CN112123743B - Leveling device for Fabry-Perot interferometer transparent substrate - Google Patents
Leveling device for Fabry-Perot interferometer transparent substrate Download PDFInfo
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- CN112123743B CN112123743B CN202010926381.1A CN202010926381A CN112123743B CN 112123743 B CN112123743 B CN 112123743B CN 202010926381 A CN202010926381 A CN 202010926381A CN 112123743 B CN112123743 B CN 112123743B
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- 238000001125 extrusion Methods 0.000 claims abstract description 17
- 230000001681 protective effect Effects 0.000 claims abstract description 14
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000009434 installation Methods 0.000 claims description 55
- 230000005540 biological transmission Effects 0.000 claims description 20
- 239000000523 sample Substances 0.000 claims description 13
- 238000001514 detection method Methods 0.000 claims description 7
- 238000005192 partition Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 230000006978 adaptation Effects 0.000 abstract 1
- 238000005452 bending Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 239000002344 surface layer Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C53/00—Shaping by bending, folding, twisting, straightening or flattening; Apparatus therefor
- B29C53/16—Straightening or flattening
- B29C53/18—Straightening or flattening of plates or sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C53/00—Shaping by bending, folding, twisting, straightening or flattening; Apparatus therefor
- B29C53/80—Component parts, details or accessories; Auxiliary operations
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a leveling device for a Fabry-Perot interferometer transparent substrate, which comprises a support base, a protective shell, a primary leveling component, a planar ranging component and a finishing leveling component, wherein the upper end surface of the support base is provided with the primary leveling component, and the primary leveling component performs leveling work on the outer surface of the transparent substrate through the vertical relative extrusion action of the primary leveling component, so that the finish deviation of the outer end surface of the transparent substrate is constant within the error range; the up end of supporting pedestal is provided with the plane and measures the subassembly, the plane is surveyed the subassembly and is effectively measured the local terminal surface flushness of transparent substrate, and the record transmits its detected data to the flat subassembly of finishing, just, be provided with the flat subassembly of finishing directly over the plane range finding subassembly, this fine flattening subassembly carries out the accurate adjustment to the flattening working face according to the detected data for its flattening working face full adaptation corresponds the surface in transparent substrate.
Description
Technical Field
The invention relates to the technical field of Fabry-Perot interferometer repair equipment, in particular to a leveling device for a Fabry-Perot interferometer transparent substrate.
Background
Fabry-perot interferometers are used as optical filters and in spectral sensors, based on parallel beam splitters, so that a fabry-perot cavity is formed as a gap between mirrors (mirrors), arranged to form an optical cavity; the passband wavelength (pass band wavelength) of a fabry-perot interferometer can be controlled by adjusting the distance between the mirrors (i.e., the width of the gap), which is commonly produced using micromechanical technology. In the prior art, the spectral position of a transmission peak can be changed by changing the distance between mirrors, and a transparent substrate is generally arranged on the observation surface of the device and is influenced by the action of long-term clamping acting force, so that the circumferential surface of the device is deformed in a concave bending manner, and the end surface of the transparent substrate is easy to form bending fluctuation of different degrees due to the fact that the device needs to be rotated and adjusted for multiple times when in use, so that a leveling device for the transparent substrate of the Fabry-Perot interferometer is necessary to be provided, and the problems are solved.
Disclosure of Invention
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a leveling device for fabry-perot interferometer transparent substrate, its includes supporting pedestal, protection casing, preliminary leveling subassembly, plane range finding subassembly and the flat subassembly of finishing, wherein, the lower terminal surface symmetry of supporting pedestal is provided with and is used for supporting fixed bar supporting leg, and bolt fixedly connected with protection casing is passed through to its up end both sides, the protection casing left and right sides all is equipped with the transmission mouth for send into and obtain out transparent substrate, preliminary leveling subassembly is installed to the up end of supporting pedestal.
