CN112130317A - Laser beam-combining, shaping, homogenizing and scanning device - Google Patents
Laser beam-combining, shaping, homogenizing and scanning device Download PDFInfo
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- CN112130317A CN112130317A CN202010966763.7A CN202010966763A CN112130317A CN 112130317 A CN112130317 A CN 112130317A CN 202010966763 A CN202010966763 A CN 202010966763A CN 112130317 A CN112130317 A CN 112130317A
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- shaping
- homogenizing
- laser beam
- light
- scanning device
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
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- Optics & Photonics (AREA)
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Abstract
The invention relates to the technical field of photoelectric detection equipment, in particular to a laser beam combination, shaping, homogenization and scanning device which comprises a main laser, a beam shaping and homogenization frame and a base, wherein the beam shaping and homogenization frame consists of a shaping and homogenization box, a connecting box, a light inlet cover and a movable plate, the bottom of the connecting box is connected to the outer wall of the top of the shaping and homogenization box through bolts, a connecting rod is welded on one side of the inner wall of the connecting box, sleeves are sleeved on two outer sides of the connecting rod, the inner walls of the two sides of the connecting box, which are close to the connecting rod, are connected with electric telescopic rods through bolts, the output ends of the electric telescopic rods are connected to one side of the sleeves through keys and. The screw rod rotates and rises in the limiting pipe, the adjusting bottom plate can be pushed upwards, the emission width of light emitted out of the light passing pipe is adjusted, the laser light source is shaped into a certain width, the light is emitted onto the homogenizing lens, and the homogenizing lens homogenizes the light into a flat-top light beam.
Description
Technical Field
The invention relates to the technical field of photoelectric detection equipment, in particular to a laser beam-combining, shaping, homogenizing and scanning device.
Background
With the development of related technologies such as sensing technology, control technology and manufacturing technology and the demand of people in production and life, the three-dimensional measurement technology gradually becomes a key research field in the geometric measurement technology, and the three-dimensional measurement is to perform all-around measurement on a measured object and determine three-dimensional coordinate measurement data of the measured object.
Chinese patent No. CN201720373148.9 provides a laser scanning device for three-dimensional scene measurement, which comprises a light source, a laser phase modulator, a grating, a reflector, a lens, a distance measuring light receiving part, and an imaging light receiving part, wherein the laser phase modulator and the grating form a laser deflection part to modulate laser.
In the above-mentioned patent No. CN201720373148.9, the device can realize the laser scanning of high frequency, the start delay caused by the inertia of the component is avoided, the traditional method of rotating mirror deflection is replaced, but most of the application processes of the surface three-dimensional data measurement of many objects at present are based on the structured light scanning measurement, and the existing line structured light, the existing light source power is not enough, the stripe is not fine enough, the linearity of a specific angle cannot be presented, the stripe direction homogenization degree is not the problems of complete flat-top light beam and the like, which is not beneficial to wide popularization, and therefore, the research and development of a laser beam combination, shaping and homogenization scanning device is urgently needed.
Disclosure of Invention
The invention aims to provide a laser beam combination, shaping, homogenizing and scanning device, which aims to solve the problems that most of the application processes of surface three-dimensional data measurement of objects in the background technology are based on structured light scanning measurement, and the existing linear structured light has insufficient light source power, not fine stripes and incomplete flat-top light beam uniformity in the stripe direction.
The technical scheme of the invention is as follows: a laser beam combination, shaping, homogenizing and scanning device comprises a main laser, a beam shaping and homogenizing frame and a base, wherein the beam shaping and homogenizing frame comprises a shaping and homogenizing box, a connecting box, a light inlet cover and a movable plate, the bottom of the connecting box is connected to the outer wall of the top of the shaping and homogenizing box through a bolt, a connecting rod is welded on one side of the inner wall of the connecting box, sleeves are sleeved on two outer sides of the connecting rod, the inner walls of the two sides of the connecting box, which are close to the connecting rod, are connected with electric telescopic rods through bolts, the output end of the electric telescopic rods is connected to one side of the sleeves through keys and key slots, one side of the sleeves is movably connected with a movable rod through a movable joint, one end of the movable rod, which is far away from the sleeves, is movably connected with a light through pipe through the movable joint, the top and, the novel adjustable lighting lamp is characterized in that limiting pipes are welded on two sides of the inner wall of the bottom of the lighting tube, blocking blocks are inserted on two sides of the bottom of the lighting tube, an adjusting bottom plate is bonded on the outer wall of the top of each blocking block, bearings are welded on two sides of the inside of the adjusting bottom plate, and screws are movably connected to the inner walls of the bearings.
