CN112051307A - Multi-sensor array based on quartz crystal microbalance and preparation method thereof - Google Patents
Multi-sensor array based on quartz crystal microbalance and preparation method thereof Download PDFInfo
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- CN112051307A CN112051307A CN202010851263.9A CN202010851263A CN112051307A CN 112051307 A CN112051307 A CN 112051307A CN 202010851263 A CN202010851263 A CN 202010851263A CN 112051307 A CN112051307 A CN 112051307A
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- 238000003380 quartz crystal microbalance Methods 0.000 title claims abstract description 18
- 238000002360 preparation method Methods 0.000 title abstract description 14
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 33
- 239000013078 crystal Substances 0.000 claims abstract description 29
- 239000000463 material Substances 0.000 claims abstract description 24
- 238000001259 photo etching Methods 0.000 claims abstract description 19
- 238000000151 deposition Methods 0.000 claims abstract description 10
- 239000007772 electrode material Substances 0.000 claims abstract description 6
- 239000010453 quartz Substances 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 10
- 238000004140 cleaning Methods 0.000 claims description 10
- 238000004528 spin coating Methods 0.000 claims description 9
- 238000005566 electron beam evaporation Methods 0.000 claims description 8
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 238000005516 engineering process Methods 0.000 claims description 3
- 238000000206 photolithography Methods 0.000 claims 2
- 238000001514 detection method Methods 0.000 abstract description 15
- 239000007789 gas Substances 0.000 description 9
- 238000003491 array Methods 0.000 description 7
- 238000011161 development Methods 0.000 description 5
- 230000010355 oscillation Effects 0.000 description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 244000052616 bacterial pathogen Species 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 201000010099 disease Diseases 0.000 description 2
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 2
- 230000036541 health Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
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- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
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Priority Applications (1)
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CN202010851263.9A CN112051307B (en) | 2020-08-21 | 2020-08-21 | Multi-sensor array based on quartz crystal microbalance and preparation method thereof |
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CN202010851263.9A CN112051307B (en) | 2020-08-21 | 2020-08-21 | Multi-sensor array based on quartz crystal microbalance and preparation method thereof |
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CN112051307A true CN112051307A (en) | 2020-12-08 |
CN112051307B CN112051307B (en) | 2022-04-22 |
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Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050023138A1 (en) * | 2003-03-09 | 2005-02-03 | Hon Hai Precision Industry Co., Ltd. | Gas sensor with sensing particle receptacles |
CN101231258A (en) * | 2008-02-26 | 2008-07-30 | 北京交通大学 | Organic gas-sensitive sensor |
CN102608203A (en) * | 2012-02-16 | 2012-07-25 | 北京中科飞鸿科技有限公司 | Preparation method of surface acoustic wave sensor chip sensitive membrane for gas detection |
CN104280343A (en) * | 2013-07-09 | 2015-01-14 | 青岛中一监测有限公司 | Gas sensitive element for environment monitoring sensor and environment monitoring sensor |
CN107290241A (en) * | 2017-07-31 | 2017-10-24 | 成都信息工程大学 | A kind of QCM humidity sensors and preparation method thereof |
CN107345829A (en) * | 2017-06-12 | 2017-11-14 | 杭州光铭光电科技有限公司 | A kind of monolithic array formula quartz crystal microbalance sensor and preparation method thereof |
CN108414581A (en) * | 2017-02-09 | 2018-08-17 | 北京市劳动保护科学研究所 | A kind of mini type multiple dimension sensor and manufacturing method |
CN109580723A (en) * | 2018-10-23 | 2019-04-05 | 华中科技大学 | A kind of preparation method and product of flexible humidity sensor |
-
2020
- 2020-08-21 CN CN202010851263.9A patent/CN112051307B/en active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050023138A1 (en) * | 2003-03-09 | 2005-02-03 | Hon Hai Precision Industry Co., Ltd. | Gas sensor with sensing particle receptacles |
CN101231258A (en) * | 2008-02-26 | 2008-07-30 | 北京交通大学 | Organic gas-sensitive sensor |
CN102608203A (en) * | 2012-02-16 | 2012-07-25 | 北京中科飞鸿科技有限公司 | Preparation method of surface acoustic wave sensor chip sensitive membrane for gas detection |
CN104280343A (en) * | 2013-07-09 | 2015-01-14 | 青岛中一监测有限公司 | Gas sensitive element for environment monitoring sensor and environment monitoring sensor |
CN108414581A (en) * | 2017-02-09 | 2018-08-17 | 北京市劳动保护科学研究所 | A kind of mini type multiple dimension sensor and manufacturing method |
CN107345829A (en) * | 2017-06-12 | 2017-11-14 | 杭州光铭光电科技有限公司 | A kind of monolithic array formula quartz crystal microbalance sensor and preparation method thereof |
CN107290241A (en) * | 2017-07-31 | 2017-10-24 | 成都信息工程大学 | A kind of QCM humidity sensors and preparation method thereof |
CN109580723A (en) * | 2018-10-23 | 2019-04-05 | 华中科技大学 | A kind of preparation method and product of flexible humidity sensor |
Non-Patent Citations (5)
Title |
---|
TETSU TATSUMA: "Multichannel Quartz Crystal Microbalance", 《AMERICAN CHEMICAL SOCIETY》 * |
廖广兰: "反应离子刻蚀加工工艺技术的研究", 《半导体技术》 * |
肖国玲: "《微电子制造工艺技术》", 30 September 2008 * |
谢小川: "基于离子束刻蚀技术的反台面型MOCM研究", 《中国优秀博硕士学位论文全文数据库(硕士)信息科技辑》 * |
郭睿: "丙酮传感器的设计、制备及敏感性能研究", 《中国优秀硕士学位论文全文数据库 信息科技辑》 * |
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CN112051307B (en) | 2022-04-22 |
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Effective date of registration: 20240703 Address after: F2A215-11, 2nd Floor, Phase I, Wuhan Intelligent Equipment Park, No. 8 Gounan Road, Donghu New Technology Development Zone, Wuhan City, Hubei Province 430075 Patentee after: Wuhan Sibo Micro Intelligent Technology Co.,Ltd. Country or region after: China Address before: 430206 No. 8, Ligou South Road, Donghu New Technology Development Zone, Wuhan City, Hubei Province Patentee before: WUHAN INTELLIGENT EQUIPMENT INDUSTRIAL INSTITUTE Co.,Ltd. Country or region before: China |
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