CN112099538B - Device and method for automatically adjusting semiconductor equipment balance - Google Patents
Device and method for automatically adjusting semiconductor equipment balance Download PDFInfo
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- CN112099538B CN112099538B CN202011283036.7A CN202011283036A CN112099538B CN 112099538 B CN112099538 B CN 112099538B CN 202011283036 A CN202011283036 A CN 202011283036A CN 112099538 B CN112099538 B CN 112099538B
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Abstract
The invention provides a device and a method for automatically adjusting the balance of semiconductor equipment, which comprises the following steps: a prism unit; the sensing unit is positioned at one end of the prism unit and used for monitoring the position of the prism unit and sending a voltage signal; the measuring unit is connected with the sensing unit and used for receiving the voltage signal and forming a voltage value; the receiving unit is connected with the measuring unit and used for receiving the voltage value and forming a feedback signal; the analysis unit is connected with the receiving unit and used for receiving the feedback signal and forming a pulse signal; the driving unit comprises a driver and a driving motor, the driver is connected with the analysis unit, one end of the driving motor is connected with the driver, the other end of the driving motor is connected with the prism unit, the driver is used for receiving the pulse signals, and the driving motor is used for adjusting the position of the prism unit. The device for automatically adjusting the balance of the semiconductor equipment can improve the working efficiency.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a device and a method for automatically adjusting the balance of semiconductor equipment.
Background
Advanced integrated circuit manufacturing processes generally include hundreds of steps, and a small error in any link can cause failure of the whole chip, and particularly, as the critical dimension of a circuit is continuously reduced, the requirements on process control are more and more strict, so that in order to find and solve problems in time in the production process, products generally need to be subjected to online defect detection. In the industry, a scanner is used to scan defects of a wafer under a certain scanning program, and the number of the scanned defects is compared with a control limit to determine whether the defects on the wafer exceed a control standard, so as to perform corresponding processing. The defect scanning mechanism is mainly that light/electrons are incident to the surface of a wafer, reflected/scattered light/electrons are collected to obtain a gray level image, adjacent units or standard units are compared with the gray level image to obtain a gray level difference value, judgment is carried out according to a set threshold value, and when the gray level difference value exceeds the threshold value, the defect is considered to be a defect. In the prior art, the surface of a wafer is generally scanned by adjusting the angle of a prism, and when the position of the prism deviates, the deviation is generally corrected manually, so that a machine is stopped, and time is wasted.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, the present invention provides an apparatus and a method for automatically adjusting the balance of a semiconductor device, so as to automatically adjust the balance position of the semiconductor device and improve the work efficiency.
In order to achieve the above object, the present invention provides an apparatus for automatically adjusting the balance of a semiconductor device, comprising:
a prism unit;
the sensing unit is positioned at one end of the prism unit and used for monitoring the position of the prism unit and sending a voltage signal;
the measuring unit is connected with the sensing unit and used for receiving the voltage signal and forming a voltage value;
the receiving unit is connected with the measuring unit and used for receiving the voltage value and forming a feedback signal;
the analysis unit is connected with the receiving unit and used for receiving the feedback signal and forming a pulse signal;
the driving unit comprises a driver and a driving motor, the driver is connected with the analysis unit, one end of the driving motor is connected with the driver, the other end of the driving motor is connected with the prism unit, the driver is used for receiving the pulse signal, and the driving motor is used for adjusting the position of the prism unit according to the pulse signal.
Further, the sensing unit and the driving motor are located at both ends of the prism unit.
Further, the driving motor is also connected with the analysis unit and used for sending the position of the driving motor to the analysis unit.
Further, the present invention provides a method for automatically adjusting the balance of a semiconductor device, comprising:
respectively arranging a sensing unit and a driving motor on a first end and a second end of a prism unit, and adjusting the position of the sensing unit to form a first voltage signal through the sensing unit;
receiving the first voltage signal through a measuring unit, forming a first voltage value, and fixing the position of the sensing unit when the position of the sensing unit is adjusted to enable the first voltage value to be a preset value;
acquiring the position of the driving motor through the sensing unit to form a second voltage signal;
receiving the second voltage signal through the measuring unit and forming a second voltage value;
receiving the second voltage value through a receiving unit and forming a feedback signal;
receiving the feedback signal through an analysis unit and forming a pulse signal;
receiving the pulse signal through a driver, and driving the driving motor to be fixed or move; when the second voltage value is the preset value, the driver drives the driving motor to be fixed so as to fix the position of the prism unit; when the second voltage value is not the preset value, the driver drives the driving motor to move.