The preliminary leveling component performs leveling work on the outer surface of the transparent substrate through the vertical relative extrusion action of the preliminary leveling component, so that the smoothness deviation of the outer end surface of the transparent substrate is constant within the error range;
the up end of supporting pedestal is provided with the plane range finding subassembly, the plane range finding subassembly is effective to be measured the local terminal surface flushness of transparent substrate, records and transmits its detected data to the flat subassembly of finishing.
And a finishing leveling assembly is arranged right above the plane distance measuring assembly and used for accurately adjusting the leveling working surface according to the detection data, so that the leveling working surface is completely adapted to the corresponding outer surface of the transparent substrate.
As a preferred technical scheme of the invention, the preliminary leveling assembly comprises an upper leveling device, a lower leveling device and a conveyor belt, wherein a connecting partition plate is vertically fixed on one side inside the protective shell, a separation plate is fixedly attached to the upper side inside the protective shell, the conveyor belts are obliquely arranged on the left side and the right side of the upper end surface of the supporting base through supporting columns, and the conveyor belts and the separation plate are parallel to each other and are provided with a spacing device, so that conveying spaces are formed on two sides of the protective shell;
an upper leveling device is arranged on the upper side inside the protection shell, a lower leveling device is fixedly arranged on the upper end face of the supporting base through a fixing seat, the upper leveling device and the lower leveling device are matched in parallel, and the end face of the transparent substrate is leveled while the transparent substrate is transversely conveyed;
fixed guide rods are vertically and symmetrically arranged on two sides in the protection shell, and the upper leveling device slides on the fixed guide rods in a limiting manner through sliding pieces arranged on two sides of the upper leveling device.
And the middle position in the protection shell is symmetrically fixed with a mounting seat up and down, a connecting guide wheel is arranged in the mounting seat and can rotate relatively, a connecting toothed chain is meshed and driven on the connecting guide wheel, one side of the connecting toothed chain is fixed with the upper leveling device, so that the vertical distance between the upper leveling device and the lower leveling device can be effectively adjusted through the meshing sliding of the connecting toothed chain.
As a preferred technical scheme of the invention, the upper leveling device and the lower leveling device have the same internal structure and the same transmission direction of the working surface, wherein the upper leveling device comprises a fixed frame, extrusion wheel shafts, installation belts, a connecting frame, a rotating motor and a leveling disk seat, the extrusion wheel shafts are symmetrically arranged in the fixed frame from left to right, guide wheels are symmetrically arranged in the fixed frame, the installation belts are arranged on the extrusion wheel shafts and the guide wheels in a transmission manner, and the outer surface of the transparent substrate is smoothed through the installation belts.
Install flattening disk seat in the fixed frame, just be fixed with the rotating electrical machines through the link in the fixed frame, the output and the flattening disk seat of rotating electrical machines are connected fixedly, should flattening disk seat side end face passes the area with the installation and closely laminates, makes and works as when flattening disk seat is rotatory by the rotating electrical machines drive, the installation passes and takes the surface to form circular level working face.
As a preferred technical solution of the present invention, the leveling plate base includes an installation plate, a side pressing member, a fixed plate base, a main leveling member and a connection spring, wherein a plurality of built-in notches for fixing the side pressing member are formed on a circumference of an end surface of one side of the installation plate, the side pressing member is relatively rotatably fixed on the installation plate, and the connection springs are respectively disposed on both left and right sides of the side pressing member and connected and fixed with the installation plate, so that the side pressing member is timely adjusted along with an end surface undulation state of the transparent substrate when leveling and pressing the transparent substrate;
the lower terminal surface of installation plate is through a plurality of connecting the coaxial fixed disk seat of stand, main flattening piece is installed to the lower terminal surface of fixed disk seat, should main flattening piece carries out the flattening work through the installation biography area to transparent substrate under the circumference is rotatory.
