CN112683332B - Multi-physical-parameter wide-field quantum camera based on ensemble nitrogen atom-vacancy color center - Google Patents
Multi-physical-parameter wide-field quantum camera based on ensemble nitrogen atom-vacancy color center Download PDFInfo
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Abstract
The invention discloses a multi-physical-parameter wide-field quantum camera based on a diamond ensemble NV color center, which is used for imaging the magnetic field and the temperature of a chip to be tested. Comprises an optical path and fluorescence system, a microwave system, an external magnetic field system, an acquisition control and data processing system and an ensemble diamond. The light path and the fluorescence system are mainly used for the light polarization and light reading of the diamond NV color center, and can also adjust the size of a light spot and realize the adjustment of the light intensity of laser. The microwave system mainly applies resonance microwave energy to the NV color center of the diamond to realize magnetic resonance detection. The external magnetic field system is mainly used for better describing the Zeeman splitting degree, so that resonance peaks in different NV axis directions are completely degenerated to generate ODMR, and the capability of an NV center for measuring unknown external magnetic field strength and direction is further improved. The acquisition control and data processing system is used for carrying out data processing on the acquired picture data so as to solve the required magnetic field and temperature detection result.
Description
Technical Field
The invention relates to the technical field of quantum sensing and precision measurement, in particular to a micron-spatial-resolution wide-field quantum camera capable of carrying out real-time imaging on multiple physical parameters such as magnetic field, temperature and the like based on an ensemble diamond Nitrogen Vacancy (NV) color center.
Background
In the scientific fields of detection and imaging such as chip detection, biological cell magnetic monitoring and the like, the detection and imaging characterization of the magnetic field and temperature distribution in a micron order is very important. However, existing magnetic field and temperature detection imaging techniques are often limited by factors such as detection sensitivity, spatial resolution, and imaging field of view. Therefore, it is very meaningful to directly perform multi-parameter high-precision imaging such as magnetic field and temperature.
In recent years, the imaging technology for integrating diamond NV color center quantum spin has the technical advantages of micron-level high spatial resolution, high detection sensitivity, wide field of view, non-invasive measurement and the like, is rapidly developed in the subject fields of condensed state physics, nerve and life science, nuclear magnetic resonance, earth and planet science, industrial vector magnetic force measurement and the like, and simultaneously, the imaging speed and the imaging range of the imaging technology also meet the application scene of the technology in wide-field and real-time imaging. Therefore, the ensemble diamond NV color center quantum system is an important direction for realizing wide-field real-time magnetic field and temperature quantum imaging in the future.
Disclosure of Invention
According to the characteristic that microwave frequency corresponding to a resonant peak of an optical detection Magnetic Resonance spectrum (ODMR) of a diamond NV color center is sensitive to a Magnetic field and temperature at the same time, a multi-physical-parameter wide-field quantum camera based on an ensemble nitrogen atom-vacancy color center is provided by combining a wide-field camera imaging technology, and detection imaging of the Magnetic field and the temperature distribution of a chip in a certain field range is realized.
The invention is realized by adopting the following technical scheme:
a multi-physical-parameter wide-field quantum camera based on ensemble nitrogen atoms and vacancy color centers comprises an optical path and fluorescence system, a microwave system, an external magnetic field system, an acquisition control and data processing system and an ensemble diamond.
The light path and fluorescence system comprises a light source laser, a reflector group, a half wave plate, a polarization beam splitter prism, a planoconvex lens group, a dichroic mirror, an objective lens, a high-pass filter, a 50.
532nm continuous laser emitted by the light source laser enters a half wave plate and a polarization beam splitter prism through a reflector group; then, the laser is subjected to spot size adjustment through a planoconvex lens group and then is incident to a dichroic mirror through a reflector group; the dichroic mirror is arranged in the fluorescence collection optical path, and laser steering is focused on the ensemble diamond through the objective lens; the ensemble diamond is positioned in a uniform bias magnetic field provided by an external magnetic field system, an NV color center of the ensemble diamond is excited and radiates red fluorescence, the fluorescence is collected by an objective lens, green laser is filtered by a dichroic mirror, then the fluorescence passes through a high-pass filter, and then the fluorescence is divided into two beams by a 50-beam splitting prism and enters a CMOS camera and a photoelectric detector respectively; the image data of the fluorescence change acquired by the CMOS camera is processed into magnetic field distribution and temperature data by an acquisition control and data processing system.