Further, when the driver drives the driving motor to move, if the first end moves towards the sensing unit and the first end presses the sensing unit, the second voltage signal is a high voltage signal, the receiving unit receives the high voltage signal and then forms a negative feedback signal, and the analyzing unit receives the negative feedback signal and forms a negative pulse signal.
Further, the driver drives the driving motor according to the negative pulse signal to drive the second end to move in a direction away from the first end.
Further, in the process that the second end moves away from the first end, the first end moves away from the sensing unit, the measuring unit forms an adjusting voltage value, and when the adjusting voltage value is the preset value, the driver drives the driving motor to be fixed so as to fix the position of the prism unit; and when the adjusting voltage value is not the preset value, receiving the pulse signal of the analysis unit through the driver, and driving the driving motor to move until the adjusting voltage value is the preset value.
Further, when the driver drives the driving motor to move, if the first end moves in a direction away from the sensing unit, the second voltage signal is a low voltage signal, the receiving unit receives the low voltage signal and then forms a positive feedback signal, and the analyzing unit receives the positive feedback signal and then forms a positive pulse signal.
Further, the driver drives the driving motor according to the positive pulse signal to drive the second end to move towards the first end.
Further, in the process that the second end moves towards the first end, the first end moves towards the sensing unit, the measuring unit forms an adjusting voltage value, and when the adjusting voltage value is the preset value, the driver drives the driving motor to be fixed so as to fix the position of the prism unit; and when the adjusting voltage value is not the preset value, receiving the pulse signal of the analysis unit through the driver, and driving the driving motor to move until the adjusting voltage value is the preset value.
In summary, the present invention provides an apparatus and method for automatically adjusting the balance of a semiconductor device, wherein a sensing unit and a driving motor are respectively disposed at a first end and a second end of a prism unit, then adjusting the position of the sensing unit, when the voltage value displayed by the measuring unit is a preset value, the worker fixes the position of the sensing unit, namely, fixes the position of the first end of the prism unit firstly, then adjusts the position of the driving motor, in the process of adjusting the position of the driving motor, when the first end of the prism unit moves towards the sensor, the prism unit extrudes the sensor to form a high voltage signal, the analysis unit sends a negative pulse signal, therefore, the driving motor rotates in a negative direction, so that the second end of the prism unit moves towards the direction far away from the first end, and the first end of the prism unit moves towards the direction far away from the sensing unit; when the voltage value displayed by the measuring unit is a preset value, the driving motor drives the driving motor to be fixed, so that the position of the prism unit can be fixed, namely the position of the second end of the prism unit is fixed; and when the voltage value displayed by the measuring unit is not a preset value, receiving the pulse signal of the analysis unit through the driver, and driving the driving motor to move until the adjusted voltage value is the preset value. Similarly, when the driver drives the driving motor to move, the first end moves in a direction away from the sensing unit, the second voltage signal is a low voltage signal, the receiving unit receives the low voltage signal to form a positive feedback signal, and the analyzing unit receives the positive feedback signal to form a positive pulse signal; the driver drives the driving motor according to the positive feedback signal to drive the second end to move towards the first end; in the process that the second end moves towards the first end, the first end moves towards the direction close to the sensing unit, and when the voltage value displayed by the measuring unit is a preset value, the driving motor drives the driving motor to be fixed, so that the position of the prism unit can be fixed; and when the voltage value displayed by the measuring unit is not a preset value, receiving the pulse signal of the analysis unit through the driver, and driving the driving motor to move until the adjusted voltage value is the preset value. According to the invention, the position of the first end of the prism unit is fixed firstly, and then the position of the second end of the prism unit is fixed, so that the position of the prism unit can be automatically adjusted, the prism unit is in a balance position, and the working efficiency can be improved.
Drawings
FIG. 1: the invention discloses a schematic diagram of a device for automatically adjusting the balance of semiconductor equipment.
FIG. 2: the invention discloses a flow chart of a method for automatically adjusting semiconductor equipment balance.
FIG. 3: the position schematic diagram of the sensing unit is adjusted.
FIG. 4: the invention discloses a schematic diagram for adjusting the position of a prism unit.
FIG. 5: another schematic diagram of adjusting the position of the prism unit in the present invention.
Description of the symbols
100: apparatus for automatically adjusting semiconductor balance, 101: prism unit, 102: sensing unit, 103: measurement unit, 104: receiving unit, 105: an analysis unit, 106: drive unit, 1061: driver, 1062: drive motor, 107: power supply unit, 108: fixing member, 109: and (4) a thimble.
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated.
