CN112086852A - 500W-level high-coupling-efficiency optical fiber output nanosecond pulse laser - Google Patents
500W-level high-coupling-efficiency optical fiber output nanosecond pulse laser Download PDFInfo
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- CN112086852A CN112086852A CN202011073356.XA CN202011073356A CN112086852A CN 112086852 A CN112086852 A CN 112086852A CN 202011073356 A CN202011073356 A CN 202011073356A CN 112086852 A CN112086852 A CN 112086852A
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 50
- 230000008878 coupling Effects 0.000 claims abstract description 62
- 238000010168 coupling process Methods 0.000 claims abstract description 62
- 238000005859 coupling reaction Methods 0.000 claims abstract description 62
- 230000005540 biological transmission Effects 0.000 claims abstract description 9
- 230000003287 optical effect Effects 0.000 claims abstract description 8
- 239000000835 fiber Substances 0.000 claims description 26
- 239000013078 crystal Substances 0.000 claims description 16
- 238000002310 reflectometry Methods 0.000 claims description 9
- 238000005086 pumping Methods 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 description 20
- 238000013461 design Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0071—Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1123—Q-switching
- H01S3/117—Q-switching using intracavity acousto-optic devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1123—Q-switching
- H01S3/127—Plural Q-switches
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
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Abstract
The invention discloses a 500W-level high-coupling-efficiency optical fiber output nanosecond pulse laser which comprises a main oscillator, a spatial light path adjusting system and an optical fiber coupling module, wherein the main oscillator, the spatial light path adjusting system and the optical fiber coupling module are sequentially arranged along an optical path; the master oscillator sequentially comprises a plane reflector, a first acousto-optic Q-switching module, a laser module, a second acousto-optic Q-switching module and a plane output mirror along an optical path; the spatial light path adjusting system comprises a first 45-degree reflecting mirror and a second 45-degree reflecting mirror; the optical fiber coupling module comprises an optical fiber coupling lens, a laser focus three-dimensional adjusting device and an energy transmission optical fiber. The invention can realize stable optical fiber coupling efficiency in a high-power range, and solves the problem that the quality of a laser beam is rapidly deteriorated along with the improvement of output power, so that the optical fiber coupling efficiency is reduced in the traditional symmetrical resonant cavity.
Description
[ technical field ] A method for producing a semiconductor device
The invention belongs to the technical field of lasers, and particularly relates to a 500W-level high-coupling-efficiency fiber output nanosecond pulse laser.
[ background of the invention ]
Laser cleaning is an efficient, environment-friendly, flexible and easy-to-operate green cleaning technology, is widely applied to cleaning of various pollutants such as rubber, oil stain, paint, rust and the like on the surface of a metal mold at present, and increasingly shows wide application prospects in cleaning of large-scale mechanical equipment such as ships, airplanes and trains. The use of the optical fiber coupling output technology greatly improves the flexibility of laser cleaning and widely expands the application scene of laser cleaning. The flexible transmission of the laser in the optical fiber can realize flexible manual handheld operation and intelligent full-automatic operation. Therefore, the laser cleaning device is suitable for flexible manual cleaning of small equipment and efficient and safe full-automatic cleaning of large equipment.
The performance of the laser, which is the most central component of the laser cleaning equipment, has a crucial influence on the laser cleaning effect, which mainly includes the output power, energy, pulse width, peak power, repetition frequency, etc. of the laser. Meanwhile, the laser cleaning adopts the optical fiber coupling output technology, so that the beam quality of the laser has very important influence on the efficiency of optical fiber coupling. However, the conventional solid laser for laser cleaning has the problems of poor beam quality, serious deterioration of the beam quality along with the increase of the pumping power and the like, which seriously affects the efficiency of laser coupling into the optical fiber under high power and the efficiency of the whole laser system, and even damages the optical fiber device due to excessively low coupling efficiency.
From the technical aspect, the traditional solid laser for laser cleaning mainly adopts a symmetrical resonant cavity design, and a significant problem of the structure is that the beam quality of laser is obviously reduced along with the increase of pumping power. However, for a fiber coupling system, the parameters are basically determined, and it is difficult to realize on-line arbitrary adjustment, such as the focal length of the lens of the coupling system, the core diameter of the fiber, the numerical aperture of the fiber core, and the like. Therefore, the quality of the laser beam output from the resonant cavity is changed, which inevitably results in the reduction of the coupling efficiency of the optical fiber under the condition of the determination of the coupling system. Generally, the conventional solid laser for laser cleaning ensures high fiber coupling efficiency within a certain power range mainly by adjusting parameters, which greatly limits the power flexibility and practicability of the laser cleaning system.