As a preferable technical solution of the present invention, the extrusion wheel shaft further includes an outer bracket, a fixed wheel shaft, and an inner heater, wherein the fixed wheel shaft is relatively rotatably disposed in the outer bracket, a receiving cavity is disposed in the fixed wheel shaft, the inner heater is transversely fixed in the receiving cavity, and a plurality of heat conduction ports are formed on the circumference of the fixed wheel shaft, so that when the inner heater performs heating operation, it transmits heat to the outer surface of the fixed wheel shaft through the heat conduction ports.
As a preferred technical scheme of the invention, the installation transmission belt is of a multi-layer structure, one side of the installation transmission belt, which is close to the fixed wheel shaft, is a heat-conducting internal part, and the other side of the installation transmission belt is a heat-insulating external part.
As a preferred technical scheme of the invention, the planar ranging assembly comprises a bearing plate, a ranging probe, an installation base and a lower fixing piece, wherein the installation base is fixed on the upper end face of the support base, a connecting notch for limiting and fixing the lower fixing piece is arranged on the installation base, the bearing plate is arranged on the upper end face of the lower fixing piece, and transparent measuring plates are fixed on the bearing plate at intervals;
and a plurality of distance measuring probes vertically penetrate through the bearing plate, and each distance measuring probe is communicated with an external data processor through a connecting lead, so that the measured flatness of the surface of the transparent substrate is transmitted to the finishing leveling assembly through the external data processor, and the finishing leveling assembly is correspondingly adjusted.
As a preferred technical scheme of the invention, the finishing flat assembly comprises a telescopic cylinder, a telescopic guide hood, a return spring, a press-fit outer plate, a mounting piece and a controllable guide rod, wherein a rack is fixed on the supporting base, the telescopic cylinder is vertically fixed on the rack, and the press-fit outer plate is mounted at the output end of the telescopic cylinder.
A telescopic guide hood is arranged between the press-fit outer plate and the telescopic cylinder, the telescopic guide hood is of a two-section telescopic structure, and a plurality of reset springs are arranged in the telescopic guide hood in parallel; a plurality of installation parts are arranged on the end face of one side, away from the telescopic guide hood, of the press-fit outer plate, and a plurality of controllable guide rods are vertically fixed on each installation part.
Compared with the prior art, the invention provides a leveling device for a Fabry-Perot interferometer transparent substrate, which has the following beneficial effects:
according to the invention, a preliminary leveling assembly is arranged on a support base, and preliminary leveling work is carried out on a transparent substrate through mutual extrusion and matching between an upper leveling device and a lower leveling device which are symmetrically arranged up and down, so that the deviation of the smoothness of the outer end surface of the transparent substrate is constant within a certain error range, wherein extrusion wheel shafts are arranged in a fixed frame in front and back, an internal heater is arranged in each extrusion wheel shaft, and the internal heater is used for supplying heat for the local part of an installation belt, so that the local part of the outer surface layer of the transparent substrate is heated and softened and plasticized, and the end surface of the leveling disc seat can be leveled under the rotation action; a plurality of freely adjustable side pressing pieces are arranged on the circumference of the mounting plate and can be adjusted timely along with the fluctuation state of the end face of the transparent substrate, so that the phenomenon of excessive extrusion in the leveling process is prevented, and the end face is directly broken under stress; still be provided with plane range finding subassembly and finishing flat subassembly on supporting pedestal, effectively measure transparent substrate's local terminal surface flush degree through the range finding probe, record and transmit its detected data to finishing flat subassembly, correspond the adjustment via controllable guide arm, pertinence ground carries out high accuracy flattening work to transparent substrate.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of a preliminary leveling assembly according to the present invention;
FIG. 3 is a schematic structural view of the upper flattening device according to the present invention;
FIG. 4 is a cross-sectional view of a screed plate base of the present invention;
FIG. 5 is a cross-sectional view of an extruded axle of the present invention;
FIG. 6 is a schematic structural diagram of a planar ranging assembly according to the present invention;
FIG. 7 is a schematic view of a fine leveling assembly according to the present invention;