Further, the screw rod is in threaded connection with the inner wall of the limiting pipe, and a clamping block is in threaded connection with one side of the screw rod, which is far away from the outer portion of the bearing.
Furthermore, the light inlet cover is welded on the outer wall of one side of the shaping homogenizing box, and outer supporting pipes are welded at the four corners of the top of the moving plate.
Furthermore, an inner supporting tube is inserted into the outer supporting tube, and threaded holes are formed in the outer portions of the inner supporting tube and the outer supporting tube.
Furthermore, the internal thread of the threaded hole is connected with an adjusting bolt, and the bottom of the shaping homogenization box is welded at the top of the inner supporting tube.
Furthermore, the sliding grooves are formed in two sides of the top of the base, a plurality of sliding blocks are connected to the inside of the sliding grooves in a sliding mode, and the MEMS scanning reflection frame is bonded to the tops of the sliding blocks.
Furthermore, the MEMS scanning reflection frame is composed of an MEMS reflection lens and a support frame, the MEMS reflection lens is arranged at the top of the support frame, and a reflection endoscope is arranged in the middle of the inside of the MEMS reflection lens.
Further, the movable plate and the support frame are connected to the top of the base through a sliding block and a sliding groove in a sliding mode, and a main collimating lens is arranged on one side of the main laser.
Furthermore, a polarizing plate is arranged on one side of the primary collimating mirror, and a polarizing beam splitter is arranged on one side, away from the MEMS scanning reflection frame, of the beam shaping and homogenizing frame.
Furthermore, one side of the polarization beam splitter is provided with a secondary collimating mirror, and one side of the secondary collimating mirror is provided with a secondary laser.
The invention provides a laser beam-combining, shaping and homogenizing scanning device by improvement, which has the following improvements and advantages compared with the prior art:
(1) the screw rod rotates and rises in the limiting pipe, the adjusting bottom plate can be pushed upwards, the emission width of light emitted out of the light passing pipe is adjusted, the laser light source is shaped into a certain width, the light is emitted onto the homogenizing lens, and the homogenizing lens homogenizes the light into a flat-top light beam.
(2) The whole improvement of the existing light source power is realized, the stripes are fine, the homogenization is good, light is emitted on the MEMS scanning reflection frame, the light of the reflection endoscope is reflected out, the MEMS reflection lens has a large optical rotation angle and high specular reflectivity, and the length of the MEMS reflection lens is linear at a specific angle.
(3) The beam shaping homogenizing frame and the MEMS scanning reflecting frame can be moved on the base, and the distance between the beam shaping homogenizing frame and the MEMS scanning reflecting frame can be adjusted, so that the beam shaping homogenizing frame and the MEMS scanning reflecting frame can completely hit on the mirror surface of the MEMS reflecting mirror within a specific distance.
(4) The light is emitted into the shaping homogenizing box, the sleeve moves on the connecting rod and enables the angle between the two movable rods to be reduced, the height of the light-passing tube is adjusted, and the light of the polarization beam splitter at different angles can enter the light-passing tube.
Drawings
The invention is further explained below with reference to the figures and examples:
FIG. 1 is a first schematic structural diagram of the present invention;
FIG. 2 is a second schematic structural view of the present invention;
FIG. 3 is a schematic cross-sectional view of a homogenizing box according to the present invention;
FIG. 4 is a schematic view of the beam shaping homogenizer of the present invention;
FIG. 5 is a schematic diagram of a MEMS scanning gantry structure of the present invention;
fig. 6 is a schematic cross-sectional view of the moving plate of the present invention.
Description of reference numerals:
the device comprises a main laser 1, a main collimating mirror 2, a polarizing plate 3, a polarization beam splitter 4, a light beam shaping homogenization rack 5, a MEMS scanning reflection rack 6, a collimating mirror 7, a laser 8, a shaping homogenization box 9, a base 10, a chute 11, a support frame 12, a connecting box 13, a light inlet cover 14, a connecting rod 15, a sleeve 16, an electric telescopic rod 17, a movable rod 18, a light through tube 19, an adjusting bottom plate 20, a blocking block 21, a screw rod 22, a limiting tube 23, a bearing 24, a clamping block 25, a homogenization lens sheet 26, an MEMS reflection lens, a reflection endoscope 28, a slide block 29, an outer support tube 30, a moving plate 31, an inner support tube 32, an adjusting bolt 33, a limiting port 34 and a threaded hole 35.