The microwave system comprises a microwave source, a microwave power amplifier, a circulator, a radiation antenna and a matching resistor; and a microwave signal emitted by the microwave source is transmitted to a microwave power amplifier, the microwave signal after power amplification enters a circulator, the returned microwave signal is absorbed by a matching resistor, and finally the microwave signal is transmitted to a radiation antenna which feeds the microwave energy to the NV color center of the ensemble diamond.
The optical path and the fluorescence system are mainly used for optical polarization and optical readout of the NV color center of the diamond, and can also adjust the size of a light spot and realize the adjustment of the light intensity of laser.
The microwave system mainly applies resonance microwave energy to the NV color center of the diamond to realize magnetic resonance detection.
The external magnetic field system is mainly used for better describing the Zeeman splitting degree, so that resonance peaks in different NV axis directions are completely degenerated to generate ODMR, and the capability of an NV center for measuring unknown external magnetic field strength and direction is further improved.
The acquisition control and data processing system is used for carrying out data processing on the acquired picture data so as to solve the required magnetic field and temperature detection result.
The diamond NV system heald color center is a defect of excellent optical property, and can enable the NV color centers in different ground states to emit fluorescence with different intensities under the excitation of green laser with the wavelength of 532nm, the ground state of the NV color centers can be changed under the action of microwave, and the change of the magnetic field and the temperature change of a chip to be tested can be obtained by recording the change of the fluorescence emitted by the NV color centers by utilizing the characteristic.
When the device works, 532nm laser emitted by a laser in an optical path and a fluorescence system irradiates on the ensemble diamond through the reflector-lens group and the confocal fluorescence excitation collecting system, and fluorescence emitted by the excited diamond is reflected back to the confocal fluorescence excitation collecting system to be collected by the CMOS camera and the photoelectric detector.
The fluorescence intensity is a dependent variable, the microwave frequency is an independent variable, a formed curve is an ODMR curve, in a zero magnetic field room temperature state, ODMR only generates a pair of resonance peaks at the microwave frequency of 2.87GHz, the difference value of the peak point of the pair of peaks is increased along with the increase of an external magnetic field, the position of the median of the peak point of the pair of peaks is shifted to the left on the microwave frequency along with the increase of the temperature, and the synchronous measurement of the magnetic field and the temperature can be realized by utilizing the two characteristics.
In the microwave system, a microwave signal generated by a microwave source firstly amplifies microwave power through a microwave amplifier, then a reflected signal is eliminated through a circulator, and finally microwave energy is fed to an NV color center of the ensemble diamond through a microwave antenna, wherein the microwave source is in a trigger frequency sweep mode.
Magnetic field systems, i.e. permanent magnets that apply a bias magnetic field. The formants of the ODMR curve obtained by the camera and the photoelectric detector can be divided into four pairs under the action of an external magnetic field, and each pair of the peaks corresponds to one N-V crystal axis direction, so that the direction information of the magnetic field is obtained.
And the acquisition control and data processing system is a terminal data acquisition and processor.
The sensitivity of the resonance frequency of the diamond NV color center ODMR curve to the magnetic field and the temperature is adopted, a camera is used for carrying out data acquisition on a large number of points in a wide view field area, and finally the magnetic field distribution and the temperature in the view field range are calculated.
Drawings
Fig. 1 shows a schematic diagram of a wide-field quantum camera based on an ensemble diamond NV colour centre.
FIG. 2 is a schematic diagram of the structure of the optical path and the fluorescence system.
Fig. 3 shows a schematic structural diagram of a microwave system.
Fig. 4 shows a partial schematic diagram of a chip under test.
Fig. 5 shows a schematic diagram of magnetic field (Gs) distribution detection imaging.
FIG. 6 is a schematic view showing temperature (. Degree. C.) distribution detection imaging.
In the figure: 1-optical path and fluorescence system, 2-microwave system, 3-external magnetic field system, 4-acquisition control and data processing system, 5-chip to be tested, 6-ensemble diamond, 7-light source laser, 8 a-reflector set I, 8 b-reflector set II, 8 c-reflector set III, 9-half wave plate, 10-polarization beam splitter prism, 11 a-plano-convex set I, 11 b-plano-convex set II, 12-dichroic mirror, 13-objective lens, 14-high pass filter, 15-50 light splitter prism, 16-CMOS camera, 17-photoelectric detector, 18-microwave source, 19-microwave power amplifier, 20-circulator, 21-radiation antenna, 22-matching resistor.