In summary, although the existing laser resonator structure design can obtain a high-power and high-energy laser cleaning light source, the problem that the quality of a light beam is changed due to power adjustment and further the coupling efficiency of an optical fiber is reduced is still not effectively solved. Therefore, there is a need to improve the structural design of the existing laser resonator to improve the quality of the laser beam in the high power range and further improve the coupling efficiency of the optical fiber, thereby providing an efficient and stable laser light source for the laser cleaning system.
[ summary of the invention ]
The invention mainly aims to provide a 500W-level nanosecond pulse laser with high power, high beam quality and high optical fiber coupling efficiency based on an asymmetric resonant cavity structure design, which can obtain stable optical fiber coupling efficiency in a high-power range and solve the problem that the laser beam quality is rapidly deteriorated along with the increase of output power and the optical fiber coupling efficiency is further reduced in the traditional symmetric resonant cavity.
The invention realizes the purpose through the following technical scheme: A500W-level high-coupling-efficiency fiber output nanosecond pulse laser comprises a main oscillator, a spatial light path adjusting system and a fiber coupling module which are sequentially arranged along an optical path; the master oscillator sequentially comprises a plane reflector, a first acousto-optic Q-switching module, a laser module, a second acousto-optic Q-switching module and a plane output mirror along an optical path; the spatial light path adjusting system comprises a first 45-degree reflecting mirror and a second 45-degree reflecting mirror; the optical fiber coupling module comprises an optical fiber coupling lens, a laser focus three-dimensional adjusting device and an energy transmission optical fiber.
Preferably, the plane mirror has high reflectivity to signal light, and the reflectivity of the plane mirror is greater than 99%.
Preferably, the laser module comprises a pump light source and a laser crystal; the output wavelengths of the pump light sources comprise 808nm, 940nm and 969 nm; the laser crystal is Nd: YAG or Yb: YAG, the crystal diameter is 4-10 mm, and the crystal length is 100-150 mm.
Preferably, the first acousto-optic Q-switching module and the second acousto-optic Q-switching module are vertically arranged in the laser cavity to achieve the best Q-switching effect.
Preferably, the distance between the front end surface of the laser crystal and the plane reflector along the light path is 100-200 mm.
Preferably, the distance between the rear end face of the laser crystal and the plane output mirror along the light path is 150-300 mm.
Preferably, the reflectivity of the planar output mirror to the signal light is 60% to 90%.
Preferably, the wavelength of the output laser light of the master oscillator is 1030nm or 1064 nm.
Preferably, the first 45-degree reflector and the second 45-degree reflector are highly reflective to laser, and the reflectivity in the 45-degree direction is greater than 99%.
Preferably, the focal length of the fiber coupling lens depends on the size of the light spot according to the core diameter of the energy transmission fiber, and the focal length ranges from 30 mm to 70mm, such as 40mm, 50mm, and 60 mm. So as to obtain the best laser coupling efficiency under the coupling output optical fibers with different core diameters.
Preferably, the three-dimensional laser focus adjusting device can realize precise adjustment of the laser focus to obtain good optical fiber coupling efficiency.
Preferably, the core diameter range of the energy transmission optical fiber is 200-1000 μm, typical values are 200 μm, 400 μm, 500 μm and 600 μm, typical values of the corresponding fiber core numerical aperture NA are 0.22 and 0.12, and different optical fiber core diameters meet different laser cleaning requirements, such as different spot sizes, different focal depth requirements and the like.
Compared with the prior art, the 500W-level high-coupling-efficiency optical fiber output nanosecond pulse laser has the beneficial effects that: the nanosecond pulse laser is designed based on an asymmetric resonant cavity structure, the resonant cavity is high in output beam quality, stable optical fiber coupling efficiency in a high-power range can be achieved, and the coupling efficiency is larger than 94% in the whole adjustable power range, so that the efficiency and stability of the whole laser system are improved, and a better processing effect in actual laser cleaning application is achieved. In particular, the method comprises the following steps of,
1) the main oscillator in the scheme adopts an asymmetric dynamic stable cavity design, the beam quality of laser output by the resonant cavity is good, and the beam quality cannot obviously deteriorate along with the change of pumping power;
2) the laser has good beam quality of output laser and high stability, ensures that extremely high optical fiber coupling efficiency can be realized under different output powers, and effectively solves the problem that the conventional symmetrical resonant cavity structure is rapidly deteriorated due to the fact that the beam quality is improved along with the output power, and the optical fiber coupling efficiency is reduced;
3) the laser has simple structure, no complicated interstage beam shaping and light path coupling system and high stability.
