CN112083364A - Microwave field and temperature field array type quantitative test system and method - Google Patents
Microwave field and temperature field array type quantitative test system and method Download PDFInfo
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- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/20—Arrangements or instruments for measuring magnetic variables involving magnetic resonance
- G01R33/24—Arrangements or instruments for measuring magnetic variables involving magnetic resonance for measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/26—Arrangements or instruments for measuring magnetic variables involving magnetic resonance for measuring direction or magnitude of magnetic fields or magnetic flux using optical pumping
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Abstract
The invention discloses a microwave field and temperature field array type quantitative test system and a method, wherein the system comprises a laser pulse generator, a beam splitter, a microwave signal generator, a pulse signal generator, a dichroic mirror, a first objective lens, a second objective lens, a fluorescence detection device, a scanning device and a computer; the pulse signal generator, the fluorescence detection device and the scanning device are respectively and electrically connected with a computer; the laser pulse generating device and the microwave signal generating device are respectively and electrically connected with the pulse signal generator. The laser pulse signal generated by the laser pulse generating device is split by the beam splitter, the split laser passes through the dichroic mirror and the first objective lens in sequence and is projected to the scanning device containing the diamond NV color center array, and the fluorescence detection device analyzes the intensity of fluorescence generated by the diamond and returned by the dichroic mirror and the first objective lens. The invention also provides a quantitative test method based on the system. The invention can greatly improve the speed of the quantitative measurement of the microwave field and the temperature field.
Description
Technical Field
The invention relates to a microwave field and temperature field testing system and method, in particular to a microwave field and temperature field array type quantitative testing system and method.
Background
The NV color center is a defect with fluorescence characteristic formed by a Nitrogen atom (Nitrogen) replacing a carbon atom and an adjacent Vacancy (Vacancy) in diamond, can sense the strength of a magnetic field on the surface of a chip, can provide resolution up to a nanometer level, and has the characteristics of small volume, long decoherence time and the like. It has two well-characterized charged states: neutral (NV)0) Or negatively charged (NV)-NV color center for short). The NV colour center has a relatively long spin lifetime under normal circumstances, can be polarized and optically read using a green laser, and the spin sub-levels can be manipulated by a pulsed microwave field. The NV color center has a structure of C3vSymmetry with two unpaired electronic states in the ground state: (3A2) And an excited state (3E) Is a spin triplet (S ═ 1) with spin levels ms ═ 0, ± -1. Under the excitation of the spin-conserving laser, the excited state ms-0 spontaneously returns to the ground state ms-0, whereas the state ms-1 has two possible decay paths, one of which is the radiative transition to the state ms-1 or the non-radiative transition to the state ms-0 through intersystem crossing. In the latter case, with a 30% probability, the excited state of ms ± 1 decays first to the metastable singlet state and then to the ground state ms 0. The ground state of the NV centre has a zero field split of 2.87GHz between the ms-0 and ms-1 states at room temperature due to spin interactions. When an external magnetic field is applied, the degeneracy of the ms ═ 1 spin state is improved by the zeeman effect, which is shown by the fact that the resonance peak distance is enlarged on the ODMR spectrum. By adjusting the relative orientation of the external magnetic field and the four crystal NV axes, a total of eight microwave dipole transitions in the ground state can be observed by Optical Detection Magnetic Resonance (ODMR) techniques. The transition between the state of ms 0 and the state of ms +1 or the state of ms-1 is magnetic dipole transition, which forms a quantum two-energy level system, and the resonant microwave magnetic field drives closed loop Rabi circulation on the Bloch sphere. In addition, when the temperature changes, the central frequency D of the NV color center zero field increases with decreasing temperature; on the contrary, it decreases with the increase of temperature and has a linear variation characteristic, so that the temperature corresponding to the position to be measured can be obtained by only measuring the offset position of the central frequency of the ODMR.
The existing microwave field quantitative test system and method based on pulse modulation adopts a single conical optical fiber containing diamond as a sensor to carry out microwave field test, the efficiency is not high enough, and a large amount of time is consumed for one test.
Disclosure of Invention
The purpose of the invention is as follows: the invention provides a system for quickly and quantitatively measuring a microwave field and a temperature field. The invention also aims to provide a quantitative detection method based on the system.
