CN112113500B - Shearing speckle interference system based on integrated phase shift reflector - Google Patents
Shearing speckle interference system based on integrated phase shift reflector Download PDFInfo
- Publication number
- CN112113500B CN112113500B CN202010725459.3A CN202010725459A CN112113500B CN 112113500 B CN112113500 B CN 112113500B CN 202010725459 A CN202010725459 A CN 202010725459A CN 112113500 B CN112113500 B CN 112113500B
- Authority
- CN
- China
- Prior art keywords
- shearing
- mirror
- phase
- shifting
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/0201—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal phase variation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02029—Combination with non-interferometric systems, i.e. for measuring the object
- G01B9/0203—With imaging systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern
- G01B9/02095—Speckle interferometers, i.e. for detecting changes in speckle pattern detecting deformation from original shape
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
A shearing speckle interference system based on an integrated phase-shift reflector is composed of the integrated phase-shift reflector, a camera, a laser, a beam expander and a measured object. The integrated phase shift reflector comprises a phase shift mirror and a shearing mirror, wherein the phase shift mirror is connected to the integrated phase shift reflector base through a phase shifter and is driven by the phase shifter to realize phase shift; the shearing mirror is connected to the integrated phase-shifting reflector base through a shearing adjusting device, and the posture of the shearing mirror is adjusted through the shearing adjusting device; the shearing mirror is annular and surrounds the phase shift mirror, the shearing machine and the phase shift mirror can be coplanar by adjusting the shearing adjusting device, and the inner contour of the shearing mirror is slightly larger than the outer contour of the phase shift mirror, so that the posture of the shearing mirror can be adjusted. When shearing speckle interferometry is carried out, laser emitted by a laser device irradiates a measured object through a beam expander, and the laser reflected by the measured object enters a camera for interference imaging through the shearing mirror and the phase shift mirror respectively. The system has the advantages of high laser utilization rate, large field of view, small influence of stray light and the like, and is particularly suitable for large-area shearing speckle interference detection.
Description
Technical Field
The invention provides a shearing speckle interference system based on an integrated phase-shifting shearing reflector, which is applied to a shearing speckle interference light path and belongs to the field of light path structures of laser optical instruments.
Background
The shearing speckle interference method adopts speckles formed by laser on a rough screen, adopts a shearing interference device to divide object light into two beams, and obtains deformation information of the surface of a measured object through interference imaging. The shearing speckle interference method does not need reference light, is insensitive to environmental disturbance, has strong practicability, and is the first choice of engineering application in the speckle detection method. However, the existing shearing speckle interference device also has some problems, and certain limitation is caused to the use of the shearing speckle interference method.
The most commonly used Michelson shearing mechanism utilizes a beam splitter prism to divide object light into two beams, one beam enters a CCD after being reflected by a plane mirror with a phase shifter, the other beam enters the CCD after being reflected by an inclined plane mirror with an adjusting device, four-step phase shift can be realized by moving the plane mirror through the phase shifter, and the adjustment of the shearing amount and the shearing direction can be realized by adjusting the angle of the inclined plane mirror, so that the use is convenient. However, beam splitting results in a low laser utilization (< 50%), while the beam splitting prism also limits the field of view of the camera. Due to the fact that the number of discrete elements in the Michelson structure is large, interference resistance is reduced to a certain extent. The application of the 4f system can relieve the limitation of the Michelson device on the field angle, but the cost is brought about by further reduction of the laser utilization rate and reduction of the imaging quality.
The shearing device based on the Wollaston prism is formed by bonding two right-angle prisms with mutually vertical optical axes, and the prism is made of a biaxial crystal, so that vertically incident light is sheared into two beams of light which are transmitted along different directions. The shearing device has simple structure and high optical efficiency, but is difficult in phase shift and is not suitable for a four-step phase shift method.
The shearing device based on the optical wedge realizes light splitting by utilizing the deflection action of the optical wedge, has simple light path and strong anti-interference capability, but has higher fringe space frequency and higher requirement on an image acquisition system, and the size of the optical wedge is usually smaller, so the adjusting range of the shearing amount of the shearing device is also smaller.
