CN112098732A - Microwave electromagnetic parameter three-dimensional test system and method thereof - Google Patents
Microwave electromagnetic parameter three-dimensional test system and method thereof Download PDFInfo
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Abstract
The invention discloses a three-dimensional microwave electromagnetic parameter testing system, which comprises a PC (personal computer) control end, a three-axis motion controller, a vector network analyzer and a three-axis motion controller, wherein the PC control end is respectively connected with the three-axis motion controller and the vector network analyzer and is used for acquiring data of the vector network analyzer and controlling the three-axis motion controller according to different commands; the three-axis motion controller is used for controlling the overall operation of the three-dimensional motion platform according to the command of the PC control end; the vector network analyzer is connected with the antenna device and used for providing sweep frequency signals for the antenna measuring device and measuring electromagnetic fields at different spatial positions; the antenna measuring device is positioned on the three-dimensional motion platform and moves to different spatial positions of the three-dimensional motion platform to measure the sample to be measured; the distance measurement module is used for collecting the position of a sample to be measured in the system and ensuring that the antenna measurement device accurately measures the distance to the surface of the sample to be measured. Therefore, the application ensures that the system can realize rapid and accurate measurement on the relatively large-size sample under the premise of carrying out nondestructive testing on the material.
Description
Technical Field
The application relates to the technical field of microwave measurement, in particular to a microwave electromagnetic parameter three-dimensional test system and a method thereof.
Background
Generally, the main techniques for testing the electromagnetic parameters of microwave materials or devices include: coaxial probe methods, transmission line methods, free space methods, resonant cavity methods, cavity perturbation methods, and the like. The coaxial probe method is mainly used for measuring liquid and semisolid, and is characterized in that the edge of a probe is contacted with or inserted into a material to be measured, and electromagnetic parameters are extracted along with the change of the edge of the probe, but the method requires that the material is isotropic and has semi-infinite thickness; the transmission line method mainly means that a material is sealed in a section of transmission line, such as a rectangular waveguide, a coaxial air line and a surface waveguide, a sample to be measured needs to be filled in a clamp, S parameters of the material are obtained, and therefore all electromagnetic parameters of the material to be measured are obtained, measurement of the low-loss material is limited to a certain extent, and flexibility of sample design is damaged to a certain extent due to the use of a waveguide clamp; the resonant cavity method and the perturbation method have certain limitation on a sample to be tested, the advantages of the free space method are obvious if non-contact nondestructive measurement is required to be carried out on the material, and the free space method can be used for measuring the magnetic material and can be used for testing some special samples such as metamaterials. The conventional free space test system mainly comprises an antenna, a vector network analyzer (or comprises a sweep frequency signal source) and a control microcomputer, the antenna is simply and fixedly installed, and a plurality of obvious problems exist in the measurement process, for example, when points at different positions of a material are measured, because a position adjusting device on a movable antenna in the conventional scheme can only be controlled to keep the absolute shaft height, if the distance between the measurement antenna and a plane to be measured is inconsistent, the measurement result is inaccurate; in addition, in the process of adjusting the measuring antenna to reach different positions, since the surface of the large-sized sample to be measured below is not absolutely horizontal but has a certain degree of unevenness or a certain degree of inclination, the upper surface of the sample to be measured can be detected by the detecting antenna, and the measuring antenna and the plane to be measured can be damaged in a severe case.
Disclosure of Invention
To address one or more of the above issues, the present application provides a microwave electromagnetic parameter three-dimensional test system and a method thereof.
