CN112063993A - Vertical vacuum furnace heating mechanism - Google Patents

Vertical vacuum furnace heating mechanism Download PDF

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Publication number
CN112063993A
CN112063993A CN202010718038.8A CN202010718038A CN112063993A CN 112063993 A CN112063993 A CN 112063993A CN 202010718038 A CN202010718038 A CN 202010718038A CN 112063993 A CN112063993 A CN 112063993A
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CN
China
Prior art keywords
positioning
heating
lintel
electrode
heating mechanism
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Pending
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CN202010718038.8A
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Chinese (zh)
Inventor
李护林
刘广续
马尧
高建平
马晓维
肖欣那
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Xian Aerospace Engine Co Ltd
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Xian Aerospace Engine Co Ltd
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Application filed by Xian Aerospace Engine Co Ltd filed Critical Xian Aerospace Engine Co Ltd
Priority to CN202010718038.8A priority Critical patent/CN112063993A/en
Publication of CN112063993A publication Critical patent/CN112063993A/en
Pending legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/42Silicides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52Controlling or regulating the coating process

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Furnace Details (AREA)

Abstract

The invention provides a heating mechanism of a vertical vacuum furnace, which comprises a heating unit and an insulating unit, wherein the heating unit comprises a heating plate, a lintel and an electrode base, the electrode base and the lintel respectively enclose a circular ring which corresponds up and down, one end of the heating plate is fixed on the lintel, the other end of the heating plate is fixed on the electrode base to form a triangular electric connection mode, and the electrode base is used for connecting an electrode to introduce current; the insulating unit comprises a positioning plate for fixedly connecting two adjacent lintels and an annular insulating part sleeved on the columnar bulge of the electrode base. The three-phase power is accessed by an electrode inserted into the electrode base, and the self heating size of the heating plate is controlled by controlling the current loaded on the electrode and the number of the heating plates, so that the temperature in the furnace is controlled; the heating mechanism adopts a suspension type fixing mode by means of the electrode base, is not in contact with the upper part and the lower part of the furnace body, reduces the supporting insulation requirement of the heating mechanism on the furnace body, and is convenient for heating products to enter and exit from the furnace bottom and activating agent steam to be discharged from the top.

Description

Vertical vacuum furnace heating mechanism
Technical Field
The invention belongs to the field of rocket engine manufacturing, and particularly relates to a vertical vacuum furnace heating mechanism capable of realizing temperature control in preparation of a high-temperature anti-oxidation coating of an engine.
Background
With the development of aerospace technology, the use temperature, structure, materials and the like of the engine are greatly changed, and higher requirements are put forward on the performance of the materials of the thrust chamber. In order to improve the high-temperature oxidation resistance of refractory metal used by a rocket engine such as a thrust chamber shell, a required oxidation resistant coating is obtained on the outer surface of the shell by adopting vacuum high-temperature equipment, so that the oxidation problem of the refractory metal is solved, the working temperature is favorably improved, and the working performance of the thrust chamber and the engine specific impulse are improved. As shown in fig. 1, an engine product (hereinafter referred to as a product, such as a thrust chamber) having a Mo layer on a surface thereof is placed in silicon powder (a position of a product box shown in the figure), an activator (NaCl) is placed in the activator box shown in the figure, and an auxiliary heater is disposed at the position. The equipment starts to work, under the action of the lifting device, the product enters the furnace body (the furnace body is internally provided with a heater) from the bottom, the heater and the auxiliary heater work, and NaCl crystals are decomposed into Na at 800 ℃ under the vacuum condition+Ions and Cl-Ions, and Cl due to the communication of decomposed NaCl vapor and 1300 deg.C silicon powder region-Ion reacts with Si ion to generate SiCl4New substance, SiCl4Is very volatile and falls on the deposition surface of the substrate to react with Mo to form MoSi2Simultaneous decomposition of Cl-The ions are mixed with the original residual Na+The ions form NaCl crystals again, and the circulation is carried out, so that MoSi is obtained at an accelerated speed2And (4) coating. In the process of generating the coating, the reaction temperature of 1300 ℃ needs to be maintained, the temperature is low, the generation speed of the coating is slow, the temperature is too high, the coating is sticky, and meanwhile, activating agent steam needs to be introduced to accelerate the generation of the coating, which puts higher requirements on the heater structure and does not meet the requirementsThe product is prevented from entering and exiting from the bottom of the furnace body, the steam is discharged from the top of the furnace body, the supporting and insulating requirements on the furnace body are reduced, and the temperature control requirements are met.
Disclosure of Invention
In order to overcome the defects in the prior art, the inventor of the invention makes a keen study, and provides a vertical vacuum furnace heating mechanism, which can control the heating temperature in the preparation of the coating of an engine product, meet the requirements of not obstructing the product from entering and exiting from the bottom, discharging steam from the top and reducing the support insulation requirement on a furnace body, and further complete the invention.