[ description of the drawings ]
FIG. 1 is a schematic structural diagram of an embodiment of the present invention;
FIG. 2 is a graph of measured fiber coupling efficiency according to an embodiment of the present invention;
FIG. 3 is a graph showing the results of measuring the coupling efficiency of optical fibers of comparative examples in examples of the present invention;
the figures in the drawings represent:
1. a plane mirror; 2. a first acousto-optic Q-switch module; 3. a laser module; 4. a second acousto-optic Q-switching module; 5. a planar output mirror; 6. a first 45 ° mirror; 7. a second 45 ° mirror; 8. a fiber coupling lens; 9. a laser focus three-dimensional adjusting device; 10. an energy transmission fiber.
[ detailed description ] embodiments
The first embodiment is as follows:
referring to fig. 1, the nanosecond pulse laser with high power, high beam quality, and high fiber coupling efficiency designed based on the asymmetric resonant cavity structure in this embodiment includes a main oscillator, a spatial light path adjusting system, and a fiber coupling module sequentially disposed along an optical path. Wherein the master oscillator comprises in order along the optical path: the device comprises a plane reflector 1, a first acousto-optic Q-switching module 2, a laser module 3, a second acousto-optic Q-switching module 4 and a plane output mirror 5. The spatial light path adjusting system includes: a first 45 ° mirror 6, a second 45 ° mirror 7; the fiber coupling module includes: the device comprises an optical fiber coupling lens 8, a laser focus three-dimensional adjusting device 9 and an energy transmission optical fiber 10.
In this embodiment, the laser module 3 includes a 808nm semiconductor laser and a side-pumped Nd: YAG crystal, where the diameter of the Nd: YAG crystal is 5mm and the length is 165 mm.
In the embodiment, the distance between the front end face of the Nd: YAG crystal of the laser module 3 and the plane reflector 1 along the light path is 135mm, and the distance between the rear end face of the Nd: YAG crystal and the plane output mirror 6 along the light path is 190 mm;
in this embodiment, the reflectivity of the planar output mirror 6 is 70%, the wavelength of the laser output by the resonant cavity is 1064nm, and the pumping power is 1500W.
Through actual measurement, the output laser parameters of the master oscillator are as follows: the average power is 500W, the repetition frequency is 20kHz, the pulse width is 80ns, and the beam quality M2 factor is between 20 and 22.
The actual measurement result proves that in the nanosecond pulse laser with high power and high optical fiber coupling efficiency based on the asymmetric resonant cavity structure design, the pulse light power directly output by the main oscillator reaches 500W magnitude by optimizing the parameters of the asymmetric resonant cavity structure, the laser is guided into the energy transfer optical fiber through the optical fiber coupling module, the optical fiber coupling efficiency is high, and the optical fiber coupling efficiency is larger than 95% in the whole power range.
To further illustrate the excellent effect of the laser in this embodiment, we have conducted experimental tests on the beam quality of the laser output from the conventional symmetric cavity structure and the asymmetric cavity structure of the present invention, and the results are shown in fig. 2. Under the same pumping power, the quality of the light beam output by adopting the asymmetric cavity structure is better, and the average value of the light beam quality factor M2 is between 20 and 25. In contrast, the beam quality of the laser output from the conventional symmetric cavity structure is worse, and the beam quality factor M2 is greater than 30 and reaches 48 at the highest.
Meanwhile, the coupling efficiency of the optical fiber is tested, and the test result is shown in fig. 3. Within the power range output by the whole resonant cavity, the coupling efficiency of the optical fiber is higher than 95%, the coupling efficiency is very stable, and the problem that the coupling efficiency is sharply reduced due to overhigh power does not occur.
What has been described above are merely some embodiments of the present invention. It will be apparent to those skilled in the art that various changes and modifications can be made without departing from the inventive concept thereof, and these changes and modifications can be made without departing from the spirit and scope of the invention.