As shown in fig. 1, the present embodiment proposes an apparatus 100 for automatically adjusting the balance of a semiconductor device, where the apparatus 100 for automatically adjusting the balance of a semiconductor device includes a prism unit 101, a sensing unit 102, a measuring unit 103, a receiving unit 104, an analyzing unit 105, a driving unit 106, and a power supply unit 107. The apparatus 100 for automatically adjusting the balance of a semiconductor device, which may be a defect scanning machine for scanning defects on a wafer, is used to adjust the balance position of a prism unit 101 in the semiconductor device.
As shown in fig. 1, in the present embodiment, the prism unit 101 may be disposed in a semiconductor device, for example, obliquely disposed in the semiconductor device, and when the position of the prism unit 101 is adjusted, the path of the light may be changed. A sensing unit 102 is further disposed on the first end of the prism unit 101, and the sensing unit 102 can be used to monitor the position change of the prism unit 101, for example, when the first end of the prism unit 101 moves towards the sensing unit 102, the first end of the prism unit 101 presses the sensing unit 102, so as to form an electrical signal, for example, a voltage signal or a current signal. For another example, when the prism unit 101 is in contact with the sensor unit 102 but the prism unit 101 does not have pressure on the sensor unit 102, the worker may fix the position of the sensor unit 102. In the present embodiment, the sensing unit 102 is, for example, a sensor. It should be noted that the top of the sensing unit 102 contacts the prism unit 101, and when there is no pressure on the sensing unit 102 from the prism unit 101, for example, when the voltage value or the current value displayed by the measuring unit 103 is a preset value, it may be considered that the prism unit 101 reaches the equilibrium position, and the worker may fix the bottom of the sensing unit 102, that is, fix the position of the sensing unit 102, by using the thimble.
As shown in fig. 1, the measuring unit 103 is connected to the sensing unit 102, when the prism unit 101 presses the sensing unit 102, the sensing unit 102 forms an electrical signal, such as a voltage signal, the measuring unit 102 receives the voltage signal and forms a voltage value, and sends the voltage value to the receiving unit 104, and the receiving unit 104 forms a feedback signal according to the voltage value. For example, when the voltage value is a preset value, it indicates that the prism unit 101 is not pressed against the sensor unit 102, that is, the prism unit 101 is in a balanced state, so the receiving unit 104 forms a balance feedback signal to the analysis unit 105. For another example, when the prism unit 101 presses the sensing unit 102, the sensing unit 102 may form a high voltage signal, and then the measuring unit 103 may display a high voltage value, and the receiving unit 104 may form a negative feedback signal according to the high voltage value. For another example, when the prism unit 101 does not press the sensing unit 102, the sensing unit 102 may form a low voltage signal, and then the measuring unit 103 may display a low voltage value, and the receiving unit 104 may form a positive feedback signal according to the low voltage value.
As shown in fig. 1, in the present embodiment, the analysis unit 105 connects the driving unit 106 and the receiving unit 104. After the receiving unit 104 forms the feedback signal, the feedback signal is sent to the analyzing unit 105, and the analyzing unit 105 forms a pulse signal according to the feedback signal and sends the pulse signal to the driving unit 106. In the present embodiment, the driving unit 106 includes a driver 1061 and a driving motor 1062. The driver 1061 is connected to the analysis unit 105, one end of the driving motor 1062 is connected to the driver 1061, and the other end of the driving motor 1062 is connected to the prism unit 101. The driving motor 1062 and the sensing unit 102 are respectively located at both ends of the prism unit 101. When the analysis unit 105 receives the feedback signal, the analysis unit 105 forms a pulse signal and sends the pulse signal to the driver 1061, and the driver 1061 controls the driving motor 1062 to rotate according to the pulse signal. For example, when the receiving unit 104 sends a negative feedback signal, the analyzing unit 105 receives the negative feedback signal to form a negative pulse signal, and the driver 1061 receives the negative pulse signal, the driver 1061 drives the driving motor 1062 to rotate in the first direction. For another example, when the receiving unit 104 sends a positive feedback signal, the analyzing unit 105 receives the positive feedback signal to form a positive pulse signal, and the driver 1061 receives the positive pulse signal, the driver 1061 drives the driving motor 1062 to rotate in the second direction. It should be noted that the first direction and the second direction are opposite, when the driving motor 1062 rotates in the first direction, the first end of the prism unit 102 rotates in a direction away from the sensor unit 102, and when the driving motor 1062 rotates in the second direction, the first end of the prism unit 102 rotates in a direction close to the sensor unit 102. In this embodiment, the analysis unit 105 is, for example, a single chip microcomputer. In this embodiment, when the driver 1061 drives the driving motor 1062 to rotate in the first direction or the second direction, the sensing unit 102 may further generate a voltage signal again, and the measuring unit 103 may further generate an adjustment voltage value, if the adjustment voltage value is a preset value, the driver 1061 drives the driving motor 1062 to be fixed, and if the adjustment voltage value is not the preset value, the analyzing unit 105 may generate a pulse signal, and the driver 1061 drives the driving motor 1062 to move according to the pulse signal until the adjustment voltage value is the preset value.