According to one aspect of the present application, there is provided a microwave electromagnetic parameter three-dimensional testing system, comprising
The system comprises a PC control end, a three-axis motion controller, a three-dimensional motion platform, a vector network analyzer, an antenna measuring device and a distance measuring module; wherein,
the PC control end is respectively connected with the three-axis motion controller and the vector network analyzer and is used for acquiring data of the vector network analyzer and controlling the three-axis motion controller according to different commands;
the three-axis motion controller is used for controlling the overall operation of the three-dimensional motion platform according to the command of the PC control end;
the vector network analyzer is connected with the antenna device and is used for providing a frequency sweeping signal for the antenna measuring device and measuring electromagnetic fields at different spatial positions;
the antenna measuring device is positioned on the three-dimensional motion platform and can move to different spatial positions of the three-dimensional motion platform to measure a sample to be measured;
the distance measurement module is used for collecting the position of a sample to be measured in the system and ensuring that the antenna measurement device accurately measures the distance to the surface of the sample to be measured.
In some embodiments, the three-dimensional motion platform comprises an X-axis moving platform, a Y-axis moving platform, and a Z-axis lifting platform, and the antenna measuring device comprises an excitation antenna and a detection antenna, wherein,
the three-axis motion controller is respectively connected with the X-axis moving platform, the Y-axis moving platform and the Z-axis lifting platform, so that motion of any three-dimensional space track is realized;
the device comprises a Z-axis lifting platform, a sample platform, an excitation antenna, a detection antenna, a vector network analyzer and a vector network analyzer, wherein the sample platform is arranged below the Z-axis lifting platform, the excitation antenna is arranged below the sample platform, the detection antenna is arranged on the Z-axis lifting platform, the vector network analyzer is connected with the excitation antenna and the detection antenna, and the vector network analyzer is used for exciting and testing a sample to be tested on the sample platform.
In some embodiments, the three-dimensional motion platform comprises a servo actuator capable of moving along an X-axis, a Y-axis, and a Z-axis of preset coordinates, wherein,
servo actuating mechanism with three-axis motion controller connects for obtain three-axis motion controller's motion instruction, servo actuating mechanism includes X axle moving platform, Y axle moving platform and Z axle lift platform's motion actuating mechanism, all with three-axis motion controller connects, carries out X, Y, Z axle's motion respectively.
In some embodiments, the device further comprises a platform frame, the servo actuators are all motors, the X-axis moving platform can slide along the Y-axis moving platform to move back and forth, the Z-axis lifting platform can slide along the X-axis moving platform to move up and down, wherein,
the Y-axis moving platform comprises at least one group of first screw rods symmetrically arranged at the top of the platform rack, and a first horizontal sliding rail is arranged on each first screw rod along the edge of the first screw rod in the length direction;
the X-axis moving platform comprises a second screw rod which is perpendicular to the first horizontal screw rod and is arranged in a sliding mode, a first sliding block which is matched with the horizontal sliding rail is fixedly arranged below the second screw rod, and a second horizontal sliding rail along the length direction of the second screw rod is arranged at the upper part of the second screw rod;
the Z-axis lifting platform comprises a second sliding block matched with the second horizontal sliding rail, a third screw rod device in the vertical direction is fixedly arranged on the sliding block, and the distance measuring module is installed at the lower end of the third screw rod device.
In some embodiments, the three-axis motion controller comprises a motor port and an LRF precision adjusting port, wherein the motor port is used for connecting with the motion executing mechanism in the X, Y, Z axis direction, the LRF precision adjusting port is connected with the ranging module, the ranging module is installed at the lower end of the Z-axis lifting platform and the detecting antenna is located on the same horizontal plane, and the ranging module is further provided with an adjusting knob for adjusting the installation inclination degree of the ranging module.
In some embodiments, the PC control end comprises a computer control platform built in a computer and developed based on a programming environment.
The application also provides a testing method of the microwave electromagnetic parameter three-dimensional testing system, which is based on any one of the microwave electromagnetic parameter three-dimensional testing systems of claims 1 to 6 and comprises the following steps:
the test system acquires three-dimensional motion data, processes the acquired data to obtain motion instructions and motion path data which can be executed by the three-axis motion controller, and then sends the data to the three-dimensional motion platform to execute three-dimensional motion, thereby realizing three-dimensional test.