Detailed Description
The present invention will be described in detail with reference to fig. 1 to 6, and the technical solutions in the embodiments of the present invention will be clearly and completely described, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present. When a component is referred to as being "disposed on" another component, it can be directly on the other component or intervening components may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
The invention provides a laser beam combination, shaping and homogenizing scanning device which comprises a main laser 1, a beam shaping and homogenizing frame 5 and a base 10, wherein the beam shaping and homogenizing frame 5 comprises a shaping and homogenizing box 9, a connecting box 13, a light inlet cover 14 and a movable plate 31, the bottom of the connecting box 13 is connected with the outer wall of the top of the shaping and homogenizing box 9 through bolts, one side of the inner wall of the connecting box 13 is welded with a connecting rod 15, two sides of the outer part of the connecting rod 15 are sleeved with sleeves 16, two side inner walls of the connecting box 13 close to the connecting rod 15 are connected with electric telescopic rods 17 through bolts, the output ends of the electric telescopic rods 17 are connected with one sides of the sleeves 16 through keys and key slots, one side of each sleeve 16 is movably connected with a movable rod 18 through a movable joint, one end of each movable rod 18 far away from the corresponding sleeve 16 is movably connected with, the top and the bottom of the reshaping homogenization box 9 are both provided with a limit port 34, light is emitted into the reshaping homogenization box 9, an electric telescopic rod 17 pushes a sleeve 16, the sleeve 16 moves on a connecting rod 15 and reduces the angle between two movable rods 18, the height of a light through pipe 19 can be adjusted, light with different angles of a polarization beam splitter 4 can enter the light through pipe 19, the inner wall of one side of the reshaping homogenization box 9 is connected with a homogenization lens 26 through a bolt, the homogenization lens 26 homogenizes the light into a flat-top light beam, both sides of the inner wall of the bottom of the light through pipe 19 are welded with limit pipes 23, both sides of the bottom of the light through pipe 19 are inserted with blocking blocks 21, the outer wall of the top of each blocking block 21 is bonded with an adjusting bottom plate 20, both sides of the inside of the adjusting bottom plate 20 are welded with bearings 24, the inner wall of each bearing 24 is movably connected with a screw rod 22, the screw rods 22 are rotated to enable, the adjusting bottom plate 20 can be pushed upward to adjust the emitting width of the light emitted from the light-passing tube 19, so that the laser light source is shaped to a certain width and the light is emitted onto the homogenizing lens 26.
Further, the screw rod 22 is in threaded connection with the inner wall of the limiting pipe 23, and a clamping block 25 is in threaded connection with one side of the screw rod 22, which is far away from the outer portion of the bearing 24.
Further, the light inlet cover 14 is welded on the outer wall of one side of the shaping and homogenizing box 9, and the outer support pipes 30 are welded on the four corners of the top of the moving plate 31.
Further, an inner support tube 32 is inserted into the outer support tube 30, threaded holes 35 are respectively formed in the outer portions of the inner support tube 32 and the outer support tube 30, the inner support tube 32 moves inside the outer support tube 30, the inner support tube 32 is fixed after being adjusted by using an adjusting bolt 33 and a nut, and the height of the MEMS scanning reflection frame 6 can be adjusted.
Further, an adjusting bolt 33 is threadedly coupled to the inside of the threaded hole 35, and the bottom of the homogenizing box 9 is welded to the top of the inner support pipe 32.
Furthermore, the sliding grooves 11 are formed in two sides of the top of the base 10, the sliding blocks 29 are connected to the inside of the sliding grooves 11 in a sliding mode, the MEMS scanning reflection frame 6 is bonded to the top of each sliding block 29, light is emitted to the MEMS scanning reflection frame 6, and the MEMS reflection mirror 27 can vibrate to reflect light of the reflection endoscope 28 out.