As shown in fig. 1, in this embodiment, the driving motor 1062 is further connected to the analysis unit 105, and the driving motor 1062 may send a feedback signal to the analysis unit 105, for example, the feedback signal sent by the driving motor 1062 may be a position signal of the driving motor 1062, so that the analysis unit 105 may know the position of the driving motor 1062.
As shown in fig. 1, in the present embodiment, the power supply unit 107 is connected to the driver 1061, the receiving unit 104, the measuring unit 103, and the analyzing unit 105; for providing electrical support for the driver 1061, the receiving unit 104, the measuring unit 103 and the analyzing unit 105. It should be noted that the driver 1061 provides an electric support for the driving motor 1062, and the analysis unit 105 provides an electric support for the sensing unit 102. The dashed arrow between the analyzing unit 105 and the sensing unit 102 represents the circuit.
As shown in fig. 1, in the present embodiment, the apparatus 100 for automatically adjusting the balance of a semiconductor device is used to adjust the balance of a prism unit 101 in a defect scanning machine, for example. The defect scanning machine table also comprises a light source part, and the light source part is used for emitting light. The light source part may be a laser emitter, and since laser has advantages of good monochromaticity, high brightness, and good directivity, by using the laser emitter as the light source part in the present invention, a laser ray may be emitted through the laser emitter, and the path of the ray may be changed when the ray passes through the prism unit 101.
As shown in fig. 1, in this embodiment, the apparatus 100 for automatically adjusting the balance of the semiconductor device may first adjust the position of the sensing unit 102, that is, fix the position of the first end of the prism unit 101, when the voltage value displayed by the measuring unit 103 is a preset value, the worker may first fix the position of the sensing unit 102, and then adjust the position of the driving motor 1062, and during the process of adjusting the driving motor 1062, when the voltage value displayed by the measuring unit 103 is a preset value again, fix the position of the driving motor 1062, that is, fix the position of the second end of the prism unit 101, so as to quickly fix the positions of the first end and the second end, that is, quickly make the prism unit 101 in a balanced state. During the movement of the driving motor 1062, if the voltage value displayed by the measuring unit 103 is not a preset value, the analyzing unit 105 forms a pulse signal according to the feedback signal formed by the receiving unit 104; the driver 1061 drives the driving motor 1062 to rotate according to the pulse signal, so that the voltage value displayed by the measuring unit 103 is a preset value, thereby automatically adjusting the position of the prism unit 101, and rapidly balancing the prism unit 101, so that the apparatus 100 for automatically adjusting the balance of the semiconductor device can improve the working efficiency. Note that the range of the position adjustment of the prism unit 101 is very small, and the rotation range of the drive motor 1062 is also very small, for example, on the order of micrometers.
As shown in fig. 2, the present embodiment further provides a method for automatically adjusting the balance of a semiconductor device, including:
s1: respectively arranging a sensing unit and a driving motor on a first end and a second end of a prism unit, and adjusting the position of the sensing unit to form a first voltage signal through the sensing unit;
s2: receiving the first voltage signal through a measuring unit, forming a first voltage value, and fixing the position of the sensing unit when the position of the sensing unit is adjusted to enable the first voltage value to be a preset value;
s3: acquiring the position of the driving motor through the sensing unit to form a second voltage signal;
s4: receiving the second voltage signal through the measuring unit and forming a second voltage value;
s5: receiving the second voltage value through a receiving unit and forming a feedback signal;
s6: receiving the feedback signal through an analysis unit and forming a pulse signal;
s7: receiving the pulse signal through a driver, and driving the driving motor to be fixed or move; when the second voltage value is the preset value, the driver drives the driving motor to be fixed so as to fix the position of the prism unit; when the second voltage value is not the preset value, the driver drives the driving motor to move.
As shown in fig. 1, in steps S1-S2, the sensor unit 102 and the driving motor 1062 are first disposed at both ends of the prism unit 101, for example, the sensor unit 102 is disposed at a first end of the prism unit 101, and the driving motor 1062 is disposed at a second end of the prism unit 101, that is, the sensor unit 102 and the driving motor 1062 are disposed at opposite ends of the prism unit 101.
As shown in FIG. 1, after the sensing unit 102 is disposed at the first end, the position of the sensing unit 102 is adjusted, so that the sensing unit 102 forms the first voltage signal in steps S1-S2. Meanwhile, the measuring unit 103 forms a first voltage value according to the first voltage signal, and fixes the position of the sensing unit 102 when the first voltage value is a preset value, so that the position of the first end of the prism unit 101 can be fixed. That is, the sensing unit 102 is disposed behind the first end, and the position of the sensing unit 102 is continuously adjusted so that the first voltage value formed by the measuring unit 103 is a preset value, thereby fixing the position of the sensing unit 102.
