CN112058796A - Graphite boat cleaning pretreatment device - Google Patents
Graphite boat cleaning pretreatment device Download PDFInfo
- Publication number
- CN112058796A CN112058796A CN202010890544.5A CN202010890544A CN112058796A CN 112058796 A CN112058796 A CN 112058796A CN 202010890544 A CN202010890544 A CN 202010890544A CN 112058796 A CN112058796 A CN 112058796A
- Authority
- CN
- China
- Prior art keywords
- graphite boat
- groove
- pipe
- inner groove
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 42
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 27
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 27
- 239000010439 graphite Substances 0.000 title claims abstract description 27
- 239000007788 liquid Substances 0.000 claims abstract description 20
- 230000005587 bubbling Effects 0.000 claims abstract description 19
- 238000002347 injection Methods 0.000 claims description 4
- 239000007924 injection Substances 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract description 12
- 230000000694 effects Effects 0.000 abstract description 4
- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract description 2
- 238000009210 therapy by ultrasound Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000002253 acid Substances 0.000 description 4
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000007599 discharging Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning In General (AREA)
Abstract
The invention provides a graphite boat cleaning pretreatment device which is characterized by comprising an outer groove, an inner groove and a cleaning unit, wherein the inner groove is fixedly arranged in the outer groove; the flow equalizing plate is arranged at the bottom of the inner groove, the bubbling pipe is arranged below the flow equalizing plate, one end of the circulating pipe penetrates through the ultrasonic vibration box and is inserted into the bottom of the inner groove and is positioned below the bubbling pipe, and the other end of the circulating pipe is communicated with the outer groove, so that the cleaning liquid in the outer groove is communicated with the inner groove. This device is through before the graphite boat washs, increases the ultrasonic treatment measure, partly got rid of earlier graphite boat surface adnexed silicon nitride to reduce the quantity and the emission of hydrofluoric acid in the graphite boat cleaning process, thereby reach the effect that reduces industry hydrofluoric acid consumption and discharge.
Description
Technical Field
The invention belongs to the field of solar cell manufacturing, and particularly relates to a graphite boat cleaning pretreatment device.
Background
With the development of society, energy and environmental protection become two major inescapable topics. Solar cells, as one of the cleanest energy sources at present, still require the consumption and discharge of a large amount of chemicals during their manufacturing process. In the manufacturing process of the solar cell, hydrofluoric acid consumed by cleaning the graphite boat occupies nearly half of the amount in the whole production and manufacturing process, so that the acid consumption of the graphite boat is reduced, the emission of waste acid can be reduced inevitably, and the waste liquid treatment cost and the environmental protection pressure of enterprises are reduced.
Disclosure of Invention
In view of the above, the invention provides a graphite boat cleaning pretreatment device, which adds an ultrasonic treatment measure before cleaning a graphite boat to remove a part of silicon nitride attached to the surface of the graphite boat, thereby reducing the consumption and emission of hydrofluoric acid in the graphite boat cleaning process, and achieving the effect of reducing the consumption and emission of industrial hydrofluoric acid.
The specific technical scheme of the invention is as follows:
a graphite boat cleaning pretreatment device is characterized by comprising an outer groove, an inner groove and a cleaning unit, wherein the inner groove is fixedly arranged in the outer groove, the cleaning unit comprises an ultrasonic vibration box, a bubbling pipe, a circulating pipe and a flow equalizing plate, and the ultrasonic vibration box is arranged at the bottom of the outer groove and is positioned between the inner groove and the outer groove; the flow equalizing plate is arranged at the bottom of the inner groove, the bubbling pipe is arranged below the flow equalizing plate, one end of the circulating pipe penetrates through the ultrasonic vibration box and is inserted into the bottom of the inner groove and is positioned below the bubbling pipe, and the other end of the circulating pipe is communicated with the outer groove, so that the cleaning liquid in the outer groove is communicated with the inner groove.
Furthermore, the plurality of bubbling tubes are uniformly and regularly arranged at the bottom of the inner groove.
Furthermore, the circulating pipe is provided with a circulating pump which provides power for the circulating exchange of the cleaning liquid of the outer tank and the inner tank.
Further, the device also comprises a liquid discharge pipe and a water injection pipe which are respectively arranged on the side wall of the outer groove.