in the figure: 1 supporting base, 2 protecting shell, 3 primary leveling component, 301 upper leveling device, 302 lower leveling device, 303 fixing seat, 304 sliding part, 305 fixing guide rod, 306 mounting seat, 307 connecting guide wheel, 308 connecting toothed chain, 309 connecting partition plate, 310 separating plate, 311 transmission belt, 312 fixing frame, 313 guide wheel, 314 connecting frame, 315 rotating motor, 316 mounting transmission belt, 317 heat preservation outer piece, 318 heat conduction inner piece, 4 plane distance measuring component, 401 mounting base, 402 lower fixing piece, 403 bearing plate piece, 404 distance measuring probe, 405 transparent measuring plate, 406 connecting lead wire, 5 finishing leveling component, 501 rack, 502 telescopic cylinder, 503 telescopic guide cover, 504 reset spring, 505 press outer plate, 506 mounting piece, 507 controllable guide rod, 6 leveling disk seat, 601 mounting plate piece, 602 side pressing piece, 603 fixing disk seat, 604 main leveling piece, 605 connecting spring, 7 pressing wheel shaft, 701 outer rack, and finishing leveling component, 702 fixed axle, 703 internal heater.
Detailed Description
Referring to fig. 1, the present invention provides a technical solution: the utility model provides a leveling device for fabry-perot interferometer transparent substrate, its includes supporting pedestal 1, protection casing 2, preliminary leveling subassembly 3, plane range finding subassembly 4 and finishing leveling subassembly 5, wherein, supporting pedestal 1's lower terminal surface symmetry is provided with and is used for supporting fixed bar supporting leg, and bolt fixedly connected with protection casing 2 is passed through to its up end both sides, the 2 left and right sides of protection casing all are equipped with the transmission mouth for send into and acquire transparent substrate, preliminary leveling subassembly 3 is installed to supporting pedestal 1's up end.
The preliminary leveling component 3 performs leveling work on the outer surface of the transparent substrate through the vertical relative extrusion action of the preliminary leveling component, so that the smoothness deviation of the outer end surface of the transparent substrate is constant within the error range;
the up end of support base 1 is provided with plane range finding subassembly 4, plane range finding subassembly 4 is effective to be measured transparent substrate's local terminal surface levelness, records and transmits its detection data to finishing flat subassembly 5.
And, be provided with smart flattening subassembly 5 directly over plane range finding subassembly 4, this smart flattening subassembly 5 carries out the accurate adjustment to the flattening working face according to the measured data for its flattening working face totally adapts to the corresponding surface of transparent substrate, and here, it needs to be noted that, for preventing that the flattening subassembly from directly carrying out flattening work to the terminal surface of transparent substrate under the high pressure effect, can suitably adjust the relative amplitude difference of its effect surface, makes it can not form the perpendicular work terminal surface of higher difference, and carries out real-time the accuse to operating pressure.
Referring to fig. 2, in this embodiment, the preliminary leveling assembly 3 includes an upper leveling device 301, a lower leveling device 302 and a conveyor belt 311, wherein a connecting partition plate 309 is vertically fixed on one side inside the protective housing 2, a separation plate 310 is fixedly attached to the upper side inside the protective housing 2, the conveyor belts 311 are obliquely arranged on the left and right sides of the upper end surface of the support base 1 through support columns, and the conveyor belts 311 and the separation plate 310 are parallel to each other by a spacing device, so that a conveying space is formed on two sides of the protective housing 2;
an upper leveling device 301 is arranged on the upper side inside the protection shell 2, a lower leveling device 302 is fixedly arranged on the upper end face of the support base 1 through a fixing seat 303, the upper leveling device 301 and the lower leveling device 302 are matched in parallel, and the end face of the transparent substrate is leveled while being conveyed transversely;
In addition, the mounting seats 306 are vertically symmetrically fixed at the middle position inside the protective shell 2, the connecting guide wheels 307 are arranged in the mounting seats 306 and can rotate relatively, the connecting guide wheels 307 are in meshing transmission with connecting toothed chains 308, and one sides of the connecting toothed chains 308 are fixed with the upper flattening device 301, so that the vertical distance between the upper flattening device 301 and the lower flattening device 302 can be effectively adjusted through the meshing sliding of the connecting toothed chains 308, and the upper flattening device and the lower flattening device can be conveniently flattened according to different material thicknesses or different deformation bending degrees, and can be conveniently adjusted in time.