The technical scheme is as follows: the invention relates to a microwave field and temperature field array type quantitative test system, which comprises: the device comprises a laser pulse generating device, a beam splitter, a microwave signal generating device, a pulse signal generator, a dichroic mirror, a first objective lens, a second objective lens, a fluorescence detecting device, a scanning device and a terminal, wherein the laser pulse generating device and the microwave signal generating device are respectively and electrically connected with the pulse signal generator; wherein the content of the first and second substances,
the laser pulse generating device is used for generating a laser pulse signal;
the beam splitter is used for splitting the generated laser pulse signal;
the microwave signal generating device is used for generating a modulation signal and a high-frequency microwave signal;
the pulse signal generator is used for generating TTL signals and controlling the laser pulse generating device and the microwave signal generating device;
the dichroic mirror is used for reflecting the split green laser and transmitting red fluorescence generated by the diamond NV color center array;
the first objective lens is used for focusing the split green laser reflected by the dichroic mirror and respectively entering each probe in the diamond NV color center array;
the second objective lens is used for focusing the red fluorescence which penetrates through the dichroic mirror to the fluorescence detection device;
the fluorescence detection device is used for analyzing the intensity of fluorescence generated by the diamond;
the scanning device comprises a diamond NV color center array and is used for scanning a device to be detected;
and the terminal is used for controlling the pulse signal generator, the fluorescence detection device and the scanning device.
The diamond NV color center array is adopted, which is equivalent to the same time period, and a plurality of sensors are used for scanning the same object. Therefore, when the quantitative test system scans the device to be tested, the device to be tested is equivalently divided into a plurality of regions to be tested, and the final scanning result is the splicing of the scanning results of the regions to be tested, so that the scanning speed is also in direct proportion to the number of probes contained in the array.
Further, the system of the invention also comprises an adjustable magnet for adding a magnetic field to the outside of the diamond during the microwave field test.
Further, the laser pulse generating device comprises a laser generator and an acousto-optic modulator, wherein the laser generator is used for generating laser, the acousto-optic modulator is used for enabling the laser generated by the laser generator to generate Bragg diffraction, generating diffraction spots of 0 order and +1 order (or-1 order), and only allowing the diffraction spots of 1 order to pass through so as to realize deflection and frequency and intensity modulation of the input laser beam.
Further, the microwave signal generating device is used for generating a modulation signal and a high-frequency microwave signal, and comprises a microwave source and a microwave switch, wherein the microwave source is used for generating a pulse microwave signal, and the microwave switch is used for amplitude modulating the pulse microwave signal so as to change the duty ratio of the microwave on-time and the microwave off-time.
Further, the diamond NV color center array adopts a conical fiber probe array.
Further, the diamond NV color center arrays need to be uniformly arranged according to the size of the device to be tested.
Further, the fluorescence detection device comprises an avalanche photodiode and a multi-channel data acquisition and analysis instrument, wherein the avalanche photodiode is used for collecting fluorescence signals, and the multi-channel data acquisition and analysis instrument is used for analyzing fluorescence generated by the diamond.
Furthermore, the system also comprises a displacement platform used for fixing the device to be tested, and the displacement platform controls the device to be tested to move and scan through a control box contained in the displacement platform.
The invention relates to a microwave field and temperature field array type quantitative test method, which comprises the following steps:
(1) the pulse signal generator generates TTL signals and controls the laser pulse generating device to generate laser pulse signals; simultaneously controlling a microwave signal generating device to generate a modulation signal and a high-frequency microwave signal to form a microwave field;
(2) the beam splitter splits the laser pulse signal;
(3) the N paths of split laser are reflected by a dichroic mirror, pass through a first objective lens and finally are focused at different conical optical fiber probes of a diamond NV color center array in a scanning device;
(4) red fluorescence generated by the diamond returns through the original N laser light paths, finally passes through the dichroic mirror and is focused to the fluorescence detection device through the second objective lens;
(5) the fluorescence detection device analyzes the intensity of fluorescence generated by the diamond.
When the microwave field is measured, the pulse width time of pulse microwaves is changed through a microwave switch, 8 centrosymmetric and mutually independent resonance peaks can be measured through the ODMR technology, resonance frequency points of the microwave field are obtained, the Rabi frequency measurement test is carried out on each resonance frequency point, the pull-ratio oscillation frequency of the sideband signals can be obtained, and the intensity of the microwave field is obtained through the pull-ratio oscillation frequency calculation. Because the invention adopts the diamond NV color center array, the microwave field intensity of the whole device to be tested can be obtained only by splicing the microwave field intensities obtained by calculating the test results of the probes.
When the temperature field is measured, the adjustable magnet needs to be moved away, Lorentz fitting operation is carried out on ODMR optical detection magnetic resonance spectrum data to obtain the central frequency D between two resonance peaks of the zero field, and the temperature of the current measuring point is obtained according to the change relation between the central frequency D and the measured temperature. Finally, the temperature field strength of the whole device to be tested can be obtained only by splicing the temperatures calculated by the test results of the probes.
