CN112129969A

CN112129969A - Miniature anemometer

Info

Publication number: CN112129969A
Application number: CN202010980416.XA
Authority: CN
Inventors: 胡国庆
Original assignee: Qingdao Xinsheng Micro Nano Electronic Technology Co ltd
Current assignee: Qingdao Xinsheng Micro Nano Electronic Technology Co ltd
Priority date: 2020-09-17
Filing date: 2020-09-17
Publication date: 2020-12-25

Abstract

The invention discloses a micro anemometer, which comprises a bottom PCB and a shell positioned above the bottom PCB, wherein an air inlet and an air outlet are respectively formed at two ends of the shell, and a channel for air to flow is formed between the shell and the bottom PCB; the upper surface of the bottom PCB is provided with a flow sensor chip, a temperature sensor chip and an integrated circuit chip, wherein the flow sensor chip and the temperature sensor chip are used for transmitting collected flow signals and temperature signals to the integrated circuit chip, and the integrated circuit chip carries out logic operation on the received signals so as to realize temperature compensation of wind speed and linear voltage output or digital output of a wind speed value. The micro anemometer disclosed by the invention has the advantages of small volume and high integration level, and can improve the flow velocity of gas flowing through the surface of the chip, thereby improving the detection precision of the wind speed.

Description

Miniature anemometer

Technical Field

The invention relates to an anemometer, in particular to a miniature anemometer.

Background

An anemometer is an instrument or device used to measure the velocity of air flow. Current solutions generally fall into two broad categories: 1. mechanical, such as: the wind cup anemometer is used for measuring wind power/wind speed through rotating speed by arranging three parabolic or hemispherical hollow cups on a shaft capable of freely rotating; 2. electronic, such as: the acoustic anemometer calculates the wind speed by placing two sets of synchronous sounding and sound receiving devices in the wind propagation direction and detecting the time difference of two sound pulses of downwind and upwind.

However, at present, it is difficult to miniaturize any anemometer, and it is difficult to meet the application requirements of equipment such as air conditioners, fans, micro ventilation systems, and the like.

Disclosure of Invention

In order to solve the technical problems, the invention provides a miniature anemometer so as to achieve the purposes of miniaturization, high precision and low cost.

In order to achieve the purpose, the technical scheme of the invention is as follows:

a micro anemometer comprises a bottom PCB and a shell positioned above the bottom PCB, wherein an air inlet and an air outlet are respectively formed in two ends of the shell, and a channel for air to flow is formed between the shell and the bottom PCB; the upper surface of the bottom PCB is provided with a flow sensor chip, a temperature sensor chip and an integrated circuit chip, wherein the flow sensor chip and the temperature sensor chip are used for transmitting collected flow signals and temperature signals to the integrated circuit chip, and the integrated circuit chip carries out logic operation on the received signals so as to realize temperature compensation of wind speed and linear voltage output or digital output of a wind speed value.

In the above scheme, the temperature sensor chip is integrated on a flow sensor chip or an integrated circuit chip.

In a further technical scheme, the shell is of a door-shaped frame structure, and the position, located at the air inlet, of the inner wall of the top of the shell is of a plane structure, an inclined plane structure or an arc surface structure.

In a further technical scheme, the shell is of an arch structure.

In the above scheme, the upper surface of the bottom PCB is provided with a groove, and the flow sensor chip, the temperature sensor chip and the integrated circuit chip are embedded in the groove.

In the scheme, the upper surfaces of the flow sensor chip, the temperature sensor chip and the integrated circuit chip are covered with a layer of protective glue.

In the above scheme, the volume of the micro anemometer is less than 1cm³。

In the above scheme, the flow sensor chip is a MEMS-based flow sensor chip.

Through the technical scheme, the micro anemometer provided by the invention has the following beneficial effects:

1. the invention has small volume and high integration level, and is convenient to be integrated in small equipment;

2. the invention can be processed by microelectronic packaging, and can realize low-cost batch manufacturing;

3. according to the invention, a miniature air flow channel is formed by the bottom PCB and the top shell, and the flow velocity of gas flowing through the surface of the chip can be improved by changing the structure of the air inlet of the air flow channel, so that the detection precision of the wind speed is improved.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below.

