CN112121588A - Electric heating water washing type waste gas treatment device - Google Patents

Abstract

The invention relates to an electric heating water washing type waste gas treatment device which comprises a first air inlet, an electric heating device, a dust filtering device, an intelligent cooling and washing system and an air outlet, wherein the first air inlet is arranged on the electric heating device; the device is characterized by further comprising a combustion chamber scaling removing device arranged on the tee joint at the upper part of the first air inlet, wherein the combustion chamber scaling removing device is provided with a stainless steel brush and can reach the inside of the combustion chamber of the electric heating device and brush dust on the inner wall of the combustion chamber. The invention can automatically clean silane dust adhered to the inner wall of the combustion cavity at regular time; the water consumption of fresh water is reduced, and the operation cost is reduced; 4-position floaters are adopted to control low water level, high water level and ultrahigh water level in the water tank, so that the safety performance of the equipment in use is improved; adopt level four spraying system, promote exhaust-gas treatment efficiency.

Description

Electric heating water washing type waste gas treatment device

Technical Field

The invention belongs to the field of waste gas treatment in the technical fields of semiconductors, solar energy, thin film batteries, TFTs (thin film transistors) and the like, and particularly relates to an electrically heated water washing type waste gas treatment device.

Background

The process waste gas treatment equipment belongs to the environmental protection industry, and also belongs to special high-end intelligent accessory equipment for emerging industries such as semiconductors. In the manufacturing process of integrated circuits, some of the process flow modules (modules) are: chemical Vapor Deposition (CVD), etching (Etch), ion implantation (Implant) and Diffusion (Diffusion), as well as PECVD processes for amorphous silicon thin film solar, liquid crystal TFT-LCD thin films, and the like, all use large amounts of specialty gases. These gases, after they have participated in the process reactions, are discharged in the form of waste gases, which can be classified into: toxic (Toxic), acidic (Acid), basic (Alkali), spontaneous combustion (Self-ignition), Flammable (Flammable), Corrosive (sour/Corrosive), and perfluorinated compounds (PFCs) and Volatile Organic Compounds (VOC) gases,

some of the poisonous and harmful gases originally used as process raw materials or reaction byproducts have the danger of corroding various pipelines, some of the poisonous and harmful gases have the danger of fire explosion when meeting or accumulating high concentration with other hazards, and the poisonous gases cause the poisoning of operating personnel and destroy the atmospheric environment. In the production and manufacturing processes in these fields, a plurality of special gases are used, and the gases are often characterized by high toxicity, flammability, explosiveness and the like. Unreacted special gas is intensively introduced into an exhaust pipeline, and the special gas can be discharged only when the rear end of the pipeline is lower than the national discharge standard after being connected to process gas treatment equipment for treatment.

The prior art has existed a semiconductor waste gas treatment device, such as CN204034529U, which is mainly used for preventing the water hammer effect from occurring during the water discharge to damage the water discharge pipeline, and can treat the waste gas generated during the production of semiconductor products. However, the prior art has some disadvantages, such as: 1. fresh water and waste water are discharged all the time in the using process, and the water consumption is large; 2. the scraper is divided into an inner scraper and an outer scraper, the inner wall crystals are scraped in a rotating mode, and the scrapers are easy to clamp and difficult to maintain; 3. the double washing devices are adopted, so that the cost is high, and the overall dimension of the equipment is large; 4. the second scrubber reduces the concentration of the treated gas by introducing and mixing the outside air, so that the treatment efficiency of the equipment on harmful gas is difficult to judge; 5. crystals fall into a water tank after being scraped by a scraper, are easy to deposit and scale and cannot be effectively discharged; 6. the high-temperature gas enters the second scrubber after thermal cracking, so that the temperature of the water tank and a pipeline flowing through the water tank is higher; 7. when the liquid level meter at the high water level is out of order or damaged, the liquid level is uncontrollable.

The present invention has been made in view of the above circumstances.

Disclosure of Invention

In order to solve the problems in the prior art, the invention provides an electric heating water washing type waste gas treatment device, which comprises the following specific technical scheme:

an electric heating water washing type waste gas treatment device comprises a first air inlet, an electric heating device, a dust filtering device, an intelligent cooling and washing system and an air outlet, wherein the first air inlet is formed in the electric heating device; still including setting up the burning chamber scale deposit remove device on first air inlet upper portion tee bend, burning chamber scale deposit remove device is provided with the stainless steel brush, can reach in the electric heater unit burning chamber and brush the dust on the burning chamber inner wall.

Further, combustion chamber scale deposit remove device includes power drive subassembly, flange and stainless steel brush, power drive subassembly and flange fixed connection, and power drive subassembly's telescopic link end sets up the stainless steel brush, the stainless steel brush can be close or keep away from under the drive of telescopic link the flange.

Optionally, the power driving assembly is an air cylinder assembly and comprises a long-stroke air cylinder main body, a first air pipe quick-change connector, a second air pipe quick-change connector and a telescopic rod, and the first air pipe quick-change connector and the second air pipe quick-change connector are respectively arranged near two ends of the long-stroke air cylinder main body and used for driving the telescopic rod to perform reciprocating linear motion.

Further, the flange is a NW160 standard mounting flange.

Further, the first air inlet is a multifunctional air inlet and comprises a CF flange, a fresh water interface, an NW flange, an air inlet pressure monitoring interface and an air inlet pipe, wherein the CF flange is arranged at the middle lower part of the air inlet pipe, the NW flange is arranged at the top end of the air inlet pipe, and the fresh water interface and the air inlet pressure monitoring interface are separately arranged on the pipe wall of the air inlet pipe between the two flanges.

