CN112067176A - Piezoelectric type flexible three-dimensional force sensor - Google Patents
Piezoelectric type flexible three-dimensional force sensor Download PDFInfo
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- CN112067176A CN112067176A CN201910428874.XA CN201910428874A CN112067176A CN 112067176 A CN112067176 A CN 112067176A CN 201910428874 A CN201910428874 A CN 201910428874A CN 112067176 A CN112067176 A CN 112067176A
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- 238000005259 measurement Methods 0.000 claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 239000000835 fiber Substances 0.000 claims description 12
- 238000010041 electrostatic spinning Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- 239000002033 PVDF binder Substances 0.000 claims description 7
- 238000005516 engineering process Methods 0.000 claims description 7
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 6
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 5
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims description 5
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims description 5
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims description 5
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 5
- 238000009987 spinning Methods 0.000 claims description 4
- 238000007747 plating Methods 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 239000011664 nicotinic acid Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
A piezoelectric flexible three-dimensional force sensor comprises a sensor unit, wherein the sensor unit comprises a substrate layer, a lower electrode structure layer, a piezoelectric force sensitive layer, an upper electrode structure layer and a raised structure layer from bottom to top, and force measurement is realized by the change of voltage or current caused by charges generated by the piezoelectric force sensitive layer under the action of force; the lower electrode structure layer of the sensor unit consists of four electrodes, piezoelectric signals of four areas at the bottom of the raised structure layer are measured respectively, and the upper electrode structure layer is used as a common electrode layer; the sensor units are arranged in an array mode, and three-dimensional force measurement on any point of a plane can be achieved.
Description
Technical Field
The invention relates to the technical field of flexible three-dimensional force sensors, in particular to a piezoelectric type flexible three-dimensional force sensor.
Background
The flexible three-dimensional force sensor is an indispensable means for the intelligent robot to acquire external clamping information, can be used for realizing the sensing of bionic touch information, and is used in the field of medical rehabilitation. Through the detection of the three-dimensional force, the robot can evaluate the weight, the motion state and other parameters of the clamped object, so that a large-range and high-precision flexible three-dimensional force sensor is researched, the intelligent degree of the robot can be greatly improved, meanwhile, the flexible three-dimensional force sensor is used as bionic touch sensing, can be applied to the medical rehabilitation field of intelligent artificial limbs and the like, and has wide application prospect.
The Chinese invention patent (publication number: CN 104215363A) discloses a piezoresistive flexible three-dimensional force sensor, wherein a force-sensitive material is prepared from pressure-sensitive conductive rubber, the measurement precision of the force-sensitive material depends on the force-sensitive performance of the conductive rubber, and the piezoresistive material has hysteresis on the measurement of dynamic signals.
At present, most of flexible force sensors can only realize measurement of one-dimensional force, measurement of multi-dimensional force cannot be realized, measurement of three-dimensional force is significant for acquiring complete information of grabbed objects by robots and the like, stable control of the grabbed objects by the robots is realized through feedback and decision, and the sensors are used for further sensing parameters such as elastic modulus of the detected objects.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a piezoelectric flexible three-dimensional force sensor which can measure three-dimensional force.
In order to achieve the purpose, the invention adopts the technical scheme that:
a piezoelectric flexible three-dimensional force sensor comprises a sensor unit, wherein the sensor unit comprises a substrate layer 5, a lower electrode structure layer 4, a piezoelectric force sensitive layer 3, an upper electrode structure layer 2 and a protrusion structure layer 1 from bottom to top, and force measurement is realized through the change of voltage or current caused by charges generated by the piezoelectric force sensitive layer 3 under the action of force;
the lower electrode structure layer 4 of the sensor unit consists of four electrodes, piezoelectric signals of four areas at the bottom of the raised structure layer 1 are measured respectively, and the upper electrode structure layer 2 is used as a common electrode layer;
the bottom of the sensor unit is square, the side length is 2-10mm, the inclination of the side face of the truncated pyramid structure on the convex structure layer 1 is 0-15 degrees, and the height is 0.3-0.7 times of the width of the sensor unit.