Further, the MEMS scanning reflection frame 6 is composed of a MEMS reflection mirror 27 and a supporting frame 12, the MEMS reflection mirror 27 is disposed on the top of the supporting frame 12, a reflection endoscope 28 is disposed in the middle of the inside of the MEMS reflection mirror 27, the MEMS reflection mirror 27 adopts an electromagnetic driving galvanometer of a Micro Electro Mechanical System (MEMS) technology, has a large optical rotation angle and a high specular reflectivity, exhibits linearity of a specific angle in length, and can completely hit the MEMS reflection mirror 27 within a specific distance.
Further, the moving plate 31 and the support frame 12 are slidably connected to the top of the base 10 through the sliding block 29 and the sliding groove 11, the primary collimating mirror 2 is disposed on one side of the primary laser 1, the laser light source is emitted onto the primary collimating mirror 2 by the primary laser 1, the sliding block 29 rubs in the sliding groove 11 and needs to be pushed, and the sliding block 29 can slide in the sliding groove 11.
Furthermore, a polarizing plate 3 is arranged on one side of the primary collimating mirror 2, a polarization beam splitter 4 is arranged on one side of the beam shaping and homogenizing frame 5, which is far away from the MEMS scanning reflection frame 6, and the primary collimating mirror 2 irradiates the polarizing plate 3, so that the angle of the polarization beam splitter 4 can be adjusted.
Furthermore, a secondary collimating mirror 7 is arranged on one side of the polarization beam splitter 4, a secondary laser 8 is arranged on one side of the secondary collimating mirror 7, the secondary collimating mirror 7 is incident into a light-transmitting tube 19 through the secondary laser 8, the main laser 1 irradiates a laser light source on the main collimating mirror 2, and then the main collimating mirror 2 irradiates on the polarizer 3, and the angle of the polarization beam splitter 4 is adjustable.
The working principle of the invention is as follows: the main laser 1 irradiates a laser light source on a main collimating mirror 2, and then irradiates a polaroid 3 on the main collimating mirror 2, the angle of a polarization beam splitter 4 can be adjusted, the light is irradiated in a shaping homogenization box 9, an electric telescopic rod 17 pushes a sleeve 16, the sleeve 16 moves on a connecting rod 15 and reduces the angle between two movable rods 18, the height of a light passing tube 19 can be adjusted, light with different angles of the polarization beam splitter 4 can enter the light passing tube 19, a screw rod 22 is rotated to rotate and lift the screw rod 22 in a limiting tube 23, an adjusting bottom plate 20 can be pushed upwards, the emission width of the light emitted out of the light passing tube 19 is adjusted, the laser light source is shaped into a certain width, the light is irradiated on a homogenization lens 26, the lens 26 enables the light to be homogenized into a flat-top light beam, the light is irradiated on an MEMS scanning reflection frame 6, an MEMS reflection lens 27 can vibrate to reflect the light of a reflection endoscope 28, the MEMS reflection mirror 27 adopts an electromagnetic driving galvanometer of a Micro Electro Mechanical System (MEMS) technology, has a large optical rotation angle and high specular reflectivity, presents linearity of a specific angle in length, can completely impact on the MEMS reflection mirror 27 within a specific distance, and the distance between the beam shaping homogenization frame 5 and the MEMS scanning reflection frame 6 is adjustable.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. A laser beam combination, shaping and homogenizing scanning device is characterized in that: the laser beam shaping homogenizing frame comprises a main laser (1), a beam shaping homogenizing frame (5) and a base (10), wherein the beam shaping homogenizing frame (5) consists of a shaping homogenizing box (9), a connecting box (13), a light inlet cover (14) and a movable plate (31), the bottom of the connecting box (13) is connected to the outer wall of the top of the shaping homogenizing box (9) through bolts, a connecting rod (15) is welded on one side of the inner wall of the connecting box (13), sleeves (16) are sleeved on two sides of the outer portion of the connecting rod (15), the inner walls of two sides, close to the connecting rod (15), of the connecting box (13) are connected with electric telescopic rods (17) through bolts, the output ends of the electric telescopic rods (17) are connected to one side of the sleeves (16) through keys and key grooves, one side of the sleeves (16) is movably connected with a movable rod (18) through a movable joint, one end, far away from the sleeves (16), of the movable, spacing mouthful (34) have all been seted up to the top and the bottom of plastic homogenization case (9), there is homogenization lens piece (26) one side inner wall of plastic homogenization case (9) through bolted connection, spacing pipe (23) have all been welded to the bottom inner wall both sides of logical light pipe (19), the bottom both sides of logical light pipe (19) are all inserted and are equipped with stop block (21), the top outer wall bonding of stop block (21) has adjusting bottom plate (20), bearing (24) have all been welded to the inside both sides of adjusting bottom plate (20), the inner wall swing joint of bearing (24) has screw rod (22).