Furthermore, the first air inlet is connected with the electric heating device through a flange, the air inlet pipe extends into a combustion cavity of the electric heating device, an annular space is formed between the outer wall of the air inlet pipe and the inner wall of the combustion cavity, and a second air inlet is arranged on the inner wall of the combustion cavity and communicated with the annular space.

Furthermore, the electric heating device comprises a heating part and a heat preservation part, wherein the heating part comprises a combustion cavity and two ceramic heaters, the two ceramic heaters are both in a semi-cylindrical structure, and the two ceramic heaters are folded and cover the combustion cavity; the heat preservation part comprises an aluminum cover, ceramic fiber cotton and a high-temperature-resistant silica gel sheet, wherein the ceramic fiber cotton and the high-temperature-resistant silica gel sheet are mounted on the inner surface of the aluminum cover, the aluminum cover is wrapped outside the two ceramic heaters, and the high-temperature-resistant silica gel sheet is wrapped outside the aluminum cover.

Further, ceramic fiber cotton is filled between the two ceramic heaters and the aluminum cover.

Optionally, the material of the combustion chamber is a nickel-based alloy.

Further, the dust filtering device comprises an eddy current device, a dust tray and a filtering plate, the eddy current device is arranged on a water tank of the intelligent cooling and washing system, and the dust tray is hung on the lower portion of the eddy current device through a hook; the filter sets up inside the water tank, separates into two regions with the water tank inside.

Further, intelligence cooling washing system includes water tank, multistage spraying system, temperature monitoring device and water level control device, multistage spraying system sets up respectively in dust filter equipment, in the water tank and before the gas outlet, and temperature monitoring device is used for detecting the gaseous temperature in the water tank, and water level control device sets up near the water tank gas vent for the water level in the control water tank.

Further, the multi-stage spraying system comprises a first-stage spraying system, a second-stage spraying system, a third-stage spraying system and a fourth-stage spraying system; the first-stage spraying system consists of a first spray head on the vortex device and is supplied with water by an external fresh water supply system; the second-stage spraying system comprises a water pump and a second spray head, the water pump extracts water from the filtered circulating water in the water tank and supplies the water to the second spray head, and the second spray head is arranged at the upper part of the water tank; the spray heads of the third-stage spraying system and the fourth-stage spraying system are integrated in the water washing tower device, the water washing tower device is provided with two layers of spaces, the lower layer of space contains the third spray head of the third-stage spraying system, the upper layer of space contains the fourth spray head of the fourth-stage spraying system, and the two layers of spaces are filled with spraying filler; the third spray head is connected with circulating water provided by the water pump, and the fourth spray head is supplied with water by an external fresh water supply system.

Furthermore, intelligence cooling washing system still includes mixing system in the water tank, sets up the breather pipe in the bottom of water tank, and the pipe wall of breather pipe has the through-hole.

Further, the temperature monitoring device comprises a first thermocouple arranged near the air inlet of the water tank and a second thermocouple arranged near the air outlet of the water tank, and the first thermocouple and the second thermocouple are both connected with the PLC.

Further, the water level control device is a four-position floater water level control device.

Further, a demister is arranged in the air outlet.

Further, electric heating water washing formula exhaust treatment device still includes pressure monitoring safety coefficient, and it includes automatic pressure relief device, autoalarm and a plurality of pressure gauge that link to each other with PLC, and the pressure gauge is including the first pressure gauge of monitoring first air inlet pressure, the second pressure gauge of monitoring water tank internal pressure, the third pressure gauge of monitoring gas outlet pressure, automatic pressure relief device is the bypass pipeline of connecting the discharge pipe, is provided with the pressure release pneumatic valve in the middle of this bypass pipeline, the pressure release pneumatic valve is controlled by PLC.

Compared with the prior art, the invention has the beneficial effects that:

1. the combustion chamber scale removing device adopts a stainless steel brush, silane dust adhered to the inner wall of the combustion chamber can be automatically cleaned up and down at regular time, and the inner wall of the combustion chamber can be prevented from being blocked.

2. Fresh water/circulating water is controlled by water level and time, and a water pump is used for providing power, so that the water consumption of the fresh water is reduced, and the operation cost is reduced;

3. the 4-position floater is adopted to control the low water level, the high water level and the ultrahigh water level in the water tank, so that the normal water level in the water tank is ensured, and the safety performance of the equipment in use is improved.

4. The water wall and the water curtain formed by the vortex device reduce the gas after the combustion reaction from 800 ℃ to about 40 ℃, thereby preventing the adverse effect of high temperature on other parts.

5. The dust tray is placed in vortex device below, and the produced dust of burning falls into the tray in, reduces the chance that the dust got into the water tank, avoids causing the problem that the water pump damaged, shower nozzle blockked up, can the stability of lifting means operation.

6. Adopt level four spraying system, promote exhaust-gas treatment efficiency.

7. Set up mixing system, prevent that the dust from the deposit scale deposit in the water tank for the dust can in time be discharged through the delivery port.

8. The pressure of the air inlet, the air outlet and the water tank is monitored in real time, and the pressure relief system is matched, so that the damage to a water pipe and an air pipe caused by overlarge pressure of equipment is avoided.

9. The gas outlet is provided with a demister to prevent acidic water vapor from entering the discharge pipeline along with the gas flow to cause pipeline corrosion.