As shown in fig. 3, fig. 3 is a schematic view showing the installation of the sensing unit 102. The fixing member 108 is disposed on the back of the prism unit 101, the fixing member 108 has a fixing hole, the main body of the sensing unit 102 is located in the fixing hole, the top of the sensing unit 102 is in contact with the prism unit 101, that is, the sensing unit 102 can move in the fixing member 108, when the sensing unit 102 is in contact with the prism unit 101, the sensing unit 102 generates a first voltage signal, and the sensing unit 102 sends the first voltage signal to the measuring unit 103, when the first voltage value displayed by the measuring unit 103 is a preset value, the sensing unit 102 can be fixed, and since the position of the sensing unit 102 is fixed, the position of the first end of the prism unit 102 can be fixed.
As shown in fig. 1 and 4, in steps S3-S7, after the position of the sensing unit 102 is fixed, the position of the driving motor 1061 is adjusted, that is, the position of the driving motor 1062 is obtained by the sensing unit 102, and in the process of adjusting the driving motor 1062, the driving motor 1062 is driven by the driver 1061 to move, so that the sensing unit 102 forms a second voltage signal. If the first end of the prism unit 101 moves towards the direction approaching the sensing unit 102, the first end presses the sensing unit 102, so the second voltage signal can be a high voltage signal, the sensing unit 102 sends the high voltage signal to the measuring unit 103, the measuring unit 103 displays a high voltage value, the measuring unit 103 simultaneously sends the high voltage value to the receiving unit 104, the receiving unit 104 forms a negative feedback signal and sends the negative feedback signal to the analyzing unit 105, and the analyzing unit 105 forms a negative pulse signal according to the negative feedback signal. The analysis unit 105 sends a negative pulse signal to the driver 1061, and the driver 1061 drives the driving motor 1062 according to the negative pulse signal, so as to drive the second end to move away from the first end.
As shown in fig. 1 and 4, in the process that the second end of the prism unit 101 moves away from the first end, the first end of the prism unit 101 moves away from the sensing unit 102 at the same time, so that the sensing unit 102 will again generate a voltage signal, the measuring unit 103 will generate an adjustment voltage value according to the voltage signal, and when the adjustment voltage value displayed by the measuring unit 103 according to the voltage signal is a preset value, it indicates that the position of the driving motor 1062 can be fixed, that is, the driver 1061 drives the driving motor 1062 to be fixed. If the adjustment voltage value displayed by the measurement unit 103 is not the preset value, the analysis unit 104 may again generate a pulse signal, and the driver 1061 drives the driving motor 1062 according to the pulse signal, so that the adjustment voltage value displayed by the measurement unit 103 is the preset value, thereby fixing the driving motor 1062, i.e., fixing the position of the second end of the prism unit 101. Since the position of the sensing unit 102 is fixed first and then the position of the driving motor 1062 is fixed, that is, the position of the first end of the prism unit 101 is fixed first and then the position of the second end of the prism unit 101 is fixed, it is possible to quickly fix the prism unit 101, that is, to quickly adjust the prism unit 101 to the equilibrium position. Note that, in the present embodiment, the position adjustment of the first end and the second end of the prism unit 101 is very small, for example, several micrometers.
As shown in fig. 1, 4-5, after fixing the position of the sensor unit 102, when the first end of the prism unit 101 moves in the direction of the sensor unit 102, the second end of the prism unit 101 moves in a direction away from the first end in steps S3-S7. When the second end of the prism unit 101 continues to move away from the first end, the first end of the prism unit 101 moves away from the sensing unit 102, so that the pressure of the first end of the prism unit 101 pressing the sensing unit 102 becomes small, so that the sensing unit 102 forms a low voltage signal, and the measuring unit 103 receives the low voltage signal, the measuring unit 103 forms a low voltage value and sends the low voltage value to the receiving unit 104, and the receiving unit 104 forms a positive feedback signal and sends the positive feedback signal to the analyzing unit 105. The analysis unit 105 forms a positive pulse signal according to the positive feedback signal and transmits the positive pulse signal to the driver 1061, and the driver 1061 drives the driving motor 1062 according to the positive pulse signal, thereby moving the second end in a direction away from the first end. In the process of moving the second end of the prism unit 101 away from the first end, the first end of the prism unit 101 moves towards the direction close to the sensing unit 102, so that the sensing unit 102 can form a voltage signal again, and the measuring unit 103 can form an adjustment voltage value according to the voltage signal. When the voltage value displayed by the measurement unit 103 is a preset value, the driver 1061 drives the driving motor 1062 to fix, thereby fixing the position of the driving motor 1062, that is, the position of the second end of the prism unit 101. If the adjustment voltage value displayed by the measurement unit 103 is not the preset value, the analysis unit 104 may again generate a pulse signal, and the driver 1061 drives the driving motor 1062 according to the pulse signal, so that the adjustment voltage value displayed by the measurement unit 103 is the preset value, thereby fixing the driving motor 1062, i.e., fixing the position of the second end of the prism unit 101. Since the position of the sensing unit 102 is fixed first and then the position of the driving motor 1062 is fixed, that is, the position of the first end of the prism unit 101 is fixed first and then the position of the second end of the prism unit 101 is fixed, it is possible to quickly fix the position of the prism unit 101, that is, to quickly adjust the prism unit 101 to the equilibrium position. In this embodiment, the preset value is, for example, 0V, 1V.