In some embodiments, the network analyzer sends the scanning area parameters of the three-dimensional motion platform to the PC control terminal, the PC control terminal sends the motion information of the scanning area parameters to the three-axis controller, and the three-axis controller controls the three-dimensional motion platform to move, so as to drive the ranging module on the three-dimensional motion platform to perform distance collection and adjustment, thereby realizing the three-dimensional test of the antenna measuring device on the sample to be tested.
In some embodiments, the method comprises:
the distance measurement module is used for collecting distance;
the distance measurement module and the sample to be measured realize accurate measurement: and controlling the Z-axis lifting platform to move along the Z axis, changing the distance between the sample to be detected and the detection antenna, and driving the detection antenna to move by the Z-axis lifting platform until the detection antenna accurately measures the distance from the surface of the sample to be detected and stops moving.
In some embodiments, further comprising:
(1) establishing a microwave electromagnetic parameter three-dimensional test system, starting a network analyzer, a three-axis motion controller, a three-dimensional motion platform and a computer, and starting each task;
(2) initializing equipment, and automatically returning the platform to zero to correct a mechanical zero point;
(3) placing a sample to be detected on a sample table;
(4) setting a relative zero position of a sample to be detected;
(5) adjusting the three-dimensional motion platform and the distance acquisition module to meet the requirement that the antenna measuring device accurately measures the distance to the surface of the sample to be measured;
in some embodiments, further comprising:
(S1) presetting scanning area parameters in a computer control platform developed based on a program programming environment, and designating a distance H0 between a probe antenna and a lower sample stage;
(S2) generating location information of N location points according to the preset scanning area parameter, where N is used to represent the location information of the nth location point, and the initial value N is 1;
(S3) measuring a height h1 of the ranging module from the sample stage using the ranging module at this time;
(S4) controlling the Z-axis moving platform of the three-dimensional moving platform to move upwards to lift the detection antenna by a distance d, and measuring the height h2 from the sample platform by using a ranging module;
(S5) calculating a tilt coefficient at this time α ═ (h2-h 1)/d;
(S16) determining N < N or N ═ N;
(S7) if not, continuing to control the Z-axis moving platform of the three-dimensional moving platform to move upwards to drive
Detecting the lifting distance of the antenna, returning the initial position of which the inner n is 1, and processing data display images by the computer control platform according to the intensity and phase information acquired by each position point;
(S8) if yes, move to the position of the nth point, where n is n +1, go to step S6 to determine in a loop
And breaking until N > N.
In some embodiments, step S8 further includes:
(S81) if N is less than N or equal to N, controlling the three-dimensional motion platform to move to the position of the nth point;
(S82) measuring a height H1 from the sample stage by using a distance measuring adjustment device, and calculating a movement distance D ═ H1-H0)/a;
(S83) controlling the Z-axis moving platform of the three-dimensional moving platform to move downwards to drive the detection antenna to move downwards for a distance D, and measuring the height H2 from the sample stage by using a distance measuring and adjusting device;
(S84) making a decision-0.05 < H2-H0<0.05, if yes, obtaining intensity and phase information from the network analyzer, raising the probe antenna by a distance, n is n +1, returning to step S81 to make a loop decision, if no, directly jumping to step S82.
In some embodiments, step S83, if the condition-0.05 < H2-H0<0.05 is not satisfied, further comprises: and (4) judging whether the global tilt coefficient is used, if so, returning to the step (S82), otherwise, recalculating the tilt coefficient alpha (H1-H2)/D, and returning to the step (16).
Compared with the prior art, the application has the following beneficial effects:
when measuring points at different positions of a material, the position adjusting device on the movable antenna can only control and keep the absolute shaft height, so that the measurement result is inaccurate if the distance between the measurement antenna and a plane to be measured is inconsistent; in addition, in the process of adjusting the measuring antenna to reach different positions, since the surface of the large-size sample to be measured below is not absolutely horizontal but has certain unevenness or certain inclination, non-contact nondestructive measurement of the material cannot be guaranteed. This application has ensured under the prerequisite of having carried out the nondestructive test to the material, can make the system to the test of bigger size sample relatively, realizes quick accurate measurement, has realized the scheme of quick calibration to the distance on antenna to the sample surface that awaits measuring.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.