The double-hole type shearing device consists of a pair of parallel flat plates and double holes, a plurality of discrete devices are arranged, the two flat plates need to be kept to synchronously rotate, and the adjustment is difficult.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the shearing speckle interference system based on the integrated phase-shifting shearing reflector overcomes the defects and limitations of the prior art, solves the problems that the prior shearing device cannot give consideration to high laser utilization rate, is convenient to realize phase shifting and adjust shearing amount, has a simple structure, is strong in anti-interference performance, has a large field angle and the like, and improves the performances of the shearing device and the shearing speckle interference system.
The technical scheme of the invention is as follows: a shearing speckle interferometry system based on an integral phase-shifting shearing mirror, comprising: an integrated phase-shifting shearing reflector, a camera, a laser and a beam expander;
the laser device emits laser which passes through the beam expander to illuminate the measured object, and the object light is obtained after the laser is reflected by the measured object; the object light is reflected by the integrated phase-shift shearing reflector to obtain phase-shift light and shearing light; the phase-shifted light and the shearing light enter the camera for interference imaging, and shearing speckle interference measurement is achieved.
The integrated phase-shifting shearing reflector is a reflector system comprising a phase-shifting reflector, a phase shifter, a shearing reflector, a shearing adjusting device and a base; the phase shifting mirror is connected with the base through the phase shifter, the shearing mirror is connected with the base through the shearing adjusting device, and the shearing mirror surrounds the phase shifting mirror.
The object light is reflected by a phase shift mirror to obtain phase shift light, and the object light is reflected by a shearing mirror to obtain shearing light; the phase-shifted light and the shear light enter the camera for interference imaging.
The inner contour of the shearing mirror is larger than the outer contour of the phase shifting mirror, so that the shearing mirror can be ensured to be capable of adjusting the posture.
The phase shifter is piezoelectric ceramic.
And the projection of the inner contour of the shearing mirror from the camera optical axis to the camera imaging surface is smaller than the projection from the camera diaphragm to the imaging surface along the optical axis when the camera diaphragm is maximum.
The shear adjustment device has at least two adjustment shafts.
The phase shift mirror and the shearing mirror are plane mirrors.
The reflecting surfaces of the phase shift mirror and the shearing mirror are plated with aluminum or silver metal reflecting films.
The side surfaces of the phase shifting mirror and the shearing mirror are processed into black to reduce stray light.
Compared with the prior art, the invention has the advantages that:
(1) the existing shearing speckle interference system generally adopts a Michelson interference device, half of phase-shifted light and shearing light are reflected to the direction of a measured object in a beam splitter prism, and cannot enter a camera; according to the invention, the object light directly enters the camera through the integrated phase-shift shearing reflector without light splitting, so that the utilization rate of the object light is high;
(2) the field angle of a camera is limited to be not more than 28 degrees by a Michelson interference device generally adopted by the existing shearing speckle interference system, and the field of view of the camera is only limited by a shearing mirror and a phase-shifting mirror, namely: a part of laser reflected by a measured object is reflected in the camera through the shearing mirror to form an image, the other part of laser is reflected in the camera through the phase shift mirror to form an image, and good interference can be formed when the light intensity difference of the two parts is small (within the range of 1: 2-2: 1). (ii) a
(3) Compared with the Michelson interference device generally adopted by the existing shearing speckle interference system, the shearing speckle interference system only has two reflecting surfaces and is slightly influenced by stray light.
Drawings
FIG. 1 is a shear speckle interferometry system based on an integrated phase-shifting shear mirror;
FIG. 2 is an integrated phase shifting shear mirror;
Detailed Description
The invention relates to a shearing speckle interference system based on an integrated phase-shifting shearing reflector, which comprises: the system comprises an integrated phase-shift shearing reflector 1, a camera 2, a laser 3 and a beam expander 4; the laser 3 emits laser, the laser illuminates the measured object 5 after passing through the beam expander 4, and object light is obtained after the laser is reflected by the measured object 5; the object light is reflected by the integrated phase-shift shearing reflector 1 to obtain phase-shift light and shearing light; the phase-shifted light and the shearing light enter the camera 2 for interference imaging, so that shearing speckle interference measurement is realized.