The technical scheme provided by the invention is as follows:
a heating mechanism of a vertical vacuum furnace comprises a heating unit and an insulating unit, wherein the heating unit comprises a heating plate, three lintels and three electrode bases, the electrode bases and the lintels respectively enclose a circular ring which corresponds up and down, and two ends of the heating plate are fixed on the circular ring;
the electrode base is of an arc-shaped flat plate structure, columnar protrusions are machined on the outer side of the electrode base, and two arms of the electrode base are provided with transverse threaded holes for fixing one end of the heating plate; the outer side of the columnar bulge of the electrode base is provided with a threaded blind hole along the axial direction, the threaded blind hole corresponds to the external thread of the electrode and is used for fixing the electrode and the electrode base, so that the three-phase electrode is respectively inserted into the three electrode bases;
the lintel is of an arc-shaped flat plate structure, two arms of the arc-shaped flat plate structure are provided with transverse threaded through holes for fixing the other end of the heating plate, and the plate surface of the lintel is provided with threaded through holes perpendicular to the plate surface for connection between adjacent lintels;
the two ends of the heating plate are provided with threaded through holes and are connected to the electrode base and the lintel through threaded connecting pieces, and the fixed heating plate is vertical to the plane where the electrode base and the lintel are located;
the insulating unit comprises a positioning plate, the positioning plate is of an arc-shaped flat plate structure, through holes are formed in two ends of the positioning plate and correspond to longitudinal threaded through holes perpendicular to the plate surface on two adjacent arms of adjacent lintels, and the positioning plate is arranged on the lintel and fixedly connected with the two adjacent lintels through threaded connecting pieces.
Furthermore, the heating unit also comprises at least one supporting base, the supporting base is of an arc-shaped flat plate structure, columnar protrusions are processed on the outer side of the supporting base, two arms of the supporting base are provided with transverse threaded holes for fixing one end of the heating plate, and the supporting base and the electrode base jointly enclose a circular ring corresponding to the lintel; the number of the lintels is consistent with the total number of the electrode bases and the support bases, and the heating plate is perpendicular to the electrode bases and the support bases and the plane of the lintels.
The heating mechanism of the vertical vacuum furnace provided by the invention has the following beneficial effects:
(1) according to the invention, the electrode base, the support base and the lintel are designed into arc-shaped flat plate structures, the heating plates are fixed between the electrode base/support base and the lintel, the formed cylindrical structure corresponds to the furnace lining structure, the installation of the heating mechanism is facilitated, and a plurality of heating plates are installed on two arms of the electrode base, the support base and the lintel, and the heating plates are connected in parallel, so that the heating mechanism cannot be suddenly broken due to the damage of one heating plate, and the reliability of the heating mechanism is improved;
(2) according to the invention, the heating efficiency of the heating mechanism can be correspondingly adjusted by adjusting the number of the electrode bases and the supporting bases or the number of the heating plates connected in parallel on the two walls of the electrode bases and the supporting bases, and the adjustment of the heating efficiency has flexibility;
the self heating of the heating plate is controlled by controlling the current loaded on the electrode, so that the temperature in the furnace is controlled;
(3) according to the invention, the heating mechanism is positioned with the furnace lining through the positioning piece sleeved outside the insulating sleeve on the electrode base or the supporting base or the matching between the gasket, the insulating ring and the insulator, the positioning piece can be subjected to displacement adjustment according to the position requirement, the gasket can be additionally disassembled according to the position requirement, and the positioning adjustment between the heating mechanism and the furnace lining is flexible;
(4) according to the invention, the positioning plate is arranged between the lintels, so that the heating mechanisms can be connected into a whole on hardware, and the heating plates of different branches can be effectively prevented from contacting due to looseness of the threaded connecting piece in a suspended state;
(5) in the invention, the heating mechanism adopts a suspension type fixing mode by virtue of the electrode base or the supporting base, and is not in contact with the upper part and the lower part of the furnace body, so that the supporting insulation requirement of the heating mechanism on the furnace body is reduced, and heating products can conveniently enter and exit from the furnace bottom and product steam can be conveniently discharged from the top;
(6) the heating plate is made of a C/C composite material, can resist long-term high-temperature corrosion of sodium chloride and molybdenum steam, can be popularized to vacuum high-temperature equipment of the same type for use, and has the advantages of high-temperature strength, toughness, long service life, light weight and the like compared with common metal heating materials and graphite materials.
Description of the drawings:
FIG. 1 is a schematic view of an antioxidant coating preparation tool;
FIG. 2 is a schematic structural view of a heating mechanism (without a supporting base) according to a preferred embodiment of the present invention;
FIG. 3 is a view of the heating mechanism of FIG. 2 from direction A;
FIG. 4 is a schematic structural view of an electrode mount according to a preferred embodiment of the present invention;
FIG. 5 is a cross-sectional view of the electrode mount of FIG. 4;
FIG. 6 is a view of the electrode mount of FIG. 4 taken in the direction A;
FIG. 7 is a schematic structural view of a lintel in a preferred embodiment of the present invention;
FIG. 8 is a view of the lintel of FIG. 7 in the direction of A;
FIG. 9 is a schematic structural view of a heating panel according to a preferred embodiment of the present invention;
FIG. 10 is a schematic view of a positioning plate according to a preferred embodiment of the present invention;
FIG. 11 is a schematic view of a heating mechanism (with a support base) according to a preferred embodiment of the present invention;
FIG. 12 is a view from direction A of the heating structure of FIG. 11;
FIG. 13 is a schematic structural view of a support base according to a preferred embodiment of the present invention;
FIG. 14 is a cross-sectional view of the support base of FIG. 13;
FIG. 15 is a view from the A direction of the support base of FIG. 13;
fig. 16 is a schematic circuit diagram of the heating mechanism in embodiment 2.