The analysis of the fluorescence intensity generated by the diamond can be realized by the characteristics of reflecting green light and transmitting red light by the dichroic mirror, so that the quantitative test of the microwave field and the temperature field can be realized according to the NV color center property.
Has the advantages that: the invention greatly improves the speed of the quantitative measurement of the microwave field and the temperature field, and the measurement speed is positively correlated with the number of the probes in the array.
Drawings
FIG. 1 is a schematic block diagram of the structure of the microwave field and temperature field array type quantitative test system of the present invention;
FIG. 2 is a detailed view of the process of the method of the present invention;
FIG. 3 is a schematic diagram of a diamond NV color center array structure of the present invention.
Detailed Description
The technical solution of the present invention is further described below with reference to the accompanying drawings and examples.
Example 1
As shown in fig. 1, a microwave field and temperature field array quantitative test system comprises a laser pulse generator, a beam splitter 14, a microwave signal generator, a pulse signal generator 5, a fluorescence detector, a scanner and a computer 13; the pulse signal generator 5, the fluorescence detection device and the scanning device are respectively electrically connected with the computer 13; the laser pulse generating device and the microwave signal generating device are respectively and electrically connected with the pulse signal generator 5; the laser pulse generating device comprises a laser generator 1 and an acoustic optical modulator 2(AOM) for generating a laser pulse signal; the beam splitter 14 is used for splitting the laser; the microwave signal generating device comprises a microwave source 3 and a microwave switch 4, and is used for generating a modulation signal and a high-frequency microwave signal; the pulse signal generator 5 is used for generating TTL signals to control the laser pulse generating device and the microwave signal generating device; the scanning device comprises a conical optical fiber probe array 8 containing a diamond NV color center, a device to be detected 9, an adjustable magnet 10, a displacement platform 11 and a displacement platform control box 12, and is used for detecting a microwave field, the adjustable magnet 10 is used for applying a magnetic field, and the scanning device adopts a (2 x 2) array scheme and is used for scanning the device to be detected; the fluorescence detection device comprises a group (4) of Avalanche Photodiodes (APDs) 6 and a PXI platform 7 containing 4 spectrum analyzers for analyzing the fluorescence generated by the diamond; the displacement platform 11 is a two-dimensional electric control displacement platform 11, and a device to be tested is fixed on the displacement platform 11; the displacement platform 11 is controlled by the displacement platform control box 12 to perform moving scanning on the device to be tested 9.
The diamond NV color center array is placed inside an adjustable magnet (a three-dimensional coil), and when a microwave field is measured, the adjustable magnet applies a magnetic field to the outside of the diamond NV color center array, so that the magnetic field can be theoretically provided within the range of 0-10 GHz.
As shown in fig. 2, after the high-frequency microwave signal generated by the microwave source is modulated by the pulse modulation signal, the high-frequency microwave signal and the laser pulse signal generated by the laser pulse generating device pass through the beam splitter to generate 4 optical paths, and the optical paths are reflected by the dichroic mirror and focused by the objective lens onto different probes on the array. The NV color center diamond generates sideband fluorescence pulse signals under the resonance action of the pulse modulation signals and the laser pulse signals, a probe of the diamond generates red fluorescence, the red fluorescence returns through the original 4 light paths, and the red fluorescence is focused by the objective lens, collected by different APDs respectively and then transmitted to the PXI platform after passing through the objective lens. The pulse width time of pulse microwaves is changed through a microwave switch, 8 centrosymmetric and mutually independent resonance peaks can be measured through an ODMR technology to obtain resonance frequency points of a microwave field, the Rabi frequency measurement test is carried out on each resonance frequency point to obtain the pull-ratio oscillation frequency of the sideband signals, the microwave field intensity is obtained through the pull-ratio oscillation frequency calculation, and finally the four data are spliced to obtain the microwave field intensity of the whole device to be tested.
As shown in fig. 3, each tip size of the tapered fiber optic probe array 8 used matches the size of the corresponding NV colour center diamond; further, the diamond particle size is 10um, and the diameter of the end face of the tapered optical fiber is 15-20 um.
Example 2
A microwave field and temperature field array type quantitative test method comprises the following steps:
(1) the laser generator 1 generates a laser pulse signal with the wavelength of 532nm and the output power of 50 mW;
(2) the computer 13 controls the pulse signal generator 5 to generate two paths of TTL synchronous pulse signals, and the pulse width of the laser pulse is set to be 500ns and the duty ratio is set to be 50% through the first path of TTL signal; setting the pulse period of the microwave switch 4 to be the same as the laser pulse period through the second path of TTL signal, and setting the microwave pulse width to be 50ns in the interval of the low level of the laser pulse; setting the central frequency of a scanning microwave signal to be 2870MHz, and setting the scanning range to be 100 MHz; lorentz fitting operation is carried out on ODMR optical detection magnetic resonance spectrum data, and the central frequency D is converted into temperature according to the linear proportional change relation with the central frequency D and the measured temperature with the slope of-74 kHz/DEG C, so that the temperature of the current measuring point can be obtained.