Referring to fig. 3, in this embodiment, the upper leveling device 301 and the lower leveling device 302 have the same internal structure, and the transmission direction of the working surface is the same, wherein the upper leveling device 301 includes a fixed frame 312, a pressing wheel shaft 7, an installation belt 316, a connecting frame 314, a rotating motor 315, and a leveling disk seat 6, the pressing wheel shaft 7 is symmetrically arranged in the fixed frame 312, the guide wheels 313 are symmetrically arranged in the fixed frame 312, the installation belt 316 is arranged on the pressing wheel shaft 7 and the guide wheels 313 in a transmission manner, and the outer surface of the transparent substrate is leveled by the installation belt 316.
Install flattening disk seat 6 in the fixed frame 312, just be fixed with rotating electrical machines 315 through link 314 in the fixed frame 312, the output and the flattening disk seat 6 of rotating electrical machines 315 are connected fixedly, should 6 a side end of flattening disk seat pass area 316 with the installation and closely laminate, make and work as when flattening disk seat 6 is rotatory by rotating electrical machines drive 315, the installation passes area 316 surface and forms circular level working face, and flattening disk seat passes the indirectness through the installation and carries the flattening to transparent substrate, prevents that its direct contact from leading to the fact the mar to its surface.
Referring to fig. 4, in this embodiment, the leveling disk seat 6 includes an installation plate 601, a side pressing member 602, a fixed disk seat 603, a main leveling member 604, and a connection spring 605, wherein a plurality of internal notches for fixing the side pressing member 602 are formed on a circumference of an end surface of one side of the installation plate 601, the side pressing member 602 is relatively rotatably fixed on the installation plate 601, and the connection springs 605 are respectively disposed on both sides of the side pressing member 602 and connected and fixed with the installation plate 601, so that the side pressing member 602 is timely adjusted along with an end surface undulation state of the transparent substrate when leveling and pressing the transparent substrate;
the lower end face of the mounting plate 601 is coaxially fixed with a fixed disk seat 603 through a plurality of connecting upright posts, the lower end face of the fixed disk seat 603 is provided with a main leveling part 604, and the main leveling part 604 performs leveling work on the transparent substrate through a mounting belt 316 under circumferential rotation.
Referring to fig. 5, in this embodiment, the extrusion wheel shaft 7 further includes an outer bracket 701, a fixed wheel shaft 702, and an inner heater 703, wherein the outer bracket 701 is provided with the fixed wheel shaft 702 capable of rotating relatively, a receiving cavity is provided in the fixed wheel shaft 702, the inner heater 703 is transversely fixed in the receiving cavity, and a plurality of heat conduction ports are provided on the circumference of the fixed wheel shaft 702, so that when the inner heater 703 performs heating operation, it transmits heat to the outer surface of the fixed wheel shaft 702 through the heat conduction ports, and the inner heater is used for local heat supply for mounting a belt, so that the outer surface layer of the transparent substrate is locally heated and plasticized, and the leveling disc seat can level the end surface thereof under the rotation action.
In this embodiment, the mounting belt 316 is a multi-layer structure, and a thermally conductive inner member 318 is disposed on one side of the mounting belt near the fixed axle 702, and a thermal insulating outer member 317 is disposed on the other side of the mounting belt.