Description of the reference numerals
1-heating the plate; 2-lintel; 3, positioning a plate; 4-positioning bolts; 5-electrode base; 6-supporting the base; 70-an insulating sleeve I; 80-insulating ring I; 81-insulating ring II; 90-gasket I; 91-gasket II; 101-a limit bolt; 110-positioning ring I; 111-positioning ring II; 120-insulator I; 121-insulator II; 130-positioning nut I; 131-positioning nut II.
Detailed Description
The features and advantages of the present invention will become more apparent and appreciated from the following detailed description of the invention.
The invention provides a heating mechanism of a vertical vacuum furnace, which comprises a heating unit and an insulating unit as shown in figures 2 and 3, wherein the heating unit comprises a heating plate 1, three lintels 2 and three electrode bases 5, the electrode bases 5 and the lintels 2 respectively enclose a circular ring corresponding to each other up and down, and two ends of the heating plate 1 are fixed on the two circular rings.
As shown in fig. 4 to 6, the electrode base 5 is an arc-shaped flat plate structure, a columnar protrusion is processed on the outer side of the electrode base, and two arms of the electrode base 5 are provided with transverse threaded holes for fixing one end of the heating plate 1; a threaded blind hole is formed in the outer side of the columnar protrusion of the electrode base 5 along the axial direction, and the threaded blind hole corresponds to the external thread of the electrode and is used for fixing the electrode and the electrode base 5, so that the three-phase electrode is respectively inserted into the three electrode bases.
As shown in fig. 7 and 8, the lintel 2 is an arc-shaped flat plate structure, two arms of the arc-shaped flat plate structure are provided with transverse threaded through holes for fixing the other end of the heating plate 1, and the plate surface of the lintel 2 is provided with longitudinal threaded through holes perpendicular to the plate surface for connecting the adjacent lintel 2.
As shown in fig. 9, threaded through holes are formed at two ends of the heating plate 1, the heating plate is connected to the electrode base 5 and the lintel 2 through threaded connectors, and the fixed heating plate 1 is perpendicular to the plane where the electrode base 5 and the lintel 2 are located.
As shown in fig. 10, the insulating unit includes a positioning plate 3, the positioning plate 3 is an arc-shaped flat plate structure, through holes, preferably threaded through holes, are formed at two ends of the positioning plate 3, the through holes correspond to longitudinal threaded through holes perpendicular to the plate surface on two adjacent arms of adjacent lintel 2, the positioning plate 3 is placed on the lintel 2 and two adjacent lintel 2 are fixedly connected by threading a threaded connecting piece; preferably, a radial protrusion structure is formed in the middle of the positioning plate 3, and the radial protrusion structure is located between two adjacent cross beams 2 and used for preventing contact conduction of different branch heating plates 1.
In a preferred embodiment of the invention, the number of heating plates 1 mounted on the two arms of the lintel 2 and the electrode base 5 is the same or different, preferably the same.
Preferably, the number of the heating plates 1 arranged on the two arms of the lintel 2 and the electrode base 5 is not less than 2.
In a preferred embodiment of the present invention, as shown in fig. 5, at least one through hole is opened at the end of the threaded blind hole for accommodating the electrode in the electrode base 5 for exhausting the gas in the threaded blind hole when the electrode is installed.
In a preferred embodiment of the invention, as shown in fig. 2, the threaded connections comprise bolts and nuts or bolts and nuts, and heat conducting gaskets are mounted on the inner sides of the nuts of the threaded connections on the lintel 2 and the heating plate 1, and on the inner sides of the nuts of the threaded connections on the electrode base 5 and the heating plate 1.
In a preferred embodiment of the invention, the heating plates on the arms of the lintel are independently grouped (connected in parallel) respectively, the heating plates on the arms of the electrode base are independently grouped (connected in parallel) respectively, one end of the heating plate of the 1 st group is connected with one arm of the 1 st lintel, and the other end is connected with one arm of the 1 st electrode base; the other arm of the 1 st electrode base is connected with one end of the 2 nd group of heating plates, and the other end of the 2 nd group of heating plates is connected with one arm of the 2 nd lintel; the other arm of the 2 nd lintel is connected with one end of the 3 rd group heating plate, and the other end of the 3 rd group heating plate is connected with one arm of the 2 nd electrode base; the other arm of the 2 nd electrode base is connected with one end of the 4 th group of heating plates, and the other end of the 4 th group of heating plates is connected with one arm of the 3 rd lintel; the other arm of the 3 rd lintel is connected with one end of the 5 th group of heating plates, and the other end of the 5 th group of heating plates is connected with one arm of the 3 rd electrode base; the other arm of the 3 rd electrode base is connected with one end of the 6 th group of heating plates, the other end of the 6 th group of heating plates is connected with the other arm of the 1 st lintel, namely, the lintel and the electrode base are connected in a staggered manner, the heating plates on the arms of the lintel are respectively connected in parallel, and the heating plates on the arms of the electrode base are respectively connected in parallel.