Detailed Description
The following describes in detail a specific embodiment of the present invention with reference to the drawings.
A multi-physical-parameter wide-field quantum camera based on an ensemble nitrogen atom-vacancy color center is used for imaging the magnetic field and the temperature of a chip to be detected. Specifically, as shown in fig. 1, the system comprises an optical path and fluorescence system 1, a microwave system 2, an external magnetic field system 3, an acquisition control and data processing system 4 and an ensemble diamond 6.
As shown in fig. 2, the optical path and fluorescence system 1 includes a light source laser, a reflector group, a half wave plate 9, a polarization beam splitter prism 10, a plano-convex lens group, a dichroic mirror 12, an objective lens 13, a high-pass filter 14, a 50. The light path and the fluorescence system are specifically divided into a confocal fluorescence excitation collection system and a reflector-lens group. The reflector system reflects the laser to a proper position through a plurality of pairs of reflectors, and amplifies the light spot of the laser to a proper size through two pairs of convex lens groups.
As shown in fig. 2, 532nm continuous laser emitted by a light source laser 7 is collimated by a reflector group i and then enters a half wave plate 9 and a polarization beam splitter prism 10 for realizing adjustment of the polarization state of the laser and adjustment of the light intensity of the laser; and then, after the laser is subjected to light spot size adjustment through the plane convex lens group I11 a, the laser is subjected to light spot size adjustment through the reflecting lens group II 8b again, and then the laser is incident to the dichroic mirror 12 in the confocal fluorescence excitation collection system at a proper angle and height through the reflecting lens group III 8 c. The dichroic mirror 12 is arranged in a fluorescence collecting light path, and laser is turned to be focused on the ensemble diamond 6 through the objective lens 13; the ensemble diamond 6 is positioned in a uniform bias magnetic field provided by the external magnetic field system 3, the NV color center of the ensemble diamond 6 is excited and radiates red fluorescence, the fluorescence is collected by an objective lens 13, green laser is filtered by a dichroic mirror 12, then the fluorescence passes through a high-pass filter 14, and is divided into two beams by a 50; finally, the image data of the fluorescence change acquired by the CMOS camera 16 is processed into magnetic field distribution and temperature data by the acquisition control and data processing system 4.
As shown in fig. 3, the microwave system includes a microwave source 18, a microwave power amplifier 19, a circulator 20, a radiation antenna 21, and a matching resistor 22. The microwave source 18 in the microwave system uses the external pulse signal to control the switching and stepping time of the microwave, the microwave signal sent by the microwave source 18 is transmitted to the microwave power amplifier 19, the power amplified microwave signal enters the circulator 20, the circulator 20 can prevent the reflected microwave signal from returning, the returned microwave signal is absorbed by the matching resistor 22, and the interference signal and the instrument damage are prevented. Finally the microwave signal is fed to the radiating antenna 21 which feeds microwave energy to the NV colour centre of the ensemble diamond 6.
The NV color center of the ensemble diamond 6, a relatively common defect in diamond with excellent optical properties, is composed of a nitrogen-substituted carbon atom surrounded by three carbon atoms and a vacancy whose axis is generally defined as the axis connecting the nitrogen atom and the vacancy and has C 3V Symmetry. The NV color center can radiate red fluorescence when being returned to a ground state by an excited state under the irradiation of green laser with the wavelength of 532nm, and the intensity of the NV color center is influenced by various factors including a magnetic field, temperature, microwave power, frequency and the like.
In specific implementation, the chip 5 to be tested is tightly attached to the ensemble diamond 6.