Referring to fig. 6, in this embodiment, the planar distance measuring assembly 4 includes a bearing plate 403, a distance measuring probe 404, an installation base 401 and a lower fixing member 402, wherein the installation base 401 is fixed on the upper end surface of the support base 1, a connection slot for limiting and fixing the lower fixing member 402 is formed in the installation base 401, the bearing plate 403 is arranged on the upper end surface of the lower fixing member 402, and transparent measuring plates 405 are fixed on the bearing plate 403 at intervals;
moreover, a plurality of distance measuring probes 404 vertically penetrate through the bearing plate 403, and each distance measuring probe 404 is communicated with an external data processor (not shown in the figure) through a connecting lead 406, so that the measured flatness of the surface of the transparent substrate is transmitted to the finishing leveling assembly 5 through the external data processor, and the finishing leveling assembly 5 is correspondingly adjusted.
Referring to fig. 7, in the present embodiment, the finishing flat assembly 5 includes a telescopic cylinder 502, a telescopic guide cover 503, a return spring 504, a press-fit outer plate 505, a mounting member 506, and a controllable guide rod 507, wherein a frame 501 is fixed on the support base 1, the telescopic cylinder 502 is vertically fixed on the frame 501, and the press-fit outer plate 505 is installed at an output end of the telescopic cylinder 502.
A telescopic guide cover 503 is arranged between the press-fit outer plate 505 and the telescopic cylinder 502, the telescopic guide cover 503 is of a two-section telescopic structure, and a plurality of return springs 504 are arranged in parallel in the telescopic guide cover 503; the end face of one side of the press-fit outer plate 505, which is far away from the telescopic guide cover 503, is provided with a plurality of mounting pieces 506 in an arrayed manner, each mounting piece 506 is also vertically fixed with a plurality of controllable guide rods 507, and each controllable guide rod independently extends and retracts respectively, so that the corresponding telescopic adjustment can be performed according to the detection condition, and the flexibility is high.
Specifically, when the transparent substrate of the Fabry-Perot interferometer is leveled, the transparent substrate is guided to a position between an upper leveling device and a lower leveling device through a transmission belt, before, the effective distance between the upper leveling device and the lower leveling device is manually estimated according to the bending degree of the transparent substrate, the upper leveling device and the lower leveling device are effectively adjusted through a connecting toothed chain and limited and fixed by a sliding part, an installation transmission belt transversely and slowly transmits the transparent substrate, an internal heater locally supplies heat to the installation transmission belt through a heat conduction port, so that the local part of the outer surface layer of the transparent substrate is heated and softened and plasticized, and a rotary motor drives a leveling disc seat to primarily level the transparent substrate through the installation transmission belt under the action of high-speed rotation; and then, the local end face flatness of the transparent substrate is effectively measured by the distance measuring probe, detection data of the distance measuring probe are recorded and transmitted to the flattening assembly, the controllable guide rods are correspondingly adjusted in a telescopic mode according to the detection conditions, and the controllable guide rods are pressed downwards through the telescopic air cylinders, so that the transparent substrate is flattened in a high-precision mode.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can substitute or change the technical solution of the present invention and the inventive concept within the technical scope of the present invention, and the technical solution and the inventive concept thereof should be covered by the scope of the present invention.