In a preferred embodiment of the present invention, the insulating unit further comprises an annular insulating member fitted over the columnar projections of the electrode base 5. The annular insulating member may be an integral annular insulating member or a split annular insulating member.
When the annular insulating member is an integral annular insulating member, the integral annular insulating member may be an insulating sleeve I70, one end of the insulating sleeve I70 covers the outer end of the columnar projection of the electrode base 5, and the other end is close to the inner end of the columnar projection. Furthermore, two groups of annular positioning pieces are sleeved outside the insulating sleeve I70, a groove is formed between the two groups of annular positioning pieces, and the distance between the annular positioning pieces is adjusted to enable the groove to be at a proper length and position for positioning the heating mechanism on the furnace lining.
When the annular insulating member is a split type annular insulating member, as shown in fig. 2 and 3, an external thread is formed at the end section of the outer side of the columnar protrusion of the electrode base 5, the split type annular insulating member includes an insulating ring I80, an insulator I120, and a positioning nut I130, which are sleeved on the columnar protrusion from the inner end to the outer end, and are matched with the external thread of the electrode base 5, a pair of positioning rings I110 are installed between the insulating ring I80 and the insulator I120, and between the insulator I120 and the positioning nut I130, and a groove for positioning the heating mechanism on the furnace lining is formed between the positioning rings I110.
Preferably, the groove side of the positioning ring I110 is sleeved with at least one gasket I90, and the gasket I90 is tightly attached to the positioning ring I110 and used for adjusting the length and the position of the groove, so that the heating mechanism is positioned on the furnace lining through the groove. That is, the positioning nut I130, the insulating ring I80 and the insulator I120 are used for defining the position of the positioning ring I110, the positioning ring I110 is used for defining the position of the gasket I90, the gasket I90 is used for adjusting the groove to position the heating mechanism on the furnace lining, and the gasket can be additionally disassembled according to the position requirement, so that the relative position of the heating mechanism on the furnace lining can be flexibly adjusted.
In the invention, the heating plate 1, the lintel 2, the heat conducting gasket, the threaded connecting piece, the electrode base 5 and the positioning nut I130 are all made of C/C composite materials, the working temperature of the materials can resist 2000 ℃, the surface load rate is high, the thermal shock performance is stable, and the strength is improved along with the increase of the temperature.
The insulating sleeve I70, the insulating ring I80, the gasket I90, the positioning ring I110 and the insulator I120 are all made of insulating materials resistant to high temperature of 2000 ℃.
In the present invention, as shown in fig. 11 to 12, the heating unit further includes at least one supporting base 6, as shown in fig. 13 to 15, the supporting base 6 is an arc-shaped flat plate structure, a columnar protrusion is processed on an outer side of the supporting base 6, two arms of the supporting base 6 are provided with a horizontal threaded hole for fixing one end of the heating plate 1, and the supporting base 6 and the electrode base 5 together form a circular ring corresponding to the lintel 2.
The number of the lintels 2 increases correspondingly with the increase of the support bases 6, in correspondence with the total number of electrode bases 5 and support bases 6, the heating plate 1 being perpendicular to the plane of the electrode bases 5 and support bases 6 and the lintels 2. The arrangement of the supporting base 6 and the addition of the corresponding number of the lintels 2 are beneficial to adjusting the heating temperature and the heating efficiency of the heating mechanism.
In the invention, a supporting base 6 is arranged between any adjacent electrode bases 5; the heating plates on the two arms of the lintel 2 are respectively connected in parallel, the heating plates on the two arms of the electrode base 5 are respectively connected in parallel, and the heating plates on the two arms of the support base 6 are respectively connected in parallel. The heating plates on the arms of the lintel are respectively and independently grouped (connected in parallel), the heating plates on the arms of the electrode base are respectively and independently grouped (connected in parallel), the heating plates on the arms of the support base are respectively and independently grouped (connected in parallel), one end of the heating plate of the 1 st group is connected with one arm of the 1 st lintel, the other end of the heating plate of the 1 st group is connected with one end of the heating plate of the 2 nd group, the other end of the heating plate of the 2 nd group is connected with one arm of the 2 nd lintel, the other arm of the 2 nd lintel is connected with one end of the heating plate of the 3 rd group, the other end of the heating plate of the 3 rd group is connected with one end of the heating plate of the 1 st group, the other arm of the 1 st support base is connected with one end of the heating plate of the 4 th group, the other end of the heating plate of the 4 th group is connected with one arm of the 3 rd lintel, the other arm of the 3 rd lintel is connected with, the heating plates of 12 groups are connected with six lintels, three electrode bases and three supporting bases in a triangular electric connection mode in such a circulating connection mode.
In the invention, the insulating unit further comprises an annular insulating member sleeved on the columnar protrusion of the supporting base 6. The annular insulating member may be an integral annular insulating member or a split annular insulating member.