According to the graphite boat cleaning pretreatment device, through the combined design of ultrasound, bubbling and liquid circulation, the removal of surface attachments of the graphite boat can be realized before the graphite boat is cleaned, the pretreatment is performed on the subsequent acid tank cleaning, the consumption and the discharge of hydrofluoric acid in the acid tank are effectively reduced, the overall cleaning time of the graphite boat is shortened, and the time and the economic cost in production are greatly saved.
Additional aspects and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
FIG. 1 is a schematic structural view of a graphite boat cleaning pretreatment apparatus according to the present invention;
wherein, 1 is an outer groove, 2 is an inner groove, 3 is an ultrasonic vibration box, 4 is a bubbling pipe, 5 is a circulating pipe, 6 is a uniform flow plate, 7 is a circulating pump, 8 is a liquid discharge pipe, and 9 is a water injection pipe.
Detailed Description
In the description of the present invention, it is to be understood that the terms "upper", "lower", "left", "right", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
Referring to fig. 1, an embodiment of the graphite boat cleaning pretreatment device comprises an outer tank 1, an inner tank 2 and a cleaning unit, wherein cleaning liquid is filled in the inner tank 2 and the outer tank 1, the inner tank 2 is fixedly arranged in the outer tank 1, the inner tank 2 is used for placing a graphite boat to be cleaned, the cleaning unit comprises an ultrasonic vibration box 3, a bubbling pipe 4, a circulating pipe 5 and a flow equalizing plate 6, the ultrasonic vibration box 3 is arranged at the bottom of the outer tank 1 and is positioned between the inner tank 2 and the outer tank 1, and the top of the ultrasonic vibration box is directly connected to the bottom of the inner tank 2 and is used for generating ultrasonic waves to enable the cleaning liquid to generate high-frequency vibration and remove attachments on the surface of the graphite boat in the inner tank 2.
Preferably, the flow equalizing plate 6 is disposed at the bottom of the inner tank 2, the bubble tubes 3 are disposed below the flow equalizing plate 6, and the plurality of bubble tubes 4 are uniformly and regularly arranged at the bottom of the inner tank 2. One end of the circulating pipe 5 penetrates through the ultrasonic vibration box 3 and is inserted into the bottom of the inner groove 2 and is positioned below the bubbling pipe 4, the other end of the circulating pipe 5 is communicated with the outer groove 1, so that the cleaning liquid in the outer groove 1 is communicated with the inner groove 2, and the circulating pipe 5 is provided with a circulating pump 7 which provides power for the circulating exchange of the cleaning liquid in the outer groove 1 and the inner groove 2. The bubbling pipe 4 is used for uniformly inputting CDA airflow to the bottom of the inner groove 2 in a bubbling mode, liquid bubbling is increased to improve the cleaning effect, the circulating pipeline 5 penetrates through the ultrasonic vibration box 3 to be communicated with the outer groove 1 and the inner groove 2, cleaning media are enabled to generate liquidity, the cleaning effect is further improved, and the flow equalizing plate 6 is connected to the bottom of the inner groove 2 and is located above the bubbling pipe 4 and the circulating pipeline 5 and used for uniformly dispersing gas and liquid which are led from the bubbling pipe 4 and the circulating pipeline 5 in the inner groove 2.
Preferably, the graphite boat cleaning pretreatment device further comprises a liquid discharge pipe 8 and a water injection pipe 9, which are respectively arranged on the side wall of the outer tank 1 and are respectively used for discharging the cleaning liquid of the inner tank and the cleaning liquid of the outer tank and injecting new cleaning liquid inwards.
While specific embodiments of the invention have been described in detail with reference to exemplary embodiments thereof, it should be understood that numerous other modifications and embodiments can be devised by those skilled in the art that will fall within the spirit and scope of the principles of this invention. In particular, reasonable variations and modifications are possible in the component parts and/or arrangements of the subject combination arrangement within the scope of the foregoing disclosure, the drawings and the appended claims without departing from the spirit of the invention. Except variations and modifications in the component parts and/or arrangements, the scope of which is defined by the appended claims and equivalents thereof.
Claims (4)
1. A graphite boat cleaning pretreatment device is characterized by comprising an outer groove, an inner groove and a cleaning unit, wherein the inner groove is fixedly arranged in the outer groove, the cleaning unit comprises an ultrasonic vibration box, a bubbling pipe, a circulating pipe and a flow equalizing plate, and the ultrasonic vibration box is arranged at the bottom of the outer groove and is positioned between the inner groove and the outer groove; the flow equalizing plate is arranged at the bottom of the inner groove, the bubbling pipe is arranged below the flow equalizing plate, one end of the circulating pipe penetrates through the ultrasonic vibration box and is inserted into the bottom of the inner groove and is positioned below the bubbling pipe, and the other end of the circulating pipe is communicated with the outer groove, so that the cleaning liquid in the outer groove is communicated with the inner groove.