Claims (5)
1. The utility model provides a leveling device for fabry-perot interferometer transparent substrate, its includes supporting pedestal (1), protection casing (2), preliminary leveling subassembly (3), plane range finding subassembly (4) and finishing flat subassembly (5), wherein, the lower terminal surface symmetry of supporting pedestal (1) is provided with and is used for supporting fixed bar supporting leg, and bolt fixedly connected with protection casing (2) are passed through to its up end both sides, protection casing (2) the left and right sides all is equipped with the transmission mouth for send into and obtain transparent substrate, its characterized in that: the upper end surface of the supporting base (1) is provided with a preliminary leveling component (3),
the preliminary leveling component (3) performs leveling work on the outer surface of the transparent substrate through the vertical relative extrusion action of the preliminary leveling component, so that the smoothness deviation of the outer end surface of the transparent substrate is constant within the error range;
the upper end face of the supporting base (1) is provided with a plane distance measuring component (4), the plane distance measuring component (4) effectively measures the local end face flushness of the transparent substrate, records and transmits the detection data to a finishing flat component (5),
a fine leveling component (5) is arranged right above the plane distance measuring component (4), and the fine leveling component (5) accurately adjusts the leveling working surface according to the detection data, so that the leveling working surface is completely adapted to the corresponding outer surface of the transparent substrate;
the primary leveling assembly (3) comprises an upper leveling device (301), a lower leveling device (302) and a conveyor belt (311), wherein a connecting partition plate (309) is vertically fixed on one side inside the protective shell (2), a separating plate (310) is fixedly attached to the upper side inside the protective shell (2), the conveyor belt (311) is obliquely arranged on the left side and the right side of the upper end face of the supporting base (1) through supporting columns, and the conveyor belt (311) and the separating plate (310) are parallel to each other through spacing equipment, so that conveying spaces are formed on two sides of the protective shell (2);
an upper leveling device (301) is arranged on the upper side in the protection shell (2), a lower leveling device (302) is fixedly arranged on the upper end face of the support base (1) through a fixing seat (303), the upper leveling device (301) and the lower leveling device (302) are matched in parallel, and the end face of the transparent substrate is leveled while the transparent substrate is conveyed transversely;
fixed guide rods (305) are vertically and symmetrically arranged at two sides in the protective shell (2), the upper flattening device (301) slides on the fixed guide rods (305) in a limiting way through sliding pieces (304) arranged at two sides of the upper flattening device,
in addition, mounting seats (306) are symmetrically fixed at the upper and lower middle positions in the protective shell (2), a connecting guide wheel (307) is arranged in each mounting seat (306) in a relatively rotatable manner, a connecting toothed chain (308) is meshed and driven on each connecting guide wheel (307), and one side of each connecting toothed chain (308) is fixed to the upper flattening device (301), so that the vertical distance between the upper flattening device (301) and the lower flattening device (302) is effectively adjusted through the meshing sliding of the connecting toothed chain (308);
the upper leveling device (301) and the lower leveling device (302) have the same internal structure and the same transmission direction of the working surface, wherein the upper leveling device (301) comprises a fixed frame (312), an extrusion wheel shaft (7), an installation belt (316), a connecting frame (314), a rotating motor (315) and a leveling disk seat (6), the extrusion wheel shafts (7) are symmetrically arranged in the fixed frame (312) from left to right, guide wheels (313) are symmetrically arranged in the fixed frame (312), the installation belt (316) is arranged on the extrusion wheel shaft (7) and the guide wheels (313) in a transmission manner, and the outer surface of the transparent substrate is leveled through the installation belt (316),
a leveling disc seat (6) is installed in the fixed frame (312), a rotating motor (315) is fixed in the fixed frame (312) through a connecting frame (314), the output end of the rotating motor (315) is connected and fixed with the leveling disc seat (6), and one side end face of the leveling disc seat (6) is tightly attached to an installation belt (316), so that when the leveling disc seat (6) is driven to rotate by the rotating motor (315), the outer surface of the installation belt (316) forms a round leveling working surface;
the leveling disc seat (6) comprises an installation plate piece (601), side pressing pieces (602), a fixed disc seat (603), a main leveling piece (604) and connecting springs (605), wherein a plurality of built-in notches for fixing the side pressing pieces (602) are formed in the circumference of the end face of one side of the installation plate piece (601), the side pressing pieces (602) can be fixed on the installation plate piece (601) in a relatively rotating mode, and the connecting springs (605) are arranged on the left side and the right side of each side pressing piece (602) and connected and fixed with the installation plate piece (601), so that the side pressing pieces (602) can be timely adjusted along with the end face fluctuation state of the transparent substrate when leveling and pressing are carried out on the transparent substrate;
the lower terminal surface of installation plate spare (601) is through a plurality of connecting the coaxial fixed disk seat (603) of stand, main flattening piece (604) are installed to the lower terminal surface of fixed disk seat (603), should main flattening piece (604) carry out flattening work through installation biography area (316) to transparent base plate under the rotation of circumference.