FIG. 1 is a schematic diagram of a structural module of a microwave electromagnetic parameter three-dimensional test system according to the present application;
FIG. 2 is a block diagram of a three-dimensional motion platform of the microwave electromagnetic parameter three-dimensional test system of the present application;
FIG. 3 is a block diagram of another angular three-dimensional motion platform of the microwave electromagnetic parameter three-dimensional test system of the present application;
FIG. 4 is a block diagram of a portion of the components of the three-dimensional motion platform of the microwave electromagnetic parameter three-dimensional test system of the present application;
FIG. 5 is a flow chart of the microwave electromagnetic parameter three-dimensional testing system of the present application.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-5, a microwave electromagnetic parameter three-dimensional test system is provided, which comprises a PC control terminal, a three-axis motion controller, a three-dimensional motion platform, a vector network analyzer, an antenna measuring device and a ranging module; the PC control end is respectively connected with the three-axis motion controller and the vector network analyzer and used for acquiring data of the vector network analyzer and controlling the three-axis motion controller according to different commands; the three-axis motion controller is used for controlling the overall operation of the three-dimensional motion platform according to the command of the PC control end; the vector network analyzer is connected with the antenna device and used for providing sweep frequency signals for the antenna measuring device and measuring electromagnetic fields at different spatial positions; the antenna measuring device is positioned on the three-dimensional motion platform, can move to different spatial positions of the three-dimensional motion platform and measures a sample to be measured; the distance measurement module is connected with the three-axis motion controller and used for collecting the position of a sample to be measured in the system and ensuring that the antenna measurement device accurately measures the distance to the surface of the sample to be measured. Specifically, as shown in fig. 1, the vector network analyzer includes a swept-frequency signal source, and the three-axis motion controller is equivalent to the motherboard controller shown in fig. 1.
In some embodiments, the three-dimensional motion platform comprises an X-axis moving platform 2, a Y-axis moving platform 2, and a Z-axis lifting platform 3, and the antenna measuring device comprises an excitation antenna and a detection antenna, wherein,
the X-axis moving platform 2 is connected with the Y-axis moving platform 2, the X-axis moving platform 2 is connected with the Z-axis lifting platform 3, and the three-axis motion controller is respectively connected with the X-axis moving platform 2, the Y-axis moving platform 1 and the Z-axis lifting platform 3 to realize the motion of any track in three-dimensional space;
a sample table is arranged below the Z-axis lifting platform 3, the excitation antenna is located below the sample table 5, the detection antenna is located on the Z-axis lifting platform 3, and the vector network analyzer is connected with the excitation antenna and the detection antenna and used for exciting and testing a sample to be tested on the sample table 5. Specifically, as shown in fig. 1, the excitation antenna, the detection antenna, the sample to be measured, and the motherboard controller may form a three-dimensional sweep test platform as shown in fig. 1, and the detection antenna and the ranging module are located on the Z-axis uniform lifting platform 3 and on the same horizontal plane.
In some embodiments, the three-dimensional motion platform comprises a servo actuator capable of moving along an X-axis, a Y-axis, and a Z-axis of preset coordinates, wherein,
the servo execution mechanism is connected with the three-axis motion controller and used for obtaining motion instructions of the three-axis motion controller, the servo execution mechanism comprises motion execution mechanisms of an X-axis moving platform 2, a Y-axis moving platform 1 and a Z-axis lifting platform 3, and the motion execution mechanisms are connected with the three-axis motion controller and respectively execute X, Y, Z-axis motion.
