CN112114009B - 一种具备自我诊断功能的湿度传感器芯片及湿度传感器芯片的自我诊断方法 - Google Patents
一种具备自我诊断功能的湿度传感器芯片及湿度传感器芯片的自我诊断方法 Download PDFInfo
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- CN112114009B CN112114009B CN201911306184.3A CN201911306184A CN112114009B CN 112114009 B CN112114009 B CN 112114009B CN 201911306184 A CN201911306184 A CN 201911306184A CN 112114009 B CN112114009 B CN 112114009B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/221—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
- G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/221—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties
- G01N2027/222—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties for analysing gases
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CN201911306184.3A CN112114009B (zh) | 2019-12-17 | 2019-12-17 | 一种具备自我诊断功能的湿度传感器芯片及湿度传感器芯片的自我诊断方法 |
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CN201911306184.3A CN112114009B (zh) | 2019-12-17 | 2019-12-17 | 一种具备自我诊断功能的湿度传感器芯片及湿度传感器芯片的自我诊断方法 |
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CN112114009A CN112114009A (zh) | 2020-12-22 |
CN112114009B true CN112114009B (zh) | 2021-08-24 |
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CN114705725B (zh) * | 2022-03-01 | 2025-03-28 | 上海申矽凌微电子科技股份有限公司 | 湿度传感器校准方法和系统以及湿度传感器 |
WO2023165144A1 (zh) * | 2022-03-01 | 2023-09-07 | 上海申矽凌微电子科技股份有限公司 | 无漂移湿度传感器及校准方法 |
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JP5235756B2 (ja) * | 2009-03-31 | 2013-07-10 | アズビル株式会社 | 湿度センサの劣化診断方法 |
DE102014202248A1 (de) * | 2014-02-07 | 2015-08-27 | Robert Bosch Gmbh | Sensor zum Detektieren mindestens eines Mediums und Verfahren zum Betreiben einer kapazitiven Messeinrichtung |
DE102015224929B4 (de) * | 2015-12-11 | 2017-08-10 | Continental Automotive Gmbh | Verfahren zur Überprüfung eines Feuchtigkeitssensors eines Dieselmotors |
US10197000B1 (en) * | 2017-07-26 | 2019-02-05 | Ford Global Technologies, Llc | Systems and methods for diagnosing a vehicle humidity sensor |
KR101807749B1 (ko) * | 2017-09-18 | 2017-12-13 | 인창전자주식회사 | 습도 센서 |
CN108593757A (zh) * | 2018-06-29 | 2018-09-28 | 北京沃斯彤科技有限公司 | 一种自诊断式均值离子检测仪及故障诊断方法 |
CN111044583B (zh) * | 2019-11-27 | 2021-07-06 | 南通大学 | 湿度传感器芯片 |
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