10. The heating system heats the gas in the closed space by the ceramic heater, and then conducts the gas into the combustion cavity through heat, so that the uniformity of the temperature in the whole combustion cavity is ensured, and the waste gas treatment efficiency is improved.

11. The nickel-based alloy heating pipe and the air inlet pipe form an annular space area, so that the CDA (dry cold air) air inlet is effectively prevented from being blocked by silicon dioxide, and meanwhile, when the dry cold air CDA enters the combustion cavity, the dry cold air CDA can effectively and uniformly flow downwards in the area, so that the waste gas and oxygen can be subjected to combustion reaction.

Drawings

Fig. 1 is a schematic external view of an embodiment of an electric-heating water washing type exhaust gas treatment device according to the present invention.

Fig. 2 is a schematic structural view of an embodiment of an electric-heating water washing type exhaust gas treatment device of the present invention.

Fig. 3 is a schematic structural diagram of an embodiment of a combustion chamber scale removal device of an electric heating water washing type exhaust gas treatment device of the present invention.

Fig. 4 is a schematic structural view of an embodiment of the first air inlet of the electric-heating water washing type exhaust gas treatment device of the present invention.

Fig. 5 is a schematic view of the connection of the first air inlet shown in fig. 4 with an electric heating device.

Fig. 6 is a schematic structural view of an electric heating device of the electric heating water washing type exhaust gas treatment device according to an embodiment of the present invention.

Fig. 7 is a schematic structural view of a combination of a dust filtering device and a water tank of the electric heating water washing type exhaust gas treatment device of the present invention.

Fig. 8 is a schematic structural view of a main part of a dust filter of an electric heating water washing type exhaust gas treatment device of the present invention.

Fig. 9 is a schematic structural view of an embodiment of an intelligent cooling water washing system of the electric heating water washing type exhaust gas treatment device of the present invention.

Fig. 10 is a schematic structural view of a water washing tower device in an intelligent cooling water washing system of the electric heating water washing type exhaust gas treatment device of the present invention.

Fig. 11 is a schematic structural view of a water level control device in an intelligent cooling water washing system of the electric heating water washing type exhaust gas treatment device of the present invention.

FIG. 12 is a schematic view of a pressure monitoring safety system of the electric-heating water washing type exhaust gas treatment device according to the present invention.

Wherein, 100-a first air inlet, 110-CF flange, 120-fresh water interface, 130-NW flange, 140-air inlet pressure monitoring interface, 150-air inlet pipe and 160-tee joint; 200-an electric heating device, 201-a thermocouple 1, 202-a thermocouple 2, 210-a combustion cavity, 211-a second air inlet, 220-a first ceramic heater, 230-a second ceramic heater, 240-a first half aluminum cover, 250-a second half aluminum cover, 260-a first high temperature resistant silica gel sheet and 270-a second high temperature resistant silica gel sheet; 300-dust filtering device, 310-vortex device, 311-first spray head, 320-dust tray, 321-hook, 330-filter plate; 400-intelligent cooling water washing system, 410-water tank, 411-first space area, 412-second space area, 420-first stage spraying system, 430-second stage spraying system, 431-water pump, 432-second spray head, 440-third stage spraying system, 441-third spray head, 450-fourth stage spraying system, 451-fourth spray head, 460-temperature monitoring device, 461-first thermocouple, 462-second thermocouple, 470-water level control device, 480-water washing tower device, 481-lower space, 482-upper space, 483-filling material, 490-stirring system in water tank, 491-air duct; 500-gas outlet, 510-demister; 600-combustion chamber scaling removal device, 610-long-range cylinder body, 620-first air pipe quick-change connector, 630-second air pipe quick-change connector, 640-flange, 650-telescopic rod 650, 660-stainless steel brush; 700-pressure monitoring safety system, 710-first pressure gauge, 720-second pressure gauge, 730-third pressure gauge, 740-automatic pressure relief device, 741-pressure relief pneumatic valve, 750-automatic alarm device; 800-a discharge conduit; a-the annular space.

Detailed Description

The following examples are provided to illustrate specific embodiments of the present invention in detail, and it should be noted that the following examples are only for explaining the embodiments of the present invention and are not to be construed as limiting the present invention.

Fig. 1 is a schematic view of an external appearance of an embodiment of the electrically heated water-washing type exhaust gas treatment device of the present invention, and fig. 2 is a schematic view of a structure of an embodiment of the electrically heated water-washing type exhaust gas treatment device of the present invention, the electrically heated water-washing type exhaust gas treatment device includes a first air inlet 100, an electrical heating device 200, a dust filtering device 300, an intelligent cooling water-washing system 400, and an air outlet 500, the first air inlet 100 is disposed on the electrical heating device 200, the electrical heating device 200 is disposed on the dust filtering device 300, the dust filtering device 300 is disposed on an upper portion of a water tank 410 of the intelligent cooling water-washing system 400, and the air outlet 500 is disposed on an upper portion of the intelligent cooling water-washing system 400; the electric heating water washing type waste gas treatment device further comprises a combustion chamber scale removing device 600 arranged on the upper portion of the first air inlet, wherein the combustion chamber scale removing device 600 is provided with a stainless steel brush 660 which can reach the inside of the combustion chamber 210 of the electric heating device 200 and brush dust on the inner wall of the combustion chamber 210.

