, the separation guide plate shape alright of the separation effect that liquid Y flows downwards from lower floor's umbrella-shaped board inside wall face. The first reducing pipe 11 and the second reducing pipe 9 both adopt the top pipe diameter size larger than the bottom
The pipe diameter of the reducing pipe structure is different from the pipe diameter of the upper pipe and the lower pipe.
Example 5:
in the embodiments shown in fig. 1, 2, 3, 4, 5, 6, and 7, a gas-liquid separation device includes a splitter block housing 1 and a gas-liquid separation assembly described in embodiment 1, a splitter block chamber 20 for performing fractional division by using the gas-liquid separation assembly described in embodiment 1 is installed in the splitter block housing 1, an inlet pipe 13 penetrating through a bottom wall of the splitter block housing 1 is fixedly connected to a bottom surface of an inner side of the splitter block chamber 20, a mixed gas-liquid two-phase flow discharged by an immersion unit is introduced into the splitter block chamber 20 from a lower end port of the inlet pipe 13, an exhaust pipe 2 and a drain pipe 3 are installed in the splitter block chamber 20, and the exhaust pipe 2 and the drain pipe 3 both penetrate through a top wall of the splitter block housing 1 and then are respectively connected to a corresponding external exhaust recovery pipeline and a corresponding external drain recovery pipeline. The other steps are the same as in embodiment 1, embodiment 2, embodiment 3, embodiment 4, embodiment 6 or embodiment 7.
Example 6:
in the embodiment shown in fig. 8, a gas-liquid separation assembly only includes a first stage gas-liquid separation structure, where the first stage gas-liquid separation structure includes an inlet pipe 13, a first separation guide plate 5 and a first arc-shaped plate 6, the first separation guide plate 5 is in an umbrella shape bent downward, the inlet pipe 13 and the first separation guide plate 5 are connected by a first separation guide plate connector 10, and the first separation guide plate connector 10 has circumferentially arranged openings; the first arc-shaped plate 6 is arranged at the radial outer part of the inlet pipe 13 and below the first separation guide plate 5, the projection area of the first arc-shaped plate 6 in the radial direction completely covers the projection area of the first separation guide plate 5 in the radial direction, and a first opening 14 arranged in the circumferential direction is arranged at the connection part of the first arc-shaped plate 6 and the inlet pipe 13. In the case where the gas-liquid two-phase flow rate is small, in example 6, a good gas-liquid separation effect can be achieved only by using a one-stage gas-liquid separation structure.
Example 7:
in the embodiment shown in fig. 9, the gas-liquid separation assembly further comprises a second arc-shaped plate 7, the second arc-shaped plate 7 is an upward-bent arc-shaped structure and is arranged at the radial outer part of the inlet pipe 13 and below the first arc-shaped plate 6, and the second arc-shaped plate 7 is fixedly connected with the inlet pipe 13 and is provided with a second opening 15 arranged circumferentially at the joint. The rest is the same as in example 3.
Example 8:
in the embodiment shown in fig. 1, 2, 3, 4, 5, 6, 7, 8 and 9, a gas-liquid separation method comprises the following separation steps:
A1. the mixed gas-liquid two-phase flow discharged from the immersion unit is introduced from the lower port of the inlet pipe 13 in one of the above embodiments and flows from bottom to top in the inlet pipe;
A2. the gas-liquid two-phase flow is guided to be in contact with the first separation guide plate in one of the above embodiments, the flow direction is changed, the liquid falls, and the gas bypasses the first separation guide plate to continuously rise;
A3. the liquid falls into the first arc-shaped plate in one of the embodiments and is temporarily stored, and then falls down by attaching to the wall surface of the inlet pipe through the first opening;
A4. the gas and liquid separated in the above steps are respectively discharged from the exhaust pipe and the liquid discharge pipe as described in claim 7 and connected to the external exhaust gas recovery line and the external liquid discharge recovery line corresponding thereto.