As shown in fig. 1 and 5, in steps S3-S6, after the position of the sensing unit 102 is fixed, the position of the driving motor 1061 is adjusted, that is, the position of the driving motor 1062 is obtained by the sensing unit 102, and in the process of adjusting the driving motor 1062, the driving motor 1062 is driven by the driver 1061 to move, so that the sensing unit 102 forms a second voltage signal. If the first end of the prism unit 101 moves away from the sensing unit 102, the first end does not press the sensing unit 102, so the second voltage signal may be a low voltage signal, the sensing unit 102 sends the low voltage signal to the measuring unit 103, the measuring unit 103 displays a low voltage value, the measuring unit 103 simultaneously sends the low voltage value to the receiving unit 104, the receiving unit 104 forms a positive feedback signal, and sends the positive feedback signal to the analyzing unit 105, and the analyzing unit 105 forms a positive pulse signal according to the positive feedback signal. The analyzing unit 105 sends a positive pulse signal to the driver 1061, and the driver 1061 drives the driving motor 1062 according to the positive pulse signal, so as to drive the second end to move toward the first end.
As shown in fig. 1 and 5, in the process that the second end of the prism unit 101 moves towards the first end, the first end of the prism unit 101 moves towards the direction close to the sensing unit 102, so that the sensing unit 102 will again generate a voltage signal, the measuring unit 103 will generate an adjustment voltage value according to the voltage signal, and when the adjustment voltage value displayed by the measuring unit 103 according to the voltage signal is a preset value, it indicates that the position of the driving motor 1062 can be fixed, that is, the driver 1061 drives the driving motor 1062 to be fixed. If the adjustment voltage value displayed by the measurement unit 103 is not the preset value, the analysis unit 104 may again generate a pulse signal, and the driver 1061 drives the driving motor 1062 according to the pulse signal, so that the adjustment voltage value displayed by the measurement unit 103 is the preset value, thereby fixing the driving motor 1062, i.e., fixing the position of the second end of the prism unit 101. Since the position of the sensing unit 102 is fixed first and then the position of the driving motor 1062 is fixed, that is, the position of the first end of the prism unit 101 is fixed first and then the position of the second end of the prism unit 101 is fixed, it is possible to quickly fix the prism unit 101, that is, to quickly adjust the prism unit 101 to the equilibrium position.
In summary, the present invention provides an apparatus and method for automatically adjusting the balance of a semiconductor device, wherein a sensing unit and a driving motor are respectively disposed at a first end and a second end of a prism unit, then adjusting the position of the sensing unit, when the voltage value displayed by the measuring unit is a preset value, the worker fixes the position of the sensing unit, namely, fixes the position of the first end of the prism unit firstly, then adjusts the position of the driving motor, in the process of adjusting the position of the driving motor, when the first end of the prism unit moves towards the sensor, the prism unit extrudes the sensor to form a high voltage signal, the analysis unit sends a negative pulse signal, therefore, the driving motor rotates in a negative direction, so that the second end of the prism unit moves towards the direction far away from the first end, and the first end of the prism unit moves towards the direction far away from the sensing unit; when the voltage value displayed by the measuring unit is a preset value, the driving motor drives the driving motor to be fixed, so that the position of the prism unit can be fixed, namely the position of the second end of the prism unit is fixed; and when the voltage value displayed by the measuring unit is not a preset value, receiving the pulse signal of the analysis unit through the driver, and driving the driving motor to move until the adjusted voltage value is the preset value. Similarly, when the driver drives the driving motor to move, the first end moves in a direction away from the sensing unit, the second voltage signal is a low voltage signal, the receiving unit receives the low voltage signal to form a positive feedback signal, and the analyzing unit receives the positive feedback signal to form a positive pulse signal; the driver drives the driving motor according to the positive feedback signal to drive the second end to move towards the direction far away from the first end; in the process that the second end moves away from the first end, the first end moves towards the direction close to the sensing unit, and when the voltage value displayed by the measuring unit is a preset value, the driving motor drives the driving motor to be fixed, so that the position of the prism unit can be fixed; and when the voltage value displayed by the measuring unit is not a preset value, receiving the pulse signal of the analysis unit through the driver, and driving the driving motor to move until the adjusted voltage value is the preset value. According to the invention, the position of the first end of the prism unit is fixed firstly, and then the position of the second end of the prism unit is fixed, so that the position of the prism unit can be automatically adjusted, the prism unit is in a balance position, and the working efficiency can be improved.