The external magnetic field system 3 is used for adjusting the magnitude of the magnetic field to enableThe formants in different NV axis directions all degenerate, yielding ODMR. ODMR, a photodetection magnetic resonance technique, is an electron spin resonance technique based on optical detection, whose principle is to use a confocal microscope to detect NV centre spin-dependent fluorescence intensity. The external magnetic field system 3 is a permanent magnet which consists of a pair of cylindrical neodymium iron boron permanent magnets with the diameter of 10mm and the height of 20mm, and the magnetization intensity of the magnets is 1.2 multiplied by 10 6 Am -1 。
The acquisition control and data processing system 4, i.e. the terminal processor-computer, is used for processing the acquired image data and obtaining the required detection result by resolving. Specifically, the acquisition control and data processing system controls the data acquisition board card through Labview software to realize the synchronization of the exposure time of the camera and the microwave frequency stepping of the microwave source, and ensure that a single image corresponds to a single microwave frequency; the acquisition control and data processing system stores the acquired pictures through CMOS camera control software, and the pixel area is 0.27mm multiplied by 0.48mm; the acquisition control and data processing system carries out data processing on the acquired picture data by utilizing a three-axis resolving code through Matlab software so as to resolve a required detection result.
The laser light from the source laser 7 is used for optical polarization and optical readout of the diamond NV colour centre. The laser wavelength is 532nm, the maximum output power is 150mW, the power stability is better than 1 percent, and the beam diameter is about 0.7mm. Photo-polarization, i.e., by the intensity of fluorescence reaching a maximum, ensures that the NV color center is fully polarized to the 0 state. And (4) optical reading, namely obtaining quantum state information after microwave action through fluorescence.
The reflector group I8 a comprises two reflectors and is used for collimating the continuous laser.
The combination of the half wave plate 9 and the polarization beam splitter prism 10 can realize the adjustment of the polarization state of the laser and the adjustment of the light intensity of the laser.
Two groups of plano-convex mirrors (a plano-convex mirror group I11 a and a plano-convex mirror group II 11 b) aim at realizing the adjustment of the size of the light spot.
And the reflector group II 8b and the reflector group III 8c are used for adjusting the position and the height so that the laser is incident to the dichroic mirror.
And the dichroic mirror 12 is used for reflecting the laser so that the laser enters a confocal light path, so that the laser irradiates the diamond to realize polarization of an NV color center and red fluorescence collected by the objective lens passes through the diamond to block the reflected green laser.
The high-pass filter 14 transmits light with a wavelength of more than 650nm and less than 800nm, so as to filter out green light, ambient stray light and the like.
And a beam splitter prism 15 for splitting the fluorescence into two beams of fluorescence and entering the CMOS camera and the Photodetector (PD), respectively.
The CMOS camera 16 is used for collecting the number of images to perform imaging.
And a Photoelectric Detector (PD) 17 for determining the microwave frequency sweep range and adjusting the magnetic field direction more quickly.
The microwave source 18, belonging to the signal generator, uses its external trigger mode to realize the on and off of the microwave controlled by external pulse signal.
The microwave power amplifier 19 can amplify the power of the microwave signal.
The circulator 20 is used for preventing the reflected microwave signal from returning, absorbing the returned microwave signal by a matching resistor and preventing the interference signal and the instrument from being damaged.
And a matching resistor 22, which is used for absorbing the returned microwave signal.
A radiating antenna 21, which acts to feed microwave energy onto the diamond NV spins.
The size of the ensemble diamond 6 is not less than 4mm multiplied by 0.5mm, not more than 5mm multiplied by 0.5mm, the nitrogen content is not less than 5%, and the direct wide field imaging area is not less than 9.5mm multiplied by 5.5mm.
In specific application, the wide-field quantum camera based on the NV color center of the ensemble diamond is used for measuring the micro electric heating chip as shown in FIG. 4, 2 micro chip surface structures with opposite current directions are displayed in a view field, the width of a single wire is 0.07mm, and the distance between two wires is 0.03mm. The magnetic field imaging test results (as shown in fig. 5) and the temperature imaging test results (as shown in fig. 6) indicate the feasibility of the wide-field quantum camera to implement the multiple physical parameter test.
Finally, it should be noted that the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting, and although the detailed description is made with reference to the embodiments of the present invention, it should be understood by those skilled in the art that modifications or equivalent substitutions may be made on the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, which shall be covered by the claims of the present invention.