When the annular insulating member is an integral annular insulating member, the integral annular insulating member may be an insulating sleeve II, one end of the insulating sleeve II covers the outer end of the columnar projection of the support base 6, and the other end of the insulating sleeve II is close to the inner end of the columnar projection. Furthermore, two sets of positioning pieces are fixed outside the insulating sleeve II, the two sets of positioning pieces can be rod-shaped positioning pieces which are sleeved on a ring body on the insulating sleeve II or penetrate through the insulating sleeve II to enter the supporting base 6, a groove is formed between the two sets of positioning pieces, and the distance between the positioning pieces is adjusted to enable the groove to be at a proper length and position for positioning the heating mechanism on the furnace lining.
When the annular insulating member is a split type annular insulating member, as shown in fig. 11 and 12, an external thread is provided at the end of the outer side of the columnar protrusion of the support base 6, the split type annular insulating member includes an insulating ring II 81 which is sleeved on the columnar protrusion from the inner end to the outer end, an insulator II 121, and a positioning nut II 131 which is matched with the external thread of the support base 6, a pair of positioning rings II 111 are installed between the insulating ring II 81 and the insulator II 121, and between the insulator II 121 and the positioning nut II 131, and a groove for positioning the heating mechanism on the furnace lining is formed between the positioning rings II 111.
Preferably, a threaded through hole is processed on the outer side external thread of the columnar protrusion of the supporting base 6, a corresponding threaded through hole is formed in the positioning nut II 131, and the position of the positioning nut II 131 on the supporting base 6 is further limited by the threaded through hole formed in the supporting base 6 and the positioning nut II 131 through the limiting bolt 101.
Preferably, the side of the groove of the positioning ring II 111 is sleeved with at least one gasket II 91, and the gasket II 91 is tightly attached to the positioning ring II 111 and used for adjusting the length and the position of the groove so as to position the heating mechanism on the furnace lining through the groove. That is, the positioning nut II 131, the insulating ring II 81 and the insulator II 121 are used for defining the position of the positioning ring II 111, the positioning ring II 111 is used for defining the position of the gasket II 91, the gasket II 91 is used for adjusting the groove to position the heating mechanism on the furnace lining, and the gasket can be additionally detached according to the position requirement, so that the relative position of the heating mechanism on the furnace lining can be flexibly adjusted.
In the invention, the material of the supporting base 6 is C/C composite material resistant to 2000 ℃; the insulating sleeve II, the insulating ring II 81, the gasket II 91, the positioning ring II 111 and the insulator II 121 are all made of high-temperature insulating materials resistant to 2000 ℃.
Examples
Example 1
As shown in fig. 2 and 3, a vertical vacuum furnace heating mechanism comprises 3 electrode bases 5, 3 lintel 2 and 12 heating plates 1, wherein the electrode bases 5 and the lintel 2 respectively enclose a circular ring which corresponds up and down, the electrode bases 5 are of arc-shaped flat plate structures, cylindrical protrusions with the diameter of phi 40mm are processed on the outer sides of the electrode bases, M24 threaded blind holes are formed in the cylindrical protrusions, and two phi 2 through holes are processed at the bottoms of the threaded blind holes and used for discharging gas in mounting holes during electrode mounting.
A cylindrical protruding end of the electrode base 5 is sequentially sleeved with a circular ring insulating ring I80, an insulator I120 and a positioning nut I130, a pair of positioning rings I110 are arranged between the insulating ring I80 and the insulator I120 and between the insulator I120 and the positioning nut I130, and a groove for positioning the heating mechanism on a furnace lining is formed between the positioning rings I110; two washers I90 are sleeved on the side of the groove of the positioning ring I110, and the two washers I90 are respectively attached to the two positioning rings I110 and used for adjusting the length and the position of the groove. The insulating ring I80 and the insulator I120 are phi 41 multiplied by phi 53 circular rings, the positioning ring I110 is a phi 41 multiplied by phi 72 circular ring, the positioning nut I130 is an M36 nut, and the washer I90 is a phi 55 multiplied by phi 72 circular ring.
Two arms of the electrode base 5 and the lintel 2 are respectively provided with four M10 threaded through holes, two sides of the heating plate 1 are respectively provided with 2 phi 12mm through holes, and the two M10 threaded through holes are aligned with the two phi 12mm through holes and then one end of the heating plate is fixed.
Two ends of the lintel 2 are provided with 4M 6 threaded through holes with an included angle of 7.5 degrees, two ends of the positioning plate 3 are provided with 4M 6 threaded through holes with an included angle of 7.5 degrees, and the positioning plate is connected with the lintel 2 through a positioning bolt 4 penetrating through the threaded through holes.