As shown in fig. 3, the combustion chamber scale removing apparatus 600 includes a power driving assembly, a flange 640 and a stainless steel brush 660, the power driving assembly is fixedly connected to the flange 640, the end of a telescopic rod 650 of the power driving assembly is provided with the stainless steel brush 660, and the stainless steel brush 660 can be driven by the telescopic rod 650 to approach or be far away from the flange 640. That is, the stainless steel brush 660 can perform a reciprocating linear motion by the driving of the driving assembly.

The power driving assembly may be a pneumatic, hydraulic or electric driving assembly, and in a preferred embodiment, the power driving assembly is a cylinder assembly including a long-stroke cylinder body 610, a first air pipe quick-change connector 620, a second air pipe quick-change connector 630 and a telescopic rod 650, and the first air pipe quick-change connector 620 and the second air pipe quick-change connector 630 are respectively disposed near two ends of the long-stroke cylinder body 610 for driving the telescopic rod 650 to move. Preferably, the flange 640 is an NW160 standard mounting flange.

By adopting the combustion chamber scale removing device 600, the problem of blockage caused by accumulation of dust structures in the combustion chamber of the equipment is smoothly solved, and the maintenance period of the equipment can be prolonged; the invention adopts the NW vacuum flange and buckle installation mode, and has the advantages of good sealing performance and easy installation and maintenance; the stainless steel brush structure is adopted, so that the strength of removing dust and scale can be ensured, and the flexibility of the stainless steel brush structure can ensure that the stainless steel brush structure cannot be clamped in the operation process; the dust can fall into below dust tray smoothly, can not cause the condition that the dust is piled up on the brush.

As shown in fig. 4, in one embodiment, the first intake port 100 is a multifunctional intake port, and includes a CF flange 110, a fresh water port 120, a NW flange 130, an intake port pressure monitoring port 140, and an intake pipe 150, wherein the CF flange 110 is disposed at a middle-lower portion of the intake pipe 150, the NW flange 130 is disposed at a top end of the intake pipe 150, and the fresh water port 120 and the intake port pressure monitoring port 140 are separately disposed on a wall of the intake pipe 150 between the two flanges, and are respectively used for accessing fresh water and a pressure gauge.

As shown in fig. 5, the first air inlet 100 is connected to the electric heating apparatus 200 through a flange 130, the air inlet pipe 150 extends into the combustion chamber 210 of the electric heating apparatus 200, an annular space a is formed between the outer wall of the air inlet pipe 150 and the inner wall of the combustion chamber 210, a second air inlet 211 is disposed on the inner wall of the combustion chamber 210, and the second air inlet 211 is communicated with the annular space a.

Since the semiconductor waste gas needs to be introduced with two materials of CDA (dry cold air) and water to participate in the reaction in the combustion process, the first air inlet 100 of the invention has the advantages that: 1. the standard CF and NW flange structures are adopted, so that the installation is convenient and fast, and the sealing performance is good; 2. the device is provided with a fresh water interface 120, water is injected by adopting a pipe joint, the water is changed into water vapor due to high temperature after entering a reaction cavity, and the water vapor is a necessary reactant for treating partial fluoride; 3. The air inlet pressure monitoring interface 140 is used for connecting a pressure gauge and monitoring the pressure of the air inlet in real time; 4. after the first air inlet 100 and the combustion cavity 210 are installed, the air inlet pipe 150 extends into the combustion cavity 210, a circular space A is formed by the outer wall of the air inlet pipe 150 and the inner wall of the combustion cavity 210, in the heating process of the equipment, the CDA is introduced into the second air inlet 211, and when the CDA enters the space A, the CDA is fully and uniformly mixed and flows downwards into the combustion cavity 210 to provide oxygen for combustion; in the equipment shutdown process, the second air inlet 211 lets in nitrogen gas, lets combustion chamber 210 cool off fast to sweep the remaining harmful gas of discharge, this structure can ensure that dust such as this regional A does not have silica simultaneously produces, can ensure that the air inlet of CDA or nitrogen gas can not block up, can fully ensure the required oxygen of burning.

As shown in fig. 6, the electric heating apparatus 200 includes a heating portion and a heat-insulating portion, the heating portion includes a combustion chamber 210 and two ceramic heaters (220,230), namely, a first ceramic heater 220 and a second ceramic heater 230, the two ceramic heaters (220,230) are both of a semi-cylindrical structure, and the two ceramic heaters (220,230) are folded and cover the combustion chamber 210; the heat preservation part comprises aluminum covers (240,250), ceramic fiber cotton and high-temperature-resistant silica gel sheets (260,270) which are arranged on the inner surfaces of the aluminum covers, the aluminum covers (240,250) are a first half aluminum cover 240 and a second half aluminum cover 250, and the first half aluminum cover 240 and the second half aluminum cover 250 are wrapped outside the two ceramic heaters (220,230) to form a cylindrical aluminum cover; the high temperature resistant silica gel pieces (260,270) are a first high temperature resistant silica gel piece 260 and a second half high temperature resistant silica gel piece 270, and the first high temperature resistant silica gel piece 260 and the second high temperature resistant silica gel piece 270 are coated outside the aluminum covers (240,250) to form a cylindrical high temperature resistant silica gel piece heat insulation layer.

Preferably, ceramic fiber wool is filled between two ceramic heaters (220,230), i.e., the first ceramic heater 220 and the second ceramic heater 230, and the aluminum covers 240, 250.

Preferably, the material of the combustion chamber 210 is a nickel-based alloy.