The integrated phase-shifting shear mirror 1 is a mirror system comprising a phase-shifting mirror 101, a phase shifter 102, a shear mirror 103, a shear adjusting device 104 and a base 105; the phase shift mirror 101 is connected to a base 105 through a phase shifter 102, and the shear mirror 103 is connected to the base 105 through a shear adjusting device 104. The shearing mirror 103 is annular, surrounds the phase shift mirror 101, and the shearing mirror 103 can be made coplanar with the phase shift mirror 101 by adjusting the shearing adjusting device 104.
The object light is reflected by a phase shift mirror 101 to obtain phase shift light, and the object light is reflected by a shearing mirror 103 to obtain shearing light; the phase-shifted light and the shear light enter the camera 2 for interference imaging.
The inner contour of the shearing mirror 103 is larger than the outer contour of the phase shift mirror 101 to ensure that the shearing mirror 103 can adjust the attitude. The phase shifter 102 is a piezoelectric ceramic.
The projection of the hollow part inside the shearing mirror 103 along the optical axis of the camera 2 to the imaging surface of the camera 2 is smaller than the projection along the optical axis to the imaging surface when the diaphragm of the camera 2 is at its maximum. The shear adjustment device 104 has at least two adjustment axes. The phase shift mirror 101 and the shear mirror 103 are flat mirrors, and the reflective surface is plated with a metal reflective film made of aluminum or silver material, and the outer side surface is processed into black to reduce stray light.
The scheme of the invention is explained in detail below with reference to fig. 1 and 2:
the invention discloses a shearing speckle interference system based on an integrated phase-shift shearing reflector, which comprises an integrated phase-shift shearing reflector 1, a camera 2, a laser 3, a beam expander 4 and a measured object 5, wherein the integrated phase-shift shearing reflector 1 comprises a phase-shift reflector 101, a phase shifter 102, a shearing reflector 103, a shearing adjusting device 104 and a base 105. The phase shift mirror 101 is connected to a base 105 through a phase shifter 102, and the shear mirror 103 is connected to the base 105 through a shear adjusting device 104. The shearing mirror 103 is annular, surrounds the phase shift mirror 101, and the shearing mirror 103 can be made coplanar with the phase shift mirror 101 by adjusting the shearing adjusting device 104. The inner contour of the shearing mirror 103 is larger than the outer contour of the phase shift mirror 101 to ensure that the shearing mirror 103 can adjust the posture.
The phase shifter 102 is a piezoelectric ceramic. The projection of the hollow part inside the shearing mirror 103 to the imaging surface of the camera 2 along the optical axis of the camera 2 is smaller than the projection of the maximum diaphragm of the camera 2 to the imaging surface along the optical axis, so as to ensure that the imaging surface can be simultaneously reflected by the phase shifting mirror 101 and the shearing mirror 103 when the diaphragm of the camera 2 is maximum. The shearing adjustment device 104 has not less than two adjustment axes, so that the shearing mirror 103 can be adjusted in two dimensions. The shearing adjustment device 104 can adopt a three-axis adjusting mirror frame to make the plane of the reflecting surface of the shearing mirror 103 close to the center of the reflecting surface of the phase shifting mirror 101 as much as possible, so as to reduce the mutual shielding between the shearing mirror 103 and the phase shifting mirror 101. The phase shift mirror 101 and the shear mirror 102 are flat mirrors, the reflective surfaces of which are plated with aluminum or silver metal reflective films, and the side surfaces are processed into black to reduce stray light.
When the shearing speckle interference detection device is used for shearing speckle interference detection, the laser 3 emits laser, and the laser is diffused by the beam expander 4 to illuminate the measured object 5. Laser reflected by the measured object 5 is reflected by the phase shift mirror 101 and the shearing mirror 103 respectively to enter the camera 2 for interference imaging, so that shearing speckle interference is realized.