In some embodiments, the device further comprises a platform frame, the servo actuators are all motors, the X-axis moving platform can slide along the Y-axis moving platform to move back and forth, the Z-axis moving platform can slide along the X-axis moving platform to move up and down, wherein,
the Y-axis moving platform comprises at least one group of first screw rods symmetrically arranged at the top of the platform rack, and a first horizontal sliding rail is arranged on the edge of each first screw rod along the length direction of the first screw rod;
the X-axis moving platform comprises a second screw rod which is perpendicular to the first horizontal screw rod and is arranged in a sliding mode, a first sliding block which is matched with the horizontal sliding rail is fixedly arranged below the second screw rod, and a second horizontal sliding rail which is arranged along the length direction of the second screw rod is arranged at the upper part of the second screw rod;
the Z-axis moving platform comprises a second sliding block matched with a second horizontal sliding rail, a third screw rod device in the vertical direction is fixedly arranged on the sliding block, and the distance measuring module is installed at the lower end of the third screw rod device.
In some embodiments, the three-axis motion controller comprises a motor port and an LRF precision adjusting port, wherein the motor port is used for being connected with a motion executing mechanism in the X, Y, Z axis direction, the LRF precision adjusting port is connected with a ranging module, the ranging module is installed at the lower end part of the Z-axis lifting platform, and the ranging module is further provided with an adjusting knob used for adjusting the installation inclination degree of the ranging module. Specifically, 4 motor ports, 3 Limit ports and LRF precision adjustment port, wherein, 4 motor ports be used for with X, Y, Z epaxial motor is connected, and 3 Limit ports are connected with 6 stop device that move, and LRF precision adjustment port and ranging module are connected. The DC24V of the mainboard controller is connected to a 24-volt direct-current input, the USB port is connected to the USB port of the computer, and the controller is communicated with the USB port through a built-in software platform of the computer to realize the operations of moving, calibrating and the like; the mainboard controller also comprises an EMS port which is used for connecting the emergency stop of the emergency stop switch control platform, and the EMS port is connected with an emergency stop switch 7 arranged on the platform frame; the plane at the bottom of the frame is used for placing a sample to be tested; specifically, the excitation antenna is fixed at the bottom of the rack and excites the sample from the lower part or the side edge; as a detection antenna, fixed on the guide rail shown in the figure; the controller controls the motion of the guide rails to detect different positions or different heights. The structure diagram of the motherboard controller circuit is as above, and the track zero setting module is used for setting the zero point of the distance adjusting module.
In some embodiments, the PC control end comprises a computer control platform built in a computer and developed based on a programming environment. Specifically, the computer control platform can enable the computer to be built in and can be developed based on LabVIEW or Python and C language programming environment.
The application also provides a testing method of the microwave electromagnetic parameter three-dimensional testing system, which is based on the microwave electromagnetic parameter three-dimensional testing system and comprises the following steps:
the test system acquires three-dimensional motion data, processes the acquired data to obtain motion instructions and motion path data which can be executed by the three-axis motion controller, and then sends the data to the three-dimensional motion platform to execute three-dimensional motion, thereby realizing three-dimensional test.
In some embodiments, a network analyzer sends scanning area parameters of a three-dimensional motion platform to a PC control end, the PC control end sends motion information of the scanning area parameters to a three-axis controller, and the three-axis controller controls the three-dimensional motion platform to move, so as to drive a distance measurement module located on the three-dimensional motion platform to perform distance collection and adjustment, thereby realizing three-dimensional testing of a sample to be tested by an antenna measurement device.
In some embodiments, the method comprises:
the distance measurement module is used for collecting distance;
the distance measurement module and the sample to be measured realize accurate measurement: and controlling the Z-axis lifting platform to move along the Z axis, changing the distance between the sample to be detected and the detection antenna, and driving the detection antenna to move by the Z-axis lifting platform until the detection antenna accurately measures the distance from the surface of the sample to be detected and stops moving.