In the invention, the temperature of the ceramic heater can be set to be as high as 1100 ℃ when the equipment runs, and in order to prevent the high temperature from influencing other parts in the hardware frame of the equipment, the temperature of the outer surface of the heating device is required to be ensured to be lower than 50 ℃, so that a layer of high-temperature resistant ceramic fiber cotton is wrapped on the outer surface of the ceramic heater (220,230) and then is fixed in the forms of hoops and the like; then wrapping the heat preservation cotton by the aluminum covers (240,250), installing the two semicircular aluminum covers (240,250) together by a buckle, simultaneously protecting the ceramic heaters (220,230) from being damaged by external impact, welding two standard 1/4-inch joints above the aluminum covers (240,250) and installing two thermocouples (thermocouple 1201 and thermocouple 2202), one for controlling the temperature of the ceramic heaters and the other for over-temperature protection; finally, in order to prevent the aluminum covers (240,250) from being scalded due to the touch of human bodies, a layer of high-temperature resistant silica gel (260,270) is added on the outer surfaces of the aluminum covers.

According to the invention, the ceramic fiber heat-insulating layer can effectively prevent heat loss, reduce energy loss and reduce equipment operation cost; the ceramic fiber heat-insulating layer prevents heat from being dissipated outwards, and effectively protects the operation safety of other parts in the equipment; the aluminum cover can effectively protect the ceramic heater from being damaged by external force; the silicone sheet can effectively avoid the risk of scalding caused by the fact that a human body touches the surface of the ceramic heating device.

As shown in fig. 7 and 8, the dust filtering device 300 includes a vortex device 310, a dust tray 320 and a filter plate 330, the vortex device 310 is disposed on a water tank 410 of the intelligent cooling and washing system 400, and the dust tray 320 is suspended below the vortex device 310 by a hook 321; the filter plate 330 is disposed inside the water tank 410, dividing the inside of the water tank 410 into two spatial regions: a first spatial region 411 and a second spatial region 412.

The dust filtering apparatus 300 of the present invention employs double filtering, the first layer of filtering: silane and other gases are used in part of semiconductor processes, so when the waste gas treatment equipment runs, a large amount of silicon dioxide and other dust can be generated in the combustion process of the electric heating combustion device, the dust is knocked down into the dust tray 320 through the spraying system of the vortex device 310, sieve pores with the pore diameter of 200 meshes (the pore diameter can be determined according to the size of the dust) are formed in the surface of the tray, water can flow out, most of the dust is prevented from falling into the water tank 410, and the dust tray 320 mainly comprises a hook and a tray. The dust is concentrated in the tray for it is convenient to maintain, reduces man-hour, promotes equipment utilization. And (3) second-layer filtration: this filter layer is filter 330 and water tank 410 combination formation, first filter layer is inevitable can't collect all dusts in the tray, partial dust can be along with rivers and get into water tank in 410, filter 330 divides into two spaces with water tank 410 this moment, first space region 411 will have partial dust, prevent through filter 330 with the dust in the first space region 411 and get into in the second space region 412, thereby avoid parts such as water pump, the flowmeter, the shower nozzle, liquid level float because the problem of dust inefficacy damage, thereby equipment maintenance cycle increases, the fault rate is little, the maintenance cost reduces. The surface of the filter plate 330 is a porous structure, which prevents dust from passing through, but can ensure water flow.

As shown in fig. 9, the intelligent cooling and water washing system 400 includes a water tank 410, a multi-stage spraying system, a temperature monitoring device 460 and a water level control device 470, wherein the multi-stage spraying system is respectively disposed in the dust filtering device 300, in the water tank 410 and in front of the air outlet 500, the temperature monitoring device 460 is used for detecting the temperature of the air in the water tank 410, and the water level control device 470 is disposed near the air outlet of the water tank and is used for monitoring the water level in the water tank 410.

The multi-stage spraying system comprises a first stage spraying system 420, a second stage spraying system 430, a third stage spraying system 440 and a fourth stage spraying system 450; the first stage spraying system 420 is composed of a first spray nozzle 311 (see fig. 8) on the vortex device 310, and is supplied with water by an external fresh water supply system; the second stage spraying system 430 comprises a water pump 431 and a second spray head 432, the water pump 431 takes water from the filtered circulating water in the water tank 410 and supplies the water to the second spray head 432, and the second spray head 432 is arranged at the upper part of the water tank 410; the spray heads (441,451) of the third stage spray system 440 and the fourth stage spray system 450 are integrated in a water wash tower apparatus 480, the water wash tower apparatus 480 is provided with two layers of spaces (481,482), the lower layer of space 481 accommodates the third spray head 441 of the third stage spray system 440, the upper layer of space 482 accommodates the fourth spray head 451 of the fourth stage spray system 450, and both the two layers of spaces (481,482) are filled with spray filling material 483; the third spray head 451 receives the circulating water supplied by the water pump 431, and the fourth spray head 451 is supplied with water by an external fresh water supply system.

Primary spray system 420: after the waste gas is combusted by the combustion device, the gas flows through a primary spraying system (formed by fresh water spray heads 311 of the vortex device 310), fresh water of the vortex device is sprayed out by 8 fresh water spray heads 311 uniformly distributed on the periphery to form a water curtain, partial water-soluble waste gas is absorbed, dust is knocked down into a dust tray, and the temperature of the waste gas is instantly cooled to about 40 ℃ from about 800 ℃, so that primary spraying is completed.