The connection relationship of the components is as follows:
(1) one end of the heating plate of the 1 st group is connected with one arm of the 1 st lintel, and the other end is connected with one arm of the 1 st electrode base; the other arm of the 1 st electrode base is connected with one end of the 2 nd group of heating plates, and the other end of the heating plates is connected with one arm of the 2 nd lintel; the other arm of the 2 nd lintel is connected with one end of the 3 rd group heating plate, and the other end of the heating plate is connected with one arm of the 2 nd electrode base; the other arm of the 2 nd electrode base is connected with one end of the 4 th group of heating plates, and the other end of the heating plate is connected with one arm of the 3 rd lintel; the other arm of the 3 rd lintel is connected with one end of the 5 th group of heating plates, and the other end of the heating plates is connected with one arm of the 3 rd electrode base; the other arm of the 3 rd electrode base is connected with one end of the 6 th group of heating plates, and the other end of the heating plates is connected with the other arm of the 1 st lintel.
(2) The positioning plate 3 is fixed between the adjacent lintels by positioning bolts 4, thereby fixing the relative positions of the three lintels.
(3) An insulating ring I80, a positioning ring I110 and an insulator I120 are sequentially sleeved on the electrode base 5, then two washers I90 are sleeved on the insulator I120, another positioning ring I110 is sleeved on the electrode base 5, and finally a positioning nut I130 is fixed on the electrode base 5.
When in use, the electrode base 5 of the heating mechanism is placed upwards, and the heating mechanism is fixed on a furnace lining by using the relative position of the gasket I90; three-phase electrodes are inserted into the 3 electrode bases 5 and energized, and current passes through the heating plates, and the heating mechanism begins to generate heat.
Example 2
As shown in fig. 11 and 12, a vertical vacuum furnace heating mechanism, including 3 electrode base 5, 3 support bases 6, 6 lintel 2 and 24 hot plate 1, electrode base 5 and support base 6 enclose into a ring that corresponds with lintel 2, electrode base 5 is the arcuation flat structure, the outside is processed there is the cylindric arch that the diameter is phi 40mm, a M24 screw thread blind hole has been seted up in the cylindric arch, two phi 2 through-holes are processed to screw thread blind hole bottom, be used for the discharge of the interior gas of mounting hole when the electrode is installed. The electrode base 5 is sleeved with a phi 41 multiplied by phi 53 insulating sleeve I70 which is used for insulation between the electrode base 5 and the furnace body.
The supporting base 6 is an arc-shaped flat plate structure, cylindrical protrusions with the diameter of phi 40mm are machined on the outer side of the supporting base, and the included angle between the cylindrical protrusions of the adjacent electrode base 5 and the supporting base 6 is 60 degrees. A circular ring insulating ring II 81, an insulator II 121 and a positioning nut II 131 are sequentially sleeved at the cylindrical protruding end of the supporting base 6, a pair of positioning rings II 111 are arranged between the insulating ring II 81 and the insulator II 121 and between the insulator II 121 and the positioning nut II 131, and a groove for positioning the heating mechanism on a furnace lining is formed between the positioning rings II 111; the recess side cover of holding ring II 111 is equipped with two packing rings II 91, and two packing rings II 91 paste two holding rings II 111 respectively for the length and the position of adjustment recess. An M36 external thread is formed at the tail end of the cylindrical protrusion of the electrode base 5 and used for being connected with a positioning nut II 131, an M6 threaded through hole is formed in the external thread, an M6 threaded hole is formed in the position, corresponding to the positioning nut II 131, of the positioning nut II 131, and the position of the positioning nut II 131 on the electrode base 5 is further limited through a limiting bolt 101. The insulating ring II 81 and the insulator II 121 are phi 41 multiplied by phi 53 circular rings, the positioning ring II 111 is a phi 41 multiplied by phi 72 circular ring, the positioning nut II 131 is an M36 nut, and the washer II 91 is a phi 55 multiplied by phi 72 circular ring.
Four M10 screw through holes are respectively arranged on two arms of the electrode base 5, the support base 6 and the lintel 2, two sides of the heating plate 1 are respectively provided with 2 phi 12mm through holes, and one end of the heating plate is fixed after the two M10 screw through holes are aligned with the two phi 12mm through holes.
Two ends of the lintel 2 are provided with 4M 6 threaded through holes with an included angle of 7.5 degrees, two ends of the positioning plate 3 are provided with 4M 6 threaded through holes with an included angle of 7.5 degrees, and the positioning plate is connected with the lintel 2 through a positioning bolt 4 penetrating through the threaded through holes.
The connection relationship of the components is as follows:
(1)2 heating plates are in a group, one end of the heating plate of the 1 st group is connected with one arm of the 1 st lintel, the other end is connected with one arm of the 1 st electrode base, the other arm of the 1 st electrode base is connected with one end of the heating plate of the 2 nd group, the other end of the heating plate of the 2 nd group is connected with one arm of the 2 nd lintel, the other arm of the 2 nd lintel is connected with one end of the heating plate of the 3 rd group, the other end of the heating plate of the 3 rd group is connected with one arm of the 1 st supporting base, the other arm of the 1 st supporting base is connected with one end of the heating plate of the 4 th group, the other end of the heating plate of the 4 th group is connected with one arm of the 3 rd lintel, the other arm of the 3 rd lintel is connected with one end of the heating plate of the 5 th group, the other end of the heating plate of the 5 th group is connected with one arm of the 2 nd electrode base, the circulating connection is carried out, as shown in FIG. 16, wherein R represents a heater plate, and L1, L2, L3 represent three electrode mounts.