In some embodiments, further comprising:
(1) establishing a microwave electromagnetic parameter three-dimensional test system, starting a network analyzer, a three-axis motion controller, a three-dimensional motion platform and a computer, and starting each task;
(2) initializing equipment, and automatically returning the platform to zero to correct a mechanical zero point;
(3) placing a sample to be detected on a sample table;
(4) setting a relative zero position of a sample to be detected;
(5) adjusting the three-dimensional motion platform and the distance acquisition module to meet the requirement that the antenna measuring device accurately measures the distance to the surface of the sample to be measured;
in some embodiments, further comprising:
(S1) scanning area parameters are preset in a computer control platform developed based on LabVIEW or Python and C language programming environment, and the method specifically comprises the following steps: a starting coordinate X _ start of an X axis of a scanning area, an end coordinate X _ stop of the X axis, a step length dx of the X axis in the scanning area, a starting coordinate Y _ start of a Y axis of the scanning area, an end coordinate Y _ stop of the Y axis of the scanning area, a length dy of the X axis in the scanning area and a distance H0 between a detection antenna and a lower sample stage are specified;
(S2) generating location information of N location points according to the preset scanning area parameter, where N is used to represent the location information of the nth location point, and the initial value N is 1;
(S3) measuring a height h1 of the ranging module from the sample stage using the ranging module at this time;
(S4) controlling the Z-axis moving platform of the three-dimensional moving platform to move upwards to lift the detection antenna by a distance d, and measuring the height h2 from the sample platform by using a ranging module;
(S5) calculating a tilt coefficient at this time α ═ (h2-h 1)/d;
(S16) determining N < N or N ═ N;
(S7) if not, continuing to control the Z-axis moving platform of the three-dimensional moving platform to move upwards to drive
Detecting the lifting distance of the antenna, returning the initial position of which the inner n is 1, and processing data display images by the computer control platform according to the intensity and phase information acquired by each position point;
if yes, (S8) moves to the position of the nth point, where N is N +1, and the process skips to step S6 to loop to determine that N is greater than N.
In some embodiments, step S8 further includes:
(S81) if N is less than N or equal to N, controlling the three-dimensional motion platform to move to the position of the nth point;
(S82) measuring a height H1 from the sample stage by using a distance measuring adjustment device, and calculating a movement distance D ═ H1-H0)/a;
(S83) controlling the Z-axis moving platform of the three-dimensional moving platform to move downwards to drive the detection antenna to move downwards for a distance D, and measuring the height H2 from the sample stage by using a distance measuring and adjusting device;
(S84) making a decision-0.05 < H2-H0<0.05, if yes, obtaining intensity and phase information from the network analyzer, raising the probe antenna by a distance, n is n +1, returning to step S81 to make a loop decision, if no, directly jumping to step S82. This makes it possible to set the range of the error distance.
In some embodiments, step S83, if the condition-0.05 < H2-H0<0.05 is not satisfied, further comprises: and (4) judging whether the global tilt coefficient is used, if so, returning to the step (S82), otherwise, recalculating the tilt coefficient alpha (H1-H2)/D, and returning to the step (16). This step thus makes it possible to choose whether a uniform tilt factor is required throughout the measurement.
Through the above-mentioned arbitrary combination, this application lets the measuring antenna reach each point that needs to measure, then carries out the fast calibration to the distance of antenna to the sample surface that awaits measuring below, can realize that this distance value error is positive and negative within 0.05mm, guaranteed that electromagnetic field measured data does not receive this distance value change and produce the influence, also protected antenna and sample surface that awaits measuring simultaneously to avoid because the plane of below has unevenness's structure or the below plane is that the slope is placed and influence electromagnetic field measured data and device safety.
Claims (13)
1. The microwave electromagnetic parameter three-dimensional test system is characterized by comprising
The system comprises a PC control end, a three-axis motion controller, a three-dimensional motion platform, a vector network analyzer, an antenna measuring device and a distance measuring module; wherein,
the PC control end is respectively connected with the three-axis motion controller and the vector network analyzer and is used for acquiring data of the vector network analyzer and controlling the three-axis motion controller according to different commands;
the three-axis motion controller is used for controlling the overall operation of the three-dimensional motion platform according to the command of the PC control end;
the vector network analyzer is connected with the antenna device and is used for providing a frequency sweeping signal for the antenna measuring device and measuring electromagnetic fields at different spatial positions;
the antenna measuring device is positioned on the three-dimensional motion platform and can move to different spatial positions of the three-dimensional motion platform to measure a sample to be measured;
the distance measuring module is connected with the three-axis motion controller and used for ensuring that the antenna measuring device accurately measures the distance to the surface of the sample to be measured.