Secondary spray system 430: when the exhaust gas flows through the first-stage spraying system 420, the exhaust gas immediately enters the second spraying system 430, the spraying system is connected with circulating water, power is provided by the water pump 431, water in the water tank 410 is pumped out and flows through the pressure switch, the flow meter and finally the plurality of second spray heads 432 to be sprayed out, and the spraying direction of the water flow is opposite to the flow direction of the exhaust gas, so that the exhaust gas can be better hit and absorbed.

Three/four stage spray system (440, 450): as shown in fig. 10, the third and fourth stage spraying systems are mainly combined with the water scrubber 480, and the air flow passes through the second stage water scrubber 430 and then enters the third spraying system 440, which is connected with the circulating water, and unlike the second spraying system, which includes the spraying filler 483, the air flow passing through the filler 483 can increase the contact area with the exhaust gas to the maximum extent, thereby improving the adsorption efficiency. Finally, the water flows through a fourth spraying system 450, and the difference between the system and the third spraying system 440 is that fresh water is used; fresh water can effectively clean dust on the filler 483 of the third-stage spraying system 440 when being sprayed from top to bottom, so that the fluidity of waste gas is ensured, and blockage is avoided.

Each stage of spraying system can be provided with a flow switch and a flowmeter, so that the nozzles are not blocked, and the waste gas treatment efficiency and the equipment safety are guaranteed.

The temperature monitoring device 460 includes a first thermocouple 461 disposed near an inlet of the water tank 410, and a second thermocouple 462 disposed near an outlet of the water tank 410, both the first thermocouple 461 and the second thermocouple 462 being connected to the PLC.

As shown in fig. 11, the water level control device 470 is a four-position float water level control device. The control device adopts a four-position floater 471 to respectively control a low water level, a normal water level, a high water level and an ultrahigh water level in the water tank, when the low water level floater is triggered by the water level in the water tank, a water inlet pneumatic valve on the water tank 410 is opened, fresh water is injected, and the water inlet pneumatic valve is closed after the water level reaches the normal water level; when the water level in the water tank triggers the high water level floater to alarm, the drainage pneumatic valve is opened to drain the waste water, and the drainage pneumatic valve is closed after the water level is at the normal water level; when the high water level floater fails, the water level triggers the ultrahigh water level floater, so that the drainage pneumatic valve is opened, the water inlet pneumatic valve is closed, and the drainage valve is closed after the water level is normal. The control device is used for regularly and completely replacing water in the water tank through the PLC system.

In a preferred embodiment, the intelligent cooling and water washing system 400 further includes an in-tank stirring system 490, wherein an air duct 491 is disposed at the bottom of the water tank 410, a through hole is formed in the wall of the duct 491, air is introduced into the duct 491, and a stirring function is achieved by generating air bubbles to prevent dust deposition and scaling.

The invention adopts an intelligent cooling and washing system, and has the following advantages: 1. because a long-stroke four-stage spraying system is adopted, the treatment efficiency of the water-soluble waste gas reaches more than 99.99 percent; 2. the high-temperature gas is instantly cooled to 40 ℃, and the safety of equipment is guaranteed; 3. whether the spray head is blocked is sensed at the moment of flow switching, so that the waste gas treatment efficiency is guaranteed; 4. the flow meter ensures that the water spray force of each spray head is sufficient; 5. the filler increases the contact area of the water-soluble gas and water, and improves the waste gas treatment efficiency; 6. the thermocouple temperature control system monitors the temperature of the waste gas and water to ensure the safety of equipment; 7. the four-position floater ensures that the water level in the tank is normal.

As shown in fig. 2, a demister 510 is disposed in the air outlet 500 to prevent acidic mist from flowing into the discharge pipe 800 along with the air flow out of the apparatus and causing corrosion of the pipe.

As shown in fig. 1, 2 and 12, the electrically heated water washing type exhaust gas treatment device further includes a pressure monitoring safety system 700, which includes an automatic pressure relief device 740 connected to the PLC and a plurality of pressure gauges, the pressure gauges include a first pressure gauge 710 for monitoring the pressure of the air inlet, a second pressure gauge 720 for monitoring the pressure in the water tank 410, and a third pressure gauge 730 for monitoring the pressure of the air outlet, the automatic pressure relief device 740 is a bypass pipe connected to the exhaust pipe 800, a pressure relief pneumatic valve 741 is disposed in the middle of the bypass pipe, and the pressure relief pneumatic valve 741 is controlled by the PLC. The pressure monitoring mainly monitors the pressure changes of the first air inlet 100, the water tank 410 and the air outlet 500, and when the pressure value exceeds a preset value, the automatic alarm device 750 in the PLC gives an alarm. The first pressure gauge 710 monitors whether the combustion reaction chamber is blocked by dust, which may affect the exhaust gas flow and treatment efficiency; the second pressure gauge 720 monitors whether the water scrubber unit 480 is plugged; the third pressure gauge 730 monitors whether the air outlet 500 is clogged. Through three pressure monitoring can effectively judge the equipment trouble point, promote equipment security performance, when the pressure was too big in water tank 410, equipment automatic start pressure relief device opened the pressure release pneumatic valve and carries out the pressure release operation, avoids causing the damage of equipment.

The invention adopts a plurality of monitoring means, and can ensure the operation safety of the equipment.

A typical operation of one embodiment of the electrically heated water scrubbing exhaust gas treatment device of the present invention is as follows. The inflammable, explosive and water-soluble waste gas discharged from the process end enters the equipment through the air inlet tee joint 160.