Those skilled in the art will appreciate that the details of the invention not described in detail in this specification are well within the skill of those skilled in the art.
Claims (8)
1. A shearing speckle interference system based on an integrated phase-shifting shearing mirror is characterized by comprising: the device comprises an integrated phase-shift shearing reflector (1), a camera (2), a laser (3) and a beam expander (4);
the laser emitted by the laser (3) illuminates a measured object (5) after passing through the beam expander (4), and the object light is obtained after being reflected by the measured object (5); the object light is reflected by the integrated phase-shift shearing reflector (1) to obtain phase-shift light and shearing light; the phase-shifted light and the shearing light enter the camera (2) for interference imaging to realize shearing speckle interference measurement;
the integrated phase-shifting shear mirror (1) is a mirror system comprising a phase-shifting mirror (101), a phase shifter (102), a shear mirror (103), a shear adjusting device (104) and a base (105); the phase shifting mirror (101) is connected with the base (105) through the phase shifter (102), and the shearing mirror (103) is connected with the base (105) through the shearing adjusting device (104);
the shearing mirror (103) is annular, surrounds the phase-shifting mirror (101), and can enable the shearing mirror (103) and the phase-shifting mirror (101) to be coplanar by adjusting the shearing adjusting device (104); the inner contour of the shearing mirror is larger than the outer contour of the phase shifting mirror (101) so as to ensure that the shearing mirror (103) can adjust the posture.
2. The shearing speckle interferometry system based on the integrated phase-shifting shearing mirror of claim 1, wherein: the object light is reflected by a phase shift mirror (101) to obtain phase shift light, and the object light is reflected by a shearing mirror (103) to obtain shearing light; the phase-shifted light and the shear light enter the camera (2) for interference imaging.
3. The shearing speckle interferometry system based on the integrated phase-shifting shearing mirror of claim 1, wherein: the phase shifter (102) is a piezoelectric ceramic.
4. The shearing speckle interferometry system based on the integrated phase-shifting shearing mirror of claim 1, wherein: the projection of the hollow part in the shearing mirror (103) to the imaging surface of the camera (2) along the optical axis of the camera (2) is smaller than the projection to the imaging surface along the optical axis when the diaphragm of the camera (2) is maximum.
5. The shearing speckle interferometry system based on the integrated phase-shifting shearing mirror of claim 1, wherein: the shear adjustment device (104) has at least two adjustment shafts.
6. The shearing speckle interferometry system based on the integrated phase-shifting shearing mirror of claim 1, wherein: the phase shifting mirror (101) and the shearing mirror (103) are plane mirrors.
7. The shearing speckle interferometry system based on the integrated phase-shifting shearing mirror of claim 6, wherein: the reflecting surfaces of the phase shift mirror (101) and the shearing mirror (103) are plated with aluminum or silver metal reflecting films.
8. The shearing speckle interferometry system based on the integrated phase-shifting shearing mirror of claim 6, wherein: the side surfaces of the phase shifting mirror (101) and the shearing mirror (103) are processed into black to reduce stray light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010725459.3A CN112113500B (en) | 2020-07-24 | 2020-07-24 | Shearing speckle interference system based on integrated phase shift reflector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010725459.3A CN112113500B (en) | 2020-07-24 | 2020-07-24 | Shearing speckle interference system based on integrated phase shift reflector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112113500A CN112113500A (en) | 2020-12-22 |
| CN112113500B true CN112113500B (en) | 2022-07-05 |
Family
ID=73799725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010725459.3A Active CN112113500B (en) | 2020-07-24 | 2020-07-24 | Shearing speckle interference system based on integrated phase shift reflector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112113500B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113566727B (en) * | 2021-07-07 | 2024-03-19 | 上海大学 | High-precision video extensometer based on phase-shift shearing electronic speckle interference and measuring method |