2. The microwave electromagnetic parameter three-dimensional test system according to claim 1, wherein the three-dimensional motion platform comprises an X-axis moving platform (2), a Y-axis moving platform (1) and a Z-axis lifting platform (3), the antenna measuring device comprises an excitation antenna and a detection antenna, wherein,
the X-axis moving platform (2) is connected with the Y-axis moving platform (1), the X-axis moving platform (2) is connected with the Z-axis lifting platform (3), and the three-axis motion controller is respectively connected with the X-axis moving platform (2), the Y-axis moving platform (1) and the Z-axis lifting platform (3) to realize the motion of any three-dimensional space track;
the device is characterized in that a sample table (5) is arranged below the Z-axis lifting platform (3), the exciting antenna is located below the sample table, the detecting antenna is located on the Z-axis lifting platform (3), the vector network analyzer is connected with the exciting antenna and the detecting antenna, and is used for exciting and testing a sample to be tested on the sample table.
3. The microwave electromagnetic parameter three-dimensional test system according to claim 2, wherein the three-dimensional motion platform comprises a servo actuator capable of moving along X-axis, Y-axis, and Z-axis of preset coordinates,
servo actuating mechanism with three-axis motion controller connects for obtain three-axis motion controller's motion instruction, servo actuating mechanism includes X axle moving platform, Y axle moving platform and Z axle lift platform's motion actuating mechanism, all with three-axis motion controller connects, carries out X, Y, Z axle's motion respectively.
4. The microwave electromagnetic parameter three-dimensional test system according to claim 3, further comprising a platform frame (4), wherein the servo actuators are motors, the X-axis moving platform (2) can slide along the Y-axis moving platform (1) to move back and forth, the Z-axis lifting platform (3) can slide along the X-axis moving platform (2) to move up and down,
the Y-axis moving platform comprises at least one group of first screw rods symmetrically arranged at the top of the platform rack, and a first horizontal sliding rail is arranged on each first screw rod along the edge of the first screw rod in the length direction;
the X-axis moving platform (2) comprises a second screw rod which is perpendicular to the first horizontal screw rod and is arranged in a sliding mode, a first sliding block which is matched with the horizontal sliding rail is fixedly arranged below the second screw rod, and a second horizontal sliding rail along the length direction of the second screw rod is arranged at the upper part of the second screw rod;
the Z-axis lifting platform (3) comprises a second sliding block matched with the second horizontal sliding rail, a third screw rod device in the vertical direction is fixedly arranged on the sliding block, and the distance measuring module is installed at the lower end of the third screw rod device.
5. The microwave electromagnetic parameter three-dimensional testing system according to claim 3, wherein the three-axis motion controller includes a motor port and an LRF precision adjusting port, wherein the motor port is used for connecting with the motion executing mechanism in the X, Y, Z axis direction, the LRF precision adjusting port is connected with a ranging module, the ranging module is installed at the lower end of the Z-axis lifting platform and the detecting antenna are located on the same horizontal plane, and the ranging module is further provided with an adjusting knob for adjusting the installation inclination degree of the ranging module.
6. The microwave electromagnetic parameter three-dimensional test system according to claim 1,
the PC control end comprises a computer control platform which is built in a computer and developed based on a programming environment.
7. The testing method of the microwave electromagnetic parameter three-dimensional testing system is characterized in that the microwave electromagnetic parameter three-dimensional testing system based on any one of claims 1 to 6 comprises the following steps:
the test system acquires three-dimensional motion data, processes the acquired data to obtain motion instructions and motion path data which can be executed by the three-axis motion controller, and then sends the data to the three-dimensional motion platform to execute three-dimensional motion, thereby realizing three-dimensional test.