The piezoelectric type force sensitive layer 3 is attached to the upper electrode structure layer 2 and the lower electrode structure layer 4, the piezoelectric type force sensitive layer 3 is prepared through an electrostatic spinning technology, fibers formed by spinning polyvinylidene fluoride (PVDF) or PVDF-TrFE have piezoelectricity, and a piezoelectric fiber film is formed by a plurality of fibers.
The upper electrode structure layer 2 and the lower electrode structure layer 4 are prepared by adopting a sputtering or vapor plating technology through a stripping process, and the thickness of the electrodes is 100 nm.
The convex structure layer 1 and the substrate layer 5 are made of PDMS or PET flexible materials, and the thickness of the substrate layer 5 is 100-1000 μm.
The sensor units are arranged in an array manner, so that the measurement of three-dimensional force on any point of a plane can be realized; the array type sensor is characterized in that the protruding structure layer 1 is poured into an array protruding structure at one time through a die, and the piezoelectric force sensitive layer 3 of the array sensor is a uniform integral film prepared through electrostatic spinning.
The electrodes at the same position of the lower electrode structure layer 4 after the sensor unit is arrayed are connected in series in each row by a lead to form a lead, and the upper electrode structure layer 2 after the sensor unit is arrayed is used as a common electrode and is connected in series by the electrodes in the same row to form the lead.
The invention has the beneficial effects that:
the flexible three-dimensional force sensor based on the piezoelectric effect can realize the measurement of the three-dimensional force, adopts the electrostatic spinning technology to prepare the piezoelectric fiber film as the piezoelectric sensitive layer, does not need to be further externally added with high voltage for polarization, and has excellent piezoelectric performance and simple preparation process.
The piezoelectric material is used as the sensitive layer, so that the sensor has excellent dynamic force measurement performance, and can realize measurement of low-frequency to high-frequency dynamic force.
The PDMS or PET material for preparing the sensor and the sensitive material have good flexibility, and the sensor can be applied to measurement of mechanical quantity under complex working conditions such as curved surfaces.
The sensor protruding structure is prepared by adopting a pouring method, and is simple in structure and easy to prepare.
Drawings
Fig. 1 is an isometric view of a sensor unit of the present invention.
Fig. 2 is a schematic illustration of a 4x4 array of sensor cells of the present invention.
Fig. 3(a) is a schematic view of the electrode structure layer 4 of the sensor unit, and fig. 3(b) is a schematic view of the upper electrode structure layer 2 of the sensor unit.
Fig. 4 is a schematic view of the upper electrode structure layer 2 of the arrayed sensor unit.
Fig. 5 is a schematic view of the lower electrode structure layer 4 of the arrayed sensor unit.
Fig. 6 is a schematic diagram of signal output during sensor unit testing.
Detailed Description
The invention is further described with reference to the following figures and examples.
As shown in fig. 1, the piezoelectric flexible three-dimensional force sensor comprises a sensor unit, wherein the sensor unit comprises a substrate layer 5, a lower electrode structure layer 4, a piezoelectric force sensitive layer 3, an upper electrode structure layer 2 and a protrusion structure layer 1 from bottom to top, and the force measurement is realized by the change of voltage or current caused by charges generated by the piezoelectric force sensitive layer 3 under the action of force.
The bottom of the sensor unit is square, the side length is 2-10mm, the inclination of the side face of the truncated pyramid structure on the convex structure layer 1 is 0-15 degrees, and the height is 0.3-0.7 times of the width of the sensor unit.
As shown in fig. 2, the sensor units are arranged in a 4 × 4 array after being arrayed and expanded, so that the measurement of three-dimensional force on any point of the plane on the plane can be realized.