Reference throughout this specification to "one embodiment", "an embodiment", or "a specific embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment, and not necessarily all embodiments, of the present invention. Thus, respective appearances of the phrases "in one embodiment", "in an embodiment", or "in a specific embodiment" in various places throughout this specification are not necessarily referring to the same embodiment. Furthermore, the particular features, structures, or characteristics of any specific embodiment of the present invention may be combined in any suitable manner with one or more other embodiments. It is to be understood that other variations and modifications of the embodiments of the invention described and illustrated herein are possible in light of the teachings herein and are to be considered as part of the spirit and scope of the present invention.
It will also be appreciated that one or more of the elements shown in the figures can also be implemented in a more separated or integrated manner, or even removed for inoperability in some circumstances or provided for usefulness in accordance with a particular application.
Additionally, any reference arrows in the drawings/figures should be considered only as exemplary, and not limiting, unless otherwise expressly specified. Further, as used herein, the term "or" is generally intended to mean "and/or" unless otherwise indicated. Combinations of components or steps will also be considered as being noted where terminology is foreseen as rendering the ability to separate or combine is unclear.
As used in the description herein and throughout the claims that follow, "a", "an", and "the" include plural references unless otherwise indicated. Also, as used in the description herein and throughout the claims that follow, unless otherwise indicated, the meaning of "in …" includes "in …" and "on … (on)".
The above description of illustrated embodiments of the invention, including what is described in the abstract of the specification, is not intended to be exhaustive or to limit the invention to the precise forms disclosed herein. While specific embodiments of, and examples for, the invention are described herein for illustrative purposes only, various equivalent modifications are possible within the spirit and scope of the present invention, as those skilled in the relevant art will recognize and appreciate. As indicated, these modifications may be made to the present invention in light of the foregoing description of illustrated embodiments of the present invention and are to be included within the spirit and scope of the present invention.
The systems and methods have been described herein in general terms as the details aid in understanding the invention. Furthermore, various specific details have been given to provide a general understanding of the embodiments of the invention. One skilled in the relevant art will recognize, however, that an embodiment of the invention can be practiced without one or more of the specific details, or with other apparatus, systems, assemblies, methods, components, materials, parts, and/or the like. In other instances, well-known structures, materials, and/or operations are not specifically shown or described in detail to avoid obscuring aspects of embodiments of the invention.
Thus, although the present invention has been described herein with reference to particular embodiments thereof, a latitude of modification, various changes and substitutions are intended in the foregoing disclosures, and it will be appreciated that in some instances some features of the invention will be employed without a corresponding use of other features without departing from the scope and spirit of the invention as set forth. Thus, many modifications may be made to adapt a particular situation or material to the essential scope and spirit of the present invention. It is intended that the invention not be limited to the particular terms used in following claims and/or to the particular embodiment disclosed as the best mode contemplated for carrying out this invention, but that the invention will include any and all embodiments and equivalents falling within the scope of the appended claims. Accordingly, the scope of the invention is to be determined solely by the appended claims.
Claims (10)
1. An apparatus for automatically adjusting the balance of a semiconductor device, comprising:
a prism unit;
the sensing unit is positioned at one end of the prism unit and used for monitoring the position of the prism unit and sending a voltage signal;
the measuring unit is connected with the sensing unit and used for receiving the voltage signal and forming a voltage value;
the receiving unit is connected with the measuring unit and used for receiving the voltage value and forming a feedback signal;
the analysis unit is connected with the receiving unit and used for receiving the feedback signal and forming a pulse signal;
the driving unit comprises a driver and a driving motor, the driver is connected with the analysis unit, one end of the driving motor is connected with the driver, the other end of the driving motor is connected with the prism unit, the driver is used for receiving the pulse signal, and the driving motor is used for adjusting the position of the prism unit according to the pulse signal.