(2) The positioning plate 3 is fixed between the adjacent lintels by positioning bolts 4, thereby fixing the relative positions of the three lintels.
(3) Sleeving an insulating sleeve I70 on the electrode base 5; an insulating ring II 81, a positioning ring II 111 and an insulator II 121 are sequentially sleeved on the electrode supporting base 6, then two gaskets II 91 are sleeved on the insulator II 121, another positioning ring II 111 is sleeved on the supporting base 6, and finally a positioning nut II 131 is fixed on the supporting base 6 and is fixed by a limiting bolt 101.
When the heating mechanism is used, the electrode base 5 of the heating mechanism is placed upwards, and the heating mechanism is fixed on a furnace lining by using the relative position of the gasket II 91; three-phase electrodes are inserted into the 3 electrode bases 5 and energized, and current passes through the heating plates, and the heating mechanism begins to generate heat.
The invention has been described in detail with reference to specific embodiments and illustrative examples, but the description is not intended to be construed in a limiting sense. Those skilled in the art will appreciate that various equivalent substitutions, modifications or improvements may be made to the technical solution of the present invention and its embodiments without departing from the spirit and scope of the present invention, which fall within the scope of the present invention. The scope of the invention is defined by the appended claims.
Those skilled in the art will appreciate that those matters not described in detail in the present specification are well known in the art.

Claims (17)

1. A vertical vacuum furnace heating mechanism is characterized by comprising a heating unit and an insulating unit, wherein the heating unit comprises a heating plate (1), three lintels (2) and three electrode bases (5), the electrode bases (5) and the lintels (2) respectively enclose a circular ring which corresponds up and down, and two ends of the heating plate (1) are fixed on the two circular rings;
the electrode base (5) is of an arc-shaped flat plate structure, columnar protrusions are machined on the outer side of the electrode base, and two arms of the electrode base (5) are provided with transverse threaded holes for fixing one end of the heating plate (1); a threaded blind hole is formed in the outer side of the columnar protrusion of the electrode base (5) along the axial direction, corresponds to the external thread of the electrode and is used for fixing the electrode and the electrode base (5) so that three-phase electrodes are respectively inserted into the three electrode bases;
the lintel (2) is of an arc-shaped flat plate structure, two arms of the arc-shaped flat plate structure are provided with transverse threaded through holes for fixing the other end of the heating plate (1), and the plate surface of the lintel (2) is provided with longitudinal threaded through holes perpendicular to the plate surface and used for connecting the adjacent lintel (2);
threaded through holes are formed in the two ends of the heating plate (1), the heating plate is connected to the electrode base (5) and the lintel (2) through threaded connecting pieces, and the fixed heating plate (1) is perpendicular to the plane where the electrode base (5) and the lintel (2) are located;
the insulation unit comprises a positioning plate (3), the positioning plate (3) is of an arc-shaped flat plate structure, through holes are formed in two ends of the positioning plate (3), the through holes correspond to longitudinal threaded through holes perpendicular to the plate surfaces on two adjacent arms of the adjacent lintel (2), and the positioning plate (3) is arranged on the lintel (2) and fixedly connected with the two adjacent lintel (2) through a threaded connecting piece.
2. The vertical vacuum furnace heating mechanism according to claim 1, characterized in that the installation number of the two upper heating plates (1) of the lintel (2) and the electrode base (5) is the same or different; and/or
The mounting quantity of the heating plates (1) on the two arms of the lintel (2) and the electrode base (5) is not less than 2; and/or
At least one through hole is arranged at the tail end of the threaded blind hole for accommodating the electrode in the electrode base (5).
3. The vertical vacuum furnace heating mechanism according to claim 1, characterized in that a radial convex structure is processed in the middle of the positioning plate (3), and the radial convex structure is positioned between two adjacent lintels (2).
4. The vertical vacuum furnace heating mechanism according to claim 1, wherein the threaded connection comprises a bolt and a nut or a bolt and a nut, and heat conducting gaskets are mounted on the inner sides of the nuts of the threaded connection on the lintel (2) and the heating plate (1) and the inner sides of the nuts of the threaded connection on the electrode base (5) and the heating plate (1).
5. The vertical vacuum furnace heating mechanism according to claim 1, wherein the heating plates (1) on the arms of the lintel (2) are respectively connected in parallel, and the heating plates (1) on the arms of the electrode base (5) are respectively connected in parallel and then electrically connected to form a passage.
6. The vertical vacuum furnace heating mechanism according to claim 1, wherein the insulating unit further comprises an annular insulating member fitted over the columnar projections of the electrode base (5).
7. The vertical vacuum furnace heating mechanism according to claim 6, wherein the annular insulating member is an integral annular insulating member, the integral annular insulating member is an insulating sleeve I (70), one end of the insulating sleeve I (70) covers the outer end of the columnar projection of the electrode base (5), and the other end of the insulating sleeve I (70) is close to the inner end of the columnar projection;
preferably, at least two groups of annular positioning pieces are sleeved outside the insulating sleeve I (70), a groove is formed between the two groups of annular positioning pieces, and the distance between the annular positioning pieces is adjusted to enable the groove to be at a proper length and position for positioning the heating mechanism on the furnace lining.