2. The graphite boat cleaning pretreatment apparatus of claim 1, wherein the bubbling tubes are uniformly and regularly arranged at the bottom of the inner tank.
3. The graphite boat cleaning pretreatment apparatus according to claim 1, wherein a circulation pump is provided on the circulation pipe to provide power for circulation exchange of the cleaning liquid in the outer tank and the inner tank.
4. The graphite boat cleaning pretreatment device according to claim 1, further comprising a liquid discharge pipe and a water injection pipe which are respectively provided on the side wall of the outer tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010890544.5A CN112058796A (en) | 2020-08-29 | 2020-08-29 | Graphite boat cleaning pretreatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010890544.5A CN112058796A (en) | 2020-08-29 | 2020-08-29 | Graphite boat cleaning pretreatment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112058796A true CN112058796A (en) | 2020-12-11 |
Family
ID=73659787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010890544.5A Pending CN112058796A (en) | 2020-08-29 | 2020-08-29 | Graphite boat cleaning pretreatment device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112058796A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113828584A (en) * | 2021-09-28 | 2021-12-24 | 通威太阳能(眉山)有限公司 | Graphite boat cleaning method and equipment |
| CN115228836A (en) * | 2022-06-30 | 2022-10-25 | 上海图灵智算量子科技有限公司 | Wafer cleaning device |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2888822B1 (en) * | 1998-03-31 | 1999-05-10 | 株式会社カイジョー | Method and apparatus for cleaning and drying a cleaning object |
| JP2003053285A (en) * | 2001-08-20 | 2003-02-25 | Speedfam Clean System Co Ltd | Method and apparatus for cleaning drum substrate for photosensor |
| CN102319694A (en) * | 2011-07-11 | 2012-01-18 | 苏州赤诚洗净科技有限公司 | Isolated conduction ultrasonic cleaning device |
| CN204912166U (en) * | 2015-06-29 | 2015-12-30 | 徐州同鑫光电科技股份有限公司 | A interior extrinsic cycle nitration mixture washing tank for sapphire and cleaning equipment thereof |
| CN110813888A (en) * | 2019-10-30 | 2020-02-21 | 苏州晶洲装备科技有限公司 | Mask plate cleaning device and mask plate cleaning method |
| CN211150580U (en) * | 2019-12-31 | 2020-07-31 | 中威新能源(成都)有限公司 | Device for cleaning silicon wafer by using ozone-containing alkaline solution |
| CN212469080U (en) * | 2020-08-29 | 2021-02-05 | 江苏润阳悦达光伏科技有限公司 | Graphite boat cleaning pretreatment device |
-
2020
- 2020-08-29 CN CN202010890544.5A patent/CN112058796A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2888822B1 (en) * | 1998-03-31 | 1999-05-10 | 株式会社カイジョー | Method and apparatus for cleaning and drying a cleaning object |
| JP2003053285A (en) * | 2001-08-20 | 2003-02-25 | Speedfam Clean System Co Ltd | Method and apparatus for cleaning drum substrate for photosensor |
| CN102319694A (en) * | 2011-07-11 | 2012-01-18 | 苏州赤诚洗净科技有限公司 | Isolated conduction ultrasonic cleaning device |
| CN204912166U (en) * | 2015-06-29 | 2015-12-30 | 徐州同鑫光电科技股份有限公司 | A interior extrinsic cycle nitration mixture washing tank for sapphire and cleaning equipment thereof |
| CN110813888A (en) * | 2019-10-30 | 2020-02-21 | 苏州晶洲装备科技有限公司 | Mask plate cleaning device and mask plate cleaning method |
| CN211150580U (en) * | 2019-12-31 | 2020-07-31 | 中威新能源(成都)有限公司 | Device for cleaning silicon wafer by using ozone-containing alkaline solution |
| CN212469080U (en) * | 2020-08-29 | 2021-02-05 | 江苏润阳悦达光伏科技有限公司 | Graphite boat cleaning pretreatment device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113828584A (en) * | 2021-09-28 | 2021-12-24 | 通威太阳能(眉山)有限公司 | Graphite boat cleaning method and equipment |
| CN115228836A (en) * | 2022-06-30 | 2022-10-25 | 上海图灵智算量子科技有限公司 | Wafer cleaning device |
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