2. The laser beam-combining, shaping, homogenizing and scanning device according to claim 1, wherein: the screw rod (22) is in threaded connection with the inner wall of the limiting pipe (23), and a clamping block (25) is in threaded connection with one side of the screw rod (22), which is far away from the outer portion of the bearing (24).
3. The laser beam-combining, shaping, homogenizing and scanning device according to claim 1, wherein: the light inlet cover (14) is welded on the outer wall of one side of the shaping homogenizing box (9), and outer supporting pipes (30) are welded at the four corners of the top of the moving plate (31).
4. The laser beam-combining, shaping, homogenizing and scanning device according to claim 1, wherein: an inner supporting tube (32) is inserted into the outer supporting tube (30), and threaded holes (35) are formed in the outer portions of the inner supporting tube (32) and the outer supporting tube (30).
5. The laser beam-combining, shaping, homogenizing and scanning device according to claim 4, wherein: the internal thread of the threaded hole (35) is connected with an adjusting bolt (33), and the bottom of the shaping homogenization box (9) is welded at the top of the inner support pipe (32).
6. The laser beam-combining, shaping, homogenizing and scanning device according to claim 1, wherein: the top both sides of base (10) have all been seted up spout (11), the inside sliding connection of spout (11) has a plurality of slider (29), the top of slider (29) bonds and has MEMS scanning reflection frame (6).
7. The laser beam-combining, shaping, homogenizing and scanning device according to claim 6, wherein: the MEMS scanning reflection frame (6) is composed of an MEMS reflection lens (27) and a support frame (12), the MEMS reflection lens (27) is arranged at the top of the support frame (12), and a reflection endoscope (28) is arranged in the middle of the interior of the MEMS reflection lens (27).
8. The laser beam-combining, shaping, homogenizing and scanning device according to claim 7, wherein: the movable plate (31) and the support frame (12) are connected to the top of the base (10) in a sliding mode through a sliding block (29) and a sliding groove (11), and a main collimating mirror (2) is arranged on one side of the main laser (1).
9. The laser beam-combining, shaping, homogenizing and scanning device according to claim 8, wherein: and a polarizing film (3) is arranged on one side of the primary collimating mirror (2), and a polarization beam splitter (4) is arranged on one side, away from the MEMS scanning reflection frame (6), of the beam shaping and homogenizing frame (5).
10. The laser beam-combining, shaping, homogenizing and scanning device according to claim 9, wherein: one side of the polarization beam splitter (4) is provided with a secondary collimating mirror (7), and one side of the secondary collimating mirror (7) is provided with a secondary laser (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010966763.7A CN112130317A (en) | 2020-09-15 | 2020-09-15 | Laser beam-combining, shaping, homogenizing and scanning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010966763.7A CN112130317A (en) | 2020-09-15 | 2020-09-15 | Laser beam-combining, shaping, homogenizing and scanning device |
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| Publication Number | Publication Date |
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| CN112130317A true CN112130317A (en) | 2020-12-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010966763.7A Withdrawn CN112130317A (en) | 2020-09-15 | 2020-09-15 | Laser beam-combining, shaping, homogenizing and scanning device |
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| CN (1) | CN112130317A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112781438A (en) * | 2021-01-13 | 2021-05-11 | 陕西奥润激光技术有限公司 | Automatic rifle simulated shooting light source system based on double laser coupling |
| CN113263026A (en) * | 2021-05-17 | 2021-08-17 | 方俊 | Automatic focusing type intelligent laser cleaning machine |
-
2020
- 2020-09-15 CN CN202010966763.7A patent/CN112130317A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112781438A (en) * | 2021-01-13 | 2021-05-11 | 陕西奥润激光技术有限公司 | Automatic rifle simulated shooting light source system based on double laser coupling |
| CN113263026A (en) * | 2021-05-17 | 2021-08-17 | 方俊 | Automatic focusing type intelligent laser cleaning machine |
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Application publication date: 20201225 |