As shown in fig. 3(a), the lower electrode structure layer 4 of the sensor unit is composed of four first electrodes 4-1, the four first electrodes 4-1 respectively measure piezoelectric signals of four different areas at the bottom of the raised structure layer 1, wherein two first electrodes 4-1 on the left side are connected in series and then connected with a pair of first interfaces 4-2; the two first electrodes 4-1 on the right side are connected in series and then are connected with a pair of first interfaces 4-2, and all the first interfaces 4-2 are connected with external leads; as shown in fig. 3(b), the upper electrode structure layer 2 of the sensor unit is used as a common electrode layer, and is formed by connecting a second electrode 2-1 and a second interface 2-2, and the second interface 2-2 is connected with an external lead.
As shown in fig. 4, fig. 4 is a schematic diagram of the upper electrode structure layer 2 after the sensor unit is arrayed, and the second electrodes 2-1 in each row are connected in series and then connected to a second interface 2-2.
As shown in fig. 5, fig. 5 is a schematic diagram of the lower electrode structure layer 4 after the sensor units are arrayed, wherein the first electrodes 4-1 at the same position corresponding to each sensor unit are connected in series in each column through a lead, and then are connected out to the first interface 4-2.
The convex structure layer 1 is prepared in a pouring mode, a polymer material PDMS and a curing agent are mixed according to the proportion of 10:1, and the prepared convex structure layer 1 serves as a force transmission layer.
The piezoelectric type force sensitive layer 3 is attached to the upper electrode structure layer 2 and the lower electrode structure layer 4, the piezoelectric type force sensitive layer 3 is prepared through an electrostatic spinning technology, fibers formed by spinning polyvinylidene fluoride (PVDF) or PVDF-TrFE have piezoelectricity, a piezoelectric fiber film is formed by a plurality of fibers, the piezoelectric fiber film is deformed under the action of force, so that the change of voltage or current is generated, and the measurement of the force is realized by measuring the change of the voltage or the current; the electrostatic spinning adopts a mixed solution of dimethyl formamide (DMF) and acetone as a solvent, the mass fraction of the PVDF solution is 14%, the voltage at two ends of a polar plate is 15kV during spinning, the distance between the polar plates is 15cm, and the feeding flow is 5 mu L/min.
The upper electrode structure layer 2 and the lower electrode structure layer 4 are prepared by adopting a sputtering or vapor plating technology through a stripping process, and the thickness of the electrodes is 100 nm.
The substrate layer 5 is made of PDMS or PET flexible material, and the thickness is 100-1000 μm.
When the sensor unit is subjected to arrayed expansion, the protruding structure layer 1 is poured into an arrayed protruding structure at one time through a mold, the upper electrode layer structure 2 and the lower electrode layer structure 4 are respectively prepared by adopting a stripping process as shown in fig. 4 and 5, the piezoelectric force sensitive layer 3 of the arrayed sensor is a piezoelectric fiber film prepared by an electrostatic spinning process, and three-dimensional force measurement is realized by measuring the change of electric charge quantity caused by strain in different areas through the first electrode 4-1; in order to ensure the consistency of the output characteristics of the sensors, the piezoelectric force sensitive layer 3 of the arrayed sensors is a uniform integral film prepared by electrostatic spinning.
The working principle of the invention is as follows:
the raised structure layer 1 transmits horizontal force and normal force to the piezoelectric force sensitive layer 3, the upper electrode structure layer 2 and the lower electrode structure layer 4 are attached to the upper and lower parts of the piezoelectric force sensitive layer 3 in a distributed manner, and the lower electrode structure layer 4 of each sensor unit is divided into four electrode areas, so that 4 voltage signals are output, as shown in fig. 6; when only normal forces are present, the 4 electrode areas are equally strained and therefore the voltage output of the four areas of the piezoelectric force-sensitive layer 3 is equal, i.e. V1＝V2＝V3＝V4(ii) a If an X positive direction tangential force is applied while a normal force is applied, the strains on the four areas at the bottom are different, so that the voltage signal output by the right area of the piezoelectric force sensitive layer 3 is increased, and the voltage signal output by the left area is decreased, namely V2＝V4>V1＝V3The magnitude of the force in the X direction can be calculated by measuring the difference value; similarly, measurement of force in the Y direction can be achieved; the three-dimensional force can be decomposed into the action of horizontal force and normal force, so that the measurement of the three-dimensional force is realized.