Further, the gas-liquid separation method comprises the following two-stage gas-liquid separation of separation steps:
B1. the mixed gas-liquid two-phase flow discharged from the immersion unit is introduced from the lower port of the inlet pipe 13 in one of the above embodiments and flows from bottom to top in the inlet pipe;
B2. when the gas-liquid two-phase flow flows to the upper section of the inlet pipe, the gas-liquid two-phase flow respectively flows out from a separation channel space (shown by arrow a and arrow B in fig. 5) formed by channel spaces in the inner side and the outer side formed between the lining pipe and the upper section of the inlet pipe in one of the above embodiments, so that two paths of gas-liquid two-phase flow are formed, and the gas-liquid two-phase flow always tends to flow in the pipeline so that liquid occupies a radial outer side space of the pipeline and gas occupies a radial inner side space of the pipeline, therefore, the gas-liquid two-phase flow with a small gas content at the radial outer side inside the inlet pipe is guided to be in contact with the first separation guide plate, and the gas-liquid two-phase flow with a large gas content at the radial inner side inside the inlet pipe continues to flow upwards along the lining pipe and is in contact with the second separation guide plate;
B3. the gas-liquid two-phase flow is guided to be in contact with the first separation guide plate or the second separation guide plate in one of the above embodiments, the flow direction is changed, the liquid falls, and the gas bypasses the first separation guide plate to continuously rise;
B4. the liquid falls into the first arc-shaped plate in one of the above embodiments and is temporarily stored, and then falls down attached to the wall surface of the inlet pipe through the first opening;
B5. the gas and liquid separated in the above steps are respectively discharged from the exhaust pipe and the liquid discharge pipe as described in claim 7 and connected to the external exhaust gas recovery line and the external liquid discharge recovery line corresponding thereto.
Liquid falling after being treated by the first separation guide plate and/or the second guide plate is accumulated in the inner side of the first arc-shaped plate, part of the liquid slides downwards along the outer side wall surface of the inlet pipe from the first opening, part of the liquid overflows from the upper end of the first arc-shaped plate, and the overflowed liquid enters the inner side of the second arc-shaped plate after falling and is accumulated and slides downwards along the outer side wall surface of the inlet pipe.
In the positional relationship description of the present invention, the appearance of terms such as "inner", "outer", "upper", "lower", "left", "right", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the drawings is merely for convenience of describing the embodiments and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation and operation, and thus, is not to be construed as limiting the present invention.
The foregoing summary and structure are provided to explain the principles, general features, and advantages of the product and to enable others skilled in the art to understand the invention. The foregoing examples and description have been presented to illustrate the principles of the invention and are intended to provide various changes and modifications within the spirit and scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (9)
1. A gas-liquid separation assembly characterized by: the first-stage gas-liquid separation structure comprises an inlet pipe, a first separation guide plate and a first arc-shaped plate, the first separation guide plate is in an umbrella shape which is bent downwards, the inlet pipe and the first separation guide plate are connected through a first separation guide plate connecting piece, and the first separation guide plate connecting piece is provided with openings which are distributed in the circumferential direction; the first arc-shaped plate is an upward-bent arc-shaped structure and is arranged at the radial outer part of the inlet pipe and below the first separation guide plate, the inner diameter of the first arc-shaped plate is larger than that of the first separation guide plate, and the first arc-shaped plate is fixedly connected with the inlet pipe and a first opening is formed in the joint of the first arc-shaped plate and the inlet pipe; the second-stage gas-liquid separation structure comprises a lining pipe and a second separation guide plate, the second separation guide plate is in an umbrella shape which is bent downwards, the lining pipe is connected with the second separation guide plate through a second separation guide plate connecting piece, and the second separation guide plate connecting piece is provided with openings which are axially arranged; the inner lining pipe is at least partially arranged in the inner space of the inlet pipe in the axial direction and penetrates through the first separation guide plate; the second separation baffle is located above the first separation baffle.
2. The gas-liquid separation assembly according to claim 1, wherein: the device also comprises a second arc-shaped plate; the second arc-shaped plate is an upward-bent arc-shaped structure and is arranged at the radial outer part of the inlet pipe and below the first arc-shaped plate, and the second arc-shaped plate is fixedly connected with the inlet pipe, and a second opening is formed in the joint of the second arc-shaped plate and the inlet pipe.
3. The gas-liquid separation assembly according to claim 1, wherein: the first reducing pipe is arranged between the inlet pipe and the first separation guide plate connecting piece, the second reducing pipe is arranged between the lining pipe and the second separation guide plate, the first reducing pipe and the second reducing pipe are of reducing pipe structures, the pipe diameter size of the top end of each reducing pipe is larger than that of the bottom end of each reducing pipe, and the first reducing pipe and the second reducing pipe are inverted cone-shaped reducing pipe structures, the diameters of the upper large pipe and the lower small pipe are different.
4. The gas-liquid separation assembly according to claim 1, wherein: the inner circumference of the lower port of the second separation guide plate is larger than the outer circumference of the first separation guide plate.
5. The gas-liquid separation assembly according to claim 2, wherein: the outer circumference of the upper port of the first arc-shaped plate is smaller than the inner circumference of the upper port of the second arc-shaped plate.