Claims (2)
1. A multi-physical parameter wide-field quantum camera based on an ensemble nitrogen atom-vacancy color center is characterized in that: comprises a light path and fluorescence system (1), a microwave system (2), an external magnetic field system (3), an acquisition control and data processing system (4) and an ensemble diamond (6);
the light path and fluorescence system (1) comprises a light source laser (7), a reflector group, a half wave plate (9), a polarization beam splitter prism (10), a planoconvex lens group, a dichroic mirror (12), an objective lens (13), a high-pass filter (14), a 50 light splitter prism (15), a CMOS camera (16) and a photoelectric detector (17);
532nm continuous laser emitted by the light source laser (7) enters a half wave plate (9) and a polarization beam splitter prism (10) through a reflector group; then, the laser is subjected to spot size adjustment through a plano-convex mirror group and then is incident to a dichroic mirror (12) through a reflector group; the dichroic mirror (12) is arranged in a fluorescence collecting light path, and laser is turned to be focused on the ensemble diamond (6) through an objective lens (13); the ensemble diamond (6) is positioned in a uniform bias magnetic field provided by an external magnetic field system (3), an NV color center of the ensemble diamond (6) is excited and radiates red fluorescence, the fluorescence is collected by an objective lens (13), green laser is filtered by a dichroic mirror (12), then the fluorescence passes through a high-pass filter (14), and then is divided into two beams by a 50; the image data of the fluorescence change acquired by the CMOS camera (16) is processed into magnetic field distribution and temperature data by an acquisition control and data processing system (4);
the microwave system comprises a microwave source (18), a microwave power amplifier (19), a circulator (20), a radiation antenna (21) and a matching resistor (22); a microwave signal emitted by the microwave source (18) is transmitted to a microwave power amplifier (19), the microwave signal after power amplification enters a circulator (20), the returned microwave signal is absorbed by a matching resistor (22), finally, the microwave signal is transmitted to a radiation antenna (21), and the radiation antenna (21) feeds the microwave energy to an NV color center of the ensemble diamond (6);
the external magnetic field system (3) is a permanent magnet; the permanent magnet consists of a pair of cylindrical neodymium iron boron permanent magnets with the diameter of 10mm and the height of 20mm, and the magnetization intensity of the magnets is 1.2 multiplied by 10 6 Am -1 ；
The wavelength of 532nm laser emitted by the light source laser (7) is 532nm, the maximum output power is 150mW, the power stability is better than 1%, and the beam diameter is 0.7mm;
the transmission wavelength of the high-pass filter (14) is more than 650nm and less than 800nm;
the size of the ensemble diamond (6) is not less than 4mm multiplied by 0.5mm and not more than 5mm multiplied by 0.5mm, the nitrogen content is not less than 5%, and the direct wide field imaging area is not less than 9.5mm multiplied by 5.5mm.
2. The ensemble nitrogen atom-vacancy color center-based multi-physical parameter wide-field quantum camera of claim 1, wherein: the microwave source (18) adopts an external pulse signal to control the switching and the stepping time of the microwave.
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| CN113640715B (en) * | 2021-08-18 | 2022-09-09 | 中国科学技术大学 | Solid-state spin magnetic sensor and magnetic field measurement method |
| CN113834963A (en) * | 2021-09-06 | 2021-12-24 | 国仪量子(合肥)技术有限公司 | Current detection device and method based on NV color center sensor and storage medium |
| CN114113151A (en) * | 2021-11-08 | 2022-03-01 | 中国科学技术大学 | Coupling magnetic imaging device and measuring method |
| CN113933906B (en) * | 2021-11-15 | 2024-02-13 | 中国电子科技集团公司第十三研究所 | Diamond NV color center magnetic force detection module and magnetic force detection system |
| CN114047556B (en) * | 2021-11-15 | 2024-01-30 | 中国电子科技集团公司第十三研究所 | Magnetic force detecting head and magnetic force detecting system based on diamond NV color center |
| CN115791740B (en) * | 2023-02-08 | 2023-05-09 | 安徽省国盛量子科技有限公司 | Microwave reflection imaging detection device and method based on diamond NV color center |
| CN117147004B (en) * | 2023-10-30 | 2024-03-26 | 之江实验室 | High-precision temperature and magnetic field signal measuring device used in weak magnetic field environment |
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| US9766181B2 (en) * | 2013-06-28 | 2017-09-19 | Massachusetts Institute Of Technology | Wide-field imaging using nitrogen vacancies |
| US9891297B2 (en) * | 2015-03-13 | 2018-02-13 | President And Fellows Of Harvard College | Magnetic sensing and imaging using interactions between surface electron spins and solid state spins |
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| CN111398231B (en) * | 2020-03-26 | 2022-02-01 | 西安交通大学 | Scanning detection system based on diamond NV color center |
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