The preparation method of the piezoelectric flexible three-dimensional force sensor comprises the following steps: firstly preparing a substrate layer 5 and a raised structure layer 1, then preparing an upper electrode structure layer 2 and a lower electrode structure layer 4 on the raised structure layer 1 and the substrate layer 5 respectively, preparing an electric force sensitive layer 3 on the lower electrode structure layer 4 in an electrostatic spinning mode, and bonding the raised structure layer 1 with the upper electrode structure layer 2 on the substrate layer 5 which is prepared with the piezoelectric force sensitive layer 3 after the preparation is finished, thereby finishing the preparation of the piezoelectric flexible three-dimensional force sensor.
Claims (6)
1. A flexible three-dimensional force transducer of piezoelectric type, includes sensor unit, its characterized in that: the sensor unit comprises a substrate layer (5), a lower electrode structure layer (4), a piezoelectric force sensitive layer (3), an upper electrode structure layer (2) and a protrusion structure layer (1) from bottom to top, and the force measurement is realized by the change of voltage or current caused by the electric charge generated by the piezoelectric force sensitive layer (3) under the action of force;
the lower electrode structure layer (4) of the sensor unit consists of four electrodes, piezoelectric signals of four areas at the bottom of the raised structure layer (1) are measured respectively, and the upper electrode structure layer (2) is used as a common electrode layer;
the bottom of the sensor unit is square, the side length is 2-10mm, the inclination of the side face of the truncated pyramid structure on the convex structure layer (1) is 0-15 degrees, and the height is 0.3-0.7 times of the width of the sensor unit.
2. The piezoelectric flexible three-dimensional force sensor according to claim 1, wherein: the piezoelectric type force sensitive layer (3) is attached to the upper electrode structure layer (2) and the lower electrode structure layer (4), the piezoelectric type force sensitive layer (3) is prepared through an electrostatic spinning technology, fibers formed by spinning polyvinylidene fluoride (PVDF) or PVDF-TrFE have piezoelectricity, and a piezoelectric fiber film is formed by a plurality of fibers.
3. The piezoelectric flexible three-dimensional force sensor according to claim 1, wherein: the upper electrode structure layer (2) and the lower electrode structure layer (4) are prepared by adopting a sputtering or vapor plating technology through a stripping process, and the thickness of the electrodes is 100 nm.
4. The piezoelectric flexible three-dimensional force sensor according to claim 1, wherein: the convex structure layer (1) and the substrate layer (5) are made of PDMS or PET flexible materials, and the thickness of the substrate layer (5) is 100-1000 μm.
5. The piezoelectric flexible three-dimensional force sensor according to claim 1, wherein: the sensor units are arranged in an array manner, so that the measurement of three-dimensional force on any point of a plane can be realized; the array type sensor is characterized in that the protruding structure layer (1) is poured into an array protruding structure at one time through a die, and the piezoelectric force sensitive layer (3) of the array sensor is a uniform integral film prepared through electrostatic spinning.
6. The piezoelectric flexible three-dimensional force sensor according to claim 5, wherein: electrodes at the same position of the lower electrode structure layer (4) after the sensor units are arrayed are connected in series in each row through leads to form leads, and the upper electrode structure layer (2) after the sensor units are arrayed serves as a common electrode and is connected in series through electrodes in the same row to form leads.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112792687A (en) * | 2021-02-03 | 2021-05-14 | 温州大学 | Self-sensing self-adaptive grinding head and method for detecting grinding force in grinding process |
| CN112985649A (en) * | 2021-01-26 | 2021-06-18 | 电子科技大学 | Mechanical information detection system based on flexible distributed capacitive touch sensor |
| CN113465790A (en) * | 2021-07-20 | 2021-10-01 | 京东方科技集团股份有限公司 | Touch sensor, pressure measuring device and manufacturing method |
| CN114808279A (en) * | 2022-05-20 | 2022-07-29 | 俞平 | Manufacturing method of fabric sensing array for automobile cushion and product |
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