2. The apparatus of claim 1, wherein the sensing unit and the driving motor are located at both ends of the prism unit.
3. The apparatus of claim 1, wherein the driving motor is further connected to the analyzing unit for transmitting the position of the driving motor to the analyzing unit.
4. A method for automatically adjusting the balance of a semiconductor device using the apparatus of any of claims 1-3, comprising:
respectively arranging a sensing unit and a driving motor on a first end and a second end of a prism unit, and adjusting the position of the sensing unit to form a first voltage signal through the sensing unit;
receiving the first voltage signal through a measuring unit, forming a first voltage value, and fixing the position of the sensing unit when the position of the sensing unit is adjusted to enable the first voltage value to be a preset value;
acquiring the position of the driving motor through the sensing unit to form a second voltage signal;
receiving the second voltage signal through the measuring unit and forming a second voltage value;
receiving the second voltage value through a receiving unit and forming a feedback signal;
receiving the feedback signal through an analysis unit and forming a pulse signal;
receiving the pulse signal through a driver, and driving the driving motor to be fixed or move; when the second voltage value is the preset value, the driver drives the driving motor to be fixed so as to fix the position of the prism unit; when the second voltage value is not the preset value, the driver drives the driving motor to move.
5. The method as claimed in claim 4, wherein when the driver drives the driving motor to move, if the first end moves towards the sensing unit and the first end presses the sensing unit, the second voltage signal is a high voltage signal, the receiving unit forms a negative feedback signal after receiving the high voltage signal, and the analyzing unit forms a negative pulse signal after receiving the negative feedback signal.
6. The method as claimed in claim 5, wherein the driver drives the driving motor according to the negative pulse signal to move the second end away from the first end.
7. The method of claim 6, wherein the first end is moved away from the sensing unit during the movement of the second end away from the first end, the measuring unit forms the second voltage value, and the driver drives the driving motor to be fixed to fix the position of the prism unit when the second voltage value is the preset value; and when the second voltage value is not the preset value, receiving the pulse signal of the analysis unit through the driver, and driving the driving motor to move until the second voltage value is the preset value.
8. The method as claimed in claim 4, wherein when the driver drives the driving motor to move, if the first terminal moves away from the sensing unit, the second voltage signal is a low voltage signal, the receiving unit receives the low voltage signal to form a positive feedback signal, and the analyzing unit receives the positive feedback signal to form a positive pulse signal.
9. The method as claimed in claim 8, wherein the driver drives the driving motor according to the positive pulse signal to move the second end toward the first end.
10. The method of claim 9, wherein the first terminal is moved toward the sensing unit during the movement of the second terminal toward the first terminal, the measuring unit forms the second voltage value, and the second voltage value drives the driving motor to be fixed to fix the position of the prism unit when the second voltage value is the preset value; and when the second voltage value is not the preset value, receiving the pulse signal of the analysis unit through the driver, and driving the driving motor to move until the second voltage value is the preset value.
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| CN104111663A (en) * | 2014-07-04 | 2014-10-22 | 北京航天发射技术研究所 | Three-dimensional closed-loop feedback control method for automatic rocket inertia unit target prism collimation |
| CN107643525A (en) * | 2017-08-24 | 2018-01-30 | 南京理工大学 | Linear array laser radar based on 45 ° of tilting mirrors is circumferential without as revolving imaging system |
| CN111123507A (en) * | 2019-11-28 | 2020-05-08 | 武汉华中天经通视科技有限公司 | Synchronous scanning rotating double-prism device and one-dimensional scanning method thereof |
| CN111684334A (en) * | 2017-12-06 | 2020-09-18 | 奥普托图尼康苏默尔股份公司 | Adjustable prism for optical image stabilization |
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| JP7066322B2 (en) * | 2017-02-13 | 2022-05-13 | 株式会社トプコン | Surveying system |
| CN110573928B (en) * | 2017-04-28 | 2021-10-08 | 深圳市大疆创新科技有限公司 | Angular calibration in light detection and ranging systems |
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| CN104111663A (en) * | 2014-07-04 | 2014-10-22 | 北京航天发射技术研究所 | Three-dimensional closed-loop feedback control method for automatic rocket inertia unit target prism collimation |
| CN107643525A (en) * | 2017-08-24 | 2018-01-30 | 南京理工大学 | Linear array laser radar based on 45 ° of tilting mirrors is circumferential without as revolving imaging system |
| CN111684334A (en) * | 2017-12-06 | 2020-09-18 | 奥普托图尼康苏默尔股份公司 | Adjustable prism for optical image stabilization |
| CN111123507A (en) * | 2019-11-28 | 2020-05-08 | 武汉华中天经通视科技有限公司 | Synchronous scanning rotating double-prism device and one-dimensional scanning method thereof |
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