6. The utility model provides a gas-liquid separation device, includes the reposition of redundant personnel piece casing, its characterized in that: the gas-liquid separation device further comprises a gas-liquid separation assembly according to any one of claims 1 to 5, a splitter block cavity for performing fractional splitting by using the gas-liquid separation assembly according to any one of claims 1 to 5 is arranged in the splitter block shell, an inlet pipe penetrating through the wall body at the bottom of the splitter block shell is fixedly connected to the bottom surface of the inner side of the splitter block cavity, mixed gas-liquid two-phase flow discharged by the immersion unit is introduced into the splitter block cavity from a lower end opening of the inlet pipe, and an exhaust pipe and a liquid discharge pipe are arranged in the splitter block cavity and penetrate through the wall body of the splitter block shell to be respectively connected with an external exhaust recovery pipeline and an external liquid discharge recovery pipeline.
7. A gas-liquid separation method is characterized in that: comprises the following separation steps:
a1, introducing a mixed gas-liquid two-phase flow discharged from an immersion unit from a lower port of the inlet pipe according to any one of claims 1 to 5, and flowing in the inlet pipe from bottom to top;
a2, the gas-liquid two-phase flow is guided to contact with the first separation guide plate according to any one of claims 1 to 5, the flow direction is changed, the liquid falls and the gas bypasses the first separation guide plate to continuously rise;
a3, liquid falls into the first arc-shaped plate of any one of claims 1 to 5, is temporarily stored and then falls attached to the wall surface of the inlet pipe through the first opening;
a4, the gas and liquid separated in the above steps are respectively discharged from the exhaust pipe and the liquid discharge pipe of claim 6 and connected with the corresponding external exhaust gas recovery pipeline and external liquid discharge recovery pipeline.
8. The gas-liquid separation method according to claim 7, wherein: two-stage gas-liquid separation comprising the following separation steps
B1 introducing the gas-liquid two-phase flow of the mixture discharged from the immersion unit from the lower port of the inlet pipe 13 of claim 7 and flowing inside the inlet pipe from bottom to top;
b2, when the gas-liquid two-phase flow flows to the upper section of the inlet pipe, the gas-liquid two-phase flow flows out from the separation channel space formed by the inner channel space and the outer channel space formed between the inner lining pipe and the upper section of the inlet pipe according to claim 7, to form two paths of gas-liquid two-phase flow, because the gas-liquid two-phase flow always tends to flow in the pipeline, the liquid occupies the space outside the pipeline in the radial direction, and the gas occupies the space inside the pipeline in the radial direction, the gas-liquid two-phase flow with less gas content outside the inlet pipe in the radial direction is guided to contact with the first separation guide plate, and the gas-liquid two-phase flow with more gas content inside the inlet pipe in the radial direction continues to flow upwards along the inner lining pipe and contacts with the second separation guide plate;
b3, the gas-liquid two-phase flow is guided to contact with the first separation baffle or the second separation baffle of claim 7, the flow direction changes, the liquid falls and the gas continues to rise by bypassing the first separation baffle;
b4, the liquid falls into the first arc-shaped plate of claim 7 and is temporarily stored, and then falls attached to the wall surface of the inlet pipe through the first opening;
b5, the gas and liquid separated in the above steps are respectively connected with the external exhaust gas recovery pipeline and the external liquid drainage recovery pipeline which are respectively discharged from the exhaust pipe and the liquid drainage pipe in claim 6 and correspond to the exhaust pipe and the liquid drainage pipe.
9. The gas-liquid separation method according to claim 7, wherein: liquid falling after being treated by the first separation guide plate and/or the second guide plate is accumulated in the inner side of the first arc-shaped plate, part of the liquid slides downwards along the outer side wall surface of the inlet pipe from the first opening, part of the liquid overflows from the upper end of the first arc-shaped plate, and the overflowed liquid enters the inner side of the second arc-shaped plate after falling and is accumulated and slides downwards along the outer side wall surface of the inlet pipe.
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| CN2354626Y (en) * | 1998-09-30 | 1999-12-22 | 后勤工程学院科技开发部 | Gas-liquid separator for mass quantity |
| CN102489101B (en) * | 2011-12-23 | 2013-12-25 | 青岛京润石化设计研究院有限公司 | Gas-liquid separator |
| CN204933069U (en) * | 2015-09-07 | 2016-01-06 | 中山乐满石油设备有限公司 | A kind of vortex tube gas-liquid separator |
| CN106698747B (en) * | 2016-12-22 | 2019-04-26 | 重庆淼森环保工程有限公司 | A kind of ammonia nitrogen processing method in waste water |
| CN209865339U (en) * | 2019-03-01 | 2019-12-31 | 盘锦百事达新材料有限公司 | Chemical industry distillation column liquid collecting device |
| CN210332139U (en) * | 2019-07-11 | 2020-04-17 | 黄山市科美新材料有限公司 | Gas-liquid separation device |
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