2. The waste gas flow enters the nickel-base alloy reaction combustion cavity 210 through the first gas inlet 100; the combustion chamber heats air by external ceramic heaters (220,230) and then heat is uniformly conducted to the combustion chamber to raise the temperature.

3. The combustion temperature in the gas combustion chamber is about 800 ℃, the combusted gas flows through the vortex device 310,

3.1 injecting circulating water into the vortex device 310 forms a water wall along the pipe wall to prevent the heat from being conducted to the outer surface to cause damage to parts and personnel.

3.2 injecting fresh water to form a layer of water curtain on the cross section through which the waste gas passes, instantly cooling the waste gas from about 800 ℃ to about 40 ℃ to absorb part of water-soluble gas and knock off dust generated in the combustion process; the dust that hits down is collected through dust tray 320, can prevent that 90% dust from falling into water tank 410 to avoid causing parts function failure such as water pump, flowmeter, shower nozzle.

4. Waste gas gets into water tank 410, and the water tank is as the collecting container of liquid, and the water in the water tank plays the cooling and adsorbs some water-soluble gas's effect, has following mechanism in the water tank 410:

4.1 multiple spray head spray system (second stage spray system 430), opposite to the direction of exhaust gas flow, better handles water soluble gases.

4.2 stirring system 490 in the water tank, let in CDA in its breather pipe 491, drilling on the pipe wall to the gassing realizes the stirring function, prevents the dust deposit scale deposit, makes the dust in time discharge through the delivery port.

4.3 pressure monitoring system 700 monitors the pressure change in the water tank constantly, and when pressure was too big, automatic pressure relief device 740 opened, and pressure relief device mainly comprises PVC pipe and pneumatic valve, through PLC control.

4.4 thermocouples (461,462) to monitor the real-time temperature of the gas and water in the tank.

5. The waste gas enters a water scrubber 480 after flowing through a water tank 410, so that the water-soluble gas is treated cleanly, and the treatment efficiency is over 99.99 percent;

5.1, firstly, the water passes through a third-stage spraying system 440 in the washing tower device and consists of filling material 483 and a third spray head 441, and the water used by the spraying system is circulating water;

5.2 secondly flows through a fourth spraying system 450 in the water washing tower device;

5.3 finally, the gas flows through a demister of the water washing tower, so that the acidic water mist is prevented from flowing into a discharge pipeline along with the gas flow out of the equipment to cause pipeline corrosion.

6. The treated gas enters the discharge pipe 800 through the gas outlet 500, and the gas outlet is provided with a pressure monitoring device for monitoring the pressure change in real time.

The invention is mainly used for processing arsine, phosphane, silane, hydrogen, ammonia gas and chlorine gas (Cl) used in the processes of Etching (ETCH), diffusion (Diff), epitaxy (Epi), Ion implantation (Ion), Chemical Vapor Deposition (CVD) and the like₂) Hydrogen bromide (HBr), hydrogen chloride (HCl), and other toxic and harmful gases.

The embodiments in the above description are only for illustrating the present invention, and do not limit the scope of the present invention. The scope of the present invention is defined only by the appended claims, and any omissions, substitutions, or modifications made based on the embodiments disclosed herein will fall within the scope of the present invention.

Claims (17)

1. An electric heating water washing type waste gas treatment device comprises a first air inlet (100), an electric heating device (200), a dust filtering device (300), an intelligent cooling water washing system (400) and an air outlet (500), wherein the first air inlet (100) is arranged on the electric heating device (200), the electric heating device (200) is arranged on the dust filtering device (300), the dust filtering device (300) is arranged on the upper portion of a water tank (410) of the intelligent cooling water washing system (400), and the air outlet (500) is arranged on the upper portion of the intelligent cooling water washing system (400); the device is characterized by further comprising a combustion chamber scale removing device (600) arranged on the tee joint (160) at the upper part of the first air inlet (100), wherein the combustion chamber scale removing device (600) is provided with a stainless steel brush (660) which can reach the combustion chamber (210) of the electric heating device (200) and brush off dust on the inner wall of the combustion chamber (210).

2. The electrically heated water washing type waste gas treatment device according to claim 1, wherein the combustion chamber scale removing device (600) comprises a power driving component, a flange (640) and a stainless steel brush (660), the power driving component is fixedly connected with the flange (640), the end of a telescopic rod (650) of the power driving component is provided with the stainless steel brush (660), and the stainless steel brush (660) can be driven by the telescopic rod (650) to approach or be far away from the flange (640).

3. The electrically heated water-washed exhaust gas treatment device according to claim 2, wherein the power driving assembly is a cylinder assembly, and comprises a long-stroke cylinder main body (610), a first air pipe quick-change connector (620), a second air pipe quick-change connector (630) and a telescopic rod (650), and the first air pipe quick-change connector (620) and the second air pipe quick-change connector (630) are respectively arranged near two ends of the long-stroke cylinder main body (610) and are used for driving the telescopic rod (650) to perform reciprocating linear motion.

4. An electrically heated water-washed exhaust gas treatment device according to claim 2, wherein the flange (640) is an NW160 standard mounting flange.

5. The electrically heated water washing type exhaust gas treatment device according to claim 1, wherein the first gas inlet (100) is a multi-functional gas inlet comprising a CF flange (110), a fresh water port (120), an NW flange (130), an inlet pressure monitoring port (140), and a gas inlet pipe (150), the CF flange (110) is disposed at a middle-lower portion of the gas inlet pipe (150), the NW flange (130) is disposed at a top end of the gas inlet pipe (150), and the fresh water port (120) and the inlet pressure monitoring port (140) are separately disposed on a wall of the gas inlet pipe (150) between the two flanges.

6. The electrically heated water washing type exhaust gas treatment device according to claim 5, wherein the first gas inlet (100) is connected to the electric heating device (200) through a flange, the gas inlet pipe (150) extends into the combustion chamber (210) of the electric heating device (200), an annular space (A) is formed between the outer wall of the gas inlet pipe (150) and the inner wall of the combustion chamber (210), a second gas inlet (211) is provided on the inner wall of the combustion chamber (210), and the second gas inlet (211) is communicated with the annular space (A).

7. The electrically heated water scrubbing exhaust gas treatment device of claim 1, wherein the electrically heated device (200) comprises a heating section and a heat retaining section, the heating section comprises a combustion chamber (210) and two ceramic heaters (220,230), both ceramic heaters (220,230) are of a semi-cylindrical structure, and the two ceramic heaters (220,230) are folded and cover the combustion chamber (210); the heat preservation part comprises an aluminum cover (240,250), ceramic fiber cotton and high-temperature resistant silica gel sheets (260,270) which are arranged on the inner surface of the aluminum cover, the aluminum cover (240,250) is covered outside the two ceramic heaters (220,230), and the high-temperature resistant silica gel sheets (260,270) are covered outside the aluminum cover (240, 250).

8. The electrically heated water-washed exhaust gas treatment device according to claim 7, wherein ceramic fiber wool is filled between the two ceramic heaters (220,230) and the aluminum cover (240, 250).

9. The electrically heated water-washed exhaust gas treatment device according to claim 7, wherein the material of the combustion chamber (210) is a nickel-based alloy.

10. The electrically heated water scrubbing exhaust gas treatment device of claim 1, wherein said dust filter device (300) comprises a vortex device (310), a dust tray (320) and a filter plate (330), said vortex device (310) being disposed on a water tank (410) of the intelligent cooling water scrubbing system (400), said dust tray (320) being suspended below the vortex device (310) by a hook (321); the filter plate (330) is disposed inside the water tank (410) to divide the inside of the water tank (410) into two regions.

11. The electrically heated water washing type exhaust gas treatment device according to claim 1, wherein the intelligent cooling water washing system (400) comprises a water tank (410), a multi-stage spraying system, a temperature monitoring device (460) and a water level control device (470), the multi-stage spraying system is respectively arranged in the dust filtering device (300), in the water tank (410) and in front of the gas outlet (500), the temperature monitoring device (460) is used for detecting the temperature of gas in the water tank (410), and the water level control device (470) is arranged near the gas outlet of the water tank and is used for monitoring the water level in the water tank (410).

12. The electrically heated water scrubbing exhaust gas treatment system of claim 11, wherein said multi-stage spray system comprises a first stage spray system (420), a second stage spray system (430), a third stage spray system (440), and a fourth stage spray system (450); the first stage spraying system (420) is composed of a first spray head (311) on the vortex device (310) and is supplied with water by an external fresh water supply system; the second-stage spraying system (430) comprises a water pump (431) and a second spray head (432), water is taken from the filtered circulating water in the water tank (410) by the water pump (431) and is supplied to the second spray head (432), and the second spray head (432) is arranged at the upper part of the water tank (410); the spray heads (441,451) of the third stage spray system (440) and the fourth stage spray system (450) are integrated in a water washing tower device (480), the water washing tower device (480) is provided with two layers of spaces (481,482), the lower layer of space (481) accommodates the third spray head (441) of the third stage spray system (440), the upper layer of space (482) accommodates the fourth spray head (451) of the fourth stage spray system (450), and the two layers of spaces (481,482) are filled with spray filling material (483); the third spray head (441) is connected with circulating water provided by the water pump (431), and the fourth spray head (451) is supplied with water by an external fresh water providing system.

13. The electrically heated water washing type exhaust gas treatment device according to claim 11, wherein the intelligent cooling water washing system (400) further comprises an in-tank stirring system (490), an air duct (491) is provided at the bottom of the water tank (410), and a wall of the air duct (491) has a through hole.

14. An electrically heated water scrubbing exhaust gas treatment device as claimed in claim 11, wherein said temperature monitoring means (460) comprises a first thermocouple (461) disposed adjacent an inlet port of the water tank (410), and a second thermocouple (462) disposed adjacent an outlet port of the water tank (410), said first thermocouple (461) and said second thermocouple (462) both being connected to the PLC.

15. An electrically heated water scrubber exhaust gas treatment device as set forth in claim 11 wherein the water level control device (470) is a four-position float water level control device.

16. The electrically heated water washing type exhaust gas treatment device according to claim 1, wherein a demister (510) is provided in the gas outlet (500).

17. The electrically heated water washing type exhaust gas treatment device according to claim 1, further comprising a pressure monitoring safety system (700) including an automatic pressure relief device (740) connected to the PLC and a plurality of pressure gauges including a first pressure gauge (710) for monitoring a pressure at the air inlet, a second pressure gauge (720) for monitoring a pressure in the water tank (410), and a third pressure gauge (730) for monitoring a pressure at the air outlet, wherein the automatic pressure relief device (740) is a bypass pipe connected to the discharge pipe (800), a pressure relief pneumatic valve (741) is disposed in the middle of the bypass pipe, and the pressure relief pneumatic valve (741) is controlled by the PLC.

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