8. The testing method of the microwave electromagnetic parameter three-dimensional testing system according to claim 7, wherein the network analyzer sends the parameters of the scanning area of the three-dimensional motion platform to the PC control end, the PC control end sends the motion information of the parameters of the scanning area to the three-axis controller, and the three-axis controller controls the three-dimensional motion platform to move, so as to drive the ranging module located on the three-dimensional motion platform to perform distance collection and adjustment, thereby realizing the three-dimensional testing of the antenna measuring device on the sample to be tested.
9. The method for testing the microwave electromagnetic parameter three-dimensional test system according to claim 8, comprising:
the distance measurement module is used for collecting distance;
the detection antenna and the sample to be measured realize accurate measurement: the distance measurement module is used for sending the position information of the detection antenna to the PC control end through the three-axis motion controller, the PC control end controls the three-dimensional motion platform to move through the three-axis motion controller, the distance between the sample to be measured and the detection antenna is changed, and the movement is stopped until the detection antenna accurately measures the distance to the surface of the sample to be measured.
10. The method for testing the microwave electromagnetic parameter three-dimensional test system according to claim 9, further comprising:
(1) establishing a microwave electromagnetic parameter three-dimensional test system, starting a network analyzer, a three-axis motion controller, a three-dimensional motion platform and a computer, and starting each task;
(2) initializing equipment, and automatically returning the platform to zero to correct a mechanical zero point;
(3) placing a sample to be detected on a sample table;
(4) setting a relative zero position of a sample to be detected;
(5) and adjusting the three-dimensional motion platform and the distance acquisition module to meet the requirement that the antenna measuring device accurately measures the distance to the surface of the sample to be measured.
11. The method for testing the microwave electromagnetic parameter three-dimensional test system according to claim 9, further comprising:
(S1) presetting scanning area parameters in a computer control platform developed based on a program programming environment, and designating a distance H0 between a probe antenna and a lower sample stage;
(S2) generating location information of N location points according to the preset scanning area parameter, where N is used to represent the location information of the nth location point, and the initial value N is 1;
(S3) measuring a height h1 of the ranging module from the sample stage using the ranging module at this time;
(S4) controlling the Z-axis moving platform of the three-dimensional moving platform to move upwards to lift the detection antenna by a distance d, and measuring the height h2 from the sample platform by using a ranging module;
(S5) calculating a tilt coefficient at this time α ═ (h2-h 1)/d;
(S16) determining N < N or N ═ N;
(S7) if not, continuing to control the Z-axis moving platform of the three-dimensional moving platform to move upwards to drive the detection antenna to lift the distance, returning the initial position with the inner n equal to 1, and processing data display images by the computer control platform according to the intensity and phase information acquired by each position point;
(S8) if yes, controlling the three-dimensional motion platform to move to the position of the nth point, where N is N +1, and jumping to step S6 to perform loop judgment until N is greater than N.
12. The method for testing the microwave electromagnetic parameter three-dimensional test system according to claim 11, wherein the step S8 further comprises:
(S81) if N is less than N or equal to N, controlling the three-dimensional motion platform to move to the position of the nth point;
(S82) measuring a height H1 from the sample stage by using a distance measuring adjustment device, and calculating a movement distance D ═ H1-H0)/a;
(S83) controlling the Z-axis moving platform of the three-dimensional moving platform to move downwards to drive the detection antenna to move downwards for a distance D, and measuring the height H2 from the sample stage by using a distance measuring and adjusting device;
(S84) making a decision-0.05 < H2-H0<0.05, if yes, obtaining intensity and phase information from the network analyzer, raising the probe antenna by a distance, n is n +1, returning to step S81 to make a loop decision, if no, directly jumping to step S82.
13. The method for testing the microwave electromagnetic parameter three-dimensional test system according to claim 12, wherein the step S83, if the condition-0.05 < H2-H0<0.05 is not satisfied, further comprises: and (4) judging whether the global tilt coefficient is used, if so, returning to the step (S82), otherwise, recalculating the tilt coefficient alpha (H1-H2)/D, and returning to the step (16).
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