Claims (9)
1. The microwave field and temperature field array type quantitative test system is characterized by comprising a laser pulse generating device, a beam splitter, a microwave signal generating device, a pulse signal generator, a dichroic mirror, a first objective lens, a second objective lens, a fluorescence detection device, a scanning device and a terminal, wherein the laser pulse generating device and the microwave signal generating device are respectively and electrically connected with the pulse signal generator; the pulse signal generator, the fluorescence detection device and the scanning device are respectively connected with a terminal; the beam splitter is connected with the laser pulse generating device; wherein the content of the first and second substances,
the laser pulse generating device is used for generating a laser pulse signal;
the beam splitter is used for splitting the generated laser pulse signal;
the microwave signal generating device is used for generating a modulation signal and a high-frequency microwave signal;
the pulse signal generator is used for generating TTL signals and controlling the laser pulse generating device and the microwave signal generating device;
the dichroic mirror is used for reflecting the split green laser and transmitting red fluorescence generated by the diamond NV color center array;
the first objective lens is used for focusing the split green laser reflected by the dichroic mirror and respectively entering each probe in the diamond NV color center array;
the second objective lens is used for focusing the red fluorescence which penetrates through the dichroic mirror to the fluorescence detection device;
the fluorescence detection device is used for collecting the intensity of fluorescence generated by the diamond;
the scanning device comprises a diamond NV color center array and is used for scanning a device to be detected;
and the terminal is used for controlling the pulse signal generator, the fluorescence detection device and the scanning device.
2. The microwave field and temperature field array quantitative test system of claim 1, wherein: the system also includes an adjustable magnet for applying a magnetic field to the exterior of the diamond during microwave field testing.
3. The microwave field and temperature field array quantitative test system of claim 1, wherein: the laser pulse generating device comprises a laser generator and an acousto-optic modulator, wherein the laser generator is used for generating laser, and the acousto-optic modulator is used for modulating the intensity of the laser.
4. The microwave field and temperature field array quantitative test system of claim 1, wherein the microwave signal generating device is configured to generate a modulation signal and a high-frequency microwave signal, the microwave signal generating device comprises a microwave source and a microwave switch; the microwave source is used for generating a pulse microwave signal, and the microwave switch is used for carrying out amplitude modulation on the pulse microwave signal so as to change the duty ratio of the microwave on-off time.
5. The microwave field and temperature field array quantitative test system of claim 1, wherein: the diamond NV color center array adopts a conical optical fiber probe array.
6. The microwave field and temperature field array quantitative test system of claim 1 or 5, wherein: and the diamond NV color center arrays are uniformly distributed according to the size of the device to be tested.
7. The microwave field and temperature field array quantitative test system of claim 1, wherein: the device comprises a fluorescence detection device and a multi-channel data acquisition and analysis instrument, wherein the fluorescence detection device comprises a plurality of channels of avalanche photodiodes and a multi-channel data acquisition and analysis instrument, the avalanche photodiodes are used for collecting fluorescence signals, and the multi-channel data acquisition and analysis instrument is used for carrying out parallel analysis on a plurality of channels of fluorescence generated by the diamond.
8. The microwave and temperature field array quantitative test system according to claim 1, further comprising a displacement platform for fixing the device under test, wherein the displacement platform controls the device under test to perform a moving scan through a control box contained therein.
9. A microwave field and temperature field array type quantitative test method is characterized by comprising the following steps:
(1) the pulse signal generator generates TTL signals and controls the laser pulse generating device to generate laser pulse signals; simultaneously controlling a microwave signal generating device to generate a modulation signal and a high-frequency microwave signal to form a microwave field;
(2) the beam splitter splits the laser pulse signal;
(3) the N paths of split laser are reflected by a dichroic mirror, pass through a first objective lens and finally are focused at different conical optical fiber probes of a diamond NV color center array in a scanning device;
(4) red fluorescence generated by the diamond returns through the original N laser light paths, finally passes through the dichroic mirror and is focused to the fluorescence detection device through the second objective lens;
(5) the fluorescence detection device analyzes the intensity of fluorescence generated by the diamond.
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| CN117347737A (en) * | 2023-12-05 | 2024-01-05 | 中国科学技术大学苏州高等研究院 | Vector measurement and imaging device and method for microwave field |
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