FIG. 1 is a schematic view of the overall structure of a micro anemometer according to the present invention;

FIG. 2 is a schematic view of a disassembled structure of the micro anemometer disclosed in the embodiment of the present invention;

FIG. 3 is a schematic view of the housing with the air inlet in a planar configuration;

FIG. 4 is a schematic view of the housing with the air inlet in a ramp configuration;

FIG. 5 is a schematic view of a housing with an arc-shaped air inlet;

fig. 6 is a schematic view of the housing in an arcuate configuration.

In the figure, 1, bottom PCB; 2. a housing; 3. an air inlet; 4. an air outlet; 5. a groove; 6. a flow sensor chip; 7. a temperature sensor chip; 8. an integrated circuit chip; 9. and (5) protective glue.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

The invention provides a micro anemometer, as shown in fig. 1 and 2, comprising a bottom PCB 1 and a shell 2 positioned above the bottom PCB 1, wherein both ends of the shell 2 are respectively provided with an air inlet 3 and an air outlet 4, and a channel for air to flow is formed between the shell 2 and the bottom PCB 1; a groove 5 is formed in the upper surface of the bottom PCB 1, and a flow sensor chip 6, a temperature sensor chip 7 and an integrated circuit chip 8 are embedded in the groove 5. The upper surfaces of the flow sensor chip 6, the temperature sensor chip 7 and the integrated circuit chip 8 are covered with a layer of protective adhesive 9, which can protect gold wires between the flow sensor chip 6 and the integrated circuit chip 8.

And the flow sensor chip 6 is used for converting the wind speed or the gas flow into an electric signal with voltage change or resistance change. The temperature sensor chip 7 is used for collecting temperature signals and transmitting the temperature signals to the integrated circuit chip 8. And the integrated circuit chip 8 is used for acquiring weak signals of the flow sensor chip 6 and the temperature sensor chip 7, operating logic operation and realizing the functions of temperature compensation, wind speed value linear voltage output or digital output and the like of the anemometer.

The temperature sensor chip 7 may be integrated onto the flow sensor chip 6 or the integrated circuit chip 8, or may be provided separately.

As shown in fig. 3, 4 and 5, the housing 2 in this embodiment is a door-shaped frame structure, and the position of the inner wall of the top of the housing 2 at the air inlet 3 is a plane structure, an inclined structure or an arc structure. As shown in fig. 6, the housing 2 may also be of an arcuate configuration.

The volume of the miniature anemometer is less than 1cm³The micro-air-conditioning system can meet the use of micro-space of equipment such as air conditioners, fans, micro-ventilation systems and the like.

The flow sensor chip 6 of the embodiment of the present invention employs a flow sensor chip based on a Micro Electro Mechanical System (MEMS), which may be based on a thermal principle or a differential pressure principle. When wind blows, the chip generates signals which can be directly read by circuits such as resistance change signals, voltage change signals and the like.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A micro anemometer is characterized by comprising a bottom PCB and a shell positioned above the bottom PCB, wherein an air inlet and an air outlet are respectively formed at two ends of the shell, and a channel for air to flow is formed between the shell and the bottom PCB; the upper surface of the bottom PCB is provided with a flow sensor chip, a temperature sensor chip and an integrated circuit chip, wherein the flow sensor chip and the temperature sensor chip are used for transmitting collected flow signals and temperature signals to the integrated circuit chip, and the integrated circuit chip carries out logic operation on the received signals so as to realize temperature compensation of wind speed and linear voltage output or digital output of a wind speed value.

2. The micro anemometer of claim 1 wherein the temperature sensor chip is integrated onto the flow sensor chip or the integrated circuit chip.

3. The micro-anemometer according to claim 1 or 2, wherein the housing has a door-shaped frame structure, and the top inner wall of the housing at the air inlet has a plane structure, an inclined structure or a circular arc structure.

4. A micro-anemometer according to claim 1 or 2 wherein said housing is of arcuate configuration.

5. The micro anemometer according to claim 1, wherein a groove is formed in an upper surface of the bottom PCB, and the flow sensor chip, the temperature sensor chip and the ic chip are embedded in the groove.

6. The micro-anemometer of claim 1, 2 or 5 wherein the flow sensor chip, the temperature sensor chip and the integrated circuit chip are covered with a protective layer of adhesive.

7. The micro-anemometer of claim 1 having a volume of less than 1cm³。

8. The micro anemometer of claim 1 wherein the flow sensor chip is a MEMS-based flow sensor chip.