Claims (10)
1. A500W-level high-coupling-efficiency fiber output nanosecond pulse laser is characterized in that: the optical fiber coupling device comprises a main oscillator, a spatial light path adjusting system and an optical fiber coupling module which are sequentially arranged along an optical path; the master oscillator sequentially comprises a plane reflector, a first acousto-optic Q-switching module, a laser module, a second acousto-optic Q-switching module and a plane output mirror along an optical path; the spatial light path adjusting system comprises a first 45-degree reflecting mirror and a second 45-degree reflecting mirror; the optical fiber coupling module comprises an optical fiber coupling lens, a laser focus three-dimensional adjusting device and an energy transmission optical fiber.
2. The 500W stage high coupling efficiency fiber output nanosecond pulse laser as recited in claim 1, wherein: the reflectivity of the plane reflector is more than 99%.
3. The 500W stage high coupling efficiency fiber output nanosecond pulse laser as recited in claim 1, wherein: the laser module comprises a pumping light source and a laser crystal; the output wavelength of the pump light source is 808nm, 940nm or 969 nm; the laser crystal is Nd: YAG or Yb: YAG, the crystal diameter is 4-10 mm, and the crystal length is 100-150 mm.
4. The 500W stage high coupling efficiency fiber output nanosecond pulse laser as recited in claim 1, wherein: the first acousto-optic Q-switching module and the second acousto-optic Q-switching module are vertically arranged in the laser cavity.
5. A 500W stage high coupling efficiency fiber output nanosecond pulse laser, as set forth in claim 3, wherein: the distance between the front end face of the laser crystal and the plane reflector along the light path is 100-200 mm.
6. A 500W stage high coupling efficiency fiber output nanosecond pulse laser, as set forth in claim 3, wherein: the distance between the rear end face of the laser crystal and the plane output mirror along the light path is 150-300 mm.
7. The 500W stage high coupling efficiency fiber output nanosecond pulse laser as recited in claim 1, wherein: the reflectivity of the plane output mirror to the signal light is 60% -90%.
8. The 500W stage high coupling efficiency fiber output nanosecond pulse laser as recited in claim 1, wherein: the wavelength of the laser output by the master oscillator is 1030nm or 1064 nm.
9. The 500W stage high coupling efficiency fiber output nanosecond pulse laser as recited in claim 1, wherein: the 45-degree directional reflectivity of the first 45-degree reflector and the 45-degree directional reflectivity of the second 45-degree reflector are both greater than 99%.
10. The 500W stage high coupling efficiency fiber output nanosecond pulse laser as recited in claim 1, wherein: the focal length of the optical fiber coupling lens is 30-70 mm, and the core diameter range of the energy transmission optical fiber is 200-1000 mu m.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009238983A (en) * | 2008-03-27 | 2009-10-15 | Ihi Corp | Laser resonator |
| CN103107480A (en) * | 2013-01-31 | 2013-05-15 | 北京工业大学 | 266 nm full solid state ultraviolet laser for material elaborate processing |
| CN103887694A (en) * | 2014-04-10 | 2014-06-25 | 中国科学院半导体研究所 | All-solid-state quasi-continuous laser having single-stage oscillation and multiple-stage amplifying functions |
| CN111370986A (en) * | 2020-03-19 | 2020-07-03 | 神锋(苏州)激光科技有限公司 | Kilowatt-level optical fiber output nanosecond pulse laser |
| CN212725944U (en) * | 2020-10-09 | 2021-03-16 | 神锋(苏州)激光科技有限公司 | 500W-level high-coupling-efficiency optical fiber output nanosecond pulse laser |
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- 2020-10-09 CN CN202011073356.XA patent/CN112086852A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009238983A (en) * | 2008-03-27 | 2009-10-15 | Ihi Corp | Laser resonator |
| CN103107480A (en) * | 2013-01-31 | 2013-05-15 | 北京工业大学 | 266 nm full solid state ultraviolet laser for material elaborate processing |
| CN103887694A (en) * | 2014-04-10 | 2014-06-25 | 中国科学院半导体研究所 | All-solid-state quasi-continuous laser having single-stage oscillation and multiple-stage amplifying functions |
| CN111370986A (en) * | 2020-03-19 | 2020-07-03 | 神锋(苏州)激光科技有限公司 | Kilowatt-level optical fiber output nanosecond pulse laser |
| CN212725944U (en) * | 2020-10-09 | 2021-03-16 | 神锋(苏州)激光科技有限公司 | 500W-level high-coupling-efficiency optical fiber output nanosecond pulse laser |
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