2. A flattening device for a fabry-perot interferometer transparent substrate according to claim 1, characterized in that: the extrusion wheel shaft (7) further comprises an outer support (701), a fixed wheel shaft (702) and an inner heater (703), wherein the fixed wheel shaft (702) is arranged in the outer support (701) in a relatively rotating mode, a containing cavity is formed in the fixed wheel shaft (702), the inner heater (703) is transversely fixed in the containing cavity, and a plurality of heat conducting ports are formed in the circumference of the fixed wheel shaft (702), so that when the inner heater (703) performs heating work, heat is transmitted to the outer surface of the fixed wheel shaft (702) through the heat conducting ports.
3. A flattening device for a fabry-perot interferometer transparent substrate according to claim 2, characterized in that: the installation belt (316) is of a multi-layer structure, one side of the installation belt close to the fixed wheel shaft (702) is a heat-conducting inner piece (318), and the other side of the installation belt is a heat-insulating outer piece (317).
4. A flattening device for a fabry-perot interferometer transparent substrate according to claim 1, characterized in that: the plane distance measuring assembly (4) comprises a bearing plate (403), a distance measuring probe (404), an installation base (401) and a lower fixing piece (402), wherein the installation base (401) is fixed on the upper end face of the supporting base (1), a connecting notch for limiting and fixing the lower fixing piece (402) is formed in the installation base (401), the bearing plate (403) is arranged on the upper end face of the lower fixing piece (402), and transparent measuring plates (405) are fixed on the bearing plate (403) at intervals;
and a plurality of distance measuring probes (404) vertically penetrate through the bearing plate (403), and each distance measuring probe (404) is communicated with an external data processor through a connecting lead (406), so that the measured flatness of the surface of the transparent substrate is transmitted to the finishing and leveling assembly (5) through the external data processor, and the finishing and leveling assembly (5) is correspondingly adjusted.
5. A flattening device for a fabry-perot interferometer transparent substrate according to claim 1, characterized in that: the finishing flat component (5) comprises a telescopic cylinder (502), a telescopic guide hood (503), a return spring (504), a press-fit outer plate (505), a mounting piece (506) and a controllable guide rod (507), wherein a rack (501) is fixed on the supporting base (1), the telescopic cylinder (502) is vertically fixed on the rack (501), the press-fit outer plate (505) is installed at the output end of the telescopic cylinder (502),
a telescopic guide cover (503) is arranged between the pressing outer plate (505) and the telescopic cylinder (502), the telescopic guide cover (503) is of a two-section telescopic structure, and a plurality of reset springs (504) are arranged in the telescopic guide cover (503) in parallel; the end face of one side of the pressing outer plate (505) far away from the telescopic guide hood (503) is provided with a plurality of installation pieces (506) in an arrayed manner, and a plurality of controllable guide rods (507) are also vertically fixed on each installation piece (506).
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| CN202010926381.1A CN112123743B (en) | 2020-09-04 | 2020-09-04 | Leveling device for Fabry-Perot interferometer transparent substrate |
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| CN202010926381.1A CN112123743B (en) | 2020-09-04 | 2020-09-04 | Leveling device for Fabry-Perot interferometer transparent substrate |
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| CN112123743B true CN112123743B (en) | 2022-02-01 |
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| CN112743773B (en) * | 2021-01-27 | 2022-06-10 | 扬昕科技(苏州)有限公司 | Mold core processing device for improving light emergence rate of dark halo part of light guide plate |
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