| CN114235023B (en) * | 2021-11-18 | 2024-05-03 | 北京卫星制造厂有限公司 | Online calibration method and device for phase shifter |
| CN115165309B (en) * | 2022-05-25 | 2023-07-14 | 上海航天化工应用研究所 | Shearing mirror adjustment and calibration device and method for laser shearing speckle system |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1987342A (en) * | 2006-12-21 | 2007-06-27 | 中国船舶重工集团公司第七一一研究所 | Digital electronic cutting speckle interferometer |
| CN101093197A (en) * | 2007-07-20 | 2007-12-26 | 广州华工百川科技股份有限公司 | Phase shift detection head of laser speckle and application |
| CN108982510A (en) * | 2018-06-11 | 2018-12-11 | 东华大学 | Utilize 90 ° of optics mixer Surface profiling dynamic detection systems and method |
| CN109358072A (en) * | 2018-08-24 | 2019-02-19 | 中国人民解放军陆军军事交通学院 | Vehicle tyre laser fast non-destructive detection method based on phase-shifting technique |
| CN209525274U (en) * | 2017-12-29 | 2019-10-22 | 上海视疆科学仪器有限公司 | Light-duty detection system for composite material nondestructive inspection |
-
2020
- 2020-07-24 CN CN202010725459.3A patent/CN112113500B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1987342A (en) * | 2006-12-21 | 2007-06-27 | 中国船舶重工集团公司第七一一研究所 | Digital electronic cutting speckle interferometer |
| CN101093197A (en) * | 2007-07-20 | 2007-12-26 | 广州华工百川科技股份有限公司 | Phase shift detection head of laser speckle and application |
| CN209525274U (en) * | 2017-12-29 | 2019-10-22 | 上海视疆科学仪器有限公司 | Light-duty detection system for composite material nondestructive inspection |
| CN108982510A (en) * | 2018-06-11 | 2018-12-11 | 东华大学 | Utilize 90 ° of optics mixer Surface profiling dynamic detection systems and method |
| CN109358072A (en) * | 2018-08-24 | 2019-02-19 | 中国人民解放军陆军军事交通学院 | Vehicle tyre laser fast non-destructive detection method based on phase-shifting technique |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112113500A (en) | 2020-12-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112113500B (en) | Shearing speckle interference system based on integrated phase shift reflector | |
| US5923425A (en) | Grazing incidence interferometry for measuring transparent plane-parallel plates | |
| US5933236A (en) | Phase shifting interferometer | |
| CN101788263A (en) | Coaxial Fizeau synchronous phase shifting interferometer capable of adjusting extended light illumination | |
| CN101614523A (en) | A kind of multi-beam long-rail interferometer that detects grazing tubular off-axis aspheric mirror | |
| CN111256582B (en) | Transient phase-shifting lateral shearing interferometer and measurement method | |
| JPH0519927B2 (en) | ||
| US4810895A (en) | Method and apparatus for optical examination of an object particularly by moire ray deflection mapping | |
| JPH07190714A (en) | Interferometer | |
| CN112969899B (en) | System and method for holographic interferometry | |
| KR20000075465A (en) | Apparatus for displaying an image suspended in space | |
| CN110779456A (en) | Terahertz waveband super-surface phase shift device and measuring method thereof | |
| CN201094621Y (en) | Transmission type quick-speed optical scan delay-line used for OCT balancing exploration | |
| CN116202622A (en) | Visible light wave band interference polarization imaging spectrometer for detecting gaseous planetary high-order oscillation mode | |
| CN111443041A (en) | Shearing speckle interference system | |
| US5438412A (en) | Phase conjugate interferometer for testing paraboloidal mirror surfaces | |
| US20220412719A1 (en) | Composite measurement system for measuring nanometer displacement | |
| US6768553B2 (en) | Continuous-zoom imaging device of interferometer | |
| CN217639917U (en) | Light source device and head-mounted display equipment | |
| KR100441280B1 (en) | A phase movement speckle interferometer using a quarter wavelength plate and a polarizing plate | |
| US3447859A (en) | Compact combination of a separately usable plane mirror and roof mirror | |
| JPH0210208A (en) | Minute angle measuring apparatus | |
| US4733964A (en) | Device for joining light waves | |
| JPH0579816A (en) | Length measuring interferometer | |
| Willingale et al. | The optical demonstration of an x-ray interferometer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |