CN112117988B - 体声波谐振器及其制造方法、滤波器、电子设备 - Google Patents
体声波谐振器及其制造方法、滤波器、电子设备 Download PDFInfo
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- CN112117988B CN112117988B CN202010519683.7A CN202010519683A CN112117988B CN 112117988 B CN112117988 B CN 112117988B CN 202010519683 A CN202010519683 A CN 202010519683A CN 112117988 B CN112117988 B CN 112117988B
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- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
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- MNKMDLVKGZBOEW-UHFFFAOYSA-M lithium;3,4,5-trihydroxybenzoate Chemical compound [Li+].OC1=CC(C([O-])=O)=CC(O)=C1O MNKMDLVKGZBOEW-UHFFFAOYSA-M 0.000 description 2
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Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010519683.7A CN112117988B (zh) | 2020-06-09 | 2020-06-09 | 体声波谐振器及其制造方法、滤波器、电子设备 |
| PCT/CN2020/137219 WO2021248866A1 (fr) | 2020-06-09 | 2020-12-17 | Résonateur acoustique de volume et son procédé de fabrication, filtre et dispositif électronique |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010519683.7A CN112117988B (zh) | 2020-06-09 | 2020-06-09 | 体声波谐振器及其制造方法、滤波器、电子设备 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112117988A CN112117988A (zh) | 2020-12-22 |
| CN112117988B true CN112117988B (zh) | 2024-06-18 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010519683.7A Active CN112117988B (zh) | 2020-06-09 | 2020-06-09 | 体声波谐振器及其制造方法、滤波器、电子设备 |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN112117988B (fr) |
| WO (1) | WO2021248866A1 (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115106274A (zh) * | 2022-06-14 | 2022-09-27 | 北京海创微芯科技有限公司 | 一种mems换能器及制作方法 |
| CN115225058B (zh) * | 2022-09-20 | 2023-01-10 | 深圳新声半导体有限公司 | 谐振结构、用于制作谐振结构的方法 |
| CN117639713A (zh) * | 2023-02-02 | 2024-03-01 | 北京芯溪半导体科技有限公司 | 体声波谐振器及其制造方法、滤波器和电子设备 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104883153A (zh) * | 2014-02-27 | 2015-09-02 | 安华高科技通用Ip(新加坡)公司 | 具有掺杂压电层的体声波谐振器 |
| CN109714016A (zh) * | 2017-10-25 | 2019-05-03 | 安华高科技股份有限公司 | 体声波谐振器 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005236337A (ja) * | 2001-05-11 | 2005-09-02 | Ube Ind Ltd | 薄膜音響共振器及びその製造方法 |
| JP4676437B2 (ja) * | 2003-10-06 | 2011-04-27 | エヌエックスピー ビー ヴィ | 共振器構造体及びそれを製造する方法 |
| US9490418B2 (en) * | 2011-03-29 | 2016-11-08 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator comprising collar and acoustic reflector with temperature compensating layer |
| US9385684B2 (en) * | 2012-10-23 | 2016-07-05 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator having guard ring |
-
2020
- 2020-06-09 CN CN202010519683.7A patent/CN112117988B/zh active Active
- 2020-12-17 WO PCT/CN2020/137219 patent/WO2021248866A1/fr active Application Filing
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104883153A (zh) * | 2014-02-27 | 2015-09-02 | 安华高科技通用Ip(新加坡)公司 | 具有掺杂压电层的体声波谐振器 |
| CN109714016A (zh) * | 2017-10-25 | 2019-05-03 | 安华高科技股份有限公司 | 体声波谐振器 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021248866A1 (fr) | 2021-12-16 |
| CN112117988A (zh) | 2020-12-22 |
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