8. The heating mechanism of the vertical vacuum furnace according to claim 6, wherein the annular insulator is a split annular insulator, the split annular insulator comprises an insulating ring I (80) sleeved on the columnar protrusion from the inner end to the outer end, an insulator I (120), and a positioning nut I (130) matched with the external thread of the electrode base (5), a pair of positioning rings I (110) are arranged between the insulating ring I (80) and the insulator I (120) and between the insulator I (120) and the positioning nut I (130), and a groove for positioning the heating mechanism on the furnace lining is formed between the positioning rings I (110).
9. The vertical vacuum furnace heating mechanism according to claim 8, wherein the groove side of the positioning ring I (110) is sleeved with at least one gasket I (90), and the gasket I (90) is tightly attached to the positioning ring I (110) and used for adjusting the length and the position of the groove so as to position the heating mechanism on the furnace lining through the groove.
10. The vertical vacuum furnace heating mechanism according to claim 9, wherein the heating plate (1), the lintel (2), the electrode base (5) or the positioning nut I (130) are all made of C/C composite materials resistant to 2000 ℃; and/or
The insulating sleeve I (70), the insulating ring I (80), the gasket I (90), the positioning ring I (110) and the insulator I (120) are all made of insulating materials resistant to 2000 ℃.
11. The vertical vacuum furnace heating mechanism according to one of the claims 1 to 10, characterized in that the heating unit further comprises at least one supporting base (6), the supporting base (6) is an arc-shaped flat plate structure, a columnar protrusion is processed on the outer side of the supporting base, two arms of the supporting base (6) are provided with transverse threaded holes for fixing one end of the heating plate (1), and the supporting base (6) and the electrode base (5) jointly form a circular ring corresponding to the lintel (2);
the number of the lintel (2) is consistent with the total number of the electrode bases (5) and the supporting bases (6), and the heating plate (1) is vertical to the electrode bases (5) and the supporting bases (6) and the plane where the lintel (2) is located.
12. The vertical vacuum furnace heating mechanism according to claim 11, wherein the heating plates on the arms of the lintel (2) are respectively connected in parallel, the heating plates on the arms of the electrode base (5) are respectively connected in parallel, and the heating plates on the arms of the support base (6) are respectively connected in parallel and then electrically connected to form a passage.
13. The vertical vacuum furnace heating mechanism according to claim 11, wherein the number of the supporting bases (6) is three, and one supporting base (6) is arranged between any adjacent electrode bases (5).
14. The vertical vacuum furnace heating mechanism according to claim 11, wherein the insulating unit further comprises an annular insulating member fitted over the columnar projections of the supporting base (6).
15. The vertical vacuum furnace heating mechanism according to claim 14, wherein the annular insulating member is an integral annular insulating member, the integral annular insulating member is an insulating sleeve II, one end of the insulating sleeve II covers the outer end of the columnar protrusion of the supporting base (6), and the other end of the insulating sleeve II is close to the inner end of the columnar protrusion;
preferably, two sets of positioning pieces are fixed outside the insulating sleeve II, the two sets of positioning pieces can be ring bodies sleeved on the insulating sleeve II or rod-shaped positioning pieces penetrating through the insulating sleeve II and entering the supporting base (6), a groove is formed between the two sets of positioning pieces, and the distance between the positioning pieces is adjusted to enable the groove to be at a proper length and position for positioning the heating mechanism on the furnace lining.
16. The heating mechanism of the vertical vacuum furnace as claimed in claim 14, wherein the annular insulator is a split annular insulator, the split annular insulator comprises an insulating ring II (81) sleeved on the columnar protrusion from the inner end to the outer end, an insulator II (121), and a positioning nut II (131) matched with the external thread of the supporting base (6), a pair of positioning rings II (111) are arranged between the insulating ring II (81) and the insulator II (121) and between the insulator II (121) and the positioning nut II (131), and a groove for positioning the heating mechanism on the furnace lining is formed between the positioning rings II (111).
17. The heating mechanism of the vertical vacuum furnace as claimed in claim 16, wherein the external thread on the outer side of the columnar protrusion of the supporting base (6) is provided with a threaded through hole, the positioning nut II (131) is provided with a corresponding threaded through hole, and the limiting bolt (101) penetrates through the threaded through holes on the supporting base (6) and the positioning nut II (131) to fixedly connect the two; and/or
At least one gasket II (91) is sleeved on the side of the groove of the positioning ring II (111), the gasket II (91) is tightly attached to the positioning ring II (111) and used for adjusting the length and the position of the groove, and the heating mechanism is positioned on the furnace lining through the groove; and/or
The supporting base (6) is made of C/C composite material resistant to 2000 ℃; the insulating sleeve II, the insulating ring II (81), the gasket II (91), the positioning ring II (111) and the insulator II (121) are all made of insulating materials resistant to 2000 ℃.
CN202010718038.8A 2020-07-23 2020-07-23 Vertical vacuum furnace heating mechanism Pending CN112063993A (